Probe station for testing antenna and method for operation thereof

Abstract

A probe station according to one embodiment of the present invention includes a chuck to which a test target antenna is fixed, a turntable that supports the chuck from below and rotates around a vertical axis, a probe that applies a test signal to the test target antenna, a receiving antenna that detects an antenna signal emitted from the test target antenna upon the application of the test signal, a measuring instrument that stores the signal detected through the receiving antenna, a base and turntable on which the turntable and the receiving antenna are arranged, and a controller that controls the operating state of the probe and the receiving antenna. At this time, the chuck includes a support surface to which the test target antenna is fixed, and the support surface is aligned parallel to the vertical axis.

Description

Technology Field

[0001] The present invention relates to a probe station for testing an antenna and a method of operating the same. Background Technology

[0002] With the recent rapid advancement of wireless communication technology, there is a growing demand for antennas capable of operating across various frequency bands. As core components of communication devices, these antennas significantly impact transmission and reception performance. Accurate and precise testing is essential to evaluate and optimize antenna performance.

[0003] Meanwhile, in this regard, Korean Patent Publication No. 10-2024-0043705 (Title of Invention: Semiconductor Device and Method for Improved Antenna Testing) discloses a semiconductor device for testing an antenna by placing an AiP (antenna-in-package) module at the bottom of the test antenna.

[0004] However, this conventional technology has a problem in that, since the receiving antenna must be located at a distance greater than the far-field distance in the vertical direction from the chuck to the measuring antenna, the far-field distance increases as the size of the measuring antenna increases, and spatial constraints arise in positioning the receiving antenna.

[0005] In addition, when measuring radiation patterns, the receiving antenna rotates around the measuring antenna. Since the range of movement of the receiving antenna is large, the cable connected between the VNAs (Vector Network Analyzers) moves significantly, which damages the antenna calibration and causes the measurement results to become inaccurate.

[0006] In addition, for D-band or G-band antenna measurements, additional external modules are utilized, but there is a problem in that it is impossible to use external modules without modifying the measurement equipment. The problem to be solved

[0007] The present invention aims to solve the problems of the aforementioned prior art by providing a probe station and a method of operation thereof, wherein the chuck of the probe station is fixed vertically and power is fed in a manner in which the probe probe probes the antenna from the side, thereby allowing the radiation surface of the antenna to face the side, so that the receiving antenna can be positioned further than the far-field distance to match different measuring antennas.

[0008] However, the technical problems that this embodiment aims to solve are not limited to the technical problems described above, and other technical problems may exist. means of solving the problem

[0009] A probe station for testing an antenna according to one aspect of the present invention for solving the aforementioned technical problem comprises a chuck to which the antenna to be tested is fixed, a turntable that supports the chuck from below and rotates around a vertical axis, a probe that applies a test signal to the antenna to be tested, a receiving antenna that detects an antenna signal emitted from the antenna to be tested in accordance with the application of the test signal, a measuring instrument that stores the signal detected through the receiving antenna, a base and turntable on which the turntable and the receiving antenna are arranged, and a controller that controls the operating state of the probe and the receiving antenna. At this time, the chuck includes a support surface to which the antenna to be tested is fixed, and the support surface is aligned parallel to the vertical axis.

[0010] A method of operating a probe station according to another aspect of the present invention includes the steps of: (a) applying a test signal to a test target antenna through a probe; and (b) storing a signal detected through a receiving antenna in a measuring instrument. Effects of the invention

[0011] According to one embodiment of the present invention, a probe station can be provided in which the chuck of the probe station is fixed vertically and the probe is fed in a manner such that it probes the antenna from the side, thereby allowing the radiation surface of the antenna to face the side, so that the receiving antenna can be positioned further than the far-field distance to match different measuring antennas.

[0012] In addition, the present invention utilizes a structure that minimizes the movement of the cable connected to the probe when a vertically fixed chuck rotates 360°, thereby enabling the calibration to be continuously maintained.

[0013] In addition, the software for operating the probe station of the present invention is equipped with a function that automatically measures the radiation pattern and saves the data when the contact position of the probe is set, thereby allowing the radiation pattern to be measured easily.

[0014] In addition, the probe station of the present invention can provide a probe station capable of measuring not only the radiation pattern of an antenna but also the radiation pattern of a lens antenna combined with an antenna, IC performance measurement, and characteristics of system modules such as AoP (Antenna-on-Package). Brief explanation of the drawing

[0015] FIG. 1 is a perspective view of a probe station according to one embodiment of the present invention. FIG. 2 is a perspective view of a chuck according to one embodiment of the present invention. FIG. 3 is a perspective view of an antenna fixing jig according to one embodiment of the present invention. FIG. 4 is a perspective view of an antenna fixing jig according to another embodiment of the present invention. FIG. 5 is a drawing for explaining a chuck driving unit according to an embodiment of the present invention. Figure 6 is an enlarged view of A in Figure 1. FIG. 7 is a partial enlarged view of a probe station according to one embodiment of the present invention. FIGS. 8 and 9 are drawings showing examples of a test subject antenna according to the radiating direction according to an embodiment of the present invention. FIGS. 10 and FIGS. 11 are drawings for illustrating a contact substrate according to an embodiment of the present invention. FIG. 12 is a drawing for explaining a calibration substrate according to one embodiment of the present invention. FIG. 13 is a perspective view of a probe station according to an additional embodiment of the present invention. FIG. 14 is a flowchart of the operation method of a probe station according to one embodiment of the present invention. Specific details for implementing the invention

[0016] Embodiments of the present invention are described below with reference to the attached drawings so that those skilled in the art can easily implement the invention. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. Furthermore, in order to clearly explain the present invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification are denoted by similar reference numerals.

[0017] Throughout the specification, when a part is described as being "connected" to another part, this includes not only cases where they are "directly connected," but also cases where they are "electrically connected" with other components interposed between them. Furthermore, when a part is described as "including" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components.

[0018] In this specification, the term "part" includes a unit realized by hardware, a unit realized by software, and a unit realized using both. Additionally, one unit may be realized using two or more pieces of hardware, and two or more units may be realized by one piece of hardware. Meanwhile, "part" is not limited to software or hardware, and "part" may be configured to reside in an addressable storage medium or configured to run on one or more processors. Accordingly, as an example, "part" includes components such as software components, object-oriented software components, class components, and task components, as well as processes, functions, attributes, procedures, subroutines, segments of program code, drivers, firmware, microcode, circuits, data, databases, data structures, tables, arrays, and variables. The functions provided within the components and "parts" may be combined into a smaller number of components and "parts" or further separated into additional components and "parts." In addition, the components and '~parts' may be implemented to play one or more CPUs within the device or secure multimedia card.

[0019] The present invention relates to a probe station for testing an antenna and a method of operating the same.

[0020] Hereinafter, an embodiment of the present invention will be described in detail with reference to the attached drawings.

[0021] FIG. 1 is a perspective view of a probe station according to one embodiment of the present invention, FIG. 2 is a perspective view of a chuck according to one embodiment of the present invention, FIG. 3 is a perspective view of an antenna fixing jig according to one embodiment of the present invention, FIG. 4 is a perspective view of an antenna fixing jig according to another embodiment of the present invention, FIG. 5 is a drawing for explaining a chuck driving unit according to one embodiment of the present invention, FIG. 6 is an enlarged view of A in FIG. 1, FIG. 7 is a partial enlarged view of a probe station according to one embodiment of the present invention, FIG. 8 and FIG. 9 are drawings showing examples of a test target antenna according to a radiating direction according to one embodiment of the present invention, FIG. 10 and FIG. 11 are drawings for explaining a contact substrate according to one embodiment of the present invention.

[0022] Referring to FIG. 1, the probe station (10) includes a chuck (100), a turntable (200), a probe (300), a receiving antenna (400), a measuring instrument (500), a base (610), and a controller (700).

[0023] Referring to FIG. 2, the chuck (100) has the antenna (131) to be tested fixed thereto. Additionally, the chuck (100) includes a support surface (101) to which the antenna (131) to be tested is fixed, and the support surface (101) is aligned parallel to the vertical axis.

[0024] The chuck (100) may include a chuck body (110) formed in a planar shape and aligned parallel to a vertical axis, and an antenna fixing jig (120) detachably coupled to the chuck body (110). At this time, the antenna fixing jig (120) may be made of Rohacell, Roacryl, acrylic, plastic, or styrofoam, but the material of the antenna fixing jig (120) is not limited to these and various materials may be used. For reference, Roacryl is a product of Evonik, the manufacturer of Rohacell, and is a material having a dielectric constant almost identical to that of Rohacell (dielectric constant: 1).

[0025] For example, as illustrated in FIG. 2, the chuck body (110) is formed in a plate shape and has a hollow formed in the center so that an antenna fixing jig (120) can be inserted therein, and the antenna fixing jig (120) can be inserted and fixed in the formed hollow.

[0026] Referring to FIG. 3, the antenna fixing jig (120) may include an antenna mounting groove (121), a contact substrate mounting groove (122), and a calibration substrate mounting groove (123).

[0027] The antenna mounting groove (121) may be formed to mount the antenna (131) to be tested. For example, the antenna mounting groove (121) may be formed by recessing or perforating a rectangular shape in the center of the antenna fixing jig (120), but the shape of the antenna mounting groove (121) is not limited thereto. Additionally, the antenna (131) to be tested may be fixed by being inserted into the antenna mounting groove (121).

[0028] The contact substrate mounting groove (122) may be formed to mount a contact substrate (132) for measuring flatness, which indicates the degree to which a plurality of tips (310) of the probe (300) approach or contact the antenna (131) to the test target at a uniform distance. Additionally, the contact substrate mounting groove (122) may be formed as a recess corresponding to the shape of the contact substrate (132) on the surface where the probe (300) is located so that the probe (300), which will be described later, can be contacted. A detailed description of the contact substrate (132) will be provided later.

[0029] The calibration substrate mounting groove (123) may be formed to support a calibration substrate (133) for performing a calibration operation to correct the effect of the probe (300). Additionally, the calibration substrate mounting groove (123) may be formed as a recess corresponding to the shape of the calibration substrate (133) on the surface where the probe (300) is located so that the probe (300), which will be described later, can make contact. A detailed description of the calibration substrate (133) will be provided later.

[0030] In another embodiment, the antenna fixing jig (120), referring to FIG. 4, can fix the antenna to be tested (131), the contact substrate (132) for flatness measurement, and the calibration substrate (133) by vacuum suction. For example, as shown in FIG. 3, a plurality of holes may be drilled in the portion of the antenna fixing jig (120) where the antenna to be tested (131), the contact substrate (132) for flatness measurement, and the calibration substrate (133) are suctioned, and suction force may be generated in the plurality of holes to fix the antenna to be tested (131), the contact substrate (132), and the calibration substrate (133) by vacuum suction.

[0031] Referring again to FIG. 2, the chuck (100) may further include a chuck support member (140) that supports the chuck body (110) from below, and a chuck drive member (150) that is positioned between the chuck support member (140) and a turntable (200) and adjusts the position of the chuck support member (140) in the X-axis, Y-axis, or Z-axis direction. Additionally, referring to FIG. 5, the chuck drive member (150) may perform the function of tilting the chuck support member (140) in both directions of the X-axis with the Z-axis as the central axis, the function of tilting the chuck support member (140) in both directions of the Z-axis with the X-axis as the central axis, or the function of rotating the chuck support member (140) 360° around a vertical axis. For example, the chuck drive unit (150) may include a plurality of motors and rails, etc., for moving and tilting the chuck support unit (140) along the X-axis, Y-axis, and Z-axis. Since moving and tilting along the X-axis, Y-axis, and Z-axis is a common configuration, a detailed description will be omitted.

[0032] Referring to FIG. 7, the turntable (200) supports the chuck (100) from below and rotates around a vertical axis. Additionally, the chuck (100), a stand (810), an auxiliary device support (830), a probe arm (840), a probe (300), etc. are mounted on the upper part of the turntable (200) so that they can rotate according to the radiation direction of the test target antenna (131) fixed to the chuck (100). In other words, the turntable (200) can be rotated so that when a signal is radiated from the antenna (131) to the surface where the probe (300) contacts (see FIG. 8), the surface where the probe (300) contacts faces the direction where the receiving antenna (400) is located, and conversely, when a signal is radiated from the antenna (131) to the opposite direction of the surface where the probe (300) contacts (see FIG. 9), the surface where the probe (300) contacts faces the direction where the receiving antenna (400) is located.

[0033] In addition, the present invention has a hole drilled in the center of the turntable (200) through which a cable connected to a probe (300) passes, so that even when the turntable (200) rotates, the movement of the cable is minimized, thereby enabling the calibration to be continuously maintained.

[0034] Referring to FIG. 6, the probe (300) applies a test signal to the antenna (131) under test. Additionally, the probe (300) or the probe tip (310) may be formed or installed to be bent at a predetermined angle in the direction in which the antenna (131) under test is located. For example, the probe (300) may be an RF (Radio Frequency) probe or a DC (Direct Current) probe.

[0035] For example, the probe (300) may include three probe tips (310), two ground probe tips in contact with a ground pad and a signal probe tip in contact with a signal pad and located between the ground probe tips, and the probe station (10) may be a device for testing a Ground Signal Ground (GSG) test pattern, which is one of the antenna (131) test patterns.

[0036] Referring to FIG. 7, the probe station (10) may further include a linear rail (920) for adjusting the position of the microscope (910), which is fixed to one side of the microscope (910) and the stand (810) positioned toward the antenna (131) to be tested. At this time, the linear rail (920) may be formed to adjust the position of the microscope (910) in the X-axis or Z-axis direction.

[0037] In addition, the probe station (10) can adjust the flatness of the probe (300) by photographing the probe (300) through a microscope (910).

[0038] The contact substrate (132) is for measuring flatness indicating the degree to which a plurality of tips (310) of the probe (300) approach or contact the antenna (131) at a uniform distance, and the flatness of the probe (300) can be adjusted by photographing the contact of the plurality of tips (310) of the probe (300) with the contact substrate (132).

[0039] Referring to FIG. 10, as the probe (300) approaches the contact substrate (132), the probe (300) observed by the microscope (910) may appear to be gradually reduced. Subsequently, referring to FIG. 11, after the probe (300) contacts the contact substrate (132), as it descends in the Z-axis direction, the probe (300) is pushed in one direction, and scratches may occur on the contact substrate (132) by the probe tips (310). At this time, if the probe (300) is aligned in a flat state and in a normal state, and all three probe tips (310) are uniformly in contact with the contact substrate (132), each scratch will have the same pattern. However, if the probe (300) is tilted to one side, scratches will occur by any one of the three probe tips (310), and thus the pattern of the scratches will differ. In this way, the flatness state of the probe (300) can be determined by analyzing the pattern of the scratch. As the probe (300) rises in the Z-axis direction, the flatness of the probe (300) is measured by analyzing the pattern of the scratch captured through the microscope (910) to determine the flatness state, and then the flatness of the probe (300) can be adjusted using the probe driving unit (820).

[0040] For example, as illustrated in FIG. 11, if a scratch occurs only by the topmost probe tip (310) among the tips (310) of the probe (300), the flatness of the probe (300) can be adjusted by tilting it at a predetermined angle with respect to the X-axis, since the topmost probe tip (310) is tilted in the direction in which it is located.

[0041] Referring to FIG. 12, the calibration board (133) may be for performing a calibration operation to correct the effect of the probe (300). For example, the calibration board (133) may receive a signal transmitted from the probe (300), measure an error such as signal delay, and perform a calibration operation. For example, calibration may be performed by calculating the difference between the value measured by contacting a plurality of tips (310) of the probe (300) with open, short, and load terminals located on the calibration board (133) and the basic response value. Through this process, the phase difference caused by cable length can be corrected and the effect of ambient noise can be offset.

[0042] Referring again to FIG. 1, the receiving antenna (400) detects the antenna (131) signal emitted from the test target antenna (131) upon the application of a test signal. The receiving antenna (400) can be connected via wired or wireless connection to the measuring instrument (500) described later to transmit the detected antenna (131) signal. Additionally, the probe station (10) may further include a receiving antenna support (410) on which the receiving antenna (400) is mounted and which is located on the base (610). The receiving antenna support (410) may be adjustable in the X-axis, Y-axis, or Z-axis direction on the base (610). In other words, the receiving antenna support (410) can adjust the distance between the measuring antenna (131) and the receiving antenna (400) to match different measuring antennas (131), making it possible to position them further away than the distance of the far field.

[0043] The measuring instrument (500) stores the signal detected through the receiving antenna (400). In other words, the measuring instrument (500) can extract and store the radiation pattern of the antenna to be tested (131) from the signal detected through the receiving antenna (400).

[0044] A turntable (200) and a receiving antenna (400) are arranged on the base (610). In other words, a turntable (200) formed in a plate shape and rotatably installed on the upper part of the base (610) and a receiving antenna (400) can be arranged at a predetermined distance from the turntable (200).

[0045] The controller (700) controls the operating state of the turntable (200), probe (300), and receiving antenna (400). Specifically, the controller (700) rotates the turntable (200) by a predetermined rotation angle, and causes the probe (300) to apply a test signal for each rotation angle, so that the signal detected by the receiving antenna (400) for each rotation angle is stored in the measuring instrument (500). A detailed explanation of this will be provided later.

[0046] Referring again to FIG. 7, the probe station (10) may further include a stand (810) and an additional device support (830).

[0047] The mounting bracket (810) can be fixed to the turntable (200) in a manner that surrounds the chuck (100). For example, the mounting bracket (810) may be formed in a plate shape and fixed to the upper surface of the mounting bracket (810), and a space may be formed at the bottom where the chuck (100) is located.

[0048] An additional device support (830) may be fixed to one side of a mounting bracket (810), a probe driving unit (820) for adjusting the position of a probe (300) may be fixed to one side, and an additional device may be formed to be mounted on the upper side thereof. At this time, the additional device may include a frequency extender for adjusting the frequency of a test signal applied to the probe (300) or a power meter for measuring the power of a radiated signal output from a test target antenna (131).

[0049] The additional device support (830) can perform the function of adjusting the position of the additional device support (830) in the X-axis, Y-axis, or Z-axis direction, or tilting the additional device support (830) in both directions of the Y-axis with the X-axis as the central axis, or tilting the additional device support (830) in both directions of the X-axis with the Y-axis as the central axis, or tilting the additional device support (830) in both directions of the Y-axis with the Z-axis as the central axis. For example, the additional device support (830) is fixed to the upper part of the probe drive unit (820), so that its movement can be controlled as the probe drive unit (820) moves or tilts.

[0050] The probe drive unit (820) can adjust the distance or contact state between the probe (300) and the test target antenna (131) along the Z-axis.

[0051] The controller (700) can control the probe drive unit (820) and the auxiliary device support (830) to adjust the flatness indicating the degree to which the multiple tips (310) of the probe (300) approach or contact the test target antenna (131) at a uniform distance. In other words, the distance on the Z-axis between the tips (310) of the probe (300) and the test target antenna (131) can be adjusted by controlling the probe drive unit (820), and the flatness between the multiple tips (310) of the probe (300) and the test target antenna (131) can be adjusted by controlling the auxiliary device support (830) to tilt.

[0052] Additionally, the controller (700) can control the receiving antenna support (410) to adjust the distance between the test target antenna (131) and the receiving antenna (400) according to the frequency band of the antenna (131) signal emitted from the test target antenna (131). For example, when the frequency band of the antenna (131) signal is the IEEE standard D band (110~170GHz), the distance between the test target antenna (131) and the receiving antenna (400) can be set longer than when the frequency band of the antenna (131) signal is the IEEE standard G band (110~300GHz).

[0053] Referring again to FIG. 1, the probe station (10) may further include a vertical laser level (620) and a horizontal laser level (630) located on the base (610) and detecting the alignment state of the receiving antenna (400), and can align the test target antenna (131) and the receiving antenna (400) by checking the lasers irradiated from the vertical laser level (620) and the horizontal laser level (630).

[0054] Additionally, the probe station (10) may further include a vertical leveler support (622) on which a vertical laser leveler (620) is mounted and which performs the function of moving the vertical laser leveler (620) in the X-axis direction, moving in the Y-axis direction, tilting in both directions of the Y-axis with the X-axis as the central axis, tilting in both directions of the Y-axis with the Z-axis as the central axis, and rotating around the Y-axis, and a horizontal laser leveler (630) is mounted and which performs the function of moving the horizontal laser leveler (630) in the Z-axis direction, moving in the Y-axis direction, tilting in both directions of the Y-axis with the X-axis as the central axis, tilting in both directions of the Y-axis with the Z-axis as the central axis, and rotating around the Y-axis.

[0055] Referring to FIG. 13, the probe station (10) may further include a shield support (640) on which a shield is mounted for shielding tests of antenna (131) signals emitted from the antenna (131) to be tested. Additionally, the shield support (640) may be positioned at the front and rear of the chuck (100), respectively, and may be used selectively depending on the radiation direction of the antenna (131) to be tested.

[0056] Additionally, the shield support (640) may be adjustable in position along the X-axis, Y-axis, or Z-axis direction on the base (610). Additionally, the shield support (640) may be tilted in both directions along the Y-axis with the X-axis as the central axis, tilted in both directions along the X-axis with the Y-axis as the central axis, or tilted in both directions along the Y-axis with the Z-axis as the central axis. Additionally, the controller (700) may control the shield support (640) or the turntable (200) to adjust the shield support (640) so that it is positioned between the test target antenna (131) and the receiving antenna (400) along the distance in the Z-axis direction. At this time, the shield may be an AUT case, a housing, a lens antenna, a spatially coupled antenna, etc. Through this, the probe station (10) can measure not only the radiation pattern of the antenna (131) but also the radiation pattern of the antenna combined with the case, housing, or lens antenna. In addition, the probe station (10) can measure the performance of the IC (Integrated Circuit) and the characteristics of the system module, such as the AoP (Antenna-on-Package).

[0057] Hereinafter, with reference to FIG. 14, a method of operation of a probe station (10) according to an embodiment of the present invention will be described.

[0058] In step (S110), the flatness of the probe (300) can be adjusted. Specifically, with respect to a chuck (100) to which a test target antenna (131), a contact substrate (132) for measuring flatness, and a calibration substrate (133) for calibration operation are each fixed, the controller (700) controls the probe driving unit (820) and the auxiliary device support (830) according to the flatness indicating the degree to which a plurality of tips (310) of the probe (300) approach or contact the test target antenna (131) at a uniform distance, thereby adjusting the flatness so that a plurality of tips (310) of the probe (300) approach or contact the test target antenna (131) at a uniform distance.

[0059] In step (S120), a calibration operation can be performed to correct the effect of the probe (300) by contacting the probe (300) with the calibration board (133) at least once. For example, a calibration operation can be performed to eliminate errors such as signal delay caused by various cables or the probe (300). Calibration can be performed by calculating the difference between the measured value and the basic response value by contacting multiple tips (310) of the probe (300) with open, short, and load terminals located on the calibration board (133). Through this process, the phase difference caused by cable length can be corrected and the effect of ambient noise can be canceled out.

[0060] In step (S130), the test target antenna (131) and the receiving antenna (400) can be aligned using a horizontal laser level (630) and a vertical laser level (620). In other words, by checking the lasers emitted from the vertical laser level (620) and the horizontal laser level (630), and checking whether the intersection of the vertical laser and the horizontal laser corresponds to the test target antenna (131) and the receiving antenna (400), the test target antenna (131) and the receiving antenna (400) can be aligned.

[0061] In step (S140), the probe (300) can be brought into contact with the antenna (131) to be tested.

[0062] In step (S150), a test signal is applied to the antenna (131) to be tested through the probe (300).

[0063] In step (S160), the signal detected through the receiving antenna (400) is stored in the measuring instrument (500).

[0064] In step (S170), the probe (300) can be separated from the antenna (131) under test.

[0065] Additionally, the controller (700) can rotate the turntable (200) by a predetermined rotation angle and repeatedly perform steps (S140, S150, S160, S170) so that the signal detected by the receiving antenna (400) for each rotation angle is stored in the measuring instrument (500). In other words, the controller (700) can rotate the turntable (200) to the starting angle of the antenna (131) to be tested, perform the test, rotate the turntable (200) by a preset angle, perform the test again, and repeat until the end angle is reached to measure the radiation pattern of the antenna (131) to be tested.

[0066] One embodiment of the present invention may also be implemented in the form of a non-transient recording medium comprising computer-executable instructions, such as program modules executed by a computer. A computer-readable medium may be any available medium accessible by a computer and includes both volatile and non-volatile media, and both removable and non-removable media. Additionally, a computer-readable medium may include all computer storage media. A computer storage medium includes both volatile and non-volatile, removable and non-removable media implemented by any method or technique for storing information, such as computer-readable instructions, data structures, program modules, or other data.

[0067] Although the method and system of the present invention have been described in relation to specific embodiments, some or all of their components or operations may be implemented using a computer system having a general-purpose hardware architecture.

[0068] The foregoing description of the present invention is for illustrative purposes only, and those skilled in the art will understand that other specific forms can be easily modified without altering the technical spirit or essential features of the present invention. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. For example, each component described as a single unit may be implemented in a distributed manner, and components described as distributed may likewise be implemented in a combined form.

[0069] The scope of the present invention is defined by the claims set forth below rather than by the detailed description above, and all modifications or variations derived from the meaning and scope of the claims and equivalent concepts thereof should be interpreted as being included within the scope of the present invention. Explanation of the symbols

[0070] 10: Probe Station 100 : Chuck 101 : Support surface 110: Chuck body 120: Antenna fixing jig 121: Antenna mounting groove 122: Contact board mounting groove 123 : Calibration board mounting groove 131 : Antenna 132 : Contact board 133 : Calibration board 140 : Chuck support 150 : Chuck drive 200: Turntable 300 : Probe 310 : Probe Tip 400 : Receiving antenna 410 : Receiving antenna support 500 : Measuring instrument 610 : Base 620: Vertical laser level 622: Vertical level stand 630: Horizontal laser level 632: Horizontal level stand 640 : Shield support 700 : Controller 810 : Stand 820: Probe drive unit 830: Auxiliary device support 840: Probe arm 910: Microscope 920: Linear rail

Claims

Claim 1 A probe station for testing an antenna, comprising: a chuck to which the antenna to be tested is fixed; a turntable that supports the chuck from below and rotates around a vertical axis; a probe that applies a test signal to the antenna to be tested; a receiving antenna that detects an antenna signal emitted from the antenna to be tested in accordance with the application of the test signal; a measuring instrument that stores the signal detected through the receiving antenna; a base on which the turntable and the receiving antenna are arranged; a controller that controls the operating state of the turntable, the probe, and the receiving antenna; a mounting bracket fixed to the turntable in a manner that surrounds the periphery of the chuck; an additional device support bracket fixed to one side of the mounting bracket, having a probe driving unit fixed to one side for adjusting the position of the probe, and formed such that an additional device is mounted on its upper side; and a probe arm to which the probe is fixed on one side of the probe driving unit, wherein the chuck includes a support surface to which the antenna to be tested is fixed, and the support surface is aligned parallel to the vertical axis. Claim 2 A probe station according to claim 1, wherein the turntable is installed to be rotatable 360 ​​degrees. Claim 3 A probe station according to claim 1, wherein the probe station is installed such that the signal of the antenna to be tested is radiated in the direction in which the probe contacts or in the opposite direction in which the probe contacts. Claim 4 A probe station according to claim 1, wherein the controller rotates the turntable by a predetermined rotation angle, and causes the probe to apply the test signal for each rotation angle, so that the signal detected by the receiving antenna for each rotation angle is stored in the measuring instrument. Claim 5 A probe station according to claim 1, wherein the chuck comprises: a chuck body formed in a planar shape and aligned parallel to the vertical axis; and an antenna fixing jig detachably coupled to the chuck body. Claim 6 In claim 5, the antenna fixing jig is a probe station made of Rohacell, Roacrylic, acrylic, plastic, or styrofoam. Claim 7 In claim 5, the antenna fixing jig comprises: an antenna mounting groove formed to mount the antenna to be tested; a contact substrate mounting groove formed to mount a contact substrate for measuring flatness indicating the degree to which a plurality of tips of the probe approach or contact the antenna to be tested at a uniform distance; and a calibration substrate mounting groove formed to mount a calibration substrate for performing a calibration operation to correct the effect of the probe. Claim 8 In claim 5, the antenna fixing jig fixes the antenna to be tested, a contact substrate for measuring flatness, and a calibration substrate by a vacuum suction method, wherein the contact substrate is for measuring flatness indicating the degree to which a plurality of tips of the probe approach or contact the antenna to be tested at a uniform distance, and the calibration substrate is for performing a calibration operation to correct the effect of the probe, a probe station. Claim 9 In claim 5, the chuck further comprises: a chuck support member that supports the chuck body from below; and a chuck drive member disposed between the chuck support member and the turntable and adjusting the position of the chuck support member in the X-axis, Y-axis, or Z-axis direction, forming a probe station. Claim 10 A probe station according to claim 9, wherein the chuck drive unit performs the function of tilting the chuck support in both directions of the X-axis with the Z-axis as the central axis, the function of tilting the chuck support in both directions of the Z-axis with the X-axis as the central axis, or the function of rotating the chuck support 360° around the vertical axis. Claim 11 delete Claim 12 A probe station according to claim 1, wherein the probe driving unit adjusts the distance or contact state between the probe and the antenna to be tested along the Z-axis. Claim 13 A probe station according to claim 1, wherein the additional device includes a frequency extender for adjusting the frequency of a test signal applied to the probe or a power meter for measuring the power of a radiated signal output from the antenna to be tested. Claim 14 A probe station according to claim 1, wherein the auxiliary device support performs the function of adjusting the position of the auxiliary device support in the X-axis, Y-axis, or Z-axis direction, tilting the auxiliary device support in both directions of the Y-axis with the X-axis as the central axis, tilting the auxiliary device support in both directions of the X-axis with the Y-axis as the central axis, or tilting the auxiliary device support in both directions of the Y-axis with the Z-axis as the central axis. Claim 15 In claim 14, the controller controls the probe drive unit and the auxiliary device support to adjust the flatness indicating the degree to which a plurality of tips of the probe approach or contact the antenna to be tested at a uniform distance, wherein the controller controls the probe drive unit to adjust the distance on the Z-axis between the tips of the probe and the antenna to be tested, and controls the auxiliary device support to tilt to adjust the flatness between the plurality of tips of the probe and the antenna to be tested. Claim 16 A probe station according to claim 1, further comprising a microscope positioned toward the antenna to be tested and a linear rail fixed to one side of the mounting bracket for adjusting the position of the microscope, wherein the linear rail is formed to adjust the position of the microscope in the X-axis or Z-axis direction. Claim 17 A probe station according to claim 1, further comprising a receiving antenna support located on the base and on which the receiving antenna is mounted, wherein the receiving antenna support is capable of position adjustment in the X-axis, Y-axis, or Z-axis direction on the base. Claim 18 In claim 17, the probe station wherein the controller controls the receiving antenna support to adjust the distance between the test target antenna and the receiving antenna according to the frequency band of the antenna signal emitted from the test target antenna. Claim 19 A probe station according to claim 17, further comprising a vertical laser level and a horizontal laser level located on the base and detecting the alignment state of the receiving antenna. Claim 20 The probe station according to claim 1 further comprises a shielding support on which a shield is mounted for shielding tests of antenna signals emitted from the antenna subject to test, wherein the shielding support is capable of adjusting the position in the X-axis, Y-axis, or Z-axis direction on the base, or tilting driven in both directions of the Y-axis with the X-axis as the central axis, or tilting driven in both directions of the X-axis with the Y-axis as the central axis, or tilting driven in both directions of the Y-axis with the Z-axis as the central axis. Claim 21 In claim 20, the probe station wherein the controller controls the shielding support or the turntable to adjust the shielding support to be positioned between the test target antenna and the receiving antenna along a distance in the Z-axis direction. Claim 22 In claim 1, the probe station is one in which the measuring instrument extracts and stores the radiation pattern of the antenna to be tested from a signal detected through the receiving antenna. Claim 23 A method of operation of a probe station according to claim 1, comprising: (a) applying a test signal to the antenna to be tested through the probe; and (b) storing a signal detected through the receiving antenna in a measuring instrument. Claim 24 A method of operation of a probe station according to claim 23, wherein the controller rotates the turntable by a predetermined rotation angle and repeatedly performs steps (a) and (b), so that the signal detected by the receiving antenna for each rotation angle is stored in the measuring instrument. Claim 25 A method of operation of a probe station according to claim 23, further comprising the step of contacting the probe to the antenna to be tested before performing step (a) and the step of separating the probe from the antenna to be tested after performing step (b), wherein the controller rotates the turntable by a predetermined rotation angle and repeatedly performs the step of contacting the probe to the antenna to be tested, the step (a), the step (b), and the step of separating the probe from the antenna to be tested, so that the signal detected by the receiving antenna for each rotation angle is stored in the measuring instrument. Claim 26 A method of operation of a probe station according to claim 23, further comprising, prior to the execution of step (a), a step of the controller controlling a probe driving unit and an additional device support according to a flatness indicating the degree to which a plurality of tips of the probe approach or contact the antenna to be tested at a uniform distance with respect to a chuck to which the antenna to be tested, a contact substrate for flatness measurement, and a calibration substrate for calibration operation are each fixed, so as to adjust the flatness so that a plurality of tips of the probe approach or contact the antenna to be tested at a uniform distance. Claim 27 A method of operation of a probe station according to claim 26, further comprising the step of performing a calibration operation to correct the effect of the probe while contacting the probe with the calibration substrate at least once after performing the flatness adjustment step and before performing the step (a).

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