Inspection jig and inspection device

Abstract

The inspection jig (3) comprises a rod-shaped contactor (Pr), a first support member (311) that supports one end of the contactor (Pr), a second support member (312) that supports the other end of the contactor (Pr), and a spaced-hold support member (7) that holds and supports the first support member (311) and the second support member (312) apart from each other. The first support member (311) comprises a support plate (B2) having a through hole (B2H) into which the contactor (Pr) is inserted and penetrated, and a reinforcing plate (5) having a stronger bending strength than the support plate (B2) is disposed on the surface of the support plate (B2) opposite to the second support member (312).

Description

Technology Field

[0001] The present invention relates to an inspection jig equipped with a contactor, and an inspection device using the same. Background Technology

[0002] A probe card is known from the prior art having a support member having an upper support hole and a lower support hole that position and support the upper and lower portions of a wire probe, respectively, and a flexible guide film that supports the middle portion of the wire probe by bending it in one direction (see, for example, Patent Document 1). The lower support hole of the support member is formed in a stacked first bottom plate and a second bottom plate.

[0003] Patent Document 1 states that if the guide film is too flexible, the guide film may stretch and bend up and down due to the elasticity of the wire probe. Therefore, in the technology described in Patent Document 1, a reinforcing film is applied to the surface of the guide film to suppress bending accompanying the stretching of the guide film. Prior art literature

[0004] Japanese Patent Publication No. 2012-103125 The problem to be solved

[0005] However, in Patent Document 1, the force causing the guide film to bend up and down is applied to the first and second bottom plates having a lower support hole into which a wire probe is inserted and penetrated, just as it is applied to the guide film. Therefore, there was a concern that stress would be applied to the first and second bottom plates.

[0006] The objective of the present invention is to provide an inspection jig and an inspection device that facilitate the reduction of stress applied to a support member supporting a contactor.

[0007] An inspection jig according to an example of the present invention comprises a rod-shaped contactor, a first support member supporting one end of the contactor, a second support member supporting the other end of the contactor, and a spaced-apart support member that holds and supports the first support member and the second support member apart from each other, wherein the first support member comprises a support plate having a through hole formed therein into which the contactor is inserted and penetrated, and a reinforcing plate having a greater bending strength than the support plate is disposed on the surface of the support plate opposite to the second support member.

[0008] An inspection device according to an example of the present invention comprises the inspection jig described above and an inspection processing unit that performs an inspection of an object based on an electrical signal obtained by contacting the contactor with an inspection point provided on the object to be inspected. Brief explanation of the drawing

[0009] FIG. 1 is a conceptual diagram schematically showing an example of the configuration of an inspection device (1) using an inspection jig (3) according to one embodiment of the present invention. FIG. 2 is a plan view of the inspection jig (3) illustrated in FIG. 1 seen from the tip side of the contactor (Pr). FIG. 3 is a cross-sectional view along line III-III of the inspection jig (3) shown in FIG. 2. FIG. 4 is a cross-sectional view along line IV-IV of the inspection jig (3) shown in FIG. 2. FIG. 5 is a plan view in the Z direction of the reinforcing plate (5) shown in FIG. 3 and FIG. 4. FIG. 6 is a plan view illustrating a modified example of the reinforcing plate (5) shown in FIG. 5. FIG. 7 is an explanatory diagram illustrating an example of a state in which an inspection jig (3) is brought into contact with a substrate (100). FIG. 8 is an explanatory diagram conceptually illustrating the behavior of the plate (PL) when the contactor (Pr) is pressed in. FIG. 9 is an enlarged explanatory diagram of the through hole (PLH) and contactor (Pr) formed in the plate (PL). FIG. 10 is an explanatory diagram conceptually illustrating the behavior of the plate (PL) when the indentation load of the contactor (Pr) is released. FIG. 11 is an enlarged explanatory diagram of a through hole (PLH) formed in a plate (PL) and a contactor (Pr). FIG. 12 is a cross-sectional view showing an enlarged view of the area near the through hole (B2H) of the first support plate (B2). FIG. 13 is a cross-sectional view showing a modified example of the inspection jig (3) illustrated in FIG. 3. FIG. 14 is a cross-sectional view showing an enlarged view of the area near the through hole (B2H) of the reinforcing plate (B2a). FIG. 15 is a cross-sectional view illustrating an example of an active layer (33) formed on a plate (PL). Specific details for implementing the invention

[0010] Hereinafter, embodiments of the present invention will be described based on the drawings. In addition, components labeled with the same reference numeral in each drawing indicate that they are identical components, and their descriptions are omitted. An XYZ orthogonal coordinate axis is appropriately indicated to show the direction of each drawing. The inspection device (1) shown in FIG. 1 is a device for inspecting a substrate (100), which is an example of an object to be inspected.

[0011] The substrate (100) may be various substrates, such as, for example, a printed circuit board, a flexible substrate, a ceramic multilayer circuit board, an electrode plate for a liquid crystal display or a plasma display, a semiconductor substrate, and a package substrate or film carrier for a semiconductor package. In addition, the object to be inspected is not limited to a substrate, but may be an electronic component such as, for example, an integrated circuit (IC), or any other object to which electrical inspection is performed.

[0012] The inspection device (1) illustrated in FIG. 1 is equipped with an inspection unit (4U, 4D), a substrate fixing device (6), and an inspection processing unit (8). The substrate fixing device (6) is configured to fix a substrate (100) to be inspected at a predetermined position. The inspection unit (4U, 4D) is equipped with an inspection jig (3U, 3D). The inspection unit (4U, 4D) is configured to move the inspection jig (3U, 3D) in the three mutually orthogonal X, Y, and Z axes by means of a driving mechanism not shown, and also to rotate the inspection jig (3U, 3D) around the Z-axis.

[0013] The inspection unit (4U) is located above the substrate (100) fixed to the substrate fixing device (6). The inspection unit (4D) is located below the substrate (100) fixed to the substrate fixing device (6). The inspection units (4U, 4D) are configured to be detachably equipped with an inspection jig (3U, 3D) for inspecting a circuit pattern formed on the substrate (100). Hereinafter, the inspection units (4U, 4D) are collectively referred to as the inspection unit (4).

[0014] The inspection jig (3U, 3D) is equipped with a plurality of contactors (Pr), a support member (31) that holds and supports the leading end of the plurality of contactors (Pr) toward the substrate (100), and a base plate (321). The base plate (321) is provided with an electrode that contacts and conducts to the trailing end of each contactor (Pr). The inspection unit (4U, 4D) is equipped with a connection circuit (not shown) that electrically connects the trailing end of each contactor (Pr) to the inspection processing unit (8) through each electrode of the base plate (321) or switches the connection.

[0015] The contactor (Pr) has a shape that is roughly rod-shaped as a whole. A plurality of through holes are formed in the support member (31) to support the contactor (Pr). Each through hole is positioned to correspond to the location of an inspection point set on the wiring pattern of the substrate (100) to be inspected. By doing so, the tip of the contactor (Pr) is made to contact the inspection point of the substrate (100). The inspection point is, for example, a wiring pattern, a pad, a solder bump, a connection terminal, a through hole, a via, etc.

[0016] The inspection jigs (3U, 3D) are configured similarly to each other, except that the installation direction to the inspection section (4U, 4D) is opposite vertically. Hereinafter, the inspection jigs (3U, 3D) are collectively referred to as the inspection jig (3). The inspection jig (3) is replaceable depending on the substrate (100) to be inspected.

[0017] The inspection processing unit (8) is equipped with, for example, a power circuit, a voltmeter, an ammeter, and a microcomputer. The inspection processing unit (8) controls a driving mechanism (not shown) to move and position the inspection unit (4U, 4D) and contacts the tip of each contactor (Pr) to each inspection point of the substrate (100). By doing so, each inspection point and the inspection processing unit (8) are electrically connected. In this state, the inspection processing unit (8) supplies an inspection current or voltage to each inspection point of the substrate (100) through each contactor (Pr) of the inspection jig (3), and performs an inspection of the substrate (100), such as an open circuit or short circuit of the circuit pattern, based on the voltage signal or current signal obtained from each contactor (Pr). Alternatively, the inspection processing unit (8) may measure the impedance of the inspection target based on the voltage signal or current signal obtained from each contactor (Pr) by supplying an alternating current or voltage to each inspection point.

[0018] Referring to FIGS. 2, 3, and 4, the support member (31) comprises a first support member (311) that supports the rear end of the contactor (Pr), a second support member (312) that supports the front end of the contactor (Pr), a spaced-out support member (7) that holds and supports the first support member (311) and the second support member (312) apart from each other, a spacer (S), and a reinforcing plate (5).

[0019] The first support member (311) is configured such that the first support plate (B2) and the second support plates (C1, D, E1, E2) are stacked in the Z direction. The second support plates (C1, D, E1, E2) are stacked in this order starting from the side closest to the second support member (312). The first support plate (B2) is stacked on the second support plate (C1). That is, among the plurality of support plates (B2, C1, D, E1, E2) constituting the first support member (311), the support plate closest to the second support member (312) is the first support plate (B2) (opposing support plate).

[0020] Additionally, the second support plate may be composed of three or fewer or five or more support plates. Alternatively, the first support part (311) may be composed of one support plate.

[0021] A through hole (B2H) is formed in the first support plate (B2) to support each contactor (Pr).

[0022] In the second support plate (C1, D, E1, E2), through holes (C1H, DH, E1H, E2H) are formed to support each contactor (Pr).

[0023] The rear end of the contactor (Pr) is inserted through the through hole (B2H, C1H, DH, E1H, E2H). By doing so, the rear end of the contactor (Pr) is supported by the first support member (311).

[0024] A reinforcing plate (5) is disposed on the opposite side of the first support plate (B2) to the second support member (312). Referring to FIG. 5, the reinforcing plate (5) is a roughly rectangular plate-shaped member. Two openings (5C) of a roughly rectangular shape, elongated in the Y direction, are formed in the reinforcing plate (5). The two openings (5C) are opened such that, when viewed in a planar view, each opening includes an area containing a plurality of through holes (B2H) of the first support plate (B2).

[0025] The inspection jig (3) may be equipped with a reinforcing plate (5a) as shown in FIG. 6 instead of a reinforcing plate (5). In the reinforcing plate (5a), instead of two openings (5C), a plurality of through holes (5H) are formed that correspond one-to-one with the plurality of through holes (B2H) of the first support plate (B2). Additionally, a contactor (Pr) may be inserted and passed through each through hole (5H). The inner diameter of the through hole (5H) is larger than that of the through hole (B2H).

[0026] Referring to FIGS. 3 and 4, a spacer (S) in the shape of a roughly rectangular frame is laminated on the outer periphery of the reinforcing plate (5).

[0027] The second support member (312) is configured by stacking support plates (A, A2, A3). The support plates (A, A2, A3) are stacked in this order from the side furthest from the first support member (311). Through holes (AH, A2H) for supporting each contactor (Pr) are formed in the support plates (A, A2). Through holes (A3H) for supporting each contactor (Pr) are formed in the support plate (A3).

[0028] Additionally, the second support member (312) may be composed of two or fewer or four or more support plates.

[0029] The tip of the contactor (Pr) is inserted through the through holes (AH, A2H, A3H). By doing so, the tip of the contactor (Pr) is supported by the second support member (312).

[0030] A spaced-holding support member (7), approximately rectangular in shape, is extended from the outer periphery of the support plate (A3). The support plate (A3) and the spaced-holding support member (7) are formed integrally. By this, a spaced-holding block (B) is formed from the support plate (A3) and the spaced-holding support member (7). Additionally, the support plate (A3) and the spaced-holding support member (7) may be separate entities.

[0031] The end surface of the spaced-out support member (7) is installed on the surface of the second support portion (312) of the spacer (S). By this, the first support plate (B2) and the support plate (A3), that is, the first support portion (311) and the second support portion (312), are supported at a distance spaced apart by adding the length in the Z direction of the spaced-out support member (7), the thickness of the spacer (S), and the thickness of the reinforcing plate (5). The support plates (A, A2, A3), the reinforcing plate (5), the first support plate (B2), and the second support plates (C1, D, E1, E2) are supported in parallel.

[0032] Additionally, the spacer (S) is a member for finely adjusting the gap between the first support member (311) and the second support member (312), and the inspection jig (3) does not need to be equipped with the spacer (S).

[0033] Additionally, the spaced-holding support member (7) is not limited to a rectangular tube-shaped member. The spaced-holding support member only needs to support the first support member (311) and the second support member (312) by keeping them spaced apart from each other. For example, a rod-shaped support may be used as the spaced-holding support member.

[0034] The through holes (AH, A2H, A3H, B2H, C1H, DH, E1H, E2H) are provided vertically to each plate so that one identical contactor (Pr) is inserted and penetrated. Each through hole of the corresponding through holes (AH, A2H, A3H, B2H, C1H, DH, E1H, E2H) has a position in the X direction relative to the perpendicular direction (Z direction) so that the contactor (Pr) is inclined relative to the perpendicular direction (Z direction) of the support plate (A, A2, A3), the first support plate (B2), and the second support plate (C1, D, E1, E2).

[0035] Accordingly, each contactor (Pr) is supported by being inclined in the same direction in the X direction with respect to the Z direction. The tip of each contactor (Pr) is configured to protrude from the support plate (A) when not in contact with the substrate (100). Hereinafter, the through holes (AH, A2H, A3H, B2H, C1H, DH, E1H, E2H, 5H) are collectively referred to as through holes (H). Additionally, the through holes (H) may be inclined and penetrate with respect to the perpendicular direction of each plate.

[0036] Referring to FIG. 2, when the inspection jig (3) is viewed from the side of the support plate (A), a plurality of through holes (H) are distributed in a first region (P1) and a second region (P2), which are widened in an approximately rectangular shape in the Y direction. The X direction corresponds to an example of the first direction, and the Y direction corresponds to an example of the second direction.

[0037] In the first region (P1) and the second region (P2), through holes (H) are spaced at equal intervals. The first region (P1) and the second region (P2) are spaced apart by a distance greater than the spacing of the through holes (H) within the same region.

[0038] In the example illustrated in FIG. 2, the through holes (H) are arranged in 5 zigzag rows in the X direction (first direction) and 11 zigzag rows in the Y direction (second direction) within the first region (P1). Likewise, the through holes (H) are arranged in 5 zigzag rows in the X direction (first direction) and 11 zigzag rows in the Y direction (second direction) within the second region (P2).

[0039] That is, in the first region (P1) and the second region (P2) in which through holes (H) are arranged at equal intervals, the number of rows of through holes (H) corresponding to the X direction (first direction) is less than the number of rows of through holes (H) corresponding to the Y direction (second direction). In addition, the through holes (H) are not limited to examples where they are arranged in a zigzag pattern, but may be arranged in a straight line, i.e., in a grid pattern, with respect to the X direction and the Y direction. In addition, although an example has been shown in which there are two regions in which through holes (H) are arranged at equal intervals, such regions may be one or three or more.

[0040] As described above, since the position of each through hole (H) is offset in the X direction with respect to the direction of the perpendicular (Z direction), the direction of offset of the through holes (H) follows the X direction (first direction) where the number of rows of through holes (H) is smaller.

[0041] When the inspection jig (3) is brought into contact with the substrate (100) to inspect the substrate (100), as shown in FIG. 7, the tip of each contactor (Pr) is pressed into the second support member (312). At this time, since each contactor (Pr) is supported by being inclined in the same direction in the X direction, it bends in the X direction to absorb the amount of the contactor (Pr) being pressed.

[0042] Here, the inclination of the contactor (Pr) is determined by the direction of misalignment of the through hole (H), and since the direction of misalignment of the through hole (H) follows the X direction (first direction) where the number of rows of the through hole (H) is small, the inclination direction of the contactor (Pr) and the bending direction of the contactor (Pr) also become the X direction where the number of rows of the through hole (H) is small.

[0043] When a contactor (Pr) bends, the risk of contact between contactors (Pr) adjacent to the bending direction increases. However, since the inspection jig (3) bends each contactor (Pr) along the X direction (first direction) where the number of through holes (H) is small, the risk of contact between contactors (Pr) is reduced compared to when bending along the Y direction (second direction) where the number of through holes (H) is large.

[0044] In addition, the direction of misalignment of the through holes (H) does not necessarily have to follow the first direction in which the number of rows of through holes (H) is small.

[0045] Referring to FIGS. 3 and 7, the support plates (A, A2, A3), the spaced-hold support member (7), the spacer (S), the first support plate (B2), and the second support plates (C1, D, E1, E2) are made of an insulating material, for example, a resin material. The reinforcing plate (5, 5a) has a stronger bending strength than the first support plate (B2) and the second support plates (C1, D, E1, E2). The reinforcing plate (5, 5a) can be made of a material such as ceramics, fine ceramics, etc.

[0046] The bending strength of the reinforcing plates (5, 5a, B2a) can be evaluated in accordance with, for example, JIS R 1601 “Test Method for Room Temperature Bending Strength of Fine Ceramics” or ISO 14704. The bending strength of the first support plate (B2) and the second support plates (C1, D, E1, E2) can be evaluated in accordance with, for example, JIS K 7171 “Method for Determining Bending Properties of Plastics” or ISO 178. The method for evaluating the bending strength of each plate is as follows. When embedded in an inspection jig, the two locations separated by a through hole where a contactor is scheduled to penetrate the support plate, and the two locations where the laminate of the support plate and the reinforcing plate face the spaced-apart support member, are called external support points, and the approximate center of the two external support points is called the load point. In the case of a plate shape where the opening larger than the indenter of the load measuring device is located approximately in the center of the two external support points, and thus the load of the load measuring device cannot be applied, the location where the load can be applied to the plate near the approximate center of the two external support points may be designated as the load point. The stroke of the load measuring device is measured when a predetermined load is applied to the load point such that the plate does not break. The smaller the stroke, the stronger the bending strength can be evaluated. Any value may be selected for the predetermined load, and it is not bound by the measurement conditions in the above standard. Regardless of the specifications regarding the shape, dimensions, surface roughness, etc. of the test specimen in the above standard, it is sufficient to evaluate the bending strength using the plate in its original shape and dimensions without processing. Regardless of the specifications regarding the number of test specimens in the above standard, only one plate may be used for evaluating the bending strength.

[0047] The bending strength of the reinforcing plate (5, 5a) is stronger than that of the first support plate (B2) and the second support plate (C1, D, E1, E2), which are support parts supporting the contactor. As a result, the bending of the first support plate (B2) and the second support plate (C1, D, E1, E2) is reduced by the reinforcing plate (5, 5a), thereby reducing the stress applied to the support part supporting the contactor.

[0048] Hereinafter, a mechanism by which stress is applied to a support member that supports a contactor in an inspection jig that is not equipped with a reinforcing plate (5, 5a) will be explained.

[0049] Specifically, as shown in FIG. 8, when the inspection jig comes into contact with the object to be inspected and the contactor (Pr) is pressed in and bent, the plate (PL) is pressed and bent by the bent contactor (Pr). More specifically, as shown in FIG. 9, the bent contactor (Pr) comes into contact with and catches on the opening edge of the through hole (PLH) of the plate (PL), and strongly presses the plate (PL) in.

[0050] In this state, when the inspection jig is separated from the object to be inspected and the contactor (Pr) attempts to return to its original position, the plate (PL) is tensioned by the contactor (Pr) as shown in FIG. 10 and bends in the reverse direction. More specifically, the bent contactor (Pr) is strongly pressed against the inner wall of the through hole (PLH). Consequently, a large frictional force is generated between the contactor (Pr) and the through hole (PLH), and as shown in FIG. 11, when the contactor (Pr) returns to its original position, the contactor (Pr) tensions the plate (PL), causing the plate (PL) to bend in the reverse direction. As the plate (PL) bends in this manner, stress is applied to the plate (PL), which is the supporting part that supports the contactor (Pr).

[0051] Meanwhile, the inspection jig (3) is equipped with a reinforcing plate (5, 5a) that has a stronger bending strength than the first support plate (B2) and the second support plate (C1, D, E1, E2), so the bending of the first support plate (B2) and the second support plate (C1, D, E1, E2) is suppressed by the reinforcing plate (5, 5a). Accordingly, as a result of the reduction in the bending of the first support plate (B2) and the second support plate (C1, D, E1, E2), it becomes easier to reduce the stress applied to the first support plate (B2) and the second support plate (C1, D, E1, E2), which are the support parts supporting the contactor (Pr).

[0052] In addition, the first support plate (B2) does not have a higher hardness than the second support plate (C1, D, E1, E2). As for the hardness of the first support plate (B2) and the second support plate (C1, D, E1, E2), various indicators can be used, such as Vickers hardness, Brinell hardness, Knoop hardness, Rockwell hardness, Superficial hardness, Meyer hardness, Durometer hardness, Barcol hardness, Monotron hardness, Shore hardness, and Mohs hardness. The hardness of the first support plate (B2) and the second support plate (C1, D, E1, E2) can be evaluated, for example, by JIS Z 2244 “Vickers hardness test—test method” or ISO 6507.

[0053] FIG. 12 illustrates an example using a reinforcing plate (5a), but of course, a reinforcing plate (5) may also be used. When the contactor (Pr) is bent, the load applied to the first support member (311) due to the bending is mostly applied to the opening edge (H1) of the through hole (B2H) of the first support plate (B2). Therefore, the frictional force of the contactor (Pr) is greatest in the through hole (B2H) among the through holes (B2H, C1H, DH, E1H, E2H). Thus, by making the hardness of the first support plate (B2) not higher than that of the second support plate (C1, D, E1, E2), the risk of the contactor (Pr) being scratched can be reduced.

[0054] In addition, the second support plate (C1, D, E1, E2) has a stronger bending strength than the first support plate (B2). As described above, since the first support plate (B2) has a lower hardness than the second support plate (C1, D, E1, E2), the risk of the contactor (Pr) being scratched can be reduced. Meanwhile, materials with lower hardness generally have weak bending strength.

[0055] Therefore, by combining the first support plate (B2), which has a hardness not higher than that of the second support plate (C1, D, E1, E2), and the second support plate (C1, D, E1, E2), which has a bending strength stronger than that of the first support plate (B2), the first support part (311) can secure overall bending strength while reducing the risk of the contactor (Pr) being scratched.

[0056] In addition, the opening edge portions (H1, H2) in the through hole (B2H) of the first support plate (B2) are chamfered. As a result, the smoothness of the opening edge portions (H1, H2) is increased, thereby reducing the risk of the contactor (Pr) being scratched by friction with the opening edge portions (H1, H2). The chamfering can be done in various shapes, such as a rounded surface that rounds the angles, an angled surface that cuts the angles obliquely, and other chamfered shapes. As shown in FIG. 12, the through hole (H) of each support plate may have a large diameter portion and a small diameter portion connected. In this case, it is preferable that the opening edge portion of the small diameter portion of the through hole (H) be chamfered.

[0057] Additionally, since the contactor (Pr) bends on the side of the second support portion (312) of the first support plate (B2), the friction between the contactor (Pr) and the opening edge portion (H1) on the side of the second support portion (312) is greater than the friction between the contactor (Pr) and the opening edge portion (H2) on the side of the second support plate (C1). Therefore, although FIG. 12 shows an example where both opening edge portions (H1, H2) are chamfered, among the opening edge portions (H1, H2), only the opening edge portion (H1) on the side of the second support portion (312), where the friction with the contactor (Pr) is greater, may be chamfered.

[0058] Alternatively, the opening edge portions (H1, H2) in the through hole (B2H) of the first support plate (B2) do not need to be chamfered.

[0059] In addition, the positions of the through holes (H) of each support plate do not necessarily have to be offset, and the contactor (Pr) is not limited to an example where it is supported at an angle. Furthermore, the second support plate (C1, D, E1, E2) is not limited to an example where it has a stronger bending strength than the first support plate (B2), and the first support plate (B2) is not limited to an example where it has lower hardness than the second support plate (C1, D, E1, E2).

[0060] Additionally, the support member (31) may be configured so that it does not have a reinforcing plate (5), and the first support plate (B2) functions as a reinforcing plate.

[0061] As illustrated in FIGS. 13 and 14, the support member (31a) of the inspection jig (3a) is provided with a reinforcing plate (B2a) instead of a reinforcing plate (5, 5a). The reinforcing plate (B2a) has the same shape as the first support plate (B2). Additionally, the reinforcing plate (B2a) is made of the same material as the reinforcing plate (5, 5a) or has the same bending strength as the reinforcing plate (5, 5a).

[0062] The first support portion (311a) of the support member (31a) is configured such that it does not have a first support plate (B2), and second support plates (C1, D, E1, E2) (one or more support plates) are stacked in the Z direction. In this case, the second support plate (C1) corresponds to the opposing support plate closest to the second support portion (312) among the one or more support plates.

[0063] According to the inspection jig (3a), the bending of the second support plate (C1, D, E1, E2) is reduced by the reinforcing plate (B2a), thereby reducing the stress applied to the support portion that supports the contactor (Pr). Additionally, instead of the reinforcing plate (5) or the reinforcing plate (5a) and the first support plate (B2) in the inspection jig (3), the inspection jig (3a) may be equipped only with the reinforcing plate (B2a). Thus, the configuration of the inspection jig (3a) can be simplified.

[0064] The reinforcing plate (B2a) has the same shape as the first support plate (B2). Therefore, the inspection jig (3a), like the inspection jig (3), can bend each contactor (Pr) in the X direction by making each contactor (Pr) inclined in the same direction in the X direction. In addition, the inspection jig (3a), like the inspection jig (3), bends each contactor (Pr) along the X direction (first direction) where the number of rows of through holes (H) is small, thereby reducing the risk of contactors (Pr) coming into contact with each other.

[0065] Additionally, although an example has been shown in which the first support member (311a) is provided with four second support plates (C1, D, E1, E2) as support plates, the support plates provided by the first support member (311a) may be one or five or more. When the support plate provided by the first support member (311a) is one, that support plate corresponds to the opposing support plate.

[0066] In addition, just like the first support plate (B2), the opening edge portions (H1, H2) in the through hole (B2H) of the reinforcing plate (B2a) are chamfered, so the risk of the contactor (Pr) being scratched by friction with the opening edge portions (H1, H2) can be reduced. In addition, among the opening edge portions (H1, H2) of the reinforcing plate (B2a), only the opening edge portion (H1) on the side of the second support portion (312), where friction with the contactor (Pr) is greater, may be chamfered.

[0067] Alternatively, the opening edge portions (H1, H2) in the through hole (B2H) of the reinforcing plate (B2a) do not need to be chamfered.

[0068] In addition, in the inspection jig (3, 3a), it is preferable that an active layer (33), such as a coating layer, be formed on the inner surface of each through hole (H) of each support plate or reinforcing plate (5a, B2a) to reduce friction. In FIG. 15, each support plate or reinforcing plate (5a, B2a) is shown as a plate (PL), and the through hole (H) is shown in more detail. The inner surface of the through hole (H) of the plate (PL) includes a chamfered opening edge portion (H1, H2) (chamfered portion) and a through hole body portion (H3) which is the portion excluding the opening edge portion (H1, H2) on the inner surface of the through hole (H). In the plate (PL), for example, a large diameter portion (H4) that is coaxial with the through hole (H) and has a larger diameter than the through hole (H) is connected to the through hole (H).

[0069] As illustrated in FIG. 15, the active layer (33) may be formed over the entire surface of the plate (PL), including the inner surface of each through hole (H). However, since the contactor (Pr) does not come into contact with parts other than the inner surface of each through hole (H), the active layer (33) does not need to be formed on parts other than the inner surface of each through hole (H).

[0070] Additionally, the active layer (33) may be formed on at least one side of the through hole body part (H3) and the opening edge part (H1) among the inner surfaces of each through hole (H).

[0071] The thickness of the active layer (33) is, for example, about 1 μm. The friction coefficient of the active layer (33) with respect to the contactor (Pr) is smaller than the friction coefficient of the base portion (34) of the active layer (33) in the plate (PL). The active layer (33) can be formed by, for example, by depositing a material with a small friction coefficient. The magnitude of the friction coefficients can be compared between kinetic friction coefficients or between static friction coefficients.

[0072] As the material for the active layer (33), for example, a paraxylylene-based polymer can be used, and insulating materials with a low friction coefficient such as parylene (registered trademark), fluorine, polyester, acrylic, etc. are preferred.

[0073] In this way, by forming an active layer (33) on the inner surface of the through hole (H), friction between the through hole (H) and the contactor (Pr) can be reduced.

[0074] Additionally, the contactor (Pr) bends toward the second support portion (312) of the first support plate (B2) or the reinforcing plate (5a, B2a). Because of this, the contact pressure between the contactor (Pr) and the through hole (B2H) of the first support plate (B2), the through hole (B2H) of the reinforcing plate (B2a), or the through hole (5H) of the reinforcing plate (5a) is more likely to be greater than the contact pressure between the contactor (Pr) and other through holes (H), and friction is more likely to occur.

[0075] Accordingly, the active layer (33) may be formed on the inner surface of at least the through hole (B2H) of the first support plate (B2), the through hole (B2H) of the reinforcing plate (B2a), or the through hole (5H) of the reinforcing plate (5a).

[0076] That is, an inspection jig according to an example of the present invention comprises a rod-shaped contactor, a first support member supporting one end of the contactor, a second support member supporting the other end of the contactor, and a spaced-apart support member that holds and supports the first support member and the second support member apart from each other, wherein the first support member comprises a support plate having a through hole formed therein into which the contactor is inserted and penetrated, and a reinforcing plate having a greater bending strength than the support plate is disposed on the surface of the support plate opposite to the second support member.

[0077] According to this configuration, a reinforcing plate with a stronger bending strength than the support plate is disposed on the opposite side of the second support portion of the support plate, so the bending of the support plate is reduced by the reinforcing plate. As a result, it becomes easier to reduce the stress applied to the support plate, which is a support portion supporting the contactor.

[0078] Additionally, the first support member comprises a plurality of stacked support plates, wherein the plurality of support plates includes a first support plate which is the support plate closest to the second support member and a second support plate which is a support plate other than the first support plate, and the reinforcing plate is disposed on the surface of the first support plate opposite to the second support member.

[0079] According to this configuration, a plurality of support plates are stacked to form a first support member. Since the contactor bends significantly between the first support member and the second support member, the first support plate, which is the support plate closest to the second support member among the plurality of support plates of the first support member, is most susceptible to the force caused by the bending of the contactor. A reinforcing plate is placed on the first support plate that is most susceptible to the force caused by the bending of the contactor. In this way, by reinforcing the support plate that is most susceptible to the force caused by the bending of the contactor, it becomes easier to reduce the stress applied to the support member.

[0080] In addition, it is preferable that the first support plate has a hardness that is not higher than that of the second support plate.

[0081] Since the contactor bends significantly between the first support and the second support, when the contactor bends, the friction between the through hole of the first support plate and the contactor is greater than the friction between the through hole of the second support plate and the contactor. Therefore, by making the hardness of the first support plate, which has greater friction, not higher than that of the second support plate, it becomes easier to reduce the risk of the contactor being scratched.

[0082] In addition, it is preferable that the second support plate has a stronger bending strength than the first support plate.

[0083] Materials with low hardness generally tend to have low bending strength. Therefore, by combining a first support plate with low hardness and a second support plate with high bending strength, it becomes easier to secure the bending strength of the entire first support while reducing the risk of scratching the contactor.

[0084] In addition, for the through hole of the first support plate and the through hole of the second support plate to correspond to each other so that the same contactor is inserted and penetrated, it is preferable that the position of the through hole of the first support plate and the position of the through hole of the second support plate are offset with respect to the direction of the perpendicular line so that the contactor is inclined with respect to the perpendicular line of the first and second support plates.

[0085] According to this configuration, through holes drilled in the first and second support plates make it easy to support the contactor at an angle.

[0086] Additionally, the first and second support plates have a plurality of through holes formed therein, and the plurality of through holes are arranged in a plurality of rows corresponding to a predetermined first direction and also arranged in a plurality of rows corresponding to a second direction intersecting the first direction, and within the area where the through holes are arranged at equal intervals, the number of rows corresponding to the first direction is less than the number of rows corresponding to the second direction, and the direction of the offset is preferably to follow the first direction.

[0087] According to this configuration, the offset direction of the through holes follows a first direction in which the number of rows of through holes is small. Since the contactor is inclined along the first direction, which is the offset direction of the through holes, the contactor bends along the first direction. Therefore, since the contactor bends in the direction in which the number of rows of through holes is small, that is, in which the number of rows of the contactor is small, the risk of contact between contactors is reduced compared to the case where it bends along a second direction in which the number of rows is large.

[0088] In addition, it is preferable that the opening edge on the second support side of the through hole of the first support plate be chamfered.

[0089] According to this configuration, the opening edge on the second support side, where friction with the curved contactor is likely to occur, is chamfered, and since the smoothness is increased, it is easy to reduce the risk of the contactor being scratched by friction with the opening edge.

[0090] In addition, it is preferable that the first and second support plates have a plurality of through holes formed therein, and the reinforcing plate has an opening formed therein that includes an area within the opening that includes the plurality of through holes of the first support plate.

[0091] According to this configuration, since there is no need to drill through holes for the number of contacts in the reinforcing plate, the manufacturing of the reinforcing plate is easy.

[0092] In addition, an active layer for reducing friction is formed on the inner surface of the through hole of the first support plate, and it is preferable that the friction coefficient of the active layer with respect to the contactor is smaller than the friction coefficient of the base portion of the active layer in the first support plate.

[0093] According to this configuration, friction between the contact inserted and penetrated into the through hole and the inner surface of the through hole is reduced.

[0094] In addition, the opening edge portion on the second support side of the through hole of the first support plate is a chamfered portion, and at least one of the through hole main body portion and the chamfered portion, which is the portion excluding the chamfered portion among the inner surface portions including the chamfered portion of the through hole, is formed to reduce friction, and it is preferable that the friction coefficient of the active layer with respect to the contactor is smaller than the friction coefficient of the base portion of the active layer in the first support plate.

[0095] According to this configuration, friction between at least one of the through hole body and chamfered portion within the through hole and the contactor can be reduced.

[0096] Additionally, it is preferable that one or more of the support plates have a plurality of through holes formed therein, and that the reinforcing plate has a plurality of through holes formed therein that correspond one-to-one with the plurality of through holes of the opposing support plate, which is the support plate closest to the second support portion among the one or more of the support plates.

[0097] According to this configuration, even areas where through holes are formed in the support plate can be reinforced with a reinforcing plate, thereby improving the effect of reducing stress applied to the support member that supports the contactor.

[0098] In addition, for the through hole of the reinforcing plate and the through hole of the opposing support plate to correspond to each other so that the same contactor is inserted and penetrated, it is preferable that the position of the through hole of the reinforcing plate and the position of the through hole of the opposing support plate be offset with respect to the direction of the perpendicular line so that the contactor is inclined with respect to the perpendicular line of the reinforcing plate and the opposing support plate.

[0099] According to this configuration, through holes drilled in the reinforcing plate and the opposing support plate make it easy to support the contactor at an angle.

[0100] Additionally, the plurality of through holes of the reinforcing plate and the opposing support plate are preferably arranged in a plurality of rows corresponding to a predetermined first direction and also arranged in a plurality of rows corresponding to a second direction intersecting the first direction, the number of rows corresponding to the first direction is less than the number of rows corresponding to the second direction, and the direction of the offset follows the first direction.

[0101] According to this configuration, the offset direction of the through holes follows a first direction in which the number of rows of through holes is small. Since the contactor is inclined along the first direction, which is the offset direction of the through holes, the contactor bends along the first direction. Therefore, since the contactor bends in the direction in which the number of rows of through holes is small, that is, in which the number of rows of the contactor is small, the risk of contact between contactors is reduced compared to the case where it bends along a second direction in which the number of rows is large.

[0102] In addition, it is preferable that the opening edge on the second support side of the through hole of the reinforcing plate be chamfered.

[0103] According to this configuration, the opening edge on the second support side, where friction with the curved contactor is likely to occur, is chamfered, and since the smoothness is increased, it is easy to reduce the risk of the contactor being scratched by friction with the opening edge.

[0104] In addition, an active layer for reducing friction is formed on the inner surface of the through hole of the reinforcing plate, and it is preferable that the friction coefficient of the active layer with respect to the contactor is smaller than the friction coefficient of the base portion of the active layer in the reinforcing plate.

[0105] According to this configuration, friction between the contact inserted and penetrated into the through hole and the inner surface of the through hole is reduced.

[0106] In addition, the opening edge portion on the second support side of the through hole of the reinforcing plate is a chamfered portion, and at least one of the through hole main body portion and the chamfered portion, which is the portion excluding the chamfered portion among the inner surface portions including the chamfered portion of the through hole, is formed to reduce friction, and it is preferable that the friction coefficient of the active layer with respect to the contactor is smaller than the friction coefficient of the base portion of the active layer in the reinforcing plate.

[0107] According to this configuration, friction between at least one of the through hole body and chamfered portion within the through hole and the contactor can be reduced.

[0108] An inspection device according to an example of the present invention comprises the inspection jig described above and an inspection processing unit that performs an inspection of an object based on an electrical signal obtained by contacting the contactor with an inspection point provided on the object to be inspected.

[0109] According to this configuration, it becomes easy to reduce the stress applied to the support portion that supports the contactor in the inspection jig used for inspection.

[0110] Inspection jigs and inspection devices with such a configuration make it easy to reduce the stress applied to the support member that supports the contactor.

[0111] This application is based on Japanese Patent Application No. 2020-71031 filed on April 10, 2020, and Japanese Patent Application No. 2020-131206 filed on July 31, 2020, the contents of which are incorporated herein. Furthermore, specific embodiments or examples made in the claims regarding forms for carrying out the invention are merely intended to clarify the technical content of the present invention, and the present invention should not be interpreted narrowly as being limited only to such specific embodiments. Explanation of the symbols

[0112] 1: Inspection device 3, 3a, 3U, 3D: Inspection Jig 4, 4U, 4D: Inspection unit 5, 5a, B2a: Reinforcement plate 5C: Opening 6: Substrate fixing device 7: Spaced-retaining support member 8: Inspection Processing Unit 31, 31a: Support member 100: Substrate (object to be inspected) 311, 311a: First support 312: 2nd Support Unit 321: Base Plate A, A2, A3: Support plates H, 5H, AH, A2H, A3H, B2H, C1H, DH, E1H, E2H: Through holes B: Separation block B2: First support plate (support plate, opposing support plate) C1: Second support plate (support plate, opposing support plate) D, E1, E2: Second support plate (support plate) H1, H2: Opening edge (chamfer) P1: Area 1 P2: Area 2 PL: Plate PLH: Through hole Pr: Contact S: Spacer

Claims

Claim 1 An inspection jig comprising a rod-shaped contactor, a first support member supporting one end of the contactor, a second support member supporting the other end of the contactor, and a spaced-holding support member that holds and supports the first support member and the second support member apart from each other, wherein the first support member comprises a support plate having a through hole formed therein through which the contactor is inserted and penetrated, and the first support member comprises a plurality of stacked support plates, wherein the plurality of support plates includes a first support plate which is the support plate closest to the second support member, and a second support plate which is a support plate other than the first support plate, and wherein the first support plate has a softer hardness than the second support plate. Claim 2 An inspection jig comprising a rod-shaped contactor, a first support member supporting one end of the contactor, a second support member supporting the other end of the contactor, and a spaced-holding support member that holds and supports the first support member and the second support member apart from each other, wherein the first support member comprises a support plate having a through hole formed therein through which the contactor is inserted and penetrated, and the first support member comprises a plurality of stacked support plates, wherein the plurality of support plates includes a first support plate which is the support plate closest to the second support member, and a second support plate which is a support plate other than the first support plate, and wherein the first support plate has a stronger bending strength than the second support plate. Claim 3 An inspection jig according to claim 1, wherein a reinforcing plate is disposed on the opposite surface of the first support plate to the second support portion. Claim 4 In paragraph 2, an inspection jig having a reinforcing plate disposed on the opposite surface of the first support plate to the second support portion. Claim 5 In claim 1, the through hole of the first support plate and the through hole of the second support plate, which correspond to each other so that the same contactor is inserted and penetrated, are such that the position of the through hole of the first support plate and the position of the through hole of the second support plate are offset with respect to the direction of the perpendicular line so as to incline the contactor with respect to the perpendicular line of the first and second support plates, in an inspection jig. Claim 6 In paragraph 2, the through hole of the first support plate and the through hole of the second support plate, which correspond to each other so that the same contactor is inserted and penetrated, are an inspection jig in which the position of the through hole of the first support plate and the position of the through hole of the second support plate are offset with respect to the direction of the perpendicular so as to incline the contactor with respect to the perpendicular of the first and second support plates. Claim 7 In claim 5, the first and second support plates have a plurality of through holes formed therein, the plurality of through holes are arranged in a plurality of rows corresponding to a predetermined first direction and also arranged in a plurality of rows corresponding to a second direction intersecting the first direction, and within an area where the through holes are arranged at equal intervals, the number of rows corresponding to the first direction is less than the number of rows corresponding to the second direction, and the direction of the offset follows the first direction, an inspection jig. Claim 8 In claim 6, the first and second support plates have a plurality of through holes formed therein, the plurality of through holes are arranged in a plurality of rows corresponding to a predetermined first direction and also arranged in a plurality of rows corresponding to a second direction intersecting the first direction, and within an area where the through holes are arranged at equal intervals, the number of rows corresponding to the first direction is less than the number of rows corresponding to the second direction, and the direction of the offset follows the first direction, an inspection jig. Claim 9 In claim 1, the opening edge portion on the second support side of the through hole of the first support plate is chamfered, in the inspection jig. Claim 10 In paragraph 2, the opening edge portion on the second support side of the through hole of the first support plate is chamfered, in the inspection jig. Claim 11 In claim 1, an active layer for reducing friction is formed on the inner surface of the through hole of the first support plate, and the friction coefficient of the active layer with respect to the contactor is smaller than the friction coefficient of the base portion of the active layer in the first support plate, an inspection jig. Claim 12 In paragraph 2, an inspection jig is formed on the inner surface of the through hole of the first support plate to reduce friction, and the friction coefficient of the active layer with respect to the contactor is smaller than the friction coefficient of the base portion of the active layer in the first support plate. Claim 13 An inspection device comprising an inspection jig described in any one of claims 1 to 12, and an inspection processing unit that performs an inspection of an object based on an electrical signal obtained by contacting the contactor to an inspection point provided on the object. Claim 14 delete Claim 15 delete Claim 16 delete Claim 17 delete

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