Apparatus of insulating for pipe using vacuum insulation

Abstract

This invention proposes a pipe insulation device utilizing vacuum insulation, which eliminates errors during the installation process to reduce temperature deviations, lowers costs such as labor expenses, and resolves environmental pollution issues caused by insulation materials. The device comprises an assembly barrel surrounding the pipe, which includes a temperature control section through which a temperature-controlling fluid flows to regulate the internal temperature of the pipe, and a vacuum section surrounding the temperature control section to prevent heat from the temperature control section from being released to the outside through a vacuum. Multiple assembly barrels are connected along the longitudinal direction of the pipe, and the multiple assembly barrels are in contact at the side walls. The side walls are in contact at a first contact section on the inner side wall near the temperature control section and a second contact section on the outer side wall near the vacuum section, with an insulating space existing between the inner and outer side walls.

Description

Technology Field

[0001] The present invention relates to an insulation device, and more specifically, to a device that controls the inside of a pipe by utilizing a fluid and insulating it with a vacuum. Background Technology

[0002] In processes such as semiconductor, display, and equipment manufacturing, the interior of pipes is maintained at the process temperature required for the process to prevent fluids, such as liquids or gases, from solidifying and depositing on the inner surface of the pipes. Generally, to maintain the interior of the pipes at the process temperature, heater jackets with embedded heating elements, such as those described in Korean Registered Patent No. 10-1562238, are primarily used. Insulating materials are used to reduce power consumption by preventing burns caused by contact with the heater jacket and by preventing heat from the heating wires from escaping to the outside.

[0003] However, heater jackets exhibit significant temperature fluctuations, making them unsuitable for application in piping that requires precise temperature maintenance. For instance, considerable temperature variations occur due to improper installation of heater jackets. Since thin and short pipes are widely used in processes such as semiconductor, display, and equipment manufacturing, these temperature fluctuations pose serious problems. Consequently, there is a demand for insulation methods that can reduce temperature variations during installation and lower costs, such as labor expenses. Meanwhile, environmental pollution issues caused by the insulation materials used in heater jackets continue to be raised. The problem to be solved

[0004] The problem that the present invention aims to solve is to provide a pipe insulation device utilizing vacuum insulation that eliminates errors during the installation process, reduces temperature deviations, lowers costs such as labor expenses, and resolves environmental pollution issues caused by insulation materials. means of solving the problem

[0005] An insulation device for piping utilizing vacuum insulation to solve the problem of the present invention includes an assembly barrel that surrounds the pipe. In this case, the assembly barrel includes a temperature control section through which a temperature control fluid flows to control the internal temperature of the pipe, and a vacuum section that surrounds the temperature control section and prevents heat from the temperature control section from being released to the outside by means of a vacuum. A plurality of assembly barrels are connected along the longitudinal direction of the pipe, and the plurality of assembly barrels are in contact at a side wall section. The side wall section is in contact at a first contact section of an inner side wall near the temperature control section and a second contact section of an outer side wall near the vacuum section, and an insulation space exists between the inner side wall and the outer side wall.

[0006] In the device of the present invention, any one of external air, cooling gas, or cooling water may flow in the insulating space. The vacuum section may form a plurality of layers. The temperature control section may include an obstacle that reduces the flow velocity of the temperature control fluid. The pipe includes an outer barrel along its longitudinal direction, and the outer barrel may have an inlet for the temperature control fluid to flow in, an outlet for the temperature control fluid to flow out, or a combination thereof. An inner barrel exists on the inner side of the outer barrel, and the inner barrel may include a passage through which the temperature control fluid flows. The vacuum section may surround the temperature control section and extend from one side of the side wall to the other side of the side wall. Effects of the invention

[0007] According to the pipe insulation device utilizing vacuum insulation of the present invention, by applying a double structure of temperature control and vacuum insulation, errors during the installation process are eliminated to reduce temperature deviations and lower costs such as labor expenses, while also resolving environmental pollution issues caused by insulation materials. Furthermore, thermal insulation using a vacuum can enhance heat retention, and energy can be saved by reducing the power required to maintain the temperature. Brief explanation of the drawing

[0008] FIG. 1 is an exploded perspective view for schematically explaining a first insulation device according to the present invention. Figure 2 is a cross-sectional view taken along line II-II of Figure 1. Figure 3 is a cross-sectional view taken along line III-III of Figure 1. Figure 4 is a perspective view with a portion cut off to explain region IV of Figure 1. FIG. 5 is a perspective view for schematically explaining a second insulation device according to the present invention. Figure 6 is a cross-sectional view taken along line VI-VI of Figure 5. Specific details for implementing the invention

[0009] Preferred embodiments of the present invention will be described in detail below with reference to the attached drawings. The embodiments described below may be modified in various different forms, and the scope of the present invention is not limited to the embodiments described below. The embodiments of the present invention are provided to more fully explain the invention to those skilled in the art. In the drawings, exaggerated representations have been used for convenience of explanation. Meanwhile, terms indicating location, such as top, bottom, front, etc., are related only to what is shown in the drawings. In practice, the insulation device can be used in any optional direction, and in actual use, the spatial direction changes depending on the direction and rotation of the insulation device.

[0010] Embodiments of the present invention present a pipe insulation device that eliminates errors during the installation process, reduces temperature deviations, lowers costs such as labor expenses, and resolves environmental pollution issues caused by insulation materials by applying a dual structure of temperature control and vacuum insulation. To this end, the structure of the insulation device including the dual structure of temperature control and vacuum insulation will be examined in detail, and the insulation effect resulting from the dual structure will be explained in detail. The insulation according to the embodiment of the present invention surrounds the exterior of the pipe and heats the pipe to the process temperature for the transport of process fluids, such as liquids or gases, in processes such as semiconductor, display, and equipment manufacturing. For convenience of explanation, the dual structure for performing temperature control and vacuum insulation is referred to as an insulation barrel. Here, insulation is a concept that includes temperature control of the pipe.

[0011] FIG. 1 is an exploded perspective view for schematically explaining a first insulation device (100) according to an embodiment of the present invention. However, it is not a drawing in the strict sense, and for convenience of explanation, there may be components not shown in the drawing.

[0012] According to FIG. 1, the first insulation device (100) may comprise a first assembly barrel (10) and a second assembly barrel (40). The first assembly barrel (10) and the second assembly barrel (40) are assembled to surround the pipe (PL). Although not shown in the drawing, the first assembly barrel (10) and the second assembly barrel (40) may form a single body. If it is a single body, the side wall portion (20) in the drawing does not exist, and the pipe (PL) is inserted and installed in the space (SP) provided by the first insulation device (100). The case where the first and second assembly barrels (10, 40) form a single body can be applied when newly manufacturing the first insulation device (100) together with the pipe (PL). When the first and second assembly barrels (10, 40) form a single body, it is called an integrated insulation device.

[0013] Here, a first insulation device (100) is shown in which a first assembly barrel (10) and a second assembly barrel (40) are assembled. The first insulation device (100) in which the first assembly barrel (10) and the second assembly barrel (40) are assembled is called an assembly type insulation device. The assembly type first insulation device (100) is suitable for attachment to existing pipes (PL). The integrated insulation device is applied when newly manufactured together with the pipes (PL), and the assembly type first insulation device (100) is applied to existing pipes (PL). It is desirable that the first assembly barrel (10) and the second assembly barrel (40) are structurally identical to each other, differing only in the location where they are attached to the pipes (PL). In the drawing, the first and second assembly barrels (10, 40) are of the same size, and their respective areas covering the pipes (PL) are depicted as being the same, but the areas covering the pipes (PL) can be designed differently as needed.

[0014] The diameter, shape, and material of the piping (PL) may vary depending on the environment in which it is applied. A process fluid, such as a liquid or gas, required in processes such as semiconductor, display device, and equipment manufacturing flows inside the piping (PL). The process fluid may be a high-temperature process fluid, approximately 300°C or higher, required in processes such as semiconductors and displays. The first insulation device (100) allows the high-temperature process fluid to flow while minimizing the temperature deviation. If the temperature deviation increases, the efficiency of producing products in subsequent processes using the process fluid decreases. In particular, in processes requiring precise control, such as semiconductors and displays, a large temperature deviation causes more serious problems. The first insulation device (100) drastically reduces the temperature deviation compared to a conventional heater jacket.

[0015] The first insulation device (100) may be formed by connecting the first and second assembled barrels (10, 40) in a longitudinal direction. The first insulation device (100) in which the first and second assembled barrels (10, 40) are assembled includes an outer barrel (EB), and an inner barrel (IB) exists on the inner side of the outer barrel (EB). The first and second assembled barrels (10, 40) are set based on the width direction of the pipe (PL), and the outer and inner barrels (EB, IB) are set based on the length direction of the pipe (PL). At least one inner barrel (IB) may exist in the first insulation device (100). The first insulation device (100) may have outer barrels (EB) arranged on both sides, and the first insulation device (100) may be formed with only a single outer barrel (EB) without an inner barrel (IB).

[0016] In the outer barrel (EB), there is an inlet (30) into which a temperature-controlling fluid is introduced, an outlet (31) into which the fluid is discharged, or a combination thereof. At this time, the temperature-controlling fluid is introduced into the inlet (30) and discharged into the outlet (31). If there are two outer barrels (EB), an inlet (30) is provided in one outer barrel (EB), and an outlet (31) is provided in the other outer barrel (EB). In the first insulation device (100), if it consists of a single outer barrel (EB), both the inlet (30) and the outlet (31) exist in the outer barrel (EB). The inner barrel (IB) does not have an inlet (30) or an outlet (31). In other words, the outer barrel (EB) and the inner barrel (IB) are distinguished based on whether the inlet (30) and the outlet (31) exist. A passage (32) is located in the inner barrel (IB) so that the temperature control fluid flows through the passage (32).

[0017] The above-mentioned temperature control fluid maintains the internal temperature of the pipe (PL) at the process temperature required for the process in order to prevent the fluid, such as a liquid or gas, from solidifying and depositing on the inner surface of the pipe (PL). This will be explained in detail later.

[0018] The inlet (30) and outlet (31) may be installed on the first bracket (15). However, within the scope of the present invention, the location where the inlet (30) and outlet (31) are installed may be varied. If necessary, the first and second assembly barrels (10, 40) may be covered with an outer shell (16). The outer shell (16) may be a covering for protecting the first and second assembly barrels (10, 40) from external impact and for thermal insulation. Additionally, irregularities (16a) may be provided on the surface of the outer shell (16) so that a worker can easily grasp them, thereby facilitating work. In some cases, the irregularities (16a) may be provided directly on the wall (11) without the outer shell (16).

[0019] FIG. 2 is a cross-sectional view taken along line II-II of FIG. 1, and FIG. 3 is a cross-sectional view taken along line III-III of FIG. 1. At this time, the first insulation device (100) is to be described with reference to FIG. 1.

[0020] According to FIG. 2, the first insulation device (100) surrounds the pipe (PL) and is formed by assembling the first assembly barrel (10) and the second assembly barrel (40). The first and second assembly barrels (10, 40) have the same structure, although they are assembled at different locations. In each of the first and second assembly barrels (10, 40), a temperature control unit (12), a first vacuum unit (13), and a second vacuum unit (14) are sequentially arranged based on the pipe (PL). The temperature control unit (12) and the first and second vacuum units (13, 14) are implemented by the walls (11) forming the first and second assembly barrels (10, 40). In some cases, only the first vacuum unit (13) may exist without the second vacuum unit (14). The temperature control fluid is introduced into the inlet (30), flows through the temperature control unit (12), and then exits through the outlet (31). At this time, the first and second assembly barrels (10, 40) may be made of a metal material resistant to temperature and corrosion, such as stainless steel.

[0021] It is preferable that the temperature of the above-mentioned temperature-controlling fluid be the same as or close to the temperature of the process fluid being transported through the piping (PL). For example, if the temperature of the above-mentioned process fluid is 300°C within the range of an allowed temperature deviation, the temperature of the above-mentioned temperature-controlling fluid may be 300±3°C. The temperature of the above-mentioned fluid may be set by considering the size and shape of the piping (PL), the structure of the first insulation device (100), etc. The above-mentioned fluid is preferably a gaseous fluid that changes temperature rapidly and achieves stable circulation, and the above-mentioned gaseous fluid includes air, inert gas, and mixtures thereof. If the temperature of the above-mentioned fluid is the same as or close to the temperature of the above-mentioned process fluid, the temperature deviation of the above-mentioned process fluid can be minimized.

[0022] On the inner surface of the temperature control unit (12), protrusions (17) or concave portions (18), or a combination thereof, are provided to slow down the flow velocity of the temperature control fluid. The protrusions (17) or concave portions (18), or a combination thereof, form a vortex of the fluid, thereby reducing the flow velocity. When the flow velocity of the fluid is reduced, the time the fluid stays in the temperature control unit (12) increases. When the time the fluid stays in the temperature control unit (12) increases, the heat energy of the fluid is sufficiently transferred to the process fluid, and the consumption of the fluid is reduced. The shape, size, number, etc., of the protrusions (17) or concave portions (18), or a combination thereof, are pre-set so that sufficient temperature control of the process fluid being transported through the piping (PL) is achieved. Alternatively, an obstacle such as a mesh may be placed inside the temperature control unit (12). Here, the protrusion (17), the concave part (18) and the mesh, etc. are obstacles that reduce the flow velocity of the temperature-controlled fluid.

[0023] Meanwhile, while the process fluid is flowing, the temperature of the temperature control fluid in the temperature control unit (12) is determined so that the process temperature of the process fluid is maintained. However, when replacing the pipe (PL), the pipe (PL) must be cooled quickly, so a cooling fluid that cools the pipe (PL) may flow in the temperature control unit (12). Such a process fluid or cooling fluid is called a temperature control fluid. If the pipe (PL) is cooled quickly, the time required to replace the pipe (PL) can be significantly reduced. If the pipe (PL) is not cooled, it is difficult to replace the pipe (PL). The temperature control fluid can be applied to both heating and cooling. In this way, the temperature of the temperature control fluid varies depending on the usage status of the first insulation device (100) of the present invention.

[0024] The first vacuum section (13) surrounds the temperature control section (12) in the remaining portion excluding the first bracket (15). The first vacuum section (13) has a blocking space (a) in the form of surrounding the side (12a) of the temperature control section. When the first vacuum section (13) surrounds the side (12a) of the temperature control section, the insulation effect can be enhanced so that heat from the temperature control section (12) is not released outside the first insulation device (100). If the first vacuum section (13) does not surround the side (12a) of the temperature control section and there is no blocking space (a), the side (12a) of the temperature control section is included in the side wall section (20) of the first and second assembly barrels (10, 40). When the side (12a) of the temperature control section forms part of the side wall section (20), heat from the temperature control section (12) is released directly through the side wall section (20). The blocking space (a) prevents heat from the temperature control unit (12) from being directly released from the side wall (20).

[0025] Meanwhile, in the drawing, the blocking space (a) is depicted as existing in the side portion of the temperature control unit (12) in the width direction of the temperature control unit (12). However, the blocking space (a) may also exist in the end portions of the temperature control unit (12) in the length direction of the temperature control unit (12). In other words, the blocking space (a) may exist in all parts of the temperature control unit (12) except for the part that transmits temperature to the pipe (PL). The part that transmits temperature to the pipe (PL) is the part of the temperature control unit (12) that comes into contact with the pipe (PL).

[0026] The second vacuum section (14) covers the upper surface (13a) of the first vacuum section. The second vacuum section (14), together with the first vacuum section (13), insulates heat originating from the temperature control section (12). If the purpose of insulation is sufficiently achieved by the first vacuum section (13), the second vacuum section (14) is not required. The first and second vacuum sections (13, 14) function to provide insulation through vacuum. The vacuum insulation maintains the interior of the first and second vacuum sections (13, 14) at a high vacuum, thereby preventing heat conduction and convection by gas molecules. When heat conduction and convection are prevented, heat release from the temperature control section (12) is drastically reduced. Although not shown in the drawing, the first and second vacuum sections (13, 14) are provided with a hole to form a vacuum, and after the vacuum is formed, the hole is closed.

[0027] Unlike conventional methods, the first and second vacuum sections (13, 14) do not use insulation material, thus eliminating environmental pollution problems caused by the use of insulation material. Since the first and second vacuum sections (13, 14) prevent heat conduction and convection by gas molecules, the insulation effect is improved compared to the conventional method using insulation material. In addition, since the temperature of the process fluid inside the pipe (PL) is precisely controlled by the temperature control section (12) through which the temperature control fluid flows, errors in the installation process of conventional insulation material can be eliminated, thereby reducing temperature deviations. In actual field operations, the first and second assembly barrels (10, 40) can be assembled, thus reducing costs such as labor costs.

[0028] At least one vacuum section according to an embodiment of the present invention is arranged. Specifically, it may consist only of a first vacuum section (13), or, as shown in the drawing, a second vacuum section (14) covering the first vacuum section (13) may be added. Furthermore, more vacuum sections surrounding the second vacuum section (14) may be added. A plurality of vacuum sections may be described as each vacuum section forming a plurality of layers. In addition, the width of each vacuum section may be varied in various ways considering the application in which the first insulation device (100) of the present invention is used, the type of process fluid, the process temperature, etc.

[0029] The first and second assembly barrels (10, 40) are in contact with each other at the side wall portion (20). The side wall portion (20) is in contact at the first contact portion (b) of the inner side wall (21) near the temperature control portion (12) and the second contact portion (c) of the outer side wall (22) near the second vacuum portion (14). An insulating space (23) is formed between the inner side wall (21) and the outer side wall (22). Since the insulating space (23) is a space where there is no contact at the side wall portion (20), the heat transfer rate drops sharply. The first and second contact portions (b, c) are preferably as small as possible in terms of contact area, provided that the first and second assembly barrels (10, 40) are sufficiently joined. Meanwhile, the vacuum portion (14) can further enhance the insulating effect by flowing external air, cooling gas, or cooling water.

[0030] FIG. 4 is a perspective view with a portion cut off to explain region IV of FIG. 1. At this time, the first insulation device (100) is to be described with reference to FIG. 1.

[0031] According to FIG. 4, as previously explained, the first and second assembly barrels (10, 40) come into contact with each other at the side wall portion (20). The side wall portion (20) comes into contact at the first contact portion (b) of the inner side wall (21) near the temperature control portion (12) and the second contact portion (c) of the outer side wall (22) near the second vacuum portion (14). An insulating space (23) is formed between the inner side wall (21) and the outer side wall (22). Since the insulating space (23) is a space where there is no contact at the side wall portion (20), the heat transfer rate drops sharply. The contact area of ​​the first and second contact portions (b, c) should be as small as possible as long as the first and second assembly barrels (10, 40) are sufficiently joined. Any one of external air, cooling gas, or cooling water may flow in the insulating space (23).

[0032] FIG. 5 is a perspective view for schematically explaining a second insulation device (200) according to an embodiment of the present invention, and FIG. 6 is a cross-sectional view taken along line VI-VI of FIG. 5. At this time, the second insulation device (200) is identical to the first insulation device (100) except for the third and fourth assembly barrels (50, 60). Accordingly, a detailed description of the overlapping parts is omitted.

[0033] Referring to FIGS. 5 and 6, the second insulation device (200) includes third and fourth assembly barrels (50, 60). The third and fourth assembly barrels (50, 60) include third and fourth vacuum sections (52, 53). The third and fourth vacuum sections (52, 53) extend from the side wall section (20) to the side wall section (20). The first insulation device (100) is separated by a first bracket (15) extending in the longitudinal direction of the first and second assembly barrels (10, 40), but since the second insulation device (200) does not have a first bracket (15), the third and fourth vacuum sections (52, 53) extend from the side wall section (20) to the side wall section (20). The third and fourth vacuum sections (52, 53) can increase the thermal insulation effect by vacuum compared to the first and second vacuum sections (13, 14). The inlet section (30) and the outlet section (31) are inserted into the second bracket (51) which is limited around the inlet section (30) and the outlet section (31).

[0034] Although the present invention has been described in detail with reference to preferred embodiments, the present invention is not limited to the above embodiments, and various modifications are possible by those skilled in the art within the scope of the technical concept of the present invention. Explanation of the symbols

[0035] 100, 200; first and second insulation devices 10, 40, 50, 60; 1st to 4th assembled barrels 11; Wall 12; Temperature control unit 13, 14, 52, 53; 1st to 4th vacuum sections 15, 51; 1st and 2nd brackets 16; outer shell 17; protrusion 18; Concave portion 20; Sidewall portion 21, 22; medial and lateral sidewalls 23; Insulated space 30, 31; inlet and outlet EB; outer barrel IB; inner barrel

Claims

Claim 1 A pipe insulation device utilizing vacuum insulation, comprising: an assembly barrel that surrounds a pipe, wherein the assembly barrel includes a temperature control section through which a temperature control fluid for controlling the internal temperature of the pipe flows; and a vacuum section that surrounds the temperature control section and prevents heat from the temperature control section from being released to the outside by means of a vacuum, wherein a plurality of assembly barrels are connected along the longitudinal direction of the pipe, and the plurality of assembly barrels are in contact at a side wall section, wherein the side wall section is in contact at a first contact section of an inner side wall near the temperature control section and a second contact section of an outer side wall near the vacuum section, wherein an insulating space exists between the inner side wall and the outer side wall, and wherein any one of external air, cooling gas, or cooling water flows in the insulating space. Claim 2 delete Claim 3 A pipe insulation device utilizing vacuum insulation, characterized in that, in claim 1, the vacuum portion forms a plurality of layers. Claim 4 A pipe insulation device utilizing vacuum insulation, characterized in that, in claim 1, the temperature control unit includes an obstacle that reduces the flow velocity of the temperature control fluid. Claim 5 A pipe insulation device utilizing vacuum insulation according to claim 1, characterized in that it includes an outer barrel along the longitudinal direction of the pipe, and the outer barrel has an inlet for the temperature control fluid to flow in, an outlet for the temperature control fluid to flow out, or a combination thereof. Claim 6 A pipe insulation device utilizing vacuum insulation according to claim 5, characterized in that an inner barrel exists on the inner side of the outer barrel, and the inner barrel includes a passage through which the temperature control fluid flows. Claim 7 A pipe insulation device utilizing vacuum insulation according to claim 1, characterized in that the vacuum portion surrounds the temperature control portion and extends from one side of the side wall portion to the other side of the side wall portion.

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