Cabinet fixing device for insulated pipe and ultra-low temperature chiller including the same

Abstract

The present invention relates to a cabinet fixing device for an insulated pipe and an ultra-low temperature chiller including the same. The device comprises a main pipe that is positioned over the interior and exterior of a cabinet and through which an ultra-low temperature coolant flows, a pipe main insulation material installed on the outer surface of the main pipe, a main pipe outer pipe that is positioned to surround the outer side of the main pipe where the pipe main insulation material is installed and forms an insulating space between itself and the main pipe, a sealing plate that is welded to each end of the main pipe outer pipe and perforated to allow the main pipe to pass through, and a cabinet fixing bracket that is welded to the outer side of the main pipe outer pipe and fixed to the cabinet. According to the present invention, through a double pipe structure, the insulated pipe can be firmly fixed to the cabinet without affecting heat conduction, and condensation can be prevented at the cabinet pipe fixing part.

Description

Technology Field

[0001] The embodiment relates to a device for fixing an insulated pipe to a device cabinet without heat conduction, and in particular, to a cabinet fixing device with a double pipe structure that can firmly fix the pipe while preventing condensation at the cabinet penetration of the pipe through which the ultra-low temperature coolant flows, and to an ultra-low temperature chiller including the same. Background Technology

[0002] In the process of manufacturing semiconductors, semiconductor process equipment must always maintain a constant temperature inside the chamber, and the equipment that performs this role of maintaining the temperature is a semiconductor chiller. To maintain a constant temperature inside the chamber of the semiconductor process equipment, the chiller may include a refrigeration cycle using a refrigerant and a cooling cycle using a coolant. In this case, to perform the refrigeration cycle, a compressor, a condenser, an expansion valve, and an evaporator are basically required, and the refrigerant cooled through the refrigeration cycle can exchange heat with the coolant of the cooling cycle through the evaporator.

[0003] Meanwhile, the coolant, which has been heat-exchanged to a low temperature through an evaporator, circulates through a cooling cycle including a pump and a heater and is set to the temperature required for the chamber of the semiconductor process equipment, thereby ensuring that the chamber temperature of the semiconductor process equipment is maintained at a constant level. Semiconductor chillers generally cool the coolant to sub-zero temperatures and transport it to the equipment; in particular, ultra-low temperature chillers for etching processes can cool the coolant temperature down to as low as -80°C. Because this temperature differs significantly from ambient temperature, condensation inevitably occurs on chiller components and piping, and to prevent condensation, insulation must be installed on the components and piping.

[0004] FIG. 1 is a cross-sectional view of a pipe with insulation installed according to the prior art that is not fixed to a cabinet, and FIG. 2 is a cross-sectional view of a pipe with insulation installed according to the prior art that is directly fixed to a cabinet.

[0005] Referring to FIG. 1, the main pipe (13) with insulation material (12) installed penetrates the cabinet (11) without any separate fixing means. In this configuration, there is a problem where shaking or vibration of the pipe occurs when connecting a hook-up pipe from outside the device.

[0006] Referring to FIG. 2, a conventional method for solving this problem involves directly welding a bracket (24) for fixing to the pipe and then applying insulation excluding that part. However, although this method allows for fixing to the cabinet, the bracket (24) part is not insulated and is mounted on the cabinet (21), so the problem arises that the low temperature of the pipe is conducted to the cabinet (21) through the bracket (24). Since severe condensation may occur in the cabinet when the chiller is at an ultra-low temperature, this conventional method cannot be a suitable method for an ultra-low temperature chiller.

[0007] Meanwhile, regarding insulation technology using a double-pipe structure, Korean registered patent No. 10-2111473 (vacuum insulation pipe, 2020) discloses a vacuum insulation pipe for transporting liquefied gas. The aforementioned prior art includes a configuration for forming a vacuum insulation space between an inner pipe and an outer pipe and monitoring the vacuum state of the insulation space through a vacuum sensor. However, the aforementioned prior art relates to the insulation of the pipe itself for transporting liquefied gas, and does not disclose a configuration for solving the problems of heat conduction and condensation that occur when the insulation pipe is fixed to a device cabinet.

[0008] In addition, Korean registered patent No. 10-1687247 (double vacuum piping, 2016) discloses a double vacuum piping for semiconductor process gases. The aforementioned prior art includes a configuration that reduces thermal conductivity by forming a vacuum even in the flange, but this relates to the insulation of the connection part of the process gas piping, and does not disclose a configuration that blocks heat conduction while fixing the coolant piping of a chiller to the cabinet.

[0009] In addition, Korean Published Patent No. 10-2004-0032168 (Condensation-preventing vacuum double piping device) discloses a configuration that prevents condensation by maintaining a vacuum between an inner pipe and an outer pipe, installing a heating coil on the inner surface of the outer pipe, and attaching a heat-reflective film to the outer surface of the inner pipe. However, the aforementioned prior art is an active condensation prevention method using a heating coil, which requires separate power supply and temperature control, and does not present a structural solution for fixing the piping to a cabinet.

[0010] Therefore, there is a need for a new technology that can prevent condensation by securely fixing the insulated ultra-low temperature coolant piping to the device cabinet while effectively blocking the low temperature of the piping from being conducted to the cabinet. Prior art literature

[0011] Republic of Korea Registered Patent No. 10-2111473 (Registered May 11, 2020) Republic of Korea Registered Patent No. 10-1687247 (Registered December 12, 2016) Republic of Korea Published Patent No. 10-2004-0032168 (Published April 14, 2004) The problem to be solved

[0012] The objective of the embodiment is to provide a cabinet fixing device for an insulated pipe that can firmly fix the insulated pipe to the cabinet without the influence of heat conduction.

[0013] Another objective of the embodiment is to provide a cabinet fixing device for an insulated pipe that can effectively prevent condensation occurring at the cabinet pipe fixing part of a cryogenic chiller.

[0014] Another objective of the embodiment is to provide a cabinet fixing device for insulated piping that can prevent shaking or vibration of the piping when connecting external piping.

[0015] Another objective of the embodiment is to provide a panel-type bracket assembly that can improve construction efficiency by simultaneously fixing multiple insulated pipes. means of solving the problem

[0016] To achieve the above objective, a cabinet fixing device for an insulating pipe according to one embodiment comprises: a main pipe that is positioned over the interior and exterior of a cabinet and through which an ultra-low temperature coolant flows; a pipe main insulating material installed on the outer surface of the main pipe; a main pipe outer pipe that is positioned to surround the outer side of the main pipe on which the pipe main insulating material is installed and forms an insulating space between it and the main pipe; a sealing plate that is welded to each end of the main pipe outer pipe and perforated to allow the main pipe to pass through; and a cabinet fixing bracket that is welded to the outer side of the main pipe outer pipe and fixed to the cabinet. At this time, the insulating space between the main pipe and the main pipe outer pipe blocks heat conduction through the cabinet fixing bracket.

[0017] In one embodiment, the sealing plate may be welded around the entire circumference to the outer surface of the main pipe and the inner surface of the main pipe's outer pipe, respectively.

[0018] In one embodiment, the perforation diameter of the sealing plate may be formed to be 0.1 to 0.2 mm larger than the outer diameter of the main pipe.

[0019] In one embodiment, a port for forming a vacuum is formed in the outer pipe of the main pipe, and the sealing plate is welded around the entire circumference to the outer surface of the main pipe and the inner surface of the outer pipe of the main pipe, respectively, to ensure airtightness, and the insulating space between the main pipe and the outer pipe of the main pipe may be a vacuum insulating layer formed in a vacuum state through the port.

[0020] In one embodiment, the cabinet fixing bracket may be composed of a plurality of L-shaped brackets welded to the outer side of the main pipe outer pipe.

[0021] In one embodiment, the cabinet fixing bracket may be in the form of a circular plate that surrounds the main pipe outer pipe.

[0022] In one embodiment, an external pipe heat conduction prevention insulation material may be further included between the main pipe external pipe and the cabinet.

[0023] In one embodiment, the main pipe is made of STS316L material, and the main pipe outer pipe and the sealing plate may be made of STS304 grade or higher.

[0024] In one embodiment, the main pipe insulation is made of EPDM material, and the thickness of the main pipe insulation may be 19 mm to 50 mm.

[0025] To achieve the above objective, a panel-type bracket assembly for insulating pipes according to another embodiment of the embodiment comprises a panel-type bracket body that is closely attached to the rear of a cabinet, and a plurality of pipe penetrations formed in the panel-type bracket body, each having a double pipe structure. The double pipe structure comprises a main pipe through which ultra-low temperature coolant flows, a main pipe insulation material installed on the outer surface of the main pipe, an outer pipe that surrounds the outer side of the main pipe where the main pipe insulation material is installed and forms an insulating space, and a fixing part to which the outer pipe is fixed to the panel-type bracket body. The panel-type bracket body is attached to the rear of the cabinet to simultaneously fix a plurality of insulating pipes.

[0026] In one embodiment, the panel-type bracket body may be an integrated bracket made of an SPCC panel.

[0027] To achieve the above objective, a cryogenic chiller according to another embodiment of the embodiment includes a cabinet fixing device for the insulating pipe. Effects of the invention

[0028] The cabinet fixing device for the insulated pipe of the embodiment can firmly fix the pipe, which has been insulated through a double pipe structure, to the cabinet without the influence of heat conduction.

[0029] The cabinet fixing device for the insulating pipe of the embodiment can effectively block heat conduction from the cryogenic pipe to the cabinet through the insulating space between the main pipe and the outer pipe, thereby preventing condensation at the cabinet pipe fixing part.

[0030] The cabinet fixing device for the insulating pipe of the embodiment can prevent shaking or vibration of the pipe when connecting the external pipe by welding a fixing bracket to the external pipe and bolting it to the cabinet.

[0031] The cabinet fixing device of the insulating pipe of the embodiment can maximize insulation performance when a vacuum insulation layer is applied.

[0032] The panel-type bracket assembly of the embodiment can fix multiple insulated pipes simultaneously, thereby improving construction efficiency and reducing labor costs. Brief explanation of the drawing

[0033] Figure 1 is a cross-sectional view showing a form in which an insulated pipe according to the prior art is not fixed to a cabinet. FIG. 2 is a cross-sectional view showing a form in which condensation problems occur when an insulated pipe according to the prior art is directly fixed to a cabinet. FIG. 3 is a cross-sectional view showing a cabinet fixing device for an insulated pipe using a double pipe structure according to the first embodiment of the present invention. FIG. 4 is a cross-sectional view showing a cabinet fixing device for an insulated pipe using a vacuum double pipe structure according to a second embodiment of the present invention. FIGS. 5A and 5B are drawings showing a panel-type bracket assembly with a double piping structure according to a third embodiment of the present invention. FIGS. 6a and 6b are drawings showing examples of modeling of a device to which a panel-type bracket assembly according to the present invention is applied. Specific details for implementing the invention

[0034] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings so that those skilled in the art can easily implement the present invention. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. Throughout the specification, similar parts are denoted by the same reference numerals.

[0035] The terms used in this specification have been selected based on currently widely used general terms, taking into account their functions in the present invention; however, these terms may vary depending on the intent of those skilled in the art, case law, the emergence of new technologies, etc. Additionally, in specific cases, terms have been arbitrarily selected by the applicant, and in such cases, their meanings will be described in detail in the relevant description of the invention. Therefore, the terms used in this specification should be defined not merely by their names, but based on their meanings and the overall content of the present invention.

[0036] In this specification, the term "connection" includes not only the direct connection of two or more components but also the indirect connection through another component. Furthermore, terms such as "include" or "have" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0037] The following provides a more detailed explanation through specific embodiments. The following embodiments are merely examples to aid in understanding the present invention and do not limit the scope of the invention.

[0038] <제1 실시예: 이중 배관 구조>

[0039] FIG. 3 is a cross-sectional view showing a cabinet fixing device for an insulated pipe using a double pipe structure according to the first embodiment of the present invention.

[0040] Referring to FIG. 3, the cabinet fixing device for an insulating pipe according to the first embodiment of the present invention comprises: a pipe main insulating material (32) installed on the outer surface of a main pipe (33) through which ultra-low temperature coolant flows, which is positioned over the inside and outside of a cabinet (31); a main pipe outer pipe (34) which is positioned to surround the outside of the main pipe (33) on which the pipe main insulating material (32) is installed and forms an insulating space between it and the main pipe (33); a blocking plate that is welded to each end of the main pipe outer pipe (34) and perforated so that the main pipe (33) passes through it; and a cabinet fixing bracket (35) which is welded to the outside of the main pipe outer pipe (34) and fixed to the cabinet (31).

[0041] The above main pipe (33) is a pipe through which coolant flows, and, for example, a stainless steel tube made of STS316L material may be used. The diameter and thickness of the main pipe (33) may be standard parts used in general chillers, such as 12.7 mm (1 t), 19.05 mm (1.24 to 1.65 t or more), and 25.4 mm (1.65 to 2.1 t or more), but are not limited thereto.

[0042] The above pipe main insulation (32) is constructed to wrap around the outer surface of the above main pipe (33), and, for example, a circular insulation made of EPDM (ethylene-propylene-diene rubber) material may be used. The thickness of the pipe main insulation (32) may be 32 to 50 mm for ultra-low temperature chillers (low temperature and ultra-low temperature levels of -40°C or lower) and 19 to 25 mm for low temperature chillers, but may be varied depending on the application environment.

[0043] Specifically, for the cryogenic chiller, EPDM circular insulation of 32 to 50 mm is applied, and the outer diameter after applying the insulation for each main pipe diameter is as follows: for a 12.7 mm pipe, it is 76.7 mm when 32 mm of insulation is applied and 112.4 mm when 50 mm of insulation is applied; for a 19.05 mm pipe, it is 83.05 mm when 32 mm of insulation is applied and 119.05 mm when 50 mm of insulation is applied; and for a 25.4 mm pipe, it is 89.4 mm when 32 mm of insulation is applied and 125.4 mm when 50 mm of insulation is applied.

[0044] Meanwhile, for low-temperature chillers, EPDM 19~25mm circular insulation is applied, and the outer diameter after applying insulation for each main pipe diameter is as follows: for a 12.7mm pipe, it is 50.7mm when 19mm insulation is applied and 62.7mm when 25mm insulation is applied; for a 19.05mm pipe, it is 57.05mm when 19mm insulation is applied and 69.05mm when 25mm insulation is applied; and for a 25.4mm pipe, it is 63.4mm when 19mm insulation is applied and 75.4mm when 25mm insulation is applied.

[0045] The above main pipe outer pipe (34) is selected from ready-made products, and the inner diameter is selected to be equal to or slightly larger than the outer diameter of the main pipe on which the insulation material is installed.

[0046] The main pipe outer pipe (34) is positioned to completely surround the outer side of the main pipe (33) on which the main pipe insulation (32) is installed. The inner diameter of the main pipe outer pipe (34) is selected to be equal to or slightly larger than the outer diameter of the main pipe on which the insulation is installed. For example, the main pipe outer pipe (34) may be made of stainless steel of grade STS304 or higher.

[0047] The above-mentioned blocking plate is in the form of a circular plate with a perforation, and its outer diameter is the same as the outer diameter of the main pipe outer pipe (34), and the perforation is made 0.1 to 0.2 mm larger than the outer diameter of the main pipe (33) so that there is no problem with the main pipe (33) passing through. The above-mentioned blocking plate is welded to each end of the main pipe outer pipe (34) to form a sealed, atmospheric pressure insulating space between the main pipe (33) and the main pipe outer pipe (34).

[0048] The cabinet fixing bracket (35) is welded to the outside of the main pipe outer pipe (34), for example, using 3 to 4 L-shaped brackets or using a circular plate to weld to the outside of the main pipe outer pipe (34). The cabinet fixing bracket (35) is fixed to the cabinet (31) through bolts, etc.

[0049] According to the present embodiment, the insulating space between the main pipe (33) and the main pipe outer pipe (34) effectively blocks heat conduction through the cabinet fixing bracket (35). Accordingly, condensation is prevented at the pipe penetration of the cabinet (31), and the pipe is firmly fixed through the cabinet fixing bracket (35), thereby preventing shaking or vibration when connecting the external pipe.

[0050] In addition, additional insulation material (36) for the main pipe and an insulation material (37) for the outer pipe heat conduction prevention may be additionally placed between the main pipe outer pipe (34) and the cabinet (31), thereby further improving the insulation performance.

[0051] <제2 실시예: 진공 이중 배관 구조>

[0052] FIG. 4 is a cross-sectional view showing a cabinet fixing device for an insulated pipe using a vacuum double pipe structure according to a second embodiment of the present invention.

[0053] Referring to FIG. 4, the cabinet fixing device for an insulating pipe according to the second embodiment of the present invention has a configuration similar to that of the first embodiment, but differs in that the insulating space between the main pipe (43) and the main pipe outer pipe (44) is formed by a vacuum insulating layer (42).

[0054] Specifically, a 1 / 4" port (49) for forming a vacuum is welded to the outer pipe (44) of the main pipe. The sealing plate is welded around the entire circumference of the outer surface (outer side of the tube) of the main pipe (43) and the inner surface (pipe cross-section) of the outer pipe (44), respectively, to ensure airtightness. At this time, airtightness is confirmed by pressurizing, for example, to 10 barG through the 1 / 4" port (49) and then performing a leak test. Once airtightness is secured, a vacuum pump is used to expel air from the insulation space through the 1 / 4" port (49) to form a vacuum.

[0055] The above vacuum insulation layer (42) minimizes heat conduction and convection, thereby providing superior insulation performance compared to the insulation space under atmospheric pressure in the first embodiment. Accordingly, heat conduction to the cabinet can be effectively blocked even in low and ultra-low temperature (-40℃ or lower) environments.

[0056] It provides superior thermal insulation performance compared to an insulated space under atmospheric pressure.

[0057] In this embodiment as well, the cabinet fixing bracket (45) is welded to the outside of the main pipe outer pipe (44) and fixed to the cabinet (41), and a pipe main insulation material (46) may be installed on the outer surface of the main pipe (43). Additionally, external pipe heat conduction prevention insulation materials (47, 48) may be placed on the inside and outside of the main pipe outer pipe (44).

[0058] <제3 실시예: 판넬형 브라켓 어셈블리>

[0059] In the first and second embodiments above, a structure was described in which cabinet fixing brackets (35, 45) are welded to the outer pipes (34, 44) on an individual pipe unit basis to fix them to the cabinet. This structure is suitable for cases where the number of pipes is small or the locations of the pipes are dispersed, and has the advantage of allowing flexible arrangement for each individual pipe.

[0060] On the other hand, in the third embodiment, as a variation suitable for cases where multiple pipes are concentrated, a panel-type bracket assembly is described that fixes multiple insulated pipes simultaneously by applying an integrated panel structure instead of individual cabinet fixing brackets (35, 45). This structure can improve construction efficiency and reduce labor costs in devices with a large number of pipes or complex piping configurations, such as large chillers.

[0061] FIGS. 5A and 5B are drawings showing a panel-type bracket assembly with a double piping structure according to a third embodiment of the present invention.

[0062] Referring to FIG. 5a and FIG. 5b, a panel-type bracket assembly according to the third embodiment of the present invention includes a panel-type bracket body (61) that is closely attached to the rear of a cabinet, and a plurality of pipe penetrations (62, 63) formed in the panel-type bracket body (61) and each having a double pipe structure.

[0063] The above panel-type bracket body is an integrated bracket made of, for example, an SPCC panel, and is attached in close contact with the rear side of the cabinet. A plurality of pipe penetrations (62, 63) are formed in the above panel-type bracket body (61), and a double pipe structure described in the first embodiment or the second embodiment is applied to each pipe penetration (62, 63).

[0064] According to the present embodiment, multiple insulated pipes can be simultaneously fixed through a single panel-type bracket assembly, thereby improving construction efficiency and reducing labor costs. Accordingly, depending on the number of pipes or the arrangement situation, the individual cabinet fixing brackets (35, 45) of the first or second embodiment, or the panel-type bracket body (61) of the present embodiment can be selectively adopted. In addition, the panel-type bracket assembly can be configured to include not only pipes with insulation but also pipe connection ports that do not require insulation, so that all pipes of a device can be fixed to the bracket before exiting the cabinet.

[0065] FIGS. 6a and 6b are drawings showing examples of modeling of a device to which a panel-type bracket assembly according to the present invention is applied.

[0066] Referring to FIGS. 6a and 6b, it can be seen that the panel-type bracket assembly is attached to the rear of the cabinet of the chiller device, and a plurality of coolant pipes are fixed to the cabinet through a double pipe structure.

[0067] <적용 예시>

[0068] The cabinet fixing device and panel-type bracket assembly of the insulated pipe according to the present invention can be applied to various devices. For example, they can be applied to ultra-low temperature chillers for semiconductor etching processes (low temperature and ultra-low temperature at -40°C or lower), general low temperature chillers for semiconductor processes, refrigeration equipment for precision experiments, ultra-low temperature storage systems for medical use, rapid freezing systems for the food industry, etc., but are not limited thereto.

[0069] Although preferred embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements by those skilled in the art using the basic concept of the present invention as defined in the following claims also fall within the scope of the present invention.

[0070] For example, in this embodiment, STS304 was exemplified as the material of the outer pipe of the main piping, but it can be replaced with other metal materials that can ensure thermal insulation performance and corrosion resistance. In addition, EPDM was exemplified as the main insulation material of the piping, but other insulation materials such as urethane, perlite, and aerogel can be applied. Furthermore, the shape of the cabinet fixing bracket is not limited to an L-shape or a circular plate, and can be modified into various shapes such as a U-shape or a band shape. Explanation of the symbols

[0071] 11: Cabinet cross-section (prior art) 12: Main pipe insulation (conventional technology) 13: Main piping (conventional technology) 21: Cabinet cross-section (prior art) 22: Main pipe insulation (conventional technology) 23: Main piping (conventional technology) 24: Cabinet fixing bracket (conventional technology) 31: Cabinet cross-section 32: Main insulation for plumbing 33: Main pipe 34: Main piping external pipe 35: Cabinet fixing bracket 36: Additional insulation for the main pipe 37: External pipe heat conduction prevention insulation 38: Pause 41: Cabinet cross-section 42: Vacuum insulation layer 43: Main piping 44: Main piping external pipe 45: Cabinet fixing bracket 46: Main pipe insulation 47: External pipe heat conduction prevention insulation (inner) 48: External pipe heat conduction prevention insulation (outer) 49: 1 / 4" vacuum pot 50a, 50b: Blocks 61: Panel-type bracket body 62: Pipe penetration 63: Pipe penetration

Claims

Claim 1 A cabinet fixing device for an insulating pipe, comprising: a main pipe through which an ultra-low temperature coolant flows, which is integrally formed and penetrates the interior and exterior of a cabinet; a pipe main insulation material installed on the outer surface of the main pipe; a main pipe outer pipe arranged to surround the outer side of the main pipe where the pipe main insulation material is installed, and forming an insulating space between it and the main pipe; a sealing plate that is welded around the entire circumference to the outer surface of the main pipe and the inner surface of the main pipe outer pipe at each end of the main pipe outer pipe, and is perforated to allow the main pipe to pass through; and a cabinet fixing bracket welded to the outer side of the main pipe outer pipe and fixed to the cabinet, wherein the insulating space between the main pipe and the main pipe outer pipe is formed in a sealed atmospheric pressure state by the welding around the entire circumference of the sealing plate, thereby blocking heat conduction through the cabinet fixing bracket and preventing condensation from occurring at the pipe penetration part of the cabinet. Claim 2 delete Claim 3 delete Claim 4 A cabinet fixing device for an insulated pipe according to claim 1, characterized in that the cabinet fixing bracket is in the form of a circular plate that surrounds the outer pipe of the main pipe. Claim 5 A cabinet fixing device for an insulating pipe according to claim 1, further comprising an external pipe heat conduction prevention insulating material disposed between the main pipe external pipe and the cabinet. Claim 6 A panel-type bracket body attached in close contact to the rear of the cabinet; and a plurality of pipe penetrations formed in the panel-type bracket body, each having a double pipe structure, wherein the double pipe structure comprises: a main pipe through which ultra-low temperature coolant flows, integrally penetrating the interior and exterior of the cabinet; a main pipe insulation material installed on the outer surface of the main pipe; an outer pipe that surrounds the outer side of the main pipe where the main pipe insulation material is installed and forms an insulation space; a vacuum-forming port formed in the outer pipe; and a sealing plate at each end of the outer pipe, each welded around the entire circumference to the outer surface of the main pipe and the inner surface of the outer pipe to ensure airtightness and perforated to allow the main pipe to penetrate. A panel-type bracket assembly for insulating pipes, comprising a fixing part in which the outer pipe is fixed to the panel-type bracket body, wherein the insulating space between the main pipe and the outer pipe is a vacuum insulating layer formed in a vacuum state through the port, wherein the panel-type bracket body is attached to the rear of the cabinet to simultaneously fix a plurality of insulating pipes, and wherein the vacuum insulating layer prevents the occurrence of condensation at the pipe penetration part of the cabinet by blocking heat conduction through the fixing part and the panel-type bracket body. Claim 7 A panel-type bracket assembly for insulated piping, characterized in that, in claim 6, the panel-type bracket body is an integrated bracket made of SPCC panel. Claim 8 A cryogenic chiller comprising a cabinet fixing device for insulating piping according to any one of paragraphs 1, 4, and 5.

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