Hand of Industrial Robot and Industrial Robot
Patent Information
- Authority / Receiving Office
- KR · KR
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2023-11-23
- Publication Date
- 2026-08-12
Smart Images
Figure R1020230164208_ABST
Abstract
Description
Technology Field
[0001] The present invention relates to a hand of an industrial robot used in an industrial robot that conveys a conveyed object. Furthermore, the present invention relates to an industrial robot equipped with such a hand. Background Technology
[0002] Conventionally, a horizontal multi-joint type industrial robot for transporting semiconductor wafers is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 comprises a hand on which a semiconductor wafer is mounted, an arm rotatably connected to the front end of the hand, and a main body rotatably connected to the base end of the arm. The hand comprises a mounting part on which a semiconductor wafer is mounted, a hand base constituting the base end portion of the hand, and a holding support mechanism for holding and supporting the semiconductor wafer mounted on the mounting part at a certain position in the horizontal direction. The base end of the mounting part is fixed to the hand base. The hand base is rotatably connected to the front end of the arm.
[0003] In the industrial robot described in Patent Document 1, the holding support mechanism comprises an end surface contact member having a contact surface to which the end surface of a semiconductor wafer contacts, a pressing member that contacts the end surface of the semiconductor wafer and presses the end surface of the semiconductor wafer against the contact surface of the end surface contact member, and a driving mechanism that moves the pressing member linearly in a horizontal direction. The driving mechanism is housed inside a hand base formed in a hollow shape. The base end of the pressing member is connected to the driving mechanism and is housed inside the hand base. The tip end portion of the pressing member is positioned outside the hand base, so that the tip of the pressing member can contact the end surface of the semiconductor wafer. An opening is formed in the hand base through which the pressing member is inserted. Prior art literature
[0004] Japanese Patent Publication No. 2015-36186 The problem to be solved
[0005] When the industrial robot described in Patent Document 1 is used in an environment where a liquid, such as water, is used with respect to a semiconductor wafer (i.e., when the hand on which the semiconductor wafer is mounted is used in an environment where a liquid is used), there is a risk that the liquid may enter the interior of the hand base through the opening of the hand base. In addition, if the liquid enters the interior of the hand base, there is a risk that the driving mechanism housed inside the hand base may corrode.
[0006] Therefore, the objective of the present invention is to provide a hand for an industrial robot, comprising a mounting portion on which a conveyed object is mounted, a mounting support portion to which the base side of the mounting portion is fixed, and a holding support mechanism for holding and supporting the conveyed object mounted on the mounting portion at a certain position in the horizontal direction, wherein the hand is capable of effectively suppressing the intrusion of liquid into the internal placement space of the mounting support portion in which a driving mechanism constituting part of the holding support mechanism is housed, even when used in an environment where liquid is used. Furthermore, the objective of the present invention is to provide an industrial robot equipped with such a hand. means of solving the problem
[0007] To solve the above-mentioned problem, an industrial robot hand of one embodiment of the present invention comprises, in a hand of an industrial robot for conveying a conveyed object, a carrying portion on which the conveyed object is mounted, a carrying support portion having at least a portion formed in a hollow shape and fixed to the base side of the carrying portion, a holding support mechanism for holding and supporting the conveyed object mounted on the carrying portion at a certain position in the horizontal direction, a plurality of sealing members for preventing liquid from entering the interior of the carrying support portion, and a gas supply mechanism for supplying gas to the interior of the carrying support portion, wherein the holding support mechanism comprises an end surface contacting member installed at the front side of the carrying portion having a contact surface to which the end surface of the conveyed object contacts, a pressing member having a pressing portion that contacts the end surface of the conveyed object and presses the end surface of the conveyed object on the contact surface, and a shaft-shaped shaft portion installed at the front side of the pressing portion and held and supported by the carrying support portion, and a driving mechanism that is accommodated in the internal arrangement space of the carrying support portion and connected to the base side of the shaft portion to move the pressing member linearly in the horizontal direction relative to the carrying support portion, wherein the carrying support portion A shaft placement hole is formed that passes through a placement space while a part of the shaft is placed, and a plurality of seal members are arranged in the axial direction of the shaft and placed in the shaft placement hole while contacting the outer surface of the shaft, and a gas supply mechanism supplies gas to the placement space to make the placement space positive pressure.
[0008] The industrial robot hand of this type is equipped with a plurality of sealing members to prevent liquid from entering the interior of the mounting support and a gas supply mechanism to supply gas to the interior of the mounting support. In addition, in this type, the plurality of sealing members are arranged in the axial direction of the shaft and positioned in the shaft placement hole, while also contacting the outer surface of the shaft, and the gas supply mechanism supplies gas to the placement space to create a positive pressure in the placement space. Therefore, in this type, even when the hand is used in an environment where liquid is present, it is possible to effectively suppress the liquid from passing through the shaft placement hole and entering the placement space inside the mounting support.
[0009] In the present form, for example, the hand is provided with two seal members, a first seal member and a second seal member, which are spaced apart from each other in the axial direction of the shaft member as seal members, and if the side where the pressing part is arranged in the axial direction of the shaft member is called the first direction side, the first seal member is arranged on the first direction side rather than the second seal member.
[0010] In the present embodiment, it is preferable that a liquid discharge hole is formed in the mounting support member, extending from the outer surface of the mounting support member to the portion between the first seal member and the second seal member of the shaft placement hole. With this configuration, even if, for instance, liquid passes through the portion of the shaft placement hole where the first seal member is placed and penetrates to the portion between the first seal member and the second seal member of the shaft placement hole, it becomes possible to discharge the penetrated liquid through the discharge hole. Accordingly, it becomes possible to more effectively suppress liquid from passing through the shaft placement hole and penetrating the placement space inside the mounting support member.
[0011] In the present embodiment, it is preferable that the first seal member is an omni-seal and the second seal member is a U-pack or a V-pack. With this configuration, it becomes possible to reduce sliding friction between the first seal member and the second seal member and the shaft member compared to, for example, when the first seal member and the second seal member are O-rings. Therefore, it becomes possible to effectively prevent liquid from entering the internal placement space of the mounting support member while suppressing wear of the first seal member and the second seal member. Furthermore, with this configuration, since the first seal member is an omni-seal and the sealing performance of the first seal member is high, it becomes possible to more effectively prevent liquid from entering the internal placement space of the mounting support member.
[0012] In the present embodiment, the driving mechanism moves a pressing member between a gripping position in which the pressing member contacts the end surface of a conveyed object and presses the end surface of the conveyed object against the contact surface, and a retraction position in which the pressing member is spaced apart from the end surface of the conveyed object. When the pressing member is positioned in the gripping position, a part of the shaft portion is positioned outside the mounting support portion. The side in the axial direction of the shaft portion where the pressing member is positioned is called the first direction side. If the part of the shaft portion positioned outside the mounting support portion when the pressing member is positioned in the gripping position is called the external positioning portion, then when the pressing member is positioned in the retraction position, the external positioning portion is preferably positioned on the first direction side rather than the seal member positioned on the first direction side.
[0013] With this configuration, it becomes possible to prevent the external placement portion, to which liquid is attached and which is positioned outside the mounting support, from coming into contact with the seal member when the pressure member is placed in the gripping position. Therefore, even if the hand is used in an environment where, for example, a chemical solution containing an abrasive is used, it becomes possible to prevent the external placement portion to which the abrasive contained in the chemical solution is attached from coming into contact with the seal member. As a result, even if the hand is used in an environment where a chemical solution containing an abrasive is used, it becomes possible to prevent damage to the seal member caused by the abrasive attached to the external placement portion.
[0014] In the present embodiment, the mounting support comprises a tubular seal-holding support member that holds and supports a plurality of seal members on the inner side, with an axial placement hole formed therein, and a support body formed separately from the seal-holding support member and to which the seal-holding support member is fixed. In the support body, a seal-holding support member placement hole is formed that connects to a placement space where the seal-holding support member is placed, and the seal-holding support member is detachably attached to the support body. It is preferable that an outer-periphery seal placement recess is formed on the outer surface of the seal-holding support member or on the inner surface of the seal-holding support member placement hole, in which an outer-periphery seal member is placed to prevent liquid from entering the placement space. With this configuration, when the seal-holding support member is detached from the support body, a plurality of seal members can be detached together from the support body. Therefore, it is possible to easily perform the replacement of a plurality of seal members.
[0015] In the present embodiment, the hand comprises two seal members, a first seal member and a second seal member, which are spaced apart from each other in the axial direction of the shaft member as seal members, wherein the side on which the pressing portion is positioned in the axial direction of the shaft member is called the first direction side and the side opposite to the first direction side is called the second direction side, wherein the first seal member is positioned on the first direction side rather than the second seal member, the first seal member is an omni-seal, and the second seal member is a U-packing or a V-packing, and the seal holding support member comprises a cylindrical seal holding support member body having an inner circumferential seal placement recess formed on the inner circumferential side where the second seal member is positioned, and a cover member having a cylindrical insertion portion inserted from the first direction side into the inner circumferential side of the seal holding support member body, wherein the cover member is formed separately from the seal holding support member body and is detachably attached to the seal holding support member body, and on the inner circumferential side of the seal holding support member body, It is preferable that a first regulating surface is formed to regulate the movement of the first seal member toward the second direction, and that the end surface of the insertion part toward the second direction is a second regulating surface to regulate the movement of the first seal member toward the first direction.
[0016] By configuring it in this way, it becomes possible to reduce the sliding friction between the first seal member and the second seal member and the shaft member, for example, compared to the case where the first seal member and the second seal member are O-rings. Therefore, it becomes possible to effectively prevent liquid from entering the internal placement space of the mounting support member while suppressing wear of the first seal member and the second seal member. Furthermore, by configuring it in this way, since the first seal member is an omni-seal and the sealing performance of the first seal member is high, it becomes possible to more effectively prevent liquid from entering the internal placement space of the mounting support member.
[0017] In addition, when configured in this way, a cover member having a second regulating surface formed to restrict movement of the first seal member toward the first direction is formed separately from the seal-holding support member body and is detachably attached to the seal-holding support member body. Therefore, even if an omni-seal, which has higher rigidity compared to a U-packing or V-packing, is placed on the inner side of the seal-holding support member as the first seal member, it is possible to easily place the first seal member on the inner side of the seal-holding support member by removing the cover member from the seal-holding support member body.
[0018] The hand of this type can be used in an industrial robot equipped with an arm to which the hand is connected and a main body to which the arm is connected. In this industrial robot, even when the hand is used in an environment where liquid is used, it is possible to effectively prevent the liquid from passing through the shaft placement hole and entering the placement space inside the mounting support. Effects of the invention
[0019] As described above, in the present invention, in a hand of an industrial robot comprising a mounting part on which a conveying object is mounted, a mounting support part to which the base side of the mounting part is fixed, and a holding support mechanism for holding and supporting a conveying object mounted on the mounting part at a certain position in the horizontal direction, it is possible to effectively suppress the intrusion of liquid into the internal placement space of the mounting support part in which a driving mechanism constituting part of the holding support mechanism is accommodated, even when used in an environment where liquid is used. Brief explanation of the drawing
[0020] FIG. 1 is a side view of an industrial robot according to an embodiment of the present invention. Figure 2 is a plan view of the industrial robot shown in Figure 1. Figure 3 is a plan view to explain the configuration of the hand shown in Figure 2. Figure 4 is a cross-sectional view to explain the configuration of the EE cross-section of Figure 3. Specific details for implementing the invention
[0021] Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0022] (Overview of an industrial robot)
[0023] FIG. 1 is a side view of an industrial robot (1) according to an embodiment of the present invention. FIG. 2 is a top view of the industrial robot (1) shown in FIG. 1.
[0024] The industrial robot (1) of this type (hereinafter referred to as "Robot (1)") is a horizontal multi-joint type robot for transporting a semiconductor wafer (2) (hereinafter referred to as "Wafer (2)") which is a transport object. The wafer (2) is formed in the shape of a disc. The robot (1) is used by being embedded in a semiconductor manufacturing system. The robot (1) is equipped with a hand (3) on which the wafer (2) is mounted, an arm (4) to which the hand (3) is connected, and a main body (5) to which the arm (4) is connected. The robot (1) of this type is used in an environment where a liquid, such as water, is used with respect to the wafer (2). That is, in this type, the hand (3) on which the wafer (2) is mounted is used in an environment where a liquid is used.
[0025] A hand (3) is rotatably connected to the tip of the arm (4). The base of the arm (4) is rotatably connected to the main body (5). The arm (4) is composed of an arm part (7) whose base is rotatably connected to the main body (5), and an arm part (8) whose base is rotatably connected to the tip of the arm part (7). The hand (3) and the arm parts (7, 8) rotate with the vertical direction as the axis of rotation. The arm (4) performs an extension and retraction operation in the horizontal direction.
[0026] The main body (5) is equipped with a lifting body (11) to which the base side of the arm (4) (i.e., the base side of the arm part (7)) is rotatably connected, a housing (12) in which the lifting body (11) is received, and a lifting mechanism for raising and lowering the lifting body (11) relative to the housing (12). The base side of the arm part (7) is rotatably connected to the upper end of the lifting body (11). The lifting mechanism is received in the housing (12). The main body (5), the arm part (7), the arm part (8), and the hand (3) are arranged in this order from the bottom side in the vertical direction. Additionally, the robot (1) is equipped with an arm driving mechanism, etc., that rotates the arm part (7, 8) and the hand (3) to extend and retract the arm (4).
[0027] (Composition of the hand)
[0028] FIG. 3 is a plan view for explaining the configuration of the hand (3) shown in FIG. 2. FIG. 4 is a cross-sectional view for explaining the configuration of the EE cross section of FIG. 3.
[0029] The hand (3) is formed such that, for example, when viewed from the vertical direction, its shape is rectangular. The hand (3) is provided with a mounting portion (15) on which a wafer (2) is mounted, a mounting support portion (16) to which the base side of the mounting portion (15) is fixed, and a hand base (17) that constitutes the base side of the hand (3). The hand base (17) is rotatably connected to the front side of the arm portion (8). The hand base (17) is rotatably connected to the arm portion (8) with the vertical direction as the axis of rotation. The mounting support portion (16) is rotatably connected to the hand base (17). The mounting support portion (16) is rotatably connected to the hand base (17) with the horizontal direction as the axis of rotation. At least a portion of the mounting support portion (16) is formed in a hollow shape.
[0030] The mounting part (15), the mounting support part (16), and the hand base (17) are arranged in this order in the horizontal direction. In the following description, the horizontal direction in which the mounting part (15), the mounting support part (16), and the hand base (17) are arranged is called the "front-back direction," and the Y direction of Fig. 3, which is orthogonal to the up-down direction (vertical direction) and the front-back direction, is called the "left-right direction." Additionally, the X1 direction side of Fig. 3, which is one side of the front-back direction, is called the "front" side, and the X2 direction side of Fig. 3, which is the opposite side, is called the "rear" side. The mounting part (15) is positioned on the front side of the mounting support part (16), and the mounting support part (16) is positioned on the front side of the hand base (17). The mounting support part (16) is made rotatable relative to the hand base (17) with the front-back direction as the axis of rotation.
[0031] The hand (3) is equipped with a holding support mechanism (19) (see FIG. 2) for holding and supporting a wafer (2) mounted on a mounting part (15) at a certain position in the horizontal direction, a plurality of sealing members (20, 21) for preventing liquid from entering the interior of the mounting support part (16), and a gas supply mechanism (22) (see FIG. 2) for supplying gas to the interior of the mounting support part (16). The hand (3) of this form is equipped with two sealing members (20, 21), a sealing member (20) as a first sealing member and a sealing member (21) as a second sealing member. In addition, the hand (3) is equipped with a rotation mechanism (not shown) for rotating the mounting part (15) and the mounting support part (16) at least 180° relative to the hand base (17) with the front-rear direction as the rotation axis direction. In the robot (1), it is possible to invert the wafer (2) mounted on the mounting part (15) together with the mounting part (15).
[0032] The mounting portion (15) is formed, for example, in the shape of a rectangular flat plate. The mounting portion (15) is positioned so that the thickness direction of the mounting portion (15) aligns with the vertical direction. Additionally, the mounting portion (15) is positioned so that the direction of the long side of the mounting portion (15), which is formed in a rectangular shape, aligns with the front-rear direction. The mounting support portion (16) is formed in the shape of a flat rectangular block with a thin thickness in the vertical direction. The rear end of the mounting portion (15) is fixed to the front end of the mounting support portion (16).
[0033] The holding support mechanism (19) is an edge grip type holding support mechanism that holds and supports the wafer (2) mounted on the mounting part (15) at a certain position in the horizontal direction by contacting the end surface (outer surface) of the wafer (2) mounted on the mounting part (15) from three directions. The holding support mechanism (19) is equipped with an end surface contact member (25) having a contact surface (25a) to which the end surface of the wafer (2) contacts, a pressing member (27) having a roller part (26) that contacts the end surface of the wafer (2) and presses the end surface of the wafer (2) against the contact surface (25a) of the end surface contact member (25), and a driving mechanism (28) that moves the pressing member (27) linearly in the horizontal direction.
[0034] The end surface contact member (25) is installed on the front end side of the mounting section (15). That is, the end surface contact member (25) is installed on the front end side of the mounting section (15). Specifically, the end surface contact member (25) is fixed at two locations on the front end of the upper surface of the mounting section (15). Two wafer loading members (29) on which a wafer (2) is loaded are fixed to the upper surface of the base side of the mounting section (15) (i.e., the upper surface of the rear end side of the mounting section (15). The lower surface of the wafer (2) loaded on the mounting section (15) is in contact with the end surface contact member (25) and the wafer loading member (29). Also, in FIG. 1, the end surface contact member (25) and the wafer loading member (29) are omitted from the illustration.
[0035] The compression member (27) is held and supported by the mounting support member (16). Specifically, the compression member (27) is held and supported by the mounting support member (16) so that it can move linearly in the front and rear directions. The compression member (27) is provided with an axle-shaped shaft portion (32) on which a roller portion (26) is installed at the front end. The shaft portion (32) is formed in a slender, long cylindrical shape in the front and rear directions. The axial direction of the shaft portion (32) coincides with the front and rear directions. That is, the front and rear directions are the axial directions of the shaft portion (32).
[0036] The roller section (26) is installed at the front end of the shaft section (32). The roller section (26) is equipped with a roller (33) and a roller holding support member (34) that rotatably holds and supports the roller (33). The roller holding support member (34) is fixed to the front end of the shaft section (32). The roller (33) is held and supported by the roller holding support member (34) so that it can rotate with the vertical direction as the rotational axis direction. The front side (X1 direction side) of this form is the first direction side, which is the side where the roller section (26), which is the compression part, is positioned in the axial direction of the shaft section (32), and the rear side (X2 direction side) is the second direction side, which is the opposite side of the first direction side.
[0037] The driving mechanism (28) is housed in an internal placement space (S) (see FIG. 4) of a mounting support (16) formed in a hollow shape. The driving mechanism (28) is equipped with an air cylinder (35) as a driving source and a slider (36) that moves linearly in the forward and backward directions by the power of the air cylinder (35). The slider (36) is connected to the rod of the air cylinder (35). A guide block (37) is fixed to the slider (36). The guide block (37) is engaged with a guide rail (38) that is fixed to the mounting support (16).
[0038] The slider (36) is guided in the forward and backward directions by the guide block (37) and the guide rail (38). The base end of the shaft (32) is connected to the slider (36). Specifically, the rear end of the shaft (32) is fixed to the slider (36). The rear end of the shaft (32) is fixed to the front end of the slider (36) by a single screw (39). The screw (39) is, for example, a fixing screw having a hexagonal hole. The compression member (27) can be detached from the slider (36) by loosening the screw (39).
[0039] The driving mechanism (28) moves the pressing member (27) linearly in the forward and backward directions relative to the mounting support member (16). Additionally, the driving mechanism (28) moves the pressing member (27) between a gripping position (see dotted line in FIG. 3) where the roller part (26) contacts the end surface of the wafer (2) (specifically, the roller (33) contacts the end surface of the wafer (2)) and presses the end surface of the wafer (2) against the contact surface (25a), and a retraction position (see solid line in FIG. 3) where the roller part (26) is separated from the end surface of the wafer (2) (specifically, the roller (33) is separated from the end surface of the wafer (2). The pressing member (27) moves forward toward the gripping position and moves backward toward the retraction position.
[0040] The mounting support member (16) is provided with a cylindrical seal-holding support member (41) that holds and supports seal members (20, 21) on the inner side, a support member body (42) formed separately from the seal-holding support member (41), and a cover member (43) formed separately from the support member body (42) and fixed to the support member body (42). The support member body (42) is formed in the shape of a rectangular box with an open upper surface. The cover member (43) is formed in the shape of a flat plate. The cover member (43) is fixed to the upper side of the support member body (42) to cover the opening on the upper surface of the support member body (42). The placement space (S) is defined by the support member body (42) and the cover member (43). The driving mechanism (28) is placed inside the support member body (42).
[0041] On the inner side of the front end of the support body (42), a retaining support member (42a) is formed to retain and support a seal retaining support member (41). The retaining support member (42a) is formed at the center position in the left-right direction of the support body (42). A seal retaining support member placement hole (42b) is formed in the retaining support member (42a) to which the seal retaining support member (41) is placed. That is, a seal retaining support member placement hole (42b) is formed in the support body (42). The seal retaining support member placement hole (42b) is a round hole that penetrates the retaining support member (42a) in the front-rear direction. The seal retaining support member placement hole (42b) is opened at the front end surface of the support body (42) and connects to the placement space (S).
[0042] The seal-holding support member (41) is formed in a cylindrical shape having a flange. The portion of the seal-holding support member (41) excluding the flange portion is inserted into the seal-holding support member placement hole (42b) from the front side. The seal-holding support member (41) is arranged so that the axial direction and the front-rear direction of the seal-holding support member (41) coincide. The flange portion of the seal-holding support member (41) constitutes the front portion of the seal-holding support member (41). The seal-holding support member (41) is fixed to the support body (42). Specifically, the flange portion of the seal-holding support member (41) is fixed to the front side of the support member (42a). Additionally, the seal-holding support member (41) is fixed to the support body (42) by a plurality of screws (44). The screws (44) are, for example, bolts having hexagonal holes. The seal-holding support member (41) can be detached from the support body (42) by removing the screw (44). That is, the seal-holding support member (41) is detachably attached to the support body (42).
[0043] The inner circumference of the seal-holding support member (41) is formed as an axle placement hole (41a) in which a part of the shaft portion (32) is placed. That is, an axle placement hole (41a) is formed in the mounting support portion (16). Specifically, an axle placement hole (41a) is formed in the seal-holding support member (41). The roller portion (26) is positioned on the forward side of the seal-holding support member (41). In the diameter direction of the shaft portion (32), a gap is formed between the outer surface of the shaft portion (32) and the inner surface of the axle placement hole (41a). The axle placement hole (41a) is connected to the placement space (S). A seal member (20, 21) is placed in the axle placement hole (41a). The seal member (20) and the seal member (21) are placed with a gap between them in the front-rear direction. That is, the seal member (20) and the seal member (21) are arranged in the front-rear direction. In this configuration, the seal member (20) is positioned further forward than the seal member (21).
[0044] The seal member (20, 21) is a lip packing and is formed in an annular shape. Specifically, the seal member (20) is an omni-seal, and the seal member (21) is a U-pack or V-pack (Y-pack). The seal member (20, 21) is positioned on the outer circumference of the shaft portion (32). The seal member (20, 21) is in contact with the outer surface of the shaft portion (32). Specifically, the lip portion of the seal member (20, 21) is in close contact with the outer surface of the shaft portion (32). The seal member (20, 21) functions to prevent liquid from entering the placement space (S) from the shaft placement hole (41a).
[0045] On the inner surface of the seal holding support member (41), a seal placement recess (41b) in which a seal member (20) is placed and a seal placement recess (41c) in which a seal member (21) is placed are formed. That is, a seal placement recess (41b, 41c) is formed in the shaft placement hole (41a). The seal placement recess (41b, 41c) is formed in an annular shape that is concave toward the outer side in the diameter direction of the seal holding support member (41). The seal placement recess (41b) restricts the movement of the seal member (20) in the front-rear direction, and the seal placement recess (41c) restricts the movement of the seal member (21) in the front-rear direction. The seal placement recess (41b) is formed on the forward side of the seal placement recess (41c). The seal placement concave portion (41c) of this type is an inner seal placement concave portion.
[0046] On the outer side of the seal-holding support member (41), a seal member (45) is disposed to prevent liquid from entering the placement space (S) from the gap between the outer surface of the seal-holding support member (41) and the inner surface of the seal-holding support member placement hole (42b). The seal member (45) is an O-ring and is formed in a ring shape. On the outer surface of the seal-holding support member (41), a seal placement recess (41d) in which the seal member (45) is disposed is formed. The seal placement recess (41d) is formed in a ring shape that is concave toward the inner side in the diameter direction of the seal-holding support member (41). The seal member (45) of this form is an outer side seal member, and the seal placement recess (41d) is an outer side seal placement recess.
[0047] Additionally, the seal holding support member (41) comprises a cylindrical seal holding support member body (47) in which a seal placement concave portion (41c) is formed on the inner side, and a cylindrical cover member (48) formed separately from the seal holding support member body (47). The seal holding support member (41) of this form is composed of the seal holding support member body (47) and the cover member (48).
[0048] The seal-holding support member body (47) is formed in a cylindrical shape having a flange. The portion of the seal-holding support member body (47) excluding the flange portion is inserted into the seal-holding support member placement hole (42b). The seal-holding support member body (47) is positioned so that the axial direction and the front-rear direction of the seal-holding support member body (47) coincide. The flange portion of the seal-holding support member body (47) constitutes the front portion of the seal-holding support member body (47). The seal placement recess (41d) is formed on the outer surface of the seal-holding support member body (47).
[0049] The cover member (48) is formed in a cylindrical shape having a flange. The cover member (48) is provided with a tubular insertion part (48a) that is inserted from the front side into the inner circumference of the seal-holding support member body (47). The insertion part (48a) is formed in a cylindrical shape. The length of the insertion part (48a) (length in the front-rear direction) is shorter than the length of the seal-holding support member body (47). For example, the length of the insertion part (48a) is about half the length of the seal-holding support member body (47).
[0050] The cover member (48) is positioned so that the axial direction and the front-rear direction of the cover member (48) coincide. The flange portion of the cover member (48) is connected to the front end of the insertion portion (48a) and forms the front end of the cover member (48). The flange portion of the cover member (48) is positioned on the front side of the flange portion of the seal holding support member body (47). The rear surface of the flange portion of the cover member (48) is in contact with the front surface of the flange portion of the seal holding support member body (47). The seal holding support member body (47) and the cover member (48) are fixed together to the holding support portion (42a) by a screw (44). The cover member (48) is detachably attached to the seal holding support member body (47).
[0051] The inner diameter of the front portion of the seal-holding support member body (47), into which the insertion portion (48a) is inserted into the inner circumference, is larger than the inner diameter of the rear portion of the seal-holding support member body (47). The inner diameter of the rear portion of the seal-holding support member body (47) is approximately equal to the inner diameter of the cover member (48). The seal placement recess (41c) is formed on the inner circumference of the rear portion of the seal-holding support member body (47). At the boundary between the inner circumference of the front portion of the seal-holding support member body (47) and the inner circumference of the rear portion of the seal-holding support member body (47), a circular stepped surface (47a) perpendicular to the front-rear direction is formed.
[0052] The seal placement concave portion (41b) is formed between the stepped surface (47a) and the rear end surface (48b) of the insertion portion (48a). That is, the seal member (20) is placed between the stepped surface (47a) and the rear end surface (48b). The stepped surface (47a) of this form serves as a first restrictive surface that restricts the movement of the seal member (20) toward the rear side. That is, the first restrictive surface is formed on the inner circumference side of the seal holding support member body (47). Additionally, the rear end surface (48b) of the insertion portion (48a) serves as a second restrictive surface that restricts the movement of the seal member (20) toward the rear side. Furthermore, in this form, an axial placement hole (41a) is formed on the inner circumference side of the rear portion of the seal holding support member body (47) and on the inner circumference side of the insertion portion (48a).
[0053] In the mounting support member (16), a liquid discharge hole (16a) is formed that extends from the outer surface of the mounting support member (16) to the portion between the seal member (20) and the seal member (21) of the shaft placement hole (41a). The discharge hole (16a) is a through hole that penetrates from the lower surface of the mounting support member (16) to the portion between the seal member (20) and the seal member (21) of the shaft placement hole (41a). As shown in FIG. 4, the discharge hole (16a) is composed of a through hole formed in the rear portion of the seal holding support member body (47) and a through hole formed in the lower portion of the support member body (42). The discharge hole (16a) is formed on the front side of the seal member (45).
[0054] As described above, the driving mechanism (28) moves the pressing member (27) between a gripping position in which the roller (33) contacts the end surface of the wafer (2) and presses the end surface of the wafer (2) against the contact surface (25a), and a retracted position in which the roller (33) is spaced apart from the end surface of the wafer (2). When the pressing member (27) is positioned in the gripping position, a portion of the front end of the shaft portion (32) is positioned outside the mounting support portion (16). If the portion of the shaft portion (32) that is positioned outside the mounting support portion (16) when the pressing member (27) is positioned in the gripping position is called the external positioning portion (32a), for example, the portion enclosed by the dashed line in FIG. 4 becomes the external positioning portion (32a). As shown in FIG. 4, when the compression member (27) is positioned in the retracted position, the external placement part (32a) is positioned further forward than the seal member (20) positioned on the front side.
[0055] The gas supply mechanism (22) supplies gas to the placement space (S) to make the placement space (S) positive pressure. The gas supply mechanism (22) of this type supplies air to the placement space (S). The gas supply mechanism (22) is equipped with a source of compressed air, such as a blower, that sends compressed air to the placement space (S), and piping, etc., that connects the source of compressed air to the placement space (S).
[0056] (Main effect of this form)
[0057] As described above, in this embodiment, the hand (3) is equipped with two sealing members (20, 21) to prevent liquid from entering the interior of the mounting support (16) and a gas supply mechanism (22) to supply gas to the interior of the mounting support (16). In addition, in this embodiment, two sealing members (20, 21) that contact the outer surface of the shaft (32) are placed in the shaft placement hole (41a), and the gas supply mechanism (22) supplies gas to the placement space (S) to create a positive pressure in the placement space (S). Therefore, in this embodiment, even if the hand (3) is used in an environment where liquid is used, it is possible to effectively suppress the liquid from passing through the shaft placement hole (41a) and entering the placement space (S) inside the mounting support (16).
[0058] In this form, a liquid discharge hole (16a) is formed in the mounting support member (16), extending from the outer surface of the mounting support member (16) to the portion between the seal member (20) and the seal member (21) of the shaft placement hole (41a). Therefore, in this form, even if liquid passes through the portion where the seal member (20) is placed in the shaft placement hole (41a) and penetrates to the portion between the seal member (20) and the seal member (21) of the shaft placement hole (41a), it is possible to discharge the penetrated liquid through the discharge hole (16a). In particular, in this configuration, since the discharge hole (16a) is connected to the lower surface of the mounting support (16), even if liquid has entered the portion between the seal member (20) and the seal member (21) of the shaft placement hole (41a), it becomes easier to discharge the intruded liquid from the discharge hole (16a) due to the action of gravity. Therefore, in this configuration, it is possible to more effectively suppress the liquid from passing through the shaft placement hole (41a) and entering the placement space (S).
[0059] In this embodiment, the seal member (20) is an omni-seal, and the seal member (21) is a U-pack or a V-pack. Therefore, in this embodiment, it is possible to reduce the sliding friction between the seal member (20, 21) and the shaft member (32) compared to, for example, when the seal member (20, 21) is an O-ring. Thus, in this embodiment, it is possible to effectively suppress the intrusion of liquid into the placement space (S) while suppressing the wear of the seal member (20, 21). Furthermore, in this embodiment, since the seal member (20) is an omni-seal and the sealing performance of the seal member (20) is high, it is possible to more effectively suppress the intrusion of liquid into the placement space (S).
[0060] In this form, when the compression member (27) is positioned in the retracted position, the external placement portion (32a) of the shaft portion (32) is positioned further forward than the seal member (20) positioned on the front side. Therefore, in this form, when the compression member (27) is positioned in the gripping position, it is possible to prevent the external placement portion (32a), which is positioned outside the mounting support portion (16) and to which liquid is attached, from coming into contact with the seal members (20, 21). Accordingly, in this form, even if the hand (3) is used in an environment where, for example, a liquid containing an abrasive is used, it is possible to prevent the external placement portion (32a), to which the abrasive contained in the liquid is attached, from coming into contact with the seal members (20, 21). As a result, in this form, even if the hand (3) is used in an environment where a chemical solution containing an abrasive is used, it is possible to prevent damage to the seal member (20, 21) caused by the abrasive attached to the external placement part (32a).
[0061] In this form, the mounting support member (16) is provided with a seal holding support member (41) that holds and supports seal members (20, 21) on the inner side, and a support member body (42) that is formed separately from the seal holding support member (41) and to which the seal holding support member (41) is fixed, and the seal holding support member (41) is detachably attached to the support member body (42). In addition, in this form, by loosening the screw (39) to detach the compression member (27) from the slider (36) and separating the screw (44) to detach the seal holding support member (41) from the support member body (42), the two seal members (20, 21) can be detached together from the support member body (42). Therefore, in this form, it is possible to easily perform the replacement of the two seal members (20, 21).
[0062] In addition, in this form, since a seal placement recess (41d) in which a seal member (45) is placed is formed on the outer surface of the seal holding support member (41), when the seal holding support member (41) is removed from the support body (42), the seal member (45) can also be removed from the support body (42) along with the two seal members (20, 21). Therefore, in this form, it is possible to easily perform the replacement of the three seal members (20, 21, 45).
[0063] In this form, a cover member (48) having a rear end surface (48b) that restricts the movement of the seal member (20) toward the front side is formed separately from the seal holding support member body (47) and is detachably attached to the seal holding support member body (47). Therefore, in this form, even if the seal member (20), which is an omni-seal with higher rigidity compared to a U-packing or V-packing, is placed on the inner side of the seal holding support member (41), it is possible to easily place the seal member (20) on the inner side of the seal holding support member (41) by removing the cover member (48) from the seal holding support member body (47).
[0064] (Other embodiments)
[0065] The above-described form is an example of a suitable form of the present invention, but is not limited thereto, and various modifications are possible within the scope that does not alter the gist of the present invention.
[0066] In the above-described form, the seal member (20) may be a U-packing or a V-packing. Also, in the above-described form, the seal member (21) may be an omni-seal. Also, in the above-described form, the seal members (20, 21) may be O-rings. Also, in the above-described form, the hand (3) may have three or more seal members disposed in the shaft placement hole (41a).
[0067] In the above-described form, the seal holding support member (41) may be composed of a single member. That is, the seal holding support member body (47) and the cover member (48) may be formed integrally. In addition, in the above-described form, the seal holding support member (41) and the support member body (42) may be formed integrally. In addition, in the above-described form, the discharge hole (16a) may not be formed in the mounting support member (16). In addition, in the above-described form, an outer circumference seal placement recess where the seal member (45) is placed may be formed on the inner circumference of the seal holding support member placement hole (42b).
[0068] In the above-described form, the driving mechanism (28) may be equipped with a driving source such as a motor instead of an air cylinder (35). Also, in the above-described form, the roller (33) does not need to be rotatable with respect to the roller holding support member (34). Also, in the above-described form, the pressing member (27) may be equipped with a pressing part other than the roller part (26). Also, in the above-described form, the mounting support part (16) does not need to be rotatable with respect to the hand base (17). Also, in the above-described form, the gas supply mechanism (22) may supply a gas other than air to the placement space (S).
[0069] In the above-described form, the robot (1) may be equipped with two hands (3) rotatably connected to the tip of the arm (4). In addition, in the above-described form, the arm (4) may be composed of three or more arm parts. In addition, in the above-described form, the object to be transported by the robot (1) may be something other than a wafer (2). In this case, for example, the object to be transported may be formed in a flat shape such as a square or a rectangular plate.
[0070] The industrial robot to which the present invention is applied may be a robot other than a horizontal multi-joint type industrial robot. For example, the industrial robot to which the present invention is applied may be an industrial robot having an arm to which the hand (3) is connected so that linear reciprocating movement of the hand (3) is possible, a main body part to which the arm is rotatably connected, and a linear drive part that linearly reciprocates the hand (3) with respect to the arm.
[0071] (Composition of the present technology)
[0072] In addition, the present technology can be configured as follows.
[0073] (1) In the hand of an industrial robot that conveys a return object,
[0074] The device comprises a mounting section on which the above-mentioned object to be transported is mounted, a mounting support section having at least a portion formed in a hollow shape and having the base side of the mounting section fixed thereto, a holding support mechanism for holding and supporting the above-mentioned object to be transported mounted on the mounting section at a certain position in the horizontal direction, a plurality of sealing members for preventing liquid from entering the interior of the mounting support section, and a gas supply mechanism for supplying gas to the interior of the mounting support section.
[0075] The above-described holding support mechanism comprises: an end surface contact member installed on the front end side of the mounting member having a contact surface to which the end surface of the object to be conveyed contacts; a pressure member having a pressure part that contacts the end surface of the object to be conveyed and presses the end surface of the object to be conveyed against the contact surface, and a shaft-shaped shaft part installed on the front end side of the pressure part, and a pressure member held and supported by the mounting support member; and a driving mechanism that is accommodated in the internal arrangement space of the mounting support member and has the base end side of the shaft part connected to move the pressure member linearly in a horizontal direction relative to the mounting support member.
[0076] In the above-mentioned mounting support, a shaft placement hole is formed that passes through the placement space, along with a portion of the shaft member being disposed therein.
[0077] A plurality of the above-mentioned seal members are arranged in the axial direction of the shaft portion and disposed in the shaft placement hole, and together with contact with the outer surface of the shaft portion,
[0078] The above gas supply mechanism is a hand characterized by supplying gas to the above-mentioned placement space to make the above-mentioned placement space positive pressure.
[0079] (2) As the sealing member, the sealing member comprises two sealing members, a first sealing member and a second sealing member, which are spaced apart from each other in the axial direction of the shaft member.
[0080] If the side on which the compression part is positioned in the axial direction of the above shaft part is called the first direction side,
[0081] The hand described in (1), characterized in that the first seal member is positioned on the first direction side rather than the second seal member.
[0082] (3) The hand described in (2) is characterized in that the mounting support member has a liquid discharge hole formed on the outer surface of the mounting support member, which passes through the portion between the first seal member and the second seal member of the shaft arrangement hole.
[0083] (4) The first seal member is an omni-seal, and
[0084] The hand described in (2) or (3), characterized in that the second seal member is a U-packing or V-packing.
[0085] (5) The driving mechanism moves the pressure member between a gripping position in which the pressure member contacts the end surface of the object being transported and presses the end surface of the object being transported against the contact surface, and a retracted position in which the pressure member is spaced apart from the end surface of the object being transported.
[0086] When the above-mentioned compression member is positioned at the above-mentioned gripping position, a part of the above-mentioned shaft portion is positioned outside the above-mentioned mounting support portion, and
[0087] If the side on which the compression member is positioned in the axial direction of the shaft is called the first direction side, and the part of the shaft that is positioned outside the mounting support when the compression member is positioned at the gripping position is called the external positioning part,
[0088] A hand described in any one of (1) to (4), characterized in that when the above-mentioned pressure member is positioned in the above-mentioned retracted position, the above-mentioned external positioning part is positioned in the above-mentioned first direction side more than the sealing member positioned in the above-mentioned first direction side.
[0089] (6) The above-mentioned mounting support member has a cylindrical seal-holding support member that holds and supports a plurality of seal members on the inner side while having the shaft-arrangement hole formed therein, and a support member body that is formed separately from the seal-holding support member and to which the seal-holding support member is fixed.
[0090] In the above-mentioned support body, the above-mentioned seal-holding support member is disposed therein, and a seal-holding support member placement hole is formed that passes through the placement space.
[0091] The above-mentioned seal-holding support member is detachably attached to the above-mentioned support body, and
[0092] A hand described in any one of (1) to (5), characterized in that an outer seal placement recess is formed on the outer surface of the seal-holding support member or on the inner surface of the seal-holding support member placement hole, wherein an outer seal member is placed therein to prevent liquid from entering the placement space.
[0093] (7) As the sealing member, the first sealing member and the second sealing member are arranged spaced apart from each other in the axial direction of the shaft member.
[0094] If the side on which the compression part is positioned in the axial direction of the shaft part is called the first direction side, and the side opposite to the first direction side is called the second direction side,
[0095] The first seal member is positioned on the first direction side rather than the second seal member, and
[0096] The above-mentioned first seal member is an omni-seal, and
[0097] The above second seal member is a U-packing or a V-packing, and
[0098] The above seal-holding support member comprises a cylindrical seal-holding support member body having an inner circumferential seal placement recess formed on the inner circumferential side where the second seal member is disposed, and a cover member having a cylindrical insertion portion inserted into the inner circumferential side of the seal-holding support member body from the first direction side.
[0099] The above cover member is formed separately from the main body of the seal-holding support member and is detachably attached to the main body of the seal-holding support member.
[0100] On the inner circumference side of the main body of the seal holding support member, a first regulating surface is formed to regulate the movement of the first seal member toward the second direction side, and
[0101] The hand described in (6) is characterized in that the end surface of the insertion part on the second direction side is a second restricting surface that restricts the movement of the first seal member toward the first direction side.
[0102] (8) An industrial robot characterized by having a hand described in any one of (1) to (7), an arm to which the hand is connected, and a main body to which the arm is connected. Explanation of the symbols
[0103] 1: Robot (Industrial Robot) 2: Wafer (semiconductor wafer, object to be returned) 3: Hand 4: Cancer 5: Main body 15: Mounted section 16: Mounting support 16a: Exhaust hole 19: Retention Support Organization 20: Absence of time (Absence of the first time) 21: Absence of time (Absence of the second time) 22: Gas supply device 25: End surface contact member 25a: Contact surface 26: Roller part (compression part) 27: Lack of pressure 28: Driving mechanism 32: Blessing 32a: External placement part 41: Lack of support for holding time 41a: Shaft placement hole 41c: Seal placement recess (inner circumference seal placement recess) 41d: Seal placement recess (outer circumference seal placement recess) 42: Support body 42b: Hole for placing seal-retaining support member 45: Absence of seal (absence of outer seal) 47: Seal holding support member body 47a: Step surface (first regulatory surface) 48: Cover missing 48a: Insertion part 48b: Rear end surface (end surface on the second directional side of the insertion part, second regulated surface) S: Layout space X1: First directional side X2: Second direction side
Claims
Claim 1 A hand of an industrial robot for conveying a conveying object comprises: a mounting portion on which the conveying object is mounted; a mounting support portion having at least a portion formed in a hollow shape and having a base side of the mounting portion fixed thereto; a holding support mechanism for holding and supporting the conveying object mounted on the mounting portion at a certain position in a horizontal direction; a plurality of sealing members for preventing liquid from entering the interior of the mounting support portion; and a gas supply mechanism for supplying gas to the interior of the mounting support portion. The holding support mechanism comprises: an end surface contact member installed at the front side of the mounting portion having a contact surface to which the end surface of the conveying object contacts; a pressure member held and supported by the mounting support portion having a pressure portion that contacts the end surface of the conveying object and presses the end surface of the conveying object against the contact surface, and a shaft portion having a shaft shape installed at the front side of the pressure portion; and a driving mechanism that is accommodated in an internal arrangement space of the mounting support portion and has the base side of the shaft portion connected to move the pressure member linearly in a horizontal direction relative to the mounting support portion. In the support member, a shaft placement hole is formed that passes through the placement space and is disposed in a part of the shaft member, and a plurality of seal members are arranged in the axial direction of the shaft member and are disposed in the shaft placement hole and are in contact with the outer surface of the shaft member, and the gas supply mechanism supplies gas to the placement space to make the placement space positive pressure, and the mounting support member is provided with a tubular seal holding support member that holds and supports a plurality of seal members on the inner side and is disposed in the shaft placement hole, and a support member body that is formed separately from the seal holding support member and is fixed to the seal holding support member, and in the support member body, a seal holding support member placement hole is formed that passes through the placement space and is disposed in the seal holding support member, and the seal holding support member is detachably attached to the support member body.A hand characterized in that an outer circumference seal placement recess is formed on the outer surface of the seal-holding support member or on the inner surface of the seal-holding support member placement hole, wherein an outer circumference seal member is placed therein to prevent liquid from entering the placement space. Claim 2 A hand according to claim 1, wherein, as the sealing members, two sealing members, a first sealing member and a second sealing member, are arranged spaced apart from each other in the axial direction of the shaft portion, and wherein the side on which the pressing portion is arranged in the axial direction of the shaft portion is referred to as the first direction side, the first sealing member is arranged further toward the first direction side than the second sealing member. Claim 3 A hand according to paragraph 2, characterized in that the mounting support member has a liquid discharge hole formed therein, which passes through the portion between the first seal member and the second seal member of the shaft placement hole from the outer surface of the mounting support member. Claim 4 A hand characterized in that, in paragraph 2 or 3, the first seal member is an omni-seal and the second seal member is a U-packing or a V-packing. Claim 5 A hand characterized in that, in any one of claims 1 to 3, the driving mechanism moves the pressing member between a gripping position in which the pressing member contacts the end surface of the object being transported and presses the end surface of the object being transported against the contact surface, and a retraction position in which the pressing member is spaced apart from the end surface of the object being transported, and when the pressing member is positioned at the gripping position, a part of the shaft portion is positioned outside the mounting support portion, and the side in the axial direction of the shaft portion where the pressing member is positioned is called the first direction side, and the part of the shaft portion that is positioned outside the mounting support portion when the pressing member is positioned at the gripping position is called the external positioning portion, and when the pressing member is positioned at the retraction position, the external positioning portion is positioned further to the first direction side than the seal member positioned closest to the first direction side. Claim 6 delete Claim 7 In claim 1, the seal member comprises two seal members, a first seal member and a second seal member, arranged spaced apart from each other in the axial direction of the shaft member, wherein the side on which the compression member is arranged in the axial direction of the shaft member is called the first direction side and the side opposite to the first direction side is called the second direction side, wherein the first seal member is arranged on the first direction side rather than the second seal member, the first seal member is an omni-seal, and the second seal member is a U-packing or a V-packing, and the seal holding support member comprises a cylindrical seal holding support member body having an inner circumferential seal placement recess formed on the inner circumferential side where the second seal member is arranged, and a cover member having a cylindrical insertion part inserted from the first direction side into the inner circumferential side of the seal holding support member body, wherein the cover member is formed separately from the seal holding support member body and is detachably attached to the seal holding support member body. A hand characterized in that, on the inner circumference side of the main body of the seal holding support member, a first restricting surface is formed to restrict the movement of the first seal member toward the second direction side, and the end surface of the insertion part toward the second direction side is formed to be a second restricting surface to restrict the movement of the first seal member toward the first direction side. Claim 8 An industrial robot characterized by having a hand described in any one of claims 1 to 3, an arm to which the hand is connected, and a main body to which the arm is connected.
Citation Information
Patent Citations
Wafer transport method and device
KR101940184B1
Joint structure and robot
US20180058615A1