Open-type air bearing system incorporating air pads and vacuum pads, as well as a table system utilizing air bearings

Abstract

The present invention relates to a movable table system comprising an air bearing having an air pad and a vacuum pad formed thereon. A table system according to one embodiment comprises a plate provided at the bottom of the table and forming a space on the top for the table to move, a first slide that moves the table by moving along the plate in a first direction, a second slide that moves the table by moving along the first slide in a second direction, a guide unit that guides the table to move, and a driving unit that transmits power to the guide unit. At least one of the first slide or the second slide may have an air pad and a vacuum pad formed thereon.

Description

Technology Field

[0001] The present invention relates to a movable table system, and more specifically, to a movable table system comprising an air bearing having an air pad and a vacuum pad formed thereon. Background Technology

[0002] Recently, there is a need for techniques capable of performing precise processing on semiconductors, metals, and the like.

[0003] Existing laser beam processing techniques include the optical scanner method, which controls only the optical beam while the head is fixed, and the high-focus optical method, which fixes the optical beam and controls the movement of the table (stage) or the head.

[0004] The aforementioned optical scanner method has the advantage of rapidly performing processing operations over a wide area by utilizing a large scan lens; however, due to the increased focal beam size, it is not suitable for performing precise work. In other words, while high-speed processing is possible with the optical scanner method, precision micro-processing is impossible.

[0005] The aforementioned high-focal-point optical method has the advantage of enabling precise work in a narrow area by utilizing a small high-focal-point lens; however, it is not suitable for high-speed machining because the processing area is limited and it is difficult to control the movement of the head itself. This leads to increased processing time, which can ultimately result in reduced productivity. In other words, while the high-focal-point optical method allows for precision machining, it does not enable high-speed machining.

[0006] Furthermore, processing large-sized substrates generally requires stage movement. However, sudden stage movements (rapid deceleration or acceleration) cause vibrations due to the weight of the stage itself, leading to a deterioration in the quality of the processed product. To resolve this problem, the movement speed of the stage must be controlled, which consequently reduces productivity.

[0007] Therefore, a processing method is required that can maintain a constant processing speed to avoid reducing productivity while simultaneously guaranteeing the quality of the processed product.

[0008] To solve this, a technology is provided that enables precise machining through a movably configured table device.

[0009] The table device is configured to move along the XY plane. The table device is used as an alignment table to precisely adjust the position of a substrate or the like placed on the table.

[0010] Bearings are included in the table mechanism to facilitate the movement of the table. Depending on the configuration of the table mechanism, various types of bearings may be used, and among these, air bearings are also utilized, which support the load of the shaft using air pressure by injecting compressed air between the shaft and the bearing. Prior art literature

[0011] Republic of Korea Registered Patent No. 10-0492748 Republic of Korea Registered Patent No. 10-1569325 The problem to be solved

[0012] The present invention aims to provide an open-type orifice air bearing in which an air pad and a vacuum pad are formed.

[0013] The present invention aims to improve system rigidity and precision of an air bearing in which an air pad and a vacuum pad are formed.

[0014] The present invention aims to provide an optimized guideway and carriage structure through model analysis and simulation.

[0015] The present invention aims to reduce thermal effects by applying an open-type orifice air bearing. means of solving the problem

[0016] A table system according to one embodiment comprises a plate provided at the bottom of the table and forming a space on the top for the table to move, a first slide that moves the table while moving along the plate in a first direction, a second slide that moves the table while moving along the first slide in a second direction, a guide unit that guides the table to move, and a driving unit that transmits power to the guide unit, wherein at least one of the first slide or the second slide may have an air pad and a vacuum pad formed thereon.

[0017] In one embodiment, the first slide may have the air pad and the vacuum pad formed at a position adjacent to the upper surface of the plate.

[0018] In one embodiment, the first slide may have the air pad and the vacuum pad formed at a position adjacent to the side of the plate.

[0019] In one embodiment, the second slide may have the air pad and the vacuum pad formed at a position adjacent to the upper surface of the plate.

[0020] According to one embodiment, the second slide is formed within the first slide, and the air pad and the vacuum pad may be formed at a position adjacent to the first slide.

[0021] According to one embodiment, the first slide and the second slide include an air bearing, and the air bearing includes an inlet and an outlet for introducing air into and out of the first slide and the second slide, and the air pad and the vacuum pad may be formed in either the inlet or the outlet of the air bearing.

[0022] According to one embodiment, the discharge portion may include a plurality of discharge holes formed at regular intervals on the side where air is discharged, and a damping groove connecting the plurality of discharge holes and having a concave shape inwardly.

[0023] According to one embodiment, the inlet and the outlet may each be formed on one side of the bottom surface and the side surface of the first slide.

[0024] According to one embodiment, the inlet and the outlet may each be formed on one side of the bottom and side of the second slide. Effects of the invention

[0025] According to one embodiment, an open-type orifice air bearing in which an air pad and a vacuum pad are formed can be provided.

[0026] According to one embodiment, an air bearing in which an air pad and a vacuum pad are formed can improve system rigidity and precision.

[0027] According to one embodiment, an optimized guideway and carriage structure can be provided through modal analysis and simulation.

[0028] According to one embodiment, the thermal effect can be reduced by applying an open-type orifice air bearing. Brief explanation of the drawing

[0029] FIG. 1 is a drawing illustrating a table system (100) according to one embodiment. FIG. 2 is a drawing illustrating a guide unit (200) that guides the table to move. FIG. 3 is a drawing illustrating the first slide in the guide unit, and FIG. 4 is a drawing illustrating the second slide in the guide unit. Figure 5 is a diagram illustrating the repulsive force applied to the first slide. Figure 6 is a diagram illustrating the repulsive force applied to the second slide. Specific details for implementing the invention

[0030] Specific structural or functional descriptions of embodiments according to the concept of the present invention disclosed herein are provided merely for the purpose of explaining embodiments according to the concept of the present invention, and embodiments according to the concept of the present invention may be implemented in various forms and are not limited to the embodiments described herein.

[0031] Embodiments according to the concept of the present invention may be subject to various modifications and may take various forms; therefore, embodiments are illustrated in the drawings and described in detail in this specification. However, this is not intended to limit the embodiments according to the concept of the present invention to specific disclosed forms, and includes modifications, equivalents, or substitutions that fall within the spirit and scope of the present invention.

[0032] Terms such as "first" or "second" may be used to describe various components, but said components should not be limited by said terms. For the sole purpose of distinguishing one component from another, for example, without departing from the scope of rights according to the concept of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component.

[0033] When it is stated that one component is "connected" or "connected" to another component, it should be understood that while it may be directly connected or connected to that other component, there may also be other components in between. Conversely, when it is stated that one component is "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between. Expressions describing the relationships between components, such as "between," "exactly between," or "directly adjacent to," should be interpreted in the same way.

[0034] The terms used herein are used merely to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as “comprising” or “having” are intended to specify the existence of the described features, numbers, steps, actions, components, parts, or combinations thereof, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0035] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this specification.

[0037] Hereinafter, embodiments will be described in detail with reference to the attached drawings. However, the scope of the patent application is not limited or restricted by these embodiments. Identical reference numerals in each drawing indicate identical components.

[0038] FIG. 1 is a drawing illustrating a table system (100) according to one embodiment.

[0039] A table system (100) according to one embodiment may include a guide unit that guides the table to move, comprising a plate (140) provided at the bottom of the table and forming a space on the top for the table to move, a first slide (110) that moves the table while moving along the plate (140) in a first direction, and a second slide (120) that moves the table while moving along the first slide (110) in a second direction.

[0040] In addition, it may include a drive unit (130) that transmits power to the guide unit.

[0041] In particular, at least one of the first slide (110) or the second slide (120) may have an air pad and a vacuum pad formed thereon.

[0042] The table system (100) can process the substrate (or workpiece) (e.g., marking, cutting or slicing, chamfering, scribing, beveling, patterning, etc.) by irradiating the substrate (or workpiece) vertically with a beam generated by a predetermined beam generating device. Accordingly, the table system (100) may also be named a beam processing device, specifically a laser processing device.

[0043] The table system (100) may further include a beam generator, a head which may also be called a beam delivery head.

[0044] The guide unit may include a first slide (110) that moves in the direction of a second axis (e.g., y-axis), a second slide (120) that is disposed inside the first slide (110) and moves in the direction of a first axis (e.g., x-axis), a first driving unit that generates a driving force to enable the first slide (110) to move in the direction of the second axis, a first guide unit for guiding the movement of the first slide (110) in the direction of the second axis, a second driving unit that generates a driving force to enable the second slide (120) to move in the direction of the first axis, and a second guide unit for guiding the movement of the second slide (120) in the direction of the first axis.

[0045] The drive unit (130) can be used as a concept including a linear motor utilizing electromagnetic force and a magnetic track. For example, the drive unit (130) generates thrust in response to a received control signal and transmits the generated thrust to the first slide (110). The thrust received from the drive unit (130) corresponds to the driving force that drives the first slide (110). Additionally, the drive unit (130) generates thrust in response to a received control signal and transmits the generated thrust to the second slide (120). The thrust received from the drive unit (130) corresponds to the driving force that drives the second slide (120). Furthermore, according to an embodiment, the drive unit (130) may be implemented with a plurality of linear motors and a plurality of magnetic tracks.

[0046] FIG. 2 is a drawing illustrating a guide unit (200) that guides the table to move.

[0047] The guide unit (200) may be in the form where the first slide (110) and the second slide (120) are connected.

[0048] The first slide (110) may have an air pad (111) and a vacuum pad (120) formed at a position adjacent to the upper surface of the plate.

[0049] Additionally, the first slide (110) may have an air pad (111) and a vacuum pad (112) formed at a position adjacent to the side of the plate.

[0050] Meanwhile, the second slide (120) may have an air pad (121) and a vacuum pad (122) formed at a position adjacent to the upper surface of the plate.

[0051] The second slide (120) is formed or placed within the first slide (110), and an air pad (121) and a vacuum pad (122) may be formed at a position adjacent to the first slide (110).

[0052] FIG. 3 is a drawing illustrating the first slide in the guide unit, and FIG. 4 is a drawing illustrating the second slide in the guide unit.

[0053] The first slide (110) and the second slide (110) include an air bearing. The air bearing includes an inlet and an outlet for introducing air into and out of the first slide (110) and the second slide (120), and an air pad (111, 121) and a vacuum pad (112, 122) may be formed in either the inlet or the outlet of the air bearing.

[0054] The discharge section may include a plurality of discharge holes formed at regular intervals on the side where air is discharged, and a damping groove that connects the plurality of discharge holes and is concave inward.

[0055] The inlet and outlet sections may be formed on the bottom and one side of the first slide (110), respectively.

[0056] Additionally, the inlet and outlet sections may be formed on the bottom and side of the second slide (120), respectively.

[0057] The first slide (110) and the second slide (120) include an air bearing, and the air bearing may include an inlet and an outlet for introducing air into and out of the first slide (110) and the second slide (120). An air pad and a vacuum pad may be formed in either the inlet or the outlet of the air bearing.

[0058] In addition, the discharge section includes a plurality of discharge holes formed at regular intervals on the side where air is discharged, and a damping groove that connects the plurality of discharge holes and is concave inward.

[0059] The inlet and the outlet may each be formed on one side of the bottom and side of the first slide (110), and the inlet and the outlet may each be formed on one side of the bottom and side of the second slide (120).

[0060] Figure 5 is a diagram illustrating the repulsive force applied to the first slide.

[0061] According to the simulation, the repulsive force applied to the first slide is as shown in [Table 1].

[0062] Position Reaction Force Support Pad 1 91.9 N Pad 2 49.3 N Pad 3 53.9 N Pad 4 59.5 N Pad 5 154.7 N Pad 6 4.4 N Pad 7 242.0 N Pad 8 4.3 N Guide Pad 9 287.9 N Pad 10 577.2 N

[0063] Figure 6 is a diagram illustrating the repulsive force applied to the second slide. According to the simulation, the repulsive force applied to the second slide is as shown in [Table 2].

[0064] Position Reaction Force Support Pad 1 54.0 N Pad 2 60.3 N Pad 3 54.0 N Pad 4 60.3 N Guide Pad 9 135.3 N Pad 10 135.3 N

[0065] Ultimately, by utilizing the present invention, an open-type orifice air bearing in which an air pad and a vacuum pad are formed can be provided. Furthermore, the air bearing in which the air pad and a vacuum pad are formed can improve system rigidity and precision, and can provide an optimized guideway and carriage structure through modal analysis and simulation. In addition, thermal effects can be reduced by applying an open-type orifice air bearing.

[0067] Although the embodiments have been described above with reference to the limited drawings, those skilled in the art can make various modifications and variations from the description above. For example, suitable results can be achieved even if the described techniques are performed in a different order than described, and / or the components of the described system, structure, device, circuit, etc. are combined or assembled in a form different from described, or replaced or substituted by other components or equivalents.

[0068] Therefore, other implementations, other embodiments, and equivalents to the claims also fall within the scope of the claims set forth below.

Claims

Claim 1 A movable table system comprising: a plate provided at the bottom of a table and forming a space on the top for the table to move; a guide unit that guides the table to move, including a first slide that moves the table while moving along the plate in a first direction and a second slide that moves the table while moving along the first slide in a second direction; and a driving unit that transmits power to the guide unit, wherein at least one of the first slide or the second slide has an air pad and a vacuum pad formed thereon, and the first slide and the second slide include an air bearing, wherein the air bearing includes an inlet and an outlet for introducing air into and out of the first slide and the second slide, and the air pad and the vacuum pad are formed in either the inlet or the outlet of the air bearing, and the outlet includes a plurality of discharge holes formed at regular intervals on the side where air is discharged and a damping groove that connects the plurality of discharge holes and has a concave shape inwardly. Claim 2 A table system according to claim 1, wherein the first slide is characterized in that the air pad and the vacuum pad are formed at a position adjacent to the upper surface of the plate. Claim 3 A table system according to claim 1, wherein the first slide is characterized in that the air pad and the vacuum pad are formed at a position adjacent to the side of the plate. Claim 4 A table system according to claim 1, wherein the second slide is characterized in that the air pad and the vacuum pad are formed at a position adjacent to the upper surface of the plate. Claim 5 A table system according to claim 1, wherein the second slide is formed within the first slide, and the air pad and the vacuum pad are formed at a position adjacent to the first slide. Claim 6 delete Claim 7 delete Claim 8 In claim 1, the inlet and the outlet are each formed on one side of the bottom and side of the first slide, respectively, in a movable table system. Claim 9 A movable table system according to claim 1, wherein the inlet and the outlet are each formed on one side of the bottom and side of the second slide.

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