Heater assembly and substrate processing apparatus having the same

Abstract

The present invention relates to a heater assembly and a substrate processing device including the same, and more specifically, to a heater assembly that generates heat using an induction current and a substrate processing device including the same. The present invention provides a heater assembly comprising: a body part (100) forming an internal space (S1); an induction coil (200) installed in the internal space (S1) and receiving power from the outside to form a magnetic field; and a heating part (300) disposed on the upper side of the body part (100) and generating heat by the magnetic field formed by the induction coil (200), wherein the induction coil (200) is characterized by having a flow path (210) through which a cooling medium circulates internally, and having an inlet end (201) through which the cooling medium flows into the flow path (210) and an outlet end (202) through which the cooling medium is discharged together at one end.

Description

Technology Field

[0001] The present invention relates to a heater assembly and a substrate processing device including the same, and more specifically, to a heater assembly that generates heat using an induction current and a substrate processing device including the same. Background Technology

[0002] A substrate processing device is a device that performs specific substrate processing, such as deposition, etching, and heat treatment, on a substrate, and is configured in various ways depending on the type of substrate processing.

[0003] As an example, a substrate processing device may be configured to include a process chamber forming a sealed processing space and a heater assembly installed inside the processing space to support a substrate and apply heat to the supported substrate.

[0004] Conventional heater assemblies use a heating wire heater that generates heat by applying power or a method that generates heat by supplying a heat medium. However, in this case, since the heating element must be connected to an external power source or receive a heat medium from the outside, there is a problem in that there are limitations to installing it close to a substrate supported on the upper surface.

[0005] As a result, the gap between the heating element and the substrate widens, leading to a problem where the heat transfer efficiency to the substrate decreases and the time and energy consumed to reach the target temperature increase.

[0006] To improve upon these problems, an induction heating heater has been proposed in which a heating element supporting a substrate is brought closest to the substrate, and an induced current is directly applied to the heating element through electromagnetic induction from an induction coil spaced apart from the bottom.

[0007] However, this induction heating method entails the problem of heat generation in the induction coil to which power is applied. Since the induction coil is typically made of copper (Cu) material, if copper atoms leak out due to the heat generated by the coil itself, it can cause contamination inside the heater assembly or process chamber, which can have a fatal impact on the quality of the substrate.

[0008] To prevent such contamination problems, a structure may be applied in which an induction coil is sealed inside a housing and a susceptor heated by the electromagnetic induction of the induction coil is placed above it.

[0009] Meanwhile, the induction coil housed in the sealed space inside the body may still experience problems due to self-heating, and in particular, due to the sealed structural characteristics, heat dissipation to the outside is not smooth, placing it in an environment where heat is prone to accumulation.

[0010] To prevent overheating of such induction coils, a method of forming the induction coil into a tube shape and cooling it by circulating a cooling medium may be applied.

[0011] Conventional structures for circulating a cooling medium inside an induction coil have an inlet port for the inflow of the cooling medium and an outlet port for the outflow of the cooling medium formed at each end of the coil, respectively, resulting in a complex wiring structure in which the end of the induction coil, which is spirally wound within the internal space of the body, must be pulled out again to the outside of the body for the discharge of the cooling medium and connection with external piping.

[0012] In particular, the internal space of the body where the induction coil is installed is very limited and narrow due to the induction coil itself and other parts, so there is a problem in that it is very difficult to secure installation space during the process of returning the end of the wound coil to the inlet side and pulling it out, and the difficulty of design and manufacturing increases.

[0013] In addition, as the cooling medium flows in only one direction from the inlet port to the outlet port, the inlet side where the cooling medium first enters is maintained at a relatively low temperature, resulting in high cooling efficiency, whereas as it moves toward the outlet side, the cooling medium absorbs heat from the induction coil and the temperature gradually rises.

[0014] Such temperature variations in the cooling medium cause significant deviations in cooling performance across the entire area of ​​the induction coil; consequently, this is a major cause of reduced temperature uniformity in the heat-generating part positioned above the induction coil and decreased precision in the substrate processing process. The problem to be solved

[0015] The objective of the present invention is to provide a heater assembly and a substrate processing device including the same, which can solve wiring problems in a limited installation space and improve cooling efficiency by forming a flow path structure in which a cooling medium circulates inside a single induction coil to solve the above-mentioned problems. means of solving the problem

[0016] The present invention is created to achieve the above-mentioned purpose of the present invention, and the present invention provides a heater assembly comprising: a body part (100) forming an internal space (S1); an induction coil (200) installed in the internal space (S1) and receiving power from the outside to form a magnetic field; and a heating part (300) disposed on the upper side of the body part (100) and generating heat by the magnetic field formed by the induction coil (200), wherein the induction coil (200) is characterized by having a flow path (210) through which a cooling medium circulates internally, and having an inlet end (201) through which the cooling medium flows into the flow path (210) and an outlet end (202) through which the cooling medium is discharged together at one end.

[0017] The above-mentioned Euro (210) may include an inlet section (211) through which a cooling medium flows from one end of the induction coil (200) equipped with the inlet end (201) toward the other end; an outlet section (212) through which a cooling medium flows from the other end of the induction coil (200) toward one end equipped with the discharge end (202); and a connecting section (213) that connects the inlet section (211) and the outlet section (212) to change the flow direction so that the cooling medium passing through the inlet section (211) can flow into the outlet section (212).

[0018] The above inlet section (211) may be positioned closer to the above heating section (300) than the above discharge section (212).

[0019] The above inlet section (211) and the above outlet section (212) can be separated from each other by a partition wall (220) provided inside the above flow path (210).

[0020] The above partition (220) may be disconnected at the connecting section (213) so that the inlet section (211) and the outlet section (212) are connected at the connecting section (213).

[0021] The above bulkhead (220) may have a number of protrusions to increase the heat transfer effect.

[0022] The above inlet section (211) may be formed to surround at least a portion of the side of the above outlet section (212) from the outside.

[0023] The cross-sectional area of ​​at least a portion of the inlet section (211) may be formed differently from the cross-sectional area of ​​at least a portion of the outlet section (212).

[0024] The cross-sectional area of ​​at least a portion of the inlet section (211) may be formed to be larger than the cross-sectional area of ​​at least a portion of the outlet section (212).

[0025] The cross-sectional area of ​​at least a portion of the above-mentioned inflow section (211) may decrease as it goes from one end of the induction coil (200) toward the other end.

[0026] The cross-sectional area of ​​at least a portion of the above discharge section (212) may decrease as it moves from the other end of the induction coil (200) toward one end.

[0027] The above connecting section (213) can be formed at the other end of the induction coil (200).

[0028] The above induction coil (200) can be formed from a material including copper (Cu).

[0029] The above induction coil (200) may have a coating layer formed on its outer surface comprising at least one of ceramic, silicon, epoxy, and Teflon.

[0030] The above induction coil (200) is formed such that when viewed from above, the starting point where the winding begins and the ending point where the winding ends are located on a virtual line extending radially from the winding center (O) of the induction coil (200), so that the number of windings can be in integer units.

[0031] The above induction coil (200) can be formed integrally without a physical bonding structure by a 3D printing method.

[0032] The present invention provides a substrate processing device characterized by comprising: a process chamber (10) forming a processing space (S2) inside; a gas injection unit (20) provided above the processing space (S2) and injecting a process gas for substrate processing into the processing space (S2); and a heater assembly (30) according to any one of claims 1 to 20, installed opposite to the gas injection unit (20) in the processing space (S2) and supporting a substrate (1) to be processed. Effects of the invention

[0033] The heater assembly according to the present invention and the substrate processing device including the same have the advantage of maintaining even and uniform cooling efficiency throughout the entire induction coil by naturally reducing temperature variations at different locations that occur during the circulation of the cooling medium, as a cooling medium is introduced and discharged at one end of a single tube-shaped induction coil and returns by reversing its flow direction at the other end.

[0034] In addition, the heater assembly according to the present invention and the substrate processing device including the same have the advantage of simplifying the wiring and installation structure of the cooling medium piping even in a narrow internal body space by forming an inlet section for the cooling medium and an outlet section for the cooling medium together inside a single tube-shaped induction coil and arranging the inlet end and the outlet end at one end of the induction coil.

[0035] In addition, by gradually changing the cross-sectional area of ​​the flow paths in the inlet and outlet sections within the induction coil according to the flow direction of the cooling medium to optimize the heat exchange area at each location, there is an advantage of being able to control the temperature uniformity of the entire area of ​​the heat source located above the induction coil more evenly. Brief explanation of the drawing

[0036] FIG. 1 is a cross-sectional view schematically illustrating a substrate processing apparatus according to the present invention. FIG. 2a is a cross-sectional perspective view of a heater assembly to show a heater assembly according to the present invention. FIG. 2b is a drawing for showing another embodiment regarding the positions of the cooling medium inlet and outlet of the heater assembly shown in FIG. 2a. FIG. 3 is an exploded perspective view of a heater assembly according to the present invention. FIG. 4 is a cross-sectional view of a heater assembly according to the present invention. FIG. 5 is a perspective view of an induction coil installed in a heater assembly according to the present invention. FIG. 6 is a cross-section of the induction coil shown in FIG. 5 viewed in the AA direction. Figure 7 is a cross-section of the induction coil shown in Figure 5, viewed in the BB direction. FIG. 8 is a schematic diagram showing a state in which a cylindrical induction coil according to another embodiment of the present invention is arranged in a multi-zone type. Specific details for implementing the invention

[0037] The substrate processing apparatus according to the present invention will be described below with reference to the attached drawings.

[0038] A substrate processing device according to the present invention comprises, as shown in FIG. 1, a process chamber (10) that forms a processing space (S2) inside; a gas injection unit (20) provided on the upper part of the process chamber (10) for injecting a process gas for substrate processing into the processing space (S2); and a heater assembly (30) installed opposite the gas injection unit (20) in the processing space (S2) to support a substrate (1) to be processed.

[0039] In addition, the substrate processing device according to the present invention may further include an exhaust unit (40) for exhausting the processing space (S2).

[0040] Here, the substrate (1) subject to substrate processing can be any configuration that requires substrate processing such as etching, deposition, or heat treatment, and for example, a wafer for semiconductor manufacturing can be applied.

[0041] The above process chamber (10) is configured to form a processing space (S2) inside, and various configurations are possible.

[0042] Here, the processing space (S2) can be configured in various ways as long as it is a space capable of performing substrate processing by heating the substrate (1) through an induction heating type heater assembly (30) to be described later.

[0043] Preferably, it may be a space for performing a thermal process that controls the process with thermal energy through an induction heating type heater assembly (30) to be described later.

[0044] For example, the processing space (S2) may perform processes such as a process applying remote plasma, or processes that do not use plasma at all, such as Thermal Atomic Layer Deposition (ALD), Atomic Layer Rejuvenation (ALR), and Thermal Atomic Layer Etching (ALE).

[0045] In addition, since the heater assembly (30) of the present invention can efficiently and stably heat the substrate (1) even in a high temperature range of 600°C or higher, it can be particularly usefully applied to processes where very high temperature heat treatment is essential, such as the epitaxy process.

[0046] Additionally, the process chamber (10) may include a chamber body (11) with an open upper side and an upper lead (12) detachably coupled to the opening of the chamber body (11).

[0047] Additionally, the process chamber (10) may further include a gate (14) formed on one side and opened and closed to introduce and remove a substrate (1) into and out of the processing space (S2).

[0048] At this time, the gate (14) is a structure formed on the side wall of the chamber body (11) for introducing and removing the substrate (1) into the processing space (S2), and various structures are possible.

[0049] The upper lead (12) above is configured to be installed on the upper surface of the chamber body (11), and may have an opening formed in the center so that the gas injection part (20), which will be described later, can be installed through it.

[0050] At this time, the upper lead (12) may have an insulating member (13) installed between it and the gas injection part (20) for electrical insulation with the gas injection part (20).

[0051] In addition, the process chamber (10) may have an exhaust port formed for pressure control and exhaust within the processing space (S2), together with a gas injection unit (20) for supplying process gas for substrate processing.

[0052] At this time, the exhaust unit (40) is connected to a pump installed in the exhaust port and provided externally, thereby enabling exhaust and pressure control for the processing space (S2).

[0053] The above gas injection unit (20) is configured to be provided above the processing space (S2) and to inject process gas for substrate processing into the processing space (S2), and various configurations are possible.

[0054] For example, the gas injection unit (20) may be seated and coupled to the upper lead (12) to form a sealed processing space (S2) together with the chamber body (11), and may inject process gas introduced from the outside into the processing space (S2).

[0055] Meanwhile, the gas injection unit (20) may be electrically connected to ground or have an RF power source applied to it to form a potential difference with the heater assembly (30) described later, as needed.

[0056] The heater assembly (30) may be configured to be installed opposite the gas injection part (20) in the processing space (S2) and to support the substrate (1) being processed.

[0057] At this time, the heater assembly (30) can not only simply support the substrate (1) but also apply heat to the substrate (1) to form a process temperature, and can move the substrate (1) closer to or further away from the gas injection unit (20) through a lifting drive.

[0058] Meanwhile, since induction heating methods using induction coils can cause problems such as heat generation and copper (Cu) contamination of the induction coil itself, a structure in which the induction coil is sealed inside the housing may be applied to prevent these problems.

[0059] Accordingly, the heater assembly (30) according to the present invention may be configured to include a body part (100) forming an internal space (S1), an induction coil (200) installed in the internal space (S1) and receiving power from the outside to form a magnetic field, a heating part (300) disposed on the upper side of the body part (100), and a support shaft part (400) connected to the lower side of the body part (100) to support the body part (100).

[0060] The above body part (100) may be configured to serve as a type of housing that isolates the induction coil (200) from the processing space (S2) of the process chamber (10) to prevent contamination and forms an internal space (S1) in which the induction coil (200) is accommodated.

[0061] To explain further, the body part (100) can form an internal space (S1) to accommodate the induction coil (200) in the internal space (S1), while also supporting the heating part (300) to be described later on the upper side of the body part (100).

[0062] Specifically, the body portion (100) may include a body body (110) having an open upper surface and a seating space formed inside for accommodating the induction coil (200), and a lid (120) coupled to cover the open upper surface of the body body (110) to seal the internal space (S1) from the external environment.

[0063] At this time, the heating element (300) may be seated on or coupled to the upper side of the lead (120) and supported.

[0064] In particular, the body part (100) serving as a housing is preferably formed of a material that is not easily heated by the magnetic field frequency band generated by the induction coil (200), that is, has low magnetic and electrical losses.

[0065] For example, the body part (100) may be formed of a high-purity ceramic or insulating material such as AlN (aluminum nitride), Al2O3 (alumina), or quartz.

[0066] The body part (100) formed of such a material does not react to a magnetic field in the frequency band for induction heating, thereby preventing unwanted heat generation.

[0067] In addition, the material of the body part (100) can be selected in combination to have thermal properties required according to process conditions, namely thermal insulation that effectively blocks heat from the high-temperature heating part (300) or thermal conductivity that releases heat to the outside of the chamber.

[0068] Meanwhile, the support shaft portion (400) is connected to the lower part of the body portion (100) and can support the body portion (100) by penetrating the lower part of the process chamber (10) and positioning the body portion (100) at a predetermined location within the processing space (S2).

[0069] In addition, the support shaft portion (400), in addition to a simple support function, can serve as a key passage for connecting various components of the induction coil (200) and heater assembly (30) installed in the internal space (S1) of the body portion (100) to components installed outside the process chamber (10).

[0070] Accordingly, the support shaft portion (400) can be formed in the shape of a hollow shaft.

[0071] For example, the power transmission line (51) of the power application unit (50), the temperature measurement line (61) of the temperature measurement unit (60), and the cooling medium transmission path (71) of the refrigerant unit (70) may be arranged together inside the support shaft unit (400).

[0072] The above power application unit (50) may be configured to apply high-frequency power to the induction coil (200) to form a magnetic field.

[0073] For example, the power supply unit (50) may include a power supply device (52) disposed outside the process chamber (10) and converting commercial power (AC) into high-frequency AC power required for the present invention; and a power transmission line (51) that transmits the high-frequency power converted by the power supply device (52) to the induction coil (200).

[0074] At this time, the power transmission line (51) can electrically connect the power supply device (52) outside the chamber and the induction coil (200) inside the chamber space (S1) through the interior of the support shaft part (400).

[0075] The above temperature measuring unit (60) may be configured to measure the temperature of the heating unit (300) or the substrate (1) placed on the heating unit (300), and to control the amount of heat generated by the heater assembly (30) based on the measured temperature.

[0076] The above temperature measuring unit (60) may include, for example, a temperature sensor (not shown) installed inside or on the upper surface of the heating unit (300) to directly detect the temperature, a temperature measuring line (61) through which the signal of the temperature sensor (not shown) is transmitted to the outside of the process chamber (10) or power is transmitted, and a temperature control unit (62) that receives the signal, monitors the temperature, and feedback controls the output of the power supply unit (50).

[0077] At this time, the temperature measuring line (61) can also connect a temperature sensor (not shown) inside the chamber and an external temperature control unit (62) through the inside of the support shaft part (400).

[0078] The above refrigerant unit (70) can be installed to remove resistance heat generated by the resistance of the induction coil (200) itself, thereby suppressing the temperature rise of the induction coil (200) and ensuring stable operation.

[0079] The above refrigerant unit (70) may include, for example, a cooling medium supply unit (72) disposed outside the process chamber (10) to maintain and circulate the cooling medium at a constant temperature, and a cooling medium delivery path (71) that circulates the cooling medium between the cooling medium supply unit (72) outside the chamber and the induction coil (200) in the internal space (S1).

[0080] At this time, the cooling medium delivery channel (71) can be installed via the interior of the support shaft portion (400).

[0081] Additionally, the support shaft portion (400) may be configured to drive the body portion (100) up and down.

[0082] For example, the heater assembly (30) can be moved by the support shaft portion (400) between a substrate transfer position where the substrate (1) is transferred through the gate (14) of the process chamber (10) and a process position where actual substrate processing is performed near the gas injection portion (20).

[0083] To implement this, the lower end of the support shaft (400) may be mechanically connected to a lifting / lowering drive unit (not shown) installed outside the process chamber (10), and the drive unit may be configured in various ways, such as a linear motor, or a combination of a servo motor and a ball screw, to provide precise vertical driving force to the support shaft (400).

[0084] Additionally, at the point where the support shaft (400) penetrates the lower part of the process chamber (10), a bellows (not shown) may be installed to allow the up and down movement of the support shaft (400) while isolating and sealing the vacuum or process atmosphere of the processing space (S2) from the outside.

[0085] Meanwhile, the heating element (300) may be configured to substantially heat the substrate (1) by being positioned on the upper side of the body part (100) and having the substrate (1) placed on its upper surface.

[0086] That is, the heating element (300) can heat the substrate (1) on the upper surface by absorbing magnetic field energy that has passed through the body part (100) in the form of an induced current and generating heat on its own.

[0087] Accordingly, the heating element (300) can be formed of a material suitable for induction heating and highly resistant to high-temperature process environments and process gases.

[0088] For example, the heating element (300) may include at least one of graphite and silicon carbide (SiC).

[0089] Specifically, the heating element (300) may be formed of graphite, silicon carbide (SiC) coated with graphite, SiC bulk, or a composite material including these materials.

[0090] Meanwhile, a highly corrosive cleaning gas such as NF3 may be used to remove deposition byproducts remaining inside the process chamber (10) after the substrate processing is completed or during periodic maintenance.

[0091] In addition, some processes can be performed under a plasma environment.

[0092] The cleaning gas or plasma generated during the process may directly react with the bulk material of the heating element (300), such as graphite or SiC, and etch or damage the surface of the heating element (300).

[0093] This reaction not only reduces the durability of the heating element (300), but also causes particles from the reaction byproducts, which contaminate the processing space (S2) and can cause fatal defects in the yield of the substrate (1).

[0094] To prevent such problems, a protective coating layer may be additionally formed on the surface of the heating element (300), particularly on the upper surface where the substrate (1) is placed and directly exposed to the process gas.

[0095] The above coating layer is preferably formed of a ceramic material having high resistance to cleaning gas and plasma, that is, plasma resistance and chemical resistance.

[0096] For example, such a ceramic coating layer may include YOF (Yttrium Oxyfluoride), Al2O3 (alumina), or PBN (Pyrolytic Boron Nitride), etc., to prevent reaction with the base material of the heating element (300) and extend the lifespan of the part.

[0097] Meanwhile, the induction coil (200) may be installed in the internal space (S1) of the body part (100) and may be configured to heat the upper heating part (300) by receiving high-frequency power from the outside and forming a magnetic field through electromagnetic induction.

[0098] As described above, since the induction coil (200) is housed in an internal space (S1) sealed by the body part (100), it is placed in a structural environment where self-resistance heat generated during operation and radiant heat transferred from the upper heating part (300) are difficult to release to the outside.

[0099] Since such heat accumulation can change the electrical characteristics of the induction coil (200) or shorten its lifespan, a structure that circulates a cooling medium inside may be required to maintain the temperature of the induction coil (200) below a certain level.

[0100] Conventional coil cooling methods generally featured a unidirectional flow path structure in which a cooling medium was simply introduced into a tube-shaped coil from one end and discharged from the other.

[0101] In this conventional structure, as the cooling medium flows along the coil, it absorbs heat from the induction coil and the temperature gradually rises, so the cooling efficiency decreases significantly from the inlet side to the outlet side, causing a problem of temperature variation across the entire area of ​​the induction coil.

[0102] In addition, in the conventional method, the other end of the induction coil must be drawn out again into the hollow inside the support shaft (400) to discharge the cooling medium, so two incoming and outgoing wires of the induction coil must be arranged within the narrow support shaft (400).

[0103] This not only hinders the space efficiency inside the support shaft (400), but also causes the wiring structure to become complicated.

[0104] To solve these problems, the induction coil (200) according to the present invention is configured such that the cooling medium is supplied and drained at one end, thereby ensuring cooling efficiency over the entire area and forming a simple heater assembly structure.

[0105] For example, the induction coil (200) may have a passage (210) formed therein through which a cooling medium circulates, and may have an inlet end (201) through which the cooling medium is introduced into the passage (210) and an outlet end (202) through which the cooling medium is discharged together at one end.

[0106] The above inlet section (201) and the above discharge section (202) may be points where the cooling medium delivery path (71) extended from the cooling medium supply section (72) is physically connected to the induction coil (200).

[0107] Specifically, the inlet section (201) and the outlet section (202) can be connected to the cooling medium delivery channel (71) through an adapter (not shown) which is a separate mediating member.

[0108] At this time, the adapter has an inlet port corresponding to the inlet end (201) and an outlet port corresponding to the outlet end (202), thereby guiding the inflow and outflow of the cooling medium to occur at the same location.

[0109] Here, the cooling medium delivery channel (71) may include a cooling medium supply channel (71a) that supplies a cooling medium to the inlet end (201) and a cooling medium discharge channel (71b) that recovers a cooling medium from the discharge end (202).

[0110] In one embodiment, the cooling medium supply channel (71a) and the cooling medium discharge channel (71b) may be integrally formed to be smoothly connected to the induction coil (200).

[0111] In this case, the cooling medium supply channel (71a) and the cooling medium discharge channel (71b) may have a shape in which they are integrated into a single tube near the inlet end (201) and the discharge end (202).

[0112] That is, from the perspective of the Euro structure, the induction coil (200) may be wound in the form of a single coil, and may have a configuration in which it branches into individual Euro lines at the inlet end (201) and outlet end (202) where the cooling medium is supplied and discharged.

[0113] Additionally, the inlet section (201) and the discharge section (202) (or the point where the supply path and the discharge path diverge) may be placed at various locations depending on the layout and environment of the equipment.

[0114] For example, the inlet section (201) and the outlet section (202) may be positioned in the internal space (S1) of the body section (100), in the hollow internal space of the support shaft section (400), or extended and arranged to be positioned in the external space of the process chamber (10).

[0115] At this time, in order to maximize cooling characteristics and heat exchange efficiency, it is preferable that an inlet section (201) and an outlet section (202) be formed within the internal space (S1) of the body section (100) adjacent to the high-temperature heating section (300).

[0116] On the other hand, if the goal is to reduce the density of internal parts and secure sufficient maintenance and assembly space, it is preferable to have a structure in which the inlet end (201) and the outlet end (202) are extended so as to be located outside the process chamber (10).

[0117] Meanwhile, the cooling medium supply channel (71a) and cooling medium discharge channel (71b) may be formed of copper (Cu) material, which has excellent electrical conduction and thermal conductivity characteristics, similar to the induction coil (200), but are not limited thereto and may also be formed of other metal or non-metal materials.

[0118] Furthermore, in order to ensure electrical insulation and stability, it is also possible to form all or part of the cooling medium supply channel (71a) and cooling medium discharge channel (71b) with an electrically insulating material.

[0119] In this way, by concentrating the supply and drainage structure of the cooling medium at one end of the induction coil (200), there is no need to return the other end to the support shaft (400), which has the advantage of saving coil wiring space.

[0120] At this time, the inlet section (201) and the outlet section (202) may be part of a single flow path (210), and the flow path (210) may be formed so that the cooling medium circulates inside the induction coil (200).

[0121] That is, the above Euro (210) may be configured to circulate within a single induction coil (200) and flow in and out to one side.

[0122] To this end, the above-mentioned Euro (210) may include an inlet section (211) through which a cooling medium flows from one end of the induction coil (200) equipped with the inlet end (201) toward the other end; an outlet section (212) through which a cooling medium flows from the other end of the induction coil (200) toward one end equipped with the discharge end (202); and a connecting section (213) that connects the inlet section (211) and the outlet section (212) to change the flow direction so that the cooling medium passing through the inlet section (211) can flow into the outlet section (212).

[0123] That is, the above-mentioned Euro (210) forms a structure in which a cooling medium circulates within an induction coil (200) and returns to where it entered, and specifically, an inlet section (211), a connecting section (213), and an outlet section (212) can be configured to be connected in sequence.

[0124] The above-mentioned inlet section (211) can be formed as a passage through which a cold cooling medium entering through the inlet section (201) flows along the length of the coil from the starting point (one end) of the coil toward the opposite point (the other end).

[0125] The above cooling medium can perform the function of cooling the temperature by absorbing heat transferred from the induction coil (200) and the heat source (300) located above it as it passes through the above inlet section (211) and the heat of the cooling medium flowing in the above outlet section (212).

[0126] Conversely, the discharge section (212) can be formed as a passage through which the cooling medium, which has reached the end of the coil via the inlet section (211), returns to the starting point (one end).

[0127] The above discharge section (212) can be arranged in a manner that is adjacent to the above inflow section (211) inside the induction coil (200) which is in the shape of a tube.

[0128] Thus, the cooling medium of the discharge section (212), which has absorbed heat and become relatively warm, and the cooling medium of the inflow section (211), which has just entered and is cold, can exchange heat with each other inside the coil.

[0129] As a result, it is possible to provide a temperature buffering effect that prevents the temperature from being unevenly distributed at only a specific point of the induction coil (200) and maintains the temperature evenly across the entire coil area.

[0130] In particular, this structure allows the overall temperature of the induction coil (200) to be maintained close to the average, and effectively prevents the phenomenon where the temperature rises excessively as the cooling efficiency decreases toward the rear end when the cooling medium flows in only one direction as in the conventional method.

[0131] At this time, one or more partition walls (220) that physically separate the inlet section (211) and the outlet section (212) may be formed inside the above-mentioned Euro (210).

[0132] The cooling medium passing through the inlet section (211) and the cooling medium passing through the outlet section (212) can flow side by side while separated from each other by the partition wall (220) and perform heat exchange.

[0133] Meanwhile, the above partition (220) is configured to divide the interior of the above-mentioned flow path (210) into the inlet section (211) and the outlet section (212), and various configurations are possible, such as dividing the inlet section (211) and the outlet section (212) by various structures, such as vertical and horizontal directions based on the substrate support surface.

[0134] And the above bulkhead (220) may have a number of protrusions to increase the heat transfer effect.

[0135] It may have a structure that is severed just before reaching the connection section (213) formed at the other end of the induction coil (200).

[0136] Accordingly, the inlet section (211) and the outlet section (212) can be interconnected through the disconnected connecting section (213) of the above partition (220), and the cooling medium that has flowed through the inlet section (211) to the outermost end can naturally flow into the outlet section (212) by reversing its flow direction in the connecting section (213).

[0137] In addition, the above connecting section (213) can serve as a flow switching section that physically connects the inlet section (211) and the outlet section (212) to reverse the flow direction of the cooling medium.

[0138] The above connecting section (213) may be formed at an intermediate point of the induction coil (200) as needed so that the cooling medium returns from the middle of the coil, but it is preferable to form it at the other end of the induction coil (200) so that the cooling medium returns after being delivered to the end of the coil.

[0139] With this arrangement, the cooling medium can circulate through the entire section from the starting point to the outermost point of the induction coil (200) and then be discharged to the outside.

[0140] As a result, the above-mentioned Euro (210) may have an integrated circulation structure in which a cooling medium enters through the inlet end (201), changes direction at the end of the coil, and then exits through the discharge end (202).

[0141] By concentrating the inlet and outlet of the cooling medium at one end of the induction coil (200) in this way, the need to pull the coil back out toward the support shaft (400) for drainage can be eliminated.

[0142] Therefore, since complex wiring or piping does not need to be installed inside the narrow support shaft (400), there is an advantage in that the space efficiency of the heater assembly can be increased.

[0143] Meanwhile, the inlet section (211) and the outlet section (212) constituting the above-mentioned Euro (210) can be arranged in various ways, either vertically or inwardly and outwardly, to improve heat exchange efficiency within a single coil.

[0144] In one embodiment, the inlet section (211) may be positioned closer to the heat source (300) than the outlet section (212).

[0145] This may be intended to position the inlet section (211), through which a cooling medium supplied from the outside flows at the lowest temperature, closest to the heating element (300) that is heated to a high temperature, so that the inlet section (211) preferentially absorbs and blocks the strong thermal energy radiated from the heating element (300).

[0146] This prevents heat from the heating element (300) from being conducted to the induction coil (200) and heating it, thereby greatly improving the thermal stability of the heater assembly.

[0147] In addition, the cross-sectional shape of the inlet section (211) and the outlet section (212) may be any one of a rectangular, semicircular, circular, and ring shape.

[0148] In particular, the inlet section (211) may be formed in a shape that surrounds at least a portion of the side of the outlet section (212) from the outside.

[0149] For example, the discharge section (212) may have a circular or rectangular cross-section, and the inflow section (211) may be formed as a ring-shaped double pipe structure that surrounds it from the outside.

[0150] This enclosed structure allows the cold inlet section (211) to surround the outer edge of the discharge section (212) that has been heated by absorbing heat, thereby increasing the heat exchange area between the two sections and providing the effect of quickly offsetting the temperature difference inside the coil.

[0151] In addition, the inlet section (211) and the outlet section (212) may simply be extended parallel to each other along the longitudinal direction of the induction coil (200), but may also be formed in a structure that intersects each other or is extended while twisting in a spiral shape.

[0152] In this way, when the two Euros are extended and intersected in three dimensions, the phenomenon of heat being concentrated or stagnant in a specific part of the coil is blocked, thereby maintaining a much more uniform average temperature over the entire volume of the induction coil (200).

[0153] Furthermore, to optimize the cooling characteristics of the cooling medium, the cross-sectional area of ​​the flow path can be designed differently depending on the location.

[0154] For example, the cross-sectional area of ​​at least some of the inlet section (211) may be formed to be larger than the cross-sectional area of ​​the outlet section (212).

[0155] Specifically, in the vicinity of one end of the induction coil (200) where the inlet end (201) and the outlet end (202) are located, the cooling medium first enters and requires the largest heat capacity to absorb heat from the heat-generating part (300), so the area of ​​the inlet section (211) can be secured relatively wider.

[0156] In addition, the cross-sectional area of ​​the inflow section (211) can be formed to gradually decrease from one end of the induction coil (200) toward the other end where the connecting section (213) is located.

[0157] Conversely, the above discharge section (212) can also be formed so that the cross-sectional area decreases as it moves from the other end where the cooling medium returns to the first end.

[0158] Accordingly, unlike the first end where the difference in cross-sectional area was distinct, the cross-sectional areas of the inflow section (211) and the outflow section (212) in the other end can be formed at an equal level.

[0159] This gradual change in cross-sectional area may be intended to compensate for variations in cooling efficiency that occur as the cooling medium absorbs heat while passing through the flow path.

[0160] Specifically, the inlet section (211) near the inlet section (201), which must prioritize protection against the highest temperature heat, can be formed with a relatively wide cross-sectional area.

[0161] This is intended to effectively absorb the initial strong heat load transmitted from the heat source (300) and maximize heat transfer efficiency by securing a sufficient flow rate (heat capacity) of the cooling medium and a large heat exchange area in the corresponding section.

[0162] On the other hand, the discharge section (212), through which the cooling medium flows after absorbing heat while circulating through the coil and having already risen in temperature, can form a narrow flow path by gradually reducing the cross-sectional area as it moves toward the discharge end (202).

[0163] By accelerating the flow rate through this, the residence time of the high-temperature cooling medium inside the coil can be minimized, and it can be rapidly pushed out and discharged.

[0164] As a result, through Euro position-based design, it is possible to simultaneously secure initial cooling performance and achieve rapid heat dissipation in the later stages.

[0165] Meanwhile, the other end of the induction coil (200), which is opposite to the end portion equipped with the inlet portion (201) and the outlet portion (202), may be formed in the form of a free end that is not mechanically constrained.

[0166] As the other end is formed as a free end in this manner, the connecting section (213) connecting the inflow section (211) and the outflow section (212) inside the induction coil (200) can be configured in the form of a closed end where the end of the other end is sealed.

[0167] For example, an internal partition (220) that divides the inside of a single pipe into an inlet section (211) and an outlet section (212) can be severed just before reaching the other end, thereby forming a connecting section (213) through which the cooling medium can naturally reverse its flow.

[0168] Alternatively, if the induction coil (200) is in the form of a double tube consisting of an inner tube and an outer tube, a bridge structure connecting the inner tube and the outer tube can be formed in a specific section to support it, and it can be utilized as a connecting section (213) that reverses the flow direction of the cooling medium at the other end.

[0169] As such, the other end of the induction coil (200) is formed as a free end, which has an advantageous effect in configuring an electrical connection structure for generating an induced current.

[0170] Specifically, in order to apply high-frequency alternating current power to the induction coil (200), power transmission lines (51) electrically connected to an external power source may be connected to each end of the coil.

[0171] That is, a first power transmission line (51a) is connected to the other end of the induction coil (200), and a second power transmission line (51b) can be connected to the end where the inlet end (201) and the outlet end (202) are located.

[0172] As a more specific embodiment, the first power transmission line (51a) connected to the other end of the induction coil (200) may be connected in an attachment form that is formed integrally with the other end or fixed through a separate joining means.

[0173] And the second power transmission line (51b) positioned on the side of the inlet end (201) and the outlet end (202) can be electrically connected to the cooling medium discharge path (71b), and can be coupled via a separate connector.

[0174] And the second power transmission line (51b) positioned on the side of the inlet end (201) and the outlet end (202) may be selectively connected to either the cooling medium supply path (71a) or the cooling medium discharge path (71b) depending on the convenience and structure of the wiring design.

[0175] However, in order to minimize physical interference between parts and ensure the stability of the electrical structure, it is preferable that the second power transmission line (51b) be electrically connected to the cooling medium discharge channel (71b).

[0176] At this time, the second power transmission line (51b) can be connected to the corresponding path via a separate connector.

[0177] However, in a structure in which current is applied to the induction coil (200) through the cooling medium discharge channel (71b) (or cooling medium supply channel (71a)) as described above, the channel to which power is directly applied must also serve as a conductor capable of conducting current, so it cannot be formed of an insulating material.

[0178] For electrical stability, if the cooling medium supply channel (71a) and the cooling medium discharge channel (71b) are formed of an insulating material, the induction coil (200) may be formed short so that the inlet end (201) and the discharge end (202) are located in the internal space (S1) of the body part (100), and the connector may be directly connected to the inlet end (201) and the discharge end (202) of the induction coil (200) within the internal space (S1).

[0179] However, since securing a certain installation space is essential due to the physical volume of the connector part, in order to prevent interference between parts inside the body part and simplify the structure, it may be more preferable to form the cooling medium supply channel (71a) and cooling medium discharge channel (71b) with copper (Cu) material and extend them to the outside of the process chamber (10), and then connect the second power transmission line (51b) through the connector in the available space outside the process chamber (10).

[0180] At this time, the second power transmission line (51b) connected to the above-mentioned end can be drawn out relatively easily through the outside of the body part (100) or the hollow of the support shaft part (400) together with the cooling medium supply and drainage line.

[0181] On the other hand, the first power transmission line (51a) connected to the other end must inevitably be wired across the internal space of the body (100) since the other end is a free end located deep within the internal space (S1) of the body (100).

[0183] In order to prevent spatial constraints and physical and electromagnetic interference with the main body of the induction coil (200) that may occur during the wiring process of the first power transmission line (51a), a cable groove (111) may be formed on the upper surface of the main body (110) of the body part (100) that forms the internal space (S1) to guide and accommodate the arrangement path of the power transmission line (51).

[0184] For example, the cable groove portion (111) may be provided in multiple numbers so as to extend radially outward from the center of the body portion (100), and, for example, may be formed in four directions at 90-degree intervals along the circumferential direction.

[0185] Accordingly, the cable groove (111) is provided in a multi-directional radial path, so even if the final position of the other end, which is the free end, changes depending on the winding design or the number of turns of the induction coil (200), the cable groove (111) closest thereto can be selected to draw out the first power transmission line (51a).

[0186] In addition, the first power transmission line (51a) is installed by being seated inside the cable groove (111), thereby maximizing space efficiency inside the narrow body part (100) and blocking unnecessary interference or short circuits between coil turns.

[0187] Meanwhile, the above-mentioned induction coil (200) may be formed from a material including copper (Cu), which has excellent electrical and thermal conductivity.

[0188] In addition, to protect the coil from high temperature and corrosive process gases and to ensure insulation, a coating layer comprising at least one of ceramic, silicon, epoxy, and Teflon may be additionally formed on the outer surface of the induction coil (200).

[0189] In particular, in order to precisely implement a complex internal structure in the form of a double tube or dual flow path having a flow path, such as the induction coil (200) above, and to consistently maintain the number of turns of the coil, the induction coil (200) can be formed integrally through a metal 3D printing method.

[0190] When manufacturing an induction coil (200) using a 3D printing method like this, unlike the conventional bending method of physically bending a pipe, there is an advantage in that the degree of freedom in the design shape is increased, allowing for precise control of the geometric position.

[0191] That is, when the induction coil (200) is manufactured using a 3D printing method, the inlet section (211) and the outlet section (212), and the partition wall (220) separating the inlet section (211) and the outlet section (212) from each other can be formed integrally without joints or seams, that is, without a physical bonding structure.

[0192] Furthermore, through the high degree of shape freedom of this 3D printing method, the external cross-section of the induction coil (200) can be freely implemented not only as a general cylindrical shape but also as a polygonal shape such as a rectangle or a square.

[0193] In general, conventional bending processing methods that physically bend metal pipes have limitations in application because they are prone to deformation or shape change in the corners when bending square pipes, but using a metal 3D printing method, an induction coil (200) having a rectangular or square cross-section can be formed integrally with great precision without concerns about physical deformation.

[0194] In this way, if the induction coil (200) is formed in a rectangular or square cross-section, the upper surface of the coil is formed flat, so the opposing surface area facing the heating element (300) arranged side by side on the upper side can be increased.

[0195] In addition, when viewed from above, the starting point where the coil winding begins and the ending point where the winding ends can be accurately aligned to be located on the same imaginary line extending radially from the center (O) of the induction coil (200).

[0196] Specifically, as shown in FIG. 5, when any virtual line extending along the radial direction with respect to the center (O) of the winding is called the X-axis, the starting point where the winding of the induction coil (200) begins and the ending point where the winding ends can both be positioned on the same X-axis line.

[0197] In this way, by aligning the starting point and the ending point precisely on a single straight line extending from the center of the winding (O), the total number of windings of the induction coil (200) can be finished in integer units without any remaining fractional intervals.

[0198] In conventional manufacturing methods where tubes are bent to produce coils, the number of windings may end up being non-integer units due to constraints such as wiring space.

[0199] When the number of windings is formed in non-integer units as described above, a geometric imbalance inevitably occurs in which one more coil is placed in a specific azimuth area relative to the winding center (O) and fewer coils are placed in the opposite area.

[0200] This structural asymmetry causes a density deviation in the azimuth direction of the electromagnetic field formed when a high-frequency current is applied to the coil, and consequently, the heating element (300) placed above the induction coil (200) may cause a temperature non-uniformity problem in which it is locally overheated or underheated depending on the location.

[0201] Therefore, by aligning the starting point and the end point of the induction coil (200) with the same virtual line in the radial direction relative to the winding center (O) to implement the number of windings in integer units, the winding arrangement density of the coil can be circularly symmetrical across the entire direction surrounding the winding center (O).

[0202] Meanwhile, in order to perform precise temperature control for the temperature of the substrate (1), the induction coil (200) may be provided in multiple numbers.

[0203] That is, the induction coil (200) can be divided and arranged in multiple portions to independently heat different regions of the heating unit (300).

[0204] Generally, when heating the entire area with only a single induction coil, it may be difficult to precisely compensate for the deviation between regions of the heating part (300), so the magnetic field strength and heat output for each region can be individually controlled through multiple coils.

[0205] Specifically, the induction coil (200) may be composed of a first induction coil (200a) positioned below the central region of the heating element (300) and a second induction coil (200b) positioned below the edge region to surround the outer edge of the first induction coil (200a).

[0206] When viewed from above, the second induction coil (200b) is spaced apart at regular intervals along the outermost winding circumference of the first induction coil (200a), and can be extended in a shape that surrounds and encircles the outer edge of the first induction coil (200a) in one or more spiral or concentric circles.

[0207] With this arrangement, the first induction coil (200a) and the second induction coil (200b) can cover the center and outer parts of the heating part (300) without interference with each other.

[0208] At this time, the first induction coil (200a) and the second induction coil (200b) can be electrically insulated from each other and independently connected to an external power source, and each can be configured to be cooled individually by having a separate internal cooling channel (210).

[0209] Meanwhile, for convenience of explanation, this embodiment mainly describes a dual-zone control method that divides the center and the outer area into two, but the scope of application of the present invention is not limited to this.

[0210] In accordance with the requirements of the process or the trend of increasing the surface area of ​​the substrate (1), the heating area of ​​the heating part (300) may be further subdivided into three or more multi-zones, such as 3 zones or 4 zones.

[0211] By applying a multiple coil structure in the form of such a dual zone or multi-zone, independent control may also be possible in which higher power is applied to the second induction coil (200b) responsible for the outer area with relatively large heat loss than to the central first induction coil (200a).

[0212] As a result, the heat loss variation can be overcome and temperature uniformity can be achieved across the entire area from the center of the heating element (300) to the outermost edge.

[0213] Furthermore, there is an advantage of being able to flexibly respond even in processes where a temperature gradient must be intentionally formed between the center and the edge of the substrate (1) according to a recipe of a specific substrate processing process.

[0215] The foregoing merely describes some preferred embodiments that can be implemented by the present invention. As is well known, the scope of the present invention should not be interpreted as being limited to the above embodiments, and all technical concepts that share the fundamental principles with the technical concept of the present invention described above shall be considered to be included within the scope of the present invention. Explanation of the symbols

[0216] 100: Body part 200: Induction coil 300: Heating part 400: Shaft part 500: Cable 210: Euro 211: Inlet section 212: Outlet section 213: Connecting section

Claims

Claim 1 A heater assembly comprising: a body part (100) forming an internal space (S1); an induction coil (200) installed in the internal space (S1) and receiving power from the outside to form a magnetic field; and a heating part (300) disposed on the upper side of the body part (100) and generating heat by the magnetic field formed by the induction coil (200), wherein the induction coil (200) is characterized by having a flow path (210) through which a cooling medium circulates internally, and having an inlet end (201) through which the cooling medium flows into the flow path (210) and an outlet end (202) through which the cooling medium is discharged together at one end. Claim 2 A heater assembly according to claim 1, wherein the flow path (210) comprises: an inlet section (211) through which a cooling medium flows from one end of the induction coil (200) equipped with the inlet end (201) toward the other end; an outlet section (212) through which a cooling medium flows from the other end of the induction coil (200) toward one end equipped with the outlet end (202); and a connecting section (213) that connects the inlet section (211) and the outlet section (212) to change the flow direction so that the cooling medium passing through the inlet section (211) can flow into the outlet section (212). Claim 3 A heater assembly according to claim 2, wherein the inlet section (211) is positioned closer to the heating element (300) than the outlet section (212). Claim 4 A heater assembly according to claim 2, wherein the inlet section (211) and the outlet section (212) are separated from each other by a partition (220) provided inside the flow path (210). Claim 5 A heater assembly according to claim 4, wherein the partition (220) is disconnected at the connecting section (213) so that the inlet section (211) and the outlet section (212) are connected at the connecting section (213). Claim 6 A heater assembly according to claim 4, wherein the partition wall (220) has a plurality of protrusions to enhance the heat transfer effect. Claim 7 A heater assembly according to claim 2, wherein the inlet section (211) is formed to surround at least a portion of the side of the outlet section (212) from the outside. Claim 8 A heater assembly according to claim 2, characterized in that the cross-sectional area of ​​at least a portion of the inlet section (211) is formed differently from the cross-sectional area of ​​at least a portion of the outlet section (212). Claim 9 A heater assembly according to claim 8, characterized in that the cross-sectional area of ​​at least a portion of the inlet section (211) is formed to be larger than the cross-sectional area of ​​at least a portion of the outlet section (212). Claim 10 A heater assembly according to claim 2, wherein the cross-sectional area of ​​at least a portion of the inflow section (211) decreases as it goes from one end of the induction coil (200) toward the other end. Claim 11 A heater assembly according to claim 2, wherein the cross-sectional area of ​​at least a portion of the discharge section (212) decreases as it goes from the other end of the induction coil (200) toward one end. Claim 12 A heater assembly according to claim 2, wherein the connecting section (213) is formed at the other end of the induction coil (200). Claim 13 A heater assembly according to claim 1, wherein the induction coil (200) is formed of a material including copper (Cu). Claim 14 A heater assembly according to claim 1, wherein the induction coil (200) is characterized by having a coating layer formed on its outer surface comprising at least one of ceramic, silicon, epoxy, and Teflon. Claim 15 A heater assembly according to claim 1, wherein the induction coil (200) is formed such that when viewed from above, the starting point where the winding begins and the ending point where the winding ends are located on a virtual line extending radially from the winding center (O) of the induction coil (200), so that the number of windings is in integer units. Claim 16 A heater assembly according to any one of claims 1 to 15, wherein the induction coil (200) is formed integrally without a physical bonding structure by a 3D printing method. Claim 17 A substrate processing device characterized by comprising: a process chamber (10) forming a processing space (S2) inside; a gas injection unit (20) provided above the processing space (S2) and injecting a process gas for substrate processing into the processing space (S2); and a heater assembly (30) according to any one of claims 1 to 15, installed opposite the gas injection unit (20) in the processing space (S2) and supporting a substrate (1) to be processed. Claim 18 A substrate processing device according to claim 17, wherein the induction coil (200) is formed integrally without a physical bonding structure by a 3D printing method.

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