Lamination apparatus

Abstract

The lamination device includes a chamber, an electrostatic chuck, and illumination. The electrostatic chuck is placed within the chamber. The illumination provides light to the electrostatic chuck. The electrostatic chuck includes a base, an insulating layer, an electrode layer, and a protective layer. The insulating layer is placed on the base. The electrode layer is placed on the insulating layer. The protective layer is placed on the electrode layer. The base includes a first region and a second region. The second region is located outside the first region. The base is transparent. Thus, the base transmits light to illuminate the alignment mark of an object adsorbed to the electrostatic chuck. The electrostatic chuck adsorbs and fixes objects of various sizes and shapes. The electrostatic chuck is not replaced depending on the size, shape, or position of the alignment mark of the object.

Description

Technology Field

[0001] The present invention relates to a lamination device. More specifically, the present invention relates to a lamination device utilizing electrostatic force. Background Technology

[0002] A display device may include a display panel and a window. The manufacturing process of the display device may include a laminating process for bonding the display panel and the window. During the laminating process, it is necessary to check whether the display panel and the window are aligned. The alignment status can be determined by checking alignment marks included in the display panel and the window.

[0003] Depending on the display device, the display panel may have various sizes and various shapes. Depending on the display panel, the position of the alignment mark may vary. Depending on the size, shape, or position of the alignment mark of the display panel, the electrostatic chuck that adsorbs the display panel needed to be replaced. The problem to be solved

[0004] The objective of the present invention is to provide a lamination device with improved reliability.

[0005] However, the purpose of the present invention is not limited to the aforementioned purpose and may be expanded in various ways without departing from the spirit and scope of the present invention. means of solving the problem

[0006] To achieve the aforementioned objectives of the present invention, a lamination device according to one embodiment of the present invention may include a chamber, an electrostatic chuck disposed within the chamber, and a light source for providing light to the electrostatic chuck. The electrostatic chuck may include a base having light transparency, comprising a first region and a second region located outside the first region, a protective layer disposed on the base, an electrode layer disposed on the protective layer, and an insulating layer disposed on the electrode layer.

[0007] According to one embodiment, the base may include glass.

[0008] According to one embodiment, the base may include an acrylic resin.

[0009] According to one embodiment, the protective layer, the electrode layer, and the insulating layer may overlap with the first region.

[0010] According to one embodiment, in the second region, the base may include a plurality of through holes penetrating from the upper surface of the base to the lower surface of the base.

[0011] According to one embodiment, the plurality of through holes may be arranged in one direction.

[0012] According to one embodiment, the plurality of through holes may be spaced apart from each other at equal distances.

[0013] According to one embodiment, the chamber may include a plurality of recessed grooves.

[0014] According to one embodiment, the grooves may correspond to the through holes.

[0015] According to one embodiment, in the first region, the base may have a uniform thickness.

[0016] According to one embodiment, the lamination device may further include a camera movable to overlap with the electrostatic chuck.

[0017] To achieve the aforementioned objective of the present invention, a lamination device according to another embodiment of the present invention may include a chamber, an electrostatic chuck coupled to the chamber, and a light source for providing light to the electrostatic chuck. The electrostatic chuck may include a base having light transparency, at least a portion of which is inserted into a region of the chamber, a protective layer disposed on the base, an electrode layer disposed on the protective layer, and an insulating layer disposed on the electrode layer.

[0018] According to one embodiment, the base may have a uniform thickness.

[0019] According to one embodiment, the lamination device may further include a camera movable to overlap with the electrostatic chuck.

[0020] To achieve the aforementioned objectives of the present invention, a lamination device according to another embodiment of the present invention may include a chamber, a first electrostatic chuck disposed within the chamber, a second electrostatic chuck coupled to the chamber, and an illumination device for providing light to each of the first electrostatic chuck and the second electrostatic chuck. The first electrostatic chuck may include a first base having light transparency, comprising a first region and a second region located outside the first region, a protective layer disposed on the base, an electrode layer disposed on the protective layer, and an insulating layer disposed on the electrode layer. The second electrostatic chuck may include a second base having light transparency, at least a portion of which is inserted into a region of the chamber, a protective layer disposed on the base, an electrode layer disposed on the protective layer, and an insulating layer disposed on the electrode layer.

[0021] According to one embodiment, the first base may include glass or an acrylic resin.

[0022] According to one embodiment, the protective layer of the first electrostatic chuck, the electrode layer of the first electrostatic chuck, and the insulating layer of the first electrostatic chuck may overlap with the first region.

[0023] According to one embodiment, in the second region, the first base may include a plurality of through holes penetrating from the upper surface of the first base to the lower surface of the first base.

[0024] According to one embodiment, the chamber may include a plurality of recessed grooves.

[0025] According to one embodiment, the grooves may correspond to the through holes. Effects of the invention

[0026] The base may not include through holes in the region where the protective layer, the electrode layer, and the insulating layer overlap. The base may have a uniform thickness in the region where the protective layer, the electrode layer, and the insulating layer overlap. As a result, the variation in pressure applied to the base during the laminating process may be reduced.

[0027] The base may be transparent. Therefore, the base can transmit light to illuminate the alignment mark in the area where the protective layer, the electrode layer, and the insulating layer overlap, without including the through hole. Accordingly, the electrostatic chuck including the base can adsorb and fix objects of various sizes and shapes. As a result, the electrostatic chuck may not need to be replaced.

[0028] The base may include through holes in an area where the protective layer, the electrode layer, and the insulating layer do not overlap. The chamber may include grooves corresponding to the through holes. Accordingly, the electrostatic chuck including the base may be coupled with the chamber at various locations.

[0029] The base may constitute part of the chamber. The lighting may be located outside the space defined by the chamber and the base. As a result, the size of the lamination device may be reduced.

[0030] However, the effects of the present invention are not limited to the effects described above, and may be extended in various ways without departing from the spirit and scope of the present invention. Brief explanation of the drawing

[0031] FIGS. 1 and FIGS. 2 are drawings showing a lamination device according to an embodiment of the present invention. FIG. 3 is a perspective view showing an electrostatic chuck included in the lamination device of FIG. 1. Figure 4 is a plan view showing a base included in the electrostatic chuck of Figure 3. FIG. 5 is an enlarged view showing the chamber and electrostatic chuck included in the lamination device of FIG. 1. Figure 6 is a drawing showing the electrostatic chuck included in the lamination device of Figure 1 moved in one direction. FIGS. 7 and FIGS. 8 are drawings illustrating a lamination device according to another embodiment of the present invention. FIGS. 9 and FIGS. 10 are drawings illustrating a lamination device according to another embodiment of the present invention. Specific details for implementing the invention

[0032] Hereinafter, embodiments of the present invention will be described in more detail with reference to the attached drawings. Identical components in the drawings are given the same reference numerals, and redundant descriptions of identical components are omitted.

[0033] FIGS. 1 and FIGS. 2 are drawings showing a lamination device (1100) according to one embodiment of the present invention.

[0034] Referring to FIGS. 1 and FIGS. 2, the lamination device (1100) may include a chamber (110), an electrostatic chuck (300), a light (700), and a camera (CM).

[0035] The lamination device (1100) can be used in the manufacturing process of a display device. The lamination device (1100) can be used in the laminating process during the manufacturing process of the display device. The lamination device (1100) can bond a first object (2100) and a second object (2200) adsorbed on the electrostatic chuck (300). For example, the first object (2100) may be a display panel included in the display device, and the second object (2200) may be a window protecting the display panel.

[0036] The chamber (110) may provide a space for the laminating process to be performed. The interior of the chamber (110) may be maintained in a vacuum state, but is not limited thereto. The chamber (110) may include stainless steel (SUS). However, it is not limited thereto. For example, the chamber (110) may include various metals.

[0037] The chamber (110) may include a plate (111). The plate (111) may support the electrostatic chuck (300). The plate (111) may include a plurality of recessed grooves. That is, the chamber (110) may support the electrostatic chuck (300), and the chamber (110) may include a plurality of recessed grooves. This will be described later.

[0038] The electrostatic chuck (300) may be placed within the chamber (110). The electrostatic chuck (300) may be placed on the plate (111). The electrostatic chuck (300) may include a base (310) and an adsorption layer (330). The adsorption layer (330) may include a protective layer, an electrode layer, and an insulating layer. The protective layer, the electrode layer, and the insulating layer will be described later.

[0039] The electrostatic chuck (300) can support the first object (2100) and / or the second object (2200). The electrostatic chuck (300) can adsorb the first object (2100) and / or the second object (2200). That is, the electrostatic chuck (300) can fix the first object (2100) and / or the second object (2200). The electrostatic chuck (300) can utilize electrostatic force to adsorb and fix the first object (2100) and / or the second object (2200). The electrode layer included in the adsorption layer (330) can provide the electrostatic force.

[0040] The first object (2100) and the second object (2200) may include an alignment mark. Through the alignment mark, it is necessary to check whether the first object (2100) and the second object (2200) are aligned to be bonded to each other as previously set.

[0041] The above illumination (700) can provide light to the electrostatic chuck (300). The above illumination (700) can provide light to illuminate the first object (2100) and the second object (2200). That is, the above illumination (700) can illuminate the alignment marks included in the first object (2100) and the second object (2200). The above illumination (700) can be located inside the plate (111).

[0042] The camera (CM) can photograph the alignment marks included in the first object (2100) and the second object (2200). The alignment marks illuminated by the light (700) can be checked for alignment by the camera (CM).

[0043] The camera (CM) may be movable in a first direction (DR1). For example, the camera (CM) may overlap with the electrostatic chuck (300) to check whether the alignment mark is aligned. After checking whether the alignment mark is aligned, the camera (CM) may be moved in the first direction (DR1) to provide a space for the first object (2100) and the second object (2200) to be bonded. That is, when the first object (2100) and the second object (2200) are separated in a second direction (DR2) that intersects the first direction (DR1), the camera (CM) may be moved in the first direction (DR1) to be positioned between the first object (2100) and the second object (2200). When the first object (2100) and the second object (2200) are bonded, the camera (CM) may be moved to the first direction (DR1) and may not be located between the first object (2100) and the second object (2200).

[0044] FIG. 3 is a perspective view showing an electrostatic chuck (300) included in the lamination device (1100) of FIG. 1.

[0045] Referring to FIG. 3, the electrostatic chuck (300) may include the base (310), the protective layer (331), the electrode layer (332), and the insulating layer (333).

[0046] Conventionally, the base included a hole that transmits light to illuminate the alignment mark of an object adsorbed onto the electrostatic chuck. Consequently, a separate base containing a different hole was required to adsorb objects of different sizes, shapes, or alignment mark positions. In other words, the electrostatic chuck had to be replaced depending on the size, shape, or alignment mark position of the object.

[0047] The base (310) may be transparent. That is, light may pass through the base (310). Specifically, the light may pass through the base (310) in all areas of the base (310). Therefore, the electrostatic chuck (300) may not be replaced. For example, the electrostatic chuck (300) may not be replaced depending on the size, shape, or position of the alignment mark of the first object (2100) adsorbed to the electrostatic chuck (300). Specifically, the base (310) may not be replaced depending on the first object (2100) by being transparent without including a hole that transmits light provided to the first object (2100). In one embodiment, the base (310) may include glass. In another embodiment, the base (310) may include an acrylic resin.

[0048] The electrostatic chuck (300) can adsorb and fix the first object (2100) and / or the second object (2200) having various sizes and various shapes.

[0049] The protective layer (331) may be placed on the base (310). The protective layer (331) may protect the base (310) and the electrode layer (332). The protective layer (331) may prevent damage to the base (310) and the electrode layer (332) that may occur due to pressure applied during the laminating process. The protective layer (331) may also be referred to as a cushion layer. The protective layer (331) may include an acrylic resin, but is not limited thereto.

[0050] Although not shown, an adhesive layer may be placed between the protective layer (331) and the electrode layer (332).

[0051] The electrode layer (332) may be disposed on the protective layer (331). Although not illustrated, the electrode layer (332) may include a first electrode and a second electrode that are alternately disposed. Examples of materials included in the first electrode and the second electrode include copper, tungsten, etc. However, the electrode layer (332) may include various metals, not limited thereto.

[0052] The first electrode and the second electrode may be spaced apart from each other at a predetermined distance. For example, the first electrode may be a positive electrode and the second electrode may be a negative electrode. As a result, the first object (2100) and / or the second object (2200) adsorbed to the electrostatic chuck (300) may have charges opposite to those of the electrode layer (332). For example, a portion of the first object (2100) placed on the first electrode which is a positive electrode may have a negative charge, and another portion of the first object (2100) placed on the second electrode which is a negative electrode may have a positive charge. Accordingly, the electrode layer (332) may provide the electrostatic force to adsorb and fix the first object (2100) and / or the second object (2200). That is, the electrostatic chuck (300) can fix the first object (2100) and / or the second object (2200) by adsorbing them with the electrostatic force provided by the electrode layer (332).

[0053] Although not shown, an adhesive layer may be placed between the electrode layer (332) and the insulating layer (333).

[0054] The insulating layer (333) may be disposed on the electrode layer (332). The insulating layer (333) may be disposed between the first electrode and the second electrode that are alternately disposed. The insulating layer (333) may insulate between the first electrode and the second electrode. The insulating layer (333) may be disposed on the first electrode and the second electrode. The insulating layer (333) may insulate between the electrode layer (332) and the first object (2100) and / or the second object (2200). The insulating layer (333) may include polyimide, but is not limited thereto.

[0055] FIG. 4 is a plan view showing a base (310) included in the electrostatic chuck (300) of FIG. 3.

[0056] Referring to FIG. 4, the base (310) may include a first region (1A) and a second region (2A). The first region (1A) may be located in the center of the base (310). The second region (2A) may be located outside the first region (1A). That is, the second region (2A) may be located on the side of the base (310).

[0057] Referring to FIGS. 3 and 4, in the first region (1A), the adsorption layer (330) may be placed on the base (310). In the second region (2A), the adsorption layer (330) may not be placed on the base (310). The adsorption layer (330) may overlap with the first region (1A) and may not overlap with the second region (2A).

[0058] The protective layer (331), the electrode layer (332), and the insulating layer (333) may be disposed on the first region (1A) of the base (310). The protective layer (331), the electrode layer (332), and the insulating layer (333) may overlap with the first region (1A). The protective layer (331), the electrode layer (332), and the insulating layer (333) may not overlap with the second region (2A) of the base (310). That is, the second region (2A) of the base (310) may be an area where the protective layer (331), the electrode layer (332), and the insulating layer (333) are not disposed.

[0059] The base (310) may be transparent to illuminate the alignment mark. The base (310) may be transparent in the first region (1A). However, it is not limited thereto, and the base (310) may be transparent in the second region (2A). The base (310) is not transparent due to a hole penetrating the base (310), but rather a material contained in the base (310) may be transparent. Examples of such materials include glass, acrylic resin, etc.

[0060] The first object (2100) and / or the second object (2200) adsorbed on the adsorption layer (330) may be adsorbed in the first region (1A) and may not be adsorbed in the second region (2A). In other words, the alignment marks included in the first object (2100) and the second object (2200) may be illuminated in the first region (1A) and do not need to be illuminated in the second region (2A).

[0061] In the second region (2A) above, the base (310) may include a plurality of through holes (315). That is, in the second region (2A) on both sides, the base (310) may include the plurality of through holes (315). The plurality of through holes (315) may penetrate from the upper surface of the base (310) to the lower surface of the base (310). The plurality of through holes (315) may be arranged in one direction. That is, the plurality of through holes (315) disposed on one side of the base (310) may be arranged in the same direction, and the plurality of through holes (315) disposed on the other side of the base (310) may also be arranged in the same direction. The plurality of through holes (315) disposed on one side may be spaced apart from each other at an equal distance.

[0062] FIG. 5 is an enlarged view showing a chamber (110) and an electrostatic chuck (300) included in the lamination device (1100) of FIG. 1. For example, FIG. 5 shows a part of the plate (111) included in the chamber (110).

[0063] Referring to FIGS. 3 to 5, in the first region (1A), the base (310) may have a uniform thickness. That is, the base (310) may not include the plurality of through holes (315) in the first region (1A). By having a uniform thickness without including the plurality of through holes (315) in the first region (1A), the variation in pressure applied to the base (310) during the laminating process may be reduced.

[0064] The chamber (110, 111) may include a plurality of recessed grooves (115). The plate (111) included in the chamber (110) may include the plurality of recessed grooves (115). The plurality of grooves (115) may be formed on the upper surface of the plate (111). The plurality of grooves (115) may be formed by being recessed to a predetermined depth on the upper surface of the plate (111).

[0065] The plurality of grooves (115) may be arranged in one direction. The plurality of grooves (115) may be arranged in the first direction (DR1). The plurality of grooves (115) may correspond to the plurality of through holes (315).

[0066] The base (310) and the chamber (110, 111) can be combined. The plate (111) included in the base (310) and the chamber (110) can be combined. The base (310) and the plate (111) can be combined with each other by a connecting member (BT). An example of the connecting member (BT) is a bolt. The connecting member (BT) can be inserted through the corresponding through hole (315) and the groove (115). By the connecting member (BT) combining the base (310) and the plate (111), the electrostatic chuck (300) can be fixed to the chamber (110). Therefore, the position of the electrostatic chuck (300) may not be moved during the laminating process.

[0067] Before the base (310) and the plate (111) are joined by the above-mentioned joining member (BT), the base (310) may be moved and positioned in the first direction (DR1). That is, the position of the electrostatic chuck (300) can be selected depending on the situation of the laminating process.

[0068] Referring to FIGS. 1 and 2, the first object (2100) may be the display panel, and the second object (2200) may be the window. The first object (2100) and the second object (2200) may be bonded together by a lamination device (1100).

[0069] Meanwhile, the first object (2100) may include an adsorption area (LA) and a non-adsorption area (NLA). For example, if the first object (2100) is a display panel, a flexible printed circuit board (FPCB) included in the display panel may come into contact with the electrostatic chuck (300) and cause a defect. Therefore, the adsorption area (LA) of the first object (2100) may adsorb to the electrostatic chuck (300), and the non-adsorption area (NLA) of the first object (2100) may not adsorb to the electrostatic chuck (300). As a result, the first object (2100) and the second object (2200) may be attached in an offset manner. Therefore, when the first object (2100) and the second object (2200) need to be bonded so that they completely overlap, it is necessary to move the electrostatic chuck (300).

[0070] FIG. 6 is a drawing showing the electrostatic chuck (300) included in the lamination device (1100) of FIG. 1 moved in one direction.

[0071] Referring to FIGS. 5 and 6, the adsorption region (LA) of the first object (2100) may be adsorbed to the electrostatic chuck (300). The non-adsorption region (NLA) of the first object (2100) may not be adsorbed to the electrostatic chuck (300).

[0072] The electrostatic chuck (300) can be moved so that the adsorption area (LA) of the first object (2100) and the second object (2200) are not misaligned. The base (310) can be moved in the first direction (DR1) so that the adsorption area (LA) of the first object (2100) and the second object (2200) are aligned. After the base (310) is moved, the coupling member (BT) can be fitted through the through holes (315) of the base (310) and the grooves (115) of the plate (111). Thus, the electrostatic chuck (300) can be fixed to the plate (111). That is, after moving the electrostatic chuck (300) so that the first object (2100) and the second object (2200) are aligned, the laminating process can be performed.

[0073] FIGS. 7 and FIGS. 8 are drawings showing a lamination device (1200) according to another embodiment of the present invention.

[0074] Referring to FIGS. 7 and 8, the lamination device (1200) may include a chamber (120), an electrostatic chuck (500), a light (900), and a camera (CM). The description of the same components as those of the lamination device (1100) shown in FIG. 1 for the lamination device (1200) is redundant and will be omitted.

[0075] The electrostatic chuck (500) may include a base (510) and an adsorption layer (530). The base (510) may be transparent. For example, the base (510) may include glass. However, it is not limited thereto, and the base (510) may include various materials that are transparent.

[0076] The electrostatic chuck (500) can be coupled with the chamber (120). At least a portion of the base (510) can be inserted into a region (OP) of the chamber (120). The base (510) and the chamber (120) can form a single body. The base (510) and the chamber (120) can provide a space where the laminating process is performed.

[0077] The adsorption layer (530) may be located within the chamber (120). The adsorption layer (530) may be located within the space defined by the chamber (120) and the base (510).

[0078] A light source (900) for providing light to the electrostatic chuck (500) may be located outside the chamber (120). By the base (510) forming part of the chamber (120), the light source (900) may be located outside the space defined by the chamber (120) and the base (510). As a result, the size of the lamination device (1200) may be reduced.

[0079] FIGS. 9 and FIGS. 10 are drawings showing a lamination device (1300) according to another embodiment of the present invention.

[0080] Referring to FIGS. 9 and 10, the lamination device (1300) may include a chamber (100), a first electrostatic chuck (300), a second electrostatic chuck (500), lighting (700, 900), and a camera (CM). The description of the same components as those of the lamination devices (1100, 1200) shown in FIGS. 1 and 7 for the lamination device (1300) is redundant and will be omitted.

[0081] The chamber (100) may include a lower chamber (110) and an upper chamber (120). When the lower chamber (110) and the upper chamber (120) are separated, the camera (CM) can photograph alignment marks included in the first object (2100) and the second object (2200). When the lower chamber (110) and the upper chamber (120) are adjacent, the laminating process for bonding the first object (2100) and the second object (2200) can be performed.

[0082] The first electrostatic chuck (300) may include a first base (310) and a first adsorption layer (330). The first electrostatic chuck (300) may be placed within the chamber (100). The first electrostatic chuck (300) may be placed within the lower chamber (110).

[0083] The first adsorption layer (330) may include a protective layer disposed on the first base (310), an electrode layer disposed on the protective layer, and an insulating layer disposed on the electrode layer.

[0084] The first base (310) may include a first region where the first adsorption layer (330) is disposed and a second region located outside the first region. The protective layer of the first electrostatic chuck (300), the electrode layer of the first electrostatic chuck (300), and the insulating layer of the first electrostatic chuck (300) may overlap with the first region. That is, the first adsorption layer (330) may overlap with the first region but may not overlap with the second region.

[0085] The first base (310) may be transparent. In one embodiment, the first base (310) may include glass. In another embodiment, the first base (310) may include an acrylic resin.

[0086] In the second region above, the first base (310) of the first electrostatic chuck (300) may include a plurality of through holes. The plurality of through holes may penetrate from the upper surface of the first base (310) to the lower surface of the first base (310).

[0087] The lower chamber (110) may include a plate (111). The chamber (110, 111) may include a plurality of recessed grooves. The grooves may correspond to the through holes. Accordingly, the first base (310) may be moved in a first direction (DR1) and fixed. That is, the position of the first electrostatic chuck (300) may be selected as needed.

[0088] Accordingly, the first electrostatic chuck (300) may not be replaced depending on the size, shape, or position of the alignment mark of the first object (2100). Additionally, if the first object (2100) includes an adsorption area and a non-adsorption area, the first electrostatic chuck (300) may be moved so that the first object (2100) and the second object (2200) are aligned without the need for replacement.

[0089] The second electrostatic chuck (500) may include a second base (510) and a second adsorption layer (530). The second electrostatic chuck (500) may be coupled to the upper chamber (120). At least a portion of the second base (510) may be inserted into a region (OP) of the upper chamber (120). The second base (510) and the upper chamber (120) may form a single body. The second base (510), the upper chamber (120), and the lower chamber (110) may provide a space where the laminating process is performed.

[0090] A light source (900) for providing light to the second electrostatic chuck (500) may be located outside the upper chamber (120). By the second base (510) forming part of the upper chamber (120), the light source (900) may be located outside the space defined by the upper chamber (120) and the second base (510). As a result, the size of the lamination device (1300) may be reduced. Industrial applicability

[0091] The present invention can be applied to a lamination device. For example, the present invention can be applied to a laminating process during the manufacturing process of display devices such as high-resolution smartphones, mobile phones, smartpads, smartwatches, tablet PCs, vehicle navigation systems, televisions, computer monitors, and laptops.

[0092] Although the present invention has been described above with reference to exemplary embodiments, those skilled in the art will understand that various modifications and changes can be made to the invention without departing from the spirit and scope of the invention as set forth in the following claims. Explanation of the symbols

[0093] 1100, 1200, 1300: Lamination device 100: Chamber 110, 120: Lower chamber and upper chamber 300, 500: 1st electrostatic chuck and 2nd electrostatic chuck 310, 510: 1st bass and 2nd bass 331, 531: Protective layer 332, 532: Electrode layer 333, 533: Insulation layer 700, 900: Lighting CM: Camera 1A, 2A: First area and second area 315: Through hole 115: Groove

Claims

Claim 1 A lamination device comprising: a chamber; an electrostatic chuck disposed within the chamber; and a light source for providing light to the electrostatic chuck, wherein the electrostatic chuck comprises a first region and a second region located outside the first region, and comprises a light-transmitting base; a protective layer disposed on the base; an electrode layer disposed on the protective layer; and an insulating layer disposed on the electrode layer, wherein in the second region, the base comprises a plurality of through holes penetrating from the upper surface of the base to the lower surface of the base, and the chamber comprises a plurality of recessed grooves. Claim 2 A lamination device according to claim 1, wherein the base comprises glass. Claim 3 A lamination device according to claim 1, characterized in that the base comprises an acrylic resin. Claim 4 A lamination device according to claim 1, characterized in that the protective layer, the electrode layer, and the insulating layer overlap with the first region. Claim 5 delete Claim 6 A lamination device according to claim 1, characterized in that the plurality of through holes are arranged in one direction. Claim 7 A lamination device according to claim 6, characterized in that the plurality of through holes are spaced apart from each other at equal distances. Claim 8 delete Claim 9 A lamination device according to claim 1, characterized in that the grooves correspond to the through holes. Claim 10 A lamination device according to claim 1, wherein in the first region, the base has a uniform thickness. Claim 11 A lamination device according to claim 1, further comprising a camera movable to overlap with the electrostatic chuck. Claim 12 A lamination device comprising: a chamber; an electrostatic chuck coupled to the chamber; and a light source for providing light to the electrostatic chuck, wherein the electrostatic chuck comprises: a base having light transparency, at least a portion of which is inserted into a region of the chamber; a protective layer disposed on the base; an electrode layer disposed on the protective layer; and an insulating layer disposed on the electrode layer. Claim 13 A lamination device according to claim 12, wherein the base has a uniform thickness. Claim 14 A lamination device according to claim 12, further comprising a camera movable to overlap with the electrostatic chuck. Claim 15 A lamination device comprising: a chamber; a first electrostatic chuck disposed within the chamber; a second electrostatic chuck coupled to the chamber; and a light source for providing light to each of the first electrostatic chuck and the second electrostatic chuck, wherein the first electrostatic chuck comprises a first region and a second region located outside the first region and comprises a first base having light transparency; a protective layer disposed on the base; an electrode layer disposed on the protective layer; and an insulating layer disposed on the electrode layer, wherein the second electrostatic chuck comprises a second base having light transparency, at least a portion of which is inserted into a region of the chamber; a protective layer disposed on the base; an electrode layer disposed on the protective layer; and an insulating layer disposed on the electrode layer. Claim 16 A lamination device according to claim 15, wherein the first base comprises glass or acrylic resin. Claim 17 A lamination device according to claim 15, wherein the protective layer of the first electrostatic chuck, the electrode layer of the first electrostatic chuck, and the insulating layer of the first electrostatic chuck overlap with the first region. Claim 18 A lamination device according to claim 15, wherein in the second region, the first base comprises a plurality of through holes penetrating from the upper surface of the first base to the lower surface of the first base. Claim 19 A lamination device according to claim 18, wherein the chamber comprises a plurality of recessed grooves. Claim 20 A lamination device according to claim 19, characterized in that the grooves correspond to the through holes.

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