Rotary Copying Apparatus

Abstract

The present invention relates to a rotational mimicry device, and more specifically, to a rotational mimicry device capable of rotating while in contact with and supporting a material by mimicking the angle of a support surface parallel to the support surface of the material. The rotational mimicry device of the present invention has the advantage of having a rotational function while enabling operations such as inspection, photography, processing, light irradiation, and adsorption on the material by contacting the material with a surface adjusted parallel to the support surface of the target material and allowing a path for external access to the support surface of the material.

Description

Technology Field

[0001] The present invention relates to a rotational mimicry device, and more specifically, to a rotational mimicry device capable of rotating while in contact with and supporting a material by mimicking the angle of a support surface parallel to the support surface of the material. Background Technology

[0002] In devices for adsorbing or supporting materials such as semiconductor chips, printed circuit boards, and display panels, a device having the function of supporting the material by adjusting the support surface parallel to the support surface of the target material is widely used.

[0003] Such a device is called a mimicry device or an air gyro.

[0004] While it was sufficient for such a mimicry device to support the material by adjusting the position of the support member relative to the material's support surface to a parallel angle, recently, there has been a need to perform tasks such as inspection, imaging, and processing on the material's support surface depending on the characteristics of the material. In particular, when supporting a relatively small material such as a semiconductor chip with a rotary mimicry device, a conventional rotary mimicry device such as Patent Document 1 has a problem in that it is difficult to perform additional tasks because the support surface (contact surface with the semiconductor chip) covers the entire upper surface of the semiconductor chip.

[0005] Therefore, there was a need for a mimicry device with a structure that supports the material by adjusting the slope to match the slope of the material's support surface, while also securing a space to perform operations such as inspection, imaging, processing, and adsorption on a portion of that support surface.

[0006] In addition, when contacting and adsorbing to a material in accordance with the slope of the material's support surface, a rotational mimicry device having the function to rotate the material became necessary. Prior art literature

[0007] Republic of Korea Published Patent Application No. 10-2020-0125463 (Nov. 4, 2020) The problem to be solved

[0008] The present invention aims to provide a rotation mimicking device having a structure capable of supporting a material by contacting the material with a parallel support surface that mimics the inclination of the material's support surface, while also enabling a rotational function. means of solving the problem

[0009] The rotational mimicry device of the present invention comprises: a support member including a support body, a rotational support portion formed in the shape of a circular cylinder to penetrate the support body vertically, and a support channel formed to extend to the inner diameter of the rotational support portion via the support body; a rotational member having a rotational body inserted into the rotational support portion of the support member and rotatably installed relative to the support member, a hollow channel formed to penetrate vertically through the center of the rotational body, a lifting seating portion formed by being cylindrically recessed in the lower part of the rotational body to be connected to the lower end of the hollow channel, and a floating channel formed in the rotational body to communicate with the support channel; and a lifting member having a lifting body formed in the shape of a cylinder and a connecting channel formed to penetrate vertically through the center of the lifting body and communicate with the hollow channel, and installed by being inserted into the lifting seating portion of the rotational member so as to be vertically movable. The invention is characterized by comprising: a porous floating member made of a porous material that is formed in a ring shape and has a concave portion formed by cutting a part of a hemisphere, and is positioned to surround the outer diameter of the lifting member and installed at the lower part of the rotating member to communicate with the floating channel; and a fixing member that is formed in a ring shape and is positioned to face the concave portion of the floating member, and has a mimic curved surface having a shape corresponding to the curved surface of the concave portion on the surface that contacts the concave portion of the floating member, and is assembled coaxially with the lifting member so as to be fixed or free in close contact with the concave portion according to the lifting movement of the lifting member. Effects of the invention

[0010] The rotational mimicry device of the present invention has the advantage of having a rotational function while enabling operations such as inspection, photography, processing, light irradiation, and adsorption on the material by contacting the material with a surface adjusted parallel to the support surface of the target material and allowing a path for external access to the support surface of the material. Brief explanation of the drawing

[0011] FIG. 1 is a side view illustrating an example of use of a rotational mimicry device according to one embodiment of the present invention. FIG. 2 is a perspective view of a rotational mimicry device according to one embodiment of the present invention. Figure 3 is an exploded perspective view of the rotary mimic device shown in Figure 2. FIG. 4 is a cross-sectional view along line IV-IV of the rotational mimicry device shown in FIG. 2. Figure 5 is a cross-sectional view illustrating the operation of the rotary mimic device shown in Figure 2. Specific details for implementing the invention

[0012] Hereinafter, a rotational mimicry device according to an embodiment of the present invention will be described with reference to the attached drawings.

[0013] FIG. 2 is a perspective view of a rotational mimicry device according to one embodiment of the present invention, FIG. 3 is an exploded perspective view of the rotational mimicry device shown in FIG. 2, and FIG. 4 is a cross-sectional view taken along line IV-IV of the rotational mimicry device shown in FIG. 2.

[0014] Referring to FIGS. 2 to 4, the rotational mimicry device according to the present embodiment comprises a support member (100), a rotational member (200), a lifting member (300), a levitating member (400), and a fixed member (500).

[0015] The support member (100) comprises a support body (110) and a support channel (140). The support member is a component that supports the overall components of the rotational imitation device according to the present embodiment. The support body (110) is formed in the shape of a roughly square block, but is not limited to this shape and may be formed in a cylindrical structure or a hexagonal column shape. A rotational support member (130) is formed in the support body (110) in a shape that penetrates vertically. The rotational support member (130) is formed in the shape of a circular cylinder. The inner diameter of the rotational support member (130) does not need to be formed uniformly. The support body (110) does not need to be formed as a single body, but may be composed of two or more parts assembled together.

[0016] The support channel (140) is formed to extend through the support body (110) to the inner diameter of the rotational support member (130). That is, the support channel (140) is formed to extend from the outer surface of the support body (110) to the inner diameter of the rotational support member (130). An external pneumatic device is connected to the support channel (140) to transmit positive or negative pressure to the inside of the rotational support member (130).

[0017] The rotating member (200) comprises a rotating body (210), a hollow fluid path (230), and a floating fluid path (260).

[0018] The rotating body (210) is inserted into the rotating support portion (130) of the support member (100) and is installed so as to be rotatable with respect to the support member (100). In the present embodiment, as shown in FIG. 4, the rotating body (210) is installed so as to be rotatable with respect to the support member (100) by being supported by a bearing installed in the inner diameter of the rotating support portion (130). The hollow passage (230) is formed to penetrate the central portion of the rotating body (210) vertically. In the present embodiment, the hollow passage (230) is formed to extend vertically along the rotational center axis of the rotating body (210).

[0019] A lifting support portion (250) is formed in a cylindrical shape by being recessed at the bottom of the rotating body (210). A lifting member (300), which will be described later, is installed in the lifting support portion (250). In the case of this embodiment, the lifting support portion (250) is formed in a shape in which the inner diameter of the hollow flow path (230) portion is expanded at the bottom of the rotating body (210). That is, the lifting support portion (250) is also formed to extend downward along the rotational center axis of the rotating body (210).

[0020] A floating channel (260) is formed in the rotating body (210) to communicate with the supporting channel (140). Since the rotating body (210) is rotatably installed with respect to the supporting member (100), a portion of the floating channel (260) is formed in the form of a groove along the circumferential direction on the outer diameter of the rotating body (210) so that the floating channel (260) communicates with the supporting channel (140) regardless of the rotational angle displacement of the rotating body (210). Such a floating channel (260) is formed to extend to the lower surface of the rotating body (210) via the rotating body (210). Additionally, in the case of this embodiment, the floating channel (260) is formed to be connected to the cylinder portion (240) of the rotating body (210), which will be described later.

[0021] The lifting member (300) is configured to move up and down relative to the rotating member (200), and to press the fixed member (500), which will be described later, to fix it relative to the rotating member (200), or to allow the fixed member (500) to rise so that the fixed member (500) can move freely within a predetermined range. The lifting member (300) is formed by including a lifting body (310) and a connecting channel (330).

[0022] The lifting body (310) is formed in the shape of a rough cylinder. The connecting channel (330) is formed to penetrate the center of the lifting body (310) in the vertical direction. Such a lifting member (300) is installed to be seated on the lifting seating portion (250) of the rotating member (200). The lifting member (300) is formed to be able to move up and down within the allowed range with respect to the lifting seating portion (250) of the rotating member (200). The lifting member (300) installed on the lifting seating portion (250) of the rotating member (200) has a hollow central portion due to the configuration of the connecting channel (330) of the lifting member (300), and the connecting channel (330) is formed to communicate with the hollow channel (230). In the case of this embodiment, the hollow channel (230) and the connecting channel (330) are connected to each other in a straight line extending along the vertical direction. Therefore, it is possible for a separate device, such as an inspection device, to move through the hollow channel (230) and the connecting channel (330), and it is also possible to irradiate light such as a laser beam. In addition, it is possible to photograph necessary parts of materials or products using a camera through the hollow channel (230) and the connecting channel (330). Furthermore, it is possible to adsorb materials by applying negative pressure through the hollow channel (230) and the connecting channel (330).

[0023] A head portion (311) is formed at the lower part of the lifting body (310) of the lifting member (300). The head portion (311) is formed in a conical shape such that its outer diameter decreases as it extends from the lower part of the lifting body (310) toward the upper part. The curvature of the conical head portion (311) is formed to have a hemispherical shape or a suitable arc shape.

[0024] The levitation member (400) is formed in a ring shape and installed at the bottom of the rotating member (200). The levitation member (400) is formed of a porous material and can serve to transmit air pressure. The levitation channel (260) described above is connected to the levitation member (400) via the rotating body (210). The levitation member (400) is provided with a concave portion (410). The concave portion (410) is formed in a curved shape that is formed by cutting out a part of a hemisphere. Referring to FIG. 4, the concave portion (410) of the levitation member (400) is formed concavely toward the downward side relative to the drawing. Such a concave portion (410) is positioned to surround the outer diameter of the lifting member (300) and is installed at the bottom of the rotating member (200). That is, the lifting member (300) is positioned in a manner that fits into the space in the center of the concave portion (410). The gas pressure transmitted to the buoyancy member (400) through the support Euro (140) and the buoyancy Euro (260) is transmitted to the surface of the concave portion (410).

[0025] The fixed member (500) is formed in a ring shape. The fixed member (500) is installed by being assembled coaxially with the lifting member (300) so that it is fixed or free when in close contact with the concave portion (410) according to the lifting movement of the lifting member (300). The lifting member (300) is fitted into the inner diameter of the fixed member (500) and assembled to the rotating member (200). Referring to FIGS. 3 and 4, in the present embodiment, the fixed member (500) is composed of two ring-shaped members: a first ring member (510) and a second ring member (520). The first ring member (510) of the fixed member (500) has a mimic curved surface (511). The mimic curved surface (511) is positioned on the surface of the fixed member (500) that faces and contacts the concave portion (410) of the lifting member (400). The imitation curved surface (511) is formed as a curved surface with a shape corresponding to the curved surface of the concave portion (410). That is, the imitation curved surface (511) is formed as a shape that is convex toward the upper side based on FIG. 4. The second ring member (520) is positioned to face the lifting member (400) with the first ring member (510) in between. The second ring member (520) is provided with a catch portion (521). The catch portion (521) is formed as a curved surface corresponding to the shape of the head portion (311) of the lifting member (300) so as to surround the head portion (311) of the lifting member (300). The lifting member (300) is assembled by being fitted so that the head portion (311) catches on the catch portion (521) of the second ring member (520). Accordingly, the lifting member (300) can descend without getting caught on the fixed member (500), but when ascending, the head part (311) gets caught on the catch part (521) and ascends together with the fixed member (500).

[0026] When the lifting member (300) descends and the head portion (311) is not caught on the catch portion (521), the first ring member (510) of the fixed member (500) moves along the curved surface of the concave portion (410) and becomes freely tiltable. When the lifting member (300) rises and the head portion (311) catches on the catch portion (521), the second ring member (520) rises together with the lifting member (300). Since the first ring member (510) is positioned between the levitating member (400) and the second ring member (520), when the second ring member (520) rises, it presses the first ring member (510) against the levitating member (400). In this way, when the lifting member (300) rises, it presses the second ring member (520) to fix the inclination of the second ring member (520). FIG. 5 illustrates a second ring member (520) having a mimic curved surface (511) in a tilted state relative to the lifting member (300), the lifting member (400), and the rotating member (200), and spaced apart from the concave portion (410).

[0027] A buoyancy channel (260) is formed in the rotating body (210) of the rotating member (200) to transmit gas pressure to the imitation curved surface (511) of the fixed member (500). The buoyancy channel (260) is formed to extend from the outer surface of the rotating body (210) through the interior of the rotating body (210) to the installation position of the buoyancy member (400). External gas pressure transmitted through the support channel (140) and the buoyancy channel (260) is transmitted to the imitation curved surface (511) of the fixed member (500) through the porous material buoyancy member (400). When external gas pressure is transmitted through the support channel (140) and the buoyancy channel (260) in this manner, when the lifting member (300) is lowered, the fixed member (500) rises downward relative to the buoyancy member (400) due to the gas pressure in the buoyancy channel (260).

[0028] Based on FIG. 4, a permanent magnet (600) is installed on the upper part of the levitation member (400). In this embodiment, the permanent magnet (600) is formed in a ring shape. The permanent magnet (600) is positioned to face the fixed member (500) with the levitation member (400) in between. The permanent magnet (600) exerts an attractive force on the fixed member (500), which is formed of a magnetic material. Due to the action of the permanent magnet (600), the fixed member (500) receives a force that moves it in the direction of the permanent magnet (600). That is, the first ring member (510) of the fixed member (500) is in a state of being in close contact with the concave portion (410) of the levitation member (400) by the permanent magnet (600). When gas pressure is supplied to the support channel (140) and the levitation channel (260), the first ring member (510) of the fixed member (500) overcomes the magnetic force of the permanent magnet (600) and moves away from the levitation member (400) due to the gas pressure transmitted through the levitation member (400).

[0029] In order to effectively transmit the magnetic force of such a permanent magnet (600) only to the fixed member (500), the rotating member (200) may be formed of a non-magnetic material. However, in some cases, it is also possible to use a rotating member (200) formed of a magnetic material. It is possible to construct the rotational mimicry device of the present invention by making appropriate design modifications so that the permanent magnet (600) exerts a magnetic force of the necessary amount on the fixed member (500).

[0030] Referring to FIGS. 3 and 4, the lifting member (300) further includes a piston portion (350) formed to protrude in a ring shape from the outer diameter of the lifting body (310). The rotating member (200) further includes a cylinder portion (240) formed to be recessed in a ring shape into the inner diameter of the hollow passage (230). That is, the cylinder portion (240) of the rotating member (200) is formed to be recessed radially from the lifting seating portion (250). The piston portion (350) of the lifting member (300) is received in the cylinder portion (240) of the rotating member (200) and arranged so as to be able to move up and down. Due to this structure, the piston portion (350) and the cylinder portion (240) are configured such that the piston portion (350) can slide relative to the cylinder portion (240) depending on the pressure on both sides of the piston portion (350), similar to a general piston-cylinder structure. The movement of the piston part (350) relative to the cylinder part (240) is realized by the levitation path (260) and the locking elastic part (360). A portion of the levitation path (260) is formed in the rotating body (210) so as to be connected to the space between one side of the piston part (350) and the upper surface of the cylinder part (240). In this embodiment, when the pressure of the levitation path (260) increases, the piston part (350) descends relative to the cylinder part (240). The fixed member (500) also descends together with the lifting member (300). When the pressure is removed or negative pressure is applied to the levitation path (260), the piston part (350) rises relative to the cylinder part (240), causing the fixed member (500) and the lifting member (300) to rise. The magnetic force of the permanent magnet (600) is also acting in the upward direction of the fixed member (500). To assist the upward movement of the piston part (350), a spring-shaped locking elastic part (360) is installed between the lower surface of the piston part (350) and the lower surface of the cylinder part (240). The locking elastic part (360) provides an elastic force in the upward direction to the piston part (350).Accordingly, when the pressure of the levitation path (260) decreases, the lifting member (300) rises due to the magnetic force of the permanent magnet (600) and the elastic force of the locking elastic part (360), and the fixed member (500) is fixed to the levitation member (400). Conversely, when positive pressure is supplied to the support path (140) and the levitation path (260), the lifting member (300) descends by overcoming the magnetic force of the permanent magnet (600) and the elastic force of the locking elastic part (360) through the air pressure acting on the levitation member (400). The fixed member (500) becomes free relative to the levitation member (400).

[0031] For effective operation of the gas pressure supplied through the support channel (140) and the levitation channel (260), a first sealing ring (710) is installed between the inner diameter of the lifting seat portion (250) of the rotating member (200) and the outer diameter of the lifting body (310) of the lifting member (300). The first sealing ring (710) is positioned between the levitation member (400) and the piston portion (350). The first sealing ring (710) is formed in the shape of an O-ring. The first sealing ring (710) is positioned at the opposite side of the fixed member (500) relative to the levitation member (400) and is fitted into the outer diameter of the lifting body (310) of the lifting member (300).

[0032] A second sealing ring (720) is installed between the outer diameter of the piston portion (350) and the inner diameter of the cylinder portion (240). The second sealing ring (720) is formed in the shape of an O-ring. The second sealing ring (720) seals the space between the outer diameter of the piston portion (350) and the inner diameter of the cylinder portion (240).

[0033] The first sealing ring (710) and the second sealing ring (720) prevent gas pressure supplied through the levitation path (260) from leaking. Additionally, the first sealing ring (710) seals the space between the rotating member (200) and the lifting member (300), thereby preventing the gas pressure supplied through the levitation path (260) from leaking to the opposite side of the fixed member (500) and assisting in the fixed member (500) to act effectively through the levitation member (400).

[0034] The third sealing ring (730) is positioned on the opposite side of the first sealing ring (710) with respect to the second sealing ring (720) and is installed between the inner diameter of the lifting seating portion (250) of the rotating member (200) and the outer diameter of the lifting body (310) of the lifting member (300). The third sealing ring (730) is also formed in the shape of an O-ring. The third sealing ring (730) serves to support the space between the inner diameter of the hollow passage (230) of the rotating member (200) and the outer diameter of the lifting body (310) of the lifting member (300) in a sealing manner, allowing for mutual lifting and sliding.

[0035] In this embodiment, an adsorption member (800) is coupled to the fixed member (500). The adsorption member (800) contacts the material to mimic the slope of the material and adsorbs the material. The adsorption member (800) is provided with an adsorption channel (810). The adsorption channel (810) is formed to communicate with the connecting channel (330) of the lifting member (300). In this embodiment, the connecting channel (330) of the lifting member (300) and the adsorption channel (810) of the adsorption member (800) are interconnected by a connecting member (900). The connecting member (900) is formed of a flexible elastic material. In this embodiment, a connecting member (900) formed in a bellows structure is used. Since the adsorption member (800) is angle-adjusted together with the fixed member (500) and rises and falls relative to the floating member (400), the connecting member (900) maintains the connection state between the connecting channel (330) and the adsorption channel (810) while accommodating the displacement and angle change between the lifting member (300) and the adsorption member (800).

[0036] Hereinafter, the operation of the rotational mimicry device according to the present embodiment configured as described above will be explained.

[0037] First, a rotational imitation device according to the present embodiment is positioned in a state as shown in FIGS. 1 and 2, and a material is positioned on the lower side of the rotational imitation device. At this time, due to the elastic force of the locking elastic part (360) and the magnetic force of the permanent magnet (600), the piston part (350) is raised relative to the cylinder part (240), and the fixed member (500) is in a state of being in close contact with the floating member (400). As shown in FIG. 4, the imitation curved surface (511) of the fixed member (500) is also in a state of being in close contact with the concave part (410) of the floating member (400).

[0038] In this state, gas pressure is supplied through the support channel (140) and the levitation channel (260). A portion of the gas pressure supplied through the levitation channel (260) is transmitted to the cylinder section (240) to lower the piston section (350). The gas pressure supplied through the levitation channel (260) and another portion of the pressure act on the imitation curved surface (511) of the fixed member (500) through the porous material levitation member (400). Due to the gas pressure transmitted through the levitation member (400), the fixed member (500) overcomes the magnetic force of the permanent magnet (600) and is separated from the levitation member (400). At this time, as the catch section (521) pushes the head section (311), the lifting member (300) also descends relative to the rotating member (200) together with the fixed member (500). The catch portion (521) of the second ring member (520) of the fixed member (500) is caught on the head portion (311) of the lifting member (300) so that the downward displacement exceeding a set range is limited, and the first ring member (510) is caught on the second ring member (520) so that the downward displacement is limited.

[0039] Referring to FIG. 5, as the fixed member (500) and the lifting member (300) descend, the suction member (800) comes into close contact with the upper surface of the material on the lower side, and the first ring member (510) of the fixed member (500) tilts in accordance with the slope of the upper surface of the material. With the catch portion (521) of the second ring member (520) caught on the head portion (311) of the lifting member (300), the first ring member (510) can move freely within the space range between the lifting member (400) and the second ring member (520).

[0040] At this time, as described above, since the concave portion (410) and the imitation curved surface (511) are formed with corresponding shapes, even when the first ring member (510) of the fixed member (500) descends only a small height relative to the floating member (400), it becomes possible for the first ring member (510) to tilt relative to the rotating member (200) within a predetermined angle range.

[0041] As described above, when the first ring member (510) of the fixed member (500) tilts in accordance with the inclination of the material, the pneumatic pressure supplied through the support channel (140) and the levitation channel (260) is stopped so that the first ring member (510) of the fixed member (500) rises. When the gas pressure supplied through the levitation channel (260) is stopped, the first ring member (510) is in a state where the inclination is mimicked and is in close contact with the concave portion (410) of the levitation member (400) by the magnetic force of the permanent magnet (600).

[0042] In addition, the locking elastic member (360) acting on the piston part (350) also raises the piston part (350), causing the first ring member (510) to come into close contact with the concave part (410). Due to the elastic force of the locking elastic member (360), the piston part (350) rises relative to the cylinder part (240), and the lifting member (300) also rises together due to the action of the piston part (350). When the lifting member (300) rises, the second ring member (520) also rises together, pressing the first ring member (510) against the levitation member (400) to fix it.

[0043] As described above, since the concave portion (410) and the imitation curved surface (511) are formed as corresponding curved surfaces, the first ring member (510) having the imitation curved surface (511) comes into close contact with the concave portion (410) in an inclined state, thereby stably supporting and maintaining the inclined state of the first ring member (510).

[0044] Meanwhile, as described above, since a connecting channel (330) is formed that penetrates vertically through the central part of the lifting member (300), various operations such as inspection, photography, and processing of the material on the lower side can be performed via the hollow channel (230) and the connecting channel (330). In particular, when it is necessary to perform operations such as inspection, photography, and processing on the part that supports the material itself, there is an advantage in that such operations can be performed through the hollow channel (230) and the connecting channel (330) while supporting the material in response to the inclined surface of the material as in the case of the present invention. Additionally, if necessary, operations such as processing or bonding of the material can be performed by irradiating light, such as a laser, through the connecting channel (330).

[0045] In the case of this embodiment, the operation of adsorbing the material is performed by transmitting negative pressure through the hollow channel (230) and the connecting channel (330). As described above, after fixing the material by adjusting the inclination of the fixed member (500) and the adsorption member (800) to mimic the inclination of the upper surface of the material, negative pressure is transmitted through the hollow channel (230), the connecting channel (330), and the adsorption channel (810) to adsorb the material. In this state, if the rotating mimic device according to this embodiment is transported by a separate transport device, the material can be transported in a state where the material is adsorbed. In addition, as shown in FIG. 1, if the rotating member (200) is rotated while the supporting member (100) is fixed using a device connected through a belt pulley structure, the direction of the material adsorbed on the adsorption member (800) can also be adjusted. As described above, since the connecting channel (330) and the adsorption channel (810) are connected by an elastic connecting member (900), the connection state between the connecting channel (330) and the adsorption channel (810) is maintained even if the inclination of the adsorption member (800) is adjusted.

[0046] After adjusting the position and direction of the material in this manner, releasing the negative pressure of the hollow channel (230) releases the adsorption of the material onto the adsorption member (800). In this way, the rotary imitation device according to the present embodiment can be used for pick and place while adjusting the position and direction of the material.

[0047] Meanwhile, as described above, since a part of the floating channel (260) is formed in the shape of a groove along the circumferential direction on the outer diameter of the rotating body (210), the connection between the supporting channel (140) and the floating channel (260) is maintained even when the angle is adjusted by the rotating member (200) rotating relative to the supporting member (100).

[0048] With the configuration described above, the rotational imitation device according to the present invention can adjust the inclination of the fixed member (500) to match the outer surface of the target material, while also making it possible to adjust the angle of the fixed member (500) without interference.

[0049] Although preferred examples of the present invention have been described above, the scope of the present invention is not limited to the forms described and illustrated above.

[0050] For example, although the permanent magnet (600) was previously described as being formed in a ring shape, it is also possible to use a permanent magnet that is not in a ring shape depending on the case. For example, it is possible to implement a rotational imitation device configured such that a plurality of permanent magnets are provided and arranged along the circumferential direction at the bottom of the levitation member.

[0051] Additionally, although a rotational imitation device with a structure including a piston part (350), a cylinder part (240), a locking elastic part (360), a levitation path (260), and a permanent magnet (600) was described as an example above, it is also possible to implement a rotational imitation device that does not include at least some of such a piston part (350), a cylinder part (240), a levitation path (260), a locking elastic part (360), and a permanent magnet (600) depending on the case. It is also possible to adjust the position of the fixed member (500) according to the inclination of the material by supplying positive or negative pressure through the support path (140) and the levitation path (260) depending on the situation.

[0052] In addition, with reference to FIGS. 1 to 5, the use of the device in which the lower material is contacted by the fixed member (500) to mimic the slope and adsorbed has been described, but in some cases, it is also possible to use the rotational mimic device of the present invention in an inverted state.

[0053] Additionally, although the case of raising the lifting member (300) by means of the structure of the piston part (350) and the cylinder part (240) was explained above as an example, it is also possible to implement the operation of raising the lifting member relative to the rotating member by using a mechanical configuration other than the piston part (350) and the cylinder part (240).

[0054] In addition, as explained above, the rotating member (200) may be made of a non-magnetic material, but it is also possible to use a rotating member or lifting member made of a magnetic material, taking into account the properties of the permanent magnet, the magnitude of the magnetic force, and the distance from surrounding components. Explanation of the symbols

[0055] 100: Support member 110: Support body 130: Rotating support 140: Support channel 200: Rotating member 210: Rotating body 230: Hollow Euro 240: Cylinder part 250: Promotion / Relegation Section 260: Injury Euro 300: Lifting member 310: Lifting body 311: Head section 330: Connecting Euro 350: Piston section 360: Locking elastic section 400: Injury Absence 410: Concave 500: Fixed member 510: First ring member 520: Second ring member 511: Mimic surface 521: Locking part 600: Permanent magnet 710: 1st Secret Ring 720: 2nd Secret Ring 730: Third sealing ring 800: Adsorption member 810: Adsorption channel 900: Connecting member

Claims

Claim 1 A support member comprising a support body, a rotational support portion formed in the shape of a circular cylinder to penetrate the support body vertically, and a support channel formed to extend to the inner diameter of the rotational support portion via the support body; a rotational member comprising a rotational body inserted into the rotational support portion of the support member and rotatably installed relative to the support member, a hollow channel formed to penetrate vertically through the center of the rotational body, a lifting seating portion formed by a cylindrical depression in the lower part of the rotational body to be connected to the lower end of the hollow channel, and a levitation channel formed in the rotational body to communicate with the support channel; a lifting member comprising a lifting body formed in the shape of a cylinder and a connecting channel formed to penetrate vertically through the center of the lifting body and communicate with the hollow channel, and installed by being inserted vertically into the lifting seating portion of the rotational member; and a ring formed having a concave portion formed by cutting out a part of a hemisphere, arranged to surround the outer diameter of the lifting member, and installed at the lower part of the rotational member to communicate with the levitation channel. A rotational mimicry device comprising: a floating member made of a porous material; and a fixing member formed in a ring shape and disposed to face a concave portion of the floating member, having a mimicry curved surface with a shape corresponding to the curved surface of the concave portion on the surface in contact with the concave portion of the floating member, and assembled coaxially with the lifting member so as to be fixed or free in close contact with the concave portion according to the lifting movement of the lifting member; wherein the lifting member further comprises a piston portion formed to protrude in a ring shape from the outer diameter of the lifting body, and the rotating member further comprises a cylinder portion formed to be recessed in a ring shape into the inner diameter of the lifting seating portion so as to receive the piston portion of the lifting member so as to be able to lift; and a portion of the floating passage is connected to the space between the upper surface of the piston portion and the cylinder portion. Claim 2 In claim 1, the rotary mimic device is formed such that the hollow channel and the connecting channel extend in a straight line in the vertical direction. Claim 3 The rotational mimicry device according to claim 1, further comprising a permanent magnet installed on the rotating member and positioned to face the fixed member with the floating member in between, wherein the fixed member is formed of a magnetic material. Claim 4 In paragraph 3, the rotational member is a rotational mimicry device formed of a non-magnetic material. Claim 5 In paragraph 3, the permanent magnet is a rotational mimic device formed in the shape of a ring. Claim 6 In paragraph 3, the above-mentioned permanent magnets are provided in plurality and arranged along the circumferential direction of the above-mentioned floating member in a rotational mimicry device. Claim 7 delete Claim 8 A rotational mimicking device according to claim 1, wherein the lifting member further comprises a locking elastic member installed between the lower surface of the piston part and the lower surface of the cylinder part to provide an elastic force in an upward direction to the piston part. Claim 9 A rotary mimic device according to claim 1, further comprising: a first sealing ring disposed between the lifting member and the piston part and installed between the outer diameter of the lifting body of the lifting member and the inner diameter of the lifting seating part of the rotating member; and a second sealing ring installed between the outer diameter of the piston part and the inner diameter of the cylinder part to seal the outer diameter of the piston part and the inner diameter of the cylinder part. Claim 10 A rotational imitation device according to claim 9, further comprising a third sealing ring positioned opposite to the first sealing ring with respect to the second sealing ring and installed between the inner diameter of the lifting seating portion of the rotational member and the outer diameter of the lifting body of the lifting member. Claim 11 A rotational mimicry device according to claim 1, wherein the lifting member further includes a head portion formed to protrude radially from the outer diameter of the lifting body, and the fixing member further includes a catch portion, wherein the catch portion catches on the head portion so that the fixing member is in close contact with or free from the lifting member depending on the movement of the lifting member. Claim 12 In claim 11, the fixed member comprises a first ring member and a second ring member formed in a ring shape, the imitation curved surface is formed on the first ring member, the catch portion is formed on the second ring member, and the first ring member is positioned between the second ring member and the levitating member so that when the lifting member rises, the catch portion catches on the head portion so that the second ring member can press the first ring member against the levitating member. Claim 13 A rotational mimicry device according to claim 11, wherein the head portion of the lifting member is formed in a conical shape with an outer diameter increasing toward the lower side, and the locking portion of the fixing member is formed in a curved surface corresponding to the outer diameter of the head portion to surround the head portion of the lifting member. Claim 14 A rotary mimic device further comprising, in any one of claims 1 to 6, an adsorption member coupled to the fixed member to adsorb a material by contacting the material, and having an adsorption channel formed to communicate with the connecting channel of the lifting member. Claim 15 In claim 14, the above-mentioned adsorption member is a rotary mimic device further comprising a connecting member formed of an elastic material that connects the connecting channel of the lifting member and the adsorption channel.

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