Curved laser beam irradiation device

Abstract

According to an embodiment of the present invention, a curved laser beam irradiation device may include: a light source configured to irradiate a spot beam in the form of a spot; a first optical member configured to transform the spot beam irradiated from the light source into a line beam in the form of a line; and a second optical member configured to transform the line beam irradiated from the first optical member into a curved beam in the form of a curved shape and irradiate it onto a target product.

Description

Technology Field

[0001] Embodiments of the present invention relate to a laser beam irradiation device, and more specifically, to a laser beam irradiation device capable of generating a curved laser beam and irradiating it onto a target object. Background Technology

[0003] Recently, demand for future vehicles, mobility, artificial intelligence, smart devices, and ICT convergence technologies has been surging. As the demand for such future technologies increases, the necessity and demand for related semiconductors and electronic components are also skyrocketing.

[0004] In the manufacturing process of semiconductors or electronic components, a process of processing or etching the surface of an object using a laser with a laser irradiation device can be performed.

[0005] Conventional laser irradiation devices have been provided in a manner that processes or etches the surface of an object by irradiating a spot-shaped laser or a line beam-shaped laser onto the surface of the item.

[0006] Laser irradiation devices that irradiate a spot-type laser had the problem of taking a long time to process the surface of large-area objects, and laser irradiation devices that irradiate a line-beam type laser had the problem of being difficult to process the surface of objects with complex or curved shapes. Prior art literature

[0008] Republic of Korea Published Patent Application No. 10-2008-0111679 (Published December 24, 2008) The problem to be solved

[0009] Conventional laser irradiation devices that irradiate a line beam type laser had the problem of being unable to secure uniform processing quality when processing parts with three-dimensional surfaces. In particular, line beam type laser irradiation devices had the problem of being unable to uniformly process the curved surfaces of three-dimensional parts, such as cylindrical parts, due to issues with laser focus or depth of focus.

[0010] The technical problem that the present invention aims to solve is to provide a curved laser beam irradiation device capable of performing a processing or etching process of a three-dimensional part by irradiating a curved laser beam.

[0011] The technical problem that the present invention aims to solve is to provide a curved laser beam irradiation device capable of uniformly processing the surface of a three-dimensional part, such as a cylindrical part.

[0012] Meanwhile, the technical problems to be solved by the present invention are not limited to those mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art to which the present invention belongs from the description below. means of solving the problem

[0014] According to an embodiment of the present invention, a curved laser beam irradiation device may include: a light source configured to irradiate a spot beam in the form of a spot; a first optical member configured to transform the spot beam irradiated from the light source into a line beam in the form of a line; and a second optical member configured to transform the line beam irradiated from the first optical member into a curved beam in the form of a curved shape and irradiate it onto a target product.

[0015] Additionally, each of the first optical member and the second optical member may include one of a Powell lens, a cylinder lens, or a lens assembly comprising a plurality of lenses.

[0016] Additionally, the first optical member may include a first surface facing the light source and a second surface facing the second optical member, wherein the first surface may include an aspherical surface and the second surface may include a flat surface.

[0017] Additionally, the second optical member includes a third surface facing the second surface and a fourth surface facing the target product, and each of the third surface and the fourth surface may include an aspherical surface.

[0018] In addition, the curved laser beam irradiation device may be provided in multiple units and arranged along the perimeter of the surface of the target product.

[0019] Additionally, the curved laser beam irradiation device may further include a third optical member configured to transform the curved beam irradiated from the second optical member into a wavy laser beam.

[0020] Additionally, the curved laser beam irradiation device may further include a blocking member configured to slide so as not to be located at least partially between the second optical member and the target product, or between the second optical member and the target product.

[0021] Additionally, when at least one part of the blocking member is positioned between the second optical member and the target product, it may be configured so that at least one part of the curved beam irradiated from the second optical member is cut.

[0022] Additionally, when at least one part of the blocking member is not located between the second optical member and the target product, it can be configured so that at least one part of the curved beam irradiated from the second optical member is not cut. Effects of the invention

[0024] A curved laser beam irradiation device according to embodiments of the present invention can perform a processing or etching process of a three-dimensional part by irradiating a curved laser beam.

[0025] A curved laser beam irradiation device according to embodiments of the present invention is configured to irradiate a curved laser beam capable of uniformly processing the surface of a three-dimensional component, thereby overcoming the limitations of the semiconductor or electronic component manufacturing process and, as it is possible to irradiate a part or the entire surface of the product, the process quality of the semiconductor or electronic component manufacturing process can be improved.

[0026] The effects according to the various embodiments of the present invention are not limited to those described above, and other unmentioned effects will be clearly understood by a person skilled in the art from the description below. Brief explanation of the drawing

[0028] FIG. 1 is a schematic diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention. FIG. 2 is a perspective view illustrating a curved laser beam irradiation device according to an embodiment of the present invention. FIG. 3 is a schematic diagram illustrating a curved laser beam according to an embodiment of the present invention. FIG. 4 is a schematic diagram illustrating a curved laser beam according to an embodiment of the present invention. FIG. 5 is a schematic diagram illustrating a plurality of curved laser beam irradiation devices according to an embodiment of the present invention. FIG. 6 is a schematic diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention. FIG. 7 is a schematic diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention. FIG. 8 is a conceptual diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention. FIG. 9 is a schematic diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention. FIG. 10 is a conceptual diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention. Specific details for implementing the invention

[0029] Hereinafter, exemplary embodiments according to the present invention will be described in detail with reference to the contents described in the attached drawings. However, the present invention is not limited or restricted by exemplary embodiments. Unless otherwise defined, all terms used in this specification (including technical and scientific terms) shall be used in a meaning that is commonly understood by those skilled in the art to which the present invention belongs, but this may vary depending on the intent of those skilled in the art, case law, the emergence of new technology, etc.

[0030] Throughout this specification, when a part is described as "comprising" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components.

[0031] Meanwhile, terms such as "first and / or second" used in this specification may be used to describe various components, but they are used solely for the purpose of distinguishing one component from another and are not intended to limit the scope to the components referred to by such terms. For example, without departing from the scope of the present invention, the first component may be named the second component, and the second component may also be named the first component.

[0032] Additionally, terms such as "...part," "...module," etc., as described in this specification refer to a unit that processes at least one function or operation, which may be implemented in hardware or software, or a combination of hardware and software. Furthermore, embodiments of this disclosure may be represented in this specification by functional block configurations and various processing steps. These functional blocks may be implemented by various numbers of hardware and / or software configurations that execute specific functions. For example, embodiments of this disclosure may employ direct circuit configurations such as a control unit, memory, processing, logic, look-up table, etc., which can execute various functions under the control of one or more microprocessors or other control devices.

[0033] Hereinafter, various embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In describing the embodiments, technical details that are well known in the art to which the present invention pertains and are not directly related to the present invention will be omitted. This is to ensure that the essence of the present invention is conveyed more clearly without obscuring it by omitting unnecessary explanations. For the same reason, some components in the accompanying drawings may be exaggerated, omitted, or schematically depicted. Furthermore, the size of each component does not entirely reflect its actual size. Throughout this specification, the same reference numerals may refer to the same or corresponding components.

[0034] The advantages and / or features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same components.

[0035] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings.

[0037] FIG. 1 is a schematic diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention.

[0038] FIG. 2 is a perspective view illustrating a curved laser beam irradiation device according to an embodiment of the present invention.

[0039] The embodiments of FIGS. 1 to 2 can be combined with the embodiments of FIGS. 3 to 10.

[0040] Referring to FIGS. 1 and 2, the curved laser beam irradiation device (100) of the present invention may include a light source (110), a first optical member (130), or a second optical member (150).

[0041] The light source (110) may be configured to irradiate a spot-shaped laser beam (L1) (hereinafter referred to as "spot beam"). For example, the light source (110) may be configured to irradiate the spot beam (L1) to a first optical member (130).

[0042] The light source (110) can be configured to irradiate a laser in the form of a pulse wave or a laser in the form of a continuous wave.

[0043] The light source (110) may include, for example, any one of a laser diode, a solid-state laser, an excimer laser, or a gas laser, but is not limited thereto, and may include various lasers capable of generating a spot beam (L1) in the form of a spot.

[0044] The first optical member (130) can transform a spot beam (L1) into a line-shaped laser beam (L2) (hereinafter referred to as "line beam (L2)"). For example, the first optical member (130) can form a continuous line-shaped line beam (L2) by focusing the spot beam (L1) in a specific direction.

[0045] The first optical member (130) may include an optical lens. For example, the first optical member (130) may include a Powell lens, a cylinder lens, or an aspheric lens. The first optical member (130) may include various lenses capable of transforming a spot beam (L1) into a line beam (L2), but is not limited thereto. According to an embodiment, the first optical member (130) may be composed of only one lens or may be composed of a lens array comprising a plurality of lenses. Additionally, the configuration of the first optical member (130) may be varied according to the shape of the target product (10).

[0046] The line beam (L3) formed by passing through the first optical member (130) can be irradiated to the second optical member (150).

[0047] The second optical member (150) can transform a line beam (L2) into a curved laser beam (L3) (hereinafter referred to as "curved beam (L3)"). For example, the second optical member (150) can transform a line beam (L2) passing through the second optical member (150) into a curved beam (L3) by means of the shape and refractive power of the second optical member (150).

[0048] The second optical member (150) may include an optical lens. For example, the second optical member (150) may include a Powell lens, a cylinder lens, or an aspheric lens. The second optical member (150) may include various lenses capable of transforming a line beam (L2) into a curved beam (L3), but is not limited thereto. According to an embodiment, the second optical member (150) may be composed of only one lens or may be composed of a lens array comprising a plurality of lenses. Additionally, the configuration of the second optical member (150) may be varied according to the shape of the target product (10).

[0049] A first optical member (130) may be positioned between a light source (110) and a second optical member (150). A spot beam (L1) irradiated from the light source (110) passes through the first optical member (130) and is deformed into a line beam (L2), and the line beam (L2) deformed in the first optical member (130) passes through the second optical member (150) and is deformed into a curved beam (L3). The curved beam (L3) deformed in the second optical member (150) may be irradiated onto the surface of a target product (10).

[0050] Referring to FIG. 2, a target product (10) having a cylindrical shape (e.g., a semiconductor or an electrical component) is illustrated. Although the cross-section of the target product (10) is configured in a circular shape, a curved beam (L3) is provided in a semicircular shape and can be irradiated onto the surface of the target product (10). Accordingly, as the curved beam (L3) is irradiated in a shape corresponding to the surface of the target product (10) having a non-flat portion, the process quality can be improved when processing or etching the target product (10). However, the shape of the target product (10) is not limited thereto and can have various shapes.

[0051] According to the illustrated embodiment, the curved laser beam irradiation device (100) is illustrated such that the components are provided in separate spaces, but is not limited thereto, and the components may be accommodated together within a single structure.

[0052] Meanwhile, in the curved laser beam irradiation device (100), the series of processes from a spot-shaped laser beam to a curved-shaped laser beam can be defined as a beam shaping process.

[0053] For convenience of explanation, the direction from the light source (110) to the target product (10) can be defined and / or interpreted as the forward direction (+P direction), and the opposite direction can be defined and / or interpreted as the reverse direction (-P direction).

[0055] FIG. 3 is a schematic diagram illustrating a curved laser beam according to an embodiment of the present invention.

[0056] The embodiment of FIG. 3 can be combined with the embodiments of FIG. 1 to 2, or the embodiments of FIG. 4 to 10.

[0057] Referring to FIG. 3, it is shown that a spot beam (L1) irradiated from a light source (110) passes through a first optical member (130) to form a line beam (L2).

[0058] The first optical member (130) may include a first surface (131) facing the light source (110) or a second surface (133) facing the second optical member (150). For example, the first surface (131) may be a surface facing the reverse direction (-P direction) among the first optical member (131), and the second surface (133) may be a surface facing the forward direction (+P direction) among the first optical member (131).

[0059] The first surface (131) of the first optical member (131) may include an aspheric surface. The second surface (133) of the first optical member (131) may include a flat surface. However, the shape of the first optical member (131) is not limited thereto, and both sides of the first optical member (131) may be formed as aspheric surfaces. The first optical member (131) may form a spot beam (L1) into a line beam (L2) by utilizing the light refraction phenomenon of the first optical member (131).

[0060] The second optical member (150) may include a third surface (151) facing the first optical member (130) or a fourth surface (153) facing the target product (10). For example, the third surface (151) may be a surface facing the reverse direction (e.g., -P direction) within the second optical member (150), and the fourth surface (153) may be a surface facing the forward direction (e.g., +P direction) within the second optical member (150).

[0061] The third surface (151) and the fourth surface (153) of the second optical member (150) may include an aspherical surface. However, the shape of the second optical member (150) is not limited thereto, and any one surface of the second optical member (150) may be formed as a flat surface.

[0062] The third surface (151) of the second optical member (150) may face the second surface (133) of the first optical member (130). The fourth surface (153) of the second optical member (150) may face the target product (10).

[0064] FIG. 4 is a schematic diagram illustrating a curved laser beam according to an embodiment of the present invention.

[0065] The embodiment of FIG. 4 can be combined with the embodiments of FIG. 1 to 3, or the embodiments of FIG. 5 to 10.

[0066] Referring to FIG. 4, a state is illustrated in which a line beam (L2) passes through a second optical member (150) and is deformed into a curved beam (L3).

[0067] The second optical member (150) may include, as an example, an aspherical lens, but is not limited thereto. A line beam (L2) incident on the second optical member (150) may be transformed into a curved beam (L3) due to the curved shape and refraction effect of the second optical member (150). For example, depending on the change in curvature of the curved surface of the second optical member (150), the line beam (L2) passing through the second optical member (150) may be concentrated or dispersed and transformed into a curved beam (L3). For example, the second optical member (150) may implement the curved beam (L3) by varying the propagation speed of the line beam (L2) in different regions.

[0068] Referring to FIG. 4, it is shown that the focus of the laser beam generated from the second optical member (150) is formed to have a step, thereby forming a curved beam (L3).

[0069] FIG. 5 is a schematic diagram illustrating a plurality of curved laser beam irradiation devices according to an embodiment of the present invention.

[0070] Referring to FIG. 5, a plurality of curved laser beam irradiation devices (100A, 100B, 100C) (e.g., the curved laser beam irradiation device (100) of FIG. 1 to 3) are shown. For example, the curved laser beam irradiation devices may be provided in a plurality.

[0071] Multiple curved laser beam irradiation devices (100A, 100B, 100C) may be arranged around a cylindrical target product (10). For example, multiple curved laser beam irradiation devices (100A, 100B, 100C) may be spaced apart at specified intervals and arranged along the perimeter of the target product (10). Multiple curved beams (L31, L32, L33) formed by the multiple curved laser beam irradiation devices (100A, 100B, 100C) may be irradiated onto the surface of the target product (10). Accordingly, by simultaneously irradiating all surfaces of the circular cross-section of the target product (10) in a single process, there is an advantage in that the processing efficiency of the target product (10) is improved.

[0072] FIG. 6 is a schematic diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention.

[0073] The embodiment of FIG. 6 can be combined with the embodiments of FIG. 1 to 5, or the embodiments of FIG. 7 to 10.

[0074] Referring to FIG. 6, a curved laser beam irradiation device (100) is shown. For example, the curved laser beam irradiation device (100) may be provided as a single unit.

[0075] The target product (10) can be rotated along the axial direction (R1) of the target product (10) by an external mechanism. In this case, since the target product (10) rotates relative to the curved beam (L3) provided by the curved laser beam irradiation device (100), all surfaces of the circular cross-section of the target product (10) can be irradiated through a single curved laser beam irradiation device (100).

[0077] FIG. 7 is a schematic diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention.

[0078] FIG. 8 is a conceptual diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention.

[0079] The embodiments of FIGS. 7 to 8 can be combined with the embodiments of FIGS. 1 to 6 or the embodiments of FIGS. 9 to 10.

[0080] Referring to FIGS. 7 and 8, the curved laser beam irradiation device (100) may further include a third optical member (170).

[0081] The curved beam (L3) passing through the second optical member (150) can be irradiated to the third optical member (170).

[0082] The third optical member (170) can transform a curved beam (L3) into a wavy laser beam (L4). For example, the third optical member (170) can transform a curved beam (L3) passing through the third optical member (170) into a wavy or zigzag laser beam (L4) by means of the shape and refractive power of the third optical member (170).

[0083] The wavy laser beam (L4) may include at least a partial curve and thus may be defined as a curved beam. The shape of the wavy laser beam (L4) may be defined as a wavy shape or a wave shape that is repeatedly wavy with a specified period.

[0084] The third optical member (170) may include an optical lens. For example, the third optical member (170) may include a Powell lens, a cylinder lens, or an aspheric lens. The third optical member (170) may include various lenses capable of transforming a curved beam (L3) into a wavy laser beam (L4), but is not limited thereto. According to an embodiment, the third optical member (170) may be composed of only one lens or may be composed of a lens array comprising multiple lenses. Additionally, the configuration of the third optical member (170) may vary depending on the shape of the target product (10).

[0086] FIG. 9 is a schematic diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention.

[0087] FIG. 10 is a conceptual diagram illustrating a curved laser beam irradiation device according to an embodiment of the present invention.

[0088] The embodiments of FIGS. 9 to 10 can be combined with the embodiments of FIGS. 1 to 8.

[0089] Referring to FIGS. 9 and 10, the curved laser beam irradiation device (100) may further include a blocking member (190).

[0090] The blocking member (190) may be slid to be positioned at least partially between the second optical member (150) and the target product (10), or may be slid not to be positioned between the second optical member (150) and the target product (10). For example, the blocking member (190) may be configured to slide in a direction other than the forward direction (+P) and the direction of propagation of the laser beams (L1, L2, L3) (S direction).

[0091] The curved laser beam irradiation device (100) may include a separate mechanism (e.g., a structure such as a rack and motor or a hydraulic cylinder, etc.) for sliding the blocking member (190).

[0092] The blocking member (190) can control the shape of the curved beam (L5) reaching the target product (10) by absorbing or blocking at least a portion of the curved beam (L3). For example, when it is necessary to use only a portion of the curved beam (L3) generated by passing through the first optical member (130) and the second optical member (150), the blocking member (190) can be slid to irradiate the curved beam (L5), with a portion cut off, onto the target product (10).

[0093] For example, when at least a portion of the blocking member (190) is positioned between the second optical member (150) and the target product (10), at least a portion of the curved beam (L3) irradiated from the second optical member (150) may be cut to form a curved beam (L5). Conversely, when at least a portion of the blocking member (190) is not positioned between the second optical member (150) and the target product (10), at least a portion of the curved beam (L3) irradiated from the second optical member (150) may be configured not to be cut.

[0094] The blocking member (190) may include an absorbent material such as graphite or a special plastic, but is not limited thereto, and may include various materials capable of blocking a portion of the curved beam.

[0096] Although specific embodiments according to the present invention have been described so far, it is understood that various modifications are possible within the scope of the present invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the claims set forth below as well as their equivalents. As described above, although the present invention has been explained by limited embodiments and drawings, the present invention is not limited to the above embodiments, and various modifications and variations are possible from this description by those skilled in the art to which the present invention belongs. Accordingly, the concept of the present invention should be understood only by the claims set forth below, and all equivalent or analogous variations thereof shall be considered to fall within the scope of the concept of the present invention. Explanation of the symbols

[0098] 100: Curved laser beam irradiation device 110: Light source 130: First optical element 150: Second optical component 170: Third optical component 190: Blocking element

Claims

Claim 1 A curved laser beam irradiation device comprising: a light source configured to irradiate a spot beam in the shape of a spot; a first optical member configured to transform the spot beam irradiated from the light source into a line beam in the shape of a line; and a second optical member configured to transform the line beam irradiated from the first optical member into a curved beam in the shape of a curve and irradiate it onto a target product, wherein the first optical member comprises a first surface facing the light source and a second surface facing the second optical member, wherein the first surface comprises an aspherical surface and the second surface comprises a flat surface, wherein the second optical member comprises a third surface facing the second surface and a fourth surface facing the target product, wherein each of the third surface and the fourth surface comprises an aspherical surface. Claim 2 A curved laser beam irradiation device according to claim 1, wherein each of the first optical member and the second optical member comprises one of a Powell lens, a cylinder lens, or a lens assembly comprising a plurality of lenses. Claim 3 delete Claim 4 In claim 1, the curved laser beam irradiation device is provided in a plurality of units and is a curved laser beam irradiation device arranged along the perimeter of the surface of the target product. Claim 5 A curved laser beam irradiation device according to claim 1, further comprising a third optical member configured to transform the curved beam irradiated from the second optical member into a wavy laser beam. Claim 6 A curved laser beam irradiation device according to claim 1, further comprising a blocking member configured to slide movably so as not to be located at least partially between the second optical member and the target product, or between the second optical member and the target product. Claim 7 A curved laser beam irradiation device according to claim 6, configured such that when at least one part of the blocking member is positioned between the second optical member and the target product, at least one part of the curved beam irradiated from the second optical member is cut. Claim 8 A curved laser beam irradiation device according to claim 7, configured such that at least one part of the curved beam irradiated from the second optical member is not cut when at least one part of the blocking member is not located between the second optical member and the target product.

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