Deposition equipment system with improved work efficiency and deposition method using the same

Abstract

The present invention relates to a deposition equipment system with improved work efficiency and a deposition method using the same. More specifically, the invention relates to a deposition equipment system with improved work efficiency and a deposition method using the same, wherein a target material is attached as a thin film to the surface of a deposition target using a deposition machine, and multiple processes required for deposition are carried out in a cycle form through a rotation module, thereby enabling continuous operation, which increases economic efficiency and enables multi-variety, small-batch production.

Description

Technology Field

[0001] The present invention relates to a deposition equipment system with improved work efficiency and a deposition method using the same. More specifically, the invention relates to a deposition equipment system with improved work efficiency and a deposition method using the same, wherein a target material is attached as a thin film to the surface of a deposition target using a deposition machine, and multiple processes required for deposition are carried out in a cycle form through a rotation module, thereby enabling continuous operation, which increases economic efficiency and enables multi-variety, small-batch production. Background Technology

[0002] Deposition is the process of attaching a substance to the surface of an object in the form of a thin film, and a method is used in which a compound of the substance to be deposited is heated and evaporated in a vacuum.

[0003] Such deposition is utilized not only in ultra-precision industries such as semiconductors but also in relatively simple devices, such as reflectors for automobile headlights.

[0004] Among these, the headlight reflector is a device that reflects light generated from the vehicle's lighting device to increase the brightness and output of the lighting device.

[0005] The above-mentioned reflector for a headlight is manufactured in various shapes and sizes depending on the structure or form of the vehicle's headlight, and brightness and output are increased by attaching a target material, such as aluminum, to the surface through the aforementioned deposition method.

[0006] The conventional process for manufacturing reflectors for headlights involves mounting multiple reflectors onto a fixing jig, removing moisture remaining on the surface during the manufacturing process, and then feeding the moisture-removed reflectors into a deposition machine to deposit a target material.

[0007] This conventional deposition process had a problem of low work efficiency because the drying and deposition processes using a drying chamber and a deposition machine could not be carried out continuously, resulting in a long time required from the start to the completion of a single deposition process.

[0008] Figure 6 schematically illustrates a deposition system for a reflector for a headlight. Since the space for mounting and detaching the product is mixed, continuous mounting and detaching of the product is impossible, resulting in low work efficiency. Additionally, there are only two types of products that can be produced, and since a jig must be replaced to change them, the deposition process cannot be carried out during the time required to replace the jig. Furthermore, in the case of a two-door system, condensation occurs because the temperature of the other door drops while the deposition work is being carried out with one door open. Additionally, there is a problem with inconsistent productivity because it relies on manual labor by the operator. Prior art literature

[0009] Republic of Korea Registered Patent No. 10-1233086 (Registered on Feb. 7, 2013) The problem to be solved

[0010] The present invention is proposed to solve the above problems and aims to provide a deposition equipment system with improved work efficiency that can increase productivity by automating most of the deposition process and enabling drying and deposition to be performed continuously, and a deposition method using the same.

[0012] In addition, the present invention aims to provide a deposition equipment system and a deposition method using the same that improve work efficiency and increase productivity by enabling continuous deposition operations, by rotating a main body in which a workspace is provided so that the loading point and unloading point of a fixing jig, the entrance and exit of a drying chamber and a deposition machine, and the workspace in which the fixing jig is housed are connected through a rotation module that rotates at a predetermined angle, thereby allowing a deposition process through a deposition machine to be carried out simultaneously while one of the fixing jigs is in the drying process.

[0014] In addition, the present invention aims to provide a deposition equipment system that improves work efficiency enabling multi-variety, small-batch production by improving the structure of a fixing jig, and a deposition method using the same. means of solving the problem

[0015] To achieve the above objective, the deposition equipment system according to the present invention is a deposition equipment system in which a plurality of deposition targets are mounted on a fixing jig, and the fixing jig sequentially passes through a drying chamber and a deposition machine to perform a deposition process on the deposition targets.

[0016] A main body comprising a plurality of workspaces, each partitioned independently of the others and housing the fixing jig;

[0017] Multiple doors provided in each of the multiple above-mentioned workspaces to open and close each workspace;

[0018] It includes a rotation module provided at the lower part of the main body to rotate the main body; and

[0019] The above rotation module is,

[0020] The plurality of workspaces provided in the main body are characterized by rotating to stop at a position communicating with the entrance / exit of the drying chamber and the deposition machine, and at a loading point or unloading point of the fixing jig.

[0022] In addition, the rotation module is characterized by comprising a turntable formed in the shape of a flat plate on which the main body is seated on the upper surface, a rotary drive unit disposed on one side of the turntable and rotating the turntable while operating by applied power and a signal, and a movable rail provided on the upper surface of the turntable to move the fixing jig in and out of the working space of the main body.

[0024] At this time, the fixing jig comprises a base plate installed to be movable along the movable rail and a plate-shaped jig installed on the upper surface of the base plate for mounting the deposition target, wherein the plate-shaped jig is formed in the shape of a plate extending vertically and has a plurality of mounting holes formed at mutually spaced positions for mounting the deposition target, and is mutually detachably coupled with an adjacent plate-shaped jig so that when the deposition target is changed, the deposition target can be changed by coupling the plate-shaped jig having the mounting holes for mounting the changed deposition target to the base plate and the adjacent plate-shaped jig.

[0026] Furthermore, the door is characterized by being further equipped with a temperature control means for controlling the temperature of the door while operating by an applied power source and signal.

[0028] And a deposition method using a deposition equipment system according to the present invention comprises: a preparation step of mounting a deposition target on a fixing jig; an insertion step of inserting the fixing jig on which the deposition target is mounted into a workspace arranged to communicate with a loading point among a plurality of workspaces provided in a main body; a drying preparation step of operating a rotation module on which the main body is seated to rotate the workspace into which the fixing jig is inserted so as to align with the entrance of a drying chamber; a drying step of drying the deposition target by operating the drying chamber after inserting the fixing jig into the drying chamber; a drying completion step of returning the fixed jig, which has completed drying, to the workspace of the main body from which it was withdrawn; a deposition preparation step of operating the rotation module to rotate the workspace into which the fixed jig, which has completed drying, is inserted so as to align with the entrance of a deposition machine; and a deposition step of carrying out a deposition process on the deposition target by operating the deposition machine after inserting the fixing jig into the deposition machine through the entrance of the deposition machine. The method is characterized by including: a deposition completion step of returning a fixed jig on which a deposition target object is mounted after deposition to the workspace of the main body from which it was withdrawn; an ejection preparation step of operating the rotation module to rotate the fixed jig after deposition so that it is positioned at the unloading point; and an ejection step of receiving the fixed jig after deposition from the workspace connected to the unloading point and moving it for the next process. Effects of the invention

[0029] The present invention, as described above, enables the continuous input, drying, deposition, and discharge of a deposition target, thereby increasing productivity within the same timeframe compared to conventional deposition systems. This reduces the time required for manufacturing and, consequently, lowers manufacturing costs, resulting in improved economic efficiency.

[0031] In addition, the present invention has the advantage of reducing labor costs by providing high production quality with relatively fewer personnel compared to conventional deposition systems.

[0033] In addition, it offers the advantage of providing higher productivity in the same area compared to conventional methods, reducing process time by performing vacuum and drying processes for the next deposition target while the current deposition target is being deposited, and preventing contamination inside the deposition machine by the base coating paint of the deposition target by conducting deposition and drying in separate spaces. Brief explanation of the drawing

[0034] FIG. 1 is an exemplary diagram illustrating a deposition equipment system with improved work efficiency according to the present invention. FIG. 2 is an exemplary diagram illustrating a rotation module configured in the present invention. FIG. 3 is an illustrative diagram showing an embodiment of a fixing jig constituting the present invention. FIG. 4 is an exemplary diagram illustrating the state in which a deposition equipment system with improved work efficiency according to the present invention is installed. FIG. 5 is an exemplary diagram illustrating a deposition method using a deposition equipment system that improves work efficiency according to the present invention. FIG. 6 is an example diagram illustrating a conventional deposition equipment system. Specific details for implementing the invention

[0035] Hereinafter, preferred embodiments of a deposition equipment system with improved work efficiency according to the present invention and a deposition method using the same will be examined in detail with reference to the attached drawings.

[0037] First, the deposition equipment system (1) with improved work efficiency according to the present invention comprises a deposition equipment system in which a plurality of deposition targets are mounted on a fixing jig (60) and the fixing jig (60) sequentially passes through a drying chamber (10) and a deposition machine (20) to carry out a deposition process on the deposition targets, and comprises a main body (30) including a plurality of workspaces (31) each which are independently partitioned and in which the fixing jig is housed, a plurality of doors (40) each provided in the plurality of workspaces (31) to open and close each workspace (31), and a rotation module (50) provided at the bottom of the main body (30) to rotate the main body (30).

[0039] Here, the drying chamber (10) and the deposition device (20) are devices used in a deposition process. The drying chamber (10) is a device for removing moisture remaining on the surface of a deposition target after cleaning, and the deposition device (20) is a device for depositing a target material on the surface of a deposition target. Since the configuration and operational relationship of the drying chamber (10) and the deposition device (20) are well known, a detailed description and illustration will be omitted.

[0040] However, in the present invention, the drying chamber (10) is further equipped with a temperature control means (11) for controlling the temperature of the drying chamber (10) by operating on an applied power source and signal in order to prevent condensation from forming inside the drying chamber by changing the temperature inside the drying chamber according to the temperature of the incoming fixing jig (60) or external air, and to prevent deformation of the deposition target object by rapidly lowering the drying temperature of the deposition target object.

[0041] Here, the temperature control means (11) may be composed of either a heater or an ultraviolet lamp (IR Lamp) that operates by an applied power source and signal, and if it is composed of an ultraviolet lamp, it is preferable to be composed of an ultraviolet lamp so that it can additionally provide a sterilization effect inside the drying chamber, but it is not limited thereto.

[0043] The main body (30) is configured with a plurality of workspaces (31) that are independently partitioned from one another, and is formed in the shape of a hollow enclosure, with a plurality of partition plates arranged to partition the workspaces.

[0044] The shape and size of the main body (30) can be changed according to the type and size of the deposition target and the shape and number of fixing jigs for mounting the deposition target, and is not limited to the embodiments shown in the drawings.

[0045] In addition, a plurality of workspaces (31) formed in the main body (30) are each spaces in which a fixing jig (60) on which a deposition target is mounted enters and exits and is stored, and a plurality of these are formed in a mutually independent manner within a single main body (30). For example, four workspaces (31) are formed radially in a single main body (30), and when the main body (30) is rotated by the rotation module (50) described later, each workspace (31) is arranged to communicate with the loading point (70) of the fixing jig, the entrance / exit of the drying chamber (10), the entrance / exit of the deposition machine (20), and the unloading point (80) of the fixing jig in sequence, so that the loading and unloading of the fixing jig are performed sequentially. A detailed explanation of this will be provided later.

[0046] Meanwhile, the main body (30) is further provided with an opening / closing means (32) for opening / closing the workspace (31) by rotating the door (40) described later, and a door stopper (33) for limiting the opening angle of the door (40).

[0047] The above-mentioned opening and closing means (32) is provided in a number corresponding to the number of doors (40) so as to be able to independently open or close a plurality of doors (40). As an example of each opening and closing means (32), it may be composed of a cylinder including a body and a rod that moves in and out of the body, and one end of the cylinder may be coupled to one side of the door (40) to open or close the door (40) by pushing or pulling it, but this is one embodiment and is not limited thereto.

[0048] The above door stopper (33) controls the opening angle of the door and is provided on the outside of the main body (30) to prevent the door (40) from opening beyond a certain angle, thereby preventing safety accidents.

[0049] For example, when one side of the door (40) is connected to the main body (30) in a rotatable manner, the rotation angle of the door (40) is limited by the door stopper (33) so that if the door (40) rotates beyond a certain angle, it prevents damage to the device or injury to the worker by colliding with a surrounding device or worker.

[0051] A plurality of the above doors (40) are each placed in the plurality of workspaces (31) to open or close them, and are rotatably installed on the main body (30) to open and close each workspace (31).

[0052] These doors (40) seal the workspace (31) to minimize the entry of external foreign matter into the workspace (31) and prevent the fixing jig (60) placed in the workspace (31) from moving out of the workspace (31) during the process in which the main body (30) is rotated by the rotation module (50).

[0054] The rotation module (50) is for rotating the main body (30) at a predetermined angle, and rotates the main body (30) so that a plurality of workspaces (31) provided in the main body (30) stop at a position that communicates with the entrance / exit of the drying chamber (10) and the deposition machine (20), and at the loading point (70) or unloading point (80) of the fixing jig.

[0055] Here, the respective positions of the loading point (70), the unloading point (80), the drying chamber (10), and the deposition machine (20) are positioned at a 90° angle apart as shown in the drawing, and the rotation module (50) rotates to stop every 90° so that each process proceeds.

[0056] The rotation module (50) for this purpose is formed in the shape of a flat plate and includes a turntable (51) on which the main body (30) is seated on the upper surface, a rotation drive unit (52) disposed on one side of the turntable and rotating the turntable (51) while operating by an applied power and signal, and a moving rail (53) provided on the upper surface of the turntable (51) for moving the fixing jig (60) into and out of the workspace (31) of the main body (30).

[0058] The above turntable (51) is formed in the shape of a flat disc and has the above main body (30) attached to its upper surface, and rotates the above main body (30) by rotating it through the operation of the above rotational drive unit (52).

[0059] This turntable (51) can be shaped according to the size of the main body (30) and is made of a metal material having a certain strength to support the load pressure transmitted from above.

[0060] The rotary drive unit (52) is positioned on one side of the turntable (51) and rotates the turntable (51) by operating in response to applied power and signals. It comprises a motor, a power transmission means connecting the motor and the turntable, and a reduction gear. Here, the power transmission means may be composed of a gear, a chain, or a belt, and the reduction gear may be configured according to the type of the power transmission means.

[0061] The above moving rail (53) is provided on the upper surface of the turntable (51) so that the fixing jig (60) is movably positioned and is provided to communicate with the workspace (31) of the main body (30).

[0062] Here, the moving rail (53) is extended in the longitudinal direction and arranged so that a pair of them are spaced apart from each other on the upper surface of the turntable (51) to form a set, and is arranged to correspond to the position and number of the workspace (31).

[0064] Meanwhile, the above-mentioned fixing jig (60) is configured to allow a plurality of deposition targets to be mounted at regular intervals, and the deposition process of the deposition targets proceeds sequentially through a drying chamber and a deposition machine. The above-mentioned fixing jig (60) includes a base plate (61) installed to be movable along the movable rail (53), and a plate-shaped jig (62) installed on the upper surface of the base plate (61) to mount the deposition targets. The plate-shaped jig (62) is formed in the shape of a plate extending vertically and has a plurality of mounting holes (63) for mounting the deposition targets formed at mutually spaced positions. It is coupled to an adjacent plate-shaped jig (62) so as to be mutually separable. When the deposition targets are changed, the deposition targets can be changed by coupling the plate-shaped jig (62) having the mounting holes (63) for mounting the changed deposition targets to the base plate (61) and the adjacent plate-shaped jig (62).

[0066] The base plate (61) is formed in the shape of a flat plate and is provided with a movable caster (not shown) at the bottom so as to be movable along the moving rail (53) of the rotation module (50) described later, and a plurality of plate-shaped jigs (62) are detachably coupled to the upper surface.

[0067] These base plates (61) can be changed according to the shape and size of the workspace (31) of the main body (30), and the circular shape shown in the drawing is one embodiment, and various variations are possible.

[0068] Additionally, a pair of base plates (61) are arranged symmetrically in positions spaced apart in the vertical direction, and a plurality of plate-shaped jigs (62) are detachably connected between them.

[0069] The above plate-shaped jig (62) is formed in the shape of a plate extending in the longitudinal direction and has a plurality of mounting holes (63) formed at regular intervals for mounting objects to be deposited, and is detachably coupled to the base plate (61) and mutually detachably coupled to another plate-shaped jig (62) that is arranged adjacently.

[0070] To this end, the plate-shaped jig (62) is extended in the longitudinal direction and includes a body (621) having the mounting hole (63) formed therein, a first coupling part (64) that is detachably coupled to the base plate (61), and a second coupling part (65) that is detachably coupled to another plate-shaped jig (62) that is positioned adjacent to the first coupling part (64).

[0071] The first coupling part (64) is composed of a slit (641) formed in the base plate (61) and a protrusion (642) provided at one end of the plate-shaped jig (62) and fitted into the slit (641). Here, multiple slits (641) are formed at mutually spaced positions to fit multiple plate-shaped jigs (62), and one or more magnetic bodies (643) may be arranged in each slit (641) to fix the fitted protrusion (642) by magnetic force.

[0072] That is, the plate-shaped jig (62) is made of a metal material having a predetermined strength to support the load of the deposition target mounted in the mounting hole (63), and a magnetic material (643) is placed in the slit (641) to improve the fixing force of the plate-shaped jig (62) that is fitted together.

[0073] And the above protrusion (642) is formed to protrude outward from one end of the plate-shaped jig (62) and is formed to correspond to the shape and length of the slit (641).

[0074] The second coupling part (65) is for separably coupling adjacent plate-shaped jigs (62) and is positioned on the side of the plate-shaped jig (62), and multiple such parts may be positioned at mutually spaced positions along the vertical length of the plate-shaped jig (62).

[0075] This second connecting part (65) is formed in the shape of a rod with magnetic force, and is positioned so that one end is exposed to the outside, and is connected to another plate-shaped jig (62) that is adjacently positioned by magnetic force so that they can be separated from each other.

[0076] The plate-shaped jig (62) formed as described above can accommodate a changed deposition target by attaching a plate-shaped jig (62) with a mounting hole corresponding to the deposition target to a base plate (61) when the deposition target is changed, and can place a plate-shaped jig (62) with various types of deposition targets mounted on a single base plate (61), thereby having the advantage of enabling multi-variety, small-batch production.

[0077] In addition, the connection and separation between the base plate (61) and the plate-shaped jig (62) can be easily reduced, thereby reducing the time required to replace the plate-shaped jig (62). This has the advantage of reducing replacement time compared to the conventional method of replacing the entire fixing jig when the deposition target is replaced.

[0079] Next, looking at the deposition method (S1) using the deposition equipment system described above, the method comprises: a preparation step (S10) of mounting a deposition target on a fixing jig; an insertion step (S20) of inserting the fixing jig on which the deposition target is mounted into a workspace arranged to communicate with a loading point among a plurality of workspaces provided in the main body; a drying preparation step (S30) of operating a rotation module on which the main body is seated to rotate the workspace into which the fixing jig is inserted so as to align with the entrance / exit of a drying chamber; a drying step (S40) of operating the drying chamber to dry the deposition target after inserting the fixing jig into the drying chamber; a drying completion step (S50) of returning the fixed jig, from which drying is completed, to the workspace of the main body from which it was withdrawn; a deposition preparation step (S60) of operating the rotation module to rotate the workspace into which the fixed jig, from which drying is completed, so as to align with the entrance / exit of the deposition machine; and after inserting the fixing jig into the deposition machine through the entrance / exit of the deposition machine It includes a deposition step (S70) in which a deposition process is carried out on a deposition target by operating a deposition machine, a deposition completion step (S80) in which a fixing jig on which the deposition target is mounted is returned to the workspace of the main body from which it was withdrawn, an ejection preparation step (S90) in which the fixing jig on which the deposition is completed is rotated to be positioned at an unloading point by operating the rotation module, and an ejection step (S100) in which the fixing jig on which the deposition is completed is received from a workspace connected to the unloading point and moved for the next process.

[0081] The above preparation step (S10) is a step of preparing a fixing jig by mounting a deposition target on a plate-shaped jig having a mounting hole formed therein corresponding to the deposition target. In this process, when the deposition target is changed or different deposition targets are to be deposited, the fixing jig is prepared by fitting and securing a plate-shaped jig having a mounting hole formed therein corresponding to the deposition target to a base plate, and by mutually connecting adjacent plate-shaped jigs through a second connecting part.

[0083] The next insertion step (S20) is a step of inserting a fixing jig on which a deposition target is mounted into one of a plurality of workspaces provided in the main body, wherein the workspace into which the fixing jig is inserted is a workspace arranged to communicate with the loading point, and as the main body rotates by the rotation module described above, the plurality of workspaces are sequentially arranged to communicate with the loading point, and the deposition operation is continuously performed by inserting the fixing jig into the workspace positioned to communicate with the loading point.

[0085] The next drying preparation step (S30) is a step of operating a rotation module on which the main body is seated to rotate the workspace into which the fixing jig is inserted so as to align with the entrance of the drying chamber, wherein the rotation module is set to rotate at a predetermined angle at regular intervals so that the deposition operation is performed continuously.

[0087] The next drying step (S40) is a step of drying the deposition target by operating the drying chamber after inserting the fixing jig on which the deposition target is mounted into the drying chamber through the entrance of the drying chamber.

[0088] In this stage, operating conditions such as the operating temperature and operating time of the drying chamber are changed according to the type of deposition target, and there are no specific restrictions on the operating conditions of the drying chamber.

[0090] The next drying completion step (S50) involves returning the fixing jig, on which the deposition target that has been dried through the drying chamber is mounted, to the workspace of the main body. In the entire process including this step, when the fixing jig moves, a caster provided on the base plate constituting the fixing jig is installed to move on a rail formed in the station module to guide the direction of movement. At this time, the caster and the rail are configured to operate electronically by an authorized signal and power source, such as an LM guide, so that they can be operated by a worker through a control device such as a remote controller, or automatically performed when certain conditions are satisfied, such as a certain amount of time, the opening of a door, or the opening of the entrance / exit of the drying chamber.

[0092] The next deposition preparation step (S60) is a step of operating the station module so that the workspace into which the fixing jig on which the drying target for deposition is mounted communicates with the entrance of the deposition machine.

[0094] The next deposition step (S70) is a step in which a fixing jig is inserted into the deposition machine through the inlet / outlet of the deposition machine, and the deposition machine is operated to carry out a deposition process on the deposition target. A dried deposition target is inserted into the deposition machine to deposit a target material onto the deposition target. At this time, the operating conditions of the deposition machine are adjusted according to the deposition target or the target material.

[0096] The next deposition completion step (S80) is a step of returning the fixed jig on which the deposition target is mounted to the workspace of the main body, the discharge preparation step (S90) is a step of operating the rotation module to rotate the fixed jig on which the deposition is completed so that it is positioned at the unloading point, and the discharge step (S100) is a step of receiving the fixed jig on which the deposition is completed from the workspace connected to the unloading point and moving it for the next process.

[0098] As described above, the deposition method according to the present invention rotates the main body at a predetermined angle through a rotation module, and the main body is equipped with a plurality of workspaces, so that the deposition process proceeds according to the position in which each workspace is arranged, thereby enabling a continuous deposition process and increasing productivity.

[0099] In other words, as deposition proceeds, the next deposition target is dried simultaneously, and the deposition target awaiting drying is introduced into the next workspace, thereby enabling work continuity. Furthermore, compared to conventional methods that required multiple workers for the insertion, drying, deposition, and ejection of fixing jigs, this method requires workers only at the loading and unloading points of the jig, offering the advantage of reducing labor costs.

[0101] In addition, in conventional deposition processes, the entire process had to be constructed in the form of a cleanroom, but the deposition system according to the present invention and the deposition method using it can minimize the ingress of external foreign substances and moisture into the deposition target during the entire process even if only the loading point of the fixing jig is constructed in the form of a cleanroom, thereby reducing the cost required to construct the deposition system.

[0102] In the case of conventional deposition processes, drying and deposition are mainly performed in a single piece of equipment, so the entire space where the equipment and process take place had to be configured as a cleanroom. In contrast, the present invention forms only the loading point of the fixing jig as a cleanroom to prevent the deposition target from being exposed to the atmosphere before deposition, and in subsequent processes, minimizes the time the deposition target is exposed to the atmosphere by entering and exiting the workspace, drying chamber, and deposition machine, thereby preventing contamination by foreign substances and moisture.

[0104] As described above, the present invention has been explained by specific details such as specific components, limited embodiments, and drawings; however, this is provided merely to aid in a more comprehensive understanding of the invention, and the invention is not limited to the above embodiments. A person skilled in the art can make various modifications and variations from this description.

[0106] Accordingly, the scope of the present invention should not be limited to the described embodiments, and all things equivalent to or having equivalent variations to the claims set forth below, as well as the claims set forth below, shall be considered to fall within the scope of the concept of the present invention. Explanation of the symbols

[0108] 1 : Deposition Equipment System 10: Drying chamber 11: Temperature control means 20 : Depositor 30 : Main body 31: Working means 32: Opening / closing means 33 : Door stopper 40 : Door 50 : Rotation module 51 : Turntable 52 : Rotary drive unit 53 : Moving rail 60 : Fixing jig 61 : Baseplate 62 : Plate jig 63 : Mounting hole 64 : First connecting part 65 : Second connecting part

Claims

Claim 1 A deposition equipment system in which a plurality of deposition targets are mounted on a fixing jig (60) and the fixing jig (60) sequentially passes through a drying chamber (10) and a deposition machine (20) to perform a deposition process on the deposition targets, comprising: a main body (30) including a plurality of workspaces (31) each independently partitioned and in which the fixing jig is housed; a plurality of doors (40) each provided in the plurality of workspaces (31) to open and close each workspace (31); and a rotation module (50) provided at the lower end of the main body (30) to rotate the main body (30); wherein the rotation module (50) is characterized by rotating so that the plurality of workspaces (31) provided in the main body (30) stop at a position where they communicate with the entrances of the drying chamber (10) and the deposition machine (20), and at a loading point (70) or unloading point (80) of the fixing jig. Efficiency-enhanced deposition equipment system. Claim 2 A deposition equipment system with improved work efficiency according to claim 1, wherein the rotation module (50) comprises a turntable (51) formed in the shape of a flat plate on which the main body (30) is seated, a rotation drive unit (52) disposed on one side of the turntable and rotating the turntable (51) while operating by an applied power source and signal, and a moving rail (53) provided on the upper surface of the turntable (51) for moving the fixing jig (60) into and out of the workspace (31) of the main body (30). Claim 3 In claim 2, the fixing jig (60) comprises a base plate (61) installed to be movable along the moving rail (53) and a plate-shaped jig (62) installed on the upper surface of the base plate (61) to mount the deposition target, wherein the plate-shaped jig (62) is formed in the shape of a plate extending vertically and has a plurality of mounting holes (63) for mounting the deposition target formed at mutually spaced positions, and is mutually detachably coupled with an adjacent plate-shaped jig (62), so that when the deposition target is changed, the deposition target can be changed by coupling the plate-shaped jig (62) having mounting holes (63) for mounting the changed deposition target to the base plate (61) and the adjacent plate-shaped jig (62). This characterizes a deposition equipment system with improved work efficiency. Claim 4 A deposition equipment system with improved work efficiency, characterized in that, in any one of claims 1 to 3, the door (40) is further provided with a temperature control means (11) for controlling the temperature of the door (40) while operating by an applied power source and a signal. Claim 5 A deposition method (S1) using a deposition equipment system according to any one of claims 1 to 3 comprises: a preparation step (S10) of mounting a deposition target on a fixing jig; an insertion step (S20) of inserting the fixing jig on which the deposition target is mounted into a workspace arranged to communicate with a loading point among a plurality of workspaces provided in a main body; a drying preparation step (S30) of operating a rotation module on which the main body is seated to rotate the workspace into which the fixing jig is inserted so as to align with the entrance / exit of a drying chamber; a drying step (S40) of drying the deposition target by operating the drying chamber after inserting the fixing jig into the drying chamber; a drying completion step (S50) of returning the fixed jig, from which drying is completed, to the workspace of the main body from which it was withdrawn; a deposition preparation step (S60) of operating the rotation module to rotate the workspace into which the fixed jig, from which drying is completed, is inserted so as to align with the entrance / exit of a deposition machine; and after inserting the fixing jig into the deposition machine through the entrance / exit of the deposition machine A deposition method using a deposition equipment system with improved work efficiency, characterized by comprising: a deposition step (S70) of operating a deposition machine to perform a deposition process on a deposition target; a deposition completion step (S80) of returning a fixing jig on which the deposition target is mounted to the workspace of the main body from which it was withdrawn; an ejection preparation step (S90) of operating the rotation module to rotate the fixing jig on which the deposition is completed so that it is positioned at an unloading point; and an ejection step (S100) of receiving the fixing jig on which the deposition is completed from a workspace connected to the unloading point and moving it for the next process.

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