Method and apparatus for detecting substrate defect using optics

Abstract

One embodiment of the present invention provides an inspection method for detecting defects in a substrate to be inspected using optics, comprising the steps of: loading a substrate to be inspected onto the upper part of a support structure module; irradiating light from a lighting module toward the loaded substrate to be inspected; and capturing a portion of the entire surface of the substrate to be inspected where the lighting light is irradiated to obtain a detection image, wherein the step of the lighting module irradiating light is characterized by rotating toward the substrate to be inspected according to the characteristics of the loaded substrate to be inspected to selectively irradiate one of a plurality of lighting lights.

Description

Technology Field

[0001] The present invention relates to a substrate inspection method and apparatus, and more specifically, to an inspection method and apparatus for detecting defects in a substrate using optics. Background Technology

[0003] With the recent rapid advancement of various semiconductor components, lightweight display devices that offer fast response speeds and wide viewing angles, such as LEDs (Light Emitting Diodes) and OLEDs (Organic Light Emitting Diodes), are becoming widely available.

[0004] A thin glass is installed on the surface of such a display device, and etching and cleaning processes are performed to form various patterns on the glass.

[0005] However, if chipping or cracks are present on the surface of the panel glass of the display device after the cleaning process, it causes problems that degrade the performance of the display device, so an inspection process is performed to determine whether there are defects on the glass surface.

[0006] Conventional methods for inspecting defects on the surface of display panel glass involve an inspector visually inspecting the surface or using defect detection sensors to detect defects based on the analysis of defect signal size according to defect size and depth. However, these methods still present issues regarding human and time costs. The problem to be solved

[0008] The technical problem to be solved by the present invention is to provide an inspection method and an inspection device for detecting defects in a substrate under inspection, which can ensure reproducibility of defect detection by having an inspector set various optical conditions and perform inspections on the substrate under various optical conditions, and can improve inspection accuracy by acquiring detection images while rotating the introduced substrate.

[0009] The technical problems that the present invention aims to solve are not limited to those mentioned above, and other unmentioned technical problems will be clearly understood by those skilled in the art to which the present invention belongs from the description below. means of solving the problem

[0011] To achieve the above technical objective, one embodiment of the present invention provides an inspection method for detecting defects in a substrate to be inspected using optics, comprising the steps of: loading a substrate to be inspected onto the upper part of a support structure module; irradiating illumination light toward the loaded substrate to be inspected by a lighting module; and acquiring a detection image by photographing the portion of the entire surface of the substrate to be inspected where the illumination light is irradiated by a camera module, wherein the step of the lighting module irradiating illumination light is characterized by rotating toward the substrate to be inspected according to the characteristics of the loaded substrate to be inspected to selectively irradiate one of a plurality of illumination lights.

[0012] In an embodiment of the present invention, the step of acquiring the detection image may be achieved by acquiring the detection image as the camera module line-scans the substrate to be inspected while the transfer module transfers the substrate to be inspected, or by acquiring the detection image as the substrate to be inspected, whose placement angle has been changed by the substrate rotation module, is photographed.

[0013] In an embodiment of the present invention, the step of irradiating the illumination light involves the illumination module selecting one of a plurality of illumination lights positioned at different locations through a rotational movement and irradiating the illumination light toward the substrate to be inspected, wherein the illumination light can be irradiated by adjusting the illumination angle through the rotational movement.

[0014] In an embodiment of the present invention, the step of acquiring the detection image can be performed by rotating a filter member that provides a plurality of filters according to the characteristics of the loaded substrate to be inspected, thereby selectively changing the filter located below the lens to photograph a portion of the substrate to be inspected where the illumination light is irradiated.

[0015] In an embodiment of the present invention, the substrate rotation module further includes the step of rotating the loaded substrate after the substrate to be inspected is loaded, and the step of rotating the substrate to be inspected at a different angle after a detection image is acquired by the camera module, wherein the camera module can acquire detection images of the substrate to be inspected arranged at different angles.

[0016] In an embodiment of the present invention, the step of loading the substrate to be tested may include the step of loading the substrate to be tested into a loading area of ​​the support structure module and the step of a transfer module transferring the substrate to be tested loaded into the loading area to a detection area.

[0017] To achieve the above technical objective, another embodiment of the present invention provides an inspection device for detecting defects in a substrate to be inspected using optics, comprising: a support structure module that supports a substrate to be inspected being loaded; a lighting module that irradiates lighting light toward the loaded substrate to be inspected; and a camera module that captures a portion of the entire surface area of ​​the substrate to be inspected where the lighting light is irradiated to acquire a detection image, wherein the lighting module rotates according to the characteristics of the loaded substrate to be inspected to selectively irradiate one of a plurality of lighting lights toward the substrate to be inspected.

[0018] In an embodiment of the present invention, the lighting module may include a lighting unit that is formed long in the width direction of the support structure module and irradiates lighting light toward a loaded substrate to be inspected, a first axis driving unit that drives the lighting unit in the length direction of the support structure module, and a second axis driving unit that drives the lighting unit up and down.

[0019] In an embodiment of the present invention, the lighting unit includes a lighting frame and a lighting unit installed on the lighting frame, and the lighting module may include a lighting rotation driving unit connected to both sides of the lighting unit to rotate the lighting unit axially.

[0020] In an embodiment of the present invention, the lighting unit may have a first lighting light provided on a first surface, a second lighting light provided on a second surface in a direction perpendicular to the first surface, and a third lighting light provided on a third surface in a direction parallel to the first surface and perpendicular to the second surface, and the first lighting light, the second lighting light, and the third lighting light may be light sources having different wavelengths.

[0021] In an embodiment of the present invention, the lighting unit includes through holes on both sides and a lighting wiring passage connecting the through holes inside, and a power supply cable for driving the lighting may be disposed in the lighting wiring passage.

[0022] In an embodiment of the present invention, the camera module comprises a plurality of camera units arranged in a row, wherein each camera unit may include a camera body, a lens positioned downward, and a filter member that contacts the lens and is provided with a plurality of different filters, thereby selectively changing the filter positioned below the lens as it rotates.

[0023] In an embodiment of the present invention, the plurality of camera units may be arranged such that the positions of the lens and the filter member are alternately arranged.

[0024] In an embodiment of the present invention, a light-blocking module may be further included, which is installed on the frame of the camera module and partially blocks the illumination light irradiated by the lighting module. Effects of the invention

[0026] According to an embodiment of the present invention, by setting various optical conditions and performing inspections on a substrate under various optical conditions, reproducibility of defect detection can be secured, thereby improving inspection accuracy.

[0027] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the composition of the invention described in the description or claims of the present invention. Brief explanation of the drawing

[0029] FIG. 1 is a flowchart schematically illustrating, over time, an inspection method for detecting defects in a substrate under inspection according to one embodiment of the present invention. FIG. 2 is a drawing illustrating an inspection device for detecting defects in a substrate to be inspected according to an embodiment of the present invention. FIG. 3 is a drawing illustrating a lighting module according to one embodiment of the present invention. FIG. 4 is a drawing illustrating the structure of a lighting module according to one embodiment of the present invention in more detail. FIG. 5 is a drawing illustrating a camera module according to one embodiment of the present invention. FIG. 6 is an enlarged view illustrating the coupling structure of a camera unit according to one embodiment of the present invention. FIG. 7 is a drawing illustrating camera units according to one embodiment of the present invention. Specific details for implementing the invention

[0030] The present invention will be described below with reference to the attached drawings. However, the present invention may be implemented in various different forms and is therefore not limited to the embodiments described herein. Furthermore, in order to clearly explain the present invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification have been given similar reference numerals.

[0031] Throughout the specification, when it is stated that a part is "connected (connected, in contact, combined)" with another part, this includes not only cases where they are "directly connected," but also cases where they are "indirectly connected" with other members interposed between them. Furthermore, when it is stated that a part "includes" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but rather allows for the inclusion of additional components.

[0032] The terms used herein are merely for describing specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as “comprising” or “having” are intended to indicate the presence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0033] Embodiments of the present invention will be described in detail below with reference to the attached drawings.

[0034] FIG. 1 is a flowchart schematically illustrating, over time, an inspection method for detecting defects in a substrate under inspection according to an embodiment of the present invention; FIG. 2 is a drawing illustrating an inspection device for detecting defects in a substrate under inspection according to an embodiment of the present invention; FIG. 3 is a drawing illustrating a lighting module according to an embodiment of the present invention; FIG. 4 is a drawing illustrating the structure of a lighting module according to an embodiment of the present invention in more detail; FIG. 5 is a drawing illustrating a camera module according to an embodiment of the present invention; FIG. 6 is an enlarged view illustrating the coupling structure of a camera unit according to an embodiment of the present invention; and FIG. 7 is a drawing illustrating camera units according to an embodiment of the present invention.

[0035] Hereinafter, an inspection method and an inspection apparatus for detecting defects in a substrate to be inspected according to an embodiment of the present invention will be described with reference to FIGS. 1 to 7.

[0036] An inspection device (10) according to one embodiment of the present invention may include a support structure module (100), a transfer module (200), a substrate rotation module (300), an auxiliary roller module (400), a lighting module (500), a camera module (600), a light-blocking module (700), and an air floating module (800).

[0037] Referring to FIG. 1, the inspection method of the present invention is schematically described as follows: in step S11, a substrate to be inspected may be loaded onto the upper part of a support structure module (100). More specifically, the substrate to be inspected may be loaded into a loading area within the total upper surface of the support structure module (100). The transfer module (200) can stably fix the loaded substrate to be inspected by adsorbing the substrate to be inspected loaded into the loading area using an adsorption pad.

[0038] In step S12, the substrate rotation module (300) can rotate the loaded substrate.

[0039] In step S13, the rotated substrate to be tested, which is loaded into the loading area, can be transferred to the detection area by the transfer module (200). The transfer module (200) can transfer the loaded substrate to be tested while maintaining a balanced state so that it does not tilt to one side or sag.

[0040] Here, the detection area may be near the center based on the longitudinal direction of the support structure module (100) or the inspection device (10), and the loading area may be one end area of ​​the support structure module (100) or the inspection device (10). The detection area is the location where the substrate to be inspected is photographed by the camera module (600), and the loading area may be the location where the substrate to be inspected is loaded onto the upper part of the support structure module (100). After inspection, the substrate to be inspected may be unloaded from the loading area of ​​the support structure module (100) or unloaded from an area other than the loading area.

[0041] In step S14, the lighting module (500) can select one of a plurality of lighting lights positioned at different locations through a rotational movement and position the selected lighting light toward the substrate under inspection. At this time, the lighting module (500) may position the selected lighting light toward the substrate under inspection by adjusting the irradiation direction and irradiation angle.

[0042] In step S15, the lighting module (500) can irradiate the selected lighting light toward the loaded substrate under test.

[0043] In step S15, while the lighting module (500) irradiates lighting light toward the substrate under inspection, the light-blocking module (700) can partially block the lighting light irradiated from the lighting module (500). The light-blocking module (700) can limit the amount of lighting light irradiated to parts of the surface of the substrate under inspection located in the detection area other than the part of the camera module (600) that is being photographed.

[0044] In step S16, the camera module (600) can rotate the filter member (615) to select a filter to apply when acquiring a detection image.

[0045] In step S17, the camera module (600) can obtain a detection image by photographing the portion of the entire surface area of ​​the substrate under inspection that is illuminated by light. That is, through steps S16 and S17, the camera module (600) can selectively change the filter located below the lens (613) to obtain a detection image by photographing a portion of the substrate under inspection that is illuminated by light.

[0046] More specifically, the camera module (600) can tilt the camera unit (610), the camera module frame (630), and the tilting support unit (650) using a tilting drive unit (670) to photograph the substrate at a specific angle according to the type or characteristics of the substrate located in the detection area. By doing so, the camera module (600) can photograph the substrate at an optimal shooting angle and obtain a clear detection image. Additionally, the camera module (600) can select an appropriate optical filter among a plurality of optical filters (F) according to the type or characteristics of the substrate and position it in front of the lens (613), thereby filtering a specific wavelength of light incident on the lens (613) to obtain a detection image optimized for defect detection.

[0047] The camera module (600) may acquire a detection image by line scanning the substrate being transported while the transport module (200) is transporting the substrate to be tested, or it may acquire a detection image by photographing the substrate to be tested whose placement angle has been changed by the substrate rotation module (300).

[0048] The detection image acquired from the camera module (600) can be transmitted to a control module (not shown), and the control module can analyze the received detection image to classify the detected defects by size, detection level, defect type, etc., and can review or manage the status of equipment by process based on inspection history information through a database (DB). The inspection results can be output in a form that an inspector can verify through an output module (not shown).

[0049] After completing the process described above and the inspection of the substrate to be inspected is returned to the loading area by the transfer module (200), the substrate rotation module (300) can rotate the substrate to be inspected to another angle. Accordingly, the camera module (600) can acquire detection images of both the substrate to be inspected that was positioned at a specific angle in step S12 and the substrate to be inspected that was positioned at a different angle after step S16. The inspection device and method according to the present invention can improve inspection accuracy by acquiring detection images of the substrate to be inspected from various angles in this way.

[0050] After the above process is repeated several times and all inspections are completed, the substrate under inspection may be unloaded from the loading area or transferred to a separate unloading location and then unloaded.

[0051] Referring to FIG. 2, the support structure module (100) may be a structure that serves as a frame for the inspection device (10). A transfer module (200), a substrate rotation module (300), an auxiliary roller module (400), a lighting module (500), a camera module (600), and an air floating module (800) may each be installed in combination on the support structure module (100).

[0052] The transfer module (200) can transfer a substrate to be inspected loaded on the substrate rotation module (300) and the auxiliary roller module (400). The transfer module (200) can reciprocate the substrate to be inspected loaded on top in a forward or backward direction between the image detection area and the loading area.

[0053] The substrate rotation module (300) can rotate the loaded substrate to be tested, with the substrate to be tested loaded on its upper surface. The substrate rotation module (300) can rotate the loaded substrate to be tested in order to detect a specific defect.

[0054] The auxiliary roller module (400) can support the substrate to be tested when the substrate to be tested is transported by the transport module (200).

[0055] The substrate rotation module (300) and the auxiliary roller module (400) can be arranged in an overlapping state. More specifically, the lift pin of the substrate rotation module (300) that contacts the lower part of the substrate to be inspected can be placed in the spaced-out space formed between the rollers of the auxiliary roller module (400).

[0056] The lighting module (500) is provided on the upper part of the loaded substrate to be tested and can irradiate lighting light toward the substrate to be tested. The lighting module (500) is installed on both sides of the support structure module (100) (see FIG. 2) and can irradiate lighting light toward the substrate to be tested passing through the auxiliary roller module (400) and the air floating module (800).

[0057] The lighting module (500) is a device equipped with multiple lights, capable of selecting a suitable light for detecting defects in a substrate under inspection, and can move in the forward and backward and up and down directions, and can change the irradiation angle of the light as it rotates.

[0058] By illuminating the substrate under inspection with light, the camera module (600) can obtain a clearer detection image of the substrate under inspection. Additionally, if the substrate under inspection has transparent or translucent characteristics, by illuminating the substrate under inspection, the camera module (600) can obtain a clear detection image that can reveal even defects that have occurred inside the substrate under inspection.

[0059] Referring to FIG. 3, the lighting module (500) may include a lighting unit (510), a first axis driving unit (530), a second axis driving unit (550), and a lighting rotation driving unit (570).

[0060] The lighting unit (510) is formed long in the width direction of the support structure module (100), the transfer module (200), and the auxiliary roller module (400), and can irradiate lighting light toward the loaded substrate to be inspected.

[0061] The first axis drive unit (530) can drive the lighting unit (510) in the longitudinal direction of the support structure module (100). The first axis (X-axis) drive unit (530) can operate using a motor and a single-axis robot type and can move the lighting unit (510) in the forward and backward directions.

[0062] The second axis drive unit (550) can drive the lighting unit (510) up and down. The second axis (Z axis) drive unit (550) can operate using a motor and a single-axis robot type and can move the lighting unit (510) in the up and down direction.

[0063] The lighting rotation drive unit (570) is connected to both sides of the lighting unit (510) and can rotate the lighting unit of the lighting unit (510) on an axis. The lighting rotation drive unit (570) is equipped with a motor and can use the motor to rotate the lighting unit (513) to change the irradiation angle of the lighting light or change the lighting type. For example, the lighting rotation drive unit (570) is connected to both ends of the lighting wiring passage (515) and can be formed in an L-shape.

[0064] FIG. 4(a) illustrates a lighting unit (510), which may include a lighting frame (511) and a lighting unit (513).

[0065] The lighting frame (511) and the lighting unit (513) are formed long in the width direction of the support structure module (100), and the lighting unit (513) can be installed on the lighting frame (511).

[0066] The lighting frame (511) may include a support plate (P1) formed to protrude forward or backward, and the lighting unit (513) may be installed on the lighting frame (511) in a state combined with the support plate (P1).

[0067] The support plate (P1) is configured to provide for the axial rotation of the lighting unit (513), and it is preferable that it be formed in a direction perpendicular to the longitudinal direction of the lighting frame (511) and the lighting unit (513).

[0068] FIG. 4(b) illustrates a lighting unit (513), and FIG. 4(c) is a side view of the lighting unit. A lighting unit (513) according to one embodiment of the present invention may be formed in a T-shape.

[0069] Through holes (517) are formed on both sides of the lighting unit (513), and a lighting wiring passage (515) connecting the through holes formed on both sides may be provided inside the lighting unit (513).

[0070] The lighting wiring passage (515) may be a passage for arranging cables for supplying power to the lighting unit (513) or connecting power. By providing the lighting unit (513) of the present invention with a lighting wiring passage, the problem of the cable being twisted or damaged when the lighting rotates on an axis can be prevented.

[0071] The lighting wiring passage (515) may be provided to be longer than the length of the lighting unit (513) (see FIG. 4 (a)). According to one embodiment of the present invention, the cable may be provided so that the wiring emerges near the center of the end of the lighting wiring passage (515) which is formed to be longer than the lighting unit (513).

[0072] The lighting unit (513) can provide multiple lighting lights and can irradiate the lighting light irradiated onto the substrate under inspection differently depending on the case through an axis rotation movement. For example, the multiple lighting lights can be provided as at least one of white diffused light, white parallel light, infrared diffused light, and white focused light.

[0073] For example, the lighting unit (513) may provide white diffused light (L1) on a first surface, provide white parallel light (L2) on a second surface in a direction perpendicular to the first surface, and provide white focused light or infrared (IR) diffused light (L3) on a third surface in a direction parallel to the first surface and perpendicular to the second surface.

[0074] In the above embodiment, a plurality of illumination lights were exemplified as being implemented as white diffuse light, white parallel light, infrared diffuse light, and white focused light; however, it is obvious that the plurality of illumination lights are not limited thereto and can be provided as illumination lights that irradiate light of other colors (RGB).

[0075] The lighting unit (513) can be rotated by the lighting rotation drive unit (570) to change the types of multiple lights (L1~L3) or change the angle of incidence according to the characteristics (reflectivity, transmittance, etc.) of the inspection type or the inspection substrate set. That is, the height or position of the lighting light (light source) for the inspection substrate located above the detection area can be changed in various ways.

[0076] The lighting unit (513) can rotate on an axis around the lighting wiring passage (515).

[0077] The camera module (600) can acquire a detection image by photographing at least one area of ​​the substrate under inspection where illumination light is irradiated in the image detection area.

[0078] The light-blocking module (700) is installed on the frame of the camera module (600) and can partially block the light from the lighting module (500).

[0079] Referring to FIG. 5, a camera module (600) may be installed in a support structure module (100) to photograph a substrate to be inspected transferred to an image detection area and to obtain a detection image of the substrate to be inspected (see FIG. 2). The camera module (600) may include a plurality of camera units (610), a camera module frame (630), a pivot unit (640), a tilting support unit (650), and a tilting driving unit (670).

[0080] Each of the multiple camera units (610) can capture a part of the substrate under inspection that is illuminated with light to obtain a detection image, and can transmit the obtained detection image to a control module (not shown).

[0081] When inspecting defects such as stains or foreign substances on a substrate to be inspected, the shooting angle of the camera unit (610) becomes an important inspection condition. The shooting angle of the camera unit (610) can be varied by the tilting drive unit (670). In addition, various angles of the camera unit (610) combined with various lighting lights (light source) of the lighting unit (513), the angle of incidence by the lighting rotation drive unit (570), the height of the lighting light (light source), and the position can perform multi-scan inspection through forward and reverse scanning.

[0082] Here, the multi-scan inspection may refer to an inspection method capable of detecting defects by acquiring images under various optical conditions multiple times. For example, an inspection device according to an embodiment of the present invention can detect a stain in area A of a substrate to be inspected through a first scan inspection, detect a stain in area B of a substrate to be inspected through a second scan inspection, and detect a stain in area C of a substrate to be inspected through a third scan inspection.

[0083] The camera module (600) can transmit defect information, including at least one of the coordinates, size, detection level, defect type, and scan information for at least one defect detected through the multi-scan inspection as described above, to a control module (not shown).

[0084] Although the above description used an example of detecting defects by substrate area through multi-scan inspection, multi-scan inspection can be used to detect defects not only by substrate area but also by defect type (bending, particle residue, chrome / clear defects, etc.).

[0085] Multiple camera units (610) may be installed on the upper part of the camera module frame (630). The camera module frame (630) may be coupled with a tilting support unit (650), and the camera module frame (630) may be coupled to the tilting support unit (650) so as to be rotatable by a predetermined angle through a pivot unit (640).

[0086] Since the tilting drive unit (670) is connected to the tilting support unit (650) at one end and to the camera module frame (630) at the other end, the camera module frame (630) can be tilted using a motor and a cylinder.

[0087] The camera module frame (630) may support the camera units (610) so that a plurality of camera units (610) are positioned at an angle relative to the substrate under inspection located in the image detection area. For example, it is preferable that the plurality of camera units (610) be positioned at an angle relative to the substrate under inspection in a driving angle range of 30 to 90 degrees.

[0088] The camera module frame (630) can be rotatably supported on a tilting support unit (650) by a pivot unit (640) so as to be tilted about a rotational center axis parallel to the substrate under inspection located in the image detection area.

[0089] In this way, the camera module frame (630) is tilted by the tilting drive unit (670), thereby allowing the shooting angles of multiple camera units (610) to be varied. The tilting drive unit (670) can tilt the camera unit (610) and the camera module frame (630) by using a motor and a cylinder to push or pull the camera module frame (630).

[0090] The tilting drive unit (670) can be driven simultaneously by using a motor and a cylinder, with the tilting drive units (670) provided on both sides. Through this operation, the tilting drive unit (670) can adjust the shooting angle of the camera unit (610).

[0091] Although not separately illustrated in the drawing, the camera module (600) may further include a camera driving unit (not illustrated). The camera driving unit can rotate a plurality of camera units (610). For example, the camera driving unit can rotate the camera units (610) around a hinge. Even when rotating around a hinge in this way, the camera module (600) of the present invention can perform operations on camera angle changes without changing the working distance and focal length.

[0092] The camera unit (610) of the present invention can be implemented as a line scan camera and can detect defects such as stained parts by acquiring detection images of a substrate to be inspected that moves back and forth to a detection area by various optical conditions pre-set by the user multiple times.

[0093] FIG. 6 is a detailed drawing of a camera unit (610), wherein the camera unit (610) may include a camera body (611), a lens (613), and a filter member (615).

[0094] A lens (613) may be attached to the lower part of the camera body (611). Although not separately indicated in the drawing, a control mechanism for adjusting the angle and position of the lens (613) may be installed in the camera body (611). The camera body (611) may move the lens up and down or tilt and rotate it using the control mechanism (not shown).

[0095] A plurality of camera units (610) may each be equipped with a camera body (611), a lens (613), and a filter member (615).

[0096] Referring to FIG. 7, for cases where the camera unit (610) is placed in a confined space, the height of the filter member (615) located below the lens (613) can be arranged differently for each adjacent camera unit (610). For example, the filter members (615) for each camera unit (610) arranged side by side can be alternately arranged at different heights in a zigzag shape.

[0097] According to another embodiment of the present invention, the height and position of the lens (613) and the filter member (615) located at the bottom of the camera body (611) may be alternately arranged. The lenses (613) with alternately arranged heights and positions may have different overall lengths.

[0098] Referring again to FIG. 6, the filter member (615) may include a rotating member (P2), an optical filter (F), and a rotary drive motor (M).

[0099] An optical filter (F) can be formed in a hole provided on a rotating member (P2), and a plurality of optical filters (F) can be provided on one rotating member (P2).

[0100] The optical filter (F) is intended to filter specific wavelengths of light incident on the camera body (611)) and lens (613), and it is desirable that it have different optical characteristics so as to be able to filter light of different wavelengths.

[0101] The rotary drive motor (M) can change the type of filter located in front of the lens (613) among the optical filters (F) by rotating the rotating member (P2). When the camera unit (610) photographs a substrate under inspection located in the image detection area, it can obtain a detection image optimized for defect detection by filtering a specific wavelength of incident light by selecting and changing to an appropriate optical filter (F) according to the type or characteristics of the substrate under inspection.

[0102] Referring again to FIG. 5, the light-blocking module (700) may include a light-blocking unit (710) and a light-blocking driving unit (730).

[0103] A light-blocking unit (710) can be positioned between the substrate to be inspected and the lighting unit (510) that are transferred over the air floating module (800) so as to partially block the light irradiated from the lighting module (500). By partially blocking the light irradiated from the lighting unit (510), the light-blocking unit (710) can limit the amount of light irradiated to parts of the surface of the substrate to be inspected located in the image detection area other than the part captured by the camera unit (610). Through the operation of this light-blocking unit (710), the phenomenon of white noise appearing due to diffuse reflection of light in the detection image acquired by the camera unit (610) can be reduced. That is, conventional substrate inspection devices had a problem in which white noise caused by diffuse reflection of light in non-inspection areas of the substrate to be inspected affected the actual parts to be inspected, thereby reducing inspection accuracy; however, by using the light-blocking unit (710) of the present invention, such a problem can be reduced.

[0104] The light-blocking driving unit (730) can change the light-blocking area of ​​the light-blocking unit (710) by moving the light-blocking unit (710) in a direction parallel to the substrate under inspection located in the image detection area. That is, the position of the light-blocking driving unit (730) can be changed in correspondence with the change in the shooting angle of the camera unit (610).

[0105] The foregoing description of the present invention is for illustrative purposes only, and those skilled in the art will understand that other specific forms can be easily modified without altering the technical spirit or essential features of the present invention. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. For example, each component described as a single unit may be implemented in a distributed manner, and components described as distributed may likewise be implemented in a combined form.

[0106] The scope of the present invention is defined by the claims set forth below, and all modifications or variations derived from the meaning and scope of the claims and equivalent concepts thereof should be interpreted as being included within the scope of the present invention. Explanation of the symbols

[0108] 10: Inspection device for the substrate under inspection 100: Support structure module 200: Transfer Module 300: Board rotation module 400: Auxiliary roller module 500: Lighting Module 510: Lighting unit 511: Lighting Frame 513: Lighting unit 515: Lighting wiring passageway 517: Penetrating hole 530: 1st shaft drive unit 550: Second axis drive unit 570: Lighting rotary drive unit 600: Camera module 610: Camera Unit 611: Camera body 613: Lens 615: Filter component 630: Camera module frame 650: Tilting support unit 670: Tilting drive unit 700: Shading Module 710: Shading unit 730: Shade drive unit 800: Air Floating Module

Claims

Claim 1 The method comprises the steps of: loading a substrate to be tested onto the upper part of a support structure module; irradiating illumination light toward the loaded substrate to be tested by a lighting module; and acquiring a detection image by photographing the portion of the entire surface of the substrate to be tested that is irradiated with the illumination light by a camera module, wherein the lighting module is formed elongated in the width direction of the support structure module and includes a lighting unit that irradiates illumination light toward the loaded substrate to be tested, the lighting unit includes a lighting frame and a lighting unit installed on the lighting frame, wherein the lighting unit has a first illumination light provided on a first surface, a second illumination light provided on a second surface in a direction perpendicular to the first surface, and a third illumination light provided on a third surface in a direction parallel to the first surface and perpendicular to the second surface, and the first illumination light, the second illumination light, and the third illumination light are light sources having different wavelengths, and the step of the lighting module irradiating illumination light involves rotating toward the substrate to be tested according to the characteristics of the loaded substrate to be tested, thereby including a plurality of An inspection method for detecting defects in a substrate under inspection using optics characterized by selectively irradiating one of the illumination lights. Claim 2 In claim 1, the step of acquiring the detection image is characterized by acquiring the detection image as the camera module line-scans the substrate to be inspected while the transfer module transfers the substrate to be inspected, or acquiring the detection image as the board to be inspected is photographed by the substrate rotation module at a changed placement angle, in a method for detecting defects in a substrate to be inspected using optics. Claim 3 In claim 1, the step of irradiating the illumination light is characterized by the illumination module selecting one of a plurality of illumination lights positioned at different locations through rotational movement and irradiating the illumination light toward the substrate to be inspected, wherein the illumination light is irradiated by adjusting the illumination angle through rotational movement, thereby an inspection method for detecting defects in a substrate to be inspected using optics. Claim 4 In claim 1, the step of acquiring the detection image is characterized by rotating a filter member that provides a plurality of filters according to the characteristics of the loaded substrate to be inspected, thereby selectively changing the filter located below the lens and photographing a part of the substrate to be inspected that is irradiated with the illumination light. This is an inspection method for detecting defects in a substrate to be inspected using optics. Claim 5 A method for detecting defects in a substrate to be tested using optics, wherein, in claim 1, the substrate rotation module further comprises the step of rotating the loaded substrate after the substrate to be tested is loaded, and the step of rotating the substrate to be tested at a different angle after a detection image is acquired by the camera module, wherein the camera module acquires detection images of the substrate to be tested arranged at different angles. Claim 6 In claim 1, the step of loading the substrate to be inspected comprises the step of loading the substrate to be inspected into a loading area of ​​the support structure module and the step of a transfer module transferring the substrate to be inspected loaded into the loading area to a detection area, characterized in that the inspection method for detecting defects in a substrate to be inspected using optics is characterized in that the transfer module transfers the substrate to be inspected loaded into the loading area to a detection area. Claim 7 The apparatus comprises a support structure module that supports a loaded substrate to be inspected, a lighting module that irradiates lighting light toward the loaded substrate to be inspected, and a camera module that captures a portion of the entire surface area of ​​the substrate to be inspected where the lighting light is irradiated to acquire a detection image, wherein the lighting module is formed elongated in the width direction of the support structure module and includes a lighting unit that irradiates lighting light toward the loaded substrate to be inspected, wherein the lighting unit includes a lighting frame and a lighting unit installed on the lighting frame, wherein the lighting unit has a first lighting light provided on a first surface, a second lighting light provided on a second surface in a direction perpendicular to the first surface, and a third lighting light provided on a third surface in a direction parallel to the first surface and perpendicular to the second surface, and wherein the first lighting light, the second lighting light, and the third lighting light are light sources having different wavelengths, and wherein the lighting module rotates according to the characteristics of the loaded substrate to be inspected to selectively irradiate one of a plurality of lighting lights toward the substrate to be inspected. An inspection device for detecting defects in a substrate under inspection using optics. Claim 8 In claim 7, the inspection device for detecting defects in a substrate to be inspected using optics is characterized in that the lighting module comprises a first axis driving unit that drives the lighting unit in the longitudinal direction of the support structure module and a second axis driving unit that drives the lighting unit up and down. Claim 9 In claim 8, the inspection device for detecting defects in a substrate to be inspected using optics is characterized in that the lighting module includes a lighting rotation drive unit connected to both sides of the lighting unit and rotating the lighting unit axially. Claim 10 delete Claim 11 In claim 7, the inspection device for detecting defects in a substrate to be inspected using optics is characterized in that the lighting unit includes through holes on both sides and a lighting wiring passage connecting the through holes inside, and a power supply cable for driving the lighting is disposed in the lighting wiring passage. Claim 12 In claim 7, the inspection device for detecting defects in a substrate to be inspected using optics is characterized in that the camera module comprises a plurality of camera units arranged in a row, wherein each camera unit comprises a camera body, a lens positioned downward, and a filter member that contacts the lens and provides a plurality of different filters to selectively change the filter positioned below the lens as it rotates. Claim 13 In claim 12, the inspection device for detecting defects in a substrate to be inspected using optics is characterized in that the plurality of camera units are arranged such that the positions of the lens and the filter member are alternately arranged. Claim 14 An inspection device for detecting defects in a substrate to be inspected using optics, characterized in that, in claim 7, it further includes a light-blocking module installed on the frame of the camera module to partially block the illumination light irradiated by the illumination module.

Images