Display device, photo mask and manufacturing method of display device

Abstract

A display device according to one embodiment comprises a substrate including a display area and a peripheral area, a first wiring layer that transmits a gate signal in the display area, a second wiring layer that transmits a data voltage in the display area, a data fan-out section including a first data fan-out wiring connected to the second wiring layer, and a data flexible printed circuit board electrically connected to the first data fan-out wiring in the peripheral area, wherein the first data fan-out wiring includes a first zigzag section having a zigzag shape and a first straight section extending from the first zigzag section, and the width of the first straight section is greater than the width of the first zigzag section.

Description

Technology Field

[0001] The present disclosure relates to a display device, a photomask, and a method for manufacturing a display device. Background Technology

[0002] Recently, display devices such as organic light-emitting diodes and liquid crystal displays are widely used. Generally, a display device includes a plurality of pixels, which are units for displaying images, and a driving unit. The driving unit includes a data driving unit that applies a data voltage to the pixels and a gate driving unit that applies a gate signal to control the transmission of the data voltage.

[0003] The gate driver and data driver can be mounted on a printed circuit board (PCB) in the form of a chip and connected to a display board. Alternatively, in the case of a gate driver that does not require high mobility of the thin-film transistor channel, it can be integrated into the display board without being formed as a separate chip. The problem to be solved

[0004] The embodiments are intended to provide a display device and a method for manufacturing a display device that can minimize dead space while having uniform brightness across the entire display area.

[0005] In addition, the embodiments are intended to provide a photomask capable of preventing defects caused by opening of fan-out wiring or short circuits between adjacent fan-out wirings during fan-out wiring patterning. means of solving the problem

[0006] A display device according to one embodiment comprises a substrate including a display area and a peripheral area, a first wiring layer that transmits a gate signal in the display area, a second wiring layer that transmits a data voltage in the display area, a data fan-out section including a first data fan-out wiring connected to the second wiring layer, and a data flexible printed circuit board electrically connected to the first data fan-out wiring in the peripheral area, wherein the first data fan-out wiring includes a first zigzag section having a zigzag shape and a first straight section extending from the first zigzag section, and the width of the first straight section is greater than the width of the first zigzag section.

[0007] The data fan-out section further includes a second data fan-out section adjacent to the first data fan-out section, and the second data fan-out section includes a second zigzag section having a zigzag shape and a second straight section extending from the second zigzag section, and the first zigzag section and the second zigzag section include parts extending in a first direction and parts extending in a second direction crossing the first direction, and the minimum gap between the first zigzag section and the second zigzag section may be greater than the gap between the parts extending in the first direction from the first zigzag section.

[0008] The second data fan-out wiring is located closer to the center of the data fan-out section than the first data fan-out wiring, and the length of the second zigzag section may be longer than the length of the first zigzag section.

[0009] The length of the first straight section may be longer than the length of the second straight section.

[0010] The width of the first data fan-out wiring may be larger than the width of the second data fan-out wiring.

[0011] The above data flexible printed circuit board may include a data driving integrated circuit.

[0012] The above surrounding area may include a gate driver.

[0013] The invention includes a gate fan-out section comprising a first gate fan-out wiring connected to the first wiring layer, and a gate flexible printed circuit board electrically connected to the first gate fan-out wiring in the peripheral region of the substrate, wherein the first gate fan-out wiring includes a third zigzag section having a zigzag shape and a third straight section extending from the third zigzag section, and the width of the third straight section may be greater than the width of the third zigzag section.

[0014] The gate fan-out section further includes a second gate fan-out section adjacent to the first gate fan-out section, and the second gate fan-out section includes a fourth zigzag section having a zigzag shape and a fourth straight section extending from the fourth zigzag section, and the third zigzag section and the fourth zigzag section include parts extending in a first direction and parts extending in a second direction crossing the first direction, and the minimum gap between the third zigzag section and the fourth zigzag section may be greater than the gap between the parts extending in the second direction from the third zigzag section.

[0015] The second gate fan-out wiring is located closer to the center of the gate fan-out section than the first gate fan-out wiring, and the length of the fourth zigzag section may be longer than the length of the third zigzag section.

[0016] The length of the third straight section may be longer than the length of the fourth straight section.

[0017] The width of the first gate fan-out wiring may be larger than the width of the second gate fan-out wiring.

[0018] A photomask according to one embodiment includes a transmitting portion that transmits light and a blocking portion that blocks the light, wherein the blocking portion includes a first zigzag portion having a zigzag shape and a first straight portion extending from the first zigzag portion, and the width of the first straight portion is greater than the width of the first zigzag portion.

[0019] The above blocking portion includes a first slit, and the first slit may extend from the first zigzag portion to the first straight portion.

[0020] The above-mentioned blocking portion further includes a second zigzag portion having a zigzag shape, a second straight portion extending from the second zigzag portion, and a second slit extending from the second zigzag portion to the second straight portion, and the first zigzag portion and the second zigzag portion include portions extending in a first direction and portions extending in a second direction crossing the first direction, and the minimum gap between the first zigzag portion and the second zigzag portion may be greater than the gap between portions extending in the first direction from the first zigzag portion.

[0021] The length of the second zigzag section may be longer than the length of the first zigzag section.

[0022] A method for manufacturing a display device according to one embodiment comprises the steps of forming a conductive layer on a substrate, forming a photoresist film on the conductive layer, exposing and developing the photoresist film using a photomask to form a photoresist pattern, and etching the conductive layer to form a zigzag portion and a straight portion of a fan-out wiring, wherein the width of the straight portion of the fan-out wiring is greater than the width of the zigzag portion of the fan-out wiring.

[0023] The above photomask includes a blocking portion having a shape corresponding to the fan-out wiring and a transmitting portion which is an other area, and the blocking portion may include a slit located along the direction in which the blocking portion is extended.

[0024] In the step of etching the conductive layer to form the zigzag and straight sections of the fan-out wiring, the width of the fan-out wiring formed may be smaller than the width of the blocking section.

[0025] The above fan-out wiring can be electrically connected to a data driving integrated circuit or a gate driving integrated circuit. Effects of the invention

[0026] According to the embodiments, even if the gap between the flexible printed circuit board and the display area is narrow, the brightness can be uniform across the entire display area, and dead space can be reduced.

[0027] In addition, by adjusting the width or spacing of the fan-out wiring, defects caused by opening of the fan-out wiring or short circuits between adjacent fan-out wirings can be prevented.

[0028] Additionally, when forming fan-out wiring, the resolution of the photomask can be increased by using a photomask that includes a slit. Brief explanation of the drawing

[0029] FIG. 1 is a schematic block diagram of a display device according to one embodiment. FIG. 2 is an enlarged plan view of part A of the display device of FIG. 1. Figure 3 is a plan view showing an enlarged view of some data fan-out wiring. FIG. 4 is a schematic block diagram of a display device according to one embodiment. Figure 5 is an enlarged plan view of part B of the display device of Figure 4. Figure 6 is a plan view showing an enlarged view of some gate fan-out wiring. FIG. 7 is a flowchart illustrating a method for manufacturing a display device according to one embodiment. FIG. 8 is a plan view of a photomask used in a method for manufacturing a display device according to one embodiment. FIGS. 9 to 12 are cross-sectional views showing each process step of a method for manufacturing a display device according to one embodiment. Specific details for implementing the invention

[0030] Hereinafter, various embodiments of the present invention will be described in detail with reference to the attached drawings so that those skilled in the art can easily implement the present invention. The present invention may be embodied in various different forms and is not limited to the embodiments described herein.

[0031] To clearly explain the present invention, parts unrelated to the explanation have been omitted, and the same reference numerals are used for identical or similar components throughout the specification.

[0032] Furthermore, the size and thickness of each component shown in the drawings are depicted arbitrarily for convenience of explanation, and thus the present invention is not necessarily limited to what is illustrated. Thicknesses have been enlarged in the drawings to clearly represent various layers and regions. Additionally, for convenience of explanation, the thickness of some layers and regions has been exaggerated in the drawings.

[0033] Furthermore, when it is said that a part, such as a layer, membrane, region, or plate, is "on" or "on" another part, this includes not only the case where it is "directly above" the other part, but also the case where there is another part in between. Conversely, when it is said that a part is "directly above" another part, it means that there is no other part in between. Also, saying that a part is "on" or "on" a reference part means that it is located above or below the reference part, and does not necessarily mean that it is located "on" or "on" in the direction opposite to gravity.

[0034] Furthermore, throughout the specification, when a part is described as "including" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components.

[0035] Additionally, throughout the specification, "planar" means when the subject part is viewed from above, and "cross-sectional" means when the cross-section obtained by vertically cutting the subject part is viewed from the side.

[0036] FIG. 1 is a schematic block diagram of a display device according to one embodiment. The display device according to one embodiment includes a display board (300) and a data flexible printed circuit board (500).

[0037] The display board (300) may be a display board (300) included in various display devices such as a liquid crystal display (LCD) and an organic light emitting display (OLED).

[0038] The display board (300) includes a substrate (110), and the substrate (110) includes a display area (DA) for displaying images and a surrounding area (PA) which is the remaining area.

[0039] In the display area (DA), there are a plurality of gate lines (121), a plurality of data lines (171), and a plurality of pixels (PX) connected to the plurality of gate lines (121) and the plurality of data lines (171).

[0040] The gate wires (121) transmit the gate signal and extend in approximately the first direction (x) and can be nearly parallel to each other.

[0041] The data lines (171) transmit a data voltage corresponding to the video signal and extend in a second direction (y) that crosses approximately the first direction and can be nearly parallel to each other. The gate lines (121) and the data lines (171) can also be referred to as the first wiring layer and the second wiring layer, respectively.

[0042] A plurality of pixels (PX) are arranged in a roughly matrix form. Each pixel (PX) may include at least one switching element electrically connected to a gate line (121) and a data line (171), and at least one pixel electrode connected thereto. The switching element is an electrical element, such as a thin-film transistor integrated in the display board (300), and may include a gate terminal, an input terminal, and an output terminal. The switching element can be turned on or turned off according to the gate signal of the gate line (121) to selectively transmit a data voltage from the data line (171) to the pixel electrode. Depending on the data voltage applied to the pixel electrode, the pixels (PX) can display a corresponding image.

[0043] The surrounding area (PA) may surround the display area (DA) or be located at the edge of the display board (300).

[0044] Gate driving units (400) are located on both sides of the peripheral area (PA). Additionally, gate lines (121) and data lines (171) of the display area (DA) may be located in the peripheral area (PA) extending from the display area (DA).

[0045] The gate driver (400) is connected to the gate line (121) and can transmit a gate signal to the gate line (121). The gate driver (400) can be directly formed in the peripheral area (PA) of the display board (300) through the same process as an electrical element such as a thin-film transistor of the display area (DA).

[0046] The gate driver (400) includes a first gate driver (400a) and a second gate driver (400b) located on each side of the surrounding area (PA) relative to the display area (DA). The first gate driver (400a) is located on the left side of the surrounding area (PA), and the second gate driver (400b) is located on the right side of the surrounding area (PA).

[0047] The first gate driving unit (400a) may include a plurality of stages (not shown) connected in a dependent manner, and the second gate driving unit (400b) may include a plurality of stages (not shown) connected in a dependent manner. The corresponding stages of the first gate driving unit (400a) and the second gate driving unit (400b) may be connected to the same gate line (121) to apply a gate signal. By applying a gate signal to the gate line (121) from both sides of the display board (300) in this way, display failures due to delay in the gate signal can be prevented even if the display board (300) is enlarged.

[0048] In FIG. 1, the first gate driver (400a) is described as being located on the left side of the surrounding area (PA) and the second gate driver (400b) is located on the right side of the surrounding area (PA), but this is not limited thereto, and the first gate driver (400a) and the second gate driver (400b) may be located anywhere in the surrounding area (PA). Additionally, depending on the embodiment, one of the first gate driver (400a) and the second gate driver (400b) may be omitted.

[0049] In the peripheral area (PA), a data fan-out section (180) connected to a data line (171) located in the display area (DA) is located. The data fan-out section (180) includes a plurality of data fan-out wires (181). The data fan-out wires (181) are located in the peripheral area (PA) and are located between the data flexible printed circuit board (500) and the display area (DA). One end of the data fan-out wires (181) is electrically connected to the data line (171) of the display area (DA) in the peripheral area (PA), and the other end is electrically connected to the data driving integrated circuit (550) of the data flexible printed circuit board (500) described later.

[0050] The data fan-out wiring (181) may be located on the same layer as the gate line (121) located in the display area (DA) and may be connected to the data line (171) of the display area (DA) through an opening (not shown). However, it is not limited thereto, and the data fan-out wiring (181) may be located on the same layer as the data line (171) of the display area (DA) in the surrounding area (PA), or on a different layer from the gate line (121) and the data line (171).

[0051] The data flexible printed circuit board (500) can be bent, and one side of the data flexible printed circuit board (500) is electrically connected to the data fan-out wiring (181) of the display board (300) in the peripheral area (PA) of the display board (300). The data flexible printed circuit board (500) includes a data driving integrated circuit (550) that generates a data voltage, which is a grayscale voltage corresponding to an input image signal. Although the data flexible printed circuit board (500) in FIG. 1 is illustrated as including two data driving integrated circuits (550), it is not limited thereto, and it is possible for the data flexible printed circuit board (500) to include only one data driving integrated circuit (550) or to include three or more data driving integrated circuits (550).

[0052] Hereinafter, a data fan-out section (180) of a display device according to one embodiment will be described with reference to FIGS. 2 and FIGS. 3. FIGS. 2 is an enlarged plan view of part A of the display device of FIGS. 1, and FIGS. 3 is an enlarged plan view of some data fan-out wiring. Specifically, FIGS. 3 is an enlarged plan view of two data fan-out wirings (181) located on the left side of FIGS. 2.

[0053] Referring to FIG. 2, the data fan-out wiring (181) includes a zigzag section (185) and a straight section (186). The zigzag section (185) may be located adjacent to the data flexible printed circuit board (500) of FIG. 1 and may extend approximately in a second direction (y). One end of the zigzag section (185) may be electrically connected to the data flexible printed circuit board (500).

[0054] The zigzag section (185) is a part of the data fan-out wiring (181) that has a zigzag shape. The zigzag section (185) includes a plurality of parts extended in a first direction (x) and a plurality of parts extended in a second direction (y). In the zigzag section (185), the parts extended in the first direction (x) and the parts extended in the second direction (y) are positioned alternately.

[0055] The closer the data fan-out wiring (181) is located to the edge of the data fan-out section (180), the shorter the length of the zigzag section (185) included in the data fan-out wiring (181). At this time, the length of the zigzag section (185) may refer to the total length of the wiring of the zigzag section (185). In other words, the closer the data fan-out wiring (181) is located to the edge of the data fan-out section (180), the fewer the number of parts extended in the first direction (x) and parts extended in the second direction (y).

[0056] The further away from the center of the data fan-out section (180), the greater the distance to the data line that must be connected from the data driving integrated circuit (550). In other words, the data fan-out wiring (181) located at the edge of the data fan-out section (180) is longer than the data fan-out wiring (181) located at the center of the data fan-out section (180). In this case, the resistance of the data fan-out wiring (181) located at the longer edge is greater than the resistance of the data fan-out wiring (181) located at the center. Therefore, a voltage drop in the data voltage occurs due to the difference in resistance caused by the difference in length of the data fan-out wiring (181), which may result in non-uniformity of brightness by region.

[0057] Additionally, the difference in length of the data fan-out wiring (181) increases as the data flexible printed circuit board (500) gets closer to the display area (DA), that is, as the peripheral area (PA) becomes narrower. Therefore, it was difficult to maintain uniform brightness in the display area (DA) while simultaneously reducing the dead space corresponding to the peripheral area (PA).

[0058] However, in a display device according to one embodiment, the zigzag portion (185) of the data fan-out wiring (181) is formed shorter from the center to the edge of the data fan-out portion (180), thereby offsetting the resistance difference caused by the length of the data fan-out wiring (181) and enabling uniform brightness to be achieved in all areas of the display device.

[0059] The straight section (186) may be located adjacent to the display area (DA). The straight section (186) extends in a straight line from the zigzag section (185) and is connected to the data line (171) located in the display area (DA) of FIG. 1. The closer the data fan-out wiring (181) is located to the edge of the data fan-out section (180), the longer the length of the straight section (186). The difference in resistance of the wiring according to the length of the straight section (186) can be offset by the length of the zigzag section (185) described above.

[0060] Additionally, the data fan-out wiring (181) located closer to the edge of the data fan-out section (180) may have a wider width than the data fan-out wiring (181) located closer to the center of the data fan-out section (180). In other words, the zigzag section (185) located at the edge may have a wider width than the zigzag section (185) located at the center, and the straight section (186) located at the edge may have a wider width than the straight section (186) located at the center. Therefore, the difference in resistance of the wiring according to the length of the straight section (186) can be more effectively offset along with the length adjustment of the zigzag section (185).

[0061] Referring to FIG. 3, the width (DW2) of the straight section (186) is greater than the width (DW1) of the zigzag section (185). At this time, the width (DW2) of the straight section (186) and the width (DW1) of the zigzag section (185) may represent the width in a direction perpendicular to the direction in which the wiring is extended in the plan view.

[0062] The data fan-out wiring (181) can be patterned using a photomask, and the photomask includes a blocking portion located in an area corresponding to the area where the data fan-out wiring (181) is to be formed. Since the straight portions (186) in the data fan-out portion (180) are located less densely than the zigzag portions (185), the blocking portion of the photomask is located less densely in the straight portion than in the zigzag portion, and the transparent portion of the photomask is located more widely in the straight portion than in the zigzag portion. As a result, the amount of light reaching the straight portion (186) becomes relatively greater than that reaching the zigzag portion (185). Therefore, if the width (DW2) of the straight portion (186) is formed to be equal to or smaller than the width (DW1) of the zigzag portion (185), the straight portion (186) pattern is excessively etched, causing a defect in which the straight portion (186) wiring is open.

[0063] However, in the case of a display device according to one embodiment, the width (DW2) of the straight section (186) is formed to be larger than the width (DW1) of the zigzag section (185), thereby preventing defects in which the straight section (186) is broken and opened. For example, the width (DW2) of the straight section (186) may be 5 μm to 7 μm, and the width (DW1) of the zigzag section (185) may be 4 μm or more and less than 5 μm. However, the widths (DW1) of the straight section (186) and the zigzag section (185) are not limited thereto.

[0064] The minimum spacing (DD2) between the zigzag sections (185) of two adjacent data fan-out lines (181) may be greater than the spacing (DD1) between the sections extending in the first direction (x) from the zigzag section (185) of one data fan-out line (181). Thus, a short circuit between the zigzag sections (185) of adjacent data fan-out lines (181) can be prevented.

[0065] The end adjacent to the display area (DA) of each straight section (186) may be connected to an electrostatic discharge protection circuit (not shown). The electrostatic discharge protection circuit may include at least one transistor to prevent circuit damage caused by momentary overcurrent. The electrostatic discharge protection circuit may be connected to the data line (171) of the display area (DA) of FIG. 1.

[0066] FIG. 4 is a schematic block diagram of a display device according to one embodiment. The display device according to one embodiment includes a display board (300), a data flexible printed circuit board (500), and a gate flexible printed circuit board (410). Referring to FIG. 4, unlike the display device of FIG. 1, the gate driver is not formed directly on the display board (300), and a gate driver integrated circuit (450) in the form of a chip is mounted on the gate flexible printed circuit board (410) and connected to the display board (300). Below, a detailed description of contents that overlap with FIG. 1 is omitted.

[0067] The display panel (300) includes a display area (DA) for displaying images and a surrounding area (PA) which is the remaining area. In the display area (DA), there are a plurality of gate lines (121), a plurality of data lines (171), and a plurality of pixels (PX) connected to the plurality of gate lines (121) and the plurality of data lines (171).

[0068] The gate wires (121) transmit the gate signal and extend in approximately the first direction (x) and can be nearly parallel to each other.

[0069] The data lines (171) carry a data voltage corresponding to the video signal and extend in a second direction (y) that crosses approximately the first direction and can be nearly parallel to each other.

[0070] The surrounding area (PA) may surround the display area (DA) or be located at the edge of the display board (300).

[0071] The peripheral area (PA) includes a data fan-out section (180) connected to a data line located in the display area (DA). The data fan-out section (180) includes a plurality of data fan-out wirings (181). The data fan-out wirings (181) are electrically connected in the peripheral area (PA) to the data line of the display area (DA) and to the data driving integrated circuit (550) of the data flexible printed circuit board (500). The data fan-out section (180) is as described in FIGS. 1 to 3.

[0072] The peripheral area (PA) includes a gate fan-out section (130) connected to a gate line (121) located in the display area (DA). The gate fan-out section (130) includes a plurality of gate fan-out wires (131). The gate fan-out section (130) is located in the peripheral area (PA) and is located between the gate flexible printed circuit board (410) and the display area (DA). One end of the gate fan-out wire (131) is electrically connected to the gate line (121) of the display area (DA) in the peripheral area (PA), and the other end is electrically connected to the gate driving integrated circuit (450) of the gate flexible printed circuit board (410) described later.

[0073] The gate flexible printed circuit board (410) can be bent, and one side of the gate flexible printed circuit board (410) is electrically connected to the gate fan-out wiring (131) of the display board (300) in the peripheral area (PA) of the display board (300). The gate flexible printed circuit board (410) includes a gate driving integrated circuit (450) that generates a gate signal. Although one gate flexible printed circuit board (410) is shown in FIG. 4 as including two gate driving integrated circuits (450), it is not limited thereto, and it is possible for one gate flexible printed circuit board (410) to include only one gate driving integrated circuit (450) or to include three or more gate driving integrated circuits (450).

[0074] Hereinafter, a gate fan-out section (130) of a display device according to one embodiment will be described with reference to FIGS. 5 and FIGS. 5 is an enlarged plan view of part B of the display device of FIG. 4. FIG. 6 is an enlarged plan view of some gate fan-out wiring (131). Specifically, FIG. 6 is an enlarged plan view of two gate fan-out wirings (131) located on the lower side of FIG. 5.

[0075] Referring to FIG. 5, the gate fan-out wiring (131) includes a zigzag section (135) and a straight section (136). The zigzag section (135) may be located adjacent to the gate flexible printed circuit board (410) of FIG. 4 and may extend approximately in a first direction (x). One end of the zigzag section (135) may be electrically connected to the gate flexible printed circuit board (410).

[0076] The zigzag section (135) includes a plurality of first-direction (x) extended portions and a plurality of second-direction (y) extended portions. In the zigzag section (135), the first-direction (x) extended portions and the second-direction (y) extended portions are positioned alternately.

[0077] The closer the gate fan-out wiring (131) is located to the edge of the gate fan-out section (130), the shorter the zigzag section (135) included in the gate fan-out wiring (131). In other words, the closer the gate fan-out wiring (131) is located to the edge of the gate fan-out section (130), the fewer the first direction (x) extended portions and second direction (y) extended portions it includes.

[0078] The further away from the center of the gate fan-out section (130), the further the distance from the gate driving integrated circuit (450) to the gate line that must be connected. In other words, the gate fan-out wiring (131) located at the edge of the gate fan-out section (130) is longer than the gate fan-out wiring (131) located at the center of the gate fan-out section (130). In this case, the resistance of the gate fan-out wiring (131) located at the longer edge is greater than the resistance of the gate fan-out wiring (131) located at the center. Therefore, a difference in resistance occurs due to the difference in length of the gate fan-out wiring (131). In addition, the difference in length of the gate fan-out wiring (131) increases as the gate flexible printed circuit board (410) gets closer to the display area (DA), that is, as the surrounding area (PA) becomes narrower.

[0079] However, the zigzag section (135) of the gate fan-out wiring (131) is formed shorter from the center to the edge of the gate fan-out section (130) to offset the resistance difference caused by the length of the gate fan-out wiring (131).

[0080] The straight section (136) extends in a straight line from the zigzag section (135) and is connected to the gate line located in the display area (DA). The closer the gate fan-out wiring (131) is located to the edge of the gate fan-out section (130), the longer the straight section (136) included in the gate fan-out wiring (131). The difference in resistance of the wiring according to the length of the straight section (136) can be offset by the length of the zigzag section (135) described above.

[0081] Additionally, the gate fan-out wiring (131) located closer to the edge of the gate fan-out section (130) may have a wider width than the gate fan-out wiring (131) located closer to the center of the gate fan-out section (130). In other words, the zigzag section (185) located at the edge may have a wider width than the zigzag section (185) located at the center, and the straight section (186) located at the edge may have a wider width than the straight section (186) located at the center. Therefore, the difference in resistance of the wiring according to the length of the straight section (136) can be more effectively offset along with the length adjustment of the zigzag section (135).

[0082] Referring to FIG. 6, the width (GW2) of the straight section (136) of the gate fan-out wiring (131) is greater than the width (GW1) of the zigzag section (135). At this time, the width (GW2) of the straight section (136) and the width (GW1) of the zigzag section (135) may refer to the width in a direction perpendicular to the direction in which the wiring is extended in a plan view.

[0083] In the gate fan-out section (130), the straight sections (136) are positioned less densely than the zigzag sections (135). Therefore, if the width (GW2) of the straight section (136) is formed to be equal to or smaller than the width (GW1) of the zigzag section (135), the amount of light reaching the straight section (136) is relatively greater than that reaching the zigzag section (135) during the etching process using a photomask, and the pattern is excessively etched, resulting in a defect where the wiring of the straight section (136) is opened.

[0084] However, in the case of a display device according to one embodiment, the width (GW2) of the straight section (136) is formed to be larger than the width (GW1) of the zigzag section (135), thereby preventing defects in which the straight section (136) is broken and opened.

[0085] The minimum spacing (GD2) between the zigzag sections (135) of two adjacent gate fan-out wirings (131) may be greater than the spacing (GD1) between the sections extending in the second direction (y) from the zigzag section (135) of one gate fan-out wiring (131). Thus, defects caused by short circuits between the zigzag sections (135) of adjacent gate fan-out wirings (131) can be prevented.

[0086] Hereinafter, a method for manufacturing a display device according to one embodiment will be described with reference to FIGS. 7 to 12. FIG. 7 is a flowchart illustrating a method for manufacturing a display device according to one embodiment.

[0087] Referring to FIG. 7, a method for manufacturing a display device according to one embodiment includes the step (S101) of forming a conductive layer and a photoresist film on a substrate.

[0088] Next, a photoresist film is exposed and developed using a photomask to form a photoresist pattern (S102). The photoresist film may be made of a positive-type resist.

[0089] Next, the conductive layer is etched (S103) using the photoresist pattern as a photomask to form a zigzag and straight line pattern of the data fan-out wiring, and the photoresist pattern is removed (S104). Here, the conductive layer can be dry-etched or wet-etched.

[0090] FIG. 8 is a plan view of a photomask (1000) used in a method for manufacturing a display device according to one embodiment. Specifically, FIG. 8 shows a portion of the photomask (1000) used to form the data fan-out wiring (181) shown in FIG. 3.

[0091] The photomask (1000) includes a blocking portion (1001) having a shape corresponding to the shape of the pattern of the data fan-out wiring (181). Accordingly, the width (MW2) of the straight portion of the blocking portion (1001) is larger than the width (MW1) of the zigzag portion of the blocking portion (1001). Additionally, the minimum spacing (MD2) between the zigzag portions of two adjacent blocking portions (1001) may be larger than the spacing (MD1) between the portions extending in the first direction (x) from the zigzag portion of one blocking portion (1001).

[0092] The blocking portion (1001) of the photomask (1000) includes a slit (1001a) located within the blocking portion (1001) along the direction in which the blocking portion (1001) extends. The slit (1001a) may be located along the center portion with respect to the width direction of the blocking portion (1001). Additionally, the slit (1001a) may extend from the zigzag portion of the blocking portion (1001) to the straight portion of the blocking portion (1001). Although the photomask (1000) in FIG. 8 is described as being used to form the data fan-out wiring (181) shown in FIG. 3, the photomask (1000) may also be the photomask (1000) used to form the gate fan-out wiring (131) of FIG. 6.

[0093] FIGS. 9 to 12 are cross-sectional views illustrating each process step of a method for manufacturing a display device according to one embodiment. FIGS. 9 to 12 are drawings based on a cross-section of a display device cut along the line IX-IX of FIG. 3.

[0094] Referring to FIG. 9, an insulating layer (120), a conductive layer (181a), and a photoresist film (PRL) are formed sequentially on a substrate (110).

[0095] A photomask (1000) is disposed on a photoresist film (PRL) to expose a portion of the photoresist film (PRL). The photomask (1000) includes a transmitting portion (1002) through which light is transmitted and a blocking portion (1001) through which light is not transmitted and is blocked. The width (MW2) of the straight portion of the blocking portion (1001) of the photomask (1000) is greater than the width (MW1) of the zigzag portion of the blocking portion (1001). The blocking portion (1001) of the photomask (1000) includes a slit (1001a). The blocking portion (1001) may include an opaque material. For example, the blocking portion (1001) may include chromium, etc.

[0096] When the photoresist film (PRL) is made of a positive-type resist, the exposed portion of the photoresist film (PRL) is removed. In this case, the photomask (1000) has a blocking portion (1001) in an area corresponding to the area where the data fan-out wiring (181) is to be formed. On the other hand, when the photoresist film (PRL) is made of a negative-type resist, the exposed portion of the photoresist film (PRL) remains. In this case, the photomask (1000) has a transmitting portion (1002) in an area corresponding to the area where the data fan-out wiring (181) is to be formed. Below, the case where the photoresist film (PRL) is made of a positive-type resist is described as an example.

[0097] Referring to FIG. 10, light is provided onto a photomask (1000) to expose and develop a photoresist film (PRL) to form a photoresist pattern (PRP). The exposed portion of the photoresist film (PRL) is removed so that the photoresist pattern (PRP) has the same pattern as the blocking portion (1001) of the photomask (1000). The area where the photoresist pattern (PRP) is located corresponds to the area where the data fan-out wiring (181) is to be formed.

[0098] When using a photomask (1000) that includes a slit (1001a), a small amount of light reaches the area on the photoresist film (PRL) corresponding to the blocking portion (1001). Therefore, the width or height of the photoresist pattern (PRP) is formed smaller compared to the case where a photomask (1000) that does not include a slit (1001a) is used. That is, it is possible to pattern the conductive layer (181a) with a thinner line width by using a photomask (1000) that includes a blocking portion (1001) of the same width.

[0099] Referring to FIG. 11, a zigzag section (185) and a straight section (186) of the data fan-out wiring (181) are formed. The zigzag section (185) and the straight section (186) of the data fan-out wiring (181) are formed by etching the conductive layer (181a) using a photoresist pattern (PRP) as an etching photomask. The conductive layer (181a) can be etched using wet etching. However, it is not limited thereto, and it is also possible to etch it by dry etching.

[0100] The data fan-out wiring (181) may be located in the gate layer and may be electrically connected to the data line (171) located in the data layer of the display area (DA) through an opening (not shown). However, it is not limited thereto, and the data fan-out wiring (181) may be located in the data layer or in a layer other than the gate layer and the data layer.

[0101] Referring to Fig. 12, the photoresist pattern (PRP) is removed.

[0102] The width (DW2) of the straight section (186) of the finally formed data fan-out wiring (181) is greater than the width (DW1) of the zigzag section (185).

[0103] The width (DW2) of the straight portion (186) of the data fan-out wiring (181) may be smaller than the width (MW2) of the straight portion of the blocking portion (1001) of the photomask (1000). Additionally, the width (DW1) of the zigzag portion (185) of the data fan-out wiring (181) may be smaller than the width (MW1) of the zigzag portion of the blocking portion (1001) of the photomask (1000). As described above, if the blocking portion (1001) of the photomask (1000) includes a slit (1001a), a pattern of the conductive layer (181a) having a width smaller than the width of the blocking portion (1001) can be formed. Therefore, even if the blocking portion (1001) is not formed densely, the resolution of the photomask (1000) can be increased by including the slit (1001a), and it is easy to form a finer pattern.

[0104] Although a method for forming data fan-out wiring (181) has been described through FIGS. 7 to 12, this can be applied in the same way when forming gate fan-out wiring (131) of FIG. 4.

[0105] Although embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements by those skilled in the art using the basic concept of the present invention as defined in the following claims also fall within the scope of the present invention. Explanation of the symbols

[0106] 1000: Photomask 1001: Blocking section 1001a: Slit 1002: Transmitting part 110: Substrate 120: Insulating layer 121: Gate line 130: Gate fan-out section 131: Gate fan-out wiring 135, 185: Zigzag section 136, 186: Straight line section 171: Data line 180: Data fan-out section 181: Data fan-out wiring 181a: Conductive layer 300: Display board 400: Gate driver 410: Gate flexible printed circuit board 450: Gate-driven integrated circuit 500: Data-flexible printed circuit board 550: Data Driver Integrated Circuit

Claims

Claim 1 A display device comprising a substrate including a display area and a peripheral area, a first wiring layer extending in a first direction and transmitting a gate signal in the display area, a second wiring layer extending in a second direction and transmitting a data voltage in the display area, a data fan-out section including a first data fan-out wiring connected to the second wiring layer, and a data flexible printed circuit board electrically connected to the first data fan-out wiring in the peripheral area, wherein the first data fan-out wiring includes a first zigzag section having a zigzag shape and a first extension section extending from the first zigzag section and extending to the display area, wherein the first extension section has a constant width, and the first extension section has a first vertical section directly connected to the first zigzag section and a first diagonal section connected to the first vertical section, wherein the first vertical section extends in the second direction and the first diagonal section is inclined with respect to the first direction and the second direction, and the width of the first extension section is greater than the width of the first zigzag section. Claim 2 A display device according to claim 1, wherein the data fan-out section further includes a second data fan-out section adjacent to the first data fan-out section, and the second data fan-out section includes a second zigzag section having a zigzag shape and a second extension section extending from the second zigzag section and extending to the display area, wherein the second extension section has a constant width, and the first zigzag section and the second zigzag section include parts extending in a first direction and parts extending in a second direction crossing the first direction, and the minimum gap between the first zigzag section and the second zigzag section is greater than the gap between the parts extending in the first direction from the first zigzag section. Claim 3 A display device according to paragraph 2, wherein the second data fan-out wiring is located closer to the center of the data fan-out section than the first data fan-out wiring, and the length of the second zigzag section is longer than the length of the first zigzag section. Claim 4 In paragraph 3, a display device in which the length of the first extension is longer than the length of the second extension. Claim 5 In paragraph 4, a display device in which the width of the first data fan-out wiring is greater than the width of the second data fan-out wiring. Claim 6 In paragraph 5, the data flexible printed circuit board is a display device comprising a data driving integrated circuit. Claim 7 In paragraph 6, the above-mentioned peripheral area is a display device including a gate driver. Claim 8 A display device according to claim 1, comprising a gate fan-out portion including a first gate fan-out wiring connected to the first wiring layer, and a gate flexible printed circuit board electrically connected to the first gate fan-out wiring in the peripheral region of the substrate, wherein the first gate fan-out wiring includes a third zigzag portion having a zigzag shape and a third extension portion extending from the third zigzag portion, and the width of the third extension portion is greater than the width of the third zigzag portion. Claim 9 In claim 8, the gate fan-out section further includes a second gate fan-out section adjacent to the first gate fan-out section, and the second gate fan-out section includes a fourth zigzag section having a zigzag shape and a fourth extension section extending from the fourth zigzag section, and the third zigzag section and the fourth zigzag section include sections extending in a first direction and sections extending in a second direction crossing the first direction, and the minimum gap between the third zigzag section and the fourth zigzag section is greater than the gap between the sections extending in the second direction from the third zigzag section. Claim 10 In claim 9, the second gate fan-out wiring is located closer to the center of the gate fan-out section than the first gate fan-out wiring, and the length of the fourth zigzag section is longer than the length of the third zigzag section, in a display device. Claim 11 In paragraph 10, a display device in which the length of the third extension is longer than the length of the fourth extension. Claim 12 In paragraph 11, a display device in which the width of the first gate fan-out wiring is greater than the width of the second gate fan-out wiring. Claim 13 A photomask comprising a transmitting portion that transmits light and a blocking portion that blocks said light, wherein the blocking portion comprises a first zigzag portion having a zigzag shape and a first extension portion extending from the first zigzag portion, wherein the first extension portion has a first vertical portion directly connected to the first zigzag portion and a first diagonal portion connected to the first vertical portion, wherein the first vertical portion extends in a second direction and the first diagonal portion is inclined with respect to the first direction and the second direction, and the width of the first extension portion is greater than the width of the first zigzag portion, and the blocking portion comprises a first slit, wherein the first slit comprises a first portion extending in a zigzag pattern along the center portion with respect to the width direction of the first zigzag portion and a second portion connected to the first portion and extending in a straight line along the center portion with respect to the width direction of the first extension portion. Claim 14 delete Claim 15 In claim 13, the blocking portion further comprises a second zigzag portion having a zigzag shape, a second extension portion extending from the second zigzag portion, and a second slit extending from the second zigzag portion to the second extension portion, wherein the first zigzag portion and the second zigzag portion comprise portions extending in a first direction and portions extending in a second direction crossing the first direction, and the minimum gap between the first zigzag portion and the second zigzag portion is greater than the gap between portions extending in the first direction from the first zigzag portion. Claim 16 In paragraph 15, a photomask in which the length of the second zigzag section is longer than the length of the first zigzag section. Claim 17 A method for manufacturing a display device comprising the steps of: forming a conductive layer on a substrate including a display area and a peripheral area; forming a photoresist film on the conductive layer; exposing and developing the photoresist film using a photomask to form a photoresist pattern; and etching the conductive layer to form a zigzag portion of a fan-out wiring and an extension portion extending from the zigzag portion and extending to the display area, wherein the extension portion of the fan-out wiring has a constant width, and the extension portion has a vertical portion connected to the zigzag portion and a diagonal portion extending in a direction different from the vertical portion, and the width of the extension portion of the fan-out wiring is greater than the width of the zigzag portion of the fan-out wiring. Claim 18 A method for manufacturing a display device according to claim 17, wherein the photomask comprises a blocking portion having a shape corresponding to the fan-out wiring and a transmitting portion being the other region, and the blocking portion comprises a slit extending along the center portion with respect to the width direction of the blocking portion. Claim 19 A method for manufacturing a display device according to claim 18, wherein the width of the fan-out wiring formed in the step of etching the conductive layer to form the zigzag portion and the extension portion of the fan-out wiring is smaller than the width of the blocking portion. Claim 20 In claim 18, the above fan-out wiring is electrically connected to a data driving integrated circuit or a gate driving integrated circuit. A method for manufacturing a display device.

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