Double inspection system for shape and foreign substance existence and nonexistence of inspection object

Abstract

The present invention relates to a dual inspection system for the appearance and presence of foreign substances of a test object. More specifically, it relates to a dual inspection system for the appearance and presence of foreign substances of a test object that allows for the inspection of various types of test objects with different compositions, materials, sizes, etc., using terahertz waves to check for the presence of foreign substances, including insects, plastic, hair, rubber pieces, bubbles, cracks, etc., which may be mixed into the test object during the manufacturing process, while enabling dual inspection of the appearance along with internal inspection of the test object, thereby allowing for more precise inspection and improving the quality and reliability of the test object after inspection.

Description

Technology Field

[0001] The present invention relates to a dual inspection system for the appearance and presence of foreign substances of a test object. More specifically, it relates to a dual inspection system for the appearance and presence of foreign substances of a test object that allows for the inspection of various types of test objects with different compositions, materials, sizes, etc., using terahertz waves to check for the presence of foreign substances, including insects, plastic, hair, rubber pieces, bubbles, cracks, etc., which may be mixed into the test object during the manufacturing process, while enabling dual inspection of the appearance along with internal inspection of the test object, thereby allowing for more precise inspection and improving the quality and reliability of the test object after inspection. Background Technology

[0002] Terahertz waves are penetrating electromagnetic waves, a term formed by combining "tera," meaning 10 to the power of 12, and "Hertz" (Hz), a unit of frequency. Because their wavelength is longer than that of visible light or infrared rays, they have penetration characteristics into various materials that are not penetrated by visible light. Furthermore, they have low energy and are safe from radiation hazards, as they are frequently used in penetration testing, so they do not cause harm to the human body.

[0003] In particular, when terahertz waves are irradiated onto foreign substances such as bubbles, cracks, or metal materials, they have the property of reflecting differently from ordinary transmitted objects.

[0004] A method using terahertz waves radiates terahertz electromagnetic waves onto an object and analyzes the object by comparing an electrical signal generated based on the terahertz electromagnetic waves reflected from the object with a reference signal.

[0005] Korean Patent Publication No. 10-2020-82178 (July 8, 2020) discloses an "inspection device using terahertz waves."

[0006] However, conventional inspection devices using terahertz waves like this have a problem in that it is difficult to expect precise inspection because inspections such as external inspections of the object to be inspected are not performed simultaneously. Prior art literature

[0007] Korean Patent Publication No. 10-2020-82178 (July 8, 2020) 'Inspection device using terahertz waves' The problem to be solved

[0008] The present invention was devised to solve the aforementioned problems, and the objective of the present invention is to provide a dual inspection system for the appearance and presence of foreign substances of a test specimen, which allows for the inspection of various types of test specimens with different compositions, materials, sizes, etc., using terahertz waves to check for the presence of foreign substances, including insects, plastic, hair, rubber pieces, bubbles, cracks, etc., that may be mixed into the test specimen during the manufacturing process, while enabling dual inspection of the external appearance along with internal inspection of the test specimen, thereby enabling more precise inspection and improving the quality and reliability of the test specimen after inspection.

[0009] The problems to be solved by the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0010] To achieve the above-mentioned objective, the present invention comprises: a transfer conveyor on which a test object is placed; a first terahertz light source that irradiates terahertz waves onto the test object placed on the transfer conveyor; a first terahertz camera that forms an optical axis with the first terahertz light source and is positioned opposite the transfer conveyor, and receives the terahertz waves of the first terahertz light source that have passed through the test object; a second terahertz light source that is spaced apart from the first terahertz light source and irradiates terahertz waves on the optical axis of the first terahertz light source so as to intersect the optical axis of the first terahertz light source at the test object; and a second terahertz camera that forms an optical axis with the second terahertz light source and is positioned opposite the transfer conveyor, and receives the terahertz waves of the second terahertz light source that have passed through the test object. A dual inspection system for the appearance and presence of foreign substances of a test object is provided, comprising: an image processing unit that receives terahertz waves from the first and second terahertz cameras and outputs a transmitted image of the test object as an image; and a control unit that receives the image output from the image processing unit and determines whether the test object is defective. The system further comprises an appearance inspection unit that inspects the appearance of the test object, wherein the appearance inspection unit includes a mounting plate positioned at the rear of the transfer conveyor and on which the test object is placed with its upper surface; a shooting means for photographing the test object placed on the mounting plate; and a monitor on which the image captured by the shooting means is displayed. The inspector visually inspects the appearance of the test object through the image displayed on the monitor and takes action according to whether it is defective.

[0011] The control unit according to the present invention receives an image captured by the shooting means and determines whether the external shape of the object in the captured image matches a preset external shape of the object, and the external shape inspection unit further includes a notification unit that indicates abnormality if the external shape of the object differs according to the control of the control unit.

[0012] The mounting plate according to the present invention is made of transparent material, and the imaging means comprises upper and lower cameras for photographing the upper and lower surfaces of the object to be examined; and a plurality of side cameras for photographing the side of the object to be examined.

[0013] Additionally, the dust removal unit further includes a dust removal unit for removing dust present on the object to be inspected, wherein the dust removal unit comprises: a support member whose lower portion is fixed to a surface to be installed; a support member on which the object to be inspected is seated with its upper and lower portions open; a moving means that allows the support member to be supported by the support member while moving the object to be inspected together with the support member in a forward and backward direction according to driving; and a dust removal means disposed in front of the moving means, which contacts the object to be inspected moving in a forward and backward direction according to driving of the moving means, and removes dust present on the surface of the object to be inspected.

[0014] The moving means according to the present invention comprises a cylinder having a rear end fixed to the support and a rod provided at the front end, and the supporting member comprises a supporting ring with open upper and lower ends on which an object to be inspected is placed on the upper surface; and a side wall extending upward from the outer edge of the supporting ring and fixed to the rod, and the dust removal means comprises an upper removal module including an upper roller that is positioned on the upper part of the supporting member and contacts the upper surface of the object to be inspected, with both ends extended in the left-right direction, and an upper frame to which the upper roller is rotatably fixed; a lower removal module including a lower roller that is positioned on the lower part of the supporting member and contacts the lower surface of the object to be inspected, with both ends extended in the left-right direction, and a lower frame to which the lower roller is rotatably fixed; and a supporting means that supports the upper and lower removal modules from the installation target surface.

[0015] The upper frame according to the present invention comprises an upper plate and an upper support member having a 'U' shape with an open bottom, the upper portion of which is fixed to the upper plate and the upper roller is rotatably fixed to the inside; the lower frame comprises a lower plate and a lower support member having a 'U' shape with an open top, the lower portion of which is fixed to the lower plate and the lower roller is rotatably fixed to the inside; the support means comprises a pair of support bars having their lower portions fixed to a surface to be installed and their upper portions passing through both sides of the upper and lower plates, and a plurality of support members screw-coupled to the support bars so as to be positioned at the upper and lower portions of the upper and lower plates; the upper removal module further comprises an upper pressing means for pressing the upper roller against the object to be inspected, and the lower removal module further comprises a lower pressing means for pressing the lower roller against the object to be inspected.

[0016] The upper pressure means according to the present invention comprises an upper movable bar, the lower end of which is fixed to the upper end of the upper support and the upper end of which passes through the upper plate; an upper fixing member screw-coupled to the upper end of the upper movable bar; and an upper spring coupled to the outside of the upper movable bar so as to be positioned at the lower end of the upper plate, and the lower pressure means comprises a lower movable bar, the upper end of which is fixed to the lower end of the lower support and the lower end of which passes through the lower plate; a lower fixing member screw-coupled to the lower end of the lower movable bar; and a lower spring coupled to the outside of the lower movable bar so as to be positioned at the upper end of the lower plate. Effects of the invention

[0017] According to the present invention, for various types of test specimens with different compositions, materials, sizes, etc., the presence or absence of foreign substances including insects, plastic, hair, rubber pieces, bubbles, cracks, etc., which may be mixed into the test specimen during the manufacturing process, etc., can be inspected using terahertz waves, thereby having the effect of preventing in advance side effects such as defects or a decline in reliability that may occur when test specimens in a defective state are distributed to the market.

[0018] In addition, since external inspection can be performed in conjunction with internal inspection using terahertz waves on the test specimen, there is an effect of improving the quality and reliability of the test specimen after inspection, along with more precise inspection of the test specimen.

[0019] The effects of the present invention are not limited to those mentioned above, and other unmentioned problems will be clearly understood by those skilled in the art from the description below. Brief explanation of the drawing

[0020] FIG. 1 is a conceptual diagram schematically illustrating a dual inspection system for the appearance and presence of foreign substances of a test subject according to the present invention. FIG. 2 is a block diagram showing the control state of the control unit in a dual inspection system for the appearance and presence of foreign substances of a test subject according to the present invention. FIG. 3 is a conceptual diagram schematically showing the state in which an external appearance inspection unit is provided in a dual inspection system for the external appearance and presence of foreign substances of a test subject according to the present invention. FIG. 4 is a side view showing a dust removal unit in a dual inspection system for the appearance and presence of foreign substances of a test subject according to the present invention. Figure 5 is an exploded perspective view showing the seating state of the test object on the support member in Figure 4. FIG. 6 is a front view showing the dust removal means in FIG. 4. and Figure 7 is a side view showing the operating state of the dust removal unit in Figure 4. Specific details for implementing the invention

[0021] Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the attached drawings.

[0022] Referring to FIGS. 1 to 3, the dual inspection system for the appearance and presence of foreign substances of a test subject according to the present invention (hereinafter referred to as the "inspection system") may include a transfer conveyor (10), a first terahertz light source (20), a first terahertz camera (30), a second terahertz light source (40), and a second terahertz camera (50).

[0023] The conveyor (10) can be provided in a single-axis conveying form capable of conveying the test specimen (100) one by one, and can form a conveying path through which the test specimen (100) is conveyed.

[0024] The test specimen (100) can be understood as a target for testing for the presence of foreign substances, including insects, plastic, hair, rubber pieces, etc., or bubbles, cracks, etc., that may be mixed into the test specimen during the manufacturing process, etc.

[0025] The specimen (100) can be formed in various shapes and can be formed in a plate shape.

[0026] The specimen (100) can be transported in one direction or in both directions along the transport path while seated on the transport conveyor (10).

[0027] The object to be inspected (100) can be placed at the rear end of the transfer conveyor (10) and can proceed forward according to the operation of the transfer conveyor (10).

[0028] In the present invention, it has been described that the object to be inspected (100) is placed on a conveyor (10) and transported, but it is not limited thereto. The object to be inspected (100) may also be inspected using a first terahertz light source (20), a first terahertz camera (30), a second terahertz light source (40), and a second terahertz camera (50) while the object to be inspected (100) is placed on a fixed table.

[0029] The conveyor (10) on which the test object (100) is placed may be made of a material that allows terahertz waves to pass through, such as plastic, Teflon, or fiber.

[0030] The first terahertz light source (20) is positioned below the conveyor (10) and can irradiate terahertz waves onto a test object (100) being transported along the transport path.

[0031] The first terahertz light source (20) is positioned at an angle to the transport path of the object to be examined (100) so as to irradiate terahertz waves toward the object to be examined (100).

[0032] The first terahertz camera (30) forms an optical axis with the first terahertz light source (20) and can be positioned on the upper side of the transfer conveyor (10).

[0033] The first terahertz camera (30) can receive terahertz waves that are irradiated from the first terahertz light source (20) and pass through the object to be inspected (100).

[0034] The first terahertz camera (30), like the first terahertz light source (20), can be positioned at an angle to the transport path of the object to be inspected (100).

[0035] Accordingly, the first terahertz camera (30) and the first terahertz light source (20) can be positioned opposite each other with the transfer conveyor (10) in between, forming an optical axis.

[0036] The second terahertz light source (40) can be positioned on the lower side of the transfer conveyor (10) while being spaced apart from the first terahertz light source (20).

[0037] The second terahertz light source (40) can irradiate terahertz waves on the optical axis of the first terahertz light source (20) so as to intersect, for example, at the object to be examined (100), at an angle with respect to the optical axis of the first terahertz light source (20).

[0038] The second terahertz camera (50) forms an optical axis with the second terahertz light source (40) and can be positioned on the upper side of the transfer conveyor (10).

[0039] The second terahertz camera (50) can receive terahertz waves that are irradiated from the second terahertz light source (40) and pass through the object to be inspected (100).

[0040] The second terahertz camera (50), like the second terahertz light source (40), can be positioned at an angle to the transport path of the object to be inspected (100).

[0041] Accordingly, the second terahertz camera (50) and the second terahertz light source (40) can be positioned opposite each other with the transfer conveyor (10) in between.

[0042] Additionally, the optical axis of the first terahertz light source (20) and the optical axis of the second terahertz light source (40) may intersect in the object to be examined (100).

[0043] The inspection system may further include an image processing unit (60) that outputs a transmission image of the object to be inspected (100).

[0044] The terahertz waves received from the first terahertz camera (30) and the second terahertz camera (50), respectively, can be converted into electronic signals and transmitted to the image processing unit (60).

[0045] The image processing unit (60) can receive terahertz waves from the first and second terahertz cameras (30, 50) and obtain, i.e., output an image of the object to be inspected (100).

[0046] The inspection system may further include a control unit (70) that receives an image of the object to be inspected (100) output from an image processing unit (60) and determines whether the object to be inspected (100) is defective.

[0047] The control unit (70) may also control the operation of the transfer conveyor (10), the first terahertz light source (20), the first terahertz camera (30), the second terahertz light source (40), and the second terahertz camera (50).

[0048] The image may appear depending on whether the terahertz waves irradiated from the first and second terahertz light sources (20, 40) are received or blocked by the first and second terahertz cameras (30, 50).

[0049] That is, the image may appear as a transmission image of the object (100) obtained by receiving terahertz waves received by the first terahertz camera (30) as shown in the upper left and right corners of FIG. 1, and a transmission image of the object (100) obtained by receiving terahertz waves received by the second terahertz camera (50).

[0050] The control unit (70) receives an image output from the image processing unit (60) and can determine that the object to be inspected (100) is defective.

[0051] The inspection system may further include a display unit (80) that indicates whether the object to be inspected (100) is defective based on the determination of defects by the control unit (70).

[0052] The display unit (80) can be made of a lamp or a sound generator and can output light or sound.

[0053] When examining the method of investigating whether there are defects in a test object using an inspection system, the inspection system can irradiate the test object (100) with terahertz waves from a first terahertz light source (20) and a second terahertz light source (40) so as to cross each other when the test object (100) is transported along the transport path of a transport conveyor (10).

[0054] At this time, if foreign substances such as insects, plastic, hair, rubber pieces, or bubbles, cracks, etc. are present inside the object to be inspected (100), the terahertz waves irradiated onto the object to be inspected (100) from the first and second terahertz light sources (20, 40) may be reflected by the foreign substances and may not be received by the first and second terahertz cameras (30, 50). Accordingly, the foreign substances are displayed in the image output from the image processing unit (60), and the defect status of the object to be inspected can be determined.

[0055] Conversely, if there is no foreign substance inside the object to be examined (100), the terahertz waves irradiated onto the object to be examined (100) from the first and second terahertz light sources (20, 40) pass through the object to be examined (100) and can be received by the first and second terahertz cameras (30, 50).

[0056] Terahertz waves received from the first and second terahertz cameras (30, 50) can be converted into electronic signals and transmitted to the image processing unit (60).

[0057] The image processing unit (60) can acquire, i.e., output an image of the object to be inspected (100) by receiving terahertz waves received by the first and second terahertz cameras (30, 50).

[0058] The control unit (70) can identify surface foreign substances (110a) and internal foreign substances (110b) from the image obtained from the first terahertz camera (30) as well as from the image obtained from the second terahertz camera (50) because the terahertz waves irradiated from the first terahertz light source (20) and the terahertz waves irradiated from the second terahertz light source (40) are irradiated to intersect the object to be inspected (100).

[0059] The display unit (80) can be operated by the control unit (70) based on the determination of whether there is a foreign substance in the control unit (70), and can output light or sound to the outside to indicate that the object to be inspected (100) is defective.

[0060] Accordingly, inspected items deemed defective may be separated from normal items and disposed of.

[0061] As illustrated in FIG. 1, the inspection system is shown with a first terahertz light source (20) and a second terahertz light source (40) positioned on the lower side of the transfer conveyor (10) and a first terahertz camera (30) and a second terahertz camera (50) positioned on the upper side of the transfer conveyor (10), but is not limited thereto, and the first terahertz light source (20) and the second terahertz light source (40) may be positioned on the upper side of the transfer conveyor (10) and the first terahertz camera (30) and the second terahertz camera (50) may be positioned on the lower side of the transfer conveyor (10).

[0062] The inspection system according to the present invention may further include an external appearance inspection unit (90) for inspecting the external appearance of a test object (100).

[0063] Accordingly, the inspection system can perform a double inspection by conducting an external inspection along with an internal inspection of the object (100).

[0064] The external inspection unit (90) can inspect the external appearance of the object (100) before the object (100) is passed to the first and second terahertz light sources (20, 40).

[0065] The external inspection unit (90) may include a mounting plate (91) positioned at the rear of the transfer conveyor (10), a shooting means (92) for photographing an object (100) mounted on the mounting plate (91), and a monitor (93) for outputting an image captured by the shooting means (92).

[0066] The mounting plate (91) can be positioned at the rear of the transfer conveyor (10) and can have a certain area so that the object to be inspected (100) is mounted on its upper surface.

[0067] The shooting means (92) may include an upper camera (92a) that is positioned on the upper side of the mounting plate (91) and photographs the upper surface of the object to be inspected (100).

[0068] The specimen (100) can be artificially flipped over from the state in which it is placed on the mounting plate (91), and the upper and lower parts can be photographed sequentially.

[0069] Alternatively, the mounting plate (91) may be made of transparent material, and the shooting means (92) may further include a lower camera (92b) for shooting the lower surface of the object to be inspected and a plurality of side cameras (92c) for shooting the side of the object to be inspected (100).

[0070] The monitor (93) may be composed of a single or multiple units, and may display an image captured by the shooting means (92).

[0071] An inspector or other person inspecting the specimen (100) can visually inspect the appearance of the specimen (100) through an image displayed on a monitor (93).

[0072] The inspector, etc., can visually inspect whether there are any damaged or deformed parts on the surface of the test object (100) through the monitor (93).

[0073] The control unit (70) receives an image captured by the shooting means (92) and can determine whether the shape of the object to be inspected (100) that is set in advance matches the shape of the object to be inspected in the captured image.

[0074] The external appearance of the object to be inspected (100) may be a shape that forms the external appearance, or a standard including the width, length, height, etc.

[0075] The external appearance inspection unit (90) may further include a notification unit (94) that indicates abnormality when the external appearance of the object to be inspected (100) differs from a preset external appearance according to the control of the control unit (70).

[0076] The notification unit (94) is composed of a lamp or a sound generator, etc., and can output light or sound, and can notify the outside that the inspection object (100) is defective by operating under the control of the control unit (70).

[0077] If a defect is found in the test object (100), the test object (100) can be separated as a defective product and discarded without proceeding to the first and second terahertz light sources (20, 40).

[0078] The inspection system can inspect the object (100) through internal inspection using terahertz waves and external inspection, thereby enabling fast and precise inspection of the object, as well as improving the quality and reliability of the item after inspection.

[0079] After the inspection of the object (100) is completed in the external inspection section (90), it is placed on the transfer conveyor (10) and proceeds to the first and second terahertz light sources (20, 40) so that an internal inspection can be performed. The object (100) can be transferred to the transfer conveyor (10) by a separate suction transfer means (not shown) from the state in which it is placed on the mounting plate (91).

[0080] The inspection system may further include a dust removal unit (200) for removing dust, etc. present on the surface of the object to be inspected (100), as illustrated in FIGS. 4 to 7.

[0081] The dust removal unit (200) can prevent inspection errors or an increase in the defect rate of the object due to dust present on the surface of the object (100), and enable a more precise inspection.

[0082] To this end, the dust removal unit (200) may include a support post (210) whose lower part is fixed to the surface to be installed, a support frame (220) in which the upper and lower parts are open and the object to be inspected (100) is seated inside, a moving means (230) which allows the support frame (220) to be supported by the support post (210) and, at the same time, allows the object to be inspected (100) to move in the forward and backward directions together with the support frame (220) according to the operation, and a dust removal means (240) which is positioned in front of the moving means (230) and comes into contact with the object to be inspected (100) moving in the forward and backward directions according to the operation of the moving means (230) and removes dust present on the surface of the object to be inspected (100).

[0083] The surface to be installed may consist of an outdoor ground surface or an indoor floor surface.

[0084] The support (210) can stably support the moving means (230) while its lower part is fixed to the surface to be installed.

[0085] The support frame (220) may include a support ring (221) on which the object to be inspected (100) is seated on the upper surface while the upper and lower ends are open, and a side wall (222) extending upward from the outer edge of the support ring (221).

[0086] The support ring (221) has the same shape as the object to be inspected (100), and the width between the inner and outer surfaces is formed to be as short as possible, thereby enabling dust removal by the dust removal means (240) on the lower surface of the object to be inspected (100) that is seated on the upper surface.

[0087] The side wall (222) is formed to extend upward from the outer edge of the support ring (221) and can prevent the test object (100) seated on the support ring (221) from escaping to the outside. It is preferable that the side wall (222) does not protrude upward above the test object (100).

[0088] The moving means (230) may be composed of a cylinder in which the rear end is fixed to the support (210) and the front end is equipped with a rod (231).

[0089] The support frame (220) can be moved in the forward and backward directions according to the operation of the moving means (230) while the rear portion is fixed to the rod (231).

[0090] The dust removal means (240) may include an upper removal module (250) comprising an upper roller (251) that is formed with both ends extending in the left and right directions and is positioned on the upper part of the support frame (220) and contacts the upper surface of the object to be inspected (100), and an upper frame (252) to which the upper roller (251) is rotatably fixed; a lower removal module (260) comprising a lower roller (261) that is formed with both ends extending in the left and right directions and is positioned on the lower part of the support frame (220) and contacts the lower surface of the object to be inspected (100), and a lower frame (262) to which the lower roller (261) is rotatably fixed; and a support means (270) that supports the upper and lower removal modules (250, 260) from the installation target surface.

[0091] The upper frame (252) may include an upper plate (253), an upper support (254) that forms a 'U' shape with an open bottom, has its upper portion fixed to the upper plate (253), and has an upper roller (251) rotatably fixed to the inside.

[0092] The lower frame (262) may include a lower plate (263), a lower support (264) that forms a 'U' shape with an open top and has its lower part fixed to the lower plate (263), and has a lower roller (261) rotatably fixed to the inside.

[0093] The support means (270) may include a pair of support bars (271) whose lower portions are fixed to the surface to be installed and whose upper portions pass through both sides of the upper and lower plates (253, 263), and a plurality of support members (272) that are screw-coupled to the support bars (271) so as to be positioned at the upper and lower portions of the upper and lower plates (253, 263).

[0094] The upper and lower rollers (251, 262) can remove dust and other particles present on the surface of the object to be inspected (100) as fine bristles are formed.

[0095] The upper and lower rollers (251, 161) can be rotated while in contact with the object to be inspected (100) that moves in the forward and backward directions according to the driving of the conveying means (230).

[0096] As a result, the upper and lower rollers (251, 161) can remove dust and other debris present on the surface of the object to be inspected (100).

[0097] The upper removal module (250) may further include an upper pressing means (255) that presses the upper roller (251) against the object to be inspected (100).

[0098] The upper pressure means (255) may include an upper moving bar (256) whose lower part is fixed to the upper part of the upper support (254) and whose upper part passes through the upper plate (253), an upper fixing member (257) which is screw-coupled to the upper part of the upper moving bar (256), and an upper spring (258) which is coupled to the outside of the upper moving bar (256) so as to be positioned at the lower part of the upper plate (253).

[0099] The lower removal module (260) may further include a lower pressing means (265) that presses the lower roller (261) against the object to be inspected (100).

[0100] The lower pressure means (265) may include a lower moving bar (266) whose upper part is fixed to the lower part of the lower support (264) and whose lower part passes through the lower plate (263), a lower fixing member (267) which is screw-coupled to the lower part of the lower moving bar (266), and a lower spring (268) which is coupled to the outside of the lower moving bar (266) so as to be positioned on the upper part of the lower plate (263).

[0101] The upper spring (258) can press the upper support (254) downward from the upper plate (253) so that the upper roller (251) comes into contact with the object to be inspected (100).

[0102] The lower spring (268) can press the lower support (264) upward from the lower plate (263) so that the lower roller (261) comes into contact with the object to be inspected (100).

[0103] The object to be inspected (100), for which dust removal work has been completed in the dust removal unit (200), can be withdrawn from the support frame (220) and placed on the mounting plate (91).

[0104] The specimen (100) can be transferred to the mounting plate (91) while being withdrawn from the support frame (220) by a separate adsorption transfer means (not shown).

[0105] The dust removal unit (200) may further include an air injection means (not shown) for injecting air into the object (100) withdrawn from the support frame (220).

[0106] The air injection means can remove dust and other particles that may be present in the part in contact with the support frame (220) by injecting air into the object to be inspected (100) when the object to be inspected (100) is separated from the support frame (220).

[0107] As a result, the dust removal unit (200) can remove dust and other substances present on the object to be inspected (100), thereby enabling a more efficient double inspection of the object to be inspected (100) regarding its appearance and the presence or absence of foreign substances.

[0108] The above description is merely an example of an embodiment for implementing a dual inspection system for the appearance and presence of foreign substances of a test subject according to the present invention. The present invention is not limited to the above-described embodiment, and the technical spirit of the present invention extends to the scope in which various modifications can be made by anyone with ordinary knowledge in the field to which the invention belongs, without departing from the gist of the invention as claimed in the following patent claims. Explanation of the symbols

[0109] 10: Transfer conveyor 20: First terahertz light source 30: First terahertz camera 40: Second terahertz light source 50: Second terahertz camera 60: Image processing unit 70: Control unit 80: Display unit 90: Appearance inspection unit 100: Object to be inspected 200: Dust removal unit 210: Support Column 220: Support frame 230: Moving means 240: Dust removal means 250: Upper removal module 251: Upper roller 260: Lower removal module 261: Lower roller 270: Support means

Claims

Claim 1 A transfer conveyor on which a test object is placed; a first terahertz light source that irradiates terahertz waves onto the test object placed on the transfer conveyor; a first terahertz camera that forms an optical axis with the first terahertz light source and is positioned opposite the transfer conveyor, receiving terahertz waves from the first terahertz light source that have passed through the test object; a second terahertz light source that is spaced apart from the first terahertz light source and irradiates terahertz waves onto the optical axis of the first terahertz light source so as to intersect the optical axis of the first terahertz light source at the test object; a second terahertz camera that forms an optical axis with the second terahertz light source and is positioned opposite the transfer conveyor, receiving terahertz waves from the second terahertz light source that have passed through the test object; An inspection system for a test object comprising: an image processing unit that receives terahertz waves from the first and second terahertz cameras and outputs a transmitted image of the test object as a video image; and a control unit that determines whether the test object is defective, wherein the system further comprises: an external appearance inspection unit that inspects the external appearance of the test object before inspecting for the presence of foreign substances; a display unit that outputs light or sound to indicate the presence of foreign substances in the test object; and a dust removal unit that removes dust present in the test object before inspecting its external appearance, wherein the external appearance inspection unit comprises: a mounting plate positioned at the rear of the transfer conveyor and upon which the test object is placed on its upper surface; a shooting means for photographing the test object placed on the mounting plate; and a monitor on which the image captured by the shooting means is displayed. and includes a notification unit that outputs light or sound to indicate that the external appearance of the object to be inspected is abnormal, and the control unit receives an image output from the image processing unit and, if foreign matter is present in the object to be inspected, determines it as defective and controls the display unit to operate, and receives an image captured by the shooting means and determines whether the external appearance of the object to be inspected in the captured image matches the pre-set external appearance of the object to be inspected, and if a defect is found, determines it as defective and controls the notification unit to operate, and the dust removal unit includes a support post whose lower part is fixed to the surface to be installed;A dual inspection system for the external appearance and presence of foreign substances of a test object, comprising: a support frame having its upper and lower ends open and a test object placed on its inner side; a moving means that allows the support frame to be supported by the support column while moving the test object together with the support frame in the forward and backward directions according to the drive; a dust removal means positioned in front of the moving means, which contacts the test object moving in the forward and backward directions according to the drive of the moving means and removes dust present on the surface of the test object; and an air injection means that sprays air onto the test object drawn from the support frame to remove dust present on the part in contact with the support frame, wherein the support frame comprises: a support ring having its upper and lower ends open and a test object placed on its upper surface; and a side wall that is formed extending upward from the outer edge of the support ring, which does not protrude upward above the test object, prevents the test object placed on the support ring from escaping to the outside, and is fixed to the moving means. Claim 2 delete Claim 3 A dual inspection system for the appearance and presence of foreign substances of a test object, characterized in that, in claim 1, the mounting plate is made of transparent material, and the imaging means comprises upper and lower cameras for photographing the upper and lower surfaces of the test object; and a plurality of side cameras for photographing the side of the test object. Claim 4 delete Claim 5 In claim 1, the moving means comprises a cylinder having a rear end fixed to the support and a rod provided at the front end, and the dust removal means comprises: an upper removal module including an upper roller having both ends extended in the left-right direction and positioned on the upper part of the support frame to contact the upper surface of the object to be inspected, an upper frame to which the upper roller is rotatably fixed, and an upper pressing means for pressing the upper roller onto the object to be inspected; and a lower removal module including a lower roller having both ends extended in the left-right direction and positioned on the lower part of the support frame to contact the lower surface of the object to be inspected, a lower frame to which the lower roller is rotatably fixed, and a lower pressing means for pressing the lower roller onto the object to be inspected. The apparatus includes a support means for supporting the upper and lower removal modules from the installation target surface, wherein the upper frame comprises an upper plate and an upper support member having a 'U' shape with an open bottom, the upper portion of which is fixed to the upper plate and the upper roller is rotatably fixed to the inside, and the lower frame comprises a lower plate and a lower support member having a 'U' shape with an open top, the lower portion of which is fixed to the lower plate and the lower roller is rotatably fixed to the inside, and the support means comprises a pair of support bars having their lower portions fixed to the installation target surface and their upper portions passing through both sides of the upper and lower plates, and a plurality of support members screw-coupled to the support bars so as to be positioned at the upper and lower portions of the upper and lower plates, and the upper pressure means comprises an upper movable bar having its lower portion fixed to the upper portion of the upper support member and its upper portion passing through the upper plate; and an upper fixing member screw-coupled to the upper portion of the upper movable bar. A dual inspection system for the appearance and presence of foreign substances of an object to be inspected, comprising: an upper spring coupled to the outside of the upper moving bar so as to be positioned at the bottom of the upper plate; and a lower pressing means comprising: a lower moving bar whose upper portion is fixed to the bottom of the lower support and whose lower portion passes through the bottom plate; a lower fixing member screw-coupled to the bottom of the lower moving bar; and a lower spring coupled to the outside of the lower moving bar so as to be positioned at the top of the bottom plate. Claim 6 delete Claim 7 delete

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