Actuator and actuator system including the same

Abstract

An actuator system according to some embodiments of the concept of the present invention comprises an electroactive polymer membrane; and a spring surrounded by said electroactive polymer membrane, wherein at least a portion of the spring is disposed within said electroactive polymer membrane.

Description

Technology Field

[0001] The present invention relates to an actuator and an actuator system including the same, and more specifically, to an actuator including an electroactive polymer membrane and an actuator system including the same. Background Technology

[0002] Electroactive polymers are materials that exhibit movement when voltage is applied, possessing various advantages such as fast response speed, large deformation, low power consumption, and excellent processability, as well as characteristics similar to human muscles. Various methods are being studied to develop actuators with excellent operating characteristics and miniaturization using electroactive polymers. The problem to be solved

[0003] Embodiments of the concept of the present invention aim to provide an actuator with improved operating characteristics and reliability, and an actuator system including the same. means of solving the problem

[0004] An actuator system according to some embodiments comprises an electroactive polymer membrane; and a spring surrounded by said electroactive polymer membrane, wherein at least a portion of the spring may be disposed within said electroactive polymer membrane.

[0005] An actuator according to some embodiments comprises an electroactive polymer membrane including an upper portion, a lower portion, and a side wall connecting the upper portion and the lower portion; a connector in contact with the lower surface of the upper portion of the electroactive polymer membrane; and a spring in contact with the lower surface of the connector, wherein the spring can penetrate the lower portion of the electroactive polymer membrane. Effects of the invention

[0006] An actuator according to embodiments of the concept of the present invention and an actuator system including the same include a spring surrounded by an electroactive polymer membrane, so that the shape of the actuator can be deformed in a specific direction and it can be easy to manufacture into a miniaturized structure.

[0007] An actuator according to embodiments of the concept of the present invention and an actuator system including the same include a spring surrounded by an electroactive polymer membrane, so that when an alternating voltage is applied to the actuator, the phenomenon of attenuation of the amount of deformation can be reduced. Brief explanation of the drawing

[0008] FIG. 1a is a plan view of an actuator system according to some embodiments. Figure 1b is a cross-sectional view along the line I-I' of Figure 1a. FIG. 2a is an exploded perspective view of an actuator according to some embodiments. FIG. 2b is a cross-sectional view of an actuator according to some embodiments. FIG. 3 is a drawing for explaining a driving method of an actuator system according to some embodiments. Figure 4 is an enlarged view of the active actuator of Figure 3. FIGS. 5a and 5b are graphs showing the change in length of an actuator relative to the frequency of an alternating voltage applied to the actuator according to some embodiments. FIGS. 6a and 6b are graphs showing the change in actuator length relative to the intensity of the alternating current voltage applied to the actuator according to some embodiments. FIG. 7a is a drawing showing a wearable device including an actuator according to some embodiments. FIG. 7b is a drawing showing a joint including an actuator according to some embodiments. FIG. 7c is a drawing showing a gripper including an actuator according to some embodiments. Specific details for implementing the invention

[0009] Hereinafter, an actuator according to embodiments of the concept of the present invention and an actuator system including the same will be described in detail with reference to the drawings.

[0011] FIG. 1a is a plan view of an actuator system according to some embodiments. FIG. 1b is a cross-sectional view along the line I-I' of FIG. 1a.

[0012] Referring to FIGS. 1a and 1b, a substrate (100) may be provided. In some embodiments, the substrate (100) may be a flexible printed circuit board (Flexible PCB). The substrate (100) may have the form of a plate extending along a plane extending in a first direction (D1) and a second direction (D2). The first direction (D1) and the second direction (D2) may intersect each other. For example, the first direction (D1) and the second direction (D2) may be horizontal directions orthogonal to each other.

[0013] A plurality of actuators (200) may be provided on a substrate (100). The actuators (200) may be arranged in a first direction (D1) and a second direction (D2). The actuators (200) may be spaced apart from each other.

[0014] A support member (300) may be provided on a substrate (100). The support member (300) may surround actuators (200). The support member (300) and the actuators (200) may be spaced apart. The support member (300) may include a first part (300_1) and a second part (300_2) that are spaced apart from each other in a first direction (D1). The support member (300) may include a third part (300_3) and a fourth part (300_4) that are spaced apart from each other in a second direction (D2). The first part (300_1) and the second part (300_2) may extend in the second direction (D2). The third part (300_3) and the fourth part (300_4) may extend in the first direction (D1).

[0015] The first part (300_1) and the third part (300_3) of the support member (300) can be connected. The first part (300_1) and the fourth part (300_4) of the support member (300) can be connected. The second part (300_2) and the third part (300_3) of the support member (300) can be connected. The second part (300_2) and the fourth part (300_4) of the support member (300) can be connected.

[0016] The actuator (200) may be positioned between the first part (300_1) and the second part (300_2) of the support member (300). The actuator (200) may be positioned between the third part (300_3) and the fourth part (300_4) of the support member (300).

[0017] The thickness of the support member (300) and the actuator (200) in the third direction (D3) may be the same. In some embodiments, the thickness of the support member (300) in the third direction (D3) may be greater than the thickness of the actuator (200) in the third direction (D3).

[0018] A heating member (400) may be provided on actuators (200) and a support member (300). The heating member (400) may be in contact with the upper surfaces of the actuators (200) and the upper surface of the support member (300). The support member (300) may be in contact with the lower surface (400_B) of the heating member (400). The upper surfaces of the first part (300_1) and the second part (300_2) of the support member (300) may be in contact with the lower surface (400_B) of the heating member (400).

[0019] In some embodiments, the heating element (400) may have the form of a film. In some embodiments, the heating element (400) may be parallel to the first direction (D1) and the second direction (D2). In some embodiments, the heating element (400) may include a conductive material.

[0020] A stiffness-tunable polymer film (500) may be provided on the heating portion (400). The lower surface (500_B) of the stiffness-tunable polymer film (500) may be in contact with the upper surface (400_T) of the heating portion (400). The stiffness-tunable polymer film (500) may include a stiffness-tunable polymer material.

[0021] A heating unit (400) may be provided between the rigid variable polymer membrane (500) and the actuator (200). The rigid variable polymer membrane (500) and the actuator (200) may be separated by the heating unit (400). A heating unit (400) may be provided between the rigid variable polymer membrane (500) and the support unit (300). The rigid variable polymer membrane (500) and the support unit (300) may be separated by the heating unit (400).

[0022] An actuator system according to some embodiments includes a heating element (400) and a rigidity variable polymer membrane (500) on an actuator (200), and the operation of the rigidity variable polymer membrane (500) and the actuator (200) can be controlled using the heating element (400).

[0023] An actuator system according to some embodiments includes a support member (300) surrounding the actuator (200) to prevent the position of the rigid variable polymer membrane (500) from shifting when the shape of the rigid variable polymer membrane (500) changes.

[0024] In some embodiments, the actuator system has a relatively large rigidity of the support member (300), so that the shape of the support member (300) is maintained constant during the operation of the actuator (200), and accordingly, it may be easy to control the operation of the rigidity variable polymer membrane (500).

[0025] An actuator system according to some embodiments uses a flexible printed circuit board as the substrate (100) so that the connection stability between the actuator (200) and the substrate (100) can be increased even if the shape of the actuator (200) changes.

[0027] FIG. 2a is an exploded perspective view of an actuator according to some embodiments. FIG. 2b is a cross-sectional view of an actuator according to some embodiments.

[0028] Referring to FIGS. 2a and 2b, the actuator (200) may include a lower fixed part (201), a spring (202), a connector (203), an electroactive polymer membrane (204), and an upper fixed part (205).

[0029] In some embodiments, the lower fixing part (201) may have a ring shape in a planar manner. The area of ​​the upper surface (201_T) and the area of ​​the lower surface (201_B) of the lower fixing part (201) may be the same. The upper surface (201_T) and the lower surface (201_B) of the lower fixing part (201) may be flat. The upper surface (201_T) and the lower surface (201_B) of the lower fixing part (201) may be parallel. The upper surface (201_T) of the lower fixing part (201) may be parallel to the first direction (D1) and the second direction (D2). The lower surface (201_B) of the lower fixing part (201) may be parallel to the first direction (D1) and the second direction (D2).

[0030] The lower fixing part (201) may include an outer wall (201_OS) and an inner wall (201_IS). A lower hole (201_H) may be defined inside the lower fixing part (201) by the inner wall (201_IS) of the lower fixing part (201). The lower hole (201_H) may have a circular shape in planar form. The diameter of the lower hole (201_H) may be smaller than the diameter of the outer wall (201_OS) of the lower fixing part (201). The width (L1) of the lower fixing part (201) in the first direction (D1) may be greater than the thickness of the lower fixing part (201) in the third direction (D3).

[0031] The outer wall (201_OS) of the lower fixing part (201) can connect the upper surface (201_T) and the lower surface (201_B). The inner wall (201_IS) of the lower fixing part (201) can connect the upper surface (201_T) and the lower surface (201_B). The area of ​​the outer wall (201_OS) of the lower fixing part (201) may be larger than the area of ​​the inner wall (201_IS).

[0032] A spring (202) may be provided on the lower fixed part (201). The spring (202) may come into contact with the upper surface (201_T) of the lower fixed part (201). The diameter of the spring (202) may increase as it approaches the lower fixed part (201).

[0033] The spring (202) may include an upper portion (202_U) and a lower portion (202_L). In some embodiments, the upper portion (202_U) and the lower portion (202_L) of the spring (202) may have a ring shape in planar form. The width of the lower portion (202_L) of the spring (202) in the first direction (D1) may be greater than the width of the upper portion (202_U) of the spring (202) in the first direction (D1).

[0034] The lowest part (202_L) of the spring (202) may come into contact with the upper surface (201_T) of the lower fixed part (201). The width (L2) of the lowest part (202_L) of the spring (202) in the first direction (D1) may be smaller than the width (L1) of the lower fixed part (201) in the first direction (D1). The stiffness of the spring (202) may be lower than the stiffness of the support part (300, FIG. 1B).

[0035] In some embodiments, the spring (202) may comprise stainless steel. For example, the spring may comprise SUS304. In some embodiments, the spring constant of the spring (202) may be 0.04 N / m or more and 0.16 N / m or less. In some embodiments, the spring constant of the spring (202) may be 0.16 N / m or more.

[0036] A connector (203) may be provided on a spring (202). The lower surface (203_B) of the connector (203) may be in contact with the spring (202). The connector (203) may be in contact with the upper surface (202_U) of the spring (202). In some embodiments, the upper surface (203_T) and the lower surface (203_B) of the connector (203) may have a circular shape. The area of ​​the upper surface (203_T) and the lower surface (203_B) of the connector (203) may be equal. The width of the connector (203) in the first direction (D1) may be greater than the thickness of the connector (203) in the third direction (D3).

[0037] The width of the connector (203) in the first direction (D1) may be smaller than the width (L2) in the first direction (D1) of the lowest part (202_L) of the spring (202). The width of the connector (203) in the second direction (D2) may be smaller than the width in the second direction (D2) of the lowest part (202_L) of the spring (202). In some embodiments, the width of the connector (203) in the first direction (D1) may be equal to the width in the first direction (D1) of the upper part (202_U) of the spring (202).

[0038] The diameter of the spring (202) may increase as it moves away from the connector (203). The width of the spring (202) in the first direction (D1) may increase as it moves away from the connector (203). The stiffness of the connector (203) may be greater than the stiffness of the spring (202).

[0039] An electroactive polymer membrane (204) may be provided on the connector (203). The electroactive polymer membrane (204) may include a lower portion (204_L), an upper portion (204_U), and a side wall (204_S). The side wall (204_S) of the electroactive polymer membrane (204) may connect the upper portion (204_U) and the lower portion (204_L).

[0040] The electroactive polymer membrane (204) can cover the spring (202). The lower part (204_L) of the electroactive polymer membrane (204) can come into contact with the lowest part (202_L) of the spring (202). The side wall (204_S) and lower part (204_L) of the electroactive polymer membrane (204) can surround the spring (202).

[0041] The spring (202) can penetrate the lower part (204_L) of the electroactive polymer membrane (204). At least a portion of the spring (202) can be placed within the electroactive polymer membrane (204). For example, the upper part (202_U) of the spring (202) can be placed within the electroactive polymer membrane (204).

[0042] The sidewall (204_S) of the electroactive polymer membrane (204) may include a first surface (204_S1) and a second surface (204_S2). In some embodiments, the first surface (204_S1) may be in contact with a spring (202). The first surface (204_S1) may be connected to the lower surface of the lower part (204_L) of the electroactive polymer membrane (204) and the lower surface (204_UB) of the upper part (204_U). The second surface (204_S2) may be connected to the upper surface of the lower part (204_L) of the electroactive polymer membrane (204) and the upper surface of the upper part (204_U).

[0043] The lower surface (204_UB) of the upper surface (204_U) of the electroactive polymer membrane (204) may come into contact with the upper surface (203_T) of the connector (203). The area of ​​the lower surface (204_UB) of the upper surface (204_U) of the electroactive polymer membrane (204) may be equal to the area of ​​the upper surface (203_T) of the connector (203).

[0044] The width (L3) in the first direction (D1) of the lower part (204_L) of the electroactive polymer membrane (204) may be greater than the width (L4) in the first direction (D1) of the upper part (204_U) of the electroactive polymer membrane (204). The width in the second direction (D2) of the lower part (204_L) of the electroactive polymer membrane (204) may be greater than the width in the second direction (D2) of the upper part (204_U) of the electroactive polymer membrane (204).

[0045] The upper surface and lower surface (204_UB) of the upper part (204_U) of the electroactive polymer membrane (204) may be parallel to the first direction (D1) and the second direction (D2). The upper surface and lower surface of the lower part of the electroactive polymer membrane (204) may be parallel to the first direction (D1) and the second direction (D2). The upper part (204_U) of the electroactive polymer membrane (204) may have a circular shape in planar form. The lower part (204_L) of the electroactive polymer membrane (204) may have a ring shape in planar form. The diameter of the lower part (204_L) of the electroactive polymer membrane (204) may be larger than the diameter of the upper part (204_U).

[0046] The side wall (204_S) of the electroactive polymer membrane (204) may be inclined with respect to the upper (204_U) and lower (204_L). The angle (A1) between the first surface (204_S1) of the electroactive polymer membrane (204) and the lower surface (204_UB) of the upper (204_U) of the electroactive polymer membrane may be greater than 90 degrees and less than 180 degrees.

[0047] An upper fixing portion (205) may be provided on an electroactive polymer membrane (204). In some embodiments, the upper fixing portion (205) may have a ring shape in a planar manner. The area of ​​the upper surface (205_T) and the area of ​​the lower surface (205_B) of the upper fixing portion (205) may be the same. The upper surface (205_T) and the lower surface (205_B) of the upper fixing portion (205) may be flat. The upper surface (205_T) and the lower surface (205_B) of the upper fixing portion (205) may be parallel. The upper surface (205_T) of the upper fixing portion (205) may be parallel to the first direction (D1) and the second direction (D2). The lower surface (205_B) of the upper fixing portion (205) may be parallel to the first direction (D1) and the second direction (D2).

[0048] The upper fixing portion (205) may come into contact with the upper surface of the lower portion (204_L) of the electroactive polymer membrane (204). In some embodiments, the upper fixing portion (205) may come into contact with the second surface (204_S2) of the electroactive polymer membrane (204). The electroactive polymer membrane (204) may penetrate the upper fixing portion (205).

[0049] The upper fixing part (205) may include an outer wall (205_OS) and an inner wall (205_IS). An upper hole (205_H) may be defined inside the upper fixing part (205) by the inner wall (205_IS) of the upper fixing part (205). The upper hole (205_H) may have a circular shape in planar form. The diameter of the upper hole (205_H) may be smaller than the diameter of the outer wall (205_OS) of the upper fixing part (205). An electroactive polymer membrane (204) may penetrate the upper hole (205_H).

[0050] The width of the upper fixing part (205) in the first direction (D1) may be equal to the width of the lower fixing part (201) in the first direction (D1). In some embodiments, the width of the upper fixing part (205) in the first direction (D1) may be greater than the thickness of the upper fixing part (205) in the third direction (D3).

[0051] The outer wall (205_OS) of the upper fixing part (205) can connect the upper surface (205_T) and the lower surface (205_B). The inner wall (205_IS) of the upper fixing part (205) can connect the upper surface (205_T) and the lower surface (205_B). The area of ​​the outer wall (205_OS) of the upper fixing part (205) may be larger than the area of ​​the inner wall (205_IS).

[0052] An actuator (200) according to some embodiments includes a spring (202), and an electroactive polymer membrane (204) may cover the spring (202). Accordingly, the direction of operation of the electroactive polymer membrane (204) can be controlled by the spring (202). Additionally, when the actuator (200) is miniaturized, the amount of shape change of the electroactive polymer membrane (204) can be prevented.

[0053] An actuator (200) according to some embodiments may include a spring (202) so that tension may be applied to an electroactive polymer membrane (204). When tension is applied to the electroactive polymer membrane (204), the electroactive polymer membrane (204) may be thinned. When the electroactive polymer membrane (204) is thinned, the phenomenon of irreversible deformation of the electroactive polymer membrane (204) may be reduced.

[0054] An actuator (200) according to some embodiments includes a lower fixing part (201) and an upper fixing part (205) in contact with a spring (202) and an electroactive polymer membrane (204), so as to prevent the spring (202) and the electroactive polymer membrane (204) from moving.

[0055] An actuator (200) according to some embodiments includes a connector (203) so as to be able to maintain a constant shape of the upper surface of an electroactive polymer membrane (204). Additionally, the spring (202) and the electroactive polymer membrane (204) can be easily connected, and the connection between the spring (202) and the electroactive polymer membrane (204) can be stable when the shape of the electroactive polymer membrane (204) changes.

[0057] FIG. 3 is a diagram illustrating a method of driving an actuator system according to some embodiments. FIG. 4 is an enlarged view of the active actuator of FIG. 3.

[0058] Referring to FIGS. 3 and 4, the driving method of the actuator system may include heating the heating unit (400). In some embodiments, heating the heating unit (400) may include heating the heating unit (400) using Joule heating. Heating the heating unit (400) using Joule heating may include applying a first voltage (V1) to a first surface (400_S1) of the heating unit (400) and applying a first ground voltage (GND1) to a second surface (400_S2) of the heating unit (400). Current may flow in the heating unit (400) by the voltage applied to the heating unit (400).

[0059] The heating unit (400) is heated, and the rigidity variable polymer membrane (500) can be heated. In some embodiments, the rigidity variable polymer membrane (500) can be heated by heat conduction. Heat from the heating unit (400) can be transferred to the rigidity variable polymer membrane (500) to heat the rigidity variable polymer membrane (500). As the rigidity variable polymer membrane (500) is heated, the rigidity of the rigidity variable polymer membrane (500) can be reduced.

[0060] The driving method of the actuator system may further include applying voltage to at least one actuator (200). In some embodiments, applying voltage to the actuator (200) and heating of the rigid variable polymer membrane (500) may be performed simultaneously. In some embodiments, a second ground voltage (GND2) and a second voltage (V2) may be applied to a first surface (204_S1, see FIG. 2b) and a second surface (204_S2), respectively, of the actuator (200). In some embodiments, the first ground voltage (GND1) and the second ground voltage (GND2) may have the same potential.

[0061] In some embodiments, the second voltage (V2) may be a DC voltage. In some embodiments, the second voltage (V2) may be an AC voltage. In some embodiments, the second voltage (V2) may be an AC voltage including an offset voltage.

[0062] When the heating unit (400) and the rigid variable polymer membrane (500) are heated, voltage is applied to the actuator (200) so that the length of the actuator (200) in the third direction (D3) can change. The actuator (200) whose length in the third direction (D3) changes due to the application of voltage can be defined as an active actuator (200_1). The actuator (200) whose length in the third direction (D3) does not change because no voltage is applied can be defined as an inactive actuator (200_2). The length in the third direction (D3) of the active actuator (200_1) may be greater than the length in the third direction (D3) of the inactive actuator (200_2).

[0063] A change in the length of the actuator (200) in the third direction (D3) may include a change in the shape of the electroactive polymer membrane (204). The electroactive polymer membrane (204) with a changed shape may be defined as an active membrane (204_1). The active membrane (204_1) may be the electroactive polymer membrane (204) of the active actuator (200_1). The electroactive polymer membrane (204) with a non-changed shape may be defined as an inactive membrane. The inactive membrane may be the electroactive polymer membrane (204) of the inactive actuator (200_2). The level of the upper portion (204_1U) of the active membrane (204_1) may be greater than the level of the upper portion of the inactive membrane.

[0064] Changing the length of the actuator (200) in the third direction (D3) may include changing the shape of the spring (202). The spring (202) that has changed shape may be defined as an active spring (202_1). The active spring (202_1) may be the spring of the active actuator (200_1). The spring (202) that has not changed shape may be defined as an inactive spring. The inactive spring may be the spring of the inactive actuator (200_2).

[0065] The length of the active spring (202_1) in the third direction (D3) may be greater than the length of the inactive spring in the third direction (D3). The width of the uppermost part (202_1U) of the active spring (202_1) in the first direction (D1) may be equal to the width of the uppermost part of the inactive spring in the first direction (D1). The width of the lowermost part (202_1L) of the active spring (202_1) in the first direction (D1) may be equal to the width of the lowermost part of the inactive spring in the first direction (D1).

[0066] As the length of the actuator (200) in the third direction (D3) changes, the shape of the heating part (400) and the rigid variable polymer membrane (500) may change. The upper surface (400_T) of the heating part (400) may include a first part (AR1) that overlaps with the active actuator (200_1) in the third direction (D3), a second part (AR2) that overlaps with the inactive actuator (200_2) in the third direction (D3), and a third part (AR3) connecting the first part (AR1) and the second part (AR2).

[0067] The first portion (AR1) and the second portion (AR2) of the upper surface (400_T) of the heating unit (400) may be parallel to the first direction (D1) and the second direction (D2). At least a portion of the third portion (AR3) of the upper surface (400_T) of the heating unit (400) may be inclined toward the first and second portions (AR1, AR2) of the upper surface (400_T) of the heating unit (400). The third portion of the upper surface (400_T) of the heating unit (400) may intersect with respect to the first direction (D1) and the second direction (D2). The level (LV1) of the first portion (AR1) of the upper surface (400_T) of the heating unit (400) may be greater than the level (LV2) of the second portion (AR2) of the upper surface (400_T) of the heating unit (400).

[0068] The driving method of the actuator system may further include cooling the heating part (400) and the rigidity variable polymer membrane (500). By cooling the rigidity variable polymer membrane (500), the rigidity of the rigidity variable polymer membrane (500) may be increased.

[0069] A driving method of an actuator system according to some embodiments includes heating a rigid variable polymer membrane (500) using a heating unit (400) and cooling the rigid variable polymer membrane (500), so that the shape of the rigid variable polymer membrane (500) can be maintained even if the voltage is removed from the actuator (200) after cooling.

[0071] FIGS. 5a and 5b are graphs showing the change in length of an actuator relative to the frequency of an alternating current voltage applied to the actuator according to some embodiments. The x-axis represents the frequency of the alternating current voltage applied to the actuator, and the y-axis represents the change in length of the actuator and the rate of change in length.

[0072] Referring to FIGS. 3, 4, 5a and 5b, the actuator (200) includes a spring (202), so that the decrease in the amount of change in the length of the actuator (200) due to an increase in the frequency of the alternating voltage applied to the actuator (200) may be relatively small. The decrease in the amount of change in the length of the actuator (200) may be relatively small when the frequency of the alternating voltage applied to the actuator (200) is 20 Hz or higher and 100 Hz or lower.

[0073] The amount of change in the length of the actuator (200) due to an increase in the frequency of the alternating voltage applied to the actuator (200) at a frequency below the resonance frequency of the actuator (200) may be smaller than the amount of change in the length of the actuator (200) due to an increase in the frequency of the alternating voltage above the resonance frequency.

[0075] FIGS. 6a and 6b are graphs showing the change in actuator length relative to the strength of the alternating current voltage applied to the actuator according to some embodiments. The x-axis represents the strength of the alternating current voltage applied to the actuator, and the y-axis represents the change in the shape of the actuator.

[0076] Referring to FIGS. 3, 4, 6a and 6b, as the strength of the alternating voltage applied to the actuator (200) increases, the amount of change in the shape of the actuator (200) can increase.

[0078] FIG. 7a is a drawing showing a wearable device including an actuator according to some embodiments.

[0079] Referring to FIG. 7a, the actuator (200) may be mounted on a wearable device (300). The wearable device (300) may include an upper plate (310), a lower plate (320), and device connection parts (330). A body part (340) may be inserted between the upper plate (310) and the lower plate (320). The body part (340) may be, for example, a finger.

[0080] In some embodiments, the wearable device (300) may be a haptic device worn on a finger. Vibration and pressure may be generated in the wearable device (300) by an actuator (200). The wearer may sense the vibration and pressure of the wearable device (300) through a part of the body (340) and receive information regarding the tactile sensation and the magnitude and direction of the force generated by the actuator (300).

[0082] FIG. 7b is a drawing showing a joint including an actuator according to some embodiments.

[0083] Referring to FIG. 7b, the actuator (200) can be mounted on the joint (400). The joint (400) may include a first operating part (410), a second operating part (420), an operating assist plate (430), and joint connecting parts (440).

[0084] In some embodiments, the joint (400) may be a multi-degree-of-freedom joint. The first operating part (410) and the second operating part (420) of the joint (400) may be moved by the actuator (200).

[0086] FIG. 7c is a drawing showing a gripper including an actuator according to some embodiments.

[0087] Referring to FIG. 7c, the actuator (200) can be mounted on the gripper (500). The gripper (500) can be moved by the actuator (200). The actuator (200) can move the gripper (500) to grasp an object (OBJ).

[0089] Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without changing its technical concept or essential features. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive.

Claims

Claim 1 An electric active polymer membrane comprising an upper portion, a lower portion, and a side wall connecting the upper portion and the lower portion; and an actuator system comprising a spring surrounded by the electric active polymer membrane, wherein at least a portion of the spring is disposed within the electric active polymer membrane and the spring penetrates the lower portion of the electric active polymer membrane. Claim 2 An actuator system according to claim 1, further comprising a connector between the spring and the electroactive polymer membrane, wherein the stiffness of the connector is greater than the stiffness of the spring. Claim 3 In claim 2, an actuator system in which the diameter of the spring increases as it moves away from the connector. Claim 4 In claim 2, the upper surface of the connector is in the shape of a circle, forming an actuator system. Claim 5 An actuator system according to claim 1, wherein the width of the lower portion of the electroactive polymer membrane is greater than the width of the upper portion of the electroactive polymer membrane. Claim 6 In claim 5, the spring is an actuator system surrounded by the lower and side walls of the electroactive polymer membrane. Claim 7 In claim 5, the actuator system comprises a connector in contact with the lower surface of the upper portion of the electroactive polymer membrane, and the spring in contact with the lower surface of the connector. Claim 8 An actuator system according to claim 5, further comprising a lower fixing part in contact with the lowest part of the spring. Claim 9 An actuator system according to claim 8, further comprising an upper fixing part in contact with the upper surface of the lower portion of the electroactive polymer membrane. Claim 10 An actuator system comprising, in claim 1, a heating element on the electroactive polymer membrane; and a rigidity-variable polymer membrane on the heating element. Claim 11 An actuator system according to claim 10, wherein the rigid variable polymer membrane and the electroactive polymer membrane are separated by the heating part, the rigid variable polymer membrane is in contact with the upper surface of the heating part, and the electroactive polymer membrane is in contact with the lower surface of the heating part. Claim 12 An actuator system according to claim 11, further comprising a substrate; and a support on the substrate, wherein the support is in contact with the lower surface of the heating member and the support surrounds the electroactive polymer film. Claim 13 An actuator system according to claim 12, wherein the support member comprises a first part and a second part spaced apart from each other, the electroactive polymer membrane is disposed between the first part and the second part of the support member, and the lower surface of the heating member contacts the upper surface of the first part of the support member and the upper surface of the second part of the support member. Claim 14 In claim 12, the substrate is an actuator system that is a flexible PCB substrate. Claim 15 In claim 12, an actuator system in which the stiffness of the support member is greater than the stiffness of the spring. Claim 16 An electroactive polymer membrane comprising an upper portion, a lower portion, and a side wall connecting the upper portion and the lower portion; a connector in contact with the lower surface of the upper portion of the electroactive polymer membrane; and a spring in contact with the lower surface of the connector, wherein the spring penetrates the lower portion of the electroactive polymer membrane. Claim 17 In claim 16, the spring is an actuator that contacts the side wall of the electroactive polymer membrane.

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