Appratus for aligning substrate and appratus of deposition having the same

Abstract

According to one aspect of the present invention, a substrate alignment device is provided, comprising: a substrate holder that supports the substrate so that the lower surface of the substrate is exposed; a mask holder that supports a mask unit including a plate-shaped mask sheet and a mask frame to which the end of the mask sheet is fixed; and a magnet plate located above the substrate and including a plurality of individually controllable unit magnet modules, wherein the mask sheet is attached by magnetic force as it descends to bond the substrate and the mask unit, and wherein the unit magnet modules are individually lowered to attach the unit magnet modules and the mask sheet so that the mask sheet is maintained in a tensioned state.

Description

Technology Field

[0001] The present invention relates to a substrate alignment device and a deposition device including the same. More specifically, the invention relates to a substrate alignment device and a deposition device including the same, wherein a magnet plate is configured with a plurality of individually controllable unit magnet modules, and a mask sheet is individually attached to the unit magnet modules, thereby preventing the mask sheet from wrinkling and bonding to the substrate. Background Technology

[0003] Recently, flat panel displays, such as Liquid Crystal Displays (LCDs), Plasma Display Panels (PDPs), and Organic Light Emitting Diodes (OLEDs), are widely used as display devices. These flat panel displays are manufactured by carrying out a series of processes, such as deposition processes, in which metal or organic thin films are deposited in a specific pattern on a glass substrate.

[0004] The deposition of metal or organic thin films can be carried out by vacuum thermal evaporation. This method involves placing a substrate inside a deposition chamber, aligning and bonding a mask with a specific pattern to the substrate, and then applying heat to an evaporation source containing the evaporating material to deposit the sublimated material onto the substrate.

[0005] Looking at the bonding process between the substrate and the mask, as the magnet plate located on the upper part of the substrate descends, the mask on the lower part of the substrate attaches to the magnet plate by magnetic force, thereby bonding the substrate and the mask.

[0006] However, as flat panel display devices have recently become high-resolution, the mask patterns have become ultra-fine, and the mask sheets on which the patterns are formed are becoming very thin. As the very thin mask sheets are attached to the magnet plate on the upper part of the substrate, they are not taut and wrinkle, causing a problem where the alignment between the substrate and the mask deteriorates. Prior art literature

[0008] Republic of Korea Registered Patent No. 10-0759578 (Published September 18, 2007) The problem to be solved

[0009] The present invention provides a substrate alignment device and a deposition device including the same, which can prevent a mask sheet from wrinkling and bonding to a substrate by configuring a magnet plate with a plurality of individually controllable unit magnet modules and individually attaching the unit magnet modules and the mask sheet. means of solving the problem

[0011] According to one aspect of the present invention, a substrate alignment device is provided, comprising: a substrate holder that supports the substrate so that the lower surface of the substrate is exposed; a mask holder that supports a mask unit including a plate-shaped mask sheet and a mask frame to which the end of the mask sheet is fixed; and a magnet plate located above the substrate and including a plurality of individually controllable unit magnet modules, wherein the mask sheet is attached by magnetic force as it descends to bond the substrate and the mask unit, and wherein the unit magnet modules are individually lowered to attach the unit magnet modules and the mask sheet so that the mask sheet is maintained in a tensioned state.

[0012] The above substrate alignment device may further include a touch plate interposed between the magnet plate and the substrate.

[0013] The mask unit comprises the mask sheet; and a mask frame to which the end of the mask sheet is fixed while the mask sheet is stretched taut, and the thickness of the mask sheet may be 7 to 10 μm.

[0014] The above mask sheet includes a plurality of strip-type mask sheet strips arranged in parallel, and each of the mask sheet strips can have both ends in the longitudinal direction fixed to the mask frame while being tightly stretched.

[0015] The above unit magnet module includes a strip-type unit magnet module, and the strip-type unit magnet module can be placed perpendicular to the mask sheet strip.

[0016] The above unit magnet module can be sequentially lowered from both ends of the mask sheet strip toward the center and sequentially attached to the mask sheet strip.

[0017] According to another aspect of the present invention, a deposition apparatus is provided comprising: a deposition chamber in which a substrate is loaded; a substrate alignment device disposed inside the deposition chamber; and an evaporation source that sprays an evaporative material toward the substrate. Effects of the invention

[0019] According to an embodiment of the present invention, a magnet plate is configured with a plurality of unit magnet modules capable of individual control, and by individually attaching the unit magnet modules and the mask sheet, it is possible to prevent the mask sheet from wrinkling and bonding to the substrate. Brief explanation of the drawing

[0021] FIG. 1 is a simplified drawing of a deposition apparatus including a substrate alignment device according to one embodiment of the present invention. FIG. 2 is a drawing illustrating the attachment state of a mask sheet and a unit magnet module according to one embodiment of the present invention. FIG. 3 is a drawing illustrating the attachment process of a mask sheet and a unit magnet module according to an embodiment of the present invention. Specific details for implementing the invention

[0022] The present invention is capable of various modifications and may have various embodiments; specific embodiments are illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, and it should be understood that it includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the present invention. In describing the present invention, detailed descriptions of related prior art are omitted if it is determined that such detailed descriptions may obscure the essence of the present invention.

[0023] Hereinafter, a substrate alignment device according to the present invention and a deposition device including the same will be described in detail with reference to the attached drawings. In describing with reference to the attached drawings, identical or corresponding components are given the same reference numerals, and redundant descriptions thereof will be omitted.

[0024] FIG. 1 is a simplified drawing of a deposition apparatus including a substrate alignment device according to an embodiment of the present invention. FIG. 2 is a drawing illustrating the attachment state of a mask sheet and a unit magnet module according to an embodiment of the present invention, and FIG. 3 is a drawing for explaining the attachment process of a mask sheet and a unit magnet module according to an embodiment of the present invention.

[0025] FIGS. 1 to 3 illustrate a substrate (10), a substrate alignment device (11), a deposition chamber (12), an evaporation source (14), a substrate holder (16), a mask holder (18), a mask sheet (20), a mask frame (22), a mask unit (24), a mask sheet strip (26), a unit magnet module (28), a magnet plate (30), a touch plate (32), a mask holder position control unit (34), a substrate holder position control unit (36), and a magnet module position control unit (38).

[0026] A substrate alignment device (11) according to the present embodiment comprises: a substrate holder (16) that supports the substrate (10) so that the lower surface of the substrate (10) is exposed; a mask holder (18) that supports a mask unit (24) including a plate-shaped mask sheet (20) and a mask frame (22) to which the end of the mask sheet (20) is fixed; and a magnet plate (30) that is positioned above the substrate (10) and includes a plurality of individually controllable unit magnet modules (28), and attaches the mask sheet (20) by magnetic force as it descends to bond the substrate (10) and the mask unit (24). The substrate alignment device (11) according to the present embodiment can attach the unit magnet modules (28) and the mask sheet (20) by individually controlling the unit magnet modules (28) so that the mask sheet (20) is maintained in a tensioned state.

[0027] Before describing the substrate alignment device (11) according to the present embodiment, we will first describe the deposition device to which the substrate alignment device (11) is combined.

[0028] Referring to FIG. 1, the deposition apparatus includes a deposition chamber (12) in which a substrate (10) is loaded, a substrate alignment device (11) according to the present embodiment disposed inside the deposition chamber (12), and an evaporation source (14) that sprays an evaporation material toward the substrate (10).

[0029] The interior of the deposition chamber (12) is maintained in a vacuum atmosphere for the deposition of evaporated particles, and a substrate (10) is loaded into a substrate alignment device (11) located inside the deposition chamber (12).

[0030] A substrate (10) loaded into a substrate alignment device (11) is aligned with a mask unit (24) and bonded. With the substrate (10) and the mask unit (24) bonded, a gaseous evaporative material is ejected from an evaporation source (14) toward the substrate (10), and deposition is performed on the substrate (10) accordingly. An evaporative material is contained in the evaporation source (14), and as the evaporative material evaporates due to heating of the evaporation source (14), it is ejected onto the substrate (10).

[0031] The substrate alignment device (11) according to the present embodiment is a device for aligning the substrate (10) and the mask unit (24) and then bonding them together, and each component is described in detail below.

[0032] As shown in FIG. 1, the substrate holder (16) supports the substrate (10) so that the lower surface of the substrate (10) is exposed. The substrate (10) lifted by the robot arm is loaded into the substrate holder (16), and the two ends of the substrate (10) are each supported by substrate support members spaced apart from each other so that the lower surface of the substrate (10) is exposed toward the evaporation source (14) below.

[0033] The position of the substrate holder (16) can be controlled by a substrate holder position control unit (36) located at the top of the deposition chamber (12), and the position of the substrate holder (16) can be controlled for alignment of the mask unit (24) of the mask holder (18) and the substrate (10) of the substrate holder (16).

[0034] The mask holder (18) is a device for supporting a mask unit (24) positioned opposite the lower surface of a substrate (10), and supports a mask unit (24) comprising a plate-shaped mask sheet (20) and a mask frame (22) to which the end of the mask sheet (20) is fixed.

[0035] As the unit magnet module (28) descends, the mask sheet (20) of the mask unit (24) is individually attached to the unit magnet module (28), thereby bonding the substrate (10) and the mask unit (24).

[0036] The mask holder (18) can be positioned by a mask holder position control unit (34) located at the top of the deposition chamber (12), and the position of the mask holder (18) can be controlled for alignment of the mask unit (24) of the mask holder (18) and the substrate (10) of the substrate holder (16).

[0037] The mask unit (24) includes a plate-shaped mask sheet (20) and a mask frame (22) to which the end of the mask sheet (20) is fixed. The mask sheet (20) has an opening corresponding to a pattern to be formed on the substrate (10), and an evaporating material ejected from an evaporation source (14) passes through the opening and is deposited on the substrate (10) to form the pattern.

[0038] FIG. 2 illustrates a mask unit (24) according to the present embodiment, wherein the mask sheet (20) according to the present embodiment includes a plurality of strip-type mask sheet strips (26) arranged in parallel. Each of the mask sheet strips (26) has an opening (not shown) corresponding to a pattern of the substrate (10) formed therein, and both ends in the longitudinal direction are fixed to the mask frame (22) while being stretched taut in the longitudinal direction of the mask sheet (20).

[0039] Recently, in accordance with the demand for high resolution of display elements, the pattern formed on the substrate (10) is also becoming ultra-fine. In order to form such an ultra-fine pattern, the opening of the mask sheet (20) is becoming ultra-fine, and the thickness of the mask sheet (20) is also becoming very thin.

[0040] In response to these high-resolution demands, the thickness of mask sheets has recently been reduced to about 7 to 10 μm. However, due to the very thin mask sheet, there is a problem where the thin mask sheet cannot be kept taut during the attachment process with a conventional magnet plate and gets attached while warped.

[0041] In other words, in the process of attaching a thin mask sheet to a conventional single-plate magnet plate, the thin mask sheet fails to maintain tautness and becomes distorted when attached to the magnet plate due to differences in magnetic force in different zones of the magnet plate and low attachment precision, resulting in a problem where the alignment precision between the mask unit and the substrate is reduced.

[0042] In the present invention, the magnet plate (30) is not configured as a single plate but is composed of a plurality of unit magnet modules (28) that can be individually controlled and attached to the mask sheet (20) individually, thereby allowing the substrate (10) and the mask unit (24) to be bonded while maintaining a taut tension state without the mask sheet (20) becoming distorted. This will be explained in detail below.

[0043] The magnet plate (30) is located on the upper part of the substrate (10) and includes a plurality of unit magnet modules (28) that can be individually controlled, and as it descends, the mask sheet (20) is attached by magnetic force, thereby bonding the substrate (10) and the mask unit (24).

[0044] A unit magnet module (28) is combined with a magnet that generates magnetic force in a plate shape so that a plate-shaped mask sheet (20) can be attached, and as the unit magnet module (28) descends and approaches the mask sheet (20), the mask sheet (20) is attached to the unit magnet module (28) and bonded with the substrate (10) between them.

[0045] The position of each unit magnet module (28) can be controlled by a magnet module position control unit (38) coupled to a substrate holder position control unit (36), and the position of each unit magnet module (28) can be controlled by the magnet module position control unit (38).

[0046] In this embodiment, a plurality of unit magnet modules (28) capable of individually controlling vertical movement are arranged on a plane to form a magnet plate (30), and each unit magnet module (28) is individually attached to a mask sheet (20), thereby allowing the substrate (10) and the mask unit (24) to be bonded while maintaining a taut tension state without the mask sheet (20) becoming distorted.

[0047] FIG. 2 illustrates the attachment state of the mask sheet (20) and the unit magnet module (28) according to the present embodiment, and FIG. 3 illustrates the attachment process of the mask sheet (20) and the unit magnet module (28) according to the present embodiment.

[0048] When the mask sheet (20) is composed of a plurality of strip-type mask sheet strips (26) arranged in parallel, as shown in FIG. 2, the unit magnet module (28) is also composed of a strip-type unit magnet module (28) with a length longer than its width, and the strip-type unit magnet module (28) can be arranged perpendicularly to the mask sheet strips (26).

[0049] With the strip-shaped unit magnet module (28) positioned perpendicularly to the mask sheet strip (26), as shown in FIG. 3, the unit magnet module (28) is sequentially lowered from both ends of the mask sheet strip (26) toward the center, thereby sequentially attaching the unit magnet module (28) to the mask sheet strip (26), so that the substrate (10) and the mask unit (24) can be bonded while the mask sheet strip (26) is tautly stretched.

[0050] Referring to FIGS. 2 and 3, the mask sheet strip (26) is attached to the mask frame (22) while being stretched taut. According to the experiment, when unit magnet modules (28) are attached sequentially from both ends of the mask sheet strip (26) toward the center, it was found that the mask sheet strip (26) is attached to the magnet plate (30) while maintaining its tautness without being distorted.

[0051] However, this is limited to the present embodiment, and the attachment order of the unit magnet modules (28) may be varied depending on the attachment form of the mask sheet (20) to the mask frame (22).

[0052] The substrate alignment device (11) according to the present embodiment may further include a touch plate (32) interposed between the magnet plate (30) and the substrate (10).

[0053] The touch plate (32) is located on the upper surface of the substrate (10) and protects the upper surface of the substrate (10) by preventing the unit magnet module (28) from directly touching the substrate (10).

[0054] The touch plate (32) is positioned interposed between the magnet plate (30) and the substrate (10), and in conjunction with the movement of the magnet plate (30), it descends to a certain distance relative to the upper surface of the substrate (10) as the magnet plate (30) descends, and then the unit magnet module (28) descends individually, and the attachment of the unit magnet module (28) and the mask sheet (20) occurs with the touch plate (32) and the substrate (10) in between. When the unit magnet module (28) and the mask sheet (20) are attached, the touch plate (32) comes into contact with the upper surface of the substrate (10) and protects the upper surface of the substrate (10).

[0056] Although the present invention has been described above with reference to embodiments thereof, those skilled in the art will readily understand that various modifications and changes can be made to the present invention without departing from the spirit and scope of the invention as described in the following claims. Explanation of the symbols

[0058] 10: Substrate 11: Substrate alignment device 12: Deposition chamber 14: Evaporation source 16: Substrate holder 18: Mask holder 20: Mask sheet 22: Mask frame 24: Mask unit 26: Mask sheet strip 28: Unit magnet module 30: Magnet plate 32: Touch plate 34: Mask holder position control unit 36: Substrate holder position control unit 38: Magnet module position control unit

Claims

Claim 1 A substrate holder that supports the substrate so that the lower surface of the substrate is exposed; a mask holder that supports a mask unit including a mask sheet on a plate and a mask frame to which the end of the mask sheet is fixed; and a magnet plate located on the upper part of the substrate and including a plurality of individually controllable unit magnet modules, wherein the mask sheet is attached by magnetic force upon lowering to bond the substrate and the mask unit, wherein the unit magnet modules are individually lowered to attach the unit magnet modules and the mask sheet so that the mask sheet is maintained in a tensioned state, the mask unit includes the mask sheet; and a mask frame to which the end of the mask sheet is fixed while the mask sheet is in a tautly tensioned state, wherein the thickness of the mask sheet is 7 to 10 μm, the mask sheet includes a plurality of strip-type mask sheet strips arranged in parallel, and each of the mask sheet strips has both ends in the longitudinal direction fixed to the mask frame while in a tautly tensioned state, and the unit magnet module is a strip-type A substrate alignment device comprising a unit magnet module, wherein the strip-shaped unit magnet module is positioned perpendicularly to the mask sheet strip and sequentially descends from both ends of the mask sheet strip toward the center to sequentially attach to the mask sheet strip. Claim 2 A substrate alignment device according to claim 1, further comprising a touch plate interposed between the magnet plate and the substrate. Claim 3 delete Claim 4 delete Claim 5 delete Claim 6 delete Claim 7 A deposition apparatus comprising: a deposition chamber in which a substrate is loaded; a substrate alignment device according to either claim 1 or 2 disposed inside the deposition chamber; and an evaporation source that sprays an evaporation material toward the substrate.

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