Desiccant Dehumidifier Using Heater Rod, and EFEM Including Thereof

Abstract

An EFEM comprising a desiccant dehumidification device using a heater rod according to one embodiment of the present disclosure may provide an EFEM comprising: a FOUP in which a substrate to be processed is loaded; a chamber in which the substrate temporarily stays and which communicates with the FOUP through a door; and a dehumidifier that dehumidifies gas and supplies the dehumidified gas into the chamber; wherein the dehumidifier comprises: a dehumidifier body in which the interior is divided into a regeneration area and a dehumidification area; and a dehumidification module disposed inside the dehumidifier body, wherein gas is dehumidified by a desiccant block in the dehumidification area and the desiccant block is regenerated by a heater rod in the regeneration area to perform a dehumidification function.

Description

Technology Field

[0001] The present embodiment relates to dehumidification device technology, and more specifically, to a desiccant dehumidification device including a heater rod and EFEM technology including the same. Background Technology

[0002] With the recent acceleration of the transition to an information society, the demand for highly integrated electronic devices is surging. Representative examples of these devices include high-resolution display devices and high-density, high-performance semiconductor devices, which are manufactured by integrating multiple electronic structures onto a single surface area through high-precision surface treatment processes.

[0003] Processes used in the manufacture of highly integrated electronic devices include thin film deposition, photolithography, and etching processes, and highly integrated electronic devices are manufactured by a composite process in which these different processes are applied one or more times.

[0004] A process system may have process processing devices such as an Equipment Front End Module (EFEM), a transfer robot, and a process chamber to apply multiple processes to a highly integrated electronic device. A substrate to be processed—for example, a semiconductor wafer—waits in the EFEM among these process processing devices, is moved to an appropriate process chamber by a transfer robot, and then undergoes the necessary processes.

[0005] The EFEM may have a Load Port Module (LPM), a Front-Opening Unified Pod (FOUP), an EFEM chamber, etc.

[0006] A load port module is a device to which a semiconductor wafer storage container called a pod is combined. Multiple semiconductor wafers can be loaded into the pod, and a transfer device including a transfer robot sequentially transfers the semiconductor wafers loaded in the pod to the process chamber. Although the processing of semiconductor wafers takes place in a cleanroom with a high level of cleanliness, semiconductor wafers can be loaded into the pod to provide an even higher level of cleanliness.

[0007] Meanwhile, moisture can react with fumes generated from process equipment to oxidize or etch the device. Additionally, moisture can react with fine reaction particles to form foreign substances. Such oxidation of the device, etching of the device, and / or formation of foreign substances can be factors that reduce the device yield.

[0008] Since substrates subject to processing, such as semiconductor wafers, stay in the EFEM for a considerable amount of time, industrial sites recognize internal humidity management of the EFEM as an important factor for improving yield. The problem to be solved

[0009] The technical problem that the present disclosure aims to solve is to provide a desiccant dehumidification device using a heater rod that does not require a rotating space to replace a rotary desiccant, and an EFEM including the same.

[0010] Another technical problem that the present disclosure aims to solve is to provide a desiccant dehumidification device using a heater rod that can expand the desiccant according to the required dehumidification capacity, and an EFEM including the same.

[0011] Another technical problem that the present disclosure aims to solve is to provide a desiccant dehumidification device using a heater rod and an EFEM including the same, which can reduce the height occupied by the regeneration area of ​​the dehumidifier.

[0012] The technical problems of the present disclosure are not limited to those mentioned above, and other technical problems not mentioned above will be clearly understood by a person skilled in the art of the present disclosure from the description below. means of solving the problem

[0013] An EFEM comprising a desiccant dehumidification device using a heater rod according to an embodiment of the present disclosure for solving the above technical problem may provide an EFEM comprising: a FOUP in which a substrate to be processed is loaded; a chamber in which the substrate temporarily stays and which communicates with the FOUP through a door; and a dehumidifier that dehumidifies gas and supplies the dehumidified gas into the chamber; wherein the dehumidifier comprises: a dehumidifier body in which the interior is divided into a regeneration area and a dehumidification area; and a dehumidification module disposed inside the dehumidifier body, wherein gas is dehumidified by a desiccant block in the dehumidification area and the desiccant block is regenerated by a heater rod in the regeneration area to perform a dehumidification function.

[0014] As an example, the dehumidification module may include: a ring-shaped conveyor belt to which a plurality of the desiccant blocks are attached and which moves the desiccant blocks to circulate between the regeneration area and the dehumidification area; a heater rod disposed inside the regeneration area side of the conveyor belt to rotate and support the conveyor belt; and a drive shaft disposed inside the dehumidification area side of the conveyor belt to provide rotational force to the conveyor belt.

[0015] As an example, the heater rod can regenerate the desiccant block by applying heat directly or indirectly to the desiccant block in the regeneration area.

[0016] As an example, the dehumidification module may have an overall plate-like shape, in which the heater rod is positioned inside the regeneration area side of the conveyor belt and the drive shaft is positioned in the dehumidification area of ​​the conveyor belt.

[0017] As an example, the dehumidification module may be installed inside the dehumidifier body at an angle perpendicular to the direction in which the regeneration container gas moves in the regeneration area.

[0018] As an example, the dehumidification module includes a first dehumidification module and a second dehumidification module, and the first dehumidification module and the second dehumidification module may be installed inside the dehumidifier body in parallel with each other.

[0019] As an example, the dehumidification module comprises a first heater rod and a second heater rod, wherein the first heater rod is positioned inside the regeneration area side of the conveyor belt and the drive shaft is positioned inside the dehumidification area side of the conveyor belt and has an overall plate-like shape, and the second heater rod is positioned between the first heater rod and the drive shaft, and is positioned in the regeneration area to support the conveyor belt located in the regeneration area.

[0020] A desiccant dehumidification device using a heater rod according to one embodiment of the present disclosure for solving the above technical problem may provide a desiccant dehumidification device comprising: a dehumidifier body having an interior divided into a regeneration area and a dehumidification area; and a dehumidification module disposed inside the dehumidifier body, wherein gas is dehumidified by a desiccant block in the dehumidification area and the desiccant block is regenerated by a heater rod in the regeneration area to perform a dehumidification function, wherein the dehumidification module comprises: a ring-shaped conveyor belt to which a plurality of the desiccant blocks are attached and which moves the desiccant blocks to circulate between the regeneration area and the dehumidification area; a heater rod disposed inside the regeneration area side of the conveyor belt to rotate and support the conveyor belt; and a drive shaft disposed inside the dehumidification area side of the conveyor belt to provide rotational force to the conveyor belt.

[0021] As an example, the heater rod can regenerate the desiccant block by applying heat directly or indirectly to the desiccant block in the regeneration area.

[0022] As an example, the dehumidification module may have an overall plate-like shape, in which the heater rod is positioned inside the regeneration area side of the conveyor belt and the drive shaft is positioned in the dehumidification area of ​​the conveyor belt.

[0023] As an example, the dehumidification module may be installed inside the dehumidifier body at an angle perpendicular to the direction in which the regeneration container gas moves in the regeneration area.

[0024] As an example, the dehumidification module includes a first dehumidification module and a second dehumidification module, and the first dehumidification module and the second dehumidification module may be installed inside the dehumidifier body in parallel with each other.

[0025] As an example, the dehumidification module comprises a first heater rod and a second heater rod, wherein the first heater rod is positioned inside the regeneration area side of the conveyor belt and the drive shaft is positioned inside the dehumidification area side of the conveyor belt and has an overall plate-like shape, and the second heater rod is positioned between the first heater rod and the drive shaft, and is positioned in the regeneration area to support the conveyor belt located in the regeneration area. Effects of the invention

[0026] As described above, according to the present embodiment, a desiccant dehumidification device using a heater rod that does not require a rotating space to replace a rotary desiccant, and an EFEM including the same can be provided.

[0027] And according to the present embodiment, a desiccant dehumidification device using a heater rod that can expand the desiccant according to the required desiccant capacity and an EFEM including the same can be provided.

[0028] And according to the present embodiment, a desiccant dehumidification device using a heater rod and an EFEM including the same can be provided, which can reduce the height occupied by the regeneration area of ​​the dehumidifier. Brief explanation of the drawing

[0029] FIG. 1 is a side view showing the configuration of a process system according to one embodiment of the present disclosure. Figure 2 is a top view showing the configuration of the process system of Figure 1. FIG. 3 is a drawing for illustrating a first exemplary technique for humidity management of an EFEM according to one embodiment of the present disclosure. FIG. 4 is a drawing illustrating a second exemplary technique for humidity management of an EFEM according to one embodiment of the present disclosure. FIG. 5 is a front view showing the configuration of an EFEM including a regenerative dehumidifier according to one embodiment of the present disclosure. FIG. 6 is a side view showing the configuration of an EFEM including the regenerative dehumidifier of FIG. 5. FIG. 7 is a diagram showing the configuration of an EFEM including a regenerative dehumidifier according to another embodiment of the present disclosure. FIG. 8 is a drawing showing the configuration of a desiccant dehumidifier using a heater rod according to the first embodiment of the present disclosure. FIG. 9 is a drawing showing the configuration of a desiccant dehumidifier using a heater rod according to a second embodiment of the present disclosure. FIG. 10 is a drawing showing the configuration of a desiccant dehumidifier using a heater rod according to a third embodiment of the present disclosure. FIG. 11 is a drawing showing the configuration of a desiccant dehumidifier using a heater rod according to the fourth embodiment of the present disclosure. Specific details for implementing the invention

[0030] Hereinafter, some embodiments of the present invention will be described in detail with reference to the exemplary drawings. It should be noted that in assigning reference numerals to the components of each drawing, the same components are given the same reference numeral whenever possible, even if they are shown in different drawings. Furthermore, in describing the present invention, if it is determined that a detailed description of related known components or functions could obscure the essence of the invention, such detailed description is omitted.

[0031] Additionally, terms such as first, second, A, B, (a), (b), etc., may be used when describing the components of the present invention. These terms are intended only to distinguish the components from other components, and the essence, order, or sequence of the components is not limited by the terms. Where it is stated that a component is "connected," "combined," or "connected" to another component, it should be understood that the component may be directly connected or connected to the other component, but that another component may also be "connected," "combined," or "connected" between each component.

[0032] FIG. 1 is a side view showing the configuration of a process system according to one embodiment of the present disclosure, and FIG. 2 is a top view showing the configuration of the process system of FIG. 1.

[0033] Referring to FIGS. 1 and 2, the process system may include an EFEM (100), a load lock device (210), a return chamber (220), and a process chamber (230).

[0034] The EFEM (100) is an interface module for supplying a substrate (W), such as a wafer, to a process chamber (230), and the substrate (W) can be introduced into and removed from the process system through the EFEM (100).

[0035] The substrate (W) to be processed can stay in the EFEM (100) before being transferred to the process chamber (230) and then be transferred to the process chamber (230) via the return chamber (220) when necessary.

[0036] Substrates (W) staying in the EFEM (100) can be sequentially transferred to the load lock device (210). Then, the substrate (W) transferred to the load lock device (210) is transferred to the return chamber (220), and the return robot placed in the return chamber (220) transfers the substrate (W) to the process chamber (230) so that the substrate (W) can be processed.

[0037] The process system may include a plurality of process chambers (230a, 230b, 230c), and each of the process chambers (230a, 230b, 230c) may apply different processes to the substrate (W). A return robot placed in the return chamber (220) may introduce the substrate (W) into the first process chamber (230a) to allow the first process to be applied to the substrate (W), and introduce the substrate (W) removed from the first process chamber (230a) into the second process chamber (230b) to allow the second process to be applied to the substrate (W). Additionally, the return robot may introduce the substrate (W) into the third process chamber (230c) to allow the third process to be applied to the substrate.

[0038] Doors (D1, D2, D3, D4) are arranged between each device (120, 100, 210, 230) to minimize mixing of gases between each device (120, 100, 210, 230). For example, a first door (D1) may be arranged between the pod (120) and the EFEM (100), a second door (D2) may be arranged between the EFEM (100) and the load lock device (210), a third door (D3) may be arranged between the load lock device (210) and the return chamber (220), and a fourth door (D4) may be arranged between the return chamber (220) and the process chamber (230). And, each door (D1, D2, D3, D4) may be opened only when the substrate (W) is moved, and may be closed when not moving.

[0039] The EFEM (100) may include an EFEM chamber (110), a pod (120), a load port module (130), etc.

[0040] A plurality of substrates (W) can be loaded into the pod (120). The plurality of substrates (W) can be transferred sequentially to the EFEM chamber (110).

[0041] The pod (120) can be connected to the EFEM chamber (110) through the first door (D1). A transfer device may be placed inside the EFEM chamber (110), and when the first door (D1) is opened, the transfer device can take out the substrate (W) from the pod (120) and transfer it to the load lock device (210).

[0042] The EFEM (100) may include a plurality of pods (120a, 120b, 120c). Each pod (120a, 120b, 120c) may be connected to the EFEM chamber (110) at different locations. A transfer device placed in the EFEM chamber (110) may sequentially open first doors (D1a, D1b, D1c) placed in each pod (120a, 120b, 120c) and sequentially remove substrates (W) from each pod (120a, 120b, 120c).

[0043] The internal space of the pod (120) may be relatively narrow compared to the EFEM chamber (110). Because the pod (120) has a relatively narrow space, the gas atmosphere surrounding the substrate (W) can be well controlled. For example, when a substrate (W), such as a semiconductor wafer, is exposed to moisture, oxygen, etc., an oxide film may form on its surface, but this problem can be minimized by purging the internal space of the pod (120) with nitrogen (N2).

[0044] A load port module (130) supporting the pod (120) can supply nitrogen (N2) into the internal space of the pod (120). The load port module (130) may include an N2 supply device, N2 piping, a Mass Flow Controller (MFC), a filter, etc. N2 supplied from the N2 supply device can be delivered into the internal space of the pod (120) through the N2 piping, at which time the MFC can control the flow of the N2 fluid and a filter in the nitrogen (N2) distribution path can remove foreign substances.

[0045] According to this structure in which the load port module (130) purges nitrogen (N2) into the internal space of the pod (120), the time required to lower the internal humidity of the pod (120) can be shortened, the effect of suppressing contamination of a substrate (W), such as a semiconductor wafer, can be increased, static electricity generation during the transport of the substrate (W) can be suppressed, the diffusion of fine particles can be prevented, and the possibility of corrosion of the substrate (W) by fine particles can be reduced.

[0046] Meanwhile, since moisture can react with fumes generated from process processing devices to oxidize or etch the device and can react with fine reaction particles to form foreign matter, it is important to minimize moisture in the EFEM (100), particularly in the pod (120) where the substrate (W) stays for a long time. Since the pod (120) has a relatively narrow space, it may be easy to reduce humidity, but since the EFEM chamber (110) has a relatively wide space, it may not be easy to reduce humidity.

[0047] Various techniques have been attempted to manage humidity in EFEMs, but most had problems such as being expensive or having low effectiveness.

[0048] FIG. 3 is a drawing for illustrating a first exemplary technique for humidity management of an EFEM according to one embodiment of the present disclosure.

[0049] Referring to FIG. 3, the N2 circulating EFEM chamber (110) can control the humidity in the space by circulating nitrogen (N2) into the space where the substrate (W) is exposed.

[0050] An N2 supply pipe (10) may be connected to the upper side of the N2 circulating EFEM chamber (110), and a differential pressure exhaust unit (12) may be connected to the lower side. Additionally, a pod (120) may be connected to one side of the EFEM chamber (110).

[0051] The EFEM chamber (110) can supply nitrogen (N2) into its internal space through the N2 supply pipe (10). The internal space of the EFEM chamber (110) may have a certain path formed through which nitrogen (N2) can circulate, and the nitrogen (N2) supplied through the N2 supply pipe (10) can circulate within the internal space along that path.

[0052] The EFEM chamber (110) can regulate the air pressure in the internal space through the differential pressure exhaust section (12) and regulate the nitrogen (N2) density in the internal space.

[0053] The pod (120) can be purged with nitrogen (N2) through the load port module (130). The internal space of the pod (120) can be connected to the EFEM chamber (110) with the opening of the door (D1), and since both spaces are filled with nitrogen (N2), the humidity of the entire EFEM (100) can be maintained at a low level.

[0054] Meanwhile, the N2 circulating EFEM (100) can be designed with a sealed structure so that nitrogen (N2) does not leak out of the EFEM chamber (110). However, since conventional EFEM chambers are not sealed structures, the problem of having to replace the EFEM chamber (110) in order to introduce the N2 circulating EFEM chamber (110) may arise. Generally, replacing process equipment in a semiconductor manufacturing process results in enormous costs and time losses. Therefore, it may be necessary to apply other technologies that can minimize these costs and time losses.

[0055] FIG. 4 is a drawing illustrating a second exemplary technique for humidity management of an EFEM according to one embodiment of the present disclosure.

[0056] Referring to FIG. 4, a pod (120) is connected to one side of the EFEM chamber (110), and a dehumidifier (300) can be placed on the upper side of the EFEM chamber (110).

[0057] A dehumidifier (300) positioned above the EFEM chamber (110) can produce dehumidified air (F1) by removing moisture from air sucked in from the outside. Then, a fan filter unit (FFU: Fan Filter Unit, 140) can introduce the dehumidified air (F1) by the dehumidifier (300) into the internal space of the EFEM chamber (110). The dehumidified air (F1) can flow from the upper side to the lower side and then be discharged to the outside through the lower side.

[0058] The pod (120) can be purged with nitrogen (N2) through the load port module (130). The internal space of the pod (120) is dehumidified through nitrogen (N2) purging, and the internal space of the EFEM chamber (110) can be dehumidified through the dehumidifier (300).

[0059] FIG. 5 is a front view showing the configuration of an EFEM including a regenerative dehumidifier according to one embodiment of the present disclosure.

[0060] Referring to FIG. 5, an EFEM including a regenerative dehumidifier according to one embodiment of the present disclosure may include an EFEM chamber (110), a dehumidifier (300), and a fan filter unit (FFU: Fan Filter Unit, 140).

[0061] The internal space of the EFEM chamber (110) may be a first space (1S). A second space (2S) may be formed by separating the dehumidifier (300) and the fan filter unit (140). The second space (2S) may be an empty space, and various configurations may be arranged as needed. For example, a control box that controls each configuration of the EFEM or a power supply unit that supplies power to each configuration of the EFEM may be arranged in the second space (2S). The fan filter unit (FFU, 140) may be configured to include a blower (142), a fan (144), and a filter (146).

[0062] The dehumidifier (300) may be connected to a regeneration gas intake port (302) that receives gas used for regeneration of the dehumidifier (300) and a regeneration gas discharge port (304) that discharges the regeneration gas. Additionally, the dehumidifier (300) may be connected to an outside air intake port (306), and the flow of gas at the outside air intake port (306) may be controlled by an intake port valve (307).

[0063] The dehumidifier (300) can perform dehumidification by receiving gas from the outside air intake (306), and the dehumidified gas can be supplied to the blower (142) through the external connection duct (308). Here, the flow of gas in the external connection duct (308) can be controlled by the external connection valve (309). The gas can be supplied to the first space (1S) by passing through the blower (142) and the filter (146). The gas that passes through the first space (1S) can pass through the perforated plate (112), be collected in the collection unit (114), and then be discharged to the outside. The gas discharged to the outside may be discharged to the lower surface of the EFEM chamber (110) or to one side.

[0064] FIG. 6 is a side view showing the configuration of an EFEM including the regenerative dehumidifier of FIG. 5.

[0065] Referring to FIG. 6, an EFEM including a regenerative dehumidifier according to one embodiment of the present disclosure may include an EFWM chamber (110), a dehumidifier (300), and a fan filter unit (140). The fan filter unit (140) may be configured to include a blower (142), a fan (144), and a filter (146).

[0066] The internal space of the EFEM chamber (110) may be a first space (1S). A second space (2S) may be formed by separating the dehumidifier (300) and the fan filter unit (140).

[0067] The EFEM chamber (110) may include a blower outside air intake (118) that supplies outside air to a blower (142), and may include a blower outside air valve (119) that controls the flow of gas in the blower outside air intake (118).

[0068] A substrate (W) to be processed can be loaded into the pod (120) and can be connected to the EFEM chamber (110) through the first door (D1). The load port module (130) is positioned on the lower side of the pod (120) to support the pod (120) and can supply nitrogen (N2) into the internal space of the pod (120).

[0069] FIG. 7 is a diagram showing the configuration of an EFEM including a regenerative dehumidifier according to another embodiment of the present disclosure.

[0070] Referring to FIG. 7, an EFEM including a regenerative dehumidifier according to another embodiment may include an EFEM chamber (110), a dehumidifier (300), a fan filter unit (140), a purification unit (115), an external circulation duct (116), and an external connection duct (308). The fan filter unit (140) may be configured to include a blower (142), a fan (144), and a filter (146). A first space (1S) may be formed inside the EFEM chamber (110), and a second space (2S) may be formed by installing the dehumidifier (300) and the fan filter unit (140) apart from each other.

[0071] The outside air intake port (306) may be configured to draw in gas from the outside, and the outside air intake port (306) may be connected to an external circulation duct (116). The external circulation duct (116) may be configured to supply gas that has passed through the first space (1S) to a dehumidifier (300) to provide a circulation passage for the gas. The external circulation duct (116) may include an external circulation valve (117) that controls the flow of gas in the external circulation duct (116).

[0072] The external connection duct (308) is positioned outside the ETEM chamber (112) and may be configured to provide a passage for the movement of dehumidified gas between the dehumidifier (300) and the blower (142). The external connection duct (308) may include an external connection valve (309) that controls the flow of gas in the external connection duct (308).

[0073] The purification unit (115) may be configured to receive gas collected in the collection unit (114) located at the bottom of the first space (S1) and perform purification through a filter.

[0074] The dehumidifier (300) can be connected to a regeneration gas intake port (302) that receives regeneration gas for the dehumidifier (300) and a regeneration gas discharge port (304) that discharges regeneration gas. Additionally, the dehumidifier (300) can be connected to an outside air intake port (306), and the flow of gas at the outside air intake port (306) can be controlled by an intake port valve (307).

[0075] An EFEM including a regenerative dehumidifier according to another embodiment of the present disclosure can operate in a circulating manner, wherein the gas passing through the first space (1S) of the EFEM chamber (110) is dehumidified by the dehumidifier (300) and then supplied back to the first space (1S).

[0076] The dehumidifier used in the EFEM described above with reference to FIGS. 5 to 7 may be a regenerative dehumidifier, and the regenerative dehumidifier may be a desiccant-type dehumidifier. A desiccant is a type of drying agent that has a strong affinity for moisture and is a substance capable of absorbing moisture contained in a gas, and is a substance that can be used repeatedly as its affinity for moisture is restored by heating.

[0077] The dehumidifier (300) can receive gas for regeneration through the regeneration container gas intake port (302), and the gas used for regeneration can be discharged through the regeneration container gas discharge port (304). The dehumidifier (300) may include a regeneration area and a dehumidification area. The regeneration area of ​​the dehumidifier (300) may be positioned at the top of the dehumidifier (300), that is, at the top of the dehumidification area of ​​the dehumidifier (300). The regeneration container gas intake port (302) and the regeneration container gas discharge port (304) may be positioned above the outside air intake port (306) and the external connection duct (308).

[0078] Additionally, the dehumidifier (300) may be positioned at the bottom, that is, at the bottom of the dehumidification area during dehumidification (300), and the regeneration container gas intake port (302) and the regeneration container gas discharge port (304) may be positioned below the outside air intake port (306) and the external connection duct (308). The dehumidifier (300) may be positioned inside the EFEM chamber (110) and formed as an integral unit, or it may be positioned outside the EFEM chamber (110) and formed as a detachable unit.

[0079] The dehumidifier (300) may include a heat source, and the heat source may receive regeneration gas, raise the temperature of the regeneration gas, and supply the high-temperature regeneration gas to the regeneration area. By passing the high-temperature regeneration gas through the desiccant dehumidification module placed in the regeneration area, the desiccant dehumidification module can be regenerated.

[0080] In the case of using a conventional rotary desiccant dehumidification module, the structure is such that regeneration and dehumidification are performed by rotating the desiccant, and since space is required for the rotation of the desiccant, there was a limitation in increasing the amount of desiccant, and also, since a heater is used to make the regeneration air high-temperature air, there was a problem of consuming a large amount of power.

[0081] A desiccant dehumidifier using a heater rod according to the present disclosure can solve the problems of conventional rotary-type desiccant dehumidification modules.

[0082] FIG. 8 is a drawing showing the configuration of a desiccant dehumidifier using a heater rod according to the first embodiment of the present disclosure.

[0083] Referring to FIG. 8, a desiccant dehumidifier (300) using a heater rod according to the first embodiment of the present disclosure may be configured to include a dehumidifier body (301), a dehumidification module (DM), a regeneration blower (310), and a dehumidification blower (312).

[0084] The above dehumidifier body (301) includes a regeneration container gas intake port (302) for receiving gas used for regeneration of the dehumidifier (300), a regeneration container gas discharge port (304) for discharging regeneration gas, and an outside air intake port (306) for sucking in outside air, and can be connected to an external connection duct (308) which is a passageway for providing dehumidified gas to a blower (142). When the EFEM operates in a circulating manner, the outside air may be gas in the first space (1S) of the EFEM chamber (110), and when the EFEM operates in a non-circulating manner, the outside air may be gas outside the EFEM chamber (110).

[0085] The interior of the dehumidifier body (301) can be divided into a regeneration area (RR) and a dehumidification area (DR).

[0086] The regeneration area (RR) may be an area in which high-temperature heat is applied to the desiccant block (322) as a heat source to remove moisture absorbed by the desiccant block (322) and regenerate the desiccant block (322) back into a desiccant block (322) capable of performing a dehumidification function. The dehumidification area (DR) may be an area in which the moisture of the gas is dehumidified by passing the gas sucked in through the outside air intake port (306) through the desiccant block (322), and the dehumidified gas is provided to the first space (1S) of the EFEM chamber (110) through the external connection duct (308). In this embodiment, the regeneration area (RR) is described as being positioned above the dehumidification area (DR), but is not limited thereto, the regeneration area (RR) may be positioned below the dehumidification area (DR).

[0087] The above dehumidification module (DM) dehumidifies the gas sucked into the desiccant block (322) through the outside air intake (306) in the dehumidification area (DR), and in the regeneration area (RR), the desiccant block (322) can be regenerated by a heat source so that it can perform the dehumidification function again. To this end, the dehumidification module (DM) may be configured to include a conveyor belt (320), a desiccant block (322), a heater rod (330), and a drive shaft (324). The dehumidification module (DM) may be installed to increase the contact area with the regeneration gas moving in the regeneration area (RR). For example, if the dehumidification module (DM) has a plate shape, it may be installed so that the plate surface faces the moving regeneration gas. Additionally, the dehumidification module (DM) may be installed to increase the contact area with the gas moving in the dehumidification area (DR).

[0088] A conveyor belt (320) may be an annular belt having a plurality of desiccant blocks (322) attached to its outer surface and moving the desiccant blocks (322) to circulate between a regeneration area (RR) and a dehumidification area (DR). A heater rod (330) may be rotatably positioned to support the conveyor belt (320) inside the regeneration area (RR) side of the conveyor belt (320), and a drive shaft (324) may be positioned in the dehumidification area (DR) of the conveyor belt (320).

[0089] The desiccant block (322) functions to absorb moisture from the gas in the dehumidification area (DR) and is a component that is regenerated in the regeneration area (RR) and dehumidifies the gas again in the dehumidification area (DR), and can be attached to the outer surface of the conveyor belt (320). The desiccant block (322) can be attached in the form of a block having a length corresponding to the width of the conveyor belt (320), but is not limited thereto; for example, the desiccant block (322) may be composed of a plurality of blocks having a length smaller than the width of the conveyor belt (320). The desiccant block (322) can be detachably attached to the outer surface of the conveyor belt (320).

[0090] The desiccant block (322) may be formed from a material including silica gel, zeolite, etc. The desiccant block (322) may also be formed from a polymer adsorption material. When the desiccant block (322) is formed from a polymer adsorption material, a heat source with a lower temperature than the heat source used for general desiccant drying may be used. For example, when the desiccant block (322) is formed from a polymer adsorption material, a heat source providing heat of 60°C to 80°C may be used for desiccant drying.

[0091] The heater rod (330) is positioned inside the regeneration area (RR) side of the conveyor belt (320) and rotates to support the conveyor belt (320). The heater rod (330) can regenerate the desiccant block (322) by applying heat directly or indirectly to the desiccant block (322) in the regeneration area (RR). For example, the heater rod (330) can regenerate the desiccant block (322) indirectly by heating the regeneration gas in the regeneration area (RR), or by heating the desiccant block (322) in the regeneration area (RR) that is in contact with the heater rod (330).

[0092] The heater rod (330) can supply heat in the regeneration area (RR) by heating an internal heating wire with the supply of external power, and can also supply heat in the regeneration area (RR) by using a heat-conducting medium inside.

[0093] The above drive shaft (324) is positioned inside the dehumidification area (DR) side of the conveyor belt (320) and can provide rotational force to the conveyor belt (320). By using the driving force provided by a drive motor (not shown), the drive shaft (324) can rotate the conveyor belt (320), thereby circulating the desiccant block (322) attached to the conveyor belt (320) from the regeneration area (RR) to the dehumidification area (DR).

[0094] The above-mentioned regeneration blower (310) is positioned in the regeneration area (RR) and can move the regeneration gas from the regeneration gas intake port (302) to the regeneration gas discharge port (304). The regeneration blower (310) may be positioned between the regeneration gas discharge port (304) and the desiccant block (322) of the regeneration area (RR), but is not limited thereto.

[0095] The above dehumidifying blower (312) is positioned in the dehumidification area (DR) and can dehumidify the gas by allowing it to move from the outside air intake (306) through the desiccant block (322) to the external connection duct (308). The dehumidifying blower (312) may be positioned between the desiccant block (322) and the external connection duct (308) of the dehumidification area (DR), but is not limited thereto.

[0096] The dehumidification module (DM) may have an overall plate-like shape, with the heater rod (330) positioned inside the regeneration area (RR) of the conveyor belt (320) and the drive shaft (324) positioned in the dehumidification area (DR) of the conveyor belt (320). When the dehumidification module (DM) has a plate-like shape, it may be installed so that the plate surface faces the regeneration gas moving in the regeneration area (RR), or so that the plate surface faces the gas moving in the dehumidification area (DR).

[0097] The dehumidification module (DM) may be installed such that the plate surface of the dehumidification module (DM) forms a constant angle with the direction in which the regeneration gas moves. For example, the dehumidification module (DM) may be installed such that it forms a 90° angle with the direction in which the regeneration gas moves from the regeneration gas intake port (302) to the regeneration gas outlet port (304). The dehumidification module (DM) may also be installed such that it forms an angle smaller than 90° with the direction in which the regeneration gas moves. If the angle between the dehumidification module (DM) and the direction in which the regeneration gas moves becomes smaller, the surface area of ​​the desiccant block (322) in contact with the regeneration gas may be increased. The dehumidification module (DM) may also be installed such that it forms a constant angle with the direction in which the gas moves from the outside air intake port (306) to the external connection duct (308).

[0098] The dehumidification module (DM) of a desiccant dehumidifier using a heater rod according to an embodiment of the present disclosure has a plate-like shape and a structure that circulates between a regeneration area (RR) and a dehumidification area (DR). Therefore, the installation angle of the dehumidification module (DM) in the regeneration area (RR) can be related to the installation angle of the dehumidification module (DM) in the dehumidification area (DR). The installation angle of the dehumidification module (DM) can be appropriately selected by considering the efficiency of the regeneration area (RR) and the dehumidification area (DR).

[0099] Although the desiccant dehumidifier using a heater rod according to the present disclosure described above has been explained by exemplifying a case where there is one dehumidification module (DM) and one heater rod (330) of the dehumidification module (DM), the desiccant dehumidifier using a heater rod according to the present disclosure is not limited thereto. For example, the desiccant dehumidifier using a heater rod according to the present disclosure may include a plurality of dehumidification modules (DM), and the dehumidification module (DM) may include a plurality of heater rods (330).

[0100] FIG. 9 is a drawing showing the configuration of a desiccant dehumidifier using a heater rod according to a second embodiment of the present disclosure.

[0101] Referring to FIG. 9, the dehumidification module (DM) of a desiccant dehumidifier using a heater rod according to the second embodiment of the present disclosure may include a plurality of heater rods.

[0102] As an example, a dehumidification module (DM) of a desiccant dehumidifier using a heater rod according to a second embodiment of the present disclosure may include a first heater rod (330) and a second heater rod (332).

[0103] The dehumidification module (DM) may have an overall plate-like shape, with the first heater rod (330) positioned inside the regeneration area (RR) side of the conveyor belt (320) and the drive shaft (324) positioned inside the dehumidification area (DR) side of the conveyor belt (320). The second heater rod (332) is positioned between the first heater rod (330) and the drive shaft (324), and is positioned in the regeneration area (RR) to support the conveyor belt (320) located in the regeneration area (RR).

[0104] The first heater rod (330) and the second heater rod (332) can regenerate the desiccant block (322) by applying heat directly or indirectly to the desiccant block (322) in the regeneration area (RR). For example, the heater rod (330) can regenerate the desiccant block (322) indirectly by heating the regeneration gas in the regeneration area (RR), or the desiccant block (322) in the regeneration area (RR) that comes into contact with the heater rod (330) can regenerate the desiccant block (322).

[0105] The dehumidification module (DM) of a desiccant dehumidifier using a heater rod according to the second embodiment of the present disclosure can regenerate the desiccant block (322) using two heater rods, so the height of the dehumidifier (300) can be reduced compared to the case where the desiccant block (322) is regenerated using one heater rod.

[0106] Although the dehumidification module (DM) of a desiccant dehumidifier using a heater rod according to an embodiment of the present disclosure has been described as having a plate-like shape, it is not limited thereto, and the two heater rods (330, 332) may be arranged parallel to the direction in which the regeneration gas flows to have an overall triangular shape.

[0107] FIG. 10 is a drawing showing the configuration of a desiccant dehumidifier using a heater rod according to a third embodiment of the present disclosure.

[0108] Referring to FIG. 10, a desiccant dehumidifier using a heater rod according to the third embodiment of the present disclosure may include a plurality of dehumidification modules (DM).

[0109] As an example, a desiccant dehumidifier using a heater rod according to the third embodiment of the present disclosure may include a first dehumidification module (DM1) and a second dehumidification module (DM2).

[0110] The first dehumidification module (DM1) may be installed at a constant angle with respect to the direction in which the regeneration gas moves from the regeneration container gas intake port (302) to the regeneration container gas outlet (304). For example, the dehumidification module (DM1) may be installed at an angle of 90° with respect to the direction in which the regeneration gas moves from the regeneration container gas intake port (302) to the regeneration container gas outlet (304). The first dehumidification module (DM1) may also be installed at an angle smaller than 90° with respect to the direction in which the regeneration gas moves. The second dehumidification module (DM2) may be installed parallel to the first dehumidification module (DM).

[0111] The first dehumidification module (DM) may be installed at a constant angle to the direction in which the gas moves from the outside air intake (306) to the external connection duct (308). The second dehumidification module (DM2) may be installed parallel to the first dehumidification module (DM).

[0112] A desiccant dehumidifier using a heater rod according to the third embodiment of the present disclosure can regenerate a desiccant block (322) using two desiccant modules (DM), so the dehumidification effect of the dehumidifier (300) can be increased compared to the case where a desiccant block (322) is regenerated using one desiccant module (DM).

[0113] FIG. 11 is a drawing showing the configuration of a desiccant dehumidifier using a heater rod according to the fourth embodiment of the present disclosure.

[0114] Referring to FIG. 11, a desiccant dehumidifier using a heater rod according to the fourth embodiment of the present disclosure includes a plurality of dehumidification modules (DM), and each dehumidification module (DM) may be configured to include a plurality of heater rods.

[0115] As an example, a desiccant dehumidifier using a heater rod according to the fourth embodiment of the present disclosure may include a first dehumidification module (DM1) and a second dehumidification module (DM), and the first dehumidification module (DM1) and the second dehumidification module (DM) may each be configured to include a first heater rod (330) and a second heater rod (332).

[0116] A desiccant dehumidifier using a heater rod according to the fourth embodiment of the present disclosure is omitted in detail because its configuration and effect are identical or similar to those described in the second embodiment of FIG. 9 and the fourth embodiment of FIG. 10.

[0117] As described above, according to the present embodiment, a desiccant dehumidification device using a heater rod that does not require a rotating space to replace a rotary desiccant, and an EFEM including the same can be provided.

[0118] And according to the present embodiment, a desiccant dehumidification device using a heater rod that can expand the desiccant according to the required desiccant capacity and an EFEM including the same can be provided.

[0119] And according to the present embodiment, a desiccant dehumidification device using a heater rod and an EFEM including the same can be provided, which can reduce the height occupied by the regeneration area of ​​the dehumidifier.

[0120] Terms such as "include," "compose," or "have" as described above, unless specifically stated otherwise, mean that the relevant component may be inherent; therefore, they should be interpreted as allowing for the inclusion of additional components rather than excluding them. All terms, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains, unless otherwise defined. Commonly used terms, such as those defined in advance, should be interpreted in accordance with their meaning in the context of the relevant technology and should not be interpreted in an ideal or overly formal sense unless explicitly defined in the present invention.

[0121] The foregoing description is merely an illustrative explanation of the technical concept of the present invention, and those skilled in the art to which the present invention pertains will be able to make various modifications and variations within the scope of the essential characteristics of the present invention. Accordingly, the embodiments disclosed in the present invention are intended to explain, not limit, the technical concept of the present invention, and the scope of the technical concept of the present invention is not limited by these embodiments. The scope of protection of the present invention shall be interpreted by the claims below, and all technical concepts within an equivalent scope shall be interpreted as being included within the scope of rights of the present invention. Explanation of the symbols

[0122] 100: EFEM (Equipment Front End Module) 110 : EFEM Chamber 112 : Perforated board 114 : Collection plate 118 : Blower outside air intake 119 : Blower valve 120: FOUP (Front Opening Unified Pod) 130 : Load port module 140 : FFU 142 : Blower 144 : Fan 146 : Filter 210 : Load lock device 220 : Return chamber 230 : Process Chamber 300: Dehumidifier 302 : Regeneration container gas intake port 304 : Recycling container gas discharge port 306 : Outside air intake 307 : Intake valve 308 : External connection duct 309 : External connection valve 310 : Playback Blower 312 : Dehumidifying blower 320 : Conveyor belt 322 : Desiccant block 324 : Drive shaft 330,332 : Heater rod, 1st heater rod 1S: First space 2S: Second space RR: Playback area DR: Dehumidification Zone DM: Dehumidification module DM1: 1st Dehumidification Module DM2: 2nd Dehumidification Module

Claims

Claim 1 A FOUP (Floating Out of Supply) on which a substrate to be processed is loaded; a chamber communicating with the FOUP through a door and in which the substrate temporarily resides; and a dehumidifier for dehumidifying gas and supplying the dehumidified gas into the chamber; wherein the dehumidifier comprises: a dehumidifier body having an interior divided into a regeneration area and a dehumidification area; and a dehumidification module disposed inside the dehumidifier body, wherein gas is dehumidified by a desiccant block in the dehumidification area and the desiccant block is regenerated by a heater rod in the regeneration area to perform a dehumidification function; wherein the dehumidification module comprises: an annular conveyor belt to which a plurality of the desiccant blocks are attached and which moves the desiccant blocks to circulate between the regeneration area and the dehumidification area; and a first heater rod and a second heater rod disposed inside the regeneration area side of the conveyor belt, which rotate and support the conveyor belt. A desiccant dehumidification device using heater rods and an EFEM including the same, comprising: a drive shaft disposed inside the dehumidification area side of the conveyor belt and providing rotational force to the conveyor belt; wherein the first heater rod and the second heater rod are disposed parallel to the direction in which the regeneration gas flows, so that the conveyor belt as a whole has a triangular shape by the drive shaft, the first heater rod, and the second heater rod; wherein the dehumidification module is installed inside the dehumidifier body at an angle of 90° or less with respect to the direction in which the regeneration gas moves in the regeneration area; wherein the desiccant block is detachably attached to the outer surface of the conveyor belt in the form of a block having a length corresponding to the width of the conveyor belt; and wherein the first heater rod and the second heater rod apply heat directly or indirectly to the desiccant block in the regeneration area to regenerate the desiccant block. Claim 2 delete Claim 3 delete Claim 4 delete Claim 5 delete Claim 6 In claim 1, the desiccant dehumidification device using a heater rod, wherein the dehumidification module includes a first dehumidification module and a second dehumidification module, and the first dehumidification module and the second dehumidification module are installed parallel to each other inside the body of the dehumidifier. Claim 7 delete Claim 8 A dehumidifier body having an interior divided into a regeneration area and a dehumidification area; and a dehumidification module disposed inside the dehumidifier body, wherein gas is dehumidified by a desiccant block in the dehumidification area and the desiccant block is regenerated by a heater rod in the regeneration area to perform a dehumidification function; wherein the dehumidification module comprises: a ring-shaped conveyor belt to which a plurality of the desiccant blocks are attached and which moves the desiccant blocks to circulate between the regeneration area and the dehumidification area; and a first heater rod and a second heater rod disposed inside the regeneration area side of the conveyor belt, which rotate and support the conveyor belt. A desiccant dehumidification device comprising: a drive shaft disposed inside the dehumidification area side of the conveyor belt and providing rotational force to the conveyor belt; wherein the dehumidification module is installed inside the dehumidifier body at an angle of 90° or less with respect to the direction in which the regeneration gas moves in the regeneration area; wherein the desiccant block is detachably attached to the outer surface of the conveyor belt in the form of a block having a length corresponding to the width of the conveyor belt; wherein the first heater rod and the second heater rod are arranged parallel to the direction in which the regeneration gas flows, so that the conveyor belt has an overall triangular shape due to the drive shaft, the first heater rod, and the second heater rod; and wherein the first heater rod and the second heater rod apply heat directly or indirectly to the desiccant block in the regeneration area to regenerate the desiccant block. Claim 9 delete Claim 10 delete Claim 11 delete Claim 12 In claim 8, the desiccant dehumidification device comprises a dehumidification module including a first dehumidification module and a second dehumidification module, wherein the first dehumidification module and the second dehumidification module are installed parallel to each other inside the body of the dehumidifier and include a heater rod. Claim 13 delete

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