Canister with internal heating capability

Abstract

The present invention relates to a canister capable of internal heating, wherein the canister accommodates a target solid and causes it to sublimate upon heating, comprising: a container body having an internal receiving space formed therein, a cover connected to the upper portion so as to be openable and closable, and a lower plate formed on the lower portion; an internal receiving portion composed of a shaft inserted vertically into the container body and a plurality of plates connected longitudinally to the outer surface of the shaft; and a heating means formed in the internal receiving portion to heat and sublimate the target solid to generate gas.

Description

Technology Field

[0001] The present invention relates to a canister capable of internal heating, and more specifically, to a canister capable of internal heating that generates gas by sublimating a solid. Background Technology

[0002] Generally, various types of source gases are used in semiconductor manufacturing processes, display processes, or LED manufacturing processes for producing semiconductor devices.

[0003] Conventional semiconductor manufacturing processes consist of forming circuit elements by applying multilayer thin films using semiconductor, conductor, and insulator materials and etching the necessary patterns onto each film. Among these processes, the formation of thin films using various materials is the most essential and general step. There are various methods for stacking thin films, among which Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD) are representative.

[0004] A particularly widely used method is the CVD method, in which a wafer is placed in a process chamber and reaction gases, divided and contained in multiple canisters (bubblers), are injected through an injector to form an interlayer insulating film on the wafer using the material generated by the chemical reaction, planarize the film formed on the wafer, or form silicon oxide films, silicon nitride films, etc., to achieve other purposes.

[0005] The physical properties of thin films deposited by Chemical Vapor Deposition (CVD) are highly sensitive to CVD process conditions, such as deposition pressure, deposition temperature, and deposition time. In particular, since the composition, density, adhesion, and deposition rate of the deposited film can change depending on variations in deposition pressure, controlling the deposition pressure is crucial in the CVD process.

[0006] In the CVD process, deposition pressure is directly affected by the flow rate of the source gas supplied from the canister. The canister is a device in the CVD apparatus that heats the source material of the thin film to be deposited, vaporizes or sublimates it into the source gas, and then supplies it to the deposition chamber. Therefore, to accurately control the deposition pressure in the CVD process, it is essential to precisely control the amount of vaporization or sublimation of the source material in the canister (i.e., the pressure of the source gas).

[0007] As described above, a heating element is provided in the canister to vaporize or sublimate the source material into a source gas.

[0008] However, conventional heating elements of canisters could not maintain a uniform temperature inside the canister, so the source gas that vaporized or sublimated within the canister condensed again, reducing the amount of vaporization or sublimation of the source material and causing a problem in that the source gas could not be smoothly supplied into the deposition chamber.

[0009] Korean Patent Application No. 10-2010-0083731 discloses a 'canister temperature control device'.

[0010] A brief overview of the prior art includes a jacket body that surrounds the outer surface of a canister and has a heat transfer medium circulating inside; a thermoelectric module that cools or heats the heat transfer medium by performing an endothermic or exothermic reaction; a circulation pump that circulates the heat transfer medium cooled or heated by the thermoelectric module into the jacket body; and a control unit that controls the thermoelectric module to regulate the temperature of the heat transfer medium and maintain the temperature of the canister at a constant level.

[0011] The jacket body has a structure in which a thermal pad, an insulating pad, and a cover are stacked in sequence, with one side in contact with the outer surface of the canister, and a circulation hose is installed inside the thermal pad, which has an inlet and an outlet and provides a path for the heat transfer medium to circulate.

[0012] Meanwhile, conventional technology generated gas by heating a solid contained within a canister and used a carrier gas (argon, helium, nitrogen) to move the gas; however, this resulted in increased costs, and since the gas and carrier gas were mixed, the carrier gas had to be removed in a subsequent process, which further increased costs. Additionally, there were limitations in sublimating large quantities of solid. Prior art literature

[0013] Korean Patent Application No. 10-2010-0083731 The problem to be solved

[0014] The present invention was devised to resolve the problems of the prior art. Its purpose is to provide an internally heated canister capable of improving efficiency and reducing costs by increasing the capacity of the canister and equipping each of the multi-stage baffles with heating means to provide heating performance for the enlarged internal space, thereby enabling the heating function required for large volumes of gas, and by allowing high-temperature heat to be uniformly transferred to the upper portion of the sublimated gas without using a carrier gas, thus eliminating the need for a process to recover the carrier gas. means of solving the problem

[0016] The objective of the present invention described above can be achieved by a canister capable of internal heating, comprising: a container body having an internal receiving space, a cover connected to the upper portion so as to be openable and closable, and a lower plate formed on the lower portion; an internal receiving portion composed of a shaft inserted vertically into the container body and a plurality of plates connected longitudinally to the outer surface of the shaft; and a heating means formed in the internal receiving portion to heat and sublimate the target solid to generate gas.

[0017] The above internal receptacle is characterized by having a passage formed inside the shaft seal for inserting a power line, a through hole formed on the outer surface that connects to a plate, and allowing the power line to pass through the through hole and be connected to the plate, and the heating means is formed on the plate and connected to the power line.

[0018] The heating means is a planar heating element formed on the surface of a plate, and the planar heating element is characterized by being a conductive film based on carbon nanotubes.

[0019] The plates, which are joined in a plurality in the longitudinal direction to the outer surface of the shaft, are configured as a pair symmetrically on both sides of the shaft, and the plurality of pairs of plates are arranged in the longitudinal direction, characterized in that the pair of plates on both sides are arranged at the same height or the pair of plates on both sides are arranged at different heights.

[0020] The above plate is characterized by having a heating element insertion groove formed on its outer surface into which a planar heating element is inserted, a recessed portion formed on one outer surface of the plate corresponding to the outer circumference of a shaft, a locking groove portion that is fitted complementarily to the recessed portion on the outer circumference of the shaft, and a locking portion formed in the locking groove portion to lock the recessed portion of the plate.

[0021] The above locking part comprises a protruding fitting pin inserted into an insertion hole formed around the latching groove of the shaft seal, and

[0022] It is characterized by including a spring inserted into an insertion hole to elastically support a fitting pin, and a pin hole formed on the inner circumference of the recessed portion into which the fitting pin is fitted.

[0023] The above locking part is characterized by including a position setting part that moves in the longitudinal direction of the shaft to adjust the position of the plate.

[0024] The above position setting unit is characterized by including a rail groove formed in a longitudinal direction for a certain length on the outer surface of the shaft, and a bed that is fitted into and coupled to the rail groove and has a spring and a fitting pin combined therein.

[0025] The gas conveying means is formed inside the container body and guides the sublimated gas to rise; wherein the gas conveying means comprises a gas supply unit that injects air through a passage inside the shaft seal, a plurality of gas injection nozzles formed on the outer surface of the shaft seal, a gas conveying path formed inside the plate, a gas discharge hole formed on the upper surface of the plate that passes through the gas conveying path, and an injection hole formed at the end of the gas conveying path that passes through the through hole of the shaft seal, so that air injected from the gas supply unit is sprayed through the gas discharge hole and sprayed upward. Effects of the invention

[0027] According to the present invention, by increasing the capacity of the canister and equipping each of the multi-stage baffles with heating means to provide heating performance for the enlarged internal space, the heating function required for large-capacity gas can be achieved. Furthermore, by enabling high-temperature heat to be uniformly transferred to the upper portion of the sublimated gas without using a carrier gas, the process of recovering the carrier gas is eliminated, thereby providing the effect of improving efficiency and reducing costs. Brief explanation of the drawing

[0029] FIG. 1 is a perspective view showing an internally heat-generating canister according to the present invention. FIG. 2 is a cross-sectional view of a canister capable of internal heating according to the present invention. FIG. 3 is a perspective view showing an 'internal receptacle' of a canister capable of internal heating according to the present invention. FIG. 4 is a perspective view of the 'plate of the internal receiver' of a canister capable of internal heating according to the present invention. FIG. 5 is a perspective view showing a 'plate' according to another embodiment of a canister capable of internal heating according to the present invention. FIG. 6 is a cross-sectional view showing a 'plate' according to another embodiment of a canister capable of internal heating according to the present invention. FIG. 7 is a drawing showing a ‘locking part’ of an internally heat-generating canister according to the present invention. FIG. 8 is a cross-sectional view showing a 'gas transport means' of a canister capable of internal heating according to the present invention. Specific details for implementing the invention

[0030] Hereinafter, embodiments are described in detail with reference to the attached drawings. However, various modifications may be made to the embodiments, and thus the scope of the patent application is not limited or restricted by these embodiments. It should be understood that all modifications, equivalents, and substitutions to the embodiments are included within the scope of the rights.

[0031] Specific structural or functional descriptions of the embodiments are disclosed for illustrative purposes only and may be modified and implemented in various forms. Accordingly, the embodiments are not limited to the specific disclosed forms, and the scope of this specification includes modifications, equivalents, or substitutions that fall within the technical concept.

[0032] Terms such as "first" or "second" may be used to describe various components, but these terms should be interpreted solely for the purpose of distinguishing one component from another. For example, the first component may be named the second component, and similarly, the second component may be named the first component.

[0033] When it is stated that a component is "connected" to another component, it should be understood that it may be directly connected to or coupled with that other component, or that there may be other components in between.

[0034] The terms used in the embodiments are for illustrative purposes only and should not be interpreted as intended to be limiting. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as "comprising" or "having" are intended to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0035] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the embodiments pertain. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0036] In addition, when describing with reference to the attached drawings, identical components are assigned the same reference numeral regardless of drawing symbols, and redundant descriptions thereof are omitted. In describing the embodiments, if it is determined that a detailed description of related prior art could unnecessarily obscure the essence of the embodiments, such detailed description is omitted.

[0037] The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims.

[0038] In the embodiments of the present invention, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in the embodiments of the present invention.

[0039] The shapes, sizes, ratios, angles, numbers, etc. disclosed in the drawings for explaining embodiments of the present invention are exemplary, and therefore the present invention is not limited to the depicted details. Furthermore, in describing the present invention, if it is determined that a detailed description of related known technology may unnecessarily obscure the essence of the present invention, such detailed description is omitted. Where terms such as "includes," "has," or "is made up" are used in this specification, other parts may be added unless "only" is used. Where a component is expressed in the singular, it includes cases where it includes the plural unless specifically stated otherwise.

[0040] In interpreting the components, they are interpreted to include a margin of error even in the absence of a separate explicit statement.

[0041] In the case of describing a positional relationship, for example, when the positional relationship between two parts is described using expressions such as 'on,' 'upper,' 'lower,' or 'next to,' one or more other parts may be located between the two parts unless 'immediately' or 'directly' is used.

[0042] When elements or layers are referred to as "on" another element or layer, this includes cases where another layer or element is placed directly on top of or in between. Throughout the specification, the same reference numerals refer to the same components.

[0043] The size and thickness of each component shown in the drawings are illustrated for convenience of explanation, and the present invention is not necessarily limited to the size and thickness of the illustrated components.

[0044] The features of each of the various embodiments of the present invention may be combined or combined with one another, either partially or wholly, and as will be fully understood by those skilled in the art, various technical interlocking and operation are possible, and each embodiment may be implemented independently of one another or together in an interlocking relationship.

[0046] Among the attached drawings, FIG. 1 is a perspective view showing an internally heat-generating canister according to the present invention, FIG. 2 is a cross-sectional view of an internally heat-generating canister according to the present invention, FIG. 3 is a perspective view showing an 'internal receptacle' of an internally heat-generating canister according to the present invention, FIG. 4 is a perspective view of a 'plate of the internal receptacle' of an internally heat-generating canister according to the present invention, FIG. 5 is a perspective view showing a 'plate' according to another embodiment of an internally heat-generating canister according to the present invention, FIG. 6 is a cross-sectional view showing a 'plate' according to another embodiment of an internally heat-generating canister according to the present invention, FIG. 7 is a drawing showing a 'locking part' of an internally heat-generating canister according to the present invention, and FIG. 8 is a cross-sectional view showing a 'gas transfer means' of an internally heat-generating canister according to the present invention.

[0048] A canister capable of generating internal heat according to the present invention is,

[0049] In a canister in which a target solid is contained internally and sublimated by heating,

[0050] A container body (2) having a receiving space (20) formed inside, a cover (22) connected to the top so as to be openable and closable, and a bottom plate (24) formed on the bottom;

[0051] An internal receiver (4) composed of a shaft (42) vertically inserted into a container body (2) and a plurality of plates (3) coupled longitudinally to the outer surface of the shaft (42);

[0052] It is configured to include a heating means (6) formed in an internal receiver (4) to heat and sublimate a target solid to generate gas.

[0054] The above-mentioned target solid may be a solid precursor or a liquid precursor.

[0055] In the case of solid precursors, 'solid' includes forms of fine particles, such as powder.

[0056] The precursor may be a material comprising at least one of molybdenum, boron, phosphorus, copper, gallium, arsenic, ruthenium, indium, antimony, lanthanum, tantalum, iridium, decaborane (B10H14), hafnium tetrachloride (HfCl4), zirconium tetrachloride (ZrCl4), indium trichloride (InCl3), metal organic β-diketonate complex, cyclopentadienyl cycloheptatriethyl titanium (CpTiChT), aluminum trichloride (AlCl3), titanium iodide (TixIy), cyclooctatetraene cyclopentadienyl titanium, and tungsten chloride.

[0057] It should be noted that this is merely one example and is not necessarily limited to it.

[0059] The container body (2) is formed in a cylindrical shape, and after the internal receiving space (4) is inserted, a cover (22) is attached to the top to seal it.

[0060] A gas discharge outlet (23) is formed in the cover (22), a plurality of connection ports (24) are formed so that a pressure gauge and a thermometer are installed respectively, and a shaft mounting part (25) is formed to which the upper end of the shaft seal (42) of the internal receiver (4) is connected.

[0061] Power supply lines, air supply lines, etc. can be connected to the shaft mounting part (25).

[0063] The above internal receiver (4) consists of a shaft (42) that is vertically inserted into the interior of the container body (2) and a plurality of plates (3) mounted on the outer surface of the shaft (42).

[0064] Multiple plates (3) are mounted in the longitudinal direction on the outer surface of the shaft (42).

[0065] The plate (3) is made of a metal or non-metal material and has a semicircular shape as its basic form. Of course, the shape of the plate can be formed into various shapes as needed.

[0066] The plates (3) are formed as a pair symmetrically on both sides of the shaft (42).

[0067] Accordingly, multiple pairs of plates (3) are arranged in the longitudinal direction to form.

[0068] A pair of side plates (3) may be formed by being arranged at the same height or by being arranged at different heights.

[0070] Preferably, the plate (3) has a protective layer (W) formed on its surface that can withstand high heat and prevent contamination.

[0071] The plate (3) is formed by injecting a composition into an extrusion molding machine and then extruding it, based on 100 parts by weight of a metal material selected from stainless steel or a metal mixed with aluminum and magnesium, comprising 2 to 4 parts by weight of epoxy resin, 3 to 4 parts by weight of inorganic filler, 2 to 3 parts by weight of curing agent, and 3 to 5 parts by weight of silicone resin.

[0072] The inorganic filler is aluminum oxide. Aluminum oxide improves thermal conductivity and can ensure heat resistance and mechanical strength.

[0073] The curing agent may be selected from phenol novolak or aromatic amine, or a mixture thereof. The curing agent acts to stabilize the structure through a thermal curing reaction.

[0075] The protective film layer (W) is coated on the surface of the plate with a thickness of 0.5 to 2 mm and is made of a synthetic resin mixed with a photocatalyst.

[0076] The protective film layer is formed by mixing one or more materials selected from titanium oxide, zinc oxide, and aluminum oxide into a resin base that is a mixture of polyimide resin and polytetrafluoroethylene (PTFE).

[0077] According to one example, it is made by mixing 5 to 10 parts by weight of polytetrafluoroethylene (PTFE), 2 to 4 parts by weight of titanium oxide, 2 to 4 parts by weight of zinc oxide, and 2 to 4 parts by weight of aluminum oxide, based on 100 parts by weight of polyimide resin.

[0078] [Experimental Example]

[0079] Hereinafter, experiments were conducted by comparing Examples 1 to 3 of the present invention with comparative examples. However, the following examples are merely illustrative of the present invention, and the content of the present invention is not limited to the following examples.

[0080] [Example 1]

[0081] A composition comprising 2 parts by weight of epoxy resin, 3 parts by weight of inorganic filler, 2 parts by weight of curing agent, and 3 parts by weight of silicone resin, based on 100 parts by weight of stainless steel, is injected into an extrusion molding machine and then extruded to produce a plate (3).

[0082] A protective film layer (W) is formed on the surface of the above-manufactured plate (3).

[0083] The protective film layer (W) is formed by mixing 5 parts by weight of polytetrafluoroethylene (PTFE) based on 100 parts by weight of polyimide resin, and then mixing 2 parts by weight of titanium oxide, 2 parts by weight of zinc oxide, and 2 parts by weight of aluminum oxide to obtain a composition, which is then coated on the surface of the plate (3) to a thickness of 0.5 mm.

[0084] [Example 2]

[0085] A composition comprising 3 parts by weight of epoxy resin, 3 parts by weight of inorganic filler, 3 parts by weight of curing agent, and 4 parts by weight of silicone resin is mixed with 100 parts by weight of a metal material mixed with aluminum and magnesium, and then injected into an extrusion molding machine and extruded to produce a plate (3).

[0086] A protective film layer (W) is formed as a coating on the surface of the plate.

[0087] The protective film layer (W) is obtained by mixing 7 parts by weight of polytetrafluoroethylene (PTFE) based on 100 parts by weight of polyimide resin, and then mixing 3 parts by weight of titanium oxide, 3 parts by weight of zinc oxide, and 3 parts by weight of aluminum oxide, and then coating the resulting composition on the surface of the plate (3) to a thickness of 1.0 mm.

[0088] [Example 3]

[0089] A protective film layer (W) is formed on the surface of the plate (3).

[0090] A composition comprising 4 parts by weight of epoxy resin, 4 parts by weight of inorganic filler, 3 parts by weight of curing agent, and 5 parts by weight of silicone resin is mixed based on 100 parts by weight of a metal material consisting of 70 wt% stainless steel and 30 wt% aluminum and magnesium, and then injected into an extrusion molding machine to extrude a plate (3).

[0091] A protective film layer (W) is formed on the surface of the plate (3).

[0092] The protective film layer (W) is obtained by mixing 10 parts by weight of polytetrafluoroethylene (PTFE) based on 100 parts by weight of polyimide resin, and then mixing 4 parts by weight of titanium oxide, 4 parts by weight of zinc oxide, and 4 parts by weight of aluminum oxide, and then coating the resulting composition onto the surface of the plate (3) to a thickness of 2.0 mm.

[0093] [Comparative Example]

[0094] Stainless steel plates available on the market.

[0096] After loading the internal receiver (4) equipped with the plate (3) manufactured according to Examples 1 to 3 of the present invention and the plate according to the comparative example into the container body (2), a sublimation process was performed for 1 hour each day for 30 days.

[0097] Afterward, the deformation of the plate (3) was visually identified, and the degree of deformation and cleaning power were evaluated on a 5-point scale (the less wear or deformation, the better, and this was rated as a maximum of 5 points), and the results were shown in Table 1.

[0098] Example 1 Example 2 Example 3 Comparative example Degree of deformation 4.1 4.3 4.9 2.3 Cleaning power 4.2 4.5 4.8 3.1

[0099] As a result of the above experiment, it was found that the plate (3) according to Examples 1 to 3 of the present invention had minimal deformation and excellent cleaning power.

[0101] Meanwhile, the shaft (42) has a passage (420) formed inside through which a power line (T) is inserted. A through hole (422) is formed on the outer surface of the shaft (42) that leads to the plate (3).

[0102] A power line (T) is inserted and wired through the passage (420), and the power line (T) is wired through the through hole (422) and connected to the plate (3) so that power is supplied to the heating means (6).

[0103] The heating means (6) is formed on the plate (3) and connected to the power line (T), so that it can generate heat by power supply.

[0104] According to one example, the heating means (6) may be a planar heating element (62) formed on the surface of the plate (3).

[0105] The planar heating element (62) may be a conductive film based on carbon nanotubes (CNT).

[0106] Carbon nanotube (CNT) films are very thin films composed of a two-dimensional carbon nanotube network.

[0107] Carbon tubes usually exhibit a randomly arranged pattern, but they can be arranged in a regular pattern.

[0108] Carbon nanotube (CNT) films are ultrathin sheets ranging from 1 nm to 100 nm.

[0110] Meanwhile, according to another embodiment, as shown in FIG. 5, the plate (3) has a heating element insertion groove (32) formed on its outer surface into which a planar heating element (62) is inserted.

[0111] On one side of the outer surface of the plate (3), a recessed portion (33) is formed that is concavely recessed corresponding to the outer circumference of the shaft (42).

[0112] Accordingly, the outer surface of the shaft (42) may include a locking groove (424) that is fitted complementarily to the recessed portion (33), and a locking portion (46) formed in the locking groove (424) to lock the recessed portion (33) of the plate (3).

[0113] The height of the recess (33) of the plate (3) is equal to the inner height of the catch groove (424), or the catch groove (424) is formed slightly larger so that the recess (33) of the plate (3) can be inserted into the catch groove (424) and fitted together.

[0114] Accordingly, the recess (33) of the plate (3) is fitted into the locking groove (424) of the shaft (42), and the locking part (46) is operated to fix the plate (3).

[0115] According to one example,

[0116] Referring to FIG. 7, the locking part (46) is

[0117] A protruding fitting pin (462) that is inserted into an insertion hole (4240) formed around the locking groove (424) of the shaft (42), and

[0118] A spring (464) inserted into an insertion hole (4240) to elastically support the insertion pin (462) and

[0119] It is configured to include a pin hole (466) formed on the inner circumference of the recess (33) into which a fitting pin (462) is inserted.

[0120] Therefore, after the recessed portion (33) is inserted into the catch groove portion (424), the fitting pin (462) can be protruded and inserted into the pin hole (466) of the recessed portion (33) to be fixed.

[0121] The insertion pin (462) is formed to correspond to the upper and lower portions of the recess (33), respectively.

[0122] The insertion pin (462) has a hemispherical end and a spring (464) is attached to its outer surface, so when the recessed part (33) is inserted, the insertion pin (462) is pulled inward, and when it aligns with the pin hole (466), the insertion pin (462) protrudes and is inserted, thereby creating a locking state.

[0123] Conversely, if the plate (3) is pulled outward, the insertion pin (462) is inserted, and the plate (3) can be separated from the shaft (42).

[0125] Meanwhile, the locking part (46) includes a position setting part (5) that moves in the longitudinal direction of the shaft (42) to adjust the position of the plate (3).

[0126] Referring to FIG. 8, the position setting unit (5) is

[0127] A rail groove (52) formed in a longitudinal direction with a certain length on the outer surface of the shaft (42), and

[0128] It is configured to include a bed (54) that is fitted into and joined to the rail groove (52) and has a spring (464) and a fitting pin (462) combined therein.

[0129] Therefore, the bed (54) can be moved up and down along the rail groove (52), and the position can be set by moving the plate (3), to which the fitting pin (462) of the bed (54) is attached, up and down along the outer surface of the shaft (42).

[0130] A first rack gear (55) is formed on the rear side of the bed (54), and a second rack gear (58) is formed on the inner circumference of the rail groove (52) to be engaged with it.

[0131] The first rack gear (55) is fitted into an insertion groove (540) formed on the rear side of the bed (54), and a spring (542) is coupled to the insertion groove (540) so that the first rack gear (55) is elastically supported.

[0132] By moving the bed (54) in the up and down direction, the first rack gear (55) can be temporarily fixed while moving along the second rack gear (58).

[0133] By this position setting, the gap between the upper plate (3) and the lower plate (3) can be adjusted, and an appropriate gap can be set to suit the amount of gas being sublimated.

[0135] It may include a gas transport means (7) formed inside the above container body (2) and guiding the sublimated gas to rise.

[0136] Referring to FIG. 8, the gas transport means (7) is

[0137] A gas supply unit (72) that injects air and passes through the internal passage (420) of the shaft (42), and

[0138] A plurality of gas injection nozzles (74) formed on the outer surface of the shaft (42), and

[0139] A gas transfer path (75) formed inside the plate (3), a gas discharge hole (76) formed on the upper surface of the plate (3) and communicating with the gas transfer path (75), and an injection hole (77) formed at the end of the gas transfer path (75) are formed to communicate with the through hole (422) of the shaft (42), so that air injected from the gas supply unit (72) is sprayed into the gas discharge hole (76) and sprayed upward.

[0140] The gas can be argon, helium, or nitrogen, and is used to empty the container by rapidly releasing residual gas to the outside after sublimation.

[0142] Although embodiments of the present invention have been described in more detail with reference to the attached drawings, the present invention is not necessarily limited to these embodiments and may be modified in various ways within the scope of the technical spirit of the present invention. Accordingly, the embodiments disclosed in the present invention are intended to explain, not limit, the technical spirit of the present invention, and the scope of the technical spirit of the present invention is not limited by these embodiments. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. The scope of protection of the present invention shall be interpreted by the claims below, and all technical spirits within an equivalent scope shall be interpreted as being included within the scope of rights of the present invention.

[0143] Therefore, other implementations, other embodiments, and equivalents to the claims also fall within the scope of the claims set forth below. Explanation of the symbols

[0144] 2 : Container body 3 : Plate 4 : Internal receptor 5 : Positioning unit 6 : Heating means 7 : Gas transfer means 22 : Cover 25 : Shaft seal mounting part 42 : Shaft seal 46 : Locking part 52 : Rail home 54 : Bed 72 : Gas injection nozzle 75 : Gas transfer path 76 : Gas discharge port 77 : Injection port 462 : Insert pin 464 : Spring 466 : Pinhole

Claims

Claim 1 A canister capable of internal heating, comprising: a container body having an internal receiving space, a cover connected to the upper portion so as to be openable and closable, and a lower plate formed on the lower portion; an internal receiving portion composed of a shaft inserted vertically into the container body and a plurality of plates connected longitudinally to the outer surface of the shaft; and a heating means formed in the internal receiving portion to heat and sublimate the target solid to generate gas; wherein the internal receiving portion has a passage formed inside the shaft for inserting a power line and a through hole formed on the outer surface that connects to a plate, and the power line passes through the through hole and is connected to the plate, and the heating means is formed in the plate and connected to the power line. Claim 2 delete Claim 3 In claim 1, the heating means is a planar heating element formed on the surface of a plate, the planar heating element is a conductive film based on carbon nanotubes, and a plurality of plates coupled longitudinally to the outer circumference of the shaft are configured as a pair symmetrically on both sides of the shaft, and a plurality of pairs of plates are arranged longitudinally, and a pair of side plates are arranged at the same height or a pair of side plates are arranged at different heights, and the plate has a heating element insertion groove formed on its outer surface into which the planar heating element is inserted, and a recessed portion is formed on one side of the outer surface of the plate corresponding to the outer circumference of the shaft, and the outer circumference of the shaft includes a locking groove portion that is fitted complementarily to the recessed portion and a locking portion formed in the locking groove portion to lock the recessed portion of the plate; and the locking portion includes a fitting pin protruding by being fitted into an insertion hole formed around the locking groove portion of the shaft, a spring inserted into the insertion hole to elastically support the fitting pin, and a spring formed on the inner circumference of the recessed portion A canister capable of internal heating, comprising: a pinhole into which a fitting pin is inserted; a locking part including a position setting part that moves in the longitudinal direction of the shaft to adjust the position of the plate; wherein the position setting part includes a rail groove formed in a certain length in the longitudinal direction on the outer circumference of the shaft, and a bed coupled to the rail groove and coupled with a spring and a fitting pin, and a gas transfer means formed inside the container body and guiding the sublimated gas to rise; wherein the gas transfer means includes a gas supply part that passes through a passage inside the shaft and injects air, a plurality of gas injection nozzles formed on the outer circumference of the shaft, a gas transfer path formed inside the plate, a gas discharge hole formed on the upper surface of the plate that passes through the gas transfer path, and an injection hole formed at the end of the gas transfer path that passes through the through hole of the shaft, so that air injected from the gas supply part is sprayed through the gas discharge hole and sprayed upward.

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