Canister with internal heating capability and laminated structure

Abstract

The present invention relates to a canister capable of internal heating having a stacked structure, and to a solid sublimation canister in which powder is contained internally and sublimated by heating, comprising: a container body having a receiving space formed internally, a cover coupled to the upper portion so as to be openable and closable, and a lower plate formed on the lower portion; a shaft vertically inserted into the container body, a powder storage portion stacked in multiple layers in the longitudinal direction on the outer circumference of the shaft and filled with powder; and a heating means coupled to the powder storage portion and capable of transferring heat to sublimate the powder and generate gas.

Description

Technology Field

[0001] The present invention relates to a canister capable of internal heating having a laminated structure, and more specifically, to a canister capable of internal heating having a laminated structure that generates gas by sublimating a solid. Background Technology

[0002] Generally, various types of source gases are used in semiconductor manufacturing processes, display processes, or LED manufacturing processes for producing semiconductor devices.

[0003] Conventional semiconductor manufacturing processes consist of forming circuit elements by applying multilayer thin films using semiconductor, conductor, and insulator materials and etching the necessary patterns onto each film. Among these processes, the formation of thin films using various materials is the most essential and general step. There are various methods for stacking thin films, among which Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD) are representative.

[0004] A particularly widely used method is the CVD method, in which a wafer is placed in a process chamber and reaction gases, divided and contained in multiple canisters (bubblers), are injected through an injector to form an interlayer insulating film on the wafer using the material generated by the chemical reaction, planarize the film formed on the wafer, or form silicon oxide films, silicon nitride films, etc., to achieve other purposes.

[0005] The physical properties of thin films deposited by Chemical Vapor Deposition (CVD) are highly sensitive to CVD process conditions, such as deposition pressure, deposition temperature, and deposition time. In particular, since the composition, density, adhesion, and deposition rate of the deposited film can change depending on variations in deposition pressure, controlling the deposition pressure is crucial in the CVD process.

[0006] In the CVD process, deposition pressure is directly affected by the flow rate of the source gas supplied from the canister. The canister is a device in the CVD apparatus that heats the source material of the thin film to be deposited, vaporizes or sublimates it into the source gas, and then supplies it to the deposition chamber. Therefore, to accurately control the deposition pressure in the CVD process, it is essential to precisely control the amount of vaporization or sublimation of the source material in the canister (i.e., the pressure of the source gas).

[0007] As described above, a heating element is provided in the canister to vaporize or sublimate the source material into a source gas.

[0008] However, conventional heating elements of canisters could not maintain a uniform temperature inside the canister, so the source gas that vaporized or sublimated within the canister condensed again, reducing the amount of vaporization or sublimation of the source material and causing a problem in that the source gas could not be smoothly supplied into the deposition chamber.

[0009] Korean Patent Application No. 10-2010-0083731 discloses a 'canister temperature control device'.

[0010] A brief overview of the prior art includes a jacket body that surrounds the outer surface of a canister and has a heat transfer medium circulating inside; a thermoelectric module that cools or heats the heat transfer medium by performing an endothermic or exothermic reaction; a circulation pump that circulates the heat transfer medium cooled or heated by the thermoelectric module into the jacket body; and a control unit that controls the thermoelectric module to regulate the temperature of the heat transfer medium and maintain the temperature of the canister at a constant level.

[0011] The jacket body has a structure in which a thermal pad, an insulating pad, and a cover are stacked in sequence, with one side in contact with the outer surface of the canister, and a circulation hose is installed inside the thermal pad, which has an inlet and an outlet and provides a path for the heat transfer medium to circulate.

[0012] Meanwhile, conventional technology involves filling a tray contained within a canister with solid powder, stacking another tray on top of it, and repeating the process of filling with solid powder. As a result, the process of filling the internal space of the canister with solid powder was cumbersome and difficult, and there was a disadvantage that the amount of powder that could be filled was small.

[0013] In addition, there was a disadvantage that cleaning was difficult due to the stacked structure of the trays formed inside the canister. Prior art literature

[0014] Korean Patent Application No. 10-2010-0083731 The problem to be solved

[0015] The present invention was devised to resolve the problems of the prior art, and aims to provide an internally heat-generating canister having a stacked structure that allows powder filling to be easy, the filling amount to be increased, and cleaning to be easily performed after the powder storage unit is easily removed from the container body, by enabling the powder storage unit, which is integrated by penetrating and connecting to the multi-layered stacked trays, to be connected to or separated from the container body while the powder-filled trays are stacked in multiple layers.

[0016] In addition, the purpose is to provide an internally heated canister having a laminated structure that can improve efficiency and reduce costs by equipping the trays with heating means to provide heating performance for each tray, thereby enabling the heating function required for large volumes of gas. means of solving the problem

[0018] The objective of the present invention described above can be achieved by a solid sublimation canister capable of internal heating having a stacked structure, comprising: a container body having an internal receiving space, a cover connected to the upper portion so as to be openable and closable, and a lower plate formed on the lower portion; a shaft vertically inserted into the container body, a powder storage portion stacked in multiple stages in the longitudinal direction on the outer circumference of the shaft and filled with powder; and a heating means connected to the powder storage portion and capable of transferring heat to sublimate the powder and generate gas.

[0019] The lid of the container body comprises a wire inlet formed on its upper surface for inserting a wire, and a hollow shaft coupled to the lower part of the lid to communicate with the wire inlet; the powder storage portion comprises a disc-shaped plate with a fitting tube formed in the center through which the hollow shaft is coupled, a tray formed by a side wall vertically formed on the outer periphery of the plate, an electrode rod insertion tube formed through the upper surface of the plate and on the outer side of the fitting tube, and a powder moving portion formed through the upper surface of the plate and on the outer side of the electrode rod insertion tube. The heating means comprises a lower plate formed by blocking the lower part of the container body, a tube body formed vertically inside the container body to communicate with the lower plate and through which the electrode rod insertion tube is coupled, and a screw coupling portion formed exposed on the outer side of the lower plate, a heating coil tube inserted inside the tube body, a stopper formed at the lower part of the heating coil tube and screw-coupled to the screw coupling portion, and a heating wire inserted inside the heating coil tube. It is characterized by including a power supply unit that is coupled through the plug and has a wire inserted into the shaft of the cover.

[0020] The powder moving part is characterized by having an arc-shaped guide wall formed vertically having the same curvature as the side wall of the tray, an elongated hole formed through the plate of the tray, and including an opening / closing control device for controlling the opening rate of the elongated hole.

[0021] The above-described opening / closing control device is characterized by comprising: a control plate inserted into a buried hollow formed inside a plate and pulled out or inserted through a slot formed on the inner circumference of the elongated hole to open or close the elongated hole; a shaft screw-coupled to the side wall of a tray to move the control plate, inserted into the buried hollow, with the control plate fitted at one end; and a knob formed at the other end of the shaft.

[0022] The guide wall of the powder moving part is characterized by being formed to slope inward toward the top, such that the cross-sectional area of ​​the upper elongated hole formed at the top of the side wall is smaller than the cross-sectional area of ​​the lower elongated hole.

[0023] The gas discharge unit is formed on the inner circumference of the guide wall and moves the internal gas of the powder moving unit upward; the gas discharge unit includes a rotating blade in which brackets are mounted spaced apart on both sides of the inner circumference of the guide wall and a shaft pin is hinge-coupled horizontally to both brackets, and a driving source that exerts power to rotate the rotating blade, wherein the driving source includes a motor equipped with a driven gear formed at the end of the shaft pin and a driving gear that is meshed with the driven gear.

[0024] The heating means comprises a planar heating element formed on the surface of a plate of a tray, wherein the planar heating element comprises a conductive film based on carbon nanotubes, and the plate is characterized by having a heating element insertion groove formed on its outer surface into which the planar heating element is inserted.

[0025] A shaft is coupled to the fitting tube portion of the tray and includes a locking portion to fix the tray, wherein the locking portion is characterized by including a spring inserted into an insertion hole formed in the shaft, a fitting pin inserted into the insertion hole with a portion protruding and elastically supported by the spring, and a pin hole formed on the inner circumference of the fitting tube portion into which the fitting pin is inserted. Effects of the invention

[0027] According to the present invention, a powder storage unit integrated by penetrating and connecting to the multi-layered stacked trays in a state where the powder-filled trays are stacked in multiple layers can be connected to or separated from the canister container body, thereby facilitating the powder filling process, increasing the filling volume, and making it easy to clean after easily removing the powder storage unit from the container body. Brief explanation of the drawing

[0029] FIG. 1 is a perspective view showing an internally heat-generating canister having a laminated structure according to the present invention. FIG. 2 is an exploded perspective view showing an internally heat-generating canister having a laminated structure according to the present invention. FIG. 3 is a cross-sectional perspective view showing an internally heat-generating canister having a laminated structure according to the present invention. FIG. 4 is a perspective view showing a 'powder storage portion' in an internally heat-generating canister having a laminated structure according to the present invention. FIG. 5 is an enlarged cross-sectional view of a key part of the 'tray of the powder storage portion' in an internally heat-generating canister having a laminated structure according to the present invention. FIG. 6 is a cross-sectional view showing a 'tray' of a powder storage unit according to another embodiment of the present invention. FIG. 7 is a cross-sectional view showing a 'tray' of a powder storage unit according to another embodiment. FIG. 8 is a cross-sectional view showing the 'gas discharge section' of the tray of the powder storage section according to the present invention. FIG. 9 is a drawing showing a ‘locking part’ of an internally heat-generating canister having a stacked structure according to the present invention. FIG. 10 is a drawing showing the 'position setting part' of the tray of the powder storage part according to the present invention. Specific details for implementing the invention

[0030] Hereinafter, embodiments are described in detail with reference to the attached drawings. However, various modifications may be made to the embodiments, and thus the scope of the patent application is not limited or restricted by these embodiments. It should be understood that all modifications, equivalents, and substitutions to the embodiments are included within the scope of the rights.

[0031] Specific structural or functional descriptions of the embodiments are disclosed for illustrative purposes only and may be modified and implemented in various forms. Accordingly, the embodiments are not limited to the specific disclosed forms, and the scope of this specification includes modifications, equivalents, or substitutions that fall within the technical concept.

[0032] Terms such as "first" or "second" may be used to describe various components, but these terms should be interpreted solely for the purpose of distinguishing one component from another. For example, the first component may be named the second component, and similarly, the second component may be named the first component.

[0033] When it is stated that a component is "connected" to another component, it should be understood that it may be directly connected to or coupled with that other component, or that there may be other components in between.

[0034] The terms used in the embodiments are for illustrative purposes only and should not be interpreted as intended to be limiting. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as "comprising" or "having" are intended to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0035] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the embodiments pertain. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0036] In addition, when describing with reference to the attached drawings, identical components are assigned the same reference numeral regardless of drawing symbols, and redundant descriptions thereof are omitted. In describing the embodiments, if it is determined that a detailed description of related prior art could unnecessarily obscure the essence of the embodiments, such detailed description is omitted.

[0037] The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims.

[0038] In the embodiments of the present invention, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in the embodiments of the present invention.

[0039] The shapes, sizes, ratios, angles, numbers, etc. disclosed in the drawings for explaining embodiments of the present invention are exemplary, and therefore the present invention is not limited to the depicted details. Furthermore, in describing the present invention, if it is determined that a detailed description of related known technology may unnecessarily obscure the essence of the present invention, such detailed description is omitted. Where terms such as "includes," "has," or "is made up" are used in this specification, other parts may be added unless "only" is used. Where a component is expressed in the singular, it includes cases where it includes the plural unless specifically stated otherwise.

[0040] In interpreting the components, they are interpreted to include a margin of error even in the absence of a separate explicit statement.

[0041] In the case of describing a positional relationship, for example, when the positional relationship between two parts is described using expressions such as 'on,' 'upper,' 'lower,' or 'next to,' one or more other parts may be located between the two parts unless 'immediately' or 'directly' is used.

[0042] When elements or layers are referred to as "on" another element or layer, this includes cases where another layer or element is placed directly on top of or in between. Throughout the specification, the same reference numerals refer to the same components.

[0043] The size and thickness of each component shown in the drawings are illustrated for convenience of explanation, and the present invention is not necessarily limited to the size and thickness of the illustrated components.

[0044] The features of each of the various embodiments of the present invention may be combined or combined with one another, either partially or wholly, and as will be fully understood by those skilled in the art, various technical interlocking and operation are possible, and each embodiment may be implemented independently of one another or together in an interlocking relationship.

[0046] Among the attached drawings, FIG. 1 is a perspective view showing an internally heat-generating canister having a laminated structure according to the present invention; FIG. 2 is an exploded perspective view showing an internally heat-generating canister having a laminated structure according to the present invention; FIG. 3 is a cross-sectional view showing an internally heat-generating canister having a laminated structure according to the present invention; FIG. 4 is a perspective view showing a 'powder storage portion' in an internally heat-generating canister having a laminated structure according to the present invention; FIG. 5 is an enlarged cross-sectional view of a key part of the 'tray of the powder storage portion' in an internally heat-generating canister having a laminated structure according to the present invention; FIG. 6 is a cross-sectional view showing a 'tray' of a powder storage portion according to another embodiment of the present invention; FIG. 7 is a cross-sectional view showing a 'tray' of a powder storage portion according to yet another embodiment; FIG. 8 is a cross-sectional view showing a 'gas discharge portion' of the tray of the powder storage portion according to the present invention; FIG. 9 is a drawing showing a 'locking portion' of an internally heat-generating canister having a laminated structure according to the present invention; FIG. 10 is a drawing showing a 'position setting portion' of the tray of the powder storage portion according to the present invention This is a diagram.

[0048] A canister capable of internal heating having a laminated structure according to the present invention is,

[0049] In a solid sublimation canister in which powder is contained internally and sublimated by heating,

[0050] A container body (2) having a receiving space (20) formed inside, a cover (22) connected to the top so as to be openable and closable, and a bottom plate (24) formed on the bottom;

[0051] A shaft (41) vertically inserted into the above-mentioned container body (2), and a powder storage section (4) that is multi-layered in the longitudinal direction on the outer surface of the shaft (41) and filled with powder; and

[0052] It is configured to include a heating means (6) coupled to the powder storage part (4) above, which transfers heat to sublimate the powder and generate gas.

[0054] The above powder may be a solid precursor or a liquid precursor.

[0055] In the case of solid precursors, 'solid' includes forms of fine particles, such as powder.

[0056] The precursor may be a material comprising at least one of molybdenum, boron, phosphorus, copper, gallium, arsenic, ruthenium, indium, antimony, lanthanum, tantalum, iridium, decaborane (B10H14), hafnium tetrachloride (HfCl4), zirconium tetrachloride (ZrCl4), indium trichloride (InCl3), metal organic β-diketonate complex, cyclopentadienyl cycloheptatriethyl titanium (CpTiChT), aluminum trichloride (AlCl3), titanium iodide (TixIy), cyclooctatetraene cyclopentadienyl titanium, and tungsten chloride.

[0057] It should be noted that this is merely one example and is not necessarily limited to it.

[0059] The container body (2) is formed in a cylindrical shape, and after the powder storage part (4) is inserted into the internal receiving space, a cover (22) is attached to the top to seal it.

[0060] A gas discharge outlet (23) is formed in the cover (22), and a plurality of connection ports (not shown) are formed so that a pressure gauge and a thermometer are installed respectively. A hollow shaft (41) is formed vertically at the bottom with a predetermined length to be combined with the powder storage section (4), and a wire inlet (412) is formed at the top for inserting a wire.

[0062] The above powder storage unit (4)

[0063] A tray (5) formed by a disc-shaped plate (52) having a fitting tube portion (51) through which the above-mentioned hollow shaft (41) is connected in the center, and a side wall (53) formed vertically on the outer circumference of the plate (52), and

[0064] An electrode rod insertion tube portion (42) formed through the upper surface of the plate (52) and formed on the outer side of the fitting tube portion (51), and

[0065] It is configured to include a powder moving part (7) formed through the upper surface of the plate (52) and formed on the outer side of the electrode rod insertion tube part (42).

[0067] The tray (5) is formed in a multi-stage configuration by connecting multiple trays in the longitudinal direction to the outer surface of the shaft (41).

[0068] The tray (5) is made of a metal or non-metal material and has a basic shape of a disc. Of course, the shape of the tray can be formed into various shapes as needed.

[0070] Meanwhile, the powder moving part (7) may be formed by vertically forming an arc-shaped guide wall (72) having the same curvature as the side wall (53) of the tray (5), and forming an elongated hole (520) through the plate (52), and may include an opening / closing control member (54) that controls the opening rate of the elongated hole (520).

[0071] Referring to FIG. 6, the opening / closing control member (54)

[0072] A control plate (542) that is inserted into a buried hollow (521) formed inside a plate (52) and is pulled out or inserted through a slot (5201) formed on the inner surface of an elongated hole (520) to open or close the elongated hole (520), and

[0073] A shaft (544) that is screw-coupled to the side wall (53) of the tray (5) to move the control plate (542), inserted into the embedded hollow (521), and has the control plate (542) fitted onto one end thereof,

[0074] A knob (545) is formed at the other end of the shaft (544).

[0076] When the knob (545) is rotated, the shaft (544) is rotated by screw coupling to push the control plate (542) into the elongated hole (520) or pull it out of the elongated hole, so that the control plate (542) can adjust the opening rate of the elongated hole (520), and thereby the amount of gas passing through the powder moving part (7) can be adjusted.

[0078] Alternatively, referring to FIG. 7, the guide wall (72) of the powder moving part (7') according to another embodiment is formed to be inclined inward toward the top, so that the cross-sectional area of ​​the upper elongated hole (520') formed at the top of the guide wall (72) is smaller than the cross-sectional area of ​​the lower elongated hole (520).

[0080] According to another embodiment, it may include a gas discharge part (8) formed on the inner circumference of the guide wall (72) to move the internal gas of the powder moving part (7) upward.

[0081] By driving the gas discharge section (8) to assist the rise of the airflow inside the guide wall (72), the gas sublimated in the lower tray (5) can be promoted to move upward toward the elongated hole (520) of the powder moving section (7) of the upper tray (5).

[0083] Referring to FIG. 8, the gas discharge section (8) is

[0084] A rotating blade (82) having brackets (81) mounted spaced apart on both sides of the inner circumference of a guide wall (72), and a pivot pin (821) horizontally hinge-connected to both brackets (81), and

[0085] It includes a driving source (84) that exerts power to rotate the rotating blade (82).

[0087] The driving source (84) includes a motor (841) equipped with a driven gear (842) formed at the end of a shaft pin (821) and a driving gear (843) that is engaged with the driven gear (842).

[0088] The motor (841) is electrically connected to a control unit (not shown) provided in the cover (22) of the container body (2), and the on-off operation of the motor (841) is controlled by an on-off signal from the control unit.

[0089] When the motor (841) is turned on, the rotating blade (82) can be rotated to generate a force that raises the gas, allowing for rapid and large-scale gas delivery.

[0091] Meanwhile, the heating means (6) is

[0092] A bottom plate (27) formed by blocking the lower part of the container body (2), and a tube body (62) formed vertically inside the container body (2) so as to be connected to the bottom plate (27) and through which the electrode rod insertion tube part (42) is connected, and a screw connection part formed on the outside of the bottom plate (27)

[0093] A heating coil tube (63) inserted into the interior of a tube body (62), and

[0094] A plug (64) formed at the lower part of the heating coil tube (63) and screw-coupled to the screw coupling part, and

[0095] It is configured to include a power supply unit (not shown) having a wire inserted into the shaft (41) of the cover (22) and connected to a heating wire inserted inside the heating coil tube and connected through the plug (64).

[0097] The power supply unit may be a power device that is constantly supplied from an external source or a battery.

[0098] The power supply unit is an externally provided constant power source, and after being wired through a shaft, it passes through a cap and connects to the heating coil tube.

[0100] Meanwhile, the heating means (6) may include a planar heating element (58) formed on the surface of the tray (5).

[0101] The planar heating element (58) may be a conductive film based on carbon nanotubes (CNT).

[0102] Carbon nanotube (CNT) films are very thin films composed of a two-dimensional carbon nanotube network.

[0103] Carbon tubes usually exhibit a randomly arranged pattern, but they can be arranged in a regular pattern.

[0104] Carbon nanotube (CNT) films are ultrathin sheets ranging from 1 nm to 100 nm.

[0106] Meanwhile, a heating element insertion groove (52) into which a planar heating element (58) is inserted is formed on the lower outer surface of the tray (5).

[0107] In addition, a shaft (41) is connected to the fitting tube portion (51) of the tray (5), and a locking portion (46) is formed to secure the tray (5).

[0108] The locking part (46) is configured to include a spring (411) inserted into an insertion hole (410) formed in the shaft (41), a fitting pin (412) inserted into the insertion hole (410) with a portion protruding and elastically supported by the spring, and a pin hole (510) formed on the inner circumference of the fitting tube part (51) into which the fitting pin (412) is inserted.

[0109] Therefore, after the shaft (41) is inserted into the fitting tube, the fitting pin (412) can be protruded and inserted into the pin hole (510) to be fixed.

[0110] Conversely, if the tray (5) is pulled outward, the insertion pin (412) is inserted, and the tray (5) can be separated from the shaft (41).

[0112] Meanwhile, the tray (5) has a protective layer (not shown) formed on its surface to withstand high heat and prevent contamination.

[0113] The tray (5) is formed by injecting into an extrusion molding machine and then extruding a composition comprising 2 to 4 parts by weight of epoxy resin, 3 to 4 parts by weight of inorganic filler, 2 to 3 parts by weight of curing agent, and 3 to 5 parts by weight of silicone resin into 100 parts by weight of a metal material selected from stainless steel or a metal mixed with aluminum and magnesium.

[0114] The inorganic filler is aluminum oxide. Aluminum oxide improves thermal conductivity and can ensure heat resistance and mechanical strength.

[0115] The curing agent may be selected from phenol novolak or aromatic amine, or a mixture thereof. The curing agent acts to stabilize the structure through a thermal curing reaction.

[0117] The protective film layer is coated on the surface of the tray with a thickness of 0.5 to 2 mm and is made of a synthetic resin mixed with a photocatalyst.

[0118] The protective film layer is formed by mixing one or more materials selected from titanium oxide, zinc oxide, and aluminum oxide into a resin base that is a mixture of polyimide resin and polytetrafluoroethylene (PTFE).

[0119] According to one example, it is made by mixing 5 to 10 parts by weight of polytetrafluoroethylene (PTFE), 2 to 4 parts by weight of titanium oxide, 2 to 4 parts by weight of zinc oxide, and 2 to 4 parts by weight of aluminum oxide, based on 100 parts by weight of polyimide resin.

[0120] [Experimental Example]

[0121] Hereinafter, experiments were conducted by comparing Examples 1 to 3 of the present invention with comparative examples. However, the following examples are merely illustrative of the present invention, and the content of the present invention is not limited to the following examples.

[0122] [Example 1]

[0123] A composition comprising 2 parts by weight of epoxy resin, 3 parts by weight of inorganic filler, 2 parts by weight of curing agent, and 3 parts by weight of silicone resin, based on 100 parts by weight of stainless steel, is injected into an extrusion molding machine and then extruded to manufacture a tray (5).

[0124] A protective film layer is formed on the surface of the above-manufactured tray (5).

[0125] The protective film layer is obtained by mixing 5 parts by weight of polytetrafluoroethylene (PTFE) based on 100 parts by weight of polyimide resin, and then mixing 2 parts by weight of titanium oxide, 2 parts by weight of zinc oxide, and 2 parts by weight of aluminum oxide, and then coating the resulting composition on the surface of the tray (5) to a thickness of 0.5 mm.

[0126] [Example 2]

[0127] A composition comprising 3 parts by weight of epoxy resin, 3 parts by weight of inorganic filler, 3 parts by weight of curing agent, and 4 parts by weight of silicone resin is mixed with 100 parts by weight of a metal material mixed with aluminum and magnesium, and then injected into an extrusion molding machine and extruded to manufacture a tray (5).

[0128] A protective film layer is formed on the surface of the tray.

[0129] The protective film layer is obtained by mixing 7 parts by weight of polytetrafluoroethylene (PTFE) based on 100 parts by weight of polyimide resin, and then mixing 3 parts by weight of titanium oxide, 3 parts by weight of zinc oxide, and 3 parts by weight of aluminum oxide, and then coating the resulting composition on the surface of the tray (5) to a thickness of 1.0 mm.

[0130] [Example 3]

[0131] A protective film layer is formed on the surface of the tray (5).

[0132] A composition comprising 4 parts by weight of epoxy resin, 4 parts by weight of inorganic filler, 3 parts by weight of curing agent, and 5 parts by weight of silicone resin is mixed based on 100 parts by weight of a metal material consisting of 70 wt% stainless steel and 30 wt% aluminum and magnesium, and then injected into an extrusion molding machine to extrude a tray (5).

[0133] A protective film layer is formed on the surface of the tray (5).

[0134] The protective film layer is obtained by mixing 10 parts by weight of polytetrafluoroethylene (PTFE) based on 100 parts by weight of polyimide resin, and then mixing 4 parts by weight of titanium oxide, 4 parts by weight of zinc oxide, and 4 parts by weight of aluminum oxide, and then coating the resulting composition onto the surface of the tray (5) to a thickness of 2.0 mm.

[0135] [Comparative Example]

[0136] Stainless steel trays available on the market.

[0138] After loading the powder storage unit (4), each equipped with a tray (5) manufactured according to Examples 1 to 3 of the present invention and a tray according to a comparative example, into the container body (2), a sublimation process was carried out for 1 hour each day for 30 days.

[0139] Afterward, the deformation of the tray (5) was visually identified, and the degree of deformation and cleaning power were evaluated on a 5-point scale (the less wear or deformation, the better, and this was rated as a maximum of 5 points), and the results were shown in Table 1.

[0140] Example 1 Example 2 Example 3 Comparative example Degree of deformation 4.1 4.3 4.9 2.3 Cleaning power 4.2 4.5 4.8 3.1

[0141] As a result of the above experiment, it was found that the tray (5) according to Examples 1 to 3 of the present invention had minimal deformation and excellent cleaning power.

[0143] Meanwhile, a passage (420) is formed inside the shaft (41) to which a power line (T) is inserted. A through hole (422) is formed on the outer surface of the shaft (41) to connect to the tray (5).

[0144] A power line (T) is inserted and wired through the passage (420), and the power line (T) is wired through the through hole (422) and connected to the tray (5) so that power is supplied to the heating means (6).

[0145] The heating means (6) is formed in the tray (5) and connected to the power line (T), so that it can generate heat by power supply.

[0147] Meanwhile, the locking part (46) includes a position setting part (9) that moves in the longitudinal direction of the shaft (41) to adjust the position of the tray (5).

[0148] Referring to FIG. 10, the position setting unit (9) is

[0149] A rail groove (418) formed in a longitudinal direction with a certain length on the outer surface of the shaft (41), and

[0150] It is configured to include a bed (94) formed on the inner surface of the fitting tube portion (51) of the tray (5) and fitted into the rail groove (418).

[0151] Therefore, the bed (94) can be moved up and down along the rail groove (418), and the position can be set by moving the adjustment member (95), to which the insertion pin (412) of the bed (94) is attached, up and down along the outer surface of the shaft (41).

[0152] A first rack gear (951) is formed on the rear surface of the adjustment member (95), and a second rack gear (952) is formed on the inner surface of the rail groove (418) to be engaged with it.

[0153] The first rack gear (951) is fitted into an insertion groove (940) formed on the rear side of the bed (94), and a spring (942) is coupled to the insertion groove (540) so that the first rack gear (951) is elastically supported.

[0154] The fitting tube portion (51) of the tray (5) can be moved up and down so that the first rack gear (951) moves along the second rack gear (952) and is temporarily fixed.

[0155] By this position setting, the gap between the upper tray (5) and the lower tray (5) can be adjusted, and an appropriate gap can be set to suit the amount of gas being sublimated.

[0157] Although embodiments of the present invention have been described in more detail with reference to the attached drawings, the present invention is not necessarily limited to these embodiments and may be modified in various ways within the scope of the technical spirit of the present invention. Accordingly, the embodiments disclosed in the present invention are intended to explain, not limit, the technical spirit of the present invention, and the scope of the technical spirit of the present invention is not limited by these embodiments. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. The scope of protection of the present invention shall be interpreted by the claims below, and all technical spirits within an equivalent scope shall be interpreted as being included within the scope of rights of the present invention.

[0158] Therefore, other implementations, other embodiments, and equivalents to the claims also fall within the scope of the claims set forth below. Explanation of the symbols

[0159] 2 : Container body 4 : Powder storage compartment 5 : Tray 6 : Heating means 7, 7' : Powder transfer section 8 : Gas discharge section 22 : Cover 41 : Shaft 42: Electrode insertion tube section 52: Plate 53 : Side wall 54 : Opening / closing control mechanism 62 : Tube body 63 : Heating coil tube

Claims

Claim 1 A solid sublimation canister in which powder is contained and sublimated by heating, comprising: a container body having a receiving space formed inside, a cover connected to the upper portion so as to be openable and closable, and a lower plate formed on the lower portion; a shaft vertically inserted into the container body, and a powder storage portion stacked in multiple stages in the longitudinal direction on the outer surface of the shaft and filled with powder; and a heating means coupled to the powder storage portion and transferring heat to sublimate the powder and generate gas; wherein the lid of the container body has a wire inlet formed on its upper surface for inserting a wire, and includes a hollow shaft coupled to the lower part of the lid to communicate with the wire inlet; the powder storage portion includes a disc-shaped plate with a fitting tube formed in the center through which the hollow shaft is coupled, a tray formed by a side wall vertically formed on the outer periphery of the plate, an electrode rod insertion tube formed through the upper surface of the plate and on the outer side of the fitting tube, and a powder moving portion formed through the upper surface of the plate and on the outer side of the electrode rod insertion tube; and the heating means includes a lower plate formed by blocking the lower part of the container body, a tube body formed vertically inside the container body to communicate with the lower plate and through which the electrode rod insertion tube is coupled, and a screw coupling portion formed exposed on the outer side of the lower plate, a heating coil tube inserted inside the tube body, and at the lower part of the heating coil tube A canister capable of internal heating having a laminated structure, characterized by including a plug formed and screw-coupled to the screw coupling part, and a power supply unit connected to a heating wire inserted inside the heating coil tube and coupled through the plug, and having a wire inserted into the shaft of the cover. Claim 2 delete Claim 3 In claim 1, the powder moving part comprises a vertically formed arc-shaped guide wall having the same curvature as the side wall of the tray, and an elongated hole formed through the plate of the tray, and includes an opening / closing control mechanism for controlling the opening rate of the elongated hole; the opening / closing control mechanism comprises a control plate inserted into a buried hollow formed inside the plate and pulled out or inserted through a slot formed on the inner circumference of the elongated hole to open or close the elongated hole, a shaft screw-coupled to the side wall of the tray to move the control plate, inserted into the buried hollow, and having a control plate fitted at one end, and a knob formed at the other end of the shaft; the guide wall of the powder moving part is formed to be inwardly inclined toward the top so that the cross-sectional area of ​​the upper elongated hole formed at the top of the side wall is smaller than the cross-sectional area of ​​the lower elongated hole, and a gas discharge part formed on the inner circumference of the guide wall to move the internal gas of the powder moving part upward; wherein the gas discharge part comprises brackets spaced apart on both sides of the inner circumference of the guide wall, and horizontally on both brackets A canister capable of generating internal heat having a laminated structure, characterized in that it includes a rotating blade to which an axle pin is hinge-connected, and a driving source that exerts power to rotate the rotating blade, wherein the driving source includes a motor equipped with a driven gear formed at the end of the axle pin and a driving gear that meshes with the driven gear, wherein a shaft is connected to the fitting tube portion of the tray and a locking portion that fixes the tray is included, wherein the locking portion includes a spring inserted into an insertion hole formed in the shaft, a fitting pin inserted into the insertion hole with a portion protruding and elastically supported by the spring, and a pinhole formed on the inner circumference of the fitting tube portion into which the fitting pin is inserted.

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