Mobile robot for drilling of grill beam in semiconductor factory

Abstract

The present invention discloses a driving robot for drilling holes in a grid beam of a semiconductor factory, which performs drilling operations at designated locations while autonomously driving to prevent falling from the grid beam, a ceiling structure within the semiconductor factory, thereby replacing dangerous manual work in a high-altitude working environment and improving the precision of the work. The disclosed driving robot for punching a grid beam in a semiconductor factory is characterized by comprising: a main body; a driving unit provided on the lower side of the main body and driving along a grid beam having a plurality of through holes formed therein; a collaborative robot provided on the main body and having a drill mounted at its end to punch the grid beam; and a fall prevention guide unit that guides the driving unit to prevent it from falling into the through holes when driving along the grid beam.

Description

Technology Field

[0001] The present invention relates to a driving robot for drilling holes in a grid beam of a semiconductor factory, and more specifically, to a driving robot for drilling holes in a grid beam of a semiconductor factory that performs drilling work at a designated location while autonomously driving to prevent falling on a grid beam, which is a floor structure of a cleanroom floor of a semiconductor factory, thereby replacing dangerous manual work in a high-altitude work environment and improving the precision of the work. Background Technology

[0003] Generally, semiconductor manufacturing plants are industrial environments requiring high cleanliness and high-precision processes, and are mostly composed of high-rise facilities with cleanroom structures. In particular, in semiconductor factory buildings, concrete grid beams are constructed for the floors of the cleanroom levels, and subsequent drilling work at designated locations is essential for the installation of various equipment.

[0004] Currently, drilling work on these concrete grid beams is mostly carried out manually, with workers climbing directly onto the beams and using hammer drills.

[0005] However, since concrete grid beams are typically installed at a height of more than 10m from the lower floor, there is a safety risk that a worker may fall through a hole formed in the beam if they lose their balance while passing over the concrete grid beam or during drilling work.

[0006] In addition, conventionally, there is a limit to the daily work volume because workers must individually measure the drilling positions on the concrete grid beam and work while moving, and there is a problem of reduced work efficiency due to the accumulation of fatigue caused by repetitive work.

[0007] Therefore, there is a need for a device capable of autonomously driving a concrete grid beam and performing precise drilling operations at designated locations.

[0008] A related background technology is Korean Published Patent Application No. 10-2022-0169640 (published Dec. 28, 2022; Title: End module for drill and smart drill robot including the same). The problem to be solved

[0010] The present invention was created out of the above-mentioned necessity, and aims to provide a driving robot for drilling holes in a grid beam of a semiconductor factory that replaces dangerous manual work in a high-altitude work environment and improves the precision of the work by autonomously driving to prevent falling on a grid beam, which is a floor structure of a semiconductor factory cleanroom, and performing drilling work at a designated location. means of solving the problem

[0012] To achieve the above-mentioned objective, a driving robot for punching a grid beam in a semiconductor factory according to the present invention comprises a main body, a driving unit provided on the lower side of the main body and driving along a grid beam having a plurality of through holes formed therein, a cooperative robot provided on the main body and having a drill mounted at its end to punch the grid beam, and a fall prevention guide unit that guides the driving unit to prevent it from falling into the through holes when driving along the grid beam.

[0013] The above-mentioned fall prevention guide may include a pair of extension support members spaced apart and arranged on the front and rear sides of the driving member, respectively, and an extension support member provided on the main body to be supported on the grid beam, and a friction reduction contact member provided on the lower side of the extension support member so as to reduce frictional force between the extension support member and the surface of the grid beam.

[0014] The above friction-reducing contact part may be a pad made of polyurethane material.

[0015] The above friction-reducing contact portion may be provided with an uneven surface having alternating concave and convex shapes at the portion in contact with the grid beam.

[0016] The above-mentioned extension support can be rotated to be foldable to the front and rear sides of the main body, respectively, by means of a folding rotation operating part.

[0017] The above folding rotation operating part may include a hinge connecting part that hinge-connects the main body and the extension support part, and a rotation standing guide part that guides the extension support part to rotate around the hinge connecting part and be positioned to stand upright.

[0018] The above-described rotary standing guide may include a first connecting bracket provided on the main body, a second connecting bracket provided on the extension support, and an operating cylinder that is hinge-connected at one end to the first connecting bracket and hinge-connected at the other end to the second connecting bracket so as to be extendable and adjustable in length.

[0019] The above collaborative robot drills the area between the grid beam and the expansion support so that it can be drilled with the drill, and the expansion support may be equipped with a diffusion prevention guide that guides the collaborative robot to prevent the diffusion of dust generated when drilling the grid beam with the drill.

[0020] The above diffusion prevention guide may be disposed between the expansion support members and may include a receiving pipe member that accommodates the drill so that the drill can punch through the grid beam, and a support connecting member that connects the receiving pipe member and the expansion support member so that the receiving pipe member is supported by the expansion support member.

[0021] The above main body may be equipped with a dust collection unit that collects dust generated when the collaborative robot drills the grid beam with the drill.

[0022] The dust collection unit may include a dust collection unit housed in the main body and collecting dust by vacuum suction force, and a suction hose provided in the dust collection unit to suck up dust generated from the grid beam and supported to be linked to the operation of the collaborative robot.

[0023] A perforation mark is marked on the surface of the grid beam, and the main body may be equipped with a vision camera that recognizes the perforation mark so that the collaborative robot can perforate the area marked with the perforation mark with the drill. Effects of the invention

[0025] The driving robot for punching holes in a grid beam of a semiconductor factory according to the present invention has a structure that provides additional support points through a fall prevention guide in addition to the support points of the driving part on the grid beam. As such, it can safely drive to prevent falling from the grid beam and perform precise punching operations at a predetermined location, thereby not only replacing dangerous manual work in high-altitude working environments but also improving the precision of the punching operation. Brief explanation of the drawing

[0027] FIG. 1 is a schematic perspective view illustrating a driving robot for perforating a grid in a semiconductor factory according to one embodiment of the present invention. FIG. 2 is a schematic side view illustrating a driving robot for perforating a grid in a semiconductor factory according to one embodiment of the present invention. FIG. 3 is an operational diagram schematically illustrating the operating state of an extension support member in a driving robot for perforating a grid beam in a semiconductor factory according to one embodiment of the present invention. FIG. 4 is a schematic plan drawing illustrating the state in which a driving robot for perforating a grid beam in a semiconductor factory according to one embodiment of the present invention supports four points on the grid beam. FIG. 5 is a side view illustrating a driving robot for lattice work in a semiconductor factory according to another embodiment of the present invention. Specific details for implementing the invention

[0028] Hereinafter, a driving robot for perforating grid beams in a semiconductor factory according to an embodiment of the present invention will be described with reference to the attached drawings. In this process, the thickness of lines or the size of components shown in the drawings may be exaggerated for the clarity and convenience of explanation.

[0029] Furthermore, the terms described below are defined in consideration of their functions in the present invention, and these may vary depending on the intent or practice of the user or operator. Therefore, the definitions of these terms should be based on the content throughout this specification.

[0031] FIG. 1 is a schematic perspective view illustrating a driving robot for punching a grid beam in a semiconductor factory according to one embodiment of the present invention, FIG. 2 is a schematic side view illustrating a driving robot for punching a grid beam in a semiconductor factory according to one embodiment of the present invention, FIG. 3 is an operational diagram schematically illustrating the operating state of an extension support member in a driving robot for punching a grid beam in a semiconductor factory according to one embodiment of the present invention, FIG. 4 is a plan view schematically illustrating the state in which a driving robot for punching a grid beam in a semiconductor factory according to one embodiment of the present invention supports four points on a grid beam, and FIG. 5 is a side view illustrating a driving robot for punching a grid beam in a semiconductor factory according to another embodiment of the present invention.

[0033] As illustrated in FIGS. 1 to 5, the driving robot for lattice work in a semiconductor factory according to the present invention includes a main body (100), a driving unit (200), a collaborative robot (300), and a fall prevention guide unit (400).

[0034] The main body (100) serves to provide a space in which the driving unit (200), the collaborative robot (300), and the fall prevention guide unit (400) are installed to operate.

[0035] Although not illustrated, the interior of the main body (100) may be equipped with a battery for supplying power to the driving unit (200), the collaborative robot (300), and the fall prevention guide unit (400), respectively, and a control unit for individually controlling the operation of the driving unit (200), the collaborative robot (300), and the fall prevention guide unit (400).

[0036] The main body (100) is shown in the drawing in the shape of a rectangular box, but is not limited thereto and can be modified into various shapes.

[0037] A driving unit (200) is configured such that a pair of rotatably provided on the lower side of the main body (100) travels on a grid beam having a plurality of through holes formed therein. This driving unit (200) may be formed as an endless track that moves the grid beam by generating rotational force in the longitudinal direction on the lower side of the main body (100).

[0038] Accordingly, the driving unit (200) can not only drive continuously while securing four or more support points on the grid but also easily change the driving direction in place.

[0039] The collaborative robot (300) is provided in the main body (100) and is configured to have a drill (310) mounted at the end to punch holes in the grid beam.

[0040] The collaborative robot (300) is configured to automate the drilling operation and is preferably fixedly installed on the upper side of the main body (100), and is formed in a multi-joint shape to accurately bring the drill (310) to a designated drilling position on the grid beam.

[0041] A hole mark is marked on the surface of the grid beam at the location to be drilled by the drill (310) of the collaborative robot (300), and the main body (100) may be equipped with a vision camera (110) to recognize the hole mark.

[0042] This vision camera (110) captures and analyzes the location and shape of the perforation mark formed on the surface of the grid beam in real time, and provides coordinate data to a control unit equipped in the main body (100) so that the drill (310) can perform drilling work at an accurate point through the collaborative robot (300). That is, the vision camera (110) continuously scans the grid beam even while driving and automatically recognizes and tracks the perforation mark, thereby contributing to increasing the precision of the perforation work.

[0043] The vision camera (110) can be linked with an artificial intelligence-based image processing algorithm, so it can accurately identify the perforation mark even under various environmental conditions and can also perform the function of preventing missing perforations or duplicate perforations.

[0044] The fall prevention guide (400) is configured to guide the driving unit (200) so that it is prevented from falling into the through hole when the driving unit (200) travels along the grid beam.

[0045] The fall prevention guide (400) performs the role of helping the main body (100) to drive stably while maintaining balance on the grid beam by providing additional support points in addition to the support points of the driving part (200) on the grid beam even when the center of gravity of the main body (100) is located on some through-hole parts.

[0046] The fall prevention guide (400) may include an extension support member (410) provided on the main body (100) so as to be supported on the grid beam and positioned on the front and rear sides of the driving member (200), respectively, and a friction reduction contact member (420) provided on the lower side of the extension support member (410) so as to be supported so as to reduce frictional force on the grid beam.

[0047] The friction-reducing contact portion (420) may be a pad made of polyurethane material. Accordingly, the friction-reducing contact portion (420) not only has excellent wear resistance, but also has a low coefficient of friction with respect to the surface of the grid beam, allowing it to move smoothly while in contact with the surface of the grid beam without significant resistance.

[0048] The friction-reducing contact portion (420) may be provided with an uneven surface (421) having alternating concave and convex shapes formed at the portion in contact with the grid beam. Then, the contact area between the friction-reducing contact portion (420) and the surface of the grid beam can be further reduced, allowing for smooth and efficient movement. Furthermore, even if foreign substances are present on the surface of the grid beam, a space is formed through which they can be discharged, making it effective in preventing driving obstruction or increased friction caused by foreign substances.

[0049] The extension support member (410) can be rotated to be foldable to the front and rear sides of the main body (100) by means of the folding rotation operating member (500).

[0050] The folding rotation operating unit (500) performs the function of rotating the expansion support unit (410) so that it unfolds when the main body (100) travels on the grid beam through the driving unit (200), and rotating the expansion support unit (410) so that it folds when traveling on other passages so that movement is not restricted.

[0051] The folding rotation operating part (500) includes a hinge connecting part (510) that hinge-connects the main body (100) and the extension support part (410), and a rotation standing guide part (520) that guides the extension support part (410) to rotate around the hinge connecting part (510) and be positioned to stand upright.

[0052] The hinge connection part (510) may include a fixed hinge part (511) formed protruding from a plurality of the circumferential surface of the main body (100), and a rotating hinge part (512) formed extending from the extension support part (410) so as to be rotatably supported on the fixed hinge part (511).

[0053] The rotary standing guide (520) may include a first connecting bracket (521) provided on the main body (100), a second connecting bracket (522) extended and formed on the extension support (410), and an operating cylinder (523) having one end hinge-connected to the first connecting bracket (521) and the other end hinge-connected to the second connecting bracket (522) so as to be extendable and adjustable in length.

[0054] The operating cylinder (523) can be implemented in various ways, such as hydraulic, electric, or pneumatic, and can automatically control the position of the extension support member (410) in real time during autonomous driving of the main body (100) by linking with the control unit provided in the main body (100).

[0055] That is, when the length of the operating cylinder (523) increases, the extension support part (410) rotates around the hinge connection part (510) to spread outward so as to be supported on the grid beam, and conversely, when the length of the operating cylinder (523) decreases, it rotates around the hinge connection part (510) so as to be folded up so as to be stored in the height direction of the main body (100).

[0056] Accordingly, when traveling on the upper part of the grid beam, the extension support member (410) can be unfolded to perform an additional support function to prevent the main body (100) from falling, and when traveling on a passageway or a non-grid beam section, the extension support member (410) can be folded to minimize the movement space, thereby allowing for smooth travel even in narrow spaces.

[0057] The collaborative robot (300) drills the area between the grid beam and the expansion support member (410) so that it can be drilled with a drill (310), and the expansion support member (410) may be equipped with a diffusion prevention guide member (430) that guides the collaborative robot (300) to prevent the diffusion of dust generated when drilling the grid beam with the drill (310).

[0058] The diffusion prevention guide (430) is positioned between the expansion support members (410) and may include a receiving pipe section (431) that accommodates the drill (310) to allow the drill (310) to drill through the grid beam, and a support connecting member (432) that connects the receiving pipe section (431) and the expansion support member (410) so that the receiving pipe section (431) is supported by the expansion support member (410).

[0059] When the collaborative robot (300) receives the drill (310) in the receiving pipe section (431) and simultaneously positions it precisely at the drilling location of the grid beam, and the drill (310) is rotated to drill the grid beam, the receiving pipe section (431) performs the role of spatially confining the dust generated during drilling to prevent it from spreading to the outside.

[0060] The main body (100) may be equipped with a dust collection unit (600) that collects dust generated when the collaborative robot (300) drills a grid beam with a drill (310).

[0061] The dust collection unit (600) may include a dust collection unit (610) that is housed in the main body (100) and collects dust by vacuum suction force, and a suction hose (620) that is provided in the dust collection unit (610) to suck up dust generated from the grid and is supported to be linked to the operation of the collaborative robot (300).

[0062] Thus, the dust generated when drilling the grid beam using the drill (310) can be efficiently collected in the dust collection unit (610) through the suction hose (620) while being spatially confined by the receiving pipe (431), thereby effectively protecting the entire work environment from dust contamination.

[0063] Accordingly, the driving robot for punching grid beams in a semiconductor factory according to the present invention can not only improve punching precision but also be operated stably in a semiconductor manufacturing environment where maintaining a cleanroom-level cleanliness is essential, and can provide significant technical effects in terms of safety, productivity, and hygiene management compared to conventional manual work.

[0065] Although the present invention has been described with reference to the embodiments illustrated in the drawings, this is merely illustrative, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible therefrom.

[0066] Therefore, the true technical scope of protection of the present invention should be determined by the following claims. Explanation of the symbols

[0068] 100: Main unit 110: Vision camera 200: Driving unit 300: Collaborative robot 310: Drill 400: Fall prevention guide 410: Extended support part 420: Friction-reducing contact part 421: Uneven surface 430: Diffusion prevention guide 431: Receiving pipe section 432: Support connector 500: Hinge connection 510: Hinge connection 511: Fixed hinge part 512: Rotating hinge part 520: Rotating standing guide part 521: First connecting bracket 522: Second connecting bracket 523: Operating cylinder 600: Dust Rejection Unit 610: Dust Collector Unit 620: Suction hose

Claims

Claim 1 A driving robot for punching a grid beam in a semiconductor factory, comprising: a main body; a driving unit provided on the lower side of the main body and driving along a grid beam having a plurality of through-hole portions formed therein; a collaborative robot provided on the main body and having a drill mounted at its end to punch the grid beam; and a fall prevention guide unit that guides the driving unit to prevent falling into the through-hole portions when driving along the grid beam; wherein the fall prevention guide unit comprises a pair of extension support portions provided on the main body to be spaced apart and simultaneously supported on the grid beam, and a friction reduction contact portion provided on the lower side of the extension support portions to reduce frictional force between the extension support portions and the surface of the grid beam. Claim 2 delete Claim 3 A driving robot for perforating grid beams in a semiconductor factory, characterized in that, in claim 1, the friction-reducing contact part is a pad made of polyurethane material. Claim 4 A driving robot for punching grid beams in a semiconductor factory, characterized in that, in paragraph 3, the friction-reducing contact portion has an uneven surface with alternating concave and convex shapes formed in the portion that contacts the grid beam. Claim 5 A driving robot for perforating grids in a semiconductor factory, characterized in that, in claim 1, the extension support member is rotated to be foldable to the front and rear sides of the main body, respectively, by means of a folding rotation operating member. Claim 6 A driving robot for punching grid beams in a semiconductor factory, characterized in that, in claim 5, the folding rotation operating part comprises: a hinge connecting part that hinge-connects the main body and the extension support part; and a rotation standing guide part that guides the extension support part to rotate around the hinge connecting part and be positioned to stand upright. Claim 7 A driving robot for punching grid beams in a semiconductor factory, characterized in that, in claim 6, the rotary standing guide comprises: a first connecting bracket provided on the main body; a second connecting bracket provided on the extension support; and an operating cylinder whose length is adjustable and extendable, with one end hinge-connected to the first connecting bracket and the other end hinge-connected to the second connecting bracket. Claim 8 A driving robot for drilling a grid beam in a semiconductor factory, characterized in that, in claim 1, the collaborative robot drills the area between the grid beam and the expansion support so as to be drilled with the drill, and the expansion support is provided with a diffusion prevention guide that guides the collaborative robot to prevent the diffusion of dust generated when drilling the grid beam with the drill. Claim 9 A driving robot for drilling grid beams in a semiconductor factory, characterized in that, in claim 8, the diffusion prevention guide member comprises: a receiving tube portion disposed between the expansion support portions and receiving the drill so that the drill drills drill the grid beams; and a support connecting member connecting the receiving tube portion and the expansion support portions so that the receiving tube portion is supported by the expansion support portions. Claim 10 A driving robot for punching grid beams in a semiconductor factory, characterized in that, in claim 1, the main body is equipped with a dust collection unit that collects dust generated when the collaborative robot punches the grid beam with the drill. Claim 11 A driving robot for perforating grid beams in a semiconductor factory, characterized in that, in claim 10, the dust collection unit comprises: a dust collection unit housed in the main body and collecting dust by vacuum suction force; and a suction hose provided in the dust collection unit to suck dust generated from the grid beam and supported to be linked to the operation of the collaborative robot. Claim 12 A driving robot for punching holes in a grid beam of a semiconductor factory, characterized in that, in claim 1, a hole mark is marked on the surface of the grid beam, and the main body is equipped with a vision camera that recognizes the hole mark so that the collaborative robot punches the area marked with the hole mark with the drill.

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