Material sorting apparatus with automatic pad replacement

Abstract

A material sorting device capable of automatic pad replacement is disclosed, and the material sorting device capable of automatic pad replacement according to one embodiment of the present invention may include a material separation module for separating a material from an object in which a tape is attached to a ring frame and a material, a picker module for performing a pick-and-place operation of picking up the material separated from the object by the material separation module and transferring it to a preset unloading area, and a pad replacement module for replacing the pad portion of at least one picker provided in the picker module.

Description

Technology Field

[0001] The present invention relates to a material sorting device capable of automatic pad replacement. Background Technology

[0002] In the semiconductor manufacturing process, a packaging process is required after separating individual chips from a wafer. Generally, semiconductor chips are managed while attached to a ring frame with tape; it is necessary to separate them individually and align them on trays. The equipment that performs this task can be referred to as pick-and-place equipment or material sorting equipment.

[0003] Most conventional material sorting devices operate by manually loading ring frames from a magazine or FOUP (Front Opening Unified Pod), transferring them to a stage, and then separating the materials from the ring frames and sorting them into trays. However, this method has the problem of reduced work efficiency because the operator must directly supply the magazine or trays to the equipment.

[0004] Furthermore, conventional material sorting devices suffer from reduced productivity due to insufficient continuous processing capabilities for ring frames. Since a significant amount of time is required to prepare and feed the next ring frame after the operation of one ring frame is completed, the equipment's utilization rate often drops.

[0005] In addition, the pads of the picker that picks up semiconductor materials need to be replaced periodically as they wear out or become contaminated during use. Conventionally, since this pad replacement work had to be performed manually by a worker, there were problems such as equipment shutdowns and reduced work efficiency.

[0006] Furthermore, the absence of an inspection system to check the condition of materials placed on the trays acted as a cause for product quality degradation and additional inspection costs, such as defective products being passed to subsequent processes.

[0007] The technology forming the background of the present invention is disclosed in Korean Registered Patent Publication No. 10-2381262. The problem to be solved

[0008] The present invention aims to solve the problems of the aforementioned conventional technology by providing a material sorting device capable of automatic separation and tray sorting of materials attached to a ring frame.

[0009] The present invention aims to solve the problems of the aforementioned conventional technology by providing a material transfer device equipped with an object supply module capable of automated logistics processing in conjunction with an Overhead Transport (OHT) system.

[0010] The present invention aims to solve the problems of the aforementioned conventional technology by providing a material sorting device capable of automatic pad replacement that can improve equipment utilization through an automatic replacement function of the picker pad.

[0011] However, the technical problems that the embodiments of the present invention aim to solve are not limited to the technical problems described above, and other technical problems may exist. means of solving the problem

[0012] As a technical means for achieving the above-mentioned technical problem, a material sorting device capable of automatic pad replacement according to one embodiment of the present invention may include a material separation module for separating a material from an object in which a tape is attached to a ring frame and a material, a picker module for performing a pick-and-place operation of picking up the material separated from the object by the material separation module and transferring it to a preset unloading area, and a pad replacement module for replacing the pad portion of at least one picker provided in the picker module.

[0013] In addition, the pad replacement module may include a removal pad seating portion provided to accommodate a pad portion to be replaced after use, and a replacement pad supply portion provided to accommodate a newly supplied pad portion for replacement.

[0014] In addition, the removal pad seating portion may be configured to remove the pad portion from the picker module using vacuum suction force while the picker module is in close proximity.

[0015] In addition, the replacement pad supply unit may be configured so that a newly supplied pad is attached to the picker module by magnetic force when the picker module is in a state where the pad is detached.

[0016] In addition, a plurality of receiving spaces may be formed in each of the removal pad seating portion and the replacement pad supply portion.

[0017] In addition, each of the above plurality of receiving spaces can be formed to conform to the specifications of the pad portion.

[0018] In addition, the picker module may be equipped with a multi-picker comprising a plurality of pickers, each having a pad portion formed at its end that contacts the outer surface of the material to pick up the material.

[0019] Additionally, the pad replacement module may include a first mounting portion provided for replacing the pad portion of a first picker, which is one of the plurality of pickers, and a second mounting portion provided for replacing the pad portion of a second picker, which is the remaining one of the plurality of pickers.

[0020] In addition, the picker module can transfer the material to a tray placed in the unloading area.

[0021] In addition, a material sorting device capable of automatic pad replacement according to one embodiment of the present invention may include tilt vision for inspecting the seating state of the material seated on the tray in three dimensions.

[0022] Meanwhile, a material sorting device according to one embodiment of the present invention may include a ring frame and a material, a stage provided for the material to be placed thereon when a material with a tape attached is supplied, a material separation module provided with an ejector that pressurizes the material placed on the stage to separate the material from the ring frame and the tape, a picker module that performs a pick-and-place operation to pick up the material separated from the material by the material separation module and place it on a tray, and an unloading module provided for unloading the tray after the pick-and-place operation is completed.

[0023] Additionally, the stage may be equipped with a ring expander that presses the ring frame of the object so that the tape of the object expands at least partially.

[0024] In addition, the picker module may be equipped with a multi-picker comprising a plurality of pickers, each having a pad portion formed at its end that contacts the outer surface of the material to pick up the material.

[0025] Additionally, the unloading module may include a tray transfer for transferring at least one tray, a tray picker for gripping the transferred tray and feeding it into a tray receiving portion, and a tray receiving portion in which the tray is received.

[0026] In addition, the unloading module may be equipped with tilt vision for inspecting the seating state of the material seated on the tray in three dimensions.

[0027] In addition, a material sorting device according to one embodiment of the present invention may include a vision inspection module comprising an upper vision inspection unit configured to inspect the mapping state and misalignment of the object being transported to the stage, and a lower vision inspection unit configured to recognize the position of the material grasped by the picker module.

[0028] Meanwhile, a material transfer device having an object supply module according to one embodiment of the present invention may include an object supply module configured to supply an object having a tape attached thereto, a stage on which the object is placed, a material separation module configured to pressurize the material placed on the stage in order to separate the material from the ring frame and the tape, a picker module configured to perform a pick-and-place operation of picking up the material separated from the object by the material separation module and placing it on a tray, and an unloading module configured to unload the tray on which the pick-and-place operation is completed.

[0029] Additionally, the object supply module may include an object receiving section in which the object is received, a ring frame transfer for removing and transporting the object from the object receiving section, and a rail transfer provided to allow the object transported by the ring frame transfer to be placed before being fed into the stage.

[0030] Additionally, the object supply module may include a ring frame feeder that grasps the object placed on the rail transfer and transfers it to the stage.

[0031] Additionally, the rail transfer is provided with a plurality of mounting portions capable of each mounting the object, and the operation of transferring the object to the stage using the plurality of mounting portions and the operation of transferring the object received in the object receiving portion to the rail transfer can be performed alternately.

[0032] In addition, the picker module may be equipped with a multi-picker comprising a plurality of pickers, each having a pad portion formed at its end that contacts the outer surface of the material to pick up the material.

[0033] In addition, the unloading module may be equipped with tilt vision for inspecting the seating state of the material seated on the tray in three dimensions.

[0034] The means for solving the problem described above are merely exemplary and should not be interpreted as intended to limit the present invention. In addition to the exemplary embodiments described above, additional embodiments may exist in the drawings and the detailed description of the invention. Effects of the invention

[0035] According to the means for solving the problem of the present invention described above, a material sorting device capable of automatic separation and tray sorting of materials attached to a ring frame can be provided.

[0036] According to the means for solving the problem of the present invention described above, a material transfer device equipped with an object supply module capable of automated logistics processing in conjunction with an overhead transport (OHT) system can be provided.

[0037] According to the means for solving the problem of the present invention described above, in order to solve the problems of the aforementioned prior art, a material sorting device capable of automatic pad replacement can be provided that can improve the equipment operating rate through an automatic replacement function of the picker pad.

[0038] According to the solution to the problem of the present invention described above, continuous processing of ring frames is possible through alternating supply operation using rail transfer, thereby improving productivity.

[0039] According to the solution to the problem of the present invention described above, automated logistics processing without worker intervention is possible through an object supply module linked to an overhead transport (OHT) system, thereby increasing work efficiency.

[0040] According to the solution to the problem of the present invention described above, by automating the replacement of the picker pad through an automatic pad replacement module, equipment downtime can be minimized and the equipment utilization rate can be improved.

[0041] According to the solution to the problem of the present invention described above, by applying a plurality of vision inspection systems including upper vision, lower vision, tilt vision, etc., the quality of materials can be monitored in real time and product quality can be strictly managed.

[0042] However, the effects obtainable from this invention are not limited to those described above, and other effects may exist. Brief explanation of the drawing

[0043] FIG. 1 is a schematic diagram of a material transfer system according to one embodiment of the present invention. FIG. 2 is a plan view showing the detailed structure of a material transfer system according to one embodiment of the present invention. FIG. 3 is a conceptual diagram showing the process flow of a material transfer system according to one embodiment of the present invention. FIGS. 4 to 7 are perspective views showing the sub-configurations of the object supply module. Figures 8 and 9 are perspective views showing the sub-configuration of the material separation module. FIGS. 10 and FIGS. 11 are perspective views showing the sub-configuration of the picker module. FIG. 12 is a perspective view showing a pad replacement module. FIGS. 13 to 17 are perspective views showing the sub-configuration of the unloading module. FIGS. 18 and FIGS. 19 are perspective views showing the sub-configuration of the vision inspection module. FIG. 20 is a perspective view showing a safety fence module. Specific details for implementing the invention

[0044] Embodiments of the present invention are described below with reference to the attached drawings so that those skilled in the art can easily implement them. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. Furthermore, in order to clearly explain the present invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification are denoted by similar reference numerals.

[0045] Throughout this specification, when a part is described as being "connected" to another part, this includes not only cases where they are "directly connected," but also cases where they are "electrically connected" or "indirectly connected" with other elements interposed between them.

[0046] Throughout the entire specification, when a component is described as being located "on," "on top," "on top," "under," "on bottom," or "on bottom" of another component, this includes not only cases where the component is in contact with the other component but also cases where another component exists between the two components.

[0047] Throughout this specification, when a part is described as "comprising" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components.

[0048] For reference, terms related to direction or position (horizontal direction, vertical direction, up-down direction, X-axis direction, Y-axis direction, Z-axis direction, etc.) in the description of the embodiments of the present invention are described based on the arrangement state of each component shown in the drawings. For example, when viewed in FIG. 1, the horizontal direction (X-axis direction) may be the direction from 3 o'clock to 9 o'clock, the vertical direction (Y-axis direction) may be the direction from 12 o'clock to 6 o'clock, and the up-down direction (Z-axis direction) may be the normal direction of the drawings.

[0049] However, such direction setting may vary depending on the arrangement of the present invention. For example, if necessary, the present invention may be arranged so that the upward direction relative to FIG. 1 faces the horizontal direction (left and right direction), and as another example, the present invention may be arranged so that the upward direction relative to FIG. 1 faces the oblique inclination direction.

[0050] The present invention relates to a material sorting device capable of automatic pad replacement.

[0051] FIG. 1 is a schematic diagram of a material transfer system according to one embodiment of the present invention.

[0052] Referring to FIG. 1, a material transfer system (10) according to one embodiment of the present invention may include an object supply module (100), a material separation module (200), a picker module (300), a pad replacement module (400), an unloading module (500), a vision inspection module (600), and a safety fence module (700).

[0053] The object supply module (100) may be a sub-module of a material transfer system (10) equipped to supply an object with tape attached, including a ring frame and a material.

[0054] Additionally, referring to FIG. 1, the object supply module (100) may include an object receiving section (110), a ring frame transfer (120), a rail transfer (130), and a ring frame feeder (140).

[0055] The material separation module (200) may be a sub-module of the material transfer system (10) configured to separate the material from the object in which the tape is attached to the ring frame and the material.

[0056] Additionally, referring to FIG. 1, the material separation module (200) may include a stage (210) and an ejector (220).

[0057] The picker module (300) may be a sub-module of the material transfer system (10) for performing a pick-and-place operation of picking up materials separated from an object by the material separation module (200) and placing them on a tray (50).

[0058] Additionally, referring to FIG. 1, the picker module (300) may include a first picker (310), a second picker (320), and a picker transfer (330).

[0059] The pad replacement module (400) may be a sub-module of the material transfer system (10) for replacing the pad portion of at least one picker provided in the picker module (300).

[0060] According to the first embodiment of the present invention, the pad replacement module (400) may include a removal pad seating portion (410) and a replacement pad supply portion (420). According to the second embodiment of the present invention, the pad replacement module (400) may include a first seating portion (410') and a second seating portion (420').

[0061] The unloading module (500) may be a sub-module of the material transfer system (10) configured to unload the tray (50) after the pick and place operation is completed.

[0062] Additionally, referring to FIG. 1, the unloading module (500) may include a tray transfer (510), a tray picker (520), a tray picker transfer (530), a tilt vision (540), and a tray receiving unit (550).

[0063] The vision inspection module (600) may refer to an image processing-based inspection unit for inspecting and recognizing the status of objects, materials, trays (50), etc., at various process stages of the material transfer system (10) described later.

[0064] Additionally, referring to FIG. 1, the vision inspection module (600) may include an upper vision (610) and a lower vision (620).

[0065] The safety fence module (700) is a protective structure for ensuring safety in the work area of ​​the material transfer system (10), and in particular, can perform the function of protecting the safety of workers in conjunction with an overhead transport (OHT) system that transports cassettes and trays (50).

[0066] These safety fence modules (700) can be designed to prevent accidents that may occur during the automated logistics process of the material transfer system (10) and to ensure safety of the work environment by clearly separating the work area, and in particular, can prevent danger that may occur when a worker approaches during the process of supplying and discharging magazines and trays while the overhead transport system moves at high speed on the upper part of the equipment.

[0067] FIG. 2 is a plan view showing the detailed structure of a material transfer system according to one embodiment of the present invention, and FIG. 3 is a conceptual diagram showing the process flow of a material transfer system according to one embodiment of the present invention.

[0068] Referring to FIGS. 2 and 3, the material transfer system (10) disclosed herein can perform a series of automated processes for separating materials attached to a ring frame in a semiconductor manufacturing process and aligning them on a tray (50). As shown in FIG. 3, the workflow of the material transfer system (10) can largely consist of a loading step in which an object supply module (100) takes an object out from an object receiving section (110) and transfers it to a stage (210) of a material separation module (200); a pick and place step in which a picker module (300) picks up the materials separated from the material separation module (200) and places them on a tray (50); and an unloading step in which an unloading module (500) transfers the tray (50) from which the pick and place operation has been completed to a subsequent process.

[0069] Meanwhile, the material transfer system (10) may be referred to differently depending on the detailed layout design and implementation purpose of the present invention, such as a 'material transfer device (10) equipped with an object supply module', a 'material sorting device (10)', or a 'material sorting device (10) capable of automatic pad replacement', and this can be understood as enabling operation optimized for a specific purpose by implementing various functional modules on the same hardware platform.

[0070] Specifically, the arrows drawn in blue in FIG. 3 represent the path of transfer (loading) of an object to a material separation module (200) by an object supply module (100), the arrows drawn in red in FIG. 3 represent the path of a picker module (300) performing a pick and place operation, and the arrows drawn in yellow in FIG. 3 represent the path of transfer (unloading) of a tray (50) that has completed the pick and place operation by an unloading module (500).

[0071] Meanwhile, in the description of the embodiments of the present invention, 'wafer' may refer to a substrate for manufacturing a semiconductor device, and for the sake of understanding, it may be a disc-shaped substrate made of a semiconductor material such as silicon. Specifically, the wafer is an object to which a film member must be attached to its upper surface for a dicing process, and may be provided in a standard having a diameter of 200 mm, 300 mm, 450 mm, etc., but is not limited thereto.

[0072] In addition, in the description of the embodiments of the present invention, the term "ring frame" refers to an annular frame member for supporting the outer surface of a wafer, and may mean a support member to which a film member is attached integrally with the wafer when the wafer is seated on its upper surface. For example, the ring frame may be manufactured from a metal or synthetic resin material and may have an inner diameter and an outer diameter corresponding to the specifications of the wafer.

[0073] Additionally, in the description of the embodiments of the present invention, "tape" may refer to an adhesive film attached to a ring frame and a material (die) to fix and support the material. The tape serves to fix individual dies so that they do not disperse after dicing a wafer in a semiconductor manufacturing process. Specifically, the tape protects the dies from vibration and shock during the dicing process and ensures that each die maintains its exact position on the original wafer even after dicing.

[0074] The tape is properly expanded by the material separation module (200) so that the adhesive force with the material is reduced, and the material is separated from the tape by the ejector (220). The separated material can be picked up by the picker module (300) and transferred to the tray (50).

[0075] For example, tapes are generally made of polyimide (PI) or polyolefin-based materials, and UV tapes with the characteristic of reducing adhesion when exposed to ultraviolet (UV) light may be used, but are not limited to these.

[0076] Additionally, in the description of the embodiments of the present invention, 'object' may refer to an object on which material separation and pick-and-place operations are sequentially performed by a material transfer system (10). Specifically, the object refers to a composite structure comprising a ring frame and a material (die), with a tape attached to secure them. In this case, the ring frame is an annular metal or plastic frame in which a wafer cut into individual dies is secured inside by a tape.

[0077] The object is supplied to the material transfer system (10) after the dicing process is completed, and after being transferred to the stage (210) by the object supply module (100), undergoes a series of processes in which the material (die) is separated from the ring frame and tape by the material separation module (200). For example, the object may be provided in various sizes such as 6 inches, 8 inches, and 12 inches depending on its size and shape.

[0078] Hereinafter, the specific functions and operations of the object supply module (100) will be described in detail with reference to FIGS. 4 to 7.

[0079] FIGS. 4 to 7 are perspective views showing the sub-configurations of an object supply module. Specifically, FIG. 4 is a perspective view showing an object receiving section, FIG. 5 is a perspective view showing a ring frame transfer, FIG. 6 is a perspective view showing a rail transfer, and FIG. 7 is a perspective view showing a ring frame feeder.

[0080] Referring to FIG. 4, an object is received in the object receiving portion (110), and such object receiving portion (110) may be provided in the load port module of the material transfer system (10) disclosed herein.

[0081] Specifically, the object receiving section (110) can be implemented in the form of a Load Port Module (LPM), and, for example, may be a unit for supplying an object to a material transfer system (10) by receiving a Magazine or a Front Opening Unified Pod (FOUP) from an Overhead Transport (OHT) system.

[0082] For example, the object receiving part (110) can be designed to receive magazine transfer information through a Parallel Input / Output (PIO) sensor and automatically convert to a form that matches the information, so that both the magazine and the FOUP can be used without separate conversion.

[0083] Specifically, when a magazine is supplied to the object receiving section (110) through the OHT system, the presence or absence of the magazine is checked and then attached to the object receiving section (110). At the start of the process, the door of the object receiving section (110) is opened, and after performing the ring frame mapping function, the ring frame transfer (120) can load the object inside the magazine. Additionally, the object receiving section (110) can be designed to be detachable from the main frame to facilitate maintenance and equipment configuration changes.

[0084] Referring to FIG. 5, the ring frame transfer (120) can transfer an object by taking it out of the object receiving section (110).

[0085] Specifically, the ring frame transfer (120) can be designed with a structure capable of three-axis movement in the X-axis, Y-axis, and Theta-axis through a robot drive method, and can perform the function of loading and unloading ring frames (objects) from a magazine while traveling in the Y-axis direction. An alignment function using a cylinder is implemented in the hand part that transports the object, so that the precise position of the object can be adjusted. The ring frame transfer (120) can enter the magazine, pick up ring frames one by one, rotate them, and then place them on the rail transfer (130), and can also perform the role of returning the ring frames to the magazine after the work is completed.

[0086] According to one embodiment of the present invention, the ring frame transfer (120) implements stable transfer operation through a high-precision motor control system and can minimize errors by monitoring the position of the ring frame in real time through a position sensor.

[0087] Referring to FIG. 6, the rail transfer (130) may be provided so that an object transported by the ring frame transfer (120) is placed before being fed into the stage (210).

[0088] Additionally, according to one embodiment of the present invention, the rail transfer (130) may have a plurality of mounting portions capable of mounting an object. For example, referring to FIG. 6, the rail transfer (130) may be provided in the form of a dual type rail including a pair of mounting portions (131, 132), but is not limited thereto, and according to an embodiment of the present invention, three or more mounting portions may be formed.

[0089] In this regard, the rail transfer (130) may alternately perform the operation of transferring an object to a stage (210) using a plurality of seating portions and the operation of transferring the object received in the object receiving portion (110) to the rail transfer (130).

[0090] More specifically, in the case of a rail transfer (130) having a pair of mounting portions (131, 132), if one mounting portion on which an object can be placed is referred to as the first mounting portion (131) and the other mounting portion is referred to as the second mounting portion (132), the rail transfer (130) can support a continuous process flow by alternately changing the positions of the first mounting portion (131) and the second mounting portion (132) while moving in a horizontal direction (X-axis direction).

[0091] To help understand the specific work sequence, as an example, first, when the ring frame transfer (120) places a new object removed from the object receiving section (110) onto the first mounting section (131), the ring frame feeder (140) can grasp the object placed on the first mounting section (131) and transfer it to the stage (210). At this time, while the material separation operation is being performed on the stage (210), the ring frame transfer (120) can place a new object for the next operation onto the second mounting section (132) in advance.

[0092] Next, when the work on the stage (210) is completed, the ring frame feeder (140) can return the ring frame, with all materials separated, back to the first mounting section (131). Then, the rail transfer (130) moves horizontally so that a new object from the second mounting section (132) comes to the work position of the ring frame feeder (140), and the completed ring frame from the first mounting section (131) moves to the position of the ring frame transfer (120) and can be recovered to the object receiving section (110) by the ring frame transfer (120).

[0093] Through these alternating operations, the loading, material separation, and unloading processes of the ring frame can proceed in parallel, thereby improving the throughput of the entire process. However, it goes without saying that the detailed operational flow using multiple mounting sections is not limited to the embodiments described above.

[0094] Referring to FIG. 7, the ring frame feeder (140) can grasp an object placed on the rail transfer (130) and transfer it to the stage (210).

[0095] Specifically, the ring frame feeder (140) can perform the function of clamping the ring frame mounted on the rail transfer (130) using a gripper method and transferring it to the stage (210). The ring frame feeder (140) is equipped with movement in the Y-axis direction and up-down function in the vertical direction (Z-axis direction), so that it can perform a series of operations of lowering from a basic position, clamping the ring frame, and transferring it to the stage (210).

[0096] For example, the clamping action of the gripper is implemented using a cylinder, and a fiber sensor is installed at the front of the gripper to detect the presence or absence of the ring frame in real time.

[0097] Additionally, the ring frame feeder (140) also performs the role of recovering the ring frame, after the material separation operation is completed, from the stage (210) back to the rail transfer (130), thereby supporting a continuous operation cycle.

[0098] Meanwhile, the gripper portion of the ring frame feeder (140) can be designed to handle ring frames of various sizes, so that it can flexibly respond without separate conversion even when changing products.

[0099] Below, the specific functions and operations of the material separation module (200) will be described in detail with reference to FIGS. 8 and FIGS. 9.

[0100] FIGS. 8 and FIGS. 9 are perspective views showing the sub-configurations of a material separation module. Specifically, FIG. 8 is a perspective view showing a stage, and FIG. 9 is a perspective view showing an ejector.

[0101] Referring to FIGS. 8 and 9, the material separation module (200) may include a stage (210) on which an object is placed, and an ejector (220) that presses the material placed on the stage (210) to separate the material from the ring frame and tape.

[0102] Specifically, the ejector (220) is positioned in the lower area of ​​the stage (210) and can press the material in an upward direction while the tape is expanded by the ring expander (211) of the stage (210).

[0103] Referring to FIG. 8, the stage (210) may include a ring expander (211) that presses the ring frame of the object so that the tape of the object expands at least partially.

[0104] Additionally, referring to FIG. 8, the ring expander (211) may include a clamp (212) that presses the ring frame downward while the object is seated. Accordingly, the tape may be expanded in the inner region of the ring frame pressed by the clamp (212).

[0105] In addition, according to one embodiment of the present invention, the ring expander (211) may be equipped with a function to adjust the seating position of an object by performing motion control along a plurality of axial directions using a servo motor.

[0106] In summary, the stage (210) is equipped with a precision motion control system that supports three-axis movement of the X-axis, Y-axis, and Theta-axis, allowing the ring frame to be accurately transported according to the material map position. When the ring frame is seated, the stage (210) can fix the ring frame using a clamp (212) and perform the function of reducing the adhesive force between the material and the tape by appropriately expanding the tape through the ring expander (211). The expanded tape reduces the contact area with the material, making it easier to separate the material by the ejector (220).

[0107] That is, the stage (210) provides stable support for the ring frame and tape during the material separation process, and through precise positional alignment with the ejector (220), it can enable efficient separation while minimizing material damage.

[0108] In addition, the stage (210) has high flexibility to handle ring frames of various sizes and can finely adjust its position using a high-precision servo motor, thereby enabling it to accommodate various types of material arrangements.

[0109] Referring to FIG. 9, the ejector (220) may be a multi-stage ejector having a plurality of peeling sections (2230) that support the material while in contact with it and then sequentially detach the parts in contact with the material according to a preset order so that the material is peeled off from the tape, but is not limited thereto.

[0110] In addition, the ejector (220) can be precisely height-adjusted through Z-axis motor drive, allowing it to accurately transport the material to the ejecting position where it is separated from the tape. The ejecting function is also directly connected to the motor, so it can be designed to allow for precise ejection of the desired amount.

[0111] For example, the ejector (220) has a multi-pin structure and has a built-in magnet so that the pin can be easily installed or removed at the required location. Through this structure, it is possible to convert it into a multi-stage ejector to suit various material sizes and arrangements.

[0112] Specifically, the operation of the ejector (220) is performed while the tape is expanded by the ring expander (211) of the stage (210), and the material can be separated from the tape by applying pressure upward with a precisely controlled pressure. The separated material can be picked up by the pad portion of the picker module (300) and transferred to the tray (50).

[0113] Below, the specific functions and operations of the picker module (300) will be described in detail with reference to FIGS. 10 and FIGS. 11.

[0114] FIGS. 10 and FIGS. 11 are perspective views showing the sub-configuration of the picker module.

[0115] Referring to FIG. 10, the picker module (300) may be equipped with a multi-picker comprising a plurality of pickers, each having a pad portion formed at its end to contact the outer surface of the material for picking up the material. For example, the picker module (300) may include a first picker (310) and a second picker (320) that are spaced apart from each other along the vertical direction and each moves along the horizontal direction to perform pick-and-place operations, and each of the first picker (310) and the second picker (320) may be equipped with two different picker heads, each capable of picking one material. In other words, four materials can be transported simultaneously using a multi-picker type picker module (300), and in this structure, four pad portions may be each positioned at the end (lower end) of the picker module (300).

[0116] Additionally, referring to FIG. 10, the picker transfer (330) is based on a granite base and has a linear motor configured thereon, so that it can be designed to enable pick-and-place operation with high precision. The picker transfer (330) can perform the function of transferring the first picker (310) and the second picker (320) from the stage (210) area to the tray transfer (510) area.

[0117] For example, the picker transfer (330) is controlled so that the first picker (310) and the second picker (320) can operate and move independently or simultaneously, thereby enabling flexible response to various work scenarios.

[0118] Referring to FIG. 11, the first picker (310) and the second picker (320) each have two picker heads on one axis, forming a multi-picker system composed of a total of four picker heads. Each picker head has a rubber pad attached to its end and can perform the function of picking up materials separated from the tape and placing them on the tray (50).

[0119] As described in detail below, each picker is equipped with a magnet on the pad holder portion for automatic pad change (APC), making it easy to attach and detach the pad. Additionally, a motor capable of rotating around the Theta axis is configured to correct the position of misaligned materials and, if necessary, allow for 90-degree rotation. Through these functions, materials can be placed on the tray in the correct orientation and can flexibly adapt to various material shapes and tray layouts. Furthermore, according to one embodiment of the present invention, each picker head is equipped with an independent vacuum control system, thereby providing the ability to pick up materials individually or simultaneously as needed.

[0120] Below, the specific functions and operations of the pad replacement module (400) will be described in detail with reference to FIG. 12.

[0121] FIG. 12 is a perspective view showing a pad replacement module.

[0122] Referring to FIG. 12, the pad replacement module (400) may be formed in a shape in which a first plate structure and a second plate structure are arranged side by side, each having a plurality of receiving spaces (41, 42) formed to accommodate a pad portion to be replaced after use or to accommodate a newly supplied pad portion for replacement.

[0123] At this time, each of the plurality of receiving spaces (41, 42) formed in the plate structure can be formed to conform to the specifications of the pad portion on the picker module (300) side. Specifically, each of the plurality of receiving spaces (41, 42) formed in the plate structure can be designed to fit various specifications of the pad portion used in the picker module (300).

[0124] The size, shape, depth, etc. of the receiving space (41, 42) can be manufactured to exactly match the specifications of the pad portion, thereby enabling accurate positional alignment of the pad and stable attachment / detachment. Since various pads can be used depending on the size, shape, and characteristics of the material, the plate structure can be replaced to suit the required pad type, or various sizes of receiving spaces can be arranged within a single plate structure.

[0125] For example, the plate structure is designed to be detachable, allowing it to be replaced with a new plate structure capable of accommodating pad specifications suitable for the process when a process is changed, thereby enabling flexible response to various material handling requirements while minimizing equipment downtime.

[0126] For example, each receiving space (41, 42) is equipped with a sensor capable of detecting the presence of a pad, so that the normal progress of the pad replacement operation can be monitored in real time.

[0127] In this regard, according to the first embodiment of the present invention, the first plate structure of the pad replacement module (400) may be operated as a removal pad seating part (410) provided to accommodate a pad part to be replaced after use, and the second plate structure of the pad replacement module (400) may be operated as a replacement pad supply part (420) provided to accommodate a newly supplied pad part for replacement.

[0128] In other words, in the case of the pad replacement module (400) according to the first embodiment of the present invention, a used pad portion may be removed from the picker module (300) and seated in each of the plurality of receiving spaces (41) formed in the first plate structure, and a pad replacement operation may be performed with a newly supplied pad portion to the picker module (300) seated in each of the plurality of receiving spaces (42) formed in the second plate structure.

[0129] In this regard, the removal pad mounting portion (410) can operate to remove the pad portion from the picker module (300) using vacuum suction force when the lower end of the picker module (300) is in close proximity to the receiving space (41) by a predetermined level or more.

[0130] More specifically, the removal pad mounting portion (410) may be designed with a structure in which a vacuum line is connected internally, and a fine vacuum hole may be formed on the bottom surface of each receiving space (41). When replacement of the pad portion of the picker module (300) is required, the control system can accurately position the picker module (300) above the corresponding receiving space (41) of the removal pad mounting portion (410).

[0131] At this time, when the distance between the lower end of the picker module (300) and the receiving space (41) approaches a preset threshold (e.g., within 1 mm), a proximity sensor detects this and can automatically activate the vacuum system. The activated vacuum system generates a strong suction force through the receiving space (41) to adsorb the pad attached to the picker module (300). At the same time, as the vacuum adsorption on the picker module (300) side is released, the pad can be separated from the picker module (300) and settled in the receiving space (41).

[0132] In this process, the vacuum pressure may be controlled to gradually increase to ensure stable removal of the pad portion, and a pressure sensor or optical sensor may be additionally provided to confirm that the pad portion has been completely removed. The removed pad portion can be safely stored in a receiving space (41) for subsequent processing (e.g., cleaning, inspection, disposal, etc.).

[0133] In addition to this, the replacement pad supply unit (420) may be provided so that a newly supplied pad is attached to the picker module (300) by magnetic force when the lower end of the picker module (300) in a state where the pad is detached is in close proximity to a predetermined level or higher.

[0134] More specifically, the replacement pad supply unit (420) can be prepared with a new pad portion pre-installed in each receiving space (42). With the pad portion of the picker module (300) removed, the control system can accurately position the picker module (300) above the corresponding receiving space (42) of the replacement pad supply unit (420). A magnet is embedded in the lower end of the picker module (300), and the new pad portion located in the receiving space (42) contains a magnetic material, so that when the two parts come within a certain distance (e.g., within 2 mm), the pad portion can be automatically attached to the picker module (300) by magnetic force.

[0135] In this process, a guide structure may be included in the receiving space (42) to ensure accurate positional alignment of the pad portion, and the distance between the picker module (300) and the pad portion can be monitored in real time through a proximity sensor to determine the optimal attachment time.

[0136] If the previous pad portion is not completely separated from the end of the picker module (300), a sensor detecting this may activate to generate a warning signal and stop the pad replacement process. In the event of such an error, the system may automatically move to the removal pad seating portion (410) to attempt removal again, or generate a notification requesting manual intervention from the operator.

[0137] In contrast to this, according to the second embodiment of the present invention, considering that the picker module (300) is a multi-picker type equipment comprising a plurality of pickers each having a pad portion formed at an end that contacts the outer surface of the material to pick up the material, the first plate structure of the pad replacement module (400) may be operated as a first mounting portion (410') provided to replace the pad portion of the first picker (310), which is one of the plurality of pickers of the picker module (300), and the second plate structure of the pad replacement module (400) may be operated as a second mounting portion (420') provided to replace the pad portion of the second picker (320), which is the remaining one of the plurality of pickers of the picker module (300).

[0138] In other words, according to the second embodiment of the present invention, the first mounting portion (410'), which is the first plate structure of the pad replacement module (400), and the second mounting portion (420'), which is the second plate structure, can each be operated independently for replacing the pad portions of different pickers. The first mounting portion (410') may have a plurality of receiving spaces formed for replacing the pad portion of the first picker (310), and each receiving space may be connected to an independent vacuum control system and controlled individually. Similarly, the second mounting portion (420') may have a plurality of receiving spaces formed for replacing the pad portion of the second picker (320).

[0139] Through this structure, the first picker (310) and the second picker (320) can each perform pad replacement work independently, and pad replacement can be performed simultaneously or sequentially as needed. A vision system (not shown) may be used to identify the picker requiring pad replacement and the pad portion of the picker, thereby automatically detecting the wear condition or degree of contamination of the pad to determine the replacement time.

[0140] Additionally, preventive pad replacement can be performed by counting the usage time or the number of pick-ups for each picker head. The new supply pad section can be loaded in advance by an operator into the corresponding receiving space of the first mounting section (410') and the second mounting section (420'), and the pad replacement module (400) can move in the X and Y axis directions and be aligned to the position of each picker to support efficient pad replacement work.

[0141] Meanwhile, according to one embodiment of the present invention, as shown in FIG. 2, the pad replacement module (400) may operate integrally with the lower vision (620). This integral arrangement structure can provide the advantage of increasing the space utilization of the material transfer system (10) and simplifying the structure. By having the pad replacement module (400) and the lower vision (620) operate in the same axial direction, system control can be simplified and the number of driving parts can be reduced, thereby improving maintainability.

[0142] Additionally, the lower vision (620) performs the function of precisely inspecting the position of materials picked up by the picker module (300), and can also be used to inspect the condition or position of the pad portion before and after pad replacement work. For example, after pad replacement, the lower vision (620) can be used to verify whether the pad portion is accurately mounted on the picker module (300), and the pad's wear condition can be analyzed using image processing technology to determine the replacement time.

[0143] As such, the integrated configuration of the pad replacement module (400) and the lower vision (620) can create functional synergy effects, thereby improving the performance and reliability of the system. Additionally, since a jig for precise stage setting required for the vision system configuration can be installed together with the pad replacement module (400), there is an advantage in that system calibration is easy.

[0144] Below, the specific functions and operations of the unloading module (500) will be described in detail with reference to FIGS. 13 to 17.

[0145] FIGS. 13 to 17 are perspective views showing the sub-configurations of an unloading module. Specifically, FIG. 13 is a perspective view showing a tray transfer, FIG. 14 is a perspective view showing a tray picker, FIG. 15 is a perspective view showing a tray picker transfer, FIG. 16 is a perspective view showing a tilt vision, and FIG. 17 is a perspective view showing a tray receiving section.

[0146] Referring to FIG. 13, the tray transfer (510) can transfer at least one tray (50) in which materials are each placed in a plurality of receiving spaces formed inside after the pick-and-place operation is completed.

[0147] Specifically, the tray transfer (510) can be designed to enable high-precision, high-speed transfer by adopting a linear motor drive method. When the tray picker (520) places the tray (50), the tray transfer (510) can accurately transfer the tray (50) to the work pass line of the multi-picker through linear motor drive. The tray transfer (510) is equipped with a tray aligner so that the tray (50) can always be aligned to a constant position, and a tray clamp is installed to prevent the tray (50) from coming off during transfer.

[0148] These aligner and clamp functions can be operated via a cylinder. Additionally, the tray transfer (510) has a built-in vibrator, which allows materials that have not fully settled on the tray (50) to be placed in the correct position through vibration. This prevents material displacement or positional errors that may occur during subsequent processes. The tray transfer (510) is equipped with a sensor that detects whether the tray (50) is seated, allowing for real-time monitoring of the tray's exact position and presence.

[0149] Referring to FIG. 14, the tray picker (520) can grasp the tray (50) being transported by the tray transfer (510) and sequentially feed it into the tray receiving portion (550).

[0150] Specifically, the tray picker (520) can be designed to move up and down in the Z-axis direction via a servo motor. The tray picker (520) is equipped with four clamps so that the tray (50) can be stably fixed through cylinder driving and the tray (50) can be prevented from falling during the transfer process.

[0151] Additionally, the tray picker (520) is equipped with a sensor capable of checking the status of the tray clamp and a sensor capable of detecting whether the tray (50) is seated, thereby ensuring the accuracy of the tray (50) gripping and transfer process. The tray picker (520) can perform the function of picking up an empty tray (50) from the tray receiving section (550) and transferring it to the tray transfer (510), or picking up a tray (50) for which the pick-and-place operation has been completed from the tray transfer (510) and transferring it back to the tray receiving section (550).

[0152] In addition, the tray picker (520) is designed to handle trays (50) of various sizes, allowing for flexible response even when changing products. Furthermore, the clamp position of the tray picker (520) is adjustable, enabling stable gripping of trays (50) of various sizes and shapes.

[0153] Referring to FIG. 15, the tray picker transfer (530) is located between the tray receiving section (550) and the tray transfer (510) and can perform the function of transferring the tray (50) between the two units. The tray picker transfer (530) can be designed to enable high-precision transfer by adopting a servo motor drive method for the X-axis, Y-axis, and Z-axis. A cam follower structure is applied to the front of the tray picker transfer (530) to distribute the weight of the tray (50) and support stable transfer. This structure minimizes sagging or shaking caused by the weight of the material contained in the tray (50), thereby preventing damage to the material or displacement.

[0154] Additionally, the tray picker transfer (530) is equipped with a tray picker (520) so that it can directly grasp and transport the tray (50), and can place the tray (50) in an accurate position through precise motion control. Furthermore, the tray picker transfer (530) can flexibly handle the transfer between the tray receiving section (550), which can be positioned at various heights and positions, and the tray transfer (510).

[0155] Referring to FIG. 16, the tilt vision (540) may be a vision inspection unit for inspecting the seating state of a material placed on a tray (50) in three dimensions.

[0156] Specifically, the tilt vision (540) can precisely measure the height, tilt, position, etc. of the material placed on the tray (50) by utilizing three-dimensional image processing technology. The tilt vision (540) is installed on the tray transfer (510) and can inspect the entire area of ​​the tray (50) while moving in the X-axis direction through robot driving. The tilt vision (540) can precisely analyze the surface characteristics of the material using special lighting and a high-resolution camera, and thereby determine whether the placement state of the material is normal.

[0157] As a result of the judgment of the tilt vision (540), abnormal conditions such as the material not being fully seated in the pocket of the tray (50) and being tilted, protruding out of the pocket, or overlapping with other materials may be detected, and a preset warning signal may be output in response. The inspection results of the tilt vision (540) can be stored in a database and utilized for quality control of subsequent processes, and trays (50) determined to be defective can be separately classified and inspected manually. Through this three-dimensional inspection system, problems such as material deviation, equipment failure, and quality defects that may occur in subsequent processes can be prevented in advance.

[0158] Referring to FIG. 17, the tray receiving portion (550) can receive the tray (50) by having the tray (50) transferred from the tray picker (520) and receive the tray (50) inside.

[0159] Specifically, the tray receiving section (550) may be provided in the form of multiple containers (boxes) that are classified and operated for various predefined uses, such as good products, defective products, empty trays, and covers, depending on the work content. Additionally, the tray receiving section (550) is equipped with a sensor that detects the bottom tray (50) when the OHT (Overhead Transport) robot loads the tray (50), so that the loading status of the tray (50) can be determined, and when the tray (50) is seated, a stopper at the entrance advances to prevent the tray (50) from coming off. An elevator is installed at the bottom of the tray receiving section (550) so that the tray (50) can be accurately transported to a position where the tray picker (520) can pick it up.

[0160] Additionally, photo sensors are installed on the upper left and right sides of the tray receiving section (550) so that the tray picker (520) can detect the presence of the tray (50) when picking up the tray (50). Depending on the inspection results, the tray (50) can be automatically classified and received; good trays can be classified into good boxes, and trays determined to be defective by the tilt vision (540) can be classified into defective boxes. Further detailed classification is possible according to the type of defect, so that, for example, materials are missing, materials are tilted, materials protrude, etc., and can be received in separate boxes according to the type of defect. Through this classification system, processing efficiency in subsequent processes can be increased and utilized for analyzing the cause of defects and improvements.

[0161] Below, the specific functions and operations of the vision inspection module (600) will be described in detail with reference to FIGS. 18 and FIGS. 19.

[0162] FIGS. 18 and FIGS. 19 are perspective views showing the sub-configurations of a vision inspection module. Specifically, FIG. 18 is a perspective view showing the upper vision, and FIG. 19 is a perspective view showing the lower vision.

[0163] Referring to FIG. 18, the upper vision (610) may be a vision inspection unit configured to inspect the mapping status and misalignment of an object being transferred to the stage (210).

[0164] To this end, the upper vision (610) can be positioned relative to the picker transfer (330), thereby allowing it to move together with the picker module (300) and inspect the object placed on the stage (210). The upper vision (610) can acquire map information of the material attached to the ring frame using a high-resolution camera and special lighting, and can precisely measure the position and degree of misalignment of the material based on the map information. This provides position information so that the picker module (300) can pick up the material at an accurate position, and if the misalignment of the material is severe, the misalignment can be corrected by utilizing the theta rotation function of the picker module (300).

[0165] Additionally, the upper vision (610) can inspect the condition of the ring frame and tape, the quality of the material, etc., to determine whether there are any abnormalities in the process. If abnormalities are detected, such as unclear material map information, damaged material, or tape being abnormally stretched, a warning can be generated to request intervention from the operator. The upper vision (610) can perform an important role in improving the accuracy and efficiency of the pick-and-place operation by processing image data acquired in real time.

[0166] Referring to FIG. 19, the lower vision (620) may be a vision inspection unit equipped to recognize the position of a material held by the picker module (300).

[0167] To this end, the lower vision (620) is a PRS (Pattern Recognition System) vision that inspects the lower surface of the material picked up by the picker module (300), and can be placed together with the pad replacement module (400). The lower vision (620) is capable of Y-axis movement through robot drive, and a dedicated jig for vision setting is installed so that accurate calibration can be achieved. The lower vision (620) can precisely measure the position of the material picked up by the picker module (300) and calculate the error regarding the X, Y coordinates and rotation angle of the material. This error information is transmitted to the position control system of the picker module (300), so that accurate position correction can be achieved when placing the material on the tray (50).

[0168] Additionally, the lower vision (620) can inspect the condition of the lower surface of the material to determine whether there are defects such as cracks, chipping, or contamination, and defective materials can be classified into a separate defective product tray. The lower vision (620) can recognize marks or patterns on the lower surface of the material to identify the type, specifications, and orientation of the material, so that accurate classification is possible even when various materials are mixed together.

[0169] Below, the specific functions and structure of the safety fence module (700) will be described in detail with reference to FIG. 20.

[0170] FIG. 20 is a perspective view showing a safety fence module.

[0171] Referring to FIG. 20, the safety fence module (700) can be installed on the outer frame of the material transfer system (10) to protect the work area and ensure the safety of the worker.

[0172] In particular, the safety fence module (700) is a safety device installed to protect the safety of workers during the process in which cassettes and trays (50) are supplied and discharged through an overhead transport (OHT) system installed on the ceiling of the line, and is made of, for example, tempered glass or transparent polycarbonate material to ensure visibility of the work area while also serving as a physical protective barrier.

[0173] The foregoing description of the present invention is for illustrative purposes only, and those skilled in the art will understand that other specific forms can be easily modified without altering the technical concept or essential features of the present invention. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. For example, each component described as a single unit may be implemented in a distributed manner, and components described as distributed may likewise be implemented in a combined form.

[0174] The scope of the present invention is defined by the claims set forth below rather than by the detailed description above, and all modifications or variations derived from the meaning and scope of the claims and the concept of equivalents thereof should be interpreted as being included within the scope of the present invention. Explanation of the symbols

[0175] 10: Material Transfer System 100: Object supply module 110: Object receiving part 120: Ring Frame Transfer 130: Rail Transfer 131: 1st rail section 132: Second rail section 140: Ring Frame Feeder 200: Material separation module 210: Stage 211: Ring Expander 212: Clamp 220: Ejector 300: Picker Module 31: Pad section 310: 1st Picker 320: 2nd Picker 330: Picker Transfer 400: Pad replacement module 410: Removal pad seating area 41: First Detention Space 420: Replacement pad supply unit 42: Second Detention Space 410': First landing section 420': Second landing section 500: Unloading Module 510: Tray Transfer 520: Tray Picker 530: Tray Picker Transfer 540: Tilt Vision 550: Tray Reception Unit 50: Tray 600: Vision Inspection Module 610: Upper Vision 620: Lower vision 700: Safety Fence Module

Claims

Claim 1 A material sorting device capable of automatic pad replacement, comprising: a material separation module for separating a material from an object in which a tape is attached to a ring frame and the material; a picker module for performing a pick-and-place operation of picking up the material separated from the object by the material separation module and transferring it to a preset unloading area; and a pad replacement module for replacing the pad portion of at least one picker provided in the picker module. The system includes a vision inspection module comprising a lower vision inspection unit configured to recognize the position of the material gripped by the picker module, wherein the lower vision inspection unit operates integrally with the pad replacement module, and through the lower vision inspection unit, an inspection of the wear state of the pad portion is performed to determine the condition of the pad portion before and after the pad replacement operation by the pad replacement module and the pad replacement time. The material separation module comprises a ring expander that presses the ring frame of the object so that the tape of the object expands at least partially. The ring expander adjusts the seating position of the object by performing motion control along a plurality of axial directions using a servo motor. The object is ejected from the object receiving portion and transported through a ring frame transfer configured to enable position adjustment of the object by implementing an alignment function using a cylinder in the hand portion. The pad replacement module is configured to allow the pad portion to be replaced after use to be seated, and is configured to detach the pad portion from the picker module using vacuum suction force while the picker module is in close proximity. A package sorting device comprising: a seating portion; and a replacement pad supply portion configured to accommodate a newly supplied pad portion for replacement. Claim 2 delete Claim 3 delete Claim 4 A package sorting device according to claim 1, wherein the replacement pad supply unit is configured such that a newly supplied pad unit is attached to the picker module by magnetic force when the picker module is in a state where the pad unit is detached. Claim 5 A package sorting device according to claim 1, wherein a plurality of receiving spaces are formed in each of the removal pad seating portion and the replacement pad supply portion, and each of the plurality of receiving spaces is formed to conform to the specifications of the pad portion. Claim 6 A package sorting device according to claim 1, wherein the picker module comprises a multi-picker including a plurality of pickers, each having a pad portion formed at its end that contacts the outer surface of the material to pick up the material, and the pad replacement module comprises: a first mounting portion provided to replace the pad portion of a first picker, which is one of the plurality of pickers; and a second mounting portion provided to replace the pad portion of a second picker, which is the remaining one of the plurality of pickers. Claim 7 A package sorting device according to claim 1, wherein the picker module transfers the material to a tray disposed in the unloading area, and further includes a tilt vision for inspecting the seating state of the material seated on the tray in three dimensions.

Images