Ozone generator

Abstract

The invention provides an ozone generator with improved durability and discharge efficiency of the dielectric film. The ozone generator comprises: a first housing including a first waterway, a first cooling water inlet, a first cooling water outlet, and an ozone discharge portion; a first adhesive layer disposed on the first housing; a ground electrode disposed on the first adhesive layer; a dielectric film disposed spaced vertically from the ground electrode; a spacer disposed between the ground electrode and the dielectric film to form a discharge region; a coating film disposed on the dielectric film between the dielectric film and the spacer; a lower electrode disposed on the dielectric film; a second adhesive layer disposed on the lower electrode; an upper electrode disposed on the second adhesive layer; and a second housing disposed on the upper electrode and including a second waterway, a second cooling water inlet, a second cooling water outlet, and a gas inlet, wherein the lower electrode and the upper electrode comprise aluminum.

Description

Technology Field

[0001] The present invention relates to an ozone generating device. Background Technology

[0002] An ozone generator is a device that generates ozone by applying electrical energy to oxygen or a source gas containing oxygen, and is used in various fields such as water treatment, cleaning, and semiconductor manufacturing processes. Generally, such ozone generators are based on a cell structure including electrodes, a dielectric, a discharge space, a gas flow path, and a cooling structure, and barrier discharge, surface discharge, or combined discharge methods are widely known. Furthermore, the device shape can be implemented in a plate type, a tube type, or a form in which multiple cells are stacked or modularized.

[0003] Conventional ozone generators have attempted various improvements regarding electrode structure, dielectric arrangement, gas path, and discharge zone shape to increase discharge efficiency and enhance ozone generation concentration. However, in conventional structures, gas may not fully utilize the discharge space or stagnation zones may form in certain areas, potentially leading to reduced ozone generation efficiency. Furthermore, during repeated discharges, the dielectric surface may be exposed to external impurities such as moisture and particles, potentially causing performance degradation. Additionally, the durability of the dielectric film may be reduced by arcing or thermal and electrical stress occurring during discharge, making the longevity and reliability of the device a critical challenge.

[0004] Furthermore, since the stability of the device may be compromised if the heat generated during the ozone generation process is not effectively removed, there have been continuous demands for improvements in housing structures including cooling water channels, stacked and modular cell structures, and the optimization of gas inlet and outlet paths. Meanwhile, while highly conductive metals have traditionally been primarily used as electrode materials, the applicability of alternative electrode materials is being examined in terms of rising material costs and manufacturing efficiency. Consequently, there is a growing technical demand for improvements in electrode and cell structures that consider not only enhanced discharge efficiency but also prevention of dielectric contamination and damage, ensuring cooling performance and durability, and economic feasibility. The problem to be solved

[0005] The problem that the present invention aims to solve is to provide an ozone generator with improved dielectric film durability and discharge efficiency.

[0006] The technical problems of the present invention are not limited to those mentioned above, and other unmentioned technical problems will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0007] An ozone generating device according to one aspect of the present invention for achieving the above objective comprises: a first housing including a first waterway, a first cooling water inlet, a first cooling water outlet, and an ozone discharge portion; a first adhesive layer disposed on the first housing; a ground electrode disposed on the first adhesive layer; a dielectric film disposed spaced apart from the ground electrode in a vertical direction; a spacer disposed between the ground electrode and the dielectric film to form a discharge region; a coating film disposed on the dielectric film between the dielectric film and the spacer; a lower electrode disposed on the dielectric film; a second adhesive layer disposed on the lower electrode; an upper electrode disposed on the second adhesive layer; and a second housing disposed on the upper electrode and including a second waterway, a second cooling water inlet, a second cooling water outlet, and a gas inlet, wherein the lower electrode and the upper electrode comprise aluminum.

[0008] In one embodiment of the present invention, the dielectric film includes a first surface facing a first housing and a second surface facing a second housing, and a coating film is disposed on the first surface.

[0009] In one embodiment of the present invention, the coating film comprises silicon oxide.

[0010] In one embodiment of the present invention, the lower electrode and the upper electrode are formed of an aluminum metal layer.

[0011] In one embodiment of the present invention, the horizontal length of the dielectric film is the same as the horizontal length of the coating film.

[0012] In one embodiment of the present invention, the side of the dielectric film and the side of the coating film are on the same plane.

[0013] In one embodiment of the present invention, a plurality of alignments disposed on a first housing are further included, and a first adhesive layer is interposed between the plurality of alignments.

[0014] In one embodiment of the present invention, the spacer is combined with a plurality of alignments.

[0015] In one embodiment of the present invention, a first housing, a first adhesive layer, a ground electrode, a dielectric film, a spacer, a coating film, a lower electrode, a second adhesive layer, an upper electrode, and a second housing are defined as a single cell, and a plurality of cells are stacked.

[0016] In one embodiment of the present invention, the lower dielectric film disposed on a ground electrode and the lower coating film disposed on the lower dielectric film and having holes formed therein are further included, and the lower coating film comprises silicon oxide.

[0017] Specific details of other embodiments are included in the detailed description and drawings. Effects of the invention

[0018] An ozone generator according to one embodiment of the present invention can significantly improve the lifespan and reliability of the device by forming a special coating film on the surface of a dielectric film to prevent the adhesion of external impurities and to ensure the durability of the dielectric film against electrical stress such as arcing. In addition, an ozone generator according to one embodiment of the present invention can stably and efficiently generate high concentrations of ozone while reducing manufacturing costs through the use of aluminum electrode composition and an optimized housing and cell structure.

[0019] The effects according to the present invention are not limited to those exemplified above, and various other effects are included in this specification. Brief explanation of the drawing

[0020] FIG. 1 is an exploded perspective view for explaining an ozone generator according to one embodiment of the present invention. FIG. 2 is a cross-sectional view illustrating an ozone generator according to one embodiment of the present invention. FIGS. 3 to 6 are enlarged drawings of the P region of FIG. 2. FIG. 7 is a drawing for explaining the first housing of an ozone generator according to one embodiment of the present invention. FIG. 8 is a drawing for explaining a second housing of an ozone generator according to one embodiment of the present invention. FIG. 9 is a drawing for explaining an ozone generating device according to one embodiment of the present invention. FIGS. 10 to 12 are drawings for explaining an ozone generating device according to an embodiment of the present invention. Specific details for implementing the invention

[0021] The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. The sizes and relative sizes of components shown in the drawings may be exaggerated for clarity of description. Throughout the specification, the same reference numerals refer to the same components, and "and / or" includes each of the mentioned items and all combinations of one or more.

[0022] When elements or a layer are referred to as being "on" or "on" another element or layer, it includes not only being directly on top of the other element or layer but also cases where another layer or element is interposed in between. On the other hand, when an element is referred to as being "directly on" or "directly on," it indicates that no other element or layer is interposed in between.

[0023] Spatially relative terms such as "below," "beneath," "lower," "above," and "upper" may be used to facilitate the description of the relationship between one element or component and another, as illustrated in the drawings. Spatially relative terms should be understood as encompassing different orientations of the element during use or operation, in addition to the orientations illustrated in the drawings. For example, if an element illustrated in the drawings is flipped, the element described as "below" or "beneath" of another element may be placed "above" of that other element. Therefore, the exemplary term "below" may encompass both the lower and upper directions. Elements may also be oriented in other directions, and accordingly, spatially relative terms may be interpreted according to the orientation.

[0024] The terms used herein are for describing the embodiments and are not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise in the text. As used herein, "comprises" and / or "comprising" do not exclude the presence or addition of one or more other components in addition to the components mentioned.

[0025] Although terms such as "first," "second," etc., are used to describe various elements or components, it goes without saying that these elements or components are not limited by these terms. These terms are used merely to distinguish one element or component from another. Therefore, it goes without saying that the first element or component mentioned below may also be the second element or component within the technical scope of the present invention.

[0026] Unless otherwise defined, all terms used in this specification (including technical and scientific terms) may be used in a meaning that is commonly understood by those skilled in the art to which the present invention pertains. Additionally, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless explicitly and specifically defined otherwise.

[0027] Embodiments of the present invention will be described in detail below with reference to the attached drawings. Identical components in the drawings are denoted by the same reference numerals, and redundant descriptions thereof are omitted.

[0028] Hereinafter, an ozone generating device according to an embodiment of the present invention will be described with reference to FIGS. 1 to 8.

[0029] FIG. 1 is an exploded perspective view illustrating an ozone generator according to an embodiment of the present invention. FIG. 2 is a cross-sectional view illustrating an ozone generator according to an embodiment of the present invention. FIG. 3 to 6 are enlarged views of region P of FIG. 2. FIG. 7 is a drawing illustrating a first housing of an ozone generator according to an embodiment of the present invention. FIG. 8 is a drawing illustrating a second housing of an ozone generator according to an embodiment of the present invention.

[0030] Referring to FIGS. 1 to 8, an ozone generator according to one embodiment of the present invention may include a first housing (100), alignment (180), a first adhesive layer (190), a ground electrode (200), a spacer (210), a coating film (220), a dielectric film (230), a lower electrode (240), a second adhesive layer (250), an upper electrode (260), an insulating layer (270), a third adhesive layer (280), and a second housing (300).

[0031] The first housing (100) may be placed at the bottom of the ozone generator. The first housing (100) may be the lower housing of the ozone generator.

[0032] The first housing (100) may include a first cooling plate (110), a first cover plate (120), a first waterway (130), a first cooling water inlet (140), a first cooling water outlet (150), and an ozone discharge part (160).

[0033] The first cooling plate (110) may be provided as the entire body of the first housing (100). A first channel (130) for cooling water to flow may be formed inside the first cooling plate (110). The first channel (130) may be formed in a winding spiral structure to maximize cooling efficiency, but is not limited thereto.

[0034] The first waterway (130) can be connected to the first cooling water inlet (140) and the first cooling water outlet (150), respectively. External cooling water can be introduced into the interior through the first cooling water inlet (140). As the introduced cooling water flows through the first waterway (130), it can absorb and cool the heat generated inside the device during discharge. The cooling water that has absorbed the heat can be smoothly discharged to the outside of the device through the first cooling water outlet (150).

[0035] In particular, the first cooling water inlet (140), the first cooling water outlet (150), and the ozone discharge section (160) may be arranged side by side on one side of the first housing (100). Through this side-by-side arrangement, the convenience of connection with external piping lines and space utilization can be improved.

[0036] A first cover plate (120) may be disposed on the upper surface of the first cooling plate (110) and coupled thereto. By coupling the first cover plate (120), the first waterway (130) formed inside the first cooling plate (110) can be stably sealed.

[0037] A gas outlet (170) for ozone gas to move may be formed in the first cooling plate (110). The gas outlet (170) may be formed extending from the first cover plate (120) to the location where the ozone discharge section (160) is located.

[0038] Ozone gas generated inside an ozone generator according to one embodiment of the present invention can be guided to a gas outlet (170). The guided ozone gas passes through the gas outlet (170) and can finally be safely discharged outside the device by an ozone discharge unit (160).

[0039] The alignment (180) may be placed on the first housing (100). Specifically, the alignment (180) may be provided on the upper surface (120US) of the first cover plate (120). The alignment (180) may have a shape that protrudes vertically from the upper surface of the first housing (100).

[0040] The alignment (180) can guide the first adhesive layer (190), ground electrode (200), etc., to be placed in an accurate position on the first housing (100), which will be described later. Multiple alignments (180) may be spaced apart from each other on the first cover plate (120).

[0041] Horizontal flow of the upper stacked components can be prevented by multiple alignments (180), thereby improving the assembly precision of the device. Additionally, the alignment (180) can be physically combined with the spacer (210), which will be described later, to induce the maintenance of the stability of the stacked structure.

[0042] The first adhesive layer (190) may be placed on the upper surface (120US) of the first cover plate (120). The first adhesive layer (190) may be placed and seated inside formed by a plurality of alignments (180).

[0043] A plurality of holes spaced apart from the center may be formed in the first adhesive layer (190). A first conductive adhesive (195), to be described later, may be interposed and disposed in the plurality of holes.

[0044] A first hole (h1) may be formed through the center of the first adhesive layer (190). Ozone generated from inside the ozone generator may pass to the outside through the first hole (h1).

[0045] The first adhesive layer (190) may be composed of an adhesive material, such as epoxy resin, to physically and firmly bond the components. Additionally, the first adhesive layer (190) may be formed by including a material having thermal conductivity properties to smoothly transfer heat generated during discharge to the lower portion.

[0046] The first conductive adhesive (195) can be placed inside a plurality of holes formed in the first adhesive layer (190). An electrical path through which electricity can flow between the insulating adhesive layers can be secured by the first conductive adhesive (195).

[0047] The upper and lower adjacent components can be electrically connected to each other via the first conductive adhesive (195). The first conductive adhesive (195) may be composed of an electrically conductive material, such as conductive metal particles or conductive paste, so that the electrical connection can be performed smoothly.

[0048] The ground electrode (200) can be placed on the first adhesive layer (190). The ground electrode (200) can be placed in an inner area partitioned by a plurality of alignments (180).

[0049] A second hole (h2) for the passage of ozone gas may be formed in the center of the ground electrode (200). The second hole (h2) may be formed to communicate in a vertical direction with the first hole (h1) formed in the first adhesive layer (190).

[0050] The ground electrode (200) can be electrically connected to the first housing (100) through the first conductive adhesive (195). The device can be grounded to ground through the ground electrode (200). The ground electrode (200) may include a metallic material.

[0051] The ground electrode (200) can define a discharge area together with the spacer (210) and the coating film (220). A stable electrical path can be provided within the space where the plasma discharge occurs by the ground electrode (200).

[0052] A spacer (210) may be placed on a ground electrode (200). A spacer (210) may be interposed between the ground electrode (200) and a coating film (220). A spacer (210) may be interposed between the ground electrode (200) and a dielectric film (230).

[0053] The spacer (210) can be combined with a plurality of alignments (180). The alignment position of the parts can be firmly fixed by the physical combination of the spacer (210) and the alignments (180).

[0054] The spacer (210) can form a discharge area with the coating film (220) and the ground electrode (200). A certain gap can be formed inside the discharge area by the spacer (210).

[0055] In one embodiment of the present invention, the gap of the discharge area formed by the spacer (210) can be set within a range of about 0.05 mm to 0.15 mm. The thickness of the spacer (210) can be appropriately varied according to required operating conditions, such as improving ozone generation concentration or ensuring the lifespan of the device.

[0056] Specifically, if you want to generate a high concentration of ozone, you can maximize discharge efficiency by setting the gap of the discharge area to be narrow, close to 0.05 mm. Conversely, if you want to extend the lifespan of the device by relieving electrical stress, you can set the gap to be wide, close to 0.15 mm.

[0057] By forming a fine gap to suit the purpose in this way, the gas within the discharge region is physically located close to the dielectric film and the cooling structure (first and second housings (100, 300)). Therefore, the shortest possible cooling path is secured so that the heat generated during plasma discharge is transferred through the dielectric film to the water channel (130, 330) inside the housing, thereby enabling the stable generation of high-concentration ozone.

[0058] The spacer (210) may be composed of an insulating material, such as ceramic, to provide stable performance in a discharge environment. However, in the case of ceramic materials, there may be a risk of damage (breakage) due to physical impact during assembly or device operation. Therefore, to prevent such damage risk and ensure structural durability, the spacer (210) may be made of a metal material including stainless steel (SUS). When stainless steel is applied as the material of the spacer (210) in this way, the discharge gap can be stably maintained without deformation or damage even during repeated assembly and disassembly processes.

[0059] The dielectric film (230) may be placed on the ground electrode (200). The dielectric film (230) may be placed on the coating film (220). The dielectric film (230) may include a first surface (230_S1) facing the first housing (100) and a second surface (230_S2) facing the second housing (300).

[0060] The coating film (220) may be placed on the first surface (230_S1) of the dielectric film (230). The coating film (220) may be placed between the dielectric film (230) and the ground electrode (200). A portion of the coating film (220) may be placed on the spacer (210). The coating film (220) may include silicon oxide.

[0061] Referring to FIG. 3, in one embodiment, the side (220SW) of the coating film (220) may be located on the same plane as the side (230SW) of the dielectric film (230). The side (220SW) of the coating film (220) and the side (230SW) of the dielectric film (230) may be arranged to be aligned perpendicularly to each other. At this time, the horizontal length (L2) of the coating film (220) may be formed to be equal to the horizontal length (L1) of the dielectric film (230).

[0062] Referring to FIG. 4, in one embodiment, the side (220SW) of the coating film (220) may be positioned inwardly than the side (230SW) of the dielectric film (230). The side (230SW) of the dielectric film (230) may be positioned to extend further outward or protrude further than the side (220SW) of the coating film (220) with respect to the horizontal direction. This protruding structure may cause a portion of the lower surface of the dielectric film (230) to be exposed without being covered by the coating film (220). In this case, the horizontal length (L2) of the coating film (220) may be formed to be smaller than the horizontal length (L1) of the dielectric film (230).

[0063] Referring to FIG. 5, in one embodiment, the side (220SW) of the coating film (220) may be positioned to coincide with the inner surface (210ISW) of the spacer (210) in the vertical direction. In the vertical direction, the side (220SW) of the coating film (220) may be located on the same plane as the inner surface (210ISW) of the spacer (210). In this case, the horizontal length (L2) of the coating film (220) may be smaller than the horizontal length (L1) of the dielectric film (230).

[0064] Referring to FIG. 6, in one embodiment, the side (220SW) of the coating film (220) may be located at an inner point closer to the central axis than the inner side (210ISW) of the spacer (210). It may be arranged so that a gap of a certain width exists between the side (220SW) of the coating film (220) and the inner side (210ISW) of the spacer (210). Accordingly, among the first surface (230_S1) of the dielectric film (230), the area near the inner side (210ISW) of the spacer (210) may be exposed from the coating film (220).

[0065] The coating film (220) is placed on the dielectric film (230) and can serve to block external impurities, such as moisture or particles, from being directly exposed to the surface of the dielectric film (230). By preventing the adhesion or deposition of impurities through this coating film (220), the performance of the dielectric film (230) can be maintained stably for a long period without degradation, and the replacement cycle of the discharge tube can also be significantly extended by minimizing surface contamination. In addition, as the dielectric film (230) is improved to a high-strength dielectric and physical durability is secured, damage to the dielectric film (230) caused by arcing or electrical stress occurring during the plasma discharge process can be effectively prevented. Furthermore, thermal stress applied to the dielectric film (230) can be relieved, thereby improving the overall reliability of the device, and ozone generation and discharge efficiency can be simultaneously increased based on a stable dielectric state. This coating film (220) can be formed by including a material with excellent durability, such as silicon oxide.

[0066] The lower electrode (240) can be disposed on the dielectric film (230). Specifically, the lower electrode (240) can be disposed on the second surface (230_S2) of the dielectric film (230).

[0067] The lower electrode (240) may include a metallic material with excellent electrical conductivity. For example, the lower electrode (240) may include aluminum (Al).

[0068] A second adhesive layer (250) may be disposed on a lower electrode (240). A plurality of holes spaced apart from the center may be formed in the second adhesive layer (250). A second conductive adhesive (255) may be interposed in the spaced plurality of holes. Through the second conductive adhesive (255), a stable electrical connection between the electrodes can be induced even in the insulating adhesive layer section.

[0069] The second adhesive layer (250) may be composed of an adhesive material, such as epoxy resin, to physically and firmly bond the components. Additionally, the second adhesive layer (250) may be formed by including a material having thermal conductivity properties to smoothly transfer heat generated during discharge to the lower portion.

[0070] The upper electrode (260) may be disposed on the second adhesive layer (250). The upper electrode (260) may include a metallic material. For example, the upper electrode (260) may include aluminum.

[0071] A third hole (h3) may be formed through the central portion of the upper electrode (260) and the lower electrode (240). The third hole (h3) may induce attenuation of the electric field strength generated in the central region of the dielectric film (230). By mitigating the concentration of the electric field, unwanted arcing through the central portion of the dielectric film (230) can be effectively prevented. Consequently, the overall electrical reliability of the ozone generator can be ensured by the electrode structure including the third hole (h3).

[0072] The lower electrode (240) and the upper electrode (260) of an ozone generator according to one embodiment of the present invention may be formed of an aluminum metal layer. In the ozone generator according to the present invention, metals such as gold (Au) or silver (Ag), which were mainly used in conventional discharge tube electrodes, may be replaced with aluminum. In response to the problems of metal depletion and rising costs, aluminum, a general-purpose metal with abundant reserves, may be utilized as a material. Through an aluminum-based electrode structure, economical production of high-performance ozone generators required in semiconductor processes, etc., may be possible.

[0073] An insulating layer (270) may be placed on the upper electrode (260). The upper electrode (260) and the second housing (300) may be electrically insulated by the insulating layer (270). A hole (h4) through which a high-voltage cable (370) passes may be formed in the insulating layer (270).

[0074] A third adhesive layer (280) may be placed on the insulating layer (270). The insulating layer (270) and the second housing (300) may be physically and firmly bonded by the third adhesive layer (280). A hole (h5) through which a high-voltage cable (370) passes may be formed in the third adhesive layer (280). The third adhesive layer (280) may be formed by including a thermally conductive adhesive material such as epoxy resin.

[0075] A second housing (300) may be disposed on the upper part of an ozone generator according to one embodiment of the present invention. The second housing (300) may be provided as an upper housing forming the upper exterior of the device.

[0076] The second housing (300) may include a second cooling plate (310), a second cover plate (320), a second waterway (330), a second cooling water inlet (340), a second cooling water outlet (350), and a gas inlet (360).

[0077] The second cooling plate (310) can serve as the upper cover of the ozone generator. A second waterway (330) through which a cooling medium circulates can be formed inside the second cooling plate (310). The second waterway (330) may be formed in a winding spiral structure to maximize cooling efficiency, but is not limited thereto.

[0078] A second cooling water inlet (340) and a second cooling water outlet (350) may be connected to each end of the second waterway (330). External cooling water may be introduced through the second cooling water inlet (340), pass through the second waterway (330) to absorb heat, and then be discharged through the second cooling water outlet (350). A second cover plate (320) may be attached to the lower part of the second cooling plate (310) to seal the waterway. A hole (h6) for passing a cable may be formed inside the second cover plate (320).

[0079] A gas inlet (360) into which raw gas is injected may be connected to one side of the second housing (300). Oxygen or raw gas injected by the gas inlet (360) can be stably guided to a discharge area through an internal passage.

[0080] A cable insertion hole (370h) may be formed on the side of the second housing (300). A high-voltage cable (370) may be inserted into the interior through the cable insertion hole (370h) and holes (h6, h5, h4).

[0081] The inserted high-voltage cable (370) is electrically connected to the upper electrode (260) inside and can apply the high-voltage energy required for discharge.

[0082] In one embodiment of the present invention, the first cooling plate (110) and the first cover plate (120) constituting the first housing (100), and the second cooling plate (310) and the second cover plate (320) constituting the second housing (300) are each firmly joined through brazing to primarily ensure the airtightness of the waterway.

[0083] Furthermore, the first housing (100) and the second housing (300) can be welded together at their edges to form a permanently sealed chamber inside. Specifically, the outer rim of the first cover plate (120) of the first housing (100) and the outer rim of the second cover plate (320) of the second housing (300) can be directly joined and sealed together through argon welding.

[0084] Inside the sealed chamber formed by such brazing and argon welding, a discharge region including the ground electrode, dielectric film, lower electrode, and upper electrode described above can be accommodated in a state of complete isolation from the outside. This fundamentally prevents the deterioration of the seal and gas leakage caused by ozone, and facilitates the detection of helium vacuum leaks, thereby significantly improving the reliability of the device.

[0085] The dielectric film of an ozone generator is directly exposed to external impurities such as moisture and particles. These introduced impurities are deposited on the surface of the dielectric film, degrading its performance. Consequently, there may be issues such as a shortened replacement cycle for the discharge tube and easy damage during arcing when plasma discharge occurs.

[0086] However, in an ozone generator according to one embodiment of the present invention, a coating film (220) may be disposed on a dielectric film (230). By disposing of the coating film (220) on the dielectric film (230), the phenomenon of various impurities, such as moisture or particles introduced from the outside, being directly exposed to the surface of the dielectric film (230) can be effectively blocked. By this coating film (220), impurities may be prevented from adhering to or depositing on the surface of the dielectric film (230), thereby ensuring that the performance of the dielectric film (230) is not degraded and is maintained stably for a long period. As a result, the replacement cycle of the discharge tube can be significantly extended by preventing contamination of the dielectric surface, and the time loss and related costs associated with the shutdown of semiconductor processes for discharge tube replacement can be greatly reduced. In addition, as the dielectric film (230) is improved to a high-strength dielectric through the application of the coating film (220), damage to the dielectric film (230) caused by arcing or electrical and thermal stress during the plasma discharge process is prevented, thereby ensuring the overall reliability of the device.

[0087] Meanwhile, in an ozone generator according to one embodiment of the present invention, an aluminum-compounded electrode material is used for the lower electrode (240) and the upper electrode (260), thereby effectively replacing expensive rare metal materials such as gold (Au) or silver (Ag) that were previously used. The high resistance and atmospheric oxidation characteristics unique to aluminum can be improved through optimized material compounding technology, and the electrode layer developed through this can provide economic advantages by reducing manufacturing costs while dramatically increasing ozone production compared to existing electrodes. Based on this high-concentration ozone generation capability, the device can be efficiently applied to various processes such as semiconductor ALD, CVD, and DIFFUSION that require high levels of ozone concentration.

[0088] FIG. 9 is a drawing for explaining an ozone generator according to an embodiment of the present invention. For convenience of explanation, details that overlap with those described in FIG. 1 to 8 are briefly explained or omitted.

[0089] Referring to FIG. 9, an ozone generator according to one embodiment of the present invention may further include a lower dielectric film (235) and a lower coating film (225). The lower dielectric film (235) may be placed on a ground electrode (200). The lower coating film (225) may be placed on the lower dielectric film (235). The lower coating film (225) may include silicon oxide.

[0090] A hole (235h) for the movement of ozone gas may be formed in the center of the lower dielectric film (235). A hole (225h) communicating with the hole (235h) may be formed in the center of the lower coating film (225). Ozone gas formed in the discharge area may pass through the holes (235h, 225h) sequentially and move toward the first housing (100). Finally, the ozone gas may be discharged to the outside through the ozone discharge section (160) via a gas discharge path provided in the first housing (100).

[0091] An ozone generator according to one embodiment of the present invention may have a lower dielectric film (235) and a lower coating film (225) arranged so that the lower dielectric surface may be directly exposed to external impurities such as moisture or particles. In particular, the adhesion and deposition of impurities are prevented by the lower coating film (225), thereby allowing the performance of the lower dielectric to be maintained stably for a long period. Furthermore, as the physical durability of the dielectric is enhanced through the coating structure, damage to the dielectric film caused by arcing or electrical stress occurring during plasma discharge can be effectively prevented. As a result, the discharge efficiency of the entire device is improved and the replacement cycle of the device is extended, thereby providing a technical effect that enables the economical and stable supply of high-concentration ozone.

[0092] FIGS. 10 to 12 are drawings for explaining an ozone generating device according to an embodiment of the present invention. For convenience of explanation, details that overlap with those described in FIGS. 1 to 9 are briefly explained or omitted.

[0093] Referring to FIGS. 10 to 12, the first housing (100), first adhesive layer (190), ground electrode (200), dielectric film (230), spacer (210), coating film (220), lower electrode (240), second adhesive layer (250), upper electrode (260), and second housing (300) described in detail above can be defined as a single cell. An ozone generator according to one embodiment of the present invention may include a structure in which a plurality of such cells are stacked.

[0094] In each of the stacked multiple cells, passages for fluid inflow and outflow can be aligned in a vertical direction. Specifically, the first cooling water inlet (140), the first cooling water outlet (150), and the ozone discharge section (160) provided in each of the multiple cells can be aligned in a vertical direction. Additionally, the second cooling water inlet (340), the second cooling water outlet (350), and the gas inlet (360) of each cell can be arranged to be aligned in a vertical direction.

[0095] Through this vertical alignment structure, a consistent cooling water supply and gas movement path can be formed across the entire stacked cell. Each aligned inlet and outlet can be connected to form a common manifold. This allows for the uniform distribution of cooling water and raw gas to multiple cells, and enables the efficient collection and discharge of ozone gas generated in each cell.

[0096] In one embodiment of the present invention, when gas and cooling water are supplied to a plurality of cells through the common manifold, a flow restrictor may be further provided on the piping path leading to each cell. The flow restrictor regulates the pressure throughout the manifold evenly, thereby ensuring that the raw gas and cooling water are distributed evenly to each stacked cell without bias. Furthermore, when the inlet and outlet portions of each cell are connected vertically to form a manifold, one end of the connecting piping may be formed in a widening flare shape, and the other end may be formed in a straight shape. Through this, the straight end of the piping of an adjacent cell is inserted into the adjacent flared end and welded in an overlapping state, thereby enabling a more robust and secure sealing connection. Consequently, the ozone production capacity of the device can be easily expanded through the stacking and modularization of the cells.

[0097] Although embodiments of the present invention have been described with reference to the attached drawings, the present invention is not limited to the above embodiments and can be manufactured in various different forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical concept or essential features of the present invention. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. Explanation of the symbols

[0098] 100: 1st housing 110: 1st cooling plate 120: First cover plate 130: First waterway 140: First coolant inlet 150: First coolant outlet 160: Ozone emission section 170: Gas exhaust port 180: Alignment 190: First adhesive layer 195: First conductive adhesive 200: Ground electrode 210: Spacer 220: Coating film 225: Underlayer coating film 230: Dielectric film 235: Lower dielectric film 240: Lower electrode 250: Second adhesive layer 255: Second conductive adhesive 260: Upper electrode 270: Insulating layer 280: 3rd adhesive layer 300: 2nd housing 310: Second cooling plate 320: Second cover plate 330: Second waterway 340: Second cooling water inlet 350: Second coolant outlet 360: Gas inlet 370: High voltage cable

Claims

Claim 1 An ozone generator comprising: a first housing including a first waterway, a first cooling water inlet, a first cooling water outlet, and an ozone discharge portion; a first adhesive layer disposed on the first housing; a ground electrode disposed on the first adhesive layer; a dielectric film disposed spaced vertically from the ground electrode; a spacer disposed between the ground electrode and the dielectric film to form a discharge region; a coating film disposed on the dielectric film between the dielectric film and the spacer; a lower electrode disposed on the dielectric film; a second adhesive layer disposed on the lower electrode; an upper electrode disposed on the second adhesive layer; and a second housing disposed on the upper electrode and including a second waterway, a second cooling water inlet, a second cooling water outlet, and a gas inlet portion, wherein the lower electrode and the upper electrode comprise aluminum, and the horizontal length of the dielectric film is the same as the horizontal length of the coating film. Claim 2 An ozone generator according to claim 1, wherein the dielectric film comprises a first surface facing the first housing and a second surface facing the second housing, and the coating film is disposed on the first surface. Claim 3 An ozone generating device according to claim 1, wherein the coating film comprises silicon oxide. Claim 4 In claim 3, the ozone generator, wherein the lower electrode and the upper electrode are formed of an aluminum metal layer. Claim 5 delete Claim 6 An ozone generating device according to claim 1, wherein the side of the dielectric film and the side of the coating film are on the same plane. Claim 7 An ozone generating device according to claim 1, further comprising a plurality of alignments disposed on the first housing, wherein the first adhesive layer is interposed between the plurality of alignments. Claim 8 In claim 7, the spacer is combined with the plurality of alignments, an ozone generating device. Claim 9 An ozone generator according to claim 1, wherein the first housing, the first adhesive layer, the ground electrode, the dielectric film, the spacer, the coating film, the lower electrode, the second adhesive layer, the upper electrode, and the second housing are defined as a single cell, and the cell is stacked in plurality. Claim 10 An ozone generator according to claim 1, further comprising: a lower dielectric film disposed on the ground electrode; and a lower coating film disposed on the lower dielectric film and having holes formed therein, wherein the lower coating film comprises silicon oxide.

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