Device for agitating plating liquid

Abstract

The present invention relates to a device that causes a plating solution inside a plating bath to be stirred more effectively by causing a pair of paddles, arranged to face each other on both sides of a substrate, to reciprocate in opposite directions. It is characterized by comprising a pair of drive rods arranged side by side in a horizontal position, a pair of paddles installed facing each other using one of the pair of drive rods, and a pair of drive units that share the support of one end and the other end of each of the pair of drive rods and move back and forth in different directions.

Description

Technology Field

[0001] The present invention relates to a device for stirring a plating solution, and more specifically, to a device that stirs the plating solution inside a plating bath in a more effective manner by causing a pair of paddles, arranged to face each other on both sides of a substrate, to reciprocate in opposite directions. Background Technology

[0003] Generally, in a plating process targeting a substrate, an electrode and a substrate are placed inside a plating bath with the plating solution introduced, and power is supplied to apply voltage between the electrode and the substrate.

[0004] Therefore, metal ions contained in the plating solution gain electrons from the surface of the substrate and precipitate as metal, immediately forming a film (plating layer) on the surface of the substrate and gradually increasing its thickness.

[0005] At this time, as with the inventions of Korean Registered Patent Publication No. 10-2588417 and Registered Patent Publication No. 10-2713873, a plating solution is flowed by reciprocating a pair of paddles arranged to face each other on both sides of a substrate, so that a uniform plating layer is formed on the surface of the substrate.

[0006] However, while this method poses no problem when plating on substrates such as PCBs or wafers, the following problems arise when plating on glass substrates with via holes formed therein.

[0007] In other words, the via holes formed in the glass substrate are very fine with a diameter of tens of micrometers or less and have a large aspect ratio, so it is difficult for the plating solution to penetrate into them, and as a result, problems arise such as the plating layer thickness being formed unevenly or voids being formed inside the plating layer.

[0008] As such, there are limitations in achieving high-quality plating on TGV (Through Glass Via) substrates, which are gaining attention as next-generation technology, using conventional methods, and thus, an alternative solution to this problem is required. Prior art literature

[0010] Korean Patent Publication No. 10-2588417 (October 6, 2023) Korean Patent Publication No. 10-2713873 (September 30, 2024) The problem to be solved

[0011] The present invention is an invention proposed for the purpose of solving the above-mentioned problem,

[0012] The purpose is to present a solution to the problem that the thickness of the plating layer inside the via hole is unevenly formed or voids are formed inside the plating layer during the plating process on the TGV substrate. means of solving the problem

[0014] The present invention aims to realize the above-mentioned objectives,

[0015] A plating solution stirring device is provided, characterized by comprising: a pair of driving rods arranged side by side in a horizontal position; a pair of paddles installed facing each other using one of the pair of driving rods; and a pair of driving units that share the support of one end and the other end of each of the pair of driving rods and move back and forth in different directions.

[0016] At this time, the driving unit is characterized by comprising: a plate-shaped fixed plate; a pair of horizontal rails arranged parallel to each other on the upper side of the fixed plate; a pinion gear installed between the pair of horizontal rails in a position where the rotation axis is vertically formed and rotates in both directions; and a driving motor that rotates the pinion gear in both directions.

[0017] In addition, it is characterized by comprising: a pair of rack gears arranged parallel to each other between a pair of horizontal rails in a manner that meshes simultaneously with the pinion gear; and a pair of sliders installed to enable reciprocating movement using the pair of horizontal rails, installed to be linked to one of the pair of rack gears, reciprocating in opposite directions while supporting a pair of drive rods by sharing the load, and configured to allow a pair of paddles to move in conjunction. Effects of the invention

[0019] The plating solution stirring device according to the present invention is,

[0020] Since a pair of paddles positioned facing each other on both sides of the glass substrate are configured to reciprocate in opposite directions, the stirring efficiency and circulation of the plating solution are improved compared to a method where a pair of paddles reciprocate in the same direction.

[0021] Therefore, during the process of filling the inside of the via hole in a bridged state, the thickness is formed uniformly and void formation is prevented, which results in the effect of ensuring excellent plating quality. Brief explanation of the drawing

[0023] FIG. 1 is a basic configuration diagram of a plating solution stirring device according to the present invention. Figure 2 is an example diagram showing the plating solution stirring device installed in a plating tank. FIG. 3a is a basic configuration diagram of a paddle constituting the present invention. FIG. 3b is an exemplary diagram showing the shape of a paddle according to one embodiment of the present invention. FIG. 3c is an exemplary diagram showing the shape of a paddle according to another embodiment of the present invention. FIGS. 4a to 4c are exemplary diagrams showing a pair of paddles moving back and forth by driving the plating solution stirring device. FIG. 5 is an enlarged view showing the driving unit constituting the present invention. Specific details for implementing the invention

[0024] The present invention relates to a device for stirring a plating solution, and,

[0025] It is characterized by comprising: a pair of drive rods (100) arranged side by side in a horizontal position; a pair of paddles (200) installed facing each other using one of the pair of drive rods (100); and a pair of drive units (300) that share the support of one end and the other end of each of the pair of drive rods (100) and move back and forth in different directions.

[0027] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings.

[0028] First, as shown in FIG. 1, the pair of drive rods (100) are long rod-shaped components and are arranged side by side in a horizontal position to support one of the pair of paddles (200).

[0029] That is, a supporting upper structure for placing a pair of paddles (200) inside the plating tank can be formed by arranging a pair of drive rods (100) side by side above the plating tank.

[0030] Accordingly, a pair of paddles (200) may be arranged facing each other first, and then one may be placed facing each other on both sides of a glass substrate introduced into the plating tank.

[0031] At this time, the pair of paddles (200) are plate-shaped components and, as shown in FIG. 2, are arranged facing each other inside the plating tank and serve to stir the plating solution stored inside.

[0032] That is, as illustrated in FIG. 3a, the paddle (200) is configured to have a shape including a plurality of open holes (210) formed to penetrate a portion of the front and rear surfaces and a plurality of wing portions (220) formed to protrude forward in correspondence with the open holes (210), and moves back and forth in the left and right directions so that stirring of the plating solution using the wing portions (220) can occur.

[0033] In this process, the effect of reducing resistance by the opening hole (210) occurs, and at the same time, the supply of the plating solution passing through the opening hole (210) to the substrate side continues, so the problem of limited fluidity caused by the very narrow space between the glass substrate and the paddle (200) can be resolved.

[0034] At this time, the plurality of wing portions (220) may be configured in a flat shape, and as shown in FIG. 3a, the entire structure may be configured in the same shape, or as shown in FIG. 3b, Type A and Type B, which have the same vertical length but different widths, may be arranged alternately to increase the effect of vortex formation during the reciprocating movement.

[0035] In another form, as shown in FIG. 3c, the plurality of wing portions (220) are configured with Type A and Type B having the same vertical length but different widths, and at the same time, the sides of Type B, which has a relatively shorter width, are formed as curved surfaces, so that vortex formation occurs more actively during the reciprocating movement.

[0036] That is, in the shape and arrangement structure as shown in FIG. 3c, when the paddle (200) moves back and forth, the plating solution flows asymmetrically on both sides of Type B, and as a result, the shear layer on both sides easily becomes unstable, causing peeling and reattachment on the curved surface.

[0037] As a result of this phenomenon, the instability of the flow increases significantly, and consequently, the frequency and intensity of vortex generation increase significantly.

[0038] In addition, typically, a pair of paddles (200) are configured to reciprocate in the same direction to stir the plating solution, but as shown in FIGS. 4a to 4c, the present invention is characterized by a pair of paddles (200) being configured to reciprocate in different directions to stir the plating solution.

[0039] Therefore, since flow in opposite directions is continuously generated inside the plating tank, the supply of the plating solution through the open hole (210) becomes smoother, and at the same time, the formation of vortices becomes more active, and the formation of voids during the plating process inside the via hole can be effectively suppressed.

[0041] Additionally, the above-mentioned pair of driving units (300) are devices for stirring the plating solution and are installed in a manner that supports the pair of driving rods (100) and are driven to reciprocate the pair of paddles (200).

[0042] That is, the above pair of driving units (300) are driven while supporting one end and the other end of each of the pair of driving rods (100) separately, so that they reciprocate in different directions.

[0043] To this end, as illustrated in FIG. 5, the driving unit (300) is characterized by being configured to include a plate-shaped fixed plate (310), a pair of horizontal rails (320) arranged parallel to each other on the top of the fixed plate (310), and a pinion gear (330) installed between the pair of horizontal rails (320) in a position where the rotation axis is vertically formed and rotates in both directions.

[0044] In addition, it is characterized by being configured to include a drive motor (340) that rotates the pinion gear (330) in both directions, a pair of rack gears (350) arranged parallel to each other between a pair of horizontal rails (320) in a manner that engages with the pinion gear (330) simultaneously, and a pair of sliders (360) installed to enable reciprocating movement using the pair of horizontal rails (320) and installed to be linked to each of the pair of rack gears (350).

[0045] At this time, the pair of sliders (360) are configured to support the pair of drive rods (100) one by one, thereby enabling the reciprocating movement of the paddles (200) in opposite directions.

[0046] That is, the above pair of sliders (360) can be divided into a first slider (360a) installed relatively close to the paddle (200) and a second slider (360b) installed relatively far away, and the pair of drive rods (100) can be installed in a parallel manner so that the first slider (360a) of one of the drive units (300) and the second slider of the other drive unit (300) are combined to support one drive rod (100).

[0047] Accordingly, the driving motor (340), installed so that the main body is positioned below the fixed plate (310), causes the rotation of the pinion gear (330) and the forward and backward movement of the rack gears (350) in opposite directions to occur, and together with this, the forward and backward movement of a pair of sliders (360) in opposite directions occurs.

[0048] At this time, the above pair of sliders (360) are configured in the same shape, including a pair of linear blocks (361) installed to correspond to one of the pair of horizontal rails (320) and an L-shaped support (362) supported by the pair of linear blocks (361).

[0049] And a pair of supports (362) are installed on a horizontal rail (320) in a symmetrical manner to each other, so that a sufficient area can be secured for supporting the drive rod (100), and at the same time, installation and operation in a compact form are possible.

[0050] That is, with the configuration of the L-shaped structure as described above, a pair of supports (362) can be arranged to interlock with each other, so that installation in a compact form and operation within a short, limited range are possible.

[0051] Likewise, since operation occurs in the same way in other drive units (300), a pair of drive rods (100) move back and forth in opposite directions, and as a result, a pair of paddles (200) can move back and forth in opposite directions.

[0052] To this end, it is preferable to configure the driving motor (340), which is provided in each of the pair of driving units (300), as a servo motor or stepper motor capable of bidirectional rotation and angle control, so that simultaneous control without error is possible by giving a PWM signal or a step pulse at the same timing.

[0054] Additionally, as illustrated in FIG. 5, the driving unit (300) may be configured to further include a stopper (370) that prevents the slider (360) from deviating from the horizontal rail (320) of the pair of sliders (360) by limiting the movable range of one of the pair of sliders (360).

[0055] At this time, the stopper (370) may be configured to include a lower shaft (371) installed adjacent to one of a pair of sliders (360) and a rotating plate (372) installed to rotate eccentrically using the lower shaft (371).

[0056] Additionally, it may be configured to include a first rotation shaft (373) eccentrically installed on the upper end of the rotating plate (372), a second rotation shaft (374) installed on one side of the upper end of the slider (360), and a link plate (375) installed in a form in which the first rotation shaft (373) and the second rotation shaft (374) are axially connected at both ends.

[0057] That is, by installing the lower shaft (371) vertically directly on the fixed plate (310) or by installing the lower shaft (371) vertically through a through hole formed on one side of the fixed plate (310), the rotating plate (372) can be made to rotate eccentrically at a fixed position.

[0058] Additionally, a first rotation axis (373) is installed eccentrically on the top of the rotating plate (372), and a second rotation axis (374) is installed eccentrically on the top of one of the pair of sliders (360), and by using this to install a link plate (375), the range of movement of the pair of sliders (360) by the stopper (370) can be limited.

[0059] In other words, as illustrated in FIGS. 4a to 4c, as the slider (360) moves back and forth, the positional movement and attitude change of the link plate (375) due to the eccentric rotation of the rotating plate (372) can occur simultaneously, so a limitation on the range of movement targeting the slider (360) on which the second rotating axis (374) is directly installed occurs.

[0060] And in conjunction with this, a range of motion limitation occurs for the other slider (360) on the opposite side that supports one drive rod (100) together with the slider (360).

[0061] In addition, the stopper (370) may be configured to further include an auxiliary motor (376) that rotates the lower shaft (371) in both directions.

[0062] That is, by using an auxiliary motor (376) installed below the fixed plate (310), the lower shaft (371) can be installed in a manner that passes through the through hole, thereby enabling the lower shaft (371) itself to rotate.

[0063] In addition, the pinion gear (330) can be controlled to be synchronized with the drive motor (340) that rotates it in both directions, thereby preventing mechanical interference during the process of the pair of drive rods (100) moving back and forth.

[0064] In other words, since the lower shaft (371) and the rotating plate (372) are actively rotated by the driving of the auxiliary motor (376), the problem of the link plate (375) getting stuck on the first rotating shaft (373) and the second rotating shaft (374) during the process of the slider (360) moving back and forth can be solved.

[0066] The embodiments described above are provided as examples to ensure that the technical concept of the present invention is sufficiently conveyed to those skilled in the art to which the present invention belongs, and the present invention is not limited to the embodiments described above and may be embodied in other forms.

[0067] To clearly explain the present invention, parts unrelated to the explanation have been omitted from the drawings, and in the drawings, the width, length, thickness, etc. of the components may be exaggerated or reduced for convenience.

[0068] In addition, the same reference numbers throughout the specification represent the same components. Explanation of the symbols

[0070] 100 : Drive load 200 : Paddle → 210 : Open hole → 220 : Wing 300 : Driving unit → 310 : Fixed plate → 320 : Horizontal rail → 330 : Pinion gear → 340 : Drive motor → 350 : Rack Gear → 360 : Slider → 360a : 1st Slider → 360b : 2nd slider → 361 : Linear block → 362 : Stand → 370 : Stopper → 371 : Lower shaft → 372 : Turntable → 373 : First rotation axis → 374 : Second rotation axis → 375 : Linked version → 376 : Auxiliary motor

Claims

Claim 1 A pair of drive rods (100) arranged side by side in a horizontal position; a pair of paddles (200) installed facing each other using one of the pair of drive rods (100); and a pair of drive units (300) that share the support of one end and the other end of each of the pair of drive rods (100) and move back and forth in different directions. The drive unit (300) is characterized by being configured to include: a plate-shaped fixed plate (310); a pair of horizontal rails (320) arranged parallel to each other on the upper side of the fixed plate (310); a pinion gear (330) installed between the pair of horizontal rails (320) in a position where the rotation axis is vertically formed and rotates in both directions; a drive motor (340) that rotates the pinion gear (330) in both directions; and a pair of rack gears (350) arranged parallel to each other between the pair of horizontal rails (320) in a manner that simultaneously meshes with the pinion gear (330). A plating solution stirring device characterized by comprising: a pair of sliders (360) configured in a shape including a pair of linear blocks (361) installed to correspond to one each on a pair of horizontal rails (320) and an L-shaped support (362) supported by the pair of linear blocks (361); wherein each support (362) is installed to be reciprocally movable on the pair of horizontal rails (320) in a symmetrical manner to each other, and is installed to be linked to one each on a pair of rack gears (350), thereby reciprocating in opposite directions while sharing and supporting a pair of drive rods (100) and causing a pair of paddles (200) to move in conjunction. Claim 2 delete Claim 3 delete Claim 4 In claim 1, the driving unit (300) is further configured to include a stopper (370) that prevents the slider (360) from deviating from the horizontal rail (320) of the pair of sliders (360) by limiting the movable range of one of the pair of sliders (360); the stopper (370) is configured to include: a lower shaft (371) installed adjacent to one of the pair of sliders; a rotating plate (372) installed to rotate eccentrically using the lower shaft (371); a first rotating shaft (373) eccentrically installed on the upper end of the rotating plate (372); a second rotating shaft (374) installed on one side of the upper end of the slider; and a link plate (375) installed in a form in which the first rotating shaft (373) and the second rotating shaft (374) are axially connected at both ends.

Images