Automatic Fixing Device for CMP Head Inspection

Abstract

An automatic fixing device for inspecting a CMP head is disclosed. An automatic fixing device for inspecting a CMP head according to an embodiment of the present invention may include a housing, an inspection plate, a pressing plate, a plurality of clamps, a manifold unit, and a control unit. According to the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention, an accurate and highly reliable inspection can be performed by fixing the CMP head with a uniform load through automatic clamping using pneumatic pressure.

Description

Technology Field

[0001] The present invention relates to an automatic fixing device for inspecting CMP heads, and more specifically, to an automatic fixing device for inspecting CMP heads that can fix a CMP head with a uniform load using an automatic clamping system utilizing pneumatic pressure to inspect whether the membrane of a CMP head used in a chemical mechanical polishing (CMP) process is damaged. Background Technology

[0002] Chemical Mechanical Polishing (CMP) is a core technology for wafer surface planarization in semiconductor manufacturing. It utilizes chemical action and mechanical polishing simultaneously to remove irregularities and curves from the wafer surface and to flatten it into a smooth plane.

[0003] Recently, the importance of the CMP process has been growing due to the increasing integration density of semiconductor devices and the complexity of multilayer wiring structures. In particular, precise planarization between layers is essential for the multi-layer configuration of semiconductors and VR displays; to achieve this, the performance and reliability of the CMP head used in the process are critical.

[0004] A CMP head is an expensive precision component that performs the function of pressing and adsorbing a wafer onto a polishing pad, and contains multiple chambers inside. Each chamber is composed of a flexible material film called a membrane, and the pressure applied to the wafer is controlled through pneumatic pressure or vacuum supplied into the membrane.

[0005] The membrane of the CMP Head may be damaged due to repeated pressure changes and exposure to chemical environments during the polishing process, and if the membrane is damaged or leaks, the pressure applied to the wafer becomes uneven, which can lead to serious problems such as deterioration of polishing quality and wafer breakage.

[0006] Conventional fixing devices for CMP head inspection employ a manual method using knob bolts, which had the following problems.

[0007] First, since the fixed load is adjusted based on the operator's experience and intuition, the fixing force varies from operator to operator, resulting in reduced reproducibility and reliability of inspection results.

[0008] Second, due to the manual method, checking for abnormalities in the CMP Head is not performed uniformly, making accurate inspection difficult.

[0009] Third, the fixing method using thumbscrews may cause localized stress to concentrate on the CMP Head during the fixing process, posing a risk of membrane damage.

[0010] Fourth, inspection takes a long time and work efficiency is low.

[0011] Therefore, there is an urgent need for the development of an automated fixture capable of accurately and reliably inspecting the membrane condition of the CMP Head. Prior art literature

[0012] Korean Patent Publication No. 10-2021-0066147 (Publication Date: June 7, 2021) The problem to be solved

[0013] The problem that the present invention aims to solve is to provide an automatic fixing device for CMP head inspection that can fix a CMP head with a uniform load using automatic clamping with pneumatic pressure without relying on the operator's experience or intuition.

[0014] Another problem that the present invention aims to solve is to provide an automatic fixing device for inspecting CMP heads that can accurately and reproducibly inspect whether the membrane of a CMP head is damaged by precisely adjusting the fixed load according to the pneumatic setting value.

[0015] Another problem that the present invention aims to solve is to provide an automatic fixing device for CMP head inspection that operates solely on pneumatic supply without electric power, thereby providing a safe and highly reliable inspection environment.

[0016] An additional problem that the present invention aims to solve is to provide an automatic fixing device for CMP head inspection that can distribute stress applied to the CMP head by allowing a plurality of clamps to operate simultaneously and uniformly through a circular manifold design. means of solving the problem

[0017] To achieve the above objective, an automatic fixing device for inspecting a CMP head according to an embodiment of the present invention may include a housing.

[0018] In addition, to achieve the above objective, the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention may include an inspection plate coupled to a housing and on which a CMP head is seated.

[0019] In addition, to achieve the above objective, the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention may include a pressing plate that is spaced above the inspection plate and contacts the upper part of the CMP head.

[0020] In addition, to achieve the above objective, the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a plurality of clamps that are coupled to a housing at predetermined intervals along the perimeter of an inspection plate and can operate pneumatically to press and fix a pressing plate.

[0021] In addition, to achieve the above objective, the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention may include a manifold unit coupled to a housing and providing pneumatic pressure to a clamp.

[0022] In addition, to achieve the above objective, the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a control unit coupled to a housing and capable of controlling pneumatic pressure supplied from an external pneumatic supply device to a manifold unit.

[0023] In addition, to achieve the above objective, the control unit of the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention may operate a clamp to fix the CMP head with a pressing plate or return the clamp fixing the CMP head to its original position.

[0024] In addition, to achieve the above objective, the clamp of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may be a double-acting swing clamp capable of lifting and rotating.

[0025] In addition, to achieve the above objective, the manifold unit of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a first manifold connected to the lower part of the cylinder of the clamp and providing pneumatic pressure to the lower part of the piston that moves up and down inside the cylinder.

[0026] In addition, to achieve the above objective, the manifold unit of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a second manifold connected to the upper part of the cylinder and providing pneumatic pressure to the upper part of the piston.

[0027] In addition, to achieve the above objective, the first manifold of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a first body in the shape of a cylinder.

[0028] In addition, to achieve the above objective, the first manifold of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a first air passage formed on the central axis of the first body and connected to a control unit.

[0029] In addition, to achieve the above objective, the first manifold of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a plurality of first branch passages that are formed by extending radially with respect to a first air passage in a first body and connected to the lower part of a cylinder.

[0030] In addition, to achieve the above objective, the first manifold of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a first controller that is coupled to a first body, connected to a first branch passage, and capable of individually adjusting the lifting speed of a piston.

[0031] In addition, to achieve the above objective, the second manifold of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a second body in the shape of a cylinder.

[0032] In addition, to achieve the above objective, the second manifold of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a second air passage formed on the central axis of the second body and connected to a control unit.

[0033] In addition, to achieve the above objective, the second manifold of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a plurality of second branch passages that are formed by extending radially with respect to the second air passage in the second body and connected to the upper part of the cylinder.

[0034] In addition, to achieve the above objective, the second manifold of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a second controller that is coupled to the second body, connected to the second branch passage, and capable of individually adjusting the lifting speed of the piston.

[0035] In addition, to achieve the above objective, the first body and the second body of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may be combined in the form of a single cylinder.

[0036] In addition, to achieve the above objective, the control unit of the automatic fixing device for CMP head inspection according to an embodiment of the present invention may include a regulator capable of regulating the pneumatic pressure provided to the manifold unit.

[0037] In addition, to achieve the above objective, the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention may include a restraining unit that is coupled to a housing at a predetermined interval along the perimeter of the inspection plate and restricts the movement of a CMP head seated on the inspection plate. Effects of the invention

[0038] According to the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention, the CMP head can be fixed with a uniform load without relying on the operator's experience or intuition through automatic clamping via the circular arrangement of pneumatic clamps, thereby improving the reproducibility and reliability of inspection results.

[0039] In addition, according to the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention, the fixed load can be precisely adjusted according to the pneumatic setting value, so that the presence or absence of membrane damage in the CMP head can be checked accurately and uniformly.

[0040] In addition, according to the automatic fixing device for CMP head inspection according to an embodiment of the present invention, electric power is unnecessary and the device operates solely through pneumatic supply, thereby providing a safe and highly reliable inspection environment.

[0041] In addition, according to the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention, all clamps can operate uniformly at the same time through a circular manifold design for matching pneumatic clamp operation, thereby evenly distributing the stress applied to the CMP Head.

[0042] In addition, according to the automatic fixing device for CMP head inspection according to an embodiment of the present invention, the inspection time can be shortened and work efficiency improved through an automated clamping system.

[0043] In addition, according to the automatic fixing device for inspecting a CMP head according to an embodiment of the present invention, the CMP head can be stably fixed and released through the lifting and rotating movements of a double-acting swing clamp. Brief explanation of the drawing

[0044] FIG. 1 is a perspective view of an automatic fixing device for inspecting a CMP head according to one embodiment of the present invention. FIG. 2 is a perspective view of an automatic fixing device for CMP head inspection according to one embodiment of the present invention with the pressing plate separated. FIG. 3 shows a side view of an automatic fixing device for inspecting a CMP head according to one embodiment of the present invention. FIG. 4 shows a plan view of an automatic fixing device for inspecting a CMP head according to one embodiment of the present invention. FIG. 5 shows a clamp and a manifold unit of an automatic fixing device for inspecting a CMP head according to one embodiment of the present invention. FIG. 6 shows a manifold unit of an automatic fixing device for inspecting a CMP head according to one embodiment of the present invention. FIG. 7 shows a clamp of an automatic fixing device for inspecting a CMP head according to one embodiment of the present invention. FIG. 8 shows a planar cross-sectional view of the first manifold of an automatic fixing device for inspecting a CMP head according to one embodiment of the present invention. FIG. 9 shows a planar cross-sectional view of the second manifold of an automatic fixing device for inspecting a CMP head according to one embodiment of the present invention. Specific details for implementing the invention

[0045] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

[0046] However, in describing the present invention, descriptions of already known functions or configurations are omitted in order to clarify the gist of the invention.

[0047] The X, Y, and Z axes shown in the drawing are arbitrarily determined for the convenience of explanation rather than for the purpose of limiting rights; the X-axis is defined to indicate the forward (towards the arrow) and backward (opposite side of the arrow) directions, the Y-axis to indicate the left and right directions, and the Z-axis to indicate the up and down directions.

[0048] Each direction described below is based on this, except where specifically limited otherwise.

[0049] Terms such as up, down, left and right, front, and back, which designate directions in the description of the invention and claims, are determined based on the relative positions between drawings and components for the convenience of explanation and are not intended to limit rights; therefore, each direction described below is based on this, except where specifically defined otherwise.

[0050] Referring to FIGS. 1 to 4, the housing (100) is a structure that forms the overall frame of the automatic fixing device (1) for inspecting a CMP head, and can be formed in the shape of a roughly cuboid with a hollow interior.

[0051] The housing (100) can provide sufficient space to accommodate various components, such as a manifold unit (500) and a control unit (700), inside. Additionally, the housing (100) can protect internal components from vibration or external shock.

[0052] A top plate (110) may be attached to the open top of the housing (100). The top plate (110) may cover the top of the housing (100) and serve to protect the internal components. A plurality of through holes may be formed in the top plate (110) through which a clamp (400) can pass and be attached.

[0053] A side plate may be attached to the open side of the housing (100). The side plate may form the side of the housing (100) to protect internal components and form an exterior, and may be detached to open the side of the housing (100) for maintenance.

[0054] A control unit (700) can be coupled to the front of the housing (100). The control unit (700) can be positioned in a location easily accessible to a worker to provide convenience of operation.

[0055] The housing (100) may have one or more working grooves (130) formed in the top plate (110) for inserting a worker's hand. It is preferable that a pair of working grooves (130) be formed on both sides of the inspection plate (200). Through the working grooves (130), the worker can easily install or remove the CMP head.

[0056] Referring to FIGS. 1 to 4, the inspection plate (200) is firmly coupled to the upper plate (110) of the housing (100) and can provide a flat surface on which the CMP head can be stably seated. The inspection plate (200) is formed in the shape of a disc corresponding to the lower shape of the CMP head, so that position alignment can be facilitated when seated.

[0057] Since the surface of the inspection plate (200) comes into direct contact with the membrane of the CMP head, it is preferable to form it with a soft material such as urethane or silicone rubber to prevent damage to the membrane. Such a soft material can cushion the impact when in contact with the CMP head and prevent damage such as surface scratching or tearing.

[0058] Referring to FIGS. 1 to 4, the pressing plate (300) may be mounted on a plurality of supports (120) that are coupled to the upper plate (110) of the housing (100). The pressing plate (300) may be positioned spaced apart from the upper part of the inspection plate (200).

[0059] The CMP head can be positioned between the pressing plate (300) and the inspection plate (200). The pressing plate (300) can press the CMP head from above, which is separated from the stand (120) and placed on the inspection plate (200).

[0060] The pressing plate (300) may have a plurality of through holes formed therein. The pressing plate (300) may avoid interference with the CMP head through the plurality of through holes or be connected to the pressurization and vacuum ports of the CMP head. These through holes may enable various connections and accesses required during the inspection process.

[0061] The pressing plate (300) has a plurality of interference prevention grooves formed along its side perimeter to prevent interference with the clamp (400). The interference prevention grooves can move the point where the lever (430) of the clamp (400) fixes the pressing plate (300) toward the center of the pressing plate (300).

[0062] Referring to FIGS. 1 to 5 and 7, a plurality of clamps (400) can be connected by penetrating the top plate (110) vertically along the circumference of the inspection plate (200). The clamps (400) can be fixed by pressing the pressing plate (300).

[0063] The clamp (400) is a double-acting swing clamp that can fix or release the pressing plate (300) by combining linear and rotational motion of the piston using pneumatic pressure.

[0064] The clamp (400) may include a cylinder (410) and a piston. The cylinder (410) can raise and lower the piston using pneumatic pressure, and the piston can also perform a rotational movement.

[0065] A lever (430) can be attached to the upper part of the piston shaft (420) to press and fix the pressing plate (300). The lever (430) can fix or release the pressing plate (300) according to the rotation and lifting movements of the piston.

[0066] The lever (430) may be coupled with a contact member (431) that contacts the pressing plate (300) at its lower end. The contact member (431) can provide a stable fixing force when in contact with the pressing plate (300).

[0067] The clamp (400) can rotate toward the center of the pressing plate (300) and then descend to fix the pressing plate (300). Through this operation, the clamp (400) can securely fix the pressing plate (300).

[0068] A clamp (400) can be connected to a first branch line (440) at the bottom of a cylinder (410). Pneumatic pressure can be supplied to the bottom of the cylinder (410) through the first branch line (440) to raise the piston.

[0069] A second branch line (450) can be connected to the upper part of the cylinder (410) of the clamp (400). Pneumatic pressure can be supplied to the upper part of the cylinder (410) through the second branch line (450) to lower the piston.

[0070] The clamp (400) can be attached to the top plate (110) of the housing (100) using a fixing member (460) that is attached to the outer surface of the cylinder (410). The fixing member (460) can firmly secure the clamp (400) to the top plate (110).

[0071] The piston inside the cylinder (410) is connected to the lever (430) via the shaft (420) and can operate as follows depending on the direction of pneumatic supply:

[0072] Fixed operation: When pneumatic pressure is supplied to the upper part of the cylinder (410) through the second branch line (450), the piston rotates and descends, causing the lever (430) to move toward the center of the pressing plate (300) and then press the pressing plate (300) downward to fix it.

[0073] Release operation: When pneumatic pressure is supplied to the lower part of the cylinder (410) through the first branch line (440), the piston can rotate upward and in the reverse direction so that the lever (430) can return to its original position separated from the pressing plate (300).

[0074] Referring to FIGS. 5 and 6, the manifold unit (500) can be coupled inside the housing (100). The manifold unit (500) can simultaneously provide pneumatic pressure to a plurality of clamps (400).

[0075] The manifold unit (500) may include a first manifold (510) and a second manifold (520). The first manifold (510) and the second manifold (520) may be combined in the form of a single cylinder.

[0076] The manifold unit (500) can perform the function of simultaneously and evenly distributing pneumatic pressure supplied from a single pneumatic supply unit to a plurality of clamps (400). Through a circular manifold design, the length of the pneumatic supply path to each clamp (400) is kept the same so that all clamps (400) can operate simultaneously.

[0077] The first manifold (510) and the second manifold (520) each form independent pneumatic circuits to separately control the fixing and releasing operations of the clamp (400). Through this dual manifold structure, more precise and stable control of the clamp (400) is possible.

[0078] Referring to FIGS. 5 and 6, the first manifold (510) can be coupled to the upper part of the second manifold (520). The first manifold (510) can be coupled to the lower part of the top plate (110) of the housing (100).

[0079] In the first manifold (510), a first air passage (512) can be formed vertically along the central axis of a first body (511) in the shape of a cylinder. The first air passage (512) can serve as the main airway for pneumatic pressure.

[0080] The first air passage (512) can be connected to the first pneumatic line (530) through the upper part of the first body (511). Pneumatic pressure can be supplied from the control unit (700) through the first pneumatic line (530).

[0081] Referring to FIG. 8, the first manifold (510) may have a first branch passage (513) formed horizontally in the first body (511) that extends radially with respect to the first air passage (512). Multiple first branch passages (513) may be formed to correspond to each clamp (400).

[0082] The first branch passage (513) can be connected to the first branch line (440) through the outer surface of the first body (511). Each first branch passage (513) can be connected to the first branch line (440) of the corresponding clamp (400).

[0083] A first controller (514) may be coupled to the first branch line (440). The first controller (514) can individually adjust the flow rate of pneumatic pressure supplied to each clamp (400).

[0084] The first body (511) can be connected to the top plate (110) of the housing (100) through a support (550). The support (550) can stably support the first manifold (510).

[0085] Referring to FIGS. 5 and 6, the second manifold (520) may have a second air passage (522) formed vertically along the central axis of a second body (521) in the shape of a cylinder. The second air passage (522) may serve as the main pneumatic flow path of the second manifold (520).

[0086] The second air passage (522) can be connected to the second pneumatic line (540) through the lower part of the second body (521). Pneumatic pressure can be supplied from the control unit (700) through the second pneumatic line (540).

[0087] Referring to FIG. 9, the second manifold (520) may have a second branch passage (523) formed horizontally in the second body (521) that extends radially with respect to the second air passage (522). Multiple second branch passages (523) may be formed to correspond to each clamp (400).

[0088] The second branch passage (523) can be connected to the second branch line (450) through the outer surface of the second body (521). Each second branch passage (523) can be connected to the second branch line (450) of the corresponding clamp (400).

[0089] A second controller (524) may be coupled to the second branch line (450). The second controller (524) can individually adjust the flow rate of pneumatic pressure supplied to each clamp (400).

[0090] Referring to FIGS. 1 to 4, a plurality of restraining units (600) are arranged along the perimeter of the inspection plate (200) to surround the side of the CMP head and perform the function of fixing its position. The restraining units (600) can restrain the CMP head that is seated on the inspection plate (200) so that it does not move.

[0091] Since the inner surface of the restraint unit (600) comes into contact with the outer surface of the CMP head, it is preferable to line it with a soft material to prevent surface damage.

[0092] Referring to FIG. 1, the control unit (700) can control the pneumatic pressure supplied from an external pneumatic supply unit to the manifold unit (500) to operate the clamp (400) or return it to its original position.

[0093] The control unit (700) may include a first valve, a regulator, a first pressure gauge, a second pressure gauge, and a second valve. The first valve, the regulator, the first pressure gauge, the second pressure gauge, and the second valve may be positioned sequentially from left to right relative to the front.

[0094] The first valve is for main pneumatic control and is connected to an external pneumatic supply device to supply or cut off pneumatic pressure to the automatic fixing device (1) for CMP head inspection. The first valve can function as a main valve that controls the start and stop of pneumatic supply.

[0095] The regulator is connected to the first valve and can adjust the strength of the pneumatic pressure supplied to the second valve. By adjusting the strength of the pneumatic pressure, the regulator can adjust the load that the clamp (400) applies to the pressing plate (300). Through this, the pressure applied to the CMP head can be precisely controlled.

[0096] The second valve is for controlling pneumatic distribution to the first manifold (510) and the second manifold (520) and is connected between the regulator and the manifold unit (500) to provide or block pneumatic pressure to the first manifold (510) and the second manifold (520).

[0097] The second valve and the first manifold (510) can be connected by a first pneumatic line (530). The second valve and the second manifold (520) can be connected by a second pneumatic line (540).

[0098] The second valve can selectively provide pneumatic pressure to the first pneumatic line (530) and the second pneumatic line (540). Through this selective pneumatic supply, the operation of the clamp (400) can be controlled.

[0099] When the second valve provides air pressure to the first pneumatic line (530), air pressure can be supplied to the lower part of the cylinder (410) of the clamp (400) through the first manifold (510) and the first branch line (440).

[0100] When pneumatic pressure is supplied to the lower part of the cylinder (410) of the clamp (400), the piston inside the cylinder (410) can rotate after rising and return to its original position. Through this operation, the clamp (400) can release the fixation of the pressing plate (300).

[0101] When the second valve provides air pressure to the second pneumatic line (540), air pressure can be supplied to the upper part of the cylinder (410) of the clamp (400) through the second manifold (520) and the second branch line (450).

[0102] When pneumatic pressure is supplied to the upper part of the cylinder (410) of the clamp (400), the piston inside the cylinder (410) rotates and then descends to fix the pressing plate (300). Through this operation, the clamp (400) can securely fix the pressing plate (300).

[0103] The first pressure gauge is for monitoring the input pneumatic pressure and is connected between the regulator and the first valve to measure the pneumatic pressure. Through the first pressure gauge, the pressure of the pneumatic pressure supplied to the automatic fixing device (1) for inspecting the CMP head can be monitored.

[0104] The second pressure gauge is for monitoring the output pneumatic pressure and can be connected to the first pneumatic line (530) or the second pneumatic line (540) to measure the pneumatic pressure. Through the second pressure gauge, the pressure of the pneumatic pressure supplied to the actual clamp (400) can be checked.

[0105] The control unit (700) can install an overpressure prevention valve in the regulator to automatically cut off the pneumatic pressure when the set pressure is exceeded.

[0106] The control unit (700) can provide an emergency stop button that can immediately release all clamps in an emergency situation.

[0107] The control unit (700) can warn of abnormal pressure occurrence through real-time pressure monitoring.

[0108] The operation sequence of the automatic fixing device (1) for inspecting CMP heads of the present invention is as follows.

[0109] 1. Place the CMP head on the inspection plate (200).

[0110] 2. Place the pressing plate (300) on the CMP head.

[0111] 3. Open the first valve to receive compressed air from the pneumatic supply device.

[0112] 4. Adjust to an appropriate pressure using the regulator.

[0113] 5. Operate the second valve to supply air pressure to the second pneumatic line (540).

[0114] 6. All clamps (400) rotate and then descend simultaneously to fix the pressing plate (300).

[0115] 7. Perform an inspection of the CMP head.

[0116] 8. After the inspection is completed, the second valve is operated to supply air pressure to the first pneumatic line (530).

[0117] 9. All clamps (400) rise simultaneously and then rotate to return to their original positions.

[0118] 10. Remove the pressing plate (300) and separate the CMP head.

[0119] The automatic fixing device (1) for inspecting a CMP head according to an embodiment of the present invention can provide uniform and accurate fixing force regardless of the operator's skill level through an automatic clamping system using pneumatic pressure, and can provide a safe and highly reliable inspection environment as it does not require an electric power source.

[0120] Although specific embodiments of the present invention have been described and illustrated above, it is obvious to those skilled in the art that the present invention is not limited to the described embodiments and can be modified and varied in various ways without departing from the spirit and scope of the invention.

[0121] Therefore, such modifications or variations should not be understood individually from the technical spirit or perspective of the present invention, and modified embodiments should be considered to fall within the scope of the claims of the present invention. Explanation of the symbols

[0122] 1: Fixing device 100: Housing 110: Top plate 120: Mount 130: Working groove 200: Inspection plate 300: Pressing plate 400: Clamp 410: Cylinder 420: Shaft 430: Lever 431: Contact member 440: First branch line 450: Second branch line 460: Fixing member 500: Manifold unit 510: First manifold 511: First body 512: First air passage 513: First branch passage 514: First controller 520: Second manifold 521: Second body 522: Second air passage 523: Second branch passage 524: Second controller 530: First pneumatic line 540: Second pneumatic line 550: Support 600: Restraint Unit 700: Control Unit

Claims

Claim 1 An automatic fixing device for inspecting a CMP head, comprising: a housing; a disc-shaped inspection plate coupled to the housing and on which a CMP head is seated; a disc-shaped pressing plate spaced parallel to the top of the inspection plate and contacting the upper part of the CMP head; a plurality of clamps spaced at predetermined intervals along the circumference of the inspection plate, coupled to the housing, and capable of uniformly pressing and fixing the pressing plate by operating with pneumatic pressure; a manifold unit coupled to the housing and providing pneumatic pressure to the clamps; and a control unit coupled to the housing and capable of controlling the pneumatic pressure provided to the manifold unit from an external pneumatic supply device, wherein the control unit operates the clamps to fix the CMP head to the pressing plate or returns the clamps fixing the CMP head to their original position. Claim 2 An automatic fixing device for inspecting CMP heads, characterized in that, in claim 1, the clamp is a double-acting swing clamp capable of lifting and rotating. Claim 3 An automatic fixing device for CMP head inspection according to claim 1, wherein the manifold unit comprises: a first manifold connected to the lower part of the cylinder of the clamp and providing pneumatic pressure to the lower part of a piston that moves up and down inside the cylinder; and a second manifold connected to the upper part of the cylinder and providing pneumatic pressure to the upper part of the piston. Claim 4 An automatic fixing device for CMP head inspection according to claim 3, wherein the first manifold comprises: a first body in the shape of a cylinder; a first air passage formed on the central axis of the first body and connected to the control unit; and a plurality of first branch passages formed by extending radially from the first air passage on the first body and connected to the lower part of the cylinder. Claim 5 An automatic fixing device for CMP head inspection according to claim 4, wherein the first manifold further comprises a first controller coupled to the first body and connected to the first branch passage, capable of individually adjusting the lifting speed of the piston. Claim 6 An automatic fixing device for CMP head inspection according to claim 4, wherein the second manifold comprises: a second body in the shape of a cylinder; a second air passage formed on the central axis of the second body and connected to the control unit; and a plurality of second branch passages formed by extending radially from the second air passage on the second body and connected to the upper part of the cylinder. Claim 7 An automatic fixing device for CMP head inspection according to claim 6, wherein the second manifold further comprises a second controller coupled to the second body and connected to the second branch passage, capable of individually adjusting the lifting speed of the piston. Claim 8 An automatic fixing device for CMP head inspection according to claim 5, characterized in that the first body and the second body are combined in the form of a single cylinder. Claim 9 An automatic fixing device for CMP head inspection according to claim 1, wherein the control unit comprises a regulator capable of regulating the pneumatic pressure provided to the manifold unit. Claim 10 An automatic fixing device for inspecting a CMP head according to claim 1, further comprising a restraining unit that is coupled to the housing at a predetermined interval along the perimeter of the inspection plate and restricts the movement of the CMP head seated on the inspection plate.

Images