Mask assembly and method for manufacturing display apparatus

Abstract

One embodiment of the present invention discloses a mask assembly comprising: a mask frame having a plurality of sides having a first side extending in a first direction and an opening area defined by said plurality of sides; a gap portion disposed on said first side and recessed in a second direction intersecting the first direction from said first side; a mask sheet disposed to cover said opening area; and a gap adjustment portion tensioned and welded to said mask frame across said gap portion.

Description

Technology Field

[0001] The present invention relates to a method for manufacturing a mask assembly and a display device, and more specifically, to a method for manufacturing a mask assembly and a display device capable of improving the deposition quality of a deposited material. Background Technology

[0002] Recently, electronic devices are being widely used. Electronic devices are utilized in various forms, such as mobile and stationary devices, and these devices include display devices capable of providing visual information, such as images or videos, to the user to support various functions.

[0003] A display device is a device that visually displays data and is formed by depositing various layers, such as organic layers and metal layers. Deposition materials can be deposited to form multiple layers of a display device. That is, a deposition material is sprayed from a deposition source and used to be deposited on a substrate through a mask assembly. At this time, if deformation occurs in the mask sheet and / or the mask frame to which the mask sheet is welded, the deposition material cannot be deposited at the required location on the substrate, resulting in a problem of degraded deposition quality.

[0004] The aforementioned background technology is technical information that the inventor possessed for the derivation of the present invention or acquired during the process of deriving the present invention, and it cannot be considered as publicly known technology disclosed to the general public prior to the filing of the present invention. The problem to be solved

[0005] The embodiments of the present invention aim to provide a method for manufacturing a mask assembly and a display device that can improve deposition quality by adjusting the length of the side of the mask frame when the mask sheet and / or mask frame are deformed.

[0006] However, these problems are exemplary, and the problems to be solved by the present invention are not limited thereto. means of solving the problem

[0007] One embodiment of the present invention discloses a mask assembly comprising: a mask frame having a plurality of sides having a first side extending in a first direction and an opening area defined by said plurality of sides; a gap portion disposed on said first side and recessed in a second direction intersecting the first direction from said first side; a mask sheet disposed to cover said opening area; and a gap adjustment portion tensioned and welded to said mask frame across said gap portion.

[0008] In the present embodiment, the gap portion may include a first portion that is recessed in the second direction when viewed in a planar view, and a second portion disposed at one end of the first portion that is recessed such that at least a portion of its width is greater than the width of the first portion.

[0009] In this embodiment, the second part may be circular when viewed in a planar view.

[0010] In the present embodiment, the width of the first part in the first direction may be smaller than the length of the first part in the second direction.

[0011] In this embodiment, the width of the first part in the first direction may decrease as it moves toward the second direction.

[0012] In the present embodiment, the mask sheet includes a first mask sheet and a second mask sheet arranged side by side in the first direction, and the spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and may be positioned between the first mask sheet and the second mask sheet in the first direction.

[0013] In the present embodiment, the mask sheet includes a first mask sheet and a second mask sheet arranged side by side in the first direction, and the spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and may be arranged between the width of the first mask sheet in the first direction and the width of the second mask sheet in the first direction, respectively.

[0014] Another embodiment of the present invention discloses a method for manufacturing a display device, comprising the steps of: preparing a mask assembly including a mask frame having a first side extending in a first direction and a first gap portion disposed on the first side and recessed in a second direction intersecting the first direction; placing one or more mask sheets on the mask frame; inspecting the alignment of the mask sheets disposed on the mask frame; and adjusting the length of the first side of the mask frame by tension welding a gap adjustment portion to the first side so as to cross the first gap portion.

[0015] In the present embodiment, the step of arranging the one or more mask sheets may include the step of welding and fixing the one or more mask sheets to the mask frame.

[0016] In the present embodiment, the mask frame further includes a second side extending in a second direction intersecting the first direction, and the mask assembly further includes a second spacing portion disposed on the second side, and may further include the step of adjusting the length of the second side of the mask frame by tension welding a spacing adjustment portion to the second side so as to cross the second spacing portion.

[0017] In the present embodiment, the step of adjusting the length of the first side of the mask frame may include the step of selectively tension welding the spacing adjustment part to some of the first spacing parts provided in a plurality.

[0018] In the present embodiment, the one or more mask sheets include a first mask sheet and a second mask sheet arranged side by side in the first direction, and the first spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and may be positioned between the first mask sheet and the second mask sheet in the first direction.

[0019] In the present embodiment, the one or more mask sheets include a first mask sheet and a second mask sheet arranged side by side in the first direction, and the first spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and may be arranged between the width of the first mask sheet in the first direction and the width of the second mask sheet in the first direction, respectively.

[0020] Another embodiment of the present invention discloses a method for manufacturing a display device, comprising the steps of: preparing a mask assembly including a mask frame having a first side extending in a first direction and a first gap portion disposed on the first side and recessed in a second direction intersecting the first direction; tension welding a first gap adjustment portion to the first side so as to cross the first gap portion; placing one or more mask sheets on the mask frame; inspecting the alignment of the mask sheets placed on the mask frame; removing the first gap adjustment portion when extension of the first side is required, and tension welding a second gap adjustment portion adjacent to the first gap adjustment portion to the first side so as to cross the first gap portion when compression of the first side is required.

[0021] In the present embodiment, the step of arranging the one or more mask sheets may include the step of welding and fixing the one or more mask sheets to the mask frame.

[0022] In the present embodiment, the mask frame further includes a second side extending in a second direction intersecting the first direction, and the mask assembly further includes a second spacing portion disposed on the second side, and may further include the step of tension welding a first spacing adjustment portion to the second side so as to cross the second spacing portion.

[0023] In the present embodiment, if extension of the second side is required, the first spacing adjustment part disposed in the second spacing part may be removed, and if compression of the second side is required, the second spacing adjustment part may be tension welded adjacent to the first spacing adjustment part on the second side so as to cross the second spacing part.

[0024] In the present embodiment, the one or more mask sheets include a first mask sheet and a second mask sheet arranged side by side in the first direction, and the first spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and may be positioned between the first mask sheet and the second mask sheet in the first direction.

[0025] In the present embodiment, the one or more mask sheets include a first mask sheet and a second mask sheet arranged side by side in the first direction, and the first spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and may be arranged between the width of the first mask sheet in the first direction and the width of the second mask sheet in the first direction, respectively.

[0026] In this embodiment, the second spacing adjustment part may be spaced apart from the first spacing adjustment part in a second direction and arranged parallel to the first spacing adjustment part.

[0027] Other aspects, features, and advantages other than those described above will become clear from the specific details, claims, and drawings for implementing the invention below. Effects of the invention

[0028] According to embodiments of the present invention, if the mask sheet and / or mask frame is deformed, the length of the side of the mask frame can be adjusted to improve deposition quality.

[0029] In addition, the length of the side of the mask frame can be adjusted without removing the mask sheet welded to the mask frame, thereby improving work efficiency and preventing raw material loss.

[0030] The effects of the present invention are not limited to those mentioned above, and other unmentioned effects will be clearly understood by those skilled in the art from the description in the claims. Brief explanation of the drawing

[0031] FIG. 1 is a cross-sectional view showing a manufacturing apparatus for a display device according to one embodiment of the present invention. FIG. 2 is a perspective view schematically showing a mask assembly according to one embodiment of the present invention. FIGS. 3 and FIGS. 4 are plan views of a mask assembly according to an embodiment of the present invention, showing an enlarged view of region III of FIG. 2. FIG. 5 is a plan view schematically showing a mask assembly according to another embodiment of the present invention. FIG. 6 is a schematic plan view showing a mask assembly according to another embodiment of the present invention. FIGS. 7 to 9 are schematic drawings illustrating a method for manufacturing a display device according to an embodiment of the present invention. FIGS. 10 to 12 are schematic drawings illustrating a method for manufacturing a display device according to another embodiment of the present invention. FIGS. 13 and FIGS. 14 are enlarged views of section XIII of FIG. 12. FIG. 15 is a schematic plan view showing a display device manufactured by a manufacturing device for a display device according to one embodiment of the present invention. FIG. 16 is a cross-sectional view schematically illustrating a display device manufactured using a manufacturing device for a display device according to one embodiment of the present invention. Specific details for implementing the invention

[0032] The present invention is capable of various modifications and may have various embodiments; specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention, and the methods for achieving them, will become clear by referring to the embodiments described below in detail together with the drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various forms.

[0033] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. When describing with reference to the drawings, identical or corresponding components are given the same reference numerals, and redundant descriptions thereof will be omitted.

[0034] In the following embodiments, terms such as first, second, etc. are used not in a limiting sense, but for the purpose of distinguishing one component from another component.

[0035] In the following examples, singular expressions include plural expressions unless the context clearly indicates otherwise.

[0036] In the following embodiments, terms such as "include" or "have" mean that the features or components described in the specification are present, and do not preclude the possibility that one or more other features or components may be added.

[0037] In the following embodiments, when a part such as a film, region, or component is described as being on or above another part, it includes not only cases where it is directly on top of another part, but also cases where another film, region, or component is interposed in between.

[0038] In the drawings, the size of components may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each component shown in the drawings are depicted arbitrarily for convenience of explanation, so the present invention is not necessarily limited to what is illustrated.

[0039] In the following embodiments, the X-axis, Y-axis, and Z-axis are not limited to the three axes in an orthogonal coordinate system but can be interpreted in a broader sense that includes them. For example, the X-axis, Y-axis, and Z-axis may be orthogonal to each other, but they may also refer to different directions that are not orthogonal to each other.

[0040] Where an embodiment can be implemented differently, a specific process sequence may be performed differently from the order described. For example, two processes described consecutively may be performed substantially simultaneously or proceed in the reverse order of the description.

[0041] FIG. 1 is a cross-sectional view showing a manufacturing apparatus for a display device according to one embodiment of the present invention.

[0042] The manufacturing device (2) of the display device may include a chamber (10), a first support member (20), a second support member (30), a mask assembly (400), a deposition source (50), a magnetic force member (60), a vision member (70), and a pressure control member (80).

[0043] A chamber (10) may have a space formed inside and may accommodate a display board (DS) and a mask assembly (400). In this case, a portion of the chamber (10) may be formed to be open, and a gate valve (11) may be installed in the open portion of the chamber (10). In this case, the open portion of the chamber (10) may be opened or closed depending on the operation of the gate valve (11).

[0044] At this time, the display substrate (DS) may refer to a display substrate (DS) in the process of manufacturing a display device, wherein at least one layer among an organic layer, an inorganic layer, and a metal layer is deposited on a substrate (100) to be described later. Alternatively, the display substrate (DS) may be a substrate (100) in which none of the organic layer, an inorganic layer, and a metal layer have yet been deposited.

[0045] The first support member (20) can support the display board (DS). In this case, the first support member (20) may be in the form of a plate fixed inside the chamber (10). In another embodiment, the first support member (20) may be in the form of a shuttle capable of linear movement inside the chamber (10) on which the display board (DS) is seated. In yet another embodiment, the first support member (20) may include an electrostatic chuck or an adhesive chuck that is fixed to the chamber (10) or placed in the chamber (10) to allow movement inside the chamber (10).

[0046] The second support member (30) can support the mask assembly (400). At this time, the second support member (30) can be placed inside the chamber (10). The second support member (30) can finely adjust the position of the mask assembly (400). At this time, the second support member (30) may be equipped with a separate drive unit or alignment unit, etc., to enable the mask assembly (400) to move in different directions.

[0047] In another embodiment, the second support member (30) may be in the form of a shuttle. In this case, the second support member (30) can accommodate the mask assembly (400) and transport the mask assembly (400). For example, the second support member (30) can move outside the chamber (10) and, after the mask assembly (400) is accommodated, enter the chamber (10) from outside the chamber (10).

[0048] In the above case, it is also possible for the first support member (20) and the second support member (30) to be formed integrally. In this case, the first support member (20) and the second support member (30) may include a movable shuttle. At this time, the first support member (20) and the second support member (30) include a structure that fixes the mask assembly (400) and the display board (DS) with the display board (DS) seated on the mask assembly (400), and it is also possible to simultaneously move the display board (DS) and the mask assembly (400) linearly.

[0049] However, for the convenience of explanation, the first support member (20) and the second support member (30) are formed to be distinct from each other and positioned at different locations, and the first support member (20) and the second support member (30) are positioned inside the chamber (10). The following description will focus on these configurations.

[0050] The deposition source (50) may be positioned to face the mask assembly (400). At this time, the deposition source (50) may contain a deposition material, and the deposition material may be evaporated or sublimated by applying heat to the deposition material. The deposition source (50) may be positioned to be fixed inside the chamber (10) or may be positioned inside the chamber (10) to be capable of linear movement along one direction.

[0051] The mask assembly (400) may be placed inside the chamber (10). At this time, the mask assembly (400) may include a mask frame (410), a mask sheet (420), a gap section (430, see FIG. 2), and a gap adjustment section (440, see FIG. 2). This will be described in detail later. A deposition material may pass through the mask assembly (400) and be deposited on a display substrate (DS).

[0052] The magnetic force unit (60) may be positioned inside the chamber (10) so as to face the display board (DS) and / or the mask assembly (400). At this time, the magnetic force unit (60) can apply magnetic force to the mask assembly (400) to move the mask assembly (400) toward the display board (DS). In particular, the magnetic force unit (60) can not only prevent the mask sheet (420) from sagging but also bring the mask sheet (420) close to the display board (DS). Additionally, the magnetic force unit (60) can maintain a uniform gap between the mask sheet (420) and the display board (DS).

[0053] The vision unit (70) is positioned in the chamber (10) and can capture the positions of the display board (DS) and the mask assembly (400). At this time, the vision unit (70) may include a camera that captures the display board (DS) and the mask assembly (400). Based on the images captured by the vision unit (70), the positions of the display board (DS) and the mask assembly (400) can be identified, and deformation of the mask assembly (400) can be verified. Additionally, based on the images, the position of the display board (DS) can be finely adjusted at the first support unit (20), or the position of the mask assembly (400) can be finely adjusted at the second support unit (30). However, below, the case in which the position of the mask assembly (400) is finely adjusted at the second support unit (30) to align the positions of the display board (DS) and the mask assembly (400) will be described in detail, focusing on the case where the positions of the display board (DS) and the mask assembly (400) are aligned.

[0054] The pressure regulating unit (80) is connected to the chamber (10) and can regulate the pressure inside the chamber (10). For example, the pressure regulating unit (80) can regulate the pressure inside the chamber (10) to be equal to or similar to atmospheric pressure. Additionally, the pressure regulating unit (80) can regulate the pressure inside the chamber (10) to be equal to or similar to a vacuum state.

[0055] The pressure regulating unit (80) may include a connecting pipe (81) connected to the chamber (10) and a pump (82) installed in the connecting pipe (81). At this time, depending on the operation of the pump (82), outside air may be introduced through the connecting pipe (81) or gas inside the chamber (10) may be guided to the outside through the connecting pipe (81).

[0056] Meanwhile, regarding the method of manufacturing a display device (not shown) using the above-mentioned manufacturing device (2), a display substrate (DS) can be prepared first.

[0057] The pressure control unit (80) can maintain the inside of the chamber (10) at a state equal to or similar to atmospheric pressure, and the gate valve (11) can operate to open the open part of the chamber (10).

[0058] Subsequently, the display board (DS) can be loaded from outside the chamber (10) into the chamber (10). At this time, the display board (DS) can be loaded into the chamber (10) in various ways. For example, the display board (DS) can be loaded from outside the chamber (10) into the chamber (10) through a robot arm placed outside the chamber (10). In another embodiment, if the first support member (20) is formed in a shuttle shape, it is also possible for the first support member (20) to be removed from inside the chamber (10) to outside the chamber (10), and then for the display board (DS) to be placed on the first support member (20) through a separate robot arm placed outside the chamber (10), and for the first support member (20) to be loaded from outside the chamber (10) into the chamber (10).

[0059] The mask assembly (400) may be positioned inside the chamber (10) as described above. In another embodiment, the mask assembly (400) may be inserted into the chamber (10) from outside the chamber (10) in the same or similar manner as the display board (DS).

[0060] When the display board (DS) is inserted into the chamber (10), the display board (DS) can be placed on the first support member (20). At this time, the vision unit (70) can capture the position of the display board (DS) and the mask assembly (400). Based on the image captured by the vision unit (70), the position of the display board (DS) and the mask assembly (400) can be determined. At this time, the manufacturing device (2) of the display device is equipped with a separate control unit (not shown) to determine the position of the display board (DS) and the mask assembly (400).

[0061] Once the positions of the display board (DS) and the mask assembly (400) are determined, the second support member (30) can finely adjust the position of the mask assembly (400).

[0062] Subsequently, the deposition source (50) operates to supply the deposition material to the mask assembly (400), and the deposition material passing through the multiple pattern holes of the mask sheet (420) can be deposited on the display substrate (DS). At this time, the deposition source (50) may move parallel to the display substrate (DS) and the mask assembly (400), or the display substrate (DS) and the mask assembly (400) may move parallel to the deposition source (50). That is, the deposition source (50) may move relative to the display substrate (DS) and the mask assembly (400). At this time, the pump (82) can maintain the pressure inside the chamber (10) in a state equal to or similar to a vacuum by sucking in the gas inside the chamber (10) and discharging it to the outside.

[0063] As described above, the deposition material supplied from the deposition source (50) passes through the mask assembly (400) and is deposited on the display substrate (DS), thereby forming at least one of a plurality of layers, such as an organic layer, an inorganic layer, and a metal layer, which are stacked on the display device to be described later.

[0064] FIG. 2 is a perspective view schematically showing a mask assembly according to one embodiment of the present invention.

[0065] Referring to FIG. 2, the mask assembly (400) may include a mask frame (410), a mask sheet (420), a spacing part (430), and a spacing adjustment part (440).

[0066] The mask frame (410) may be formed by connecting multiple sides and may include an opening area (OA) defined by the multiple sides. That is, the opening area (OA) may be formed by being surrounded by the multiple sides, and the opening area (OA) may be formed by penetrating through the center of the mask frame (410). At this time, a support stick (not shown) parallel in one direction may be placed to cross the interior of the mask frame (410), i.e., the opening area (OA). Alternatively, the support stick (not shown) crossing the opening area (OA) may be in a grid shape.

[0067] In one embodiment, the mask frame (410) may be a rectangular frame. Of course, the shape of the mask frame (410) is not limited to this and may be a polygonal shape of various forms. For convenience of explanation, the following description will focus on the case where the mask frame (410) is a rectangular frame.

[0068] When the mask frame (410) is a rectangular frame, the plurality of sides may include a first side (S1) extending in a first direction (e.g., the x direction in FIG. 2) and a second side (S2) extending in a second direction (e.g., the y direction in FIG. 2) that intersects the first direction. The first side (S1) may be provided as a pair facing each other, and the second side (S2) may be provided as a pair facing each other and connected to each other. In one embodiment, the first side (S1) may be a long side and the second side (S2) may be a short side. However, it is not limited thereto, and the first side (S1) may be a short side and the second side (S2) may be a long side, or the lengths of the first side (S1) and the second side (S2) may be the same. For convenience of explanation, the following description will focus on the case where the first side (S1) is a long side and the second side (S2) is a short side.

[0069] The mask sheet (420) may be installed in a tensioned state on the mask frame (410). The central opening area (OA) of the mask frame (410) may be covered by the mask sheet (420). In one embodiment, at least one mask sheet (420) may be provided, and if two or more mask sheets (420) are provided, the mask sheets (420) may be arranged on the mask frame (410) so as to be parallel to each other. For example, the mask sheets (420) may be arranged parallel in one direction (e.g., the x direction of FIG. 1). In this case, each mask sheet (420) may have a shape that is elongated in a direction intersecting the one direction (e.g., the y direction of FIG. 1). Both ends of the mask sheet (420) may be fixed to the mask frame (410), for example, by welding.

[0070] The mask sheet (420) may include at least one pattern hole (425). The pattern hole (425) may be a through hole formed to allow a deposition material to pass through the mask sheet (420). The deposition material passing through the mask sheet (420) may be deposited on the display substrate (DS).

[0071] FIGS. 3 and FIGS. 4 are plan views of a mask assembly according to an embodiment of the present invention, showing an enlarged view of region III of FIG. 2.

[0072] Referring to FIG. 3, the mask assembly (400) may include a gap section (430) and a gap adjustment section (440).

[0073] The gap portion (430) may be placed on the first side (S1) extending in the first direction (x direction in FIG. 3) of the mask frame (410). In one embodiment, the gap portion (430) may be formed by being recessed from the outer side (-y direction side in FIG. 3) to the inner side (+y direction side in FIG. 3) of the circumference of the first side (S1). That is, the gap portion (430) may be a groove recessed in a direction intersecting the first direction, for example, a direction perpendicular to the first direction.

[0074] In one embodiment, the gap portion (430) may include a first portion (431) and a second portion (432).

[0075] The first part (431) may be a portion that is indented in a direction perpendicular to the first direction from the first side (S1). The first part (431) may be formed in an elongated shape, with the length (length in the y direction of FIG. 3) being longer than the width (length in the x direction of FIG. 3). FIG. 3 illustrates a case where the width of the first part (431) is constant, but in other embodiments, the width of the first part (431) may be formed in a V shape, becoming smaller as it goes from the outside to the inside.

[0076] The second part (432) may be formed at one end of the first part (431) on the first side (S1). The second part (432) may be formed such that at least a portion of the width of the second part (432) is wider than the width (d1) of the first part (431). In one embodiment, the second part (432) may be formed in a circular shape when viewed in a planar view. In this case, the diameter (r) of the second part (432) may be formed to be larger than the width (d1) of the first part (431).

[0077] The gap portion (430) can form a gap in the mask frame (410) through the width (d1) of the first portion (431). Accordingly, the gap can be adjusted through the gap adjustment portion (440) described later to adjust the elongation and contraction of the first side (S1) of the mask frame (410).

[0078] Additionally, as illustrated in FIG. 3, the gap portion (430) includes an elongated first portion (431) and a circular second portion (432), thereby mitigating stress concentration that may occur when the gap portion (430) is placed in the mask frame (410). Specifically, since the second portion (432) of the gap portion (430) is formed in a circular shape, stress concentration that may act on the gap portion (430), particularly the second portion (432), can be dispersed when the gap of the gap portion (430) is widened or narrowed.

[0079] Referring to FIG. 4, in another embodiment, the second part (432) of the gap portion (430) may be formed with a rectangular cross-section when viewed in a planar view. In this case, the width (d2) of the second part (432) may be larger than the width (d1) of the first part (431). In this case, as described above, when widening or narrowing the gap of the gap portion (430), the stress concentration that may act on the second part (432) can be dispersed. Alternatively, although not shown in the drawing, the gap portion (430) may be formed with only the first part (431) without the second part (432). That is, the gap portion (430) may be formed with a rectangular cross-section that is long in one direction when viewed in a planar view. For convenience of explanation, the following description will focus on the case where the shape of the gap portion (430) is as shown in FIG. 3.

[0080] Referring again to FIG. 3, a spacing adjustment unit (440) may be positioned on the mask frame (410) and the spacing unit (430). Specifically, the spacing adjustment unit (440) may be connected to the first side (S1) of the mask frame (410) adjacent to the left and right sides (e.g., the +x and -x side ends of FIG. 3) of the spacing unit (430) so as to cross the spacing unit (430). The spacing adjustment unit (440) may be a stick that extends long in the first direction (the x direction of FIG. 3) and is welded and fixed to the first side (S1) across the spacing unit (430). At this time, the spacing adjustment unit (440) may be welded while in a tensioned state in the first direction. Accordingly, the spacing adjustment unit (440) can adjust the spacing of the spacing unit (430). The gap adjustment part (440) is tensioned and welded to the gap part (430), so that after the welding is completed, the gap adjustment part (440) contracts, thereby narrowing the gap of the gap part (430) and adjusting the gap.

[0081] Alternatively, the gap adjustment unit (440) may be connected to the mask frame (410) by being tensioned across the gap unit (430), and accordingly, the gap of the gap unit (430) may be narrowed. At this time, by removing the weld of the connected gap adjustment unit (440) to disconnect the gap adjustment unit (440), the gap of the gap unit (430) can be widened, and the gap can be adjusted accordingly.

[0082] In this way, the degree of elongation and contraction of the first side (S1) of the mask frame (410) can be adjusted through the gap section (430) and the gap adjustment section (440). This allows the alignment of the mask sheet (420) to be adjusted by stretching or compressing the lengths of the sides of the mask frame (410) when the deposition material is not deposited in the desired area of ​​the display substrate (DS, see FIG. 1) due to deformation such as sagging of the mask sheet (420) after the mask sheet (420) is fixed to the mask frame (410) by welding.

[0083] Generally, if the alignment of the mask sheet (420) and the mask frame (410) is not as required, the welded mask sheet (420) must be removed and then re-welded to the mask frame (410) for realignment. In this case, there is a problem of loss of manpower to remove the welded mask sheet (420) and loss of raw material of the mask sheet (420).

[0084] A mask assembly (400) according to one embodiment of the present invention can adjust the alignment relationship between the mask sheet (420) and the mask frame (410) by adjusting the length of the mask frame (410) through the gap portion (430) and the gap adjustment portion (440) without removing the welded mask sheet (420).

[0085] According to one embodiment, the spacing portion (430) may be provided in multiple numbers and spaced apart in a first direction (the x-direction of FIG. 3). At this time, the mask sheet (420) may be provided as one mask sheet (420) or two mask sheets (420), or the mask sheet (420) may be provided as three or more mask sheets (420), including a first mask sheet (421), a second mask sheet (422) adjacent to the first mask sheet (421), and a third mask sheet (423) adjacent to the second mask sheet (423). Since the multiple mask sheets are similar to each other, the following description will focus on the first mask sheet (421) and the second mask sheet (422).

[0086] The first mask sheet (421) and the second mask sheet (422) may be placed on the mask frame (410) so as to be parallel in the first direction. At this time, the first mask sheet (421) and the second mask sheet (422) may have a shape that is extended in the second direction (the y-direction in FIG. 3) which is perpendicular to the first direction. Both ends of the first mask sheet (421) and the second mask sheet (422) in the second direction may be welded and fixed to the side of the mask frame (410), for example, the first side (S1).

[0087] At this time, a plurality of gap portions (430) may be placed between a plurality of mask sheets (420). For example, a gap portion (430) may be placed between a first mask sheet (421) and a second mask sheet (422). The fact that a gap portion (430) is placed between the first mask sheet (421) and the second mask sheet (422) may mean that the gap portion (430) is spaced apart from the first mask sheet (421) and the second mask sheet (422) in a second direction, while being placed between the first mask sheet (421) and the second mask sheet (422) in a first direction. That is, when viewed in the second direction (the y direction in FIG. 3), the gap portion (430) may overlap with a part of the first mask sheet (421) and a part of the second mask sheet (422). As the spacing portion (430) is placed between the mask sheets (420), the length of the mask frame (410) can be adjusted more precisely by considering the alignment relationship between the mask sheets (420). For example, if the distance between the first mask sheet (421) and the second mask sheet (422) needs to be narrowed, the spacing adjustment portion (440) can be tensioned and welded. At this time, if the distance between the second mask sheet (422) and the third mask sheet (423) does not need to be adjusted, the spacing adjustment portion (440) may not be tensioned and welded. That is, the spacing adjustment portion (440) may be placed in some of the multiple spacing portions (430), and the spacing adjustment portion (440) may not be placed in other of the multiple spacing portions (430).

[0088] FIG. 5 is a schematic plan view showing a mask assembly (400) according to another embodiment of the present invention. Since the mask assembly (400) in this embodiment is similar to the mask assembly (400) described above, the following description will focus on the differences for convenience of explanation.

[0089] Referring to FIG. 5, in one embodiment, a plurality of spacing portions (430) may be arranged to correspond to a plurality of mask sheets (420). That is, each of the plurality of spacing portions (430) may be located between the width (d3) in the first direction (x direction in FIG. 5) of the corresponding mask sheet (420). That is, the spacing portions (430) may be spaced apart from the first mask sheet (421) and the second mask sheet (422) in the second direction, and may be arranged within the width (d3) of the first mask sheet (421) and the width (d3) of the second mask sheet (422) in the first direction. At this time, each of the spacing portions (430) may overlap with the first mask sheet (421) and the second mask sheet (422) when viewed in the second direction (y direction in FIG. 3). As the spacing portions (430) are each placed within the width (d3) of the first mask sheet (421) and the second mask sheet (422), it may be effective for adjusting the relative position of each mask sheet.

[0090] FIG. 6 is a schematic plan view showing a mask assembly according to another embodiment of the present invention. Since the mask assembly (400) in this embodiment is similar to the mask assembly (400) described above, the following description will focus on the differences for convenience of explanation.

[0091] Referring to FIG. 6, the spacing portion (430) may also be placed on a second side (S2) extending in the second direction (y direction in FIG. 6) of the mask frame (410). That is, the spacing portion (430) may include a first spacing portion (430-1) placed on the first side (S1) and a second spacing portion (430-2) placed on the second side (S2). Since the first spacing portion (430-1) is similar to the spacing portion (430) shown in FIG. 3 to 5 described above, the following description will focus on the second spacing portion (430-2).

[0092] The second gap (430-2) can be formed by being recessed from the outer side of the circumference of the second side (S2) (the -x direction relative to the second side in the -x direction of FIG. 6) to the inner side (the +x direction relative to the second side in the -x direction of FIG. 6). That is, the second gap (430-2) may be a groove recessed in a direction intersecting the second direction, for example, a direction perpendicular to the second direction.

[0093] The shape of the second gap portion (430-2) may include a first portion (431) and a second portion (432), similar to the gap portion (430) described above, and the second portion (432) may have a circular or square cross-section when viewed in a planar view. In addition, in other embodiments, the second portion (432) may be omitted.

[0094] In one embodiment, the shape of the second gap section (430-2) may be the same as the first gap section (430-1) as shown in FIG. 6. However, it is not limited thereto, and the shape of the second gap section (430-2) may be different from the first gap section (430-1). For example, the second part (432) of the first gap section (430-1) may be formed in a circular shape, and the second part (432) of the second gap section (430-2) may be formed in a square shape. Considering that deformation of the mask frame (410) may occur more on the first side (S1), which is the longer side, more length adjustment of the first side (S1) may be required. Therefore, when adjusting the length of the first side (S1), the stress concentration applied to the first gap section (430-1) through the circular second part (432) can be further mitigated. In addition, in the second side (S2), where the degree of adjustment is small due to relatively little deformation, the second part (432) can be formed as a rectangle with the same width as the first part (431), or the second part (432) can be omitted to form a gap (430), thereby minimizing the reduction in rigidity of the mask frame (410).

[0095] Meanwhile, in one embodiment, the second spacing section (430-2) may be provided in multiple numbers and spaced apart in the second direction (y direction in FIG. 6). In this case, the number of the second spacing section (430-2) may be smaller than the number of the first spacing section (430-1). For example, as shown in FIG. 6, the first spacing section (430-1) may be provided in 7 numbers and the second spacing section (430-2) may be provided in 3 numbers. However, this is not limited thereto, and the second spacing section (430-2) may be provided in 3 numbers or fewer.

[0096] As described above, the gap adjustment unit (440) is tension-welded to the second gap section (430-2) to adjust the gap by narrowing the gap of the second gap section (430-2). Alternatively, the gap adjustment unit (440) may be tension-welded to the second gap section (430-2), and accordingly, the gap of the second gap section (430-2) may be in a narrowed state. At this time, the gap adjustment unit (440) can be disconnected by removing the weld of the connected gap adjustment unit (440), thereby widening the gap of the second gap section (430-2) and adjusting the gap accordingly.

[0097] Additionally, FIGS. 2 to 6 describe cases where the spacing portion (430) is placed on the first side (S1) or on both the first side (S1) and the second side (S2), but it will be understood that the spacing portion (430) may be placed only on the second side (S2).

[0098] FIGS. 7 to 9 are schematic drawings illustrating a method for manufacturing a display device according to an embodiment of the present invention. The method for manufacturing a display device may be a method using a manufacturing apparatus for a display device including the aforementioned mask assembly.

[0099] Referring to FIG. 7, a mask frame (410) may be prepared. The mask frame (410) may be a mask frame (410) in which spacing portions (430), specifically a first spacing portion (430-1) and a second spacing portion (430-2), are arranged on the first side (S1) and the second side (S2) as described above. For convenience of explanation, the following description focuses on the case where spacing portions (430) are arranged on the first side (S1) and the second side (S2), but it will be understood that spacing portions (430) may be arranged only on the first side (S1) or the second side (S2).

[0100] Referring to FIG. 8, a mask sheet (420) may be placed on a mask frame (410). In one embodiment, the mask sheet (420) may be provided in a plurality of portions, including a first mask sheet (421) and a second mask sheet (422). Since the plurality of mask sheets (420) are similar to each other, the following description will focus on the first mask sheet (421) and the second mask sheet (422). The first mask sheet (421) and the second mask sheet (422) may be welded and fixed to the mask frame (410) at both ends in the second direction (the y-direction in FIG. 8). Additionally, the outer portions of the parts welded at both ends in the second direction of the first mask sheet (421) and the second mask sheet (422) may be cut after the welding is completed and aligned as shown in FIG. 8 to form a mask assembly (400).

[0101] Next, the alignment of the mask sheet (420) in the mask assembly (400) can be inspected. To do this, as in the operation of the manufacturing device (2) of the display device described above in one embodiment, the mask assembly (400) can be positioned to face the display substrate (DS) and used for the deposition of a deposition material. Next, the alignment of the mask sheet (420) can be inspected by inspecting the arrangement of the layers of the deposited display substrate (DS, see FIG. 1).

[0102] Referring to FIG. 9, if the alignment of the mask sheet (420) is inspected and adjustment of the alignment of the mask sheet (420) is required, a spacing adjustment unit (440) may be positioned to cross the spacing unit (430). For example, if adjustment of the alignment of the mask sheet (420) in the first direction (x direction in FIG. 9) is required, the spacing adjustment unit (440) may be positioned in the first spacing unit (430-1) adjacent to a part of the first spacing unit (430-1), specifically the part of the mask frame (410) that requires adjustment, as shown in FIG. 9. The spacing adjustment unit (440) may be positioned in the first direction (x direction in FIG. 9) to cross the first spacing unit (430-1) while in a tensioned state, and both ends may be welded to the mask frame (410) to be fixed. Accordingly, as the gap adjustment section (440) gradually contracts again, the gap of the first gap section (430-1) becomes narrower, and the length of the first side (S1) of the mask frame (410) can be reduced near the first gap section (430-1). By adjusting the length of the first side (S1) in this way, the alignment of the mask sheet (420) welded to the first side (S1) can be finely adjusted. In addition, through this, the deposition material can be deposited in the required area of ​​the display substrate (DS), thereby improving the deposition quality.

[0103] Meanwhile, if, as a result of inspecting the alignment of the mask sheet (420), it is necessary to adjust the alignment of the mask sheet (420) in the second direction (y direction in FIG. 9), a spacing adjustment unit (440) may be placed in a part of the second spacing section (430-2), specifically in the second spacing section (430-2) adjacent to the part of the mask frame (410) that requires adjustment. The spacing adjustment unit (440) is positioned in the second direction (y direction in FIG. 9) so as to cross the second spacing section (430-2) while in a tensioned state, and both ends may be welded to and fixed to the mask frame (410). Since the method of adjusting the length of the second side (S2) by the spacing adjustment unit (440) is similar to the above description, a detailed explanation will be omitted.

[0104] FIGS. 10 to 12 are schematic drawings illustrating a method for manufacturing a display device according to another embodiment of the present invention. Since the method for manufacturing a display device in this embodiment is similar to the previously described embodiment, the following description will focus on the differences.

[0105] Referring to FIG. 10, a mask frame (410) may be prepared. A first spacing adjustment unit (441) may be positioned on the first side (S1) and the second side (S2) of the mask frame (410) to cross the first spacing unit (430-1) and the second spacing unit (430-2). That is, the first spacing adjustment unit (441) may be provided in multiple numbers, and each first spacing adjustment unit (441) may be positioned to extend from the first side (S1) in a first direction (the x direction of FIG. 10) to cross the first spacing unit (430-1), and extended from the second side (S2) in a second direction (the y direction of FIG. 10) to cross the second spacing unit (430-2). The first spacing adjustment unit (441) can be placed in all first spacing units (430-1) and all second spacing units (430-2). At this time, the first spacing adjustment unit (441) can be fixed by welding both ends to the mask frame (410) while in a tensioned state as described above. Accordingly, the first side (S1) and the second side (S2) of the mask frame (410) may be in a state where the first spacing unit (430-1) and the second spacing unit (430-2) are narrowed due to the first spacing adjustment unit (441).

[0106] Referring to FIG. 11, a plurality of mask sheets (420), including a first mask sheet (421) and a second mask sheet (422), may be disposed on a mask frame (410). As described above, the plurality of mask sheets (420) may be welded and fixed to the mask frame (410).

[0107] Next, the alignment of the mask sheet (420) in the mask assembly (400) can be inspected as described above.

[0108] Referring to FIG. 12, if the alignment of the mask sheet (420) is checked and adjustment of the alignment of the mask sheet (420) is required, the spacing adjustment unit (440) can be used. Specifically, the length can be adjusted by placing or removing the spacing adjustment unit (440) at the first spacing unit (430-1) or the second spacing unit (430-2) adjacent to the first side (S1) or the second side (S2) of the mask frame (410) where the length adjustment is to be adjusted.

[0109] FIGS. 13 and 14 are enlarged views of the XIII portion of FIG. 12, and with reference to FIGS. 13 and 14, it will be explained how to adjust the length of the first side (S1) or the second side (S2) through the spacing adjustment unit (440).

[0110] As alignment of the mask sheet (420) in the first direction (x direction in FIG. 13) is required, adjustment of the length of the first side (S1) may be necessary. For example, if the gap between the first mask sheet (421) and the second mask sheet (422) in the first side (S1) needs to be narrowed, the gap of the adjacent first gap section (430-1) can be narrowed. To do this, as shown in the first gap section (430-1) on the left side of FIG. 13, a second gap adjustment section (442) can be placed in the first gap section (430-1). In this case, similar to the above, the second gap adjustment section (442) can be fixed by welding both ends to the first side (S1) while being stretched in the first direction. Therefore, the gap of the first gap section (430-1), to which the first gap adjustment section (441) was welded, can be narrowed further by the second gap adjustment section (442).

[0111] In one embodiment, the second spacing adjustment unit (442) may be the same stick as the first spacing adjustment unit (441). Additionally, the second spacing adjustment unit (442) may be positioned apart from the first spacing adjustment unit (441) in a second direction (the y direction in FIG. 12), i.e., the +y direction in FIG. 12. Alternatively, the second spacing adjustment unit (442) may be positioned apart from the first spacing adjustment unit (441) in the opposite direction, i.e., the -y direction in FIG. 12. In this case, the second spacing adjustment unit (442) may be positioned parallel to the first spacing adjustment unit (441).

[0112] Additionally, referring to FIG. 14, for example, if the gap between the first mask sheet (421) and the second mask sheet (422) at the first side (S1) needs to be widened, the gap of the adjacent first gap section (430-1) can be widened. To do this, as shown in the first gap section (430-1) on the left side of FIG. 14, the first gap adjustment section (441) that was placed in the first gap section (430-1) can be removed. Thus, the gap of the first gap section (430-1) that was narrowed by the first gap adjustment section (441) can be widened further.

[0113] In this way, the length of the first side (S1) can be adjusted by adjusting the spacing of the first spacing section (430-1), and accordingly, the alignment of the mask assembly (420) in the first direction can be adjusted. For convenience of explanation, the first spacing section (430-1) of the first side (S1) has been described as an example above, but the spacing of the second spacing section (430-2) of the second side (S2) can be adjusted in the aforementioned way to adjust the alignment of the mask assembly (420) in the second direction.

[0114] It will also be understood that the spacing of the multiple first spacing sections (430-1) and multiple second spacing sections (430-2) can be adjusted separately. FIG. 12 illustrates, as an example, that a portion of the spacing section (430) is left with the first spacing adjustment section (441) positioned so that spacing adjustment is not required, another portion of the spacing section (430) has the second spacing adjustment section (442) positioned so that the spacing is narrowed, and yet another portion of the spacing section (430) has the first spacing adjustment section (441) removed so that the spacing is widened. However, this is not limited thereto, and for example, the second spacing adjustment section (442) may be positioned in all of the spacing sections (430) or the first spacing adjustment section (441) may be removed in all of the spacing sections (430).

[0115] According to the method for manufacturing a display device according to one embodiment of the present invention, when readjustment of alignment of a mask sheet (420) is required in a mask assembly (400), the alignment of the mask sheet (420) can be readjusted by adjusting the spacing of the spacing portion (430) without the need to remove the welded mask sheet (420) and re-place and weld it.

[0116] FIG. 15 is a schematic plan view showing a display device manufactured by a manufacturing device for a display device according to one embodiment of the present invention.

[0117] Referring to FIG. 15, a display device (1) manufactured according to one embodiment of the present invention may include a display area (DA) and a peripheral area (PA) located outside the display area (DA). The display device (1) may provide an image through an array of a plurality of pixels (PX) arranged two-dimensionally in the display area (DA).

[0118] The peripheral area (PA) is an area that does not provide an image and may surround the display area (DA) entirely or partially. Drivers, etc., for providing electrical signals or power to pixel circuits corresponding to each pixel (PX) may be placed in the peripheral area (PA). Pads, which are areas where electronic components or printed circuit boards can be electrically connected, may be placed in the peripheral area (PA).

[0119] In the following description, the display device (1) is described as including an Organic Light Emitting Diode (OLED) as a light-emitting element, but the display device (1) of the present invention is not limited thereto. In another embodiment, the display device (1) may be a light-emitting display device including an inorganic light-emitting diode, i.e., an inorganic light-emitting display. The inorganic light-emitting diode may include a PN diode comprising inorganic semiconductor-based materials. When a forward voltage is applied to a PN junction diode, holes and electrons are injected, and the energy generated by the recombination of the holes and electrons is converted into light energy to emit light of a predetermined color. The aforementioned inorganic light-emitting diode may have a width of several to several hundred micrometers, and in some embodiments, the inorganic light-emitting diode may be referred to as a micro LED. In yet another embodiment, the display device (1) may be a Quantum Dot Light Emitting Display.

[0120] Meanwhile, the display device (1) can be used as a display screen for various products such as televisions, laptops, monitors, billboards, and the Internet of Things (IOT), as well as portable electronic devices such as mobile phones, smartphones, tablet personal computers, mobile communication terminals, electronic notebooks, electronic books, PMPs (portable multimedia players), navigation systems, and UMPCs (Ultra Mobile PCs). Additionally, the display device (1) according to one embodiment can be used in wearable devices such as smart watches, watch phones, glasses-type displays, and head-mounted displays (HMDs). Additionally, the display device (1) according to one embodiment can be used as a center information display (CID) placed on the center fascia or dashboard of a vehicle, a room mirror display replacing the side mirror of a vehicle, an entertainment device for the rear seat of a vehicle, or a display screen placed on the back of the front seat.

[0121] FIG. 16 is a cross-sectional view schematically illustrating a display device manufactured using a manufacturing device for a display device according to one embodiment of the present invention, and may correspond to a cross-section of the display device taken along the line XVI-XVI' of FIG. 15.

[0122] Referring to FIG. 16, the display device (1) may include a stacked structure of a substrate (100), a pixel circuit layer (PCL), a display element layer (DEL), and an encapsulation layer (300). The aforementioned display substrate (DS, see FIG. 1) may be, for example, a substrate (100) in which at least one of the pixel circuit layer (PCL), the display element layer (DEL), and the encapsulation layer (300) is stacked during the manufacturing process of the display device (1).

[0123] The substrate (100) may have a multilayer structure including a base layer containing a polymer resin and an inorganic layer. For example, the substrate (100) may include a barrier layer of a base layer containing a polymer resin and an inorganic insulating layer. For example, the substrate (100) may include a first base layer (101), a first barrier layer (102), a second base layer (103), and a second barrier layer (104) that are sequentially stacked. The first base layer (101) and the second base layer (103) may include polyimide (PI), polyethersulfone (PES), polyarylate, polyetherimide (PEI), polyethylene napthalate (PEN), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polycarbonate (PC), cellulose triacetate (TAC), or / and cellulose acetate propionate (CAP), etc. The first barrier layer (102) and the second barrier layer (104) may include inorganic insulating materials such as silicon oxide, silicon oxynitride, and / or silicon nitride. The substrate (100) may have flexible properties.

[0124] A pixel circuit layer (PCL) is disposed on a substrate (100). FIG. 16 illustrates that the pixel circuit layer (PCL) includes a thin film transistor (TFT), and a buffer layer (111), a first gate insulating layer (112), a second gate insulating layer (113), an interlayer insulating layer (114), a first flattening insulating layer (115), and a second flattening insulating layer (116) disposed below or / and above the components of the thin film transistor (TFT).

[0125] The buffer layer (111) can reduce or block the penetration of foreign matter, moisture, or outside air from the bottom of the substrate (100) and can provide a flat surface on the substrate (100). The buffer layer (111) may include an inorganic insulating material such as silicon oxide, silicon oxynitride, or silicon nitride, and may be formed as a single layer or a multilayer structure including the aforementioned material.

[0126] The thin-film transistor (TFT) on the buffer layer (111) includes a semiconductor layer (Act), and the semiconductor layer (Act) may include polysilicon. Alternatively, the semiconductor layer (Act) may include amorphous silicon, an oxide semiconductor, an organic semiconductor, etc. The semiconductor layer (Act) may include a channel region (C) and a drain region (D) and a source region (S) respectively disposed on both sides of the channel region (C). The gate electrode (GE) may overlap with the channel region (C).

[0127] The gate electrode (GE) may include a low-resistance metal material. The gate electrode (GE) may include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may be formed as a multilayer or single layer including the above materials.

[0128] The first gate insulating layer (112) between the semiconductor layer (Act) and the gate electrode (GE) is silicon oxide (SiO2) or silicon nitride (SiN X ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO X It may include inorganic insulating materials such as zinc oxide (ZnO X ) may be zinc oxide (ZnO), and / or zinc peroxide (ZnO2).

[0129] The second gate insulating layer (113) may be provided to cover the gate electrode (GE). Similar to the first gate insulating layer (112), the second gate insulating layer (113) may be made of silicon oxide (SiO2) or silicon nitride (SiN2). X ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO X It may include inorganic insulating materials such as zinc oxide (ZnO X ) may be zinc oxide (ZnO), and / or zinc peroxide (ZnO2).

[0130] An upper electrode (Cst2) of a storage capacitor (Cst) may be disposed on the upper portion of the second gate insulating layer (113). The upper electrode (Cst2) may overlap with the gate electrode (GE) below it. At this time, the gate electrode (GE) and the upper electrode (Cst2) that overlap with the second gate insulating layer (113) in between can form a storage capacitor (Cst). That is, the gate electrode (GE) can function as the lower electrode (Cst1) of the storage capacitor (Cst).

[0131] In this way, the storage capacitor (Cst) and the thin-film transistor (TFT) can be formed in an overlapping manner. In some embodiments, the storage capacitor (Cst) may be formed so as not to overlap with the thin-film transistor (TFT).

[0132] The upper electrode (Cst2) may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W), and / or copper (Cu), and may be a single layer or a multilayer of the aforementioned materials.

[0133] The interlayer insulating layer (114) can cover the upper electrode (Cst2). The interlayer insulating layer (114) is silicon oxide (SiO2) or silicon nitride (SiN X ), silicon oxynitride (SiON), aluminum oxide (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2), or zinc oxide (ZnO X It may include ) etc. Zinc oxide (ZnO X ) may be zinc oxide (ZnO) and / or zinc peroxide (ZnO2). The interlayer insulating layer (114) may be a single layer or a multilayer comprising the aforementioned inorganic insulating material.

[0134] The drain electrode (DE) and the source electrode (SE) may each be located on the interlayer insulating layer (114). The drain electrode (DE) and the source electrode (SE) may each be connected to the drain region (D) and the source region (S) through contact holes formed in the insulating layers below them. The drain electrode (DE) and the source electrode (SE) may include a material with good conductivity. The drain electrode (DE) and the source electrode (SE) may include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), titanium (Ti), etc., and may be formed as a multilayer or single layer including the above materials. In one embodiment, the drain electrode (DE) and the source electrode (SE) may have a multilayer structure of Ti / Al / Ti.

[0135] The first flattening insulating layer (115) can cover the drain electrode (DE) and the source electrode (SE). The first flattening insulating layer (115) may include organic insulating materials such as general-purpose polymers like polymethylmethacrylate (PMMA) or polystyrene (PS), polymer derivatives having phenolic groups, acrylic polymers, imide polymers, aryl ether polymers, amide polymers, fluorine polymers, p-xylene polymers, vinyl alcohol polymers, and blends thereof.

[0136] The second flattening insulating layer (116) may be disposed on the first flattening insulating layer (115). The second flattening insulating layer (116) may include the same material as the first flattening insulating layer (115) and may include organic insulating materials such as general-purpose polymers like polymethylmethacrylate (PMMA) or polystyrene (PS), polymer derivatives having a phenolic group, acrylic polymers, imide polymers, aryl ether polymers, amide polymers, fluorine polymers, p-xylene polymers, vinyl alcohol polymers, and blends thereof.

[0137] A display element layer (DEL) may be disposed on the pixel circuit layer (PCL) of the above-described structure. The display element layer (DEL) includes an organic light-emitting diode (OLED) as a display element (i.e., a light-emitting element), and the organic light-emitting diode (OLED) may include a stacked structure of a pixel electrode (210), an intermediate layer (220), and a common electrode (230). The organic light-emitting diode (OLED) may emit, for example, red, green, or blue light, or red, green, blue, or white light. The organic light-emitting diode (OLED) emits light through a light-emitting region, and the light-emitting region may be defined as a pixel (PX).

[0138] The pixel electrode (210) of the organic light-emitting diode (OLED) can be electrically connected to a thin-film transistor (TFT) through contact holes formed in the second flattening insulating layer (116) and the first flattening insulating layer (115) and a contact metal (CM) disposed on the first flattening insulating layer (115).

[0139] The pixel electrode (210) may include a conductive oxide such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In2O3), indium gallium oxide (IGO), or aluminum zinc oxide (AZO). In another embodiment, the pixel electrode (210) may include a reflective film comprising silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or a compound thereof. In another embodiment, the pixel electrode (210) may further include a film formed of ITO, IZO, ZnO, or In2O3 above and below the aforementioned reflective film.

[0140] A pixel defining film (117) having an opening (117OP) that exposes the central portion of the pixel electrode (210) is disposed on the pixel electrode (210). The pixel defining film (117) may include an organic insulating material and / or an inorganic insulating material. The opening (117OP) may define a light-emitting region of light emitted from an organic light-emitting diode (OLED). For example, the size / width of the opening (117OP) may correspond to the size / width of the light-emitting region. Accordingly, the size and / or width of the pixel (PX) may depend on the size and / or width of the opening (117OP) of the corresponding pixel defining film (117).

[0141] The intermediate layer (220) may include a light-emitting layer (222) formed to correspond to the pixel electrode (210). The light-emitting layer (222) may include a polymer or low-molecular-weight organic material that emits light of a predetermined color. Alternatively, the light-emitting layer (222) may include an inorganic light-emitting material or quantum dots.

[0142] In one embodiment, the intermediate layer (220) may include a first functional layer (221) and a second functional layer (223) respectively disposed below and above the light-emitting layer (222). The first functional layer (221) may include, for example, a hole transport layer (HTL) or a hole transport layer and a hole injection layer (HIL). The second functional layer (223) is a component disposed above the light-emitting layer (222) and may include an electron transport layer (ETL) and / or an electron injection layer (EIL). The first functional layer (221) and / or the second functional layer (223) may be a common layer formed to cover the entire substrate (100), similar to the common electrode (230) described later.

[0143] The common electrode (230) is placed on the pixel electrode (210) and may overlap with the pixel electrode (210). The common electrode (230) may be made of a conductive material with a low work function. For example, the common electrode (230) may include a (semi)transparent layer comprising silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), lithium (Li), calcium (Ca), or alloys thereof. Alternatively, the common electrode (230) may further include a layer such as ITO, IZO, ZnO, or In2O3 on the (semi)transparent layer comprising the aforementioned materials. The common electrode (230) may be formed integrally to cover the entire substrate (100).

[0144] The bag layer (300) is placed on the display element layer (DEL) and can cover the display element layer (DEL). The bag layer (300) includes at least one inorganic bag layer and at least one organic bag layer, and as one embodiment, FIG. 16 illustrates that the bag layer (300) includes a first inorganic bag layer (310), an organic bag layer (320), and a second inorganic bag layer (330) that are sequentially stacked.

[0145] The first inorganic encapsulation layer (310) and the second inorganic encapsulation layer (330) may include one or more inorganic materials selected from aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride. The organic encapsulation layer (320) may include a polymer-based material. Polymer-based materials may include acrylic resin, epoxy resin, polyimide, and polyethylene. In one embodiment, the organic encapsulation layer (320) may include acrylate. The organic encapsulation layer (320) may be formed by curing a monomer or by applying a polymer. The organic encapsulation layer (320) may be transparent.

[0146] Although not illustrated, a touch sensor layer may be disposed on the encapsulation layer (300), and an optical functional layer may be disposed on the touch sensor layer. The touch sensor layer can acquire coordinate information based on external input, such as a touch event. The optical functional layer can reduce the reflectance of light (external light) incident from the outside toward the display device and / or improve the color purity of light emitted from the display device. In one embodiment, the optical functional layer may include a phase retarder and / or a polarizer. The phase retarder may be a film type or a liquid crystal coating type, and may include a λ / 2 phase retarder and / or a λ / 4 phase retarder. The polarizer may also be a film type or a liquid crystal coating type. The film type may include a stretched synthetic resin film, and the liquid crystal coating type may include liquid crystals arranged in a predetermined arrangement. The phase retarder and the polarizer may further include a protective film.

[0147] An adhesive member may be disposed between the touch electrode layer and the optical functional layer. The adhesive member may be any general type known in the art without limitation. The adhesive member may be a pressure-sensitive adhesive (PSA).

[0148] Although the present invention has been described with reference to the embodiments illustrated in the drawings, this is merely illustrative. Those skilled in the art will fully understand that various modifications and equivalent alternative embodiments are possible from the embodiments. Accordingly, the true technical scope of protection of the present invention should be determined based on the appended claims. Explanation of the symbols

[0149] 1: Display device 2: Manufacturing device for a display device S1: First variation S2: 2nd variation 400: Mask assembly 410: Mask Frame 420: Mask Sheet 430: Spacing part 431: First interval 432: Second interval 440: Spacing adjustment unit 441: 1st Interval Adjustment Unit 442: 2nd Interval Adjustment Unit

Claims

Claim 1 A mask assembly comprising: a mask frame having a plurality of sides having a first side extending in a first direction and an opening area defined by said plurality of sides; a gap portion disposed on said first side and recessed in a second direction intersecting the first direction at said first side; a mask sheet disposed to cover said opening area; and a gap adjustment portion tensioned and welded to said mask frame across said gap portion; wherein, when viewed in a plane, said gap portion comprises a first portion recessed in the second direction and a second portion disposed at one end of said first portion and recessed such that at least a portion of its width is greater than the width of said first portion. Claim 2 delete Claim 3 A mask assembly according to claim 1, wherein the second part is circular when viewed in a planar view. Claim 4 A mask assembly according to claim 1, wherein the width of the first part in the first direction is smaller than the length of the first part in the second direction. Claim 5 In claim 1, the first part is a mask assembly in which the width in the first direction decreases as it goes toward the second direction. Claim 6 A mask assembly according to claim 1, wherein the mask sheet comprises a first mask sheet and a second mask sheet arranged side by side in the first direction, and the spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and is disposed between the first mask sheet and the second mask sheet in the first direction. Claim 7 A mask assembly according to claim 1, wherein the mask sheet comprises a first mask sheet and a second mask sheet arranged side by side in the first direction, and the spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and is respectively arranged between the width of the first mask sheet in the first direction and the width of the second mask sheet in the first direction. Claim 8 A method for manufacturing a display device comprising: a step of preparing a mask assembly including a mask frame having a first side extending in a first direction and a first gap portion disposed on the first side and recessed in a second direction intersecting the first direction; a step of placing one or more mask sheets on the mask frame; a step of inspecting the alignment of the mask sheets placed on the mask frame; and a step of adjusting the length of the first side of the mask frame by tension welding a gap adjustment portion to the first side so as to cross the first gap portion. Claim 9 A method for manufacturing a display device according to claim 8, wherein the step of arranging one or more mask sheets comprises the step of welding and fixing the one or more mask sheets to the mask frame. Claim 10 A method for manufacturing a display device according to claim 8, wherein the mask frame further includes a second side extending in a second direction intersecting the first direction, the mask assembly further includes a second gap portion disposed on the second side, and the length of the second side of the mask frame is adjusted by tension welding a gap adjustment portion to the second side so as to cross the second gap portion. Claim 11 A method for manufacturing a display device according to claim 8, wherein the step of adjusting the length of the first side of the mask frame comprises the step of selectively tension welding the spacing adjustment part to some of the first spacing parts provided in a plurality. Claim 12 A method for manufacturing a display device according to claim 8, wherein the one or more mask sheets include a first mask sheet and a second mask sheet arranged side by side in the first direction, and the first gap portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and is arranged between the first mask sheet and the second mask sheet in the first direction. Claim 13 A method for manufacturing a display device according to claim 8, wherein the one or more mask sheets include a first mask sheet and a second mask sheet arranged side by side in the first direction, and the first spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and is respectively arranged between the width of the first mask sheet in the first direction and the width of the second mask sheet in the first direction. Claim 14 A method for manufacturing a display device comprising: a step of preparing a mask assembly including a mask frame having a first side extending in a first direction and a first gap portion disposed on the first side and recessed in a second direction intersecting the first direction; a step of tension welding a first gap adjustment portion to the first side so as to cross the first gap portion; a step of placing one or more mask sheets on the mask frame; a step of inspecting the alignment of the mask sheets placed on the mask frame; and a step of removing the first gap adjustment portion when extension of the first side is required, and tension welding a second gap adjustment portion adjacent to the first gap adjustment portion to the first side so as to cross the first gap portion when compression of the first side is required. Claim 15 A method for manufacturing a display device according to claim 14, wherein the step of arranging one or more mask sheets comprises the step of welding and fixing the one or more mask sheets to the mask frame. Claim 16 A method for manufacturing a display device according to claim 14, wherein the mask frame further comprises a second side extending in a second direction intersecting the first direction, the mask assembly further comprises a second gap portion disposed on the second side, and further comprises the step of tension welding a first gap adjustment portion to the second side so as to cross the second gap portion. Claim 17 A method for manufacturing a display device according to claim 16, further comprising the step of removing the first spacing adjustment part disposed in the second spacing part when extension of the second side is required, and tension welding the second spacing adjustment part adjacent to the first spacing adjustment part to the second side so as to cross the second spacing part when compression of the second side is required. Claim 18 A method for manufacturing a display device according to claim 14, wherein the one or more mask sheets include a first mask sheet and a second mask sheet arranged side by side in the first direction, and the first spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and is arranged between the first mask sheet and the second mask sheet in the first direction. Claim 19 A method for manufacturing a display device according to claim 14, wherein the one or more mask sheets include a first mask sheet and a second mask sheet arranged side by side in the first direction, and the first spacing portion is spaced apart from the first mask sheet and the second mask sheet in the second direction, and is respectively arranged between the width of the first mask sheet in the first direction and the width of the second mask sheet in the first direction. Claim 20 A method for manufacturing a display device according to claim 14, wherein the second spacing adjustment part is spaced apart from the first spacing adjustment part in a second direction and arranged parallel to the first spacing adjustment part.

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