Jig, mounting method and dismounting method

Abstract

(Assignment) When mounting a machining tool to a mount, mitigate the impact on the mount. (Solution) A processing device comprising a chuck table having a holding surface for holding a workpiece, a spindle having a mount fixed at its tip end for mounting a processing tool positioned above the holding surface, and a base portion positioned around the chuck table, wherein the jig is available for use when mounting a processing tool to the mount, the jig comprising a first support portion capable of supporting a processing tool, a second support portion positioned below the first support portion and supported by the base portion, and a main body portion positioned between the first support portion and the second support portion, wherein the main body portion has a balloon portion that expands by injecting gas and contracts by discharging gas, an injector for injecting gas into the balloon portion, and an exhaust portion for discharging gas from the balloon portion, and a jig that moves the processing tool to approach the mount by expanding the balloon portion while the processing tool is supported by the first support portion.

Description

Technology Field

[0001] The present invention relates to a jig usable when mounting a machining tool on a mount of a machining device, a mounting method for mounting a machining tool on a mount using the jig, and a separation method for removing a machining tool from a mount using the jig. Background Technology

[0002] Workpieces such as semiconductor wafers are thinned to a predetermined thickness using, for example, a grinding device (see, for example, Patent Document 1). As a grinding device, for example, a device that performs infeed grinding is known. This grinding device is equipped with a disc-shaped chuck table that can rotate while holding the workpiece. A grinding unit is disposed above the chuck table.

[0003] The grinding unit is equipped with a cylindrical spindle arranged approximately parallel in the vertical direction, and a disc-shaped mount is fixed to the lower end of the spindle. An annular grinding wheel is mounted on the lower side of the mount. The grinding wheel has an annular base and a plurality of grinding wheels arranged along the circumferential direction of the base on one side of the base.

[0004] When mounting a grinding wheel to a mount, typically, the operator first supports the grinding wheel by hand and then aligns the multiple screw holes formed in the base with the multiple through holes formed in the mount. Next, bolts are tightened into each screw hole of the base. Accordingly, the grinding wheel is secured to the spindle.

[0005] When grinding a workpiece with a grinding wheel, the grinding wheel is consumed along with the grinding of the workpiece, so it is necessary to replace the grinding wheel periodically; however, replacing a grinding wheel that is relatively heavy requires effort. Therefore, a jig for supporting the grinding wheel during the grinding wheel replacement operation has been proposed (see, for example, Patent Document 2).

[0006] The jig has a lifting platform capable of rising while rotating while supporting a grinding wheel. The lifting platform has a cylindrical shape including a circular upper surface, and a female thread is formed on the inner circumferential side of the lifting platform. A cylindrical support is formed on the lower part of the lifting platform.

[0007] By rotatably connecting the female screw of the lifting platform and the male screw formed on the outer side of the support, the lifting platform is rotatably supported by the support. In addition, while being supported by the support, the lifting platform is elastically supported upward with a predetermined force by an elastic support member disposed on the inner circumference of the support.

[0008] In order to raise a processing tool, such as a grinding wheel, toward a mount using the jig, the tool is placed on the lifting platform and raised while rotating the platform. However, if the upper surface of the grinding wheel's support collides with the lower surface of the mount as the platform rises, there is a problem that the mount is scratched due to the impact. Prior art literature

[0009] Japanese Published Patent Application No. 2002-283211 Japanese Published Patent Application No. 2012-152832 The problem to be solved

[0010] The present invention has been made in consideration of these problems and aims to mitigate the impact on the mount when mounting a machining tool to the mount using a jig. means of solving the problem

[0011] According to one embodiment of the present invention, a processing apparatus is provided having a chuck table having a holding surface for holding a workpiece, a spindle having a mounting portion fixed at its tip end and positioned above the holding surface for mounting a processing tool, and a base portion positioned around the chuck table. The jig is provided as a jig that can be used when mounting the processing tool to the mounting portion, comprising a first support portion capable of supporting the processing tool, a second support portion positioned below the first support portion and supported by the base portion, and a main body portion positioned between the first support portion and the second support portion. The main body portion has a balloon portion that expands by injecting gas and contracts by discharging gas, an injector for injecting gas into the balloon portion, and an exhaust portion for discharging gas from the balloon portion. The jig is provided to move the processing tool to approach the mounting portion by expanding the balloon portion while the processing tool is supported by the first support portion.

[0012] Preferably, the balloon portion has a plurality of balloons connected in a direction from the second support portion toward the first support portion.

[0013] Additionally, preferably, the processing tool has a base and a grinding stone or pad portion fixed to the base, and the first support portion has a base contact area that can contact the base without contacting the grinding stone or pad portion.

[0014] Additionally, preferably, the second support member has a leg portion supported by the base portion and a support member fixed to the upper end of the leg portion and positioned above the chuck table, and the lower surface of the balloon portion is in contact with the upper surface of the support member.

[0015] According to another aspect of the present invention, a machining apparatus comprises a chuck table having a holding surface for holding a workpiece, a spindle disposed above the holding surface and having a mount fixed at its tip for mounting a machining tool, and a base disposed around the chuck table, wherein a mounting method for mounting the machining tool on the mount using a jig comprises: a first support portion for supporting the machining tool, a second support portion located below the first support portion and supported by the base; and a main body portion disposed between the first support portion and the second support portion, wherein the main body portion comprises a balloon portion that expands by injecting gas and contracts by discharging gas, an injector for injecting gas into the balloon portion, and an exhaust portion for discharging gas from the balloon portion, and wherein the mounting method comprises a placement process for placing the machining tool on the first support portion, and a lifting process for raising the machining tool to approach the mount by injecting gas into the balloon portion to expand the balloon portion after the placement process. After the lifting process, a mounting method is provided that includes a fixing process for fixing the mount and the supporting tool while the supporting tool is in contact with the mount.

[0016] According to another aspect of the present invention, a machining apparatus comprises a chuck table having a holding surface for holding a workpiece, a spindle disposed above the holding surface and having a mount fixed at its tip for mounting a machining tool, and a base disposed around the periphery of the chuck table, wherein a separation method for separating the machining tool from the mount using a jig comprises: a first support portion for supporting the machining tool, a second support portion located below the first support portion and supported by the base; and a main body portion disposed between the first support portion and the second support portion, wherein the main body portion comprises a balloon portion that expands by injecting gas and contracts by discharging gas, an injector for injecting gas into the balloon portion, and an exhaust portion for discharging gas from the balloon portion, and the separation method comprises a contact process of injecting gas into the balloon portion to inflate the balloon portion, thereby bringing the first support portion into contact with the machining tool, and a release process of releasing the fixation of the mount and the machining tool after the contact process. A separation method is provided comprising a process and, after the release process, a lowering process in which gas is discharged from the balloon portion and the balloon portion is contracted so that the processing tool is lowered so that the processing tool approaches the second support portion. Effects of the invention

[0017] When using a jig related to one embodiment of the present invention, the balloon portion is inflated while the processing tool is supported by the first support portion. Since the processing tool is moved to approach the mount by the inflatation of the balloon portion, even if the processing tool collides with the mount, the impact on the mount can be mitigated by the shock-absorbing action of the balloon portion.

[0018] In addition, the jig can be used not only when mounting a machining tool onto a mount, but also when removing the machining tool from the mount. By using the jig, the mounting and removal of the machining tool from the mount can be performed without manually supporting the tool, thereby reducing the operator's effort during mounting and removal. Brief explanation of the drawing

[0019] Figure 1 is a partial cross-sectional side view of a grinding device. Figure 2 is an exploded perspective view of a grinding wheel, jig, etc. Figure 3 is a drawing showing the balloon section in a contracted state, etc. Figure 4 is a drawing showing the balloon section in an expanded state, etc. Figure 5 is a flowchart of the mounting method. Figure 6 is a diagram showing a batch process. Figure 7 is a diagram showing the rising process. Figure 8 is a drawing showing a fixed process. Figure 9 is a flowchart of the separation method. Figure 10 is a drawing showing a jig, etc. after a contact process. Figure 11 is a diagram showing the release process. Figure 12 is a diagram showing the descending process. FIG. 13 is a drawing showing a balloon part in a contracted state in a second embodiment. FIG. 14(A) is a drawing showing a balloon portion in a contracted state in the third embodiment, and FIG. 14(B) is an enlarged view of a grinding wheel and a first support portion. FIG. 15 is a drawing showing the balloon portion, etc. in an expanded state in the third embodiment. Specific details for implementing the invention

[0020] With reference to the attached drawings, an embodiment related to one aspect of the present invention will be described. First, a grinding device (2) in which a jig (60) of the first embodiment is used will be described. FIG. 1 is a partial cross-sectional side view of a grinding device (processing device) (2). In addition, the X-axis direction and the Y-axis direction are orthogonal to each other in a horizontal plane, and the Z-axis direction (up-down direction) is orthogonal to the X-axis direction and the Y-axis direction.

[0021] The grinding device (2) is provided with a support (4) that supports or accommodates each component. On the upper surface of the support (4), a rectangular concave portion (4a) having a longer portion in the X-axis direction is formed. On the inner side of the concave portion (4a), a ball screw type X-axis movement mechanism (6) is installed.

[0022] The X-axis direction moving mechanism (6) has a pair of guide rails (not shown) arranged approximately parallel to the X-axis direction. A moving plate (8) is slidably supported on the pair of guide rails. A nut portion (10) is installed on the lower side of the moving plate (8).

[0023] A screw shaft (12) arranged along the X-axis direction is rotatably connected to the nut portion (10). The screw shaft (12) is positioned between a pair of guide rails. A driving source (14), such as a motor, is connected to one end of the screw shaft (12).

[0024] When the screw shaft (12) is rotated by the driving source (14), the movable plate (8) moves along the X-axis direction. A disc-shaped chuck table (16) is placed above the movable plate (8). The outer diameter of the chuck table (16) is, for example, 370 mm.

[0025] The chuck table (16) has a disc-shaped frame body formed of non-porous ceramics. A disc-shaped concave portion is formed on the upper part of the frame body, and a disc-shaped porous plate formed of porous ceramics is fixed to this concave portion. The outer diameter of the porous plate is, for example, 300 mm.

[0026] A channel is formed in the frame body to connect a porous plate and a suction source (not shown), such as an ejector. Through the channel, negative pressure is transmitted to the upper surface of the porous plate. The upper surface of the frame body and the upper surface of the porous plate are approximately one surface and form a retaining surface (16a).

[0027] In FIG. 1, for convenience, the retaining surface (16a) is shown as approximately flat, but the retaining surface (16a) has a conical shape in which the central part protrudes slightly (e.g., by 20 μm) compared to the outer part. When negative pressure is applied to a porous plate while the workpiece (11) is placed on the retaining surface (16a), the workpiece (11) is sucked and retained on the retaining surface (16a) along the shape of the retaining surface (16a).

[0028] The chuck table (16) is rotatably supported by an annular table base (18) via bearings (not shown). The table base (18) is supported by a tilt adjustment mechanism comprising one fixed support (20a) and two movable support (20b).

[0029] The height position of the upper part of the fixed support (20a) is fixed, but the upper part of the movable support (20b) can move along the Z-axis direction. Also, in FIG. 1, only one movable support (20b) is shown, and the other movable support (20b) is omitted.

[0030] One fixed support (20a) and two movable support (20b) are supported by a movable plate (8). By adjusting the height position of the upper part of the movable support (20b), the inclination of the table base (18) is adjusted so that a part of the conical retaining surface (16a) becomes approximately parallel to the grinding surface (described later).

[0031] A rotary driving source (not shown), such as a motor, is placed on the moving plate (8). A pulley (not shown) is installed on the output shaft of the rotary driving source. The power of the rotary driving source is transmitted to a rotating shaft (22) connected to the lower part of the chuck table (16).

[0032] The rotation shaft (22) passes through a through hole (not shown) formed in the center of the table base (18) and protrudes downward from the table base (18). A pulley (22a) is installed at the lower end of the rotation shaft (22). A stepless belt (24) is placed across the pulley (22a) of the rotation shaft (22) and the pulley of the rotation drive source.

[0033] The rotation of the output shaft of the rotary drive source is transmitted to the rotation shaft (22) via a stepless belt (24). On the upper surface of the movable plate (8), a hollow base (26) having a rectangular shape is arranged to surround the perimeter of the chuck table (16).

[0034] On the upper surface (26a) of the base portion (26), a circular opening (26b) is formed to expose the chuck table (16) (see FIG. 2). Additionally, the entire surface of the retaining surface (16a) is located above the upper surface (26a) of the base portion (26).

[0035] On both sides of the base (26) in the X-axis direction, a corrugated box-shaped cover member (28) that is extendable along the X-axis direction is installed. The cover member (28) prevents contamination of the X-axis movement mechanism (6) by grinding debris, grinding water, etc. generated during grinding.

[0036] At the rear (one side in the X-axis direction) of the X-axis moving mechanism (6), a rectangular support structure (4b) is installed in a manner that protrudes upward. The support structure (4b) is formed integrally with the base (4). On the front (the other side in the X-axis direction) of the support structure (4b), a ball screw type grinding feed unit (30) is installed.

[0037] The grinding feed unit (30) is fixed to the front side of the support structure (4b) and also has a pair of guide rails (32) arranged along the Z-axis direction. A cylindrical retaining member (34) including a circular lower surface is fixed to the pair of guide rails (32) so as to be slidable in the Z-axis direction.

[0038] On the rear side of the retaining member (34), a nut portion (36) is installed integrally with the retaining member (34). A screw shaft (38) is rotatably connected to the nut portion (36). The screw shaft (38) is positioned along the Z-axis direction between a pair of guide rails (32).

[0039] A driving source (40), such as a motor, for rotating the screw shaft (38) is connected to the upper part of the screw shaft (38). When the screw shaft (38) is rotated by the driving source (40), the retaining member (34) moves along the Z-axis direction.

[0040] A cylindrical spindle housing (42) is installed within the retaining member (34). The spindle housing (42) rotatably accommodates a portion (upper end) of a cylindrical spindle (44) whose longer side is positioned along the Z-axis direction.

[0041] A rotational driving source, such as a motor, is installed at the upper end of the spindle (44). The lower end (front end) (44a) of the spindle (44) protrudes downward from the retaining member (34) through a through opening formed on the lower surface of the retaining member (34). However, the spindle (44) is positioned above the retaining surface (16a).

[0042] A disc-shaped mount (46) is fixed to the lower part (44a) of the spindle (44). An annular grinding wheel (processing tool) (50) is mounted to the mount (46) by means of a bolt (48) (see FIG. 2).

[0043] The spindle (44), mount (46), grinding wheel (50), etc. constitute a grinding unit (52) for grinding a workpiece (11). As shown in FIG. 2, a plurality of (e.g., 6) through holes (46a1) are formed at approximately equal intervals along the circumferential direction of the mount (46) on the outer periphery of the mount (46).

[0044] The grinding wheel (50) includes an annular base (50a) having an outer diameter (e.g., 300 mm) that is approximately the same diameter as the mount (46). The base (50a) is formed of a metal such as an aluminum alloy.

[0045] On the upper surface of the base (50a), a plurality of screw holes (50a1) (e.g., 6) are formed at approximately equal intervals along the circumferential direction of the base (50a). One screw hole (50a1) is positioned to correspond to one through hole (46a1) in the Z-axis direction.

[0046] With the through hole (46a1) and the screw hole (50a1) aligned, when the screw of the bolt (48) is fastened into the screw hole (50a1), the grinding wheel (50) is mounted on the spindle (44) via the mount (46). Also, in FIG. 1, the bolt (48) is omitted.

[0047] A plurality of grinding stones (grinding stone portions) (50b) are fixed to the lower side, which is located opposite to the upper surface (50a2) of the supporting surface (50a) of the grinding wheel (50). Each grinding stone (50b) has abrasive particles formed of diamond or cBN (cubic boron nitride), etc., and a binder (bond material) formed of resin, ceramics, or metal, etc., to fix the abrasive particles.

[0048] A plurality of grinding wheels (50b) each have a roughly block shape and are arranged at roughly equal intervals along the circumferential direction of the base (50a). When the spindle (44) is rotated, an annular grinding surface is formed by the trajectory of the lower surface of the plurality of grinding wheels (50b).

[0049] Here, we return to Fig. 1. The workpiece (11) being ground by the grinding wheel (50) is, for example, a disc-shaped silicon wafer. On the surface (11a) side of the workpiece (11), a device such as an IC (Integrated Circuit) is formed.

[0050] When grinding the workpiece (11), a resin protective tape (13) is attached to the surface (11a) side to protect the device. Then, with the chuck table (16) placed at the loading / unloading position (A1) located in front of the grinding device (2), the workpiece (11) is placed on the holding surface (16a) so that the back surface (11b) is exposed.

[0051] Next, the surface (11a) side is held in place by suction against the holding surface (16a), and the chuck table (16) is moved to the grinding position (A2). At the grinding position (A2), the chuck table (16) is rotated at a predetermined rotational speed (e.g., 300 rpm), and the spindle (44) is rotated at a predetermined rotational speed (e.g., 3200 rpm).

[0052] In this state, while supplying a grinding water such as pure water to the grinding wheel (50b) at a predetermined flow rate, the grinding unit (52) is lowered downward by the grinding feed unit (30) at a predetermined speed (e.g., 1.0 μm / s) (i.e., grinding feed). As the grinding surface comes into contact with the back side (11b), the back side (11b) is ground.

[0053] After thinning the workpiece (11) until it reaches a predetermined thickness, the grinding unit (52) is raised and the chuck table (16) is returned to the loading / unloading position (A1). Then, the workpiece (11) that has finished grinding is removed, and a new workpiece (11) is placed on the chuck table (16) in the same manner.

[0054] In this way, the grinding of multiple workpieces (11) is performed sequentially. As the grinding proceeds, the grinding wheel (50b) wears out, so it is necessary to replace the used grinding wheel (50) with a new grinding wheel (50).

[0055] A jig (60) is used to replace the grinding wheel (50). FIG. 2 is an exploded perspective view of the grinding wheel (50), jig (60), etc. The jig (60) has a first support part (62) formed of a metal such as an aluminum alloy.

[0056] As shown in FIG. 3, the first support member (62) includes a frustum-shaped support contact area (62a) and a disc-shaped base member (62b). The first support member (62) supports the grinding wheel (50) in a state where the outer circumferential side (62a1) of the support contact area (62a) is in contact with the inner circumferential side (50a3) of the support (50a).

[0057] Therefore, the first support member (62) can support the grinding wheel (50) without contacting the grinding stone (50b). Also, the height (62c) of the first support member (62) is sufficiently high so that the lower surface of the grinding stone (50b) does not contact the upper surface (64a1) of the main body (64) while the grinding wheel (50) is supported by the first support member (62).

[0058] Therefore, when mounting a new grinding wheel (50) to the mount (46), even if the grinding wheel (50) is supported by the first support member (62), the grinding stone (50b) does not come into contact with the components of the jig (60). Therefore, it is possible to prevent the grinding stone (50b) from being contaminated by debris attached to the jig (60).

[0059] In addition, since the grinding stone (50b) does not come into contact with the components of the jig (60) while the jig (60) supports the grinding wheel (50), even if the grinding wheel (50) rises and the support (50a) comes into contact with the mount (46), the grinding stone (50b) is not physically squeezed in the Z-axis direction. Therefore, damage to the grinding stone (50b) during mounting of the grinding wheel (50) can be reduced.

[0060] On the lower surface (62b1) of the first support member (62), the upper surface (64a1) of a cylindrical main body member (64) having a corrugated box-shaped side is fixed with adhesive or the like. The main body member (64) has a balloon part (64a). FIG. 3 is a drawing showing the balloon part (64a) in a contracted state.

[0061] The balloon section (64a) is formed, for example, by a woven fabric made of resin fibers or a membrane made of resin, rubber, etc. The balloon section (64a) has a cylindrical corrugated box on its side, and mountains and valleys are arranged alternately along the height direction (60a) (i.e., the direction from the second support section (72) (described later) toward the first support section (62).

[0062] By having a cylindrical bellows, the balloon portion (64a) is more likely to swell along the height direction (60a) than along the diameter direction of the balloon portion (64a) when expanded. Additionally, when the balloon portion (64a) contracts, the balloon portion (64a) can be folded compactly along the height direction (60a).

[0063] In this embodiment, the grinding wheel (50) is moved to approach the mount (46) by the expansion of the balloon part (64a), so even if the grinding wheel (50) collides with the mount (46), the impact on the mount (46) can be mitigated by the shock-absorbing action of the balloon part (64a).

[0064] In addition, the jig (60) of the present embodiment does not have an elastic support member that elastically supports the lifting platform upward compared to the jig described in Patent Document 2. In the jig (60) of the present embodiment, the structure can be simplified as much as the elastic support member is not present, and the weight of the jig (60) can be reduced.

[0065] Inside the balloon section (64a), a continuous space is formed, and this space is connected to an injection outlet (64b). The injection outlet (64b) is formed, for example, at the lower end of the side of the balloon section (64a). Also, in FIG. 3, the injection outlet (64b) is shown as a black circle.

[0066] The injection outlet (64b) functions as an inlet for injecting air (gas) (70a) (see FIG. 4) into the balloon section (64a), and as an outlet for discharging air (70a) from the balloon section (64a).

[0067] An air supply source (70) is connected to the injection outlet (64b) via a pipe (68). The air supply source (70) is installed in a building such as a factory and includes an air compressor, a filter, an air tank, etc.

[0068] In the middle of the piping (68), a first solenoid valve (68a) is installed that becomes open when air (70a) is injected into the balloon section (64a). Also, between the first solenoid valve (68a) and the injection outlet (64b), a second solenoid valve (68b) is installed that becomes open when air (70a) inside the balloon section (64a) is discharged.

[0069] The first electronic valve (68a) and the second electronic valve (68b) of this embodiment are manually controlled so that opening and closing are controlled by a worker's manual operation, but they may also be controlled by a control signal from a computer installed in the grinding device (2).

[0070] In addition, to control the pressure, flow rate, etc. of the air (70a) supplied to the injection outlet (64b), a proportional control valve (not shown), for example, is installed between the air supply source (70) and the first electronic valve (68a).

[0071] The lower surface (64a2) of the balloon portion (64a) is in contact with the upper surface (72a1) of the cylindrical second support portion (72) and is fixed with adhesive or the like. In this way, the balloon portion (64a) is positioned between the first support portion (62) and the second support portion (72).

[0072] The second support (72), located below the first support (62), has a disc-shaped support (72a). The upper surface (72a1) of the support (72a) is fixed to the lower surface (64a2) of the balloon part (64a) with adhesive or the like.

[0073] The upper end of a cylindrical leg portion (72b) is fixed to the outer periphery of the lower surface of the support (72a). The leg portion (72b) is supported by the base portion (26) with its lower surface in contact with the upper surface (26a) of the base portion (26).

[0074] The leg portion (72b) has a predetermined length in the height direction (60a) that is longer than the distance from the height position of the upper surface (26a) of the base portion (26) to the highest position of the retaining surface (16a). Therefore, when the leg portion (72b) of the second support portion (72) is placed on the base portion (26), the support (72a) is necessarily located above the chuck table (16).

[0075] Therefore, when the jig (60) is supported by the base (26), the second support (72) does not come into contact with the retaining surface (16a). Accordingly, the retaining surface (16a) can be prevented from being contaminated by debris attached to the support (72a).

[0076] With the jig (60) supported by the base (26), if the first solenoid valve (68a) is opened and the second solenoid valve (68b) is closed, air (70a) is injected into the balloon section (64a) and the balloon section (64a) expands along the height direction (60a).

[0077] FIG. 4 is a drawing showing the balloon portion (64a) in an expanded state. By expanding the balloon portion (64a), the grinding wheel (50) can be moved upward to approach the mount (46).

[0078] For example, when the balloon part (64a) is inflated until the height from the upper surface (64a1) to the lower surface (64a2) of the balloon part (64a) becomes a predetermined value of 10 cm or more and 15 cm or less, the upper surface (50a2) of the base (50a) comes into contact with the lower surface (46a2) of the mount (46).

[0079] In this state, when the mount (46) and the grinding wheel (50) are fixed with a bolt (48), the grinding wheel (50) is mounted on the spindle (44) via the mount (46). Next, with reference to FIGS. 5 to 8, a mounting method for mounting the grinding wheel (50) to the mount (46) using a jig (60) will be described.

[0080] FIG. 5 is a flowchart of the mounting method. Also, FIG. 5 to FIG. 8 describe the case where the grinding wheel (50) is mounted on the mount (46) when the grinding wheel (50) is not fixed to the mount (46).

[0081] First, the chuck table (16) is moved to the incoming / outgoing position (A1), and then the jig (60) is placed on the base (26) to cover the holding surface (16a) with the jig (60), and then the grinding wheel (50) is placed on the first support (62) (placement process (S10)).

[0082] FIG. 6 is a drawing showing a placement process (S10). In the placement process (S10), as described above, a grinding wheel (50) is placed on a first support (62) so that the expected contact area (62a) does not come into contact with the grinding wheel (50b) but comes into contact with the inner side surface (50a3) of the expected (50a).

[0083] After the batching process (S10), the chuck table (16) is moved by the X-axis moving mechanism (6) to an exchange position (A3) (see FIG. 1) located directly below the spindle (44). Then, with the grinding wheel (50) supported by the first support (62), the first solenoid valve (68a) is opened while maintaining the closed state of the second solenoid valve (68b).

[0084] Accordingly, air (70a) is injected into the balloon section (64a), and the balloon section (64a) expands. Due to the expansion of the balloon section (64a), the grinding wheel (50) rises along the height direction (60a) so that the expectation (50a) approaches the mount (46) (rising process (S20)).

[0085] FIG. 7 is a drawing showing the lifting process (S20). In the lifting process (S20), the grinding wheel (50) is raised along the height direction (60a) until the upper surface (50a2) of the support (50a) comes into contact with the lower surface (46a2) of the mount (46). Additionally, the lifting speed of the grinding wheel (50) is appropriately adjusted according to the flow rate of the air (70a).

[0086] After the upper surface (50a2) comes into contact with the lower surface (46a2), the first solenoid valve (68a) is closed. After the lifting process (S20), with the upper surface (50a2) of the base (50a) in contact with the lower surface (46a2) of the mount (46), the mount (46) and the base (50a) are fixed by a bolt (48) (fixing process (S30)). FIG. 8 is a drawing showing the fixing process (S30).

[0087] By using the jig (60), the grinding wheel (50) is moved to approach the mount (46) by the expansion of the balloon part (64a), so that even if the grinding wheel (50) collides with the mount (46) during the lifting process (S20), the impact on the mount (46) can be mitigated by the shock-absorbing action of the balloon part (64a).

[0088] Next, with reference to FIGS. 9 to 12, a separation method for removing a grinding wheel (50) from a mount (46) using a jig (60) is described. FIG. 9 is a flowchart of the separation method. When removing the grinding wheel (50) from the mount (46), first, the chuck table (16) is moved to the loading / unloading position (A1), and then the jig (60) is placed on the base (26).

[0089] Next, the chuck table (16) is moved to the exchange position (A3). Then, while keeping the second solenoid valve (68b) in a closed state, the first solenoid valve (68a) is opened to inject air (70a) into the balloon section (64a) and inflate the balloon section (64a).

[0090] Accordingly, the first support member (62) is raised so that the support contact area (62a) of the first support member (62) comes into contact with the inner circumferential side surface (50a3) of the support (50a) of the grinding wheel (50) (contact process (S40)). After the support contact area (62a) comes into contact with the inner circumferential side surface (50a3), the first solenoid valve (68a) is closed.

[0091] FIG. 10 is a drawing showing the jig (60), etc. after the contact process (S40). After the contact process (S40), the fixation of the mount (46) and the support (50a) of the grinding wheel (50) is released by removing the bolt (48) (release process (S50)). FIG. 11 is a drawing showing the release process (S50).

[0092] After the release process (S50), the second electronic valve (68b) is opened while the first electronic valve (68a) is kept closed, thereby releasing air (70a) from the balloon section (64a) and causing the balloon section (64a) to contract along the height direction (60a).

[0093] Accordingly, the grinding wheel (50) is lowered so that the grinding wheel (50) approaches the second support (72) (lowering process (S60)). FIG. 12 is a drawing showing the lowering process (S60).

[0094] By using the jig (60), work such as mounting and dismounting the bolt (48) can be performed without having to support the grinding wheel (50) by hand, thus reducing the effort required by the worker during mounting and dismounting of the grinding wheel (50).

[0095] Next, the jig (60) of the second embodiment will be described. FIG. 13 is a drawing showing the balloon part (64a) in a contracted state in the second embodiment. In the second embodiment, the structure of the balloon part (64a) is different from that of the first embodiment.

[0096] The balloon section (64a) of the second embodiment is connected in series along the height direction (60a) and also has an upper balloon (64c) and a lower balloon (64d) (multiple balloons) each having a cylindrical bellows on the side. The space inside the upper balloon (64c) and the space inside the lower balloon (64d) are separated by a boundary (64e) and are independent of each other.

[0097] A first injection outlet (64b1) is formed at the lower end of the side of the upper balloon (64c), and a second injection outlet (64b2) is formed at the lower end of the side of the lower balloon (64d). In addition, in FIG. 13, the first injection outlet (64b1) and the second injection outlet (64b2) are shown as black circles.

[0098] By injecting or discharging air (70a) through the first injection outlet (64b1), the upper balloon (64c) expands or contracts, and by injecting or discharging air (70a) through the second injection outlet (64b2), the lower balloon (64d) expands or contracts.

[0099] In this embodiment, even if one of the upper balloon (64c) and the lower balloon (64d) is damaged and air (70a) leaks out, the function of the balloon part (64a) can be maintained to some extent by expanding and contracting the other of the upper balloon (64c) and the lower balloon (64d).

[0100] Therefore, for example, even if the upward balloon (64c) is torn and air (70a) leaks, the risk of the grinding wheel (50) tilting and falling from the jig (60) can be reduced. Also, in the second embodiment, the balloon part (64a) is composed of two balloons, but it may be composed of three or more balloons.

[0101] Next, a third embodiment will be described. In the third embodiment, the object to be mounted and detached from the mount (46) is not a grinding wheel (50) but a polishing wheel (processing tool) (80). In short, the processing device of the third embodiment is a polishing device (82) (see FIG. 14(A)).

[0102] FIG. 14(A) is a drawing showing the balloon portion (64a) in a contracted state in the third embodiment, and FIG. 14(B) is an enlarged view of the grinding wheel (80) and the first support portion (92). The grinding wheel (80) has an annular base (80a) formed of a metal such as an aluminum alloy.

[0103] A through hole (80a1) is formed in the central part of the diameter direction of the base (80a). The through hole (80a1) serves as a supply path for the polishing liquid supplied to the workpiece (11), etc. during polishing. On the lower side of the base (80a), an annular pad portion (80b) formed of a resin-impregnated nonwoven fabric, foamed resin, etc. is installed.

[0104] Abrasive particles (not shown) formed of diamond or the like may be formed in the pad portion (80b). In addition, if abrasive particles are not formed in the pad portion (80b), a polishing liquid mixed with glass abrasive particles is supplied to the pad portion (80b). The pad portion (80b) is arranged approximately concentrically with the through hole (80a1) and also has a through hole (80b1) with a larger diameter than the through hole (80a1).

[0105] The outer diameter of the grinding wheel (80) is, for example, 450 mm. The grinding wheel (80) is supported by a jig (90) having a structure approximately identical to the jig (60) described above. Therefore, a description of a configuration approximately identical to the jig (60) is omitted.

[0106] The jig (90) has a first support (92) having a shape different from that of the first support (62). The first support (92) includes a cylindrical expected contact area (92a) and a disc-shaped base (92b) with a larger diameter than the expected contact area (92a).

[0107] As shown in FIG. 14(B), the first support member (92) supports the grinding wheel (80) in such a state that the upper surface (92a1) of the expected contact area (92a) is in contact with the exposed surface (80a3) located at the center of the diameter direction of the expected (80a). Therefore, the first support member (92) can support the grinding wheel (80) without contacting the pad member (80b).

[0108] Also, the height (92c) of the expected contact area (92a) is sufficiently high so that the lower surface of the pad portion (80b) does not come into contact with the upper surface (92b1) of the base portion (92b) while the grinding wheel (80) is supported by the first support portion (92).

[0109] Therefore, when mounting a new grinding wheel (80) on the mount (46), even if the grinding wheel (80) is supported by the first support member (92), the pad member (80b) does not come into contact with the components of the jig (90), so the pad member (80b) can be prevented from being contaminated by debris attached to the jig (90).

[0110] Additionally, the expected contact area (92a) may have a projection (not shown) that supports or fixes at least three points on the outer periphery of the expected (80a) in the radial direction, instead of or together with the exposed surface (80a3) located at the center of the expected (80a).

[0111] In the third embodiment, as in the first embodiment, the grinding wheel (80) can be raised and lowered by expanding and contracting the balloon portion (64a). Therefore, the mounting method from the placement process (S10) to the fixing process (S30) and the separation method from the contact process (S40) to the lowering process (S60) can be carried out in the same way.

[0112] In the state shown in FIG. 14(A), when the first solenoid valve (68a) is opened while the second solenoid valve (68b) is kept closed, air (70a) is injected into the balloon section (64a), and the balloon section (64a) expands along the height direction (90a).

[0113] FIG. 15 is a drawing showing the balloon portion (64a) in an expanded state in the third embodiment. After raising the grinding wheel (80) until the upper surface (80a2) of the base (80a) comes into contact with the lower surface (46a2) of the mount (46), the first solenoid valve (68a) is closed.

[0114] In this embodiment as well, the polishing wheel (80) is moved to approach the mount (46) by the expansion of the balloon part (64a), so even if the polishing wheel (80) collides with the mount (46), the impact on the mount (46) can be mitigated by the shock-absorbing action of the balloon part (64a).

[0115] Additionally, by keeping the first electronic valve (68a) in a closed state and opening the second electronic valve (68b), air (70a) can be discharged from the balloon section (64a), thereby causing the balloon section (64a) to contract along the height direction (90a).

[0116] By using the jig (90), work such as mounting and dismounting the bolt (48) can be performed without having to support the grinding wheel (80) by hand, thus reducing the effort required by the worker during mounting and dismounting of the grinding wheel (80).

[0117] In addition, structures, methods, etc. related to the embodiments described above may be appropriately modified and implemented as long as they do not deviate from the scope of the purpose of the present invention. In the grinding device (2) or polishing device (82), an air nozzle (not shown) for cleaning may be installed.

[0118] If the air supply source connected to this air nozzle is used as the air supply source (70) described above, the jig (60, 90) can be used with existing equipment. However, the gas injected into the balloon part (64a) is not limited to air (70a).

[0119] Instead of air (70a), other gases (nitrogen gas, carbon dioxide) may be used. Also, in the embodiment described above, the inlet and outlet of air (70a) were made into a single inlet / outlet (64b), but the inlet and outlet may be formed separately.

[0120] However, when the balloon part (64a) expands and contracts, a guide member (not shown), such as a support, may be installed so that the balloon part (64a) expands and contracts along the height direction (60a, 90a).

[0121] The grinding device (2) and polishing device (82) described above are so-called manual types in which a worker manually brings in the workpiece (11), but they may also be so-called fully automatic types in which the workpiece (11) contained in the cassette is automatically conveyed into the device and cleaning is performed after grinding and polishing.

[0122] Also, the grinding device (2) is not limited to infeed grinding and may be a device that performs creep feed grinding. The polishing device (82) is not limited to wet polishing and may be a device that performs dry polishing. Explanation of the symbols

[0123] 2 : Grinding device (processing device) 4 : Expectation 4a : Concave part 4b: Support structure 6: X-axis movement mechanism 8 : Moving plate 10: Nut part 12: Screw shaft 14 : Gu Dong-won 11 : Workpiece 11a : Surface 11b : If 13: Protective tape 16 : Chuck Table 16a : Retention surface 18: Table base 20a: Fixed support 20b : Movable support 22 : Rotation axis 22a : Pulley 24 : Unauthorized belt 26 : Base 26a : Top surface 26b : opening 28: Cover missing 30: Grinding feed unit 32: Guide rail 34: Lack of maintenance 36 : Nut part 38 : Screw shaft 40 : Dongwon 42 : Spindle housing 44 : Spindle 44a : Lower part (tip) 46 : Mount 46a1: Penetrating hole 46a2: If 48 : Bolt 50 : Grinding wheel (machining tool) 50a : Expectation 50a1: Screw hole 50a2: Top surface 50a3: Inner side 50b : Grinding wheel (grinding wheel section) 52 : Grinding unit 60 : Jig 60a : Height direction 62: 1st Support Section 62a : Expected contact area 62a1: External aspect 62b : Base part 62b1: If 62c : height 64 : Main body 64a : Balloon part 64a1: Top surface 64a2: If 64b : Injection outlet 64b1: First injection outlet 64b2: Second injection outlet 64c : Upward balloon 64d : Downward balloon 64e : boundary 68 : Piping 68a: First solenoid valve 68b: Second solenoid valve 70 : Air source 70a : Air (gas) 72 : 2nd Support Section 72a : Support 72a1: Top surface 72b : Legs 80: Grinding wheel (machining tool) 80a : Expectation 80a1: Penetration 80a2: Top surface 80a3: Exposed surface 80b : Pad section 80b1: Penetration 82 : Grinding device (processing device) 90 : Jig 90a : Height direction 92: 1st Support Section 92a : Expected contact area 92a1: Top surface 92b : Base part 92b1: Top surface 92c : height A1 : Inbound / Outbound Location A2: Grinding position A3 : Exchange location S10: Batch process S20: Ascent Process S30: Fixed process S40: Contact process S50: Release process S60: Downward process

Claims

Claim 1 A machining apparatus comprising a chuck table having a holding surface for holding a workpiece, a spindle disposed above the holding surface and having a mount fixed at its tip for mounting a machining tool, and a base disposed around the periphery of the chuck table, wherein a jig usable when raising the machining tool to approach the mount and fixing the machining tool's base and the mount in a state where the base of the machining tool and the mount are in contact, the jig comprises a first support member capable of supporting the machining tool, a second support member located below the first support member and supported by the base, and a main body disposed between the first support member and the second support member, wherein the main body comprises a balloon portion that expands upon the injection of gas and contracts upon the discharge of gas, an inlet for injecting gas into the balloon portion, and an outlet for discharging gas from the balloon portion, wherein the balloon portion is capable of absorbing impact on the mount caused by a collision between the machining tool and the mount, and wherein the balloon portion while the machining tool is supported by the first support member A jig characterized by raising the machining tool to approach the mount by expanding it, and fixing the machining tool's support and the mount in a state where the support and the mount are in contact. Claim 2 A jig according to claim 1, wherein the balloon portion is characterized by having a plurality of balloons connected in a direction from the second support portion toward the first support portion. Claim 3 A jig according to claim 1 or 2, wherein the processing tool has a support and a grinding stone or pad portion fixed to the support, and the first support portion has a support contact area capable of contacting the support without contacting the grinding stone or pad portion. Claim 4 A jig according to claim 1 or 2, wherein the second support member has a leg portion supported by the base portion and a support member fixed to the upper end of the leg portion and positioned above the chuck table, and the lower surface of the balloon portion is in contact with the upper surface of the support member. Claim 5 A machining apparatus comprising a chuck table having a holding surface for holding a workpiece, a spindle disposed above the holding surface and having a mount fixed at its tip for mounting a machining tool, and a base disposed around the periphery of the chuck table, wherein a mounting method for mounting the machining tool on the mount using a jig, the jig comprises a first support portion for supporting the machining tool, a second support portion located below the first support portion and supported by the base, and a main body portion disposed between the first support portion and the second support portion, wherein the main body portion comprises a balloon portion that expands upon the injection of gas and contracts upon the discharge of gas, an inlet for injecting gas into the balloon portion, and an outlet for discharging gas from the balloon portion, wherein the balloon portion is capable of absorbing impact on the mount caused by a collision between the machining tool and the mount, and the mounting method comprises a placement process for placing the machining tool on the first support portion, and after the placement process, injecting gas into the balloon portion and the balloon portion A mounting method characterized by comprising a lifting process for raising the processing tool to approach the mount by expanding it, and a fixing process for fixing the mount and the support after the lifting process, while the support of the processing tool is in contact with the mount. Claim 6 A machining apparatus comprising a chuck table having a holding surface for holding a workpiece, a spindle disposed above the holding surface and having a mount fixed at its tip for mounting a machining tool, and a base disposed around the periphery of the chuck table, wherein a separation method for separating the machining tool from the mount using a jig, the jig comprises a first support portion for supporting the machining tool, a second support portion located below the first support portion and supported by the base, and a main body portion disposed between the first support portion and the second support portion, wherein the main body portion comprises a balloon portion that expands by injecting gas and contracts by discharging gas, an injector for injecting gas into the balloon portion, and an outlet for discharging gas from the balloon portion, wherein the balloon portion is capable of absorbing impact on the mount caused by a collision between the machining tool and the mount, and the separation method comprises a contact process in which the first support portion contacts the machining tool by injecting gas into the balloon portion to expand the balloon portion, and after the contact process A separation method characterized by comprising: a release process for releasing the fixation of the mount and the processing tool; and a lowering process for lowering the processing tool so that it approaches the second support by discharging gas from the balloon portion and contracting the balloon portion after the release process.

Images