Connecting unit and vehicle having the same

Abstract

A connecting unit according to the present invention may include an electromagnet that generates magnetic force and is provided on the lower part of a driving unit that travels along a driving rail on a ceiling, and a magnetic member that is attached to the electromagnet by the magnetic force of the electromagnet to fix the transport unit to the driving unit, provided on the upper surface of a transport unit that grips and transports a carrier.

Description

Technology Field

[0001] The present invention relates to a fastening unit and a vehicle having the same, and more specifically, to a connecting unit that connects a driving unit traveling along a driving rail and a transfer unit that fixes a carrier, and a vehicle having the same. Background Technology

[0002] Generally, semiconductor process devices for manufacturing semiconductor devices are arranged in series to perform various processes on semiconductor substrates. An object to be manufactured in the semiconductor device manufacturing process may be provided to each semiconductor process device while contained in a carrier, or may be recovered from each semiconductor process device using the carrier.

[0003] The above carrier is transported by a ceiling transport device. The ceiling transport device includes a travel rail provided along the ceiling of a space equipped with the semiconductor process devices, and a vehicle that grasps the carrier and travels along the travel rail.

[0004] The vehicle includes a driving unit that travels along the driving rail and a transport unit that is fixed to the driving unit and grips and transports the carrier.

[0005] The driving unit and the transfer unit are connected by a fastening structure. For maintenance of the vehicle, the driving unit and the transfer unit must be separated. The components of the transfer unit are disassembled sequentially to expose the fastening structure, and then the fastening structure is dismantled to separate the driving unit and the transfer unit. The assembly of the driving unit and the transfer unit proceeds in the reverse order of the disassembly process. Therefore, the separation and assembly of the driving unit and the transfer unit are complex and time-consuming. The problem to be solved

[0006] The present invention provides a connecting unit capable of rapidly separating and combining a driving unit and a transfer unit.

[0007] The present invention provides a vehicle having the above-mentioned connecting unit. means of solving the problem

[0008] A connecting unit according to the present invention may include an electromagnet that generates magnetic force and is provided on the lower part of a driving unit that travels along a driving rail on a ceiling, and a magnetic member that is attached to the electromagnet by the magnetic force of the electromagnet to fix the transport unit to the driving unit, provided on the upper surface of a transport unit that grips and transports a carrier.

[0009] According to one embodiment of the present invention, the connecting unit further includes a rotating shaft that is provided at the lower part of the driving unit and rotates relative to the driving unit, and the electromagnet may be provided at the end of the rotating shaft.

[0010] According to one embodiment of the present invention, the connecting unit may further include a guide member that is provided to surround the magnetic member on the upper surface of the transfer unit and guides the electromagnet when the magnetic member is attached to the electromagnet. When the electromagnet and the magnetic member are electrically attached, the side of the electromagnet and the side of the magnetic member are surrounded by the guide member, and a part of the side of the rotation axis is surrounded by the guide member.

[0011] According to one embodiment of the present invention, the magnetic member may be a permanent magnet or a metal block.

[0012] According to one embodiment of the present invention, the driving unit and the transfer unit can be separated by adjusting the polarity of the electromagnet so that a repulsive force acts between the electromagnet and the permanent magnet, or by cutting off the power supplied to the electromagnet.

[0013] A vehicle according to the present invention may include a driving unit that travels along a driving rail on a ceiling, a transfer unit provided below the driving unit and gripping and transporting a carrier, an electromagnet provided below the driving unit and generating magnetic force, and a fastening unit provided on the upper surface of the transfer unit and comprising a magnetic member attached to the electromagnet by the magnetic force of the electromagnet to fix the transfer unit to the driving unit.

[0014] According to one embodiment of the present invention, the vehicle comprises a first ring provided in the driving unit, a second ring provided in the transfer unit, and a fastening member connecting the first ring and the second ring, and may further include a fall prevention unit that prevents the transfer unit from falling due to a malfunction of the fastening unit.

[0015] According to one embodiment of the present invention, for coupling and separation with the first ring and the second ring, the fastening member may be a ring having a gate that opens and closes in a hinge shape on one side.

[0016] According to one embodiment of the present invention, the transfer unit comprises a frame portion for receiving the carrier, a moving portion configured to be horizontally movable within the frame portion, a lifting portion fixed to the lower surface of the moving portion for winding or unwinding the belt to raise or lower the belt, and a gripping portion fixed to the lower end of the belt for gripping the carrier, and the magnetic member may be configured on the upper surface of the frame portion. Effects of the invention

[0017] The vehicle according to the present invention connects the driving unit and the transfer unit using the connecting unit. The connecting unit can separate and combine the driving unit and the transfer unit by utilizing the magnetic force of the electromagnet. There is no need to disassemble the transfer unit to separate and combine the driving unit and the transfer unit. Therefore, the separation and combination of the driving unit and the transfer unit can be performed simply and quickly.

[0018] In addition, the vehicle connects the driving unit and the transfer unit using the drop prevention unit. Even if the driving unit and the transfer unit are separated due to a malfunction of the connecting unit, the drop prevention unit can prevent the transfer unit from falling. Therefore, the coupling stability of the driving unit and the transfer unit in the vehicle can be increased. Brief explanation of the drawing

[0019] FIG. 1 is a side view illustrating a vehicle according to one embodiment of the present invention. FIG. 2 is a side cross-sectional view illustrating the connection unit and fall prevention unit shown in FIG. 1. Specific details for implementing the invention

[0020] The present invention will be described in detail below with reference to the attached drawings. Since the present invention is susceptible to various modifications and may take various forms, specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed forms, and it should be understood that it includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the present invention. Similar reference numerals have been used for similar components in the description of each drawing. In the attached drawings, the dimensions of the structures are shown enlarged compared to the actual dimensions for clarity of the present invention.

[0021] Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. These terms are used solely for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component.

[0022] The terms used in this application are used merely to describe specific embodiments and are not intended to limit the invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "having" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0023] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0024] FIG. 1 is a side view for explaining a vehicle according to one embodiment of the present invention, and FIG. 2 is a side cross-sectional view for explaining a connecting unit and a fall prevention unit shown in FIG. 1.

[0025] Referring to FIGS. 1 and 2, the vehicle (500) is for transporting a carrier (20) along a driving rail (10) provided on the ceiling and has a driving unit (100), a transport unit (200), a connecting unit (300), and a fall prevention unit (400).

[0026] The carrier (20) can store various objects inside. Examples of the objects include semiconductor substrates, printed circuit boards, lead frames, reticles, etc. Examples of the carrier (20) include FOUPs, FOSBs, magazines, reticle pods, etc.

[0027] The above driving unit (100) travels along the driving rail (10) while the driving wheel (110) rotates by a separate driving unit. The driving wheel (110) may be provided on both sides of the driving unit (100). Thus, the vehicle (120) can travel along the driving rail (110).

[0028] Although not illustrated in detail, the driving unit (100) is provided with a steering wheel on its upper surface. The steering wheel may optionally come into contact with a steering rail provided above the driving rail (10) in a branching section or a curved section. The driving direction of the vehicle (120) can be controlled using the steering wheel and the steering rail.

[0029] A pair of the above driving units (100) may be arranged along the driving direction of the vehicle (500). Thus, the vehicle (500) can drive smoothly in the curved section.

[0030] The above transfer unit (200) is connected to the driving unit (100) by the connecting unit (300) and the fall prevention unit (400). The transfer unit (200) grips and transfers the carrier (20).

[0031] The above transfer unit (200) includes a frame part (210), a moving part (220), a lifting part (230), and a gripping part (240).

[0032] The frame portion (210) has a hollow interior to accommodate the carrier (20). Additionally, the frame portion (210) may have a lower side and a front side open to allow for vertical and horizontal movement of the carrier (20). At this time, the front side may be perpendicular to the driving direction of the vehicle (500).

[0033] The above-mentioned moving part (220) is provided to be horizontally movable on the lower surface of the base plate (120). The above-mentioned moving part (220) can be horizontally moved through the open front of the frame part (210).

[0034] The lifting unit (230) is fixed to the lower surface of the moving unit (220). The lifting unit (230) can raise or lower the belt (232) by winding or unwinding the belt (232).

[0035] The above gripping part (240) is fixed to the end of the belt (232) and grips the carrier (20).

[0036] The carrier (20) moves in the horizontal direction by the moving part (220) and can be raised by the lifting part (230).

[0037] The above connecting unit (300) connects the above transfer unit (200) to the above driving unit (100). Since the above connecting unit (300) is provided in each of the above driving units (100), the above driving unit (100) and the above transfer unit (200) can be stably connected.

[0038] The above connecting unit (300) may include a rotating shaft (310), an electromagnet (320), a magnetic member (330), and a guide member (340).

[0039] The rotation axis (310) is provided on the lower surface of the driving unit (100) and can rotate relative to the driving unit (100). When the vehicle (500) passes the driving rail (10) of the curved section, the driving unit (100) can rotate relative to the transfer unit (200) around the rotation axis (310). Accordingly, the vehicle (500) can travel smoothly through the curved section.

[0040] The electromagnet (320) is provided at the lower part of the driving unit (100), specifically at the end of the rotation axis (310). For example, the electromagnet (320) may be embedded in the rotation axis (310).

[0041] The electromagnet (320) can be powered through the rotation axis (310). The electromagnet (320) generates magnetic force when the power is supplied, and does not generate magnetic force when the power is cut off.

[0042] The magnetic member (330) may be provided on the upper surface of the transfer unit (200), specifically, on the upper surface of the frame part (210).

[0043] For example, the magnetic member (330) may be provided to protrude from the upper surface of the frame portion (210). Alternatively, the magnetic member (330) may be embedded in the frame portion (210).

[0044] Examples of the above magnetic member (330) include permanent magnets or metal blocks.

[0045] The magnetic member (330) can be attached to the electromagnet (320) by the magnetic force of the electromagnet (320).

[0046] When the power supplied to the electromagnet (320) is cut off, the magnetic force of the electromagnet (320) is eliminated, so the magnetic member (330) can be separated from the electromagnet (320).

[0047] If the magnetic member (330) is a permanent magnet, the polarity of the electromagnet (320) can be adjusted so that a repulsive force acts between the electromagnet (320) and the permanent magnet. Accordingly, the magnetic member (330) can be separated from the electromagnet (320) even if the power supplied to the electromagnet (320) is not cut off.

[0048] The guide member (340) may be provided to surround the magnetic member (330) on the upper surface of the frame portion (210). For example, the guide member (340) may be approximately tubular in shape. Since the magnetic member (330) guides the electromagnet (320) when it is attached to the electromagnet (320), the magnetic member (330) can be accurately attached to the electromagnet (320).

[0049] The guide member (340) is provided with an inclined surface (342) on its inner side. The inclined surface (342) may be inclined toward the upper outer side of the guide member (340).

[0050] Since the upper opening of the guide member (340) is relatively wide, the collision of the electromagnet (320) with the guide member (340) can be reduced. Additionally, since the electromagnet (320) moves along the inclined surface (342), the electromagnet (320) can be accurately aligned with the magnetic member (340).

[0051] The above-described connecting unit (300) can connect or disconnect the driving unit (100) and the transfer unit (200) by using the electromagnet (320) and the magnetic member (330). In particular, the transfer unit (200) can be connected to or disconnected from the driving unit (100) by adjusting the power of the electromagnet (320) or by adjusting the polarity of the electromagnet (320). Therefore, there is no need to disassemble the transfer unit (200) to connect or disconnect the transfer unit (200) from the driving unit (100). Consequently, the separation and connection of the driving unit (100) and the transfer unit (200) can be performed simply and quickly.

[0052] The above-mentioned drop prevention unit (400) also connects the above-mentioned transfer unit (200) to the above-mentioned driving unit (100). In order to stably connect the above-mentioned transfer unit (200) to the above-mentioned driving unit (100), the above-mentioned drop prevention unit (400) may also be provided on the above-mentioned driving unit (100).

[0053] The above-mentioned fall prevention unit (400) includes a first ring (410), a second ring (420), and a fastening member (430).

[0054] The first ring (410) is provided on the lower surface or side of the driving unit (100).

[0055] The second ring (420) is provided on the upper surface of the transfer unit (200), specifically, the frame part (210).

[0056] The above-mentioned fastening member (430) fastens the first ring (410) and the second ring (420). Thus, the driving unit (100) and the transfer unit (200) are connected to each other.

[0057] The fastening member (430) has a roughly ring shape and has a gate (432) on one side that opens and closes in a hinge shape. By using the gate (432), the fastening member (430) can be conveniently connected to or separated from the first ring (410) and the second ring (420). For example, the fastening member (430) may be of the carabiner type.

[0058] Meanwhile, although not shown, at least one of the first ring (410) and the second ring (420) may be provided with a gate that opens and closes in a hinge shape.

[0059] The above fastening member (430) can be fastened to the first ring (410) and the second ring (420), or detached from the first ring (410) and the second ring (420). Therefore, fastening and detaching of the above fastening member (430) is convenient.

[0060] The above-mentioned drop prevention unit (400) auxiliaryly connects the driving unit (100) and the transfer unit (200). Therefore, if the transfer unit (200) is separated from the driving unit (100) due to an abnormality or malfunction of the connecting unit (300), the transfer unit (200) can be maintained connected to the driving unit (100) by the drop prevention unit (400). Thus, it is possible to prevent the transfer unit (200) from falling and being damaged. Industrial applicability

[0061] As described above, the vehicle according to the present invention can perform the separation and combination of the driving unit and the transfer unit simply and quickly. Therefore, maintenance of the vehicle is convenient.

[0062] In addition, the vehicle can increase the coupling stability of the driving unit and the transfer unit, thereby reducing accidents caused by the transfer unit falling.

[0063] Although the present invention has been described above with reference to preferred embodiments, those skilled in the art will understand that various modifications and changes can be made to the invention without departing from the spirit and scope of the invention as set forth in the following claims. Explanation of the symbols

[0064] 100: Vehicle 110: Driving roller 200: Transfer unit 210: Frame section 220 : Moving part 230 : Lifting part 240 : Grafting unit 300 : Connection unit 310: Rotation axis 320: Electromagnet 330 : Magnetic member 320 : Guide member 400: Fall prevention unit 410: First ring 420: Second ring 430: Fastening member 10 : Driving rail 20 : Carrier

Claims

Claim 1 A fastening unit comprising: a rotating shaft provided at the lower part of a driving unit that travels along a driving rail on a ceiling and rotates relative to the driving unit; an electromagnet provided at the end of the rotating shaft and generating magnetic force; a magnetic member provided on the upper surface of a transfer unit that grips and transports a carrier and is attached to the electromagnet by the magnetic force of the electromagnet to fix the transfer unit to the driving unit; and a guide member provided on the upper surface of the transfer unit to surround the magnetic member and guides the electromagnet when the magnetic member is attached to the electromagnet, wherein the guide member has an inclined surface on its inner side, and the inclined surface is inclined toward the upper outer side of the guide member, and when the electromagnet and the magnetic member are electrically attached, the side of the electromagnet and the side of the magnetic member are surrounded by the guide member, and a part of the side of the rotating shaft is surrounded by the guide member. Claim 2 delete Claim 3 delete Claim 4 A fastening unit according to claim 1, wherein the magnetic member is a permanent magnet or a metal block. Claim 5 A fastening unit according to claim 4, characterized by separating the driving unit and the transfer unit by adjusting the polarity of the electromagnet so that a repulsive force acts between the electromagnet and the permanent magnet, or by cutting off the power supplied to the electromagnet. Claim 6 A vehicle characterized by comprising: a driving unit that travels along a driving rail on the ceiling; a transfer unit provided below the driving unit and gripping and transporting a carrier; a fastening unit provided at the end of a rotating shaft installed at the bottom of the driving unit and comprising an electromagnet that generates magnetic force and a magnetic member provided on the upper surface of the transfer unit and attached to the electromagnet by the magnetic force of the electromagnet to fix the transfer unit to the driving unit; and a guide member provided on the upper surface of the transfer unit to surround the magnetic member and guides the electromagnet when the magnetic member is attached to the electromagnet, wherein the guide member has an inclined surface on its inner side, and the inclined surface is inclined toward the upper outer side of the guide member, and when the electromagnet and the magnetic member are electrically attached, the side of the electromagnet and the side of the magnetic member are surrounded by the guide member, and a part of the side of the rotating shaft is surrounded by the guide member. Claim 7 A vehicle according to claim 6, comprising a first ring provided in the driving unit, a second ring provided in the transfer unit, and a fastening member connecting the first ring and the second ring, and further comprising a fall prevention unit that prevents the transfer unit from falling due to a malfunction of the fastening unit. Claim 8 A vehicle according to claim 7, characterized in that, for joining and separating with the first ring and the second ring, the fastening member is a ring having a gate that opens and closes in a hinge shape on one side. Claim 9 A vehicle according to claim 7, wherein the transfer unit comprises: a frame portion for accommodating the carrier; a moving portion configured to be horizontally movable within the frame portion; a lifting portion fixed to the lower surface of the moving portion and for winding or unwinding the belt to raise or lower the belt; and a gripping portion fixed to the lower end of the belt and for gripping the carrier, wherein the magnetic member is configured on the upper surface of the frame portion.

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