Imprint apparatus and imprint method using the same

Abstract

In an imprint device and an imprint method using the same, the imprint device comprises an outer shape unit, a stamp module, a substrate unit, a stamp unit, and a pressurizing unit. The outer shape unit forms an internal space. The stamp module includes a stamp and a stamp holder that fixes the stamp. The substrate unit receives the substrate module in a first chamber and is then introduced into the internal space. The stamp unit receives the stamp module in a second chamber and is then introduced into the internal space. The pressurizing unit positions the stamp and the substrate module adjacently and seals the first and second chambers.

Description

Technology Field

[0001] The present invention relates to an imprint device and an imprint method using the same, and more specifically, to an imprint device and an imprint method using the same that improve the convenience and applicability of a pneumatic imprint process by facilitating the mounting and detachment of a substrate and a stamp and enabling smooth process execution on substrates and stamps composed of various shapes or materials. Background Technology

[0002] Conventional pneumatic imprint devices are a technology that replicates a pattern formed on a stamp onto a resist applied to a substrate, and are being effectively applied due to the advantage of being able to produce multiple substrates using a single stamp.

[0003] Since such pneumatic imprint devices must be capable of UV irradiation and form a sealed chamber, the device has a limited structure, and there are problems in that the process of mounting and dismounting the stamp and substrate is difficult and time-consuming.

[0004] Accordingly, Korean registered patent No. 10-2598565 positioned the stamp and substrate inside the device through a rotating structure, thereby facilitating the process and reducing time. However, in the structure forming the sealed chamber, there was a problem where effective sealing was difficult or the edges of the stamp were damaged because the applied pressure was simultaneously applied to the sealing part and the edges of the stamp. In addition, as the stamp was fixed only at the edges, the center sagged due to gravity, resulting in reduced precision of imprint patterning and difficulty in controlling the alignment between the substrate and the stamp.

[0005] Therefore, there is an increasing demand for an imprint device that fixes the aforementioned stamp and performs sealing more effectively, while also improving the convenience of the imprint process. Prior art literature

[0006] Republic of Korea Registered Patent No. 10-2598565 The problem to be solved

[0007] Accordingly, the technical problem of the present invention is conceived from this point, and the objective of the present invention is to provide an imprint device that facilitates the easy mounting and detachment of the substrate and stamp, and enables smooth process execution for substrates and stamps composed of various shapes or materials, thereby improving the convenience and applicability of the pneumatic imprint process.

[0008] In addition, another objective of the present invention is to provide an imprint method using the imprint device. means of solving the problem

[0009] An imprint device according to one embodiment for realizing the purpose of the present invention described above comprises an outer shape unit, a stamp module, a substrate unit, a stamp unit, and a pressurizing unit. The outer shape unit forms an internal space. The stamp module includes a stamp and a stamp holder for fixing the stamp. The substrate unit receives the substrate module in a first chamber and then enters the internal space. The stamp unit receives the stamp module in a second chamber and then enters the internal space. The pressurizing unit positions the stamp and the substrate module adjacent to each other and seals the first and second chambers.

[0010] In one embodiment, the stamp holder may include a transparent plate having an opening hole formed therein and one side of the stamp mounted thereon, and a housing that fixes the side of the transparent plate.

[0011] In one embodiment, the second chamber includes a second base frame extending horizontally so as to have an opening in the center, and a second side frame extending upward from the second base frame, and the second base frame may have a seating portion formed therein that contacts the edge of the other side of the stamp.

[0012] In one embodiment, a support unit located above the stamp unit and applying a predetermined pressure to the housing as the second chamber is sealed may be further included.

[0013] In one embodiment, the support unit may include a support portion that contacts the housing, and an elastic portion that is interposed between the upper surface portion of the outer shape unit and the support portion to apply elastic force.

[0014] In one embodiment, the substrate unit may include a first transfer unit for transferring the first chamber to and from the inside and outside of the internal space, and a vertical guide extending between the side of the first chamber and the first transfer unit.

[0015] In one embodiment, the stamp unit may include a second transfer unit that transfers the second chamber to and from the interior space, and a vertical guide extending between the side of the second chamber and the second transfer unit.

[0016] In one embodiment, the vertical guide may have increased displacement in the vertical direction as the stamp and the substrate module are adjacent to each other.

[0017] In one embodiment, the vertical guide may be a plate spring.

[0018] In one embodiment, the substrate unit is located below the stamp unit, and the pressurizing unit is located below the substrate unit; a first sealing part that performs sealing with the second chamber is interposed on the upper surface of the first chamber, and a second sealing part that performs sealing with the upper surface of the outer shape unit may be interposed on the upper surface of the second chamber.

[0019] In one embodiment, an adapter module interposed between the stamp module and the second base frame of the second chamber may be further included.

[0020] In one embodiment, the stamp holder may include a transparent plate having an opening hole formed therein and one side of the stamp mounted thereon, and a housing that fixes the side of the transparent plate and extends a predetermined length in an inclined direction.

[0021] In one embodiment, the adapter module includes a body portion extending along the extension direction of the housing, an extension base extending horizontally from the body portion so as to have an opening in the center, and a third sealing portion formed on the lower surface of the body portion and seated on the second base frame, and the body portion may have a seating portion formed thereon that contacts the edge of the other side of the stamp.

[0022] In one embodiment, the apparatus further includes a light source unit provided on the upper surface of the outer shape unit to provide light to the stamp, and the substrate unit may include a first valve that provides air into the interior of the first chamber, and the stamp unit may include a second valve that provides air into the interior of the second chamber.

[0023] An imprint method according to one embodiment for realizing another objective of the present invention described above may include the steps of: housing a substrate module in a first chamber of a substrate unit located outside of an external unit; housing a stamp module in which a stamp is fixed in a second chamber of a stamp unit located outside of the external unit; bringing the first chamber and the second chamber into the internal space of the external unit; positioning the stamp and the substrate module adjacently using a pressurizing unit and sealing the first and second chambers; and supplying air into the interior of the second chamber and then irradiating light to transfer a pattern portion of the stamp to the resist of the substrate module. Effects of the invention

[0024] According to embodiments of the present invention, a stamp and a substrate are each housed outside the outer unit and then moved into the interior of the outer unit to perform an imprint process, thereby facilitating the mounting of the stamp and the substrate and improving the convenience and speed of the process.

[0025] In particular, the stamp is housed in the stamp module while mounted on a separate stamp module, that is, while fixed to a stamp holder, and the stamp module is seated on the frame of the second chamber, thereby minimizing the phenomenon of the stamp sagging due to its own weight while the imprint process is not being performed, which can improve precision and reliability in the imprint process.

[0026] At this time, a seating portion is formed on the frame of the second chamber, that is, the second base frame, to fix only the edge of the other side of the stamp and to contact the stamp, and while one side of the stamp is entirely fixed to the stamp holder, the stamp holder is fixed by a separate support unit, so that damage or breakage of the fixed portion of the stamp can be minimized during the imprint process.

[0027] In particular, the support unit provides a predetermined pressure toward the stamp holder by means of elastic force, thereby providing sufficient support force for the stamp holder.

[0028] In addition, when the stamp is housed inside the second chamber and the substrate is housed inside the first chamber, the sealing of the first chamber and the second chamber is performed through separate sealing portions provided on the upper surfaces of the first chamber and the second chamber, so that no separate pressure is required to be applied to the stamp or the substrate to maintain the sealed state, and thus damage or breakage of the stamp or the substrate can be minimized during the same imprint process.

[0029] In addition, in order to perform an imprint process with the pressurizing unit located at the bottom, the first chamber is moved toward the second chamber and the second chamber is moved toward the upper surface of the outer shape unit, and the movement in the vertical direction can be stably guided by the first and second vertical guides connected to the sides of the first chamber and the second chamber.

[0030] At this time, each of the first and second vertical guides is composed of a so-called leaf spring and has an elastic hinge structure, so that the vertical movement of the first and second chambers is implemented more stably, and space utilization can be improved while minimizing the complexity of the design inside the outer unit.

[0031] Furthermore, when the stamp is relatively small in size, a separate adapter module is interposed between the stamp module and the second chamber, so that the stamp module can be stably fixed according to the size of various stamps.

[0032] At this time, the adapter module is fixed to the second base frame of the second chamber through a separate sealing part to enhance the sealing effect, and since a seating part that fixes the edge of the other side of the stamp is formed on the extended base, it is possible to fix the stamp in a state substantially identical to the fixed state when the adapter module is omitted.

[0033] In addition, the stamp module can also be designed in various ways depending on the size of the stamp, and may include a housing that extends in an overall inclined direction to minimize interference with the adapter module and stably maintain a fixed state with the upper support unit. Thus, even when the size of the stamp is small, stable fixation of the stamp is possible without sagging, and not only is a stable fixed state maintained during the imprint process, but damage to the stamp can also be minimized. Brief explanation of the drawing

[0034] FIG. 1 is a side view illustrating an imprint device according to one embodiment of the present invention. Figure 2 is an internal structural diagram illustrating the imprint device of Figure 1 in more detail. FIG. 3 is a cross-sectional view illustrating a stamp module mounted on the stamp unit of FIG. 1. FIG. 4 is a side view illustrating the state in which the stamp module of FIG. 3 is positioned inside the imprint device. FIG. 5 is a side view illustrating the state in which a substrate module is positioned inside the imprint device of FIG. 1. FIGS. 6 to 10 are process diagrams specifically illustrating an imprint method using the imprint device of FIG. 1. FIG. 11 is an internal structural diagram illustrating an imprint device according to another embodiment of the present invention. FIG. 12a is a cross-sectional view illustrating the stamp module of FIG. 11, and FIG. 12b is a cross-sectional view illustrating the adapter module of FIG. 11. FIG. 13 is a process diagram illustrating an imprint method using the imprint device of FIG. 11. Specific details for implementing the invention

[0035] The present invention is susceptible to various modifications and may take various forms, and embodiments are to be described in detail in the text. However, this is not intended to limit the invention to the specific disclosed forms, and it should be understood that the invention includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention. Similar reference numerals have been used for similar components in the description of each figure. Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms.

[0036] The above terms are used solely for the purpose of distinguishing one component from another. The terms used in this application are used merely to describe specific embodiments and are not intended to limit the invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "consisting of" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0037] Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the attached drawings.

[0038] FIG. 1 is a side view illustrating an imprint device according to one embodiment of the present invention.

[0039] First, referring to FIG. 1, the imprint device (10) according to the present embodiment includes an outer shape unit (100), a pressurizing unit (200), a substrate unit (300), a stamp unit (400), a support unit (500), a light source unit (600), a stamp module (700, see FIG. 4), and a substrate module (800, see FIG. 5).

[0040] The above-described outer unit (100) forms an outer frame structure or an outer structure of the above-described imprint device (10). Although the drawing illustrates an overall rectangular block structure, it is not limited thereto, and its shape can be varied in many ways.

[0041] The above-described outer unit (100) includes first to fourth side portions (110, 120, 150, 160), a bottom portion (130), and a top portion (140). In this case, the first and second side portions (110, 120) face each other when they are in a square block structure, and likewise, the third and fourth side portions (150, 160) also face each other. In this case, some of the first to fourth side portions are omitted in each drawing to explain the internal structure.

[0042] Of course, if the above-mentioned outer unit (100) has a cylindrical shape overall, the above-mentioned first to fourth side portions (110, 120, 150, 160) are connected to each other in a curved shape overall to form a side.

[0043] The bottom portion (130) forms the bottom surface of the outer unit (100), and the top portion (140) faces the bottom portion (130) to form the top surface of the outer unit (100).

[0044] Accordingly, a predetermined internal space (105) is formed inside the outer unit (100). For convenience of explanation, the internal space (105) is divided into three sections from the bottom to the top and named the first to third spaces (101, 102, 103). At this time, the size of the first to third spaces (101, 102, 103) can be varied and can be formed considering the size of each unit (200, 300, 400) described later.

[0045] Additionally, the first side portion (110) corresponding to the first to third spaces (101, 102, 103) is designated as the first to third sides (111, 112, 113), respectively. Accordingly, the pressurizing unit (200) is located in the first space (101) formed inside the first side portion (111), the substrate unit (300) is located in the second space (102) formed inside the second side portion (112), and the stamp unit (400) can be located in the third space (103) formed inside the third side portion (113).

[0046] Meanwhile, the upper surface portion (140) includes an upper portion (141) and an upper fixed portion (142). The upper portion (141) corresponds to a frame that forms the upper surface of the outer unit (100), and the upper fixed portion (142) corresponds to a frame that extends downward from the upper portion (141) and to which the window portion (550) and support unit (500), which will be described later, are fixed.

[0047] The detailed configurations of the above-mentioned imprint device (10) are described below with further reference to the following drawings.

[0048] FIG. 2 is an internal structural diagram illustrating the imprint device of FIG. 1 in more detail. FIG. 3 is a cross-sectional view illustrating a stamp module mounted on the stamp unit of FIG. 1. FIG. 4 is a side view illustrating the state in which the stamp module of FIG. 3 is positioned inside the imprint device. FIG. 5 is a side view illustrating the state in which a substrate module is positioned inside the imprint device of FIG. 1.

[0049] Referring to FIGS. 1 to 5, the pressurizing unit (200) is housed in the first space (101) and includes a pressurizing section (210) and a pressurizing transfer section (220). The pressurizing section (210) is equipped with a predetermined driving unit inside to control the pressurizing transfer section (220) to move along the up-and-down direction (i.e., Z direction).

[0050] That is, the pressure transfer unit (220) is moved to rise or fall along the vertical direction (Z) from the upper part of the pressure unit (210), and through this, the substrate unit (300) and the stamp unit (400) can be moved upward as described later.

[0051] At this time, it is sufficient for the pressurizing unit (210) to move the pressurizing transfer unit (220) in the up and down direction, and the detailed configuration is not limited. In addition, it is sufficient for the pressurizing transfer unit (220) to also be formed to have a predetermined area so that it rises according to the operation of the pressurizing unit (210) and moves the substrate unit (300) in the upward direction.

[0052] The above substrate unit (300) accommodates a substrate module (800) inside and includes a first transfer unit (310), a first chamber (320), a substrate chuck (330), a first vertical guide (340), a first valve (350), and a first sealing part (360).

[0053] The first chamber (320) forms a predetermined first chamber space (323) inside and is located in the second space (102) of the outer unit (100) overall. It may have a square block shape or a cylinder shape, and its shape is not limited.

[0054] Additionally, in this embodiment, the substrate unit (300) is exemplified as being located above the pressurizing unit (200), and accordingly, the first chamber (320) is also located above the pressurizing transfer unit (220).

[0055] However, according to the embodiment, the stamp unit (400) may be located above the pressurizing unit (200) and the substrate unit (300) may be located above the stamp unit (400). In this case, the arrangement structure of the substrate module and the stamp module described below may be arranged differently for the imprint process. However, since this is an obvious change due to the change in position, it is sufficient to allow for variable arrangement within an obvious range, so a detailed explanation is omitted.

[0056] The first chamber (320) comprises a first base frame (321) and a first side frame (322) to form a first chamber space (323) that is open at the top and closed at the bottom and sides. At this time, the first chamber (320) includes a first extension frame (324) that extends further outward from the first side frame (322), and the first extension frame (324) will be described later.

[0057] The first transfer unit (310) transfers the first chamber (320) and positions it inside and outside the second space (102) of the outer unit (100). The first transfer unit (310) includes a first sliding part (312), a first guide part (313), and a first connecting part (314).

[0058] The first sliding part (312) extends in a second direction (Y direction) from the lower part of the second space (102), and as the first sliding part (312) slides, the first chamber (320) moves to the outside of the second space (102).

[0059] At this time, the first guide part (313) guides the sliding movement of the first sliding part (312) and is fixed along the second direction (Y) on the third side part (150). Thus, the first sliding part (312) slides along the first guide part (313) in the second direction (Y), and positions the first chamber (320) inside and outside the second space (102).

[0060] At this time, the first chamber (320) can be positioned inside and outside by penetrating the second side (112) by the first sliding part (312), and although not shown here, a separate opening may be formed in the second side (112) or a door that can be opened and closed may be formed.

[0061] Meanwhile, the first connecting part (314) extends from the end of the first sliding part (312), that is, the end adjacent to the first side frame (322), and consequently, the first connecting part (314) is positioned to face the first extension frame (324) in the vertical direction (Z).

[0062] That is, the first extension frame (324) is extended a predetermined length in the first direction (X) from the first side frame (322), and the first connecting part (314) is extended a predetermined length in the vertical direction (Z) from the end of the first sliding part (312) so as to be positioned to face each other.

[0063] Thus, the first vertical guide (340) is connected between the first extension frame (324) and the first connecting part (314). The first vertical guide (340) serves as a guide when the first chamber (320) moves in the vertical direction (Z).

[0064] At this time, the first vertical guide (340) may be, for example, a leaf spring, and in the initial state, the first vertical guide (340) is positioned with minimal displacement in the vertical direction (Z). Subsequently, as the first chamber (320) moves in the upward direction (+Z), the displacement of the first vertical guide (340) in the vertical direction (Z) increases, and this state of increased displacement will be explained with reference to the drawings described later.

[0065] The first vertical guide (340) can be formed at each of the four corners if the first chamber (320) is in the shape of a square block, and can be formed at regular intervals along the circumference if it is in the shape of a cylinder.

[0066] The above substrate chuck (330) is housed in the first chamber space (323) formed by the first chamber (320) and may have a block shape of a predetermined height. The substrate module (800) is mounted on the upper surface of the above substrate chuck (330).

[0067] That is, the substrate module (800) includes a substrate portion (810) and a resist (820) formed on the substrate portion (810), as shown in FIG. 5. Accordingly, the substrate module (800) is mounted on the substrate chuck (330).

[0068] At this time, the mounting sequence of the above-mentioned substrate module (800) is explained with reference to FIG. 5 as follows. That is, as previously explained, after the first chamber (320) is positioned outside the outer unit (100) through the second side (112) by the first transfer unit (310) (①), the substrate module (800) with the resist (820) mounted on the substrate part (810) is mounted on the substrate chuck (330) (②). Afterwards, the first chamber (320) is positioned into the second space (102) through the second side (112) by the first transfer unit (310) (③).

[0069] As described above, since the entire substrate module (800) is integrally mounted on the substrate chuck (330) and the substrate portion (810) is positioned on the upper surface of the substrate chuck (330), the problem of the corners of the substrate portion (810) being damaged by a separate fixing structure does not occur during the subsequent imprint process.

[0070] The first valve (350) extends into the interior of the first chamber (320) to supply air to the first chamber space (323) or to remove air from the first chamber space (323) to the outside. At this time, the first valve (350) can be connected to the first chamber space (323) by penetrating the first side frame (322) as illustrated.

[0071] The first sealing part (360) seals the space between the first chamber (320) and the second chamber (420) described later, thereby sealing the first chamber space (323). At this time, the first sealing part (360) is provided on the upper surface of the first side frame (322) to seal the space between the upper part of the first chamber (320) and the lower part of the second chamber (420). The first sealing part (360) may be, for example, an O-ring.

[0072] The stamp unit (400) accommodates a stamp module (700) inside and includes a second transfer unit (410), a second chamber (420), a second vertical guide (440), a second valve (450), and a second sealing part (460).

[0073] The second chamber (420) forms a predetermined second chamber space (423) inside and is located in the third space (103) of the outer unit (100) overall. It may have a square block shape or a cylinder shape, and its shape is not limited.

[0074] As previously explained, the second chamber (420) is located above the first chamber (320), and the positions of the first and second chambers (320, 420) can be swapped.

[0075] The second chamber (420) comprises a second base frame (421) and a second side frame (422) to form a second chamber space (423) that is open at the top and open at the center of the bottom, and closed at the sides. At this time, the second chamber (420) includes a second extension frame (424) that extends further outward from the second side frame (422), and the second extension frame (424) will be described later.

[0076] In the case of the second chamber (420) above, the center is opened through the second base frame (421) because a predetermined imprint process must be performed through the center, and such imprint process will be described later.

[0077] The second transfer unit (410) transfers the second chamber (420) and positions it inside and outside the third space (103) of the outer unit (100). The second transfer unit (410) includes a second sliding part (412), a second guide part (413), and a second connecting part (414).

[0078] The second sliding part (412) extends in a second direction (Y direction) from the lower part of the third space (103), and as the second sliding part (412) slides, the second chamber (420) moves to the outside of the third space (103).

[0079] At this time, the second guide part (413) guides the sliding movement of the second sliding part (412) and is fixed along the second direction (Y) on the third side part (150). Thus, the second sliding part (412) slides along the second guide part (413) in the second direction (Y), and positions the second chamber (420) inside and outside the third space (103).

[0080] At this time, the second chamber (420) can be positioned inside and outside by penetrating the third side (113) by the second sliding part (412), and although not shown here, a separate opening may be formed in the third side (113) or a door that can be opened and closed may be formed.

[0081] Meanwhile, the second connecting part (414) extends from the end of the second sliding part (412), that is, the end adjacent to the second side frame (422), and consequently, the second connecting part (414) is positioned to face the second extension frame (424) in the vertical direction (Z).

[0082] That is, the second extension frame (424) is extended a predetermined length in the first direction (X) from the second side frame (422), and the second connecting part (414) is extended a predetermined length in the vertical direction (Z) from the end of the second sliding part (412) so as to be positioned to face each other.

[0083] Thus, the second vertical guide (440) is connected between the second extension frame (424) and the second connecting part (414). The second vertical guide (440) serves as a guide when the second chamber (420) moves in the vertical direction (Z).

[0084] At this time, the second vertical guide (440) may be, for example, a leaf spring, and in the initial state, the second vertical guide (440) is positioned with minimal displacement in the vertical direction (Z). Subsequently, as the second chamber (420) moves in the upward direction (+Z), the displacement of the second vertical guide (440) in the vertical direction (Z) increases, and this state of increased displacement will be explained with reference to the drawings described later.

[0085] The second vertical guide (440) can be formed at each of the four corners if the second chamber (420) is in the shape of a square block, and can be formed at regular intervals along the circumference if it is in the shape of a cylinder.

[0086] The stamp module (700) is mounted on the second chamber space (423) of the second chamber (420).

[0087] At this time, the mounting sequence of the stamp module (700) is described below with reference to FIG. 4. That is, as previously explained, after the second chamber (420) is positioned outside the outer unit (100) through the third side (113) by the second transfer unit (410) (①), the stamp module (700) is mounted inside the second chamber (420) (②). Afterwards, the second chamber (420) is positioned into the third space (103) through the third side (113) by the second transfer unit (410) (③).

[0088] The structure of the stamp module (700) described above is explained in more detail as follows. That is, referring to FIG. 3, the stamp module (700) includes a stamp holder (710) and a stamp (720).

[0089] The stamp holder (710) comprises a transparent plate (713) and a housing (711), wherein the transparent plate (713) has a plurality of opening holes (714) formed therein. The housing (711) secures the side of the transparent plate (713), and the center of the housing (711) is formed as an open opening (712).

[0090] At this time, as the transparent plate (713) is composed of a transparent plate, light such as ultraviolet light can be transmitted during the imprint process. Additionally, as the opening holes (714) are formed, air can pass through during the imprint process so that the stamp (720) can be attached to the substrate module (800).

[0091] The stamp (720) is mounted on the stamp holder (710) as described above. At this time, in order for the stamp (720) to be stably mounted on the stamp holder (710), the stamp (720) and the stamp holder (710) must be attached to each other with a predetermined adhesive force. Thus, even if the position of the stamp (720) changes, such as being flipped over on the stamp holder (710), a stable mounting state can be maintained.

[0092] Meanwhile, the stamp (720) is composed of a base portion (721) and a pattern portion (722). The stamp (720) is mounted on the transparent plate (713) such that the pattern portion (722) faces the opposite side of the transparent plate (713). That is, one side of the stamp (720) is mounted on the front surface of the transparent plate (713), and the stamp (720) has a relatively large contact area and is positioned in the stamp holder (710).

[0093] Thus, the stamp module (700), in which the stamp (720) is attached to the stamp holder (710) as described above, is housed inside the second chamber (420) such that the stamp (720) faces downward, as shown in FIG. 4.

[0094] At this time, the stamp (720) that is stored facing downward is mounted such that the direction in which the pattern portion (722) of the stamp (720) faces contacts the second base frame (421) of the second chamber (420).

[0095] As illustrated, a mounting portion (425) is formed on the second base frame (421). The mounting portion (425) includes a plurality of protrusions that protrude upward, so that the edge portions of the other side of the stamp (720) come into contact with the mounting portion (425) and are mounted. At this time, since the pattern portion (722) is formed only in the center that does not come into contact with the mounting portion (425), only the edge portions of the base portion (721) come into contact with the mounting portion (425) and are mounted.

[0096] As described above, among the edge portions of the stamp (720), one side is positioned in contact with the protruding mounting portion (425), which is unavoidable for adhesion with the substrate module (800) during the imprint process. However, in the case of this embodiment, the stamp (720) has no separate contact portion except for the edge portion of one side that contacts the mounting portion (425), and thus only a minimum area for the imprint process is in contact with the mounting portion (425) and is positioned inside the second chamber (420).

[0097] Therefore, even when pneumatic pressure is supplied to the second chamber space (423) during a subsequent imprint process, the part of the stamp (720) that is damaged by the pressure applied by the pneumatic pressure can be minimized.

[0098] Meanwhile, the second valve (450) extends into the interior of the second chamber (420) to supply air to the second chamber space (423) or remove air from the second chamber space (423) to the outside. At this time, the second valve (450) can be connected to the second chamber space (423) by penetrating the second side frame (422) as illustrated.

[0099] The second sealing part (460) seals the space between the second chamber (420) and the upper surface part (140) to seal the second chamber space (423). At this time, the second sealing part (460) is provided on the upper surface of the second side frame (422) to seal the space between the upper part of the second chamber (420) and the lower part of the upper surface part (140). The second sealing part (460) may be, for example, an O-ring.

[0100] The support unit (500) is fixed on the upper fixing part (142) to fix the stamp module (700). The support unit (500) includes a support part (510) and an elastic part (520).

[0101] The support member (510) may have a shape similar to a so-called plunger that protrudes a predetermined length in the downward direction of the upper fixing member (142), and the elastic member (520) is interposed between the upper fixing member (142) and the support member (510). That is, the elastic member (520) is interposed on one side of the upper portion of the support member (510) inside the upper fixing member (142). At this time, the elastic member (520) may be, for example, a coil spring, and applies a predetermined pressure to the support member (510).

[0102] As shown in the illustration, the support member (510) may be provided in multiple numbers, and the lower end of the support member (510) comes into contact with the upper part of the stamp module (700) during the imprint process as shown in FIG. 7. Thus, a stable fixing force can be provided for the stamp module (700). In addition, since the stamp module (700) is fixed through the support member (510) which does not come into direct contact with the stamp (720), damage to the stamp (720) can be minimized when the stamp (720) is fixed during the imprint process.

[0103] The light source unit (600) is positioned above the upper part (141) and can provide light, for example, ultraviolet light, in a downward direction. At this time, in order for the light provided from the light source unit (600) to be effectively provided to the stamp (720) and the substrate module (800) located below, the upper fixing part (142) has an open central part, and a transparent window part (550) may be provided in the central part of the upper fixing part (142). Thus, the light provided from the light source unit (600) can pass through the window part (550) and be provided to the stamp (720) and the substrate module (800).

[0104] Below, an imprint process using an imprint device (10) having the above configuration is described.

[0105] FIGS. 6 to 10 are process diagrams specifically illustrating an imprint method using the imprint device of FIG. 1.

[0106] First, referring to FIG. 6, as previously described, when the substrate module (800) is mounted inside the first chamber (320) and positioned on the second space (102), and the stamp module (700) is mounted inside the second chamber (420) and positioned on the third space (103), the pressurizing unit (200) operates.

[0107] That is, according to the operation of the pressurizing unit (210), the pressurizing transfer unit (220) moves in the upward direction (+Z) and raises the first chamber (320) in the upward direction. At this time, the first vertical guide (340) stably guides the upward transfer of the first chamber (320), and positions the first chamber (320) upward as the displacement in the upward direction (Z) increases.

[0108] Additionally, when the first chamber (320) is moved upward, the first sealing part (360) comes into close contact with the lower surface of the second side frame (422) of the second chamber (420), thereby sealing the first chamber space (323). That is, during the sealing process of the first chamber space (323), damage caused by external force to the substrate module (800) as well as the stamp (720) is minimized.

[0109] Afterwards, referring to FIG. 7, as the pressurizing unit (210) continues to operate, the pressurizing transfer unit (220) is further moved in the upward direction (+Z), and the second chamber (420) in contact with the first chamber (320) is also raised in the upward direction. At this time, the displacement of the first vertical guide (340) in the upward direction (Z) increases further, and the displacement of the second vertical guide (440) in the upward direction (Z) also increases. Accordingly, the upward transfer of the second chamber (420) can be stably guided by the second vertical guide (440).

[0110] Additionally, when the second chamber (420) is moved upward, the second sealing part (460) comes into close contact with the lower surface of the upper fixing part (142), thereby sealing the second chamber space (423). That is, during the sealing process of the second chamber space (423), damage caused by external force to the substrate module (800) as well as the stamp (720) is minimized.

[0111] Furthermore, as the second chamber (420) moves upward, the housing (711) of the stamp holder (710) in the stamp module (700) comes into contact with the support member (510). At this time, since the support member (510) provides a predetermined pressure by the elastic member (520), the housing (711) receives a predetermined pressure in the downward direction (-Z). Thus, the upper part of the stamp module (700) is fixed by the support member (510) and the lower part is fixed by the seating member (425), maintaining a stable fixed state.

[0112] At this time, although the edge of the other side of the stamp (720) is fixed to the protruding mounting portion (425), only the corner portion of one side is in contact, so damage to the stamp (720) during the fixing and imprinting process can be minimized relatively.

[0113] Afterward, referring to FIG. 8, the second valve (450) is opened, and air (451) is supplied from the outside to the second chamber space (423). Additionally, the air (451) is also supplied to the stamp (720) through the opening holes (714) of the transparent plate (713). That is, due to this pneumatic pressure, the stamp (720) is driven downward (-Z) and eventually comes into contact with the resist (820) of the substrate module (800).

[0114] At this time, as shown in FIG. 9, when light (610) is provided through the light source unit (600), the shape of the pattern portion (722) formed on the stamp (720) is transferred to the resist (820), and a so-called imprint process is performed. Accordingly, a predetermined imprint pattern is transferred to the resist (820).

[0115] Afterwards, as shown in FIG. 10, when the second valve (450) is opened again and the air supplied to the second chamber space (423) is removed to the outside, the stamp (720) that was in contact with the substrate module (800) returns to its original position, and thus the transfer of the imprint pattern is terminated.

[0116] Of course, although not shown in the city, the first valve (350) above can perform opening and closing operations suitable for the imprint process as described above.

[0117] At this time, regarding the operation of the first valve (350) and the second valve (450), the following two processes may be possible.

[0118] First, the first valve (350) performs operation with respect to the first chamber space (323), and the second valve (450) performs operation with respect to the second chamber space (423). Accordingly, while the imprint process is being performed, the first valve (350) is always open so that the first chamber space (323) can be maintained at the same pressure as the surrounding atmospheric pressure, and thus the process of forming or releasing air pressure in the second chamber space (423) can be performed more smoothly.

[0119] In contrast, when the stamp (720) is brought into contact with the substrate module (800) while the second valve (450) is opened to form air pressure in the second chamber space (423), the first valve (350) can also be opened to form a vacuum inside the first chamber space (323). Thus, the contact process can be performed more smoothly. Additionally, when the air in the second chamber space (423) is discharged to the outside through the second valve (450) to detach the stamp (720) from the substrate module (800), if air is provided into the interior of the first chamber space (323) through the first valve (350), the detachment process can be performed more smoothly.

[0120] FIG. 11 is an internal structural diagram illustrating an imprint device according to another embodiment of the present invention. FIG. 12a is a cross-sectional view illustrating the stamp module of FIG. 11, and FIG. 12b is a cross-sectional view illustrating the adapter module of FIG. 11.

[0121] The imprint device (11) according to the present embodiment is substantially identical to the imprint device (10) described with reference to FIGS. 1 to 5, except that the shape of the stamp module (701) and the adapter module (900) are additionally provided. Accordingly, the same reference numbers are used for identical components, and redundant descriptions are omitted.

[0122] Referring to FIGS. 11 to 12b, the imprint device (11) according to the present embodiment is applied when the stamp (740) is relatively small in size.

[0123] That is, when the size of the stamp (740) is relatively small, and accordingly the size of the substrate module (801) is also relatively small, the stamp (740) can be more stably fixed to the imprint device (10) designed to have a relatively large storage space.

[0124] To this end, the adapter module (900) is additionally provided. At this time, the adapter module (900) is interposed between the second chamber (420) and the stamp module (701), as shown in FIG. 11.

[0125] Specifically, the stamp module (701) includes a stamp holder (730) that extends at an overall angle to secure a relatively small stamp (740) as in FIG. 12a.

[0126] The stamp holder (730) comprises a housing (731) having a central opening (734) formed therein, and a transparent plate (735) located in the center of the housing (731). At this time, as previously described, a plurality of opening holes (736) are formed in the transparent plate (735).

[0127] Additionally, the stamp (740) is mounted on the transparent plate (735), and at this time, the pattern portion (722) is mounted so as to face the opposite side of the transparent plate (735), as illustrated.

[0128] At this time, the housing (731) is relatively small in size compared to the stamp (740), and as previously explained, the housing (731) must be supported by the support member (510), so it must be extended relatively long. To this end, the housing (731) includes a fixed housing (732) that extends so that its upper surface contacts the support member (510), and an extension housing (733) that extends from the fixed housing (732) in an inclined direction to the transparent plate (735) to fix the side of the transparent plate (735).

[0129] Thus, the housing (731) extends relatively long in an overall inclined direction and not only fixes the transparent plate (735) of a relatively small size, but also, while mounted inside the second chamber (420), comes into contact with the support member (510) to enable stable position fixation.

[0130] As described above, since the stamp (740) is small in size, the stamp (740) cannot be directly mounted on the mounting portion (425) of the second chamber (420). Accordingly, the adapter module (900) is interposed so that one side is mounted on the mounting portion (425) while the other side can fix the stamp (740).

[0131] Specifically, the adapter module (900) includes a body part (930), an extension base (910), a second seating part (920), and a third sealing part (940), as shown in FIG. 12b.

[0132] One side of the body portion (930) is mounted on the seating portion (425), and the body portion (930) extends in an inclined direction like the extension housing (733). Thus, the extension base (910) is extended for a predetermined length at the end of the body portion (930), and the second seating portion (920) is formed on the extension base (910).

[0133] At this time, the extension base (910) includes an opening (911) in the center, which forms a space through which light is transmitted during the imprint process as previously described and through which the stamp (740) and the substrate module (801) can come into contact with each other.

[0134] Additionally, the stamp (740) is placed on the second mounting portion (920). That is, the second mounting portion (920) fixes the edge portion of the base portion (741) where the pattern portion (742) is not formed on the stamp (740).

[0135] That is, the adapter module (900) is interposed to additionally form the second mounting portion (920) in which the stamp (740) of a relatively small size can be seated and fixed, and the body portion (930) of the adapter module (900) is seated and fixed on the mounting portion (425) included in the existing second chamber (420).

[0136] Ultimately, as described above, by replacing the wide gap of the above-mentioned mounting portion (425) with a narrow gap as in the above-mentioned second mounting portion (920), the stamp (740) of a relatively small size can also be stably fixed.

[0137] Meanwhile, the third sealing portion (940) is interposed on the lower surface of the body portion (930) to perform sealing when the body portion (930) is mounted on the seating portion (425).

[0138] As described above, with the additional provision of the adapter module (900), the stamp (740) can be stably fixed regardless of the size of the stamp (740). That is, adapter modules of various sizes can be manufactured considering the size of the stamp (740), and through this, an imprint process for stamps of various sizes can be performed using a single imprint device (11).

[0139] FIG. 13 is a process diagram illustrating an imprint method using the imprint device of FIG. 11.

[0140] Referring to FIG. 13, even when performing an imprint process using the imprint device (11) of FIG. 11, as the pressurized transfer unit (220) rises, the first chamber (320) and the second chamber (420) rise, and thus the first and second chamber spaces (323, 432) are all sealed.

[0141] Afterwards, upon the provision of the air (451), the stamp (740) of a relatively small size comes into contact with the substrate module (801), and the pattern portion (742) is transferred to the resist (840) of the substrate portion (830), thereby forming an imprint pattern.

[0142] In this case, the detailed imprint process steps are as described above with reference to FIGS. 6 to FIGS. 10, so a redundant description is omitted.

[0143] Even in the imprint process according to this embodiment, even if the size of the stamp (740) is relatively small, the imprint process is performed while the upper part of the stamp module (701) is stably fixed by the support member (510), so the alignment between the stamp (740) and the substrate module (801) is stable, and a precise imprint process can be performed accordingly.

[0144] According to the embodiments of the present invention as described above, the stamp and the substrate are each housed outside the outer unit and then moved into the interior of the outer unit to perform an imprint process, thereby facilitating the mounting of the stamp and the substrate and improving the convenience and speed of the process.

[0145] In particular, the stamp is housed in the stamp module while mounted on a separate stamp module, that is, while fixed to a stamp holder, and the stamp module is seated on the frame of the second chamber, thereby minimizing the phenomenon of the stamp sagging due to its own weight while the imprint process is not being performed, which can improve precision and reliability in the imprint process.

[0146] At this time, a seating portion is formed on the frame of the second chamber, that is, the second base frame, to fix only the edge of the other side of the stamp and to contact the stamp, and while one side of the stamp is entirely fixed to the stamp holder, the stamp holder is fixed by a separate support unit, so that damage or breakage of the fixed portion of the stamp can be minimized during the imprint process.

[0147] In particular, the support unit provides a predetermined pressure toward the stamp holder by means of elastic force, thereby providing sufficient support force for the stamp holder.

[0148] In addition, when the stamp is housed inside the second chamber and the substrate is housed inside the first chamber, the sealing of the first chamber and the second chamber is performed through separate sealing portions provided on the upper surfaces of the first chamber and the second chamber, so that no separate pressure is required to be applied to the stamp or the substrate to maintain the sealed state, and thus damage or breakage of the stamp or the substrate can be minimized during the same imprint process.

[0149] In addition, in order to perform an imprint process with the pressurizing unit located at the bottom, the first chamber is moved toward the second chamber and the second chamber is moved toward the upper surface of the outer shape unit, and the movement in the vertical direction can be stably guided by the first and second vertical guides connected to the sides of the first chamber and the second chamber.

[0150] At this time, each of the first and second vertical guides is composed of a so-called leaf spring and has an elastic hinge structure, so that the vertical movement of the first and second chambers is implemented more stably, and space utilization can be improved while minimizing the complexity of the design inside the outer unit.

[0151] Furthermore, when the stamp is relatively small in size, a separate adapter module is interposed between the stamp module and the second chamber, so that the stamp module can be stably fixed according to the size of various stamps.

[0152] At this time, the adapter module is fixed to the second base frame of the second chamber through a separate sealing part to enhance the sealing effect, and since a seating part that fixes the edge of the other side of the stamp is formed on the extended base, it is possible to fix the stamp in a state substantially identical to the fixed state when the adapter module is omitted.

[0153] In addition, the stamp module can also be designed in various ways depending on the size of the stamp, and may include a housing that extends in an overall inclined direction to minimize interference with the adapter module and stably maintain a fixed state with the upper support unit. Thus, even when the size of the stamp is small, stable fixation of the stamp is possible without sagging, and not only is a stable fixed state maintained during the imprint process, but damage to the stamp can also be minimized.

[0154] Although the present invention has been described above with reference to preferred embodiments, those skilled in the art will understand that various modifications and changes can be made to the invention without departing from the spirit and scope of the invention as set forth in the following claims. Explanation of the symbols

[0155] 10, 11 : Imprint device 100 : Appearance unit 200: Pressurizing unit 300: Substrate unit 310: 1st transfer unit 320: 1st chamber 330 : Base chuck 340 : First vertical guide 350: First valve 360: First sealing part 400: Stamp Unit 410: Second Transfer Unit 420: 2nd chamber 440: 2nd vertical guide 450: Second valve 460: Second sealing part 500 : Support unit 510 : Support section 520 : Elastic part 600 : Light source unit 700, 701: Stamp Module 710, 730: Stamp Holder 720, 740 : Stamp 800 : Board module 900 : Adapter module

Claims

Claim 1 An imprint device comprising: an outer unit forming an internal space; a stamp module including a stamp and a stamp holder that fixes the stamp; a substrate unit that is inserted into the internal space after housing a substrate module in a first chamber such that the resist faces upward; a stamp unit that is inserted into the internal space after housing the stamp module such that the pattern portion formed on the stamp faces downward inside a second chamber space formed by a second chamber; and a pressurizing unit that positions the stamp and the substrate module adjacently and seals the first and second chambers, wherein the stamp holder comprises a transparent plate on which the surface without the pattern portion formed is entirely mounted, and a housing that fixes the side of the transparent plate. Claim 2 An imprint device according to claim 1, characterized in that an opening hole is formed in the transparent plate. Claim 3 An imprint device according to claim 2, wherein the second chamber comprises a second base frame extending horizontally so as to have an opening in the center; and a second side frame extending upward from the second base frame, wherein the second base frame has a seating portion formed therein that contacts the edge of the other side of the stamp. Claim 4 An imprint device according to paragraph 3, further comprising a support unit located above the stamp unit and applying a predetermined pressure to the housing as the second chamber is sealed. Claim 5 An imprint device according to claim 4, wherein the support unit comprises: a support portion that contacts the housing; and an elastic portion that is interposed between the upper surface portion of the outer shape unit and the support portion and applies elastic force. Claim 6 An imprint device according to claim 1, wherein the substrate unit comprises: a first transfer unit for transferring the first chamber to the inside and outside of the internal space; and a vertical guide extending between the side of the first chamber and the first transfer unit. Claim 7 An imprint device according to claim 1, wherein the stamp unit comprises: a second transfer unit for transferring the second chamber to the inside and outside of the internal space; and a vertical guide extending between the side of the second chamber and the second transfer unit. Claim 8 An imprint device according to claim 6 or 7, wherein the vertical guide is characterized by an increase in displacement in the vertical direction as the stamp and the substrate module are adjacent to each other. Claim 9 An imprint device according to claim 8, wherein the vertical guide is a plate spring. Claim 10 An imprint device according to claim 1, wherein the substrate unit is located below the stamp unit, the pressurizing unit is located below the substrate unit, a first sealing part that performs sealing with the second chamber is interposed on the upper surface of the first chamber, and a second sealing part that performs sealing with the upper surface of the outer shape unit is interposed on the upper surface of the second chamber. Claim 11 An imprint device according to claim 1, further comprising an adapter module interposed between the stamp module and the second base frame of the second chamber. Claim 12 An imprint device according to claim 11, characterized in that an opening is formed in the transparent plate and the housing is extended by a predetermined length in an inclined direction. Claim 13 An imprint device according to claim 12, wherein the adapter module comprises: a body portion extending along the extension direction of the housing; an extension base extending horizontally from the body portion so as to have an opening in the center; and a third sealing portion formed on the lower surface of the body portion and seated on the second base frame, wherein the body portion has a seating portion formed thereon that contacts the edge of the other side of the stamp. Claim 14 An imprint device according to claim 1, further comprising a light source unit provided on the upper surface of the outer shape unit to provide light to the stamp, wherein the substrate unit comprises a first valve that provides air into the interior of the first chamber, and the stamp unit comprises a second valve that provides air into the interior of the second chamber. Claim 15 An imprint method comprising: a step of housing a substrate module in a first chamber of a substrate unit located outside of an outer unit such that the resist faces upward; a step of housing a stamp module in a second chamber space formed by a second chamber of a stamp unit located outside of the outer unit such that the pattern portion formed on the stamp faces downward; a step of bringing the first chamber and the second chamber into the inner space of the outer unit; a step of positioning the stamp and the substrate module adjacently using a pressurizing unit and sealing the first and second chambers; and a step of supplying air into the interior of the second chamber and then irradiating light to transfer the pattern portion of the stamp to the resist of the substrate module, wherein the stamp module includes a stamp holder that fixes the stamp, and the stamp holder includes a transparent plate on which the surface on which the pattern portion is not formed is entirely mounted, and a housing that fixes the side of the transparent plate.

Images