Probe card with enhanced fine pitch response

Abstract

The present invention relates to a probe card with enhanced fine pitch response, comprising: an upper guide plate having a plurality of first insertion holes formed on one side; a first lower guide plate spaced apart from the upper guide plate and having a plurality of second insertion holes formed on one side corresponding to the plurality of first insertion holes; a second lower guide plate coupled to the lower part of the first lower guide plate and having a third insertion hole formed on one side communicating with the plurality of second insertion holes; and a plurality of needle units, each having an upper end inserted into the plurality of first insertion holes and supported on one side of the inner surface of the upper guide plate, and a lower end inserted into the plurality of second insertion holes and then inserted into the third insertion hole and supported on one side of the inner surface of the first lower guide plate and the second lower guide plate, and arranged to simultaneously contact a single contact terminal, wherein one side of the inner surface of the second lower guide plate having the third insertion hole is positioned at a location corresponding to the inner side of at least one of the plurality of second insertion holes, and the plurality The present invention is characterized by forming a fine pitch by applying pressure to the lower end of at least one needle unit in the direction of the center of the third insertion hole, thereby inducing the lower end of the at least one needle unit to be positioned in close proximity to the lower end of another needle unit. According to the present invention as described above, since a fine pitch between needle units can be achieved by using existing needle units as they are, manufacturing costs required for shaping the needle units can be reduced. Furthermore, since the fine pitch between needle units can be formed more finely, inspection of ultra-miniature inspection targets is possible, and the reliability of the inspection is significantly improved.

Description

Technology Field

[0001] The present invention relates to a probe card with enhanced fine pitch support, and more specifically, to a probe card with enhanced fine pitch support that not only achieves fine pitch between needle units while using existing needle units as is, but also enables the formation of finer fine pitch between needle units. Background Technology

[0002] Generally, the semiconductor manufacturing process involves a fabrication process that forms a pattern on a wafer, an Electrical Die Sorting (EDS) process that inspects the electrical characteristics of each chip constituting the wafer, and an assembly process that assembles the patterned wafer into individual chips.

[0003] Here, the EDS process is performed to identify defective chips among the chips constituting the wafer, and a testing device called a probe card is mainly used, which applies electrical signals to the chips constituting the wafer and determines defects based on signals checked from the applied electrical signals.

[0004] These probe cards are equipped with multiple needles that apply electrical signals by contacting the patterns of each chip constituting the wafer. Typically, the needles of the probe card are brought into contact with the electrode pads of each device on the wafer, and a specific current is passed through these needles to measure the electrical characteristics output at that time.

[0005] Meanwhile, as recent semiconductor devices are becoming increasingly miniaturized and highly integrated at the same time as design rules become finer, in order to connect with the patterns of the semiconductor devices, the needles of the probe card must also be miniaturized to an appropriate size, and a fine pitch is required in which needle units are arranged at a narrower distance from each other.

[0006] Furthermore, recently, there is a growing demand for finer needle pitch, such as in structures where multiple needles come into contact with a single object to improve inspection reliability.

[0007] For this reason, the applicant has filed Korean Published Patent No. 10-2023-0167863, “Needle Unit for Electrical Characteristic Inspection Device.”

[0008] Korean Published Patent No. 10-2023-0167863 described above is manufactured through a MEMS (Micro Electro Mechanical Systems) process and comprises a body part having a polygonal cross-section and a tip part extending downward from the lower part of the body part. The tip part of the needle unit is formed to have a cross-sectional area smaller than the cross-sectional area of ​​the body part, and a set of tip parts, each consisting of a plurality of needle units contacting a single contact terminal, is formed in an area adjacent to each other on the lower surface of the body part, thereby forming a narrow pitch between the needles and allowing multiple needles to contact a single contact terminal, which can significantly improve inspection reliability.

[0009] However, Korean Patent Publication No. 10-2023-0167863 had a problem in that, as the body of the needle is manufactured through a MEMS process, the manufacturing of the needle is very difficult, and the spacing between the tip portions forming the narrow pitch between the needles is set to a preset spacing, so it is not easy to respond to cases where a finer narrow pitch between the needles is required depending on the object to be inspected. Prior art literature

[0010] Korean Published Patent No. 10-2023-0167863 (Needle unit for electrical characteristic inspection device, Dec. 12, 2023) The problem to be solved

[0011] The present invention has been devised to solve the above-mentioned problems, and the objective of the present invention is to provide a probe card with enhanced fine pitch compatibility that not only enables the achievement of fine pitch between needle units while using existing needle units as is, but also allows for the formation of a finer fine pitch between needle units. means of solving the problem

[0012] According to the present invention for achieving the above objective, the invention comprises an upper guide plate having a plurality of first insertion holes formed on one side; a first lower guide plate spaced apart downward from the upper guide plate and having a plurality of second insertion holes formed on one side corresponding to the plurality of first insertion holes; a second lower guide plate coupled to the lower part of the first lower guide plate and having a third insertion hole formed on one side communicating with the plurality of second insertion holes; and a plurality of needle units, each having an upper end inserted into the plurality of first insertion holes and supported on one side of the inner surface of the upper guide plate, and a lower end inserted into the plurality of second insertion holes and then inserted into the third insertion hole and supported on one side of the inner surface of the first lower guide plate and the second lower guide plate, and arranged to simultaneously contact a single contact terminal, wherein one side of the inner surface of the second lower guide plate having the third insertion hole is positioned at a location corresponding to the inner side of at least one of the plurality of second insertion holes, and at least one of the plurality of needle units A probe card with enhanced fine pitch response is provided, characterized by forming a fine pitch by inducing the lower portion of at least one needle unit to be positioned close to the lower portion of another needle unit by pressing the lower portion of the needle unit toward the center of the third insertion hole.

[0013] Here, the fine pitch between the lower ends of the plurality of needle units can be adjusted according to the position on one side of the inner surface of the second lower guide plate disposed within the second insertion hole.

[0014] In addition, the fine pitch between the lower portions of the plurality of needle units can be adjusted according to the protruding length of the lower portions of the plurality of needle units protruding downward from the second lower guide plate. Effects of the invention

[0015] According to the present invention as described above, since a fine pitch between needle units can be achieved by using existing needle units as is, not only can manufacturing costs required for shaping the needle units be reduced, but the fine pitch between needle units can also be formed more finely, thereby enabling inspection of ultra-miniature inspection targets while significantly improving the reliability of the inspection. Brief explanation of the drawing

[0016] FIG. 1 schematically illustrates a probe card according to one embodiment of the present invention. FIG. 2 is an enlarged view of area A of FIG. 1. FIGS. 3a to 3c are drawings for explaining various arrangement structures of the first and second lower guide plates according to an embodiment of the present invention, FIGS. 4a and 4c are drawings for explaining a fine pitch adjustment structure through the lower portion protrusion length of a needle unit according to an embodiment of the present invention. Specific details for implementing the invention

[0017] The present invention will be described in more detail below with reference to the drawings. It should be noted that identical components in the drawings are indicated by the same reference numerals wherever possible. Furthermore, detailed descriptions of known functions and configurations that could unnecessarily obscure the essence of the invention are omitted.

[0018] FIG. 1 schematically illustrates a probe card according to one embodiment of the present invention, and FIG. 2 is an enlarged view of area A of FIG. 1.

[0019] Referring to FIGS. 1 and 2, a probe card (1) according to one embodiment of the present invention is capable of achieving a fine pitch between needle units while using existing needle units as is, and also capable of forming a finer fine pitch between needle units, and includes an upper guide plate (10), a first lower guide plate (20), a second lower guide plate (30), and a pair of needle units (40).

[0020] The upper guide plate (10) is formed in the shape of a plate having a certain thickness, and two first insertion holes (11) are formed on one side at a certain distance apart, and a pair of needle units (40) are inserted into each first insertion hole (11), and the upper end of each needle unit (40) is supported on one side of the inner surface where the first insertion hole (11) is formed.

[0021] The first lower guide plate (20) is formed in a plate shape having a certain thickness, similar to the upper guide plate (10), and two second insertion holes (21) are formed on one side corresponding to two first insertion holes (11), and is positioned at a certain distance from the upper guide plate (10) at the lower part of the upper guide plate (10).

[0022] And, in the first lower guide plate (20), a pair of needle units (40) are inserted into each second insertion hole (21), and the lower end of each needle unit (40) is supported on one side of the inner surface where each second insertion hole (21) is formed.

[0023] The second lower guide plate (30) is formed in a plate shape having a certain thickness, like the upper guide plate (10), and a third insertion hole (31) is formed on one side corresponding to the two second insertion holes (21) and is connected to the two insertion holes (21), and is coupled to the lower part of the first lower guide plate (20).

[0024] Here, one side and the other side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed are positioned at a location corresponding to the inner side of the two second insertion holes (21).

[0025] Accordingly, the lower end of a pair of needle units (40) that pass through each of the second insertion holes (21) of the first lower guide plate (20) and are inserted into the third insertion hole (31) of the second lower guide plate (30) is pressed toward the center of the third insertion hole (31) by the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed, and is bent and deformed in a direction that brings them closer together.

[0026] In addition, a probe card (1) according to one embodiment of the present invention may include a jig plate (J) interposed between an upper guide plate (10) and a first lower guide plate (20) to maintain the spacing between an upper guide plate (10) and a first lower guide plate (20).

[0027] A pair of needle units (40) are connected to one contact terminal of an object to be inspected to conduct a specific current and to transmit the electrical signal output therefrom to an external test device. Each upper end is supported on one side of the inner surface of an upper guide plate (10) in which a first insertion hole (11) is formed, and each lower end is supported on one side of the inner surface of a first lower guide plate (20) in which a second insertion hole (21) is formed, and on one side and the other side of the inner surface of a second lower guide plate (30) in which a third insertion hole (31) is formed.

[0028] A pair of needle units (40) each have their lower ends pressed toward the center of the third insertion hole (31) by the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed, thereby achieving a fine pitch by bending and deforming in a direction that brings them closer to each other. This structure will be explained in more detail below with reference to the drawings.

[0029] As seen in the enlarged view of FIG. 2, the present invention is positioned such that one side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed is positioned on the inner side of the second insertion hole (21) which is located L1 away from one side of the inner surface of the first lower guide plate (20) in which the second insertion hole (21) is formed.

[0030] Accordingly, the lower end of the first needle unit (41) inserted into one of the second insertion holes (21) and the third insertion hole (31) is supported on one side of the inner surface of the first lower guide plate (20) and at the same time is pressed in the direction toward the center of the third insertion hole (31) by the inner surface of the second lower guide plate (30) which is positioned at an inner distance of L1 from one side of the inner surface of the first lower guide plate (20), and is bent and deformed in a direction close to the lower end of the second needle unit (42) inserted into the other second insertion hole (21) and the third insertion hole (31).

[0031] In addition, the other side of the inner surface of the second lower guide plate (30) having a third insertion hole (31) formed therein is positioned on the inner side of the second insertion hole (21) which is located at a distance of L2 from one side of the inner surface of the first lower guide plate (20) having another second insertion hole (21) formed therein.

[0032] Accordingly, the lower end of the second needle unit (42) inserted into the other second insertion hole (21) and the third insertion hole (31) is supported on one side of the inner surface of the first lower guide plate (20) and, at the same time, is pressed in the direction toward the center of the third insertion hole (31) by the other side of the inner surface of the second lower guide plate (20) which is positioned at an inner distance of L2 from one side of the inner surface of the first lower guide plate (20), and is bent and deformed in a direction close to the lower end of the first needle unit (41) inserted into either the second insertion hole (21) and the third insertion hole (31).

[0033] As described above, the present invention allows for the lower end of a first needle unit (41) inserted into one of the second insertion holes (21) and the third insertion hole (31), and the lower end of a second needle unit (42) inserted into the other of the second insertion holes (21) and the third insertion hole (31), to be pressed in the direction of the center of the third insertion hole (31) and bent and deformed in a direction that brings them closer together, thereby enabling the achievement of fine pitch between needle units while using the existing needle unit (40) as is, thus reducing the manufacturing cost required for shaping the needle unit.

[0034] In particular, as seen in the enlarged view, the lower ends of the first and second needle units (41, 42) are bent and deformed in a direction that brings them closer to each other, so that they can make more stable contact with the contact terminal (T) of the object to be inspected (G), which has a hemispherical shape.

[0035] In addition, the present invention can adjust the fine pitch between the lower portions of the first and second needle units (41, 42) by varying the diameter of the third insertion hole (31) of the second lower guide plate (30) or changing the formation position of the third insertion hole (31), thereby increasing or decreasing the distance L1 between one side of the inner surface of the first lower guide plate (20) where one second insertion hole (21) is formed and one side of the inner surface of the second lower guide plate (30) where the third insertion hole (31) is formed, and the distance L2 between one side of the inner surface of the first lower guide plate (20) where another second insertion hole (21) is formed and the other side of the inner surface of the second lower guide plate (30) where the third insertion hole (31) is formed.

[0036] In particular, the present invention increases both the distance L1 between one side of the inner surface of the first lower guide plate (20) in which one second insertion hole (21) is formed and one side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed, and the distance L2 between one side of the inner surface of the first lower guide plate (20) in which the other second insertion hole (21) is formed and the other side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed, thereby allowing the fine pitch between the first and second needle units (41, 42) to be formed more finely, thus enabling inspection of a miniaturized object to be inspected while significantly improving the reliability of the inspection.

[0038] FIGS. 3a to 3c are drawings for explaining various arrangement structures of the first and second lower guide plates according to an embodiment of the present invention.

[0039] Below, with reference to the drawings, we will examine various arrangement structures of the first and second lower guide plates into which the lower ends of a pair of needle units are inserted and supported.

[0040] As shown in FIG. 3a, the present invention can form the same distance L1 between one side of the inner surface of the first lower guide plate (20) in which one second insertion hole (21) is formed and one side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed, and the same distance L2 between one side of the inner surface of the first lower guide plate (20) in which the other second insertion hole (21) is formed and the other side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed.

[0041] In addition, although not specifically illustrated in the drawings, the present invention may form the distance L1 between one side of the inner surface of the first lower guide plate (20) in which one second insertion hole (21) is formed and one side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed, and the distance L2 between one side of the inner surface of the first lower guide plate (20) in which the other second insertion hole (21) is formed and the other side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed differently from each other.

[0042] In addition, as shown in FIG. 3b, the present invention may form a distance L1 between one side of the inner surface of the first lower guide plate (20) in which one second insertion hole (21) is formed and one side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed, and may not form a distance L2 between one side of the inner surface of the first lower guide plate (20) in which the other second insertion hole (21) is formed and the other side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed.

[0043] In addition, as shown in FIG. 3c, the present invention may prevent a distance L1 from being formed between one side of the inner surface of the first lower guide plate (20) in which one second insertion hole (21) is formed and one side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed, and may also form a distance L2 between one side of the inner surface of the first lower guide plate (20) in which the other second insertion hole (21) is formed and the other side of the inner surface of the second lower guide plate (30) in which the third insertion hole (31) is formed.

[0044] As described above, the present invention can easily adjust the fine pitch between the first and second needle units (41, 42) by varying the diameter of the third insertion hole (31) of the second lower guide plate (30) or by changing the position of the third insertion hole (31), thereby forming a distance L1 between one side of the inner surface of the first lower guide plate (20) where one second insertion hole (21) is formed and one side of the inner surface of the second lower guide plate (30) where the third insertion hole (31) is formed, and a distance L2 between one side of the inner surface of the first lower guide plate (20) where another second insertion hole (21) is formed and the other side of the inner surface of the second lower guide plate (30) where the third insertion hole (31) is formed.

[0045] In the above-described embodiment, the structure was described as being limited to a structure in which a pair of needle units are installed on first and second lower guide plates arranged so that two second insertion holes communicate with one third insertion hole; however, the present invention is not limited thereto, and may be formed as a structure in which three or more needle units are installed on first and second lower guide plates arranged so that three or more second insertion holes communicate with one third insertion hole, as needed.

[0047] FIGS. 4a to 4c are drawings for explaining a fine pitch adjustment structure through the protruding length of the lower portion of a needle unit according to an embodiment of the present invention.

[0048] As shown in FIG. 4a, the present invention can be configured such that the lower portion protrusion length of the first needle unit (41) and the second needle unit (42) protruding downward from the second lower guide plate (30) is D1, thereby forming a fine pitch between the lower portions of a pair of needle units (40) that are bent and deformed in a direction of approaching each other at a distance of M1.

[0049] In addition, as shown in FIG. 4b, the present invention may also have the lower end protruding length of a pair of needle units (40) protruding downward from the second lower guide plate (30) protruded by D2, which is smaller than D1, so that the fine pitch between the lower ends of the pair of needle units (40) that are bent and deformed in a direction of approaching each other is formed at a spacing of M2, which is larger than M1.

[0050] In addition, as shown in FIG. 4c, the present invention may extend the lower end protrusion length of a pair of needle units (40) protruding downward from the second lower guide plate (30) by D3, which is greater than D1, so that the fine pitch between the lower ends of the pair of needle units (40) that are bent and deformed in a direction of approaching each other is formed at a spacing of M3, which is smaller than M1.

[0051] As described above, the present invention can easily adjust the fine pitch between the lower portions of a pair of needle units (40) according to the protruding length of the lower portions of a pair of needle units (40) protruding downward from the second lower guide plate (30).

[0053] Although the present invention has been described in relation to the preferred embodiments above, various modifications and variations are possible without departing from the essence and scope of the invention. Accordingly, the appended claims will include such modifications and variations that fall within the essence of the invention. Explanation of the symbols

[0054] 1 : Probe card 10 : Upper guide plate 11 : First insertion hole 20 : First lower guide plate 21 : Second insertion hole 30 : Second lower guide plate 31 : 3rd insertion hole 40 : Needle unit 41 : 1st Needle Unit 42 : 2nd Needle Unit J : Jig plate T : Contact terminal

Claims

Claim 1 An upper guide plate having a plurality of first insertion holes formed on one side; a first lower guide plate spaced apart downward from the upper guide plate and having a plurality of second insertion holes formed on one side corresponding to the plurality of first insertion holes; a second lower guide plate coupled to the lower part of the first lower guide plate and having a third insertion hole formed on one side communicating with the plurality of second insertion holes; and a plurality of needle units, each having an upper end inserted into each of the plurality of first insertion holes and supported on one side of the inner surface of the upper guide plate, and a lower end inserted into each of the plurality of second insertion holes and then inserted into the third insertion hole and supported on one side of the inner surface of the first lower guide plate and the second lower guide plate, and arranged to simultaneously contact a single contact terminal, wherein one side of the inner surface of the second lower guide plate having the third insertion hole formed is positioned at a position corresponding to the inner side of at least one of the plurality of second insertion holes, and the lower end of at least one of the plurality of needle units is positioned such that the A probe card with enhanced fine pitch compatibility, characterized by forming a fine pitch by inducing the lower end of at least one needle unit to be positioned close to the lower end of another needle unit by applying pressure in the direction of the center of the third insertion hole. Claim 2 A probe card with enhanced fine pitch response according to claim 1, characterized in that the fine pitch between the lower portions of the plurality of needle units is adjusted according to the position on one side of the inner surface of the second lower guide plate disposed within the second insertion hole. Claim 3 A probe card with enhanced fine pitch response according to claim 1, characterized in that the fine pitch between the lower portions of the plurality of needle units is adjusted according to the protruding length of the lower portions of the plurality of needle units protruding downward from the second lower guide plate.

Images