Wafer storage container and assembly method

Abstract

A wafer storage container and an assembly method are disclosed. A wafer storage container according to one aspect of the present invention comprises: a main body having a receiving space for storing a wafer and having at least one intake port and an exhaust port formed at the bottom; a fluid distributor including a body portion extending in the height direction and having a plurality of distribution holes formed on one surface, and a first check valve housing protruding downward from the body portion and penetrating the intake port; a first check valve structure received in the first check valve housing; and a nut coupled to the first check valve housing on the outside of the main body; wherein a first screw thread is formed on the outer surface of the first check valve housing and a second screw thread capable of being coupled to the first screw thread is formed on the inner surface of the nut, so that the first check valve housing and the nut can be bolt-nut coupled.

Description

Technology Field

[0001] The present invention relates to a wafer storage container, and more specifically, to a wafer storage container equipped with a fluid distributor capable of evenly distributing purge gas inside. Background Technology

[0002] Wafers are a core material required to manufacture semiconductors and are produced and processed through various stages. During transportation and storage, these wafers are housed in separate wafer containers to protect them from contamination or damage.

[0003] Generally, a wafer storage container consists of a box-shaped container with an open front and a door to close the open side of the container. Wafers are stored in multiple layers in a retainer installed inside the container.

[0004] At this time, to prevent impurities from adhering to the wafer or oxidation, a purge gas such as nitrogen is injected into the interior of the wafer storage container. A fluid distributor may be installed inside the wafer storage container to ensure that this purge gas is distributed uniformly.

[0005] Generally, purge gas is injected into the container through an inlet port and air inside the container exits through an outlet port, and these inlet and outlet ports are typically located on the bottom surface of the container. Additionally, the inlet and outlet ports may be equipped with a filter for filtering the purge gas and a check valve to control the purge gas to flow in one direction.

[0006] Containers equipped with this mechanism can be reused after cleaning. However, during cleaning, the fluid distributor and check valve must be removed; contaminants could enter the interior of the container during the removal and reinstallation process of the fluid distributor and check valve. The problem to be solved

[0007] The present invention aims to solve the above-mentioned problems, and the objective of the present invention is to provide a wafer storage device in which the quality of the wafer is improved by uniformly injecting purge gas.

[0008] Another objective of the present invention is to provide a wafer storage device that facilitates the assembly and installation of a fluid distributor and a check valve.

[0009] The problems of the present invention are not limited to those mentioned above, and other unmentioned problems will be clearly understood by a person skilled in the art to which the present invention pertains from the description below. means of solving the problem

[0010] According to one aspect of the present invention, a wafer storage container is provided, comprising: a main body having a receiving space for storing a wafer and having at least one intake port and an exhaust port formed at the bottom; a fluid distributor including a body portion extending in the height direction and having a plurality of distribution holes formed on one surface, and a first check valve housing protruding downward from the body portion and penetrating the intake port; a first check valve structure received in the first check valve housing; and a nut coupled to the first check valve housing on the outside of the main body; wherein a first screw thread is formed on the outer surface of the first check valve housing and a second screw thread capable of being coupled to the first screw thread is formed on the inner surface of the nut, so that the first check valve housing and the nut are bolt-nut coupled.

[0011] At this time, the fluid distributor may be positioned so that the distribution hole faces 30° inward from the front of the main body.

[0012] At this time, the fluid distributor may be positioned so that the fluid discharged from the fluid distributor is directed toward the center of the wafer.

[0013] At this time, the fluid distributor further includes a spacing portion between the body portion and the check valve housing, and the spacing portion can connect the body portion and the first check valve housing such that the body portion is spaced apart from the first check valve housing in the opposite direction toward the distribution hole.

[0014] At this time, the above separation portion may include an inclined surface formed on one side of the body portion toward the check valve housing.

[0015] At this time, the first check valve housing may include a cover portion that is seated on the intake port and a protruding portion that is inserted into the intake port.

[0016] At this time, a part of the main body is formed to extend downward along the inner surface of the intake port, and a seating surface may be formed on the extended inner surface in the direction of insertion of the nut.

[0017] At this time, the apparatus further includes a second check valve housing penetrating the exhaust port; and a second check valve structure accommodated in the second check valve housing, wherein the first screw thread is formed on the outer surface of the second check valve housing so that the nut can be coupled to the second check valve housing.

[0018] At this time, the first check valve structure and the second check valve structure are identical, but the first check valve structure and the second check valve structure can be accommodated in the first check valve housing and the second check valve housing, respectively, by being arranged in opposite directions.

[0019] According to another aspect of the present invention, a method for assembling a wafer storage container is provided, comprising: a step of assembling a first check valve structure; a step of fitting the assembled first check valve structure into a first check valve housing of a fluid distributor; a step of connecting the fluid distributor to an intake port on the inside of the main body; and a step of bolt-nut connecting the nut to the first check valve housing on the outside of the main body. Effects of the invention

[0020] According to the above configuration, a wafer storage container according to one aspect of the present invention can reduce the number of members accommodating the check valve and simplify the assembly of the check valve by accommodating the check valve in the fluid distributor.

[0021] In addition, according to one aspect of the present invention, a wafer storage container can reduce the time required for assembly, removal, and reassembly of the wafer storage container by simultaneously assembling the fluid distributor and the main body and assembling the fluid distributor and the check valve through bolt-nut coupling of a fluid distributor housing a check valve and a nut on both sides of the main body.

[0022] In addition, in a wafer storage container according to one aspect of the present invention, the first check valve housing of the intake port and the second check valve housing of the exhaust port can share the same check valve structure, sealing member, and nut according to their structure, thereby enabling economic efficiency.

[0023] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention. Brief explanation of the drawing

[0024] FIG. 1 is a perspective view showing an open body of a wafer storage container according to one embodiment of the present invention. FIG. 2 is a rear view of a wafer storage container according to one embodiment of the present invention. FIG. 3 is a cross-sectional view of a wafer storage container according to one embodiment of the present invention, cut in the height direction. FIG. 4 is an exploded perspective view of a fluid distributor for a wafer storage container according to one embodiment of the present invention. FIG. 5 is an exploded perspective view between a fluid distributor and a nut of a wafer storage container according to one embodiment of the present invention. FIG. 6 is a cross-sectional view of a portion of a wafer storage container having an intake port formed therein according to one embodiment of the present invention. FIG. 7 is a cross-sectional view of a portion of a wafer storage container having an exhaust port formed therein according to one embodiment of the present invention. FIG. 8 is a flowchart of a method for manufacturing a fluid distributor and check valve structure of a wafer storage container according to the present invention. Specific details for implementing the invention

[0025] Hereinafter, embodiments of the present invention are described in detail with reference to the attached drawings so that those skilled in the art can easily implement the present invention. The present invention may be embodied in various different forms and is not limited to the embodiments described herein. To clearly explain the present invention, parts unrelated to the description in the drawings have been omitted, and the same reference numerals have been used throughout the specification for identical or similar components.

[0026] The words and terms used in this specification and claims are not limited to their ordinary or dictionary meanings, but should be interpreted in a meaning and concept consistent with the technical spirit of the invention in accordance with the principles by which the inventor defines terms and concepts to best describe his invention.

[0027] Therefore, the embodiments described in this specification and the configurations illustrated in the drawings correspond to preferred embodiments of the present invention and do not represent all technical ideas of the present invention; thus, various equivalents and modifications that may replace such configurations may exist at the time of filing the present invention.

[0028] In this specification, terms such as “comprising” or “having” are intended to describe the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should not be understood as precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0029] The statement that a component is "in front," "rear," "upper," or "lower" of another component includes, unless there are special circumstances, not only being positioned "in front," "rear," "upper," or "lower" in direct contact with the other component, but also cases where another component is positioned in between. Furthermore, the statement that a component is "connected" to another component includes, unless there are special circumstances, not only being directly connected to each other, but also being indirectly connected to each other.

[0030] Hereinafter, a wafer storage container according to one embodiment of the present invention will be described with reference to the drawings.

[0031] FIG. 1 is a perspective view illustrating an open body of a wafer storage container according to an embodiment of the present invention. FIG. 2 is a rear view of a wafer storage container according to an embodiment of the present invention. Hereinafter, the X direction in FIG. 1 is defined as the width direction, the Y direction as the length direction, and the Z direction as the height direction for description.

[0032] Referring to FIG. 1, a wafer storage container (1) according to one embodiment of the present invention may be provided with a main body (10) and a door (not shown).

[0033] The main body (10) may be formed in the shape of a box with a receiving space formed therein to accommodate a wafer (W). Additionally, the main body (10) is provided with an opening to allow the wafer (W) to be moved in and out, and a door (not shown) capable of opening and closing the opening may be attached to one side of the main body (10).

[0034] Retainers may be provided on both sides inside the main body (10). Each retainer provided on both sides supports both ends of the wafer and may form multiple support layers in the height direction on which a single wafer is mounted.

[0035] Referring to FIGS. 1 and 2, a pair of intake ports (12) and a pair of exhaust ports (17) may be formed on the lower surface of the main body (10). A purge gas is supplied to the interior of the main body (10) to remove impurities attached to the wafer or to prevent oxidation of the wafer. This purge gas is introduced into the interior of the main body (10) through the intake port (12), and the air inside can be discharged to the outside through the exhaust port (17).

[0036] The intake port (12) and the exhaust port (17) may be equipped with a check valve that controls the direction so that fluid can flow in one direction. The detailed structure of the check valve will be described later with reference to other drawings.

[0037] A fluid distributor (100) capable of evenly distributing purge gas to all areas may be provided inside the main body (10). Accordingly, the fluid distributor (100) is connected to the intake port (12) to inject gas into the interior of the main body (10). At this time, a pair of fluid distributors (100) may be arranged facing each other in the longitudinal direction (Y) inside the main body (10).

[0038] At this time, according to one embodiment of the present invention, the fluid distributor (100) may have a structure in which a check valve structure is assembled on one side. The detailed assembly structure of the fluid distributor (100) and the check valve structure will be described later.

[0039] FIG. 3 is a cross-sectional view of a wafer storage container cut in the Z direction according to one embodiment of the present invention. FIG. 4 is an exploded perspective view of a fluid distributor of a wafer storage container according to one embodiment of the present invention.

[0040] Referring to FIGS. 1 and 3, a fluid distributor (100) may have a plurality of distribution holes (112) formed on one surface to uniformly distribute purge gas into the interior of the main body (10). At this time, the distribution holes (112) may be provided in a plurality in the height direction to correspond to a plurality of wafers (W).

[0041] Referring to FIG. 3, the fluid distributor (100) can be positioned so that the direction (A) in which the distribution hole (112) faces is deflected inward by a predetermined angle (θ) from the direction (B) facing the front of the main body (10).

[0042] At this time, the deflected angle (θ) may be 30°. As the fluid distributor (100) is deflected 30° inward from the front, the purge gas discharged from the distribution hole (112) can pass through the center of the wafer (W) along direction A. In reality, the purge gas discharged from the fluid distributor (100) is not discharged in a straight line but is radiated at a wide angle, but is sprayed so that its direction is directed toward the center of the wafer (W), so that the purge gas can reach the widest possible area of ​​the wafer (W).

[0043] Referring to FIG. 4, the fluid distributor (100) may include a body portion (110), a separation portion (120), and a first check valve housing (130). In FIG. 4, direction A is the direction in which the distribution hole (112) faces, and direction A' is the opposite direction.

[0044] The body portion (110) is formed to extend in the height direction, and a plurality of distribution holes (112) may be formed on one surface. At this time, the purge gas is supplied from the lower side to the upper side of the body portion (110) and can be evenly sprayed into the interior of the main body (10) at each height through the plurality of distribution holes (112).

[0045] Additionally, the body part (110) may be equipped with a membrane (114) and a plate (116). The purge gas may pass through the membrane (114) before being discharged into the distribution hole (112). At this time, the plate (116) is detachably coupled to the body part (110), thereby making it possible to replace the consumed membrane (114).

[0046] Meanwhile, a check valve structure (200) may be accommodated in the first check valve housing (130). This first check valve housing (130) may be formed protruding from the lower side of the body portion (110) and formed integrally with the body portion (110). At this time, the body portion (110) and the first check valve housing (130) may be separated by a predetermined distance by a separation portion (120).

[0047] Since the first check valve housing (130) is formed integrally with the body part (110), the process of assembly, removal, and reassembly between the main body (10), the fluid distributor (100), and the first check valve structure (200) can be simplified and the time required can be reduced.

[0048] Referring to FIG. 4, the separation portion (120) can connect the body portion (110) and the check valve housing (130) so that the body portion (110) is separated from the first check valve housing (130) by a predetermined distance. At this time, the body portion (110) may be separated from the first check valve housing (130) in the opposite direction (A') toward the distribution hole (112) on one side where the distribution hole (112) is formed.

[0049] At this time, the body part (110) may be spaced apart so that the side on which the distribution hole (112) is formed is located outside the A direction of the first check valve housing (130).

[0050] By separating the body part (110) from the first check valve housing (130) in the A' direction, the fluid distributor (100) is coupled to the intake port (12), while maintaining a constant distance so that the fluid distributor (100) and the wafer (W) do not interfere with each other inside the main body (10). Accordingly, the space inside the main body (10) can be utilized efficiently, and as a result, the volume of the wafer storage container (1) can be reduced.

[0051] At this time, the separation portion (120) may be provided with an upper surface (122) and an inclined surface (124) extending in the A direction from one surface where the distribution hole (112) is formed, and a lower surface (126) extending in the A direction from the plate (116) so as to face the upper surface (122).

[0052] A channel through which purge gas passes can be formed between the upper surface (122), the inclined surface (124), and the lower surface (126).

[0053] At this time, the upper surface (122) is not extended in a straight line, and an inclined surface (124) is provided between the upper surface (122) and the first check valve housing (130), thereby preventing interference between the wafer (W) mounted at the bottom of the retainer and the fluid distributor (100).

[0054] FIG. 5 is an exploded perspective view between a fluid distributor and a nut of a wafer storage container according to one embodiment of the present invention. FIG. 6 is a cross-sectional view of a portion of a wafer storage container in which an intake port is formed according to one embodiment of the present invention.

[0055] Referring to FIGS. 5 and 6, the first check valve housing (130) may include a cover portion (132) that is seated on the intake port (12) and a protruding portion (134) that extends downward from the cover portion (132).

[0056] The shape of the cover portion (132) can be circular, and its area is formed to be larger than the area of ​​the intake port (12), so that when the protruding portion (134) is coupled to the intake port (12), the cover portion (132) can be seated on the lower surface of the main body (10).

[0057] The cover portion (132) may be formed as an extension from the gap portion (120). At this time, a flow path groove (133) may be formed on the cover portion (132) so that the gap portion (120) and the first check valve housing (130) communicate with each other. The flow path groove (133) may be formed with a size that is half the diameter of the intake port (12) or smaller than that, in order to prevent the member accommodated in the first check valve housing (130) from escaping and to secure a space for accommodating the wafer (W).

[0058] A first seating projection (136) may be formed on the outer surface of the protrusion (134). At this time, a sealing member (137) may be provided on the outer surface of the protrusion (134) between the cover portion (132) and the first seating projection (136). By providing the sealing member (137), the protrusion (134) can be fixed to the inner surface of the intake port (12) without any gap.

[0059] Additionally, a first-1 screw thread (135) may be formed on the outer surface of the protrusion (134). A nut (300) having a second screw thread (302) formed on its inner surface may be attached to the outer surface of the protrusion (134).

[0060] The nut (300) can be coupled to a protruding part (134) that passes through the intake port (12) on the outer side of the main body (10) or the outer side of the lower plate (20).

[0061] At this time, the position of the protrusion (134) is fixed, and then the nut (300) is rotated to bolt-nut connect the protrusion (134) and the nut (300).

[0062] As the nut (300) rotates, it presses the check valve structure (200) housed inside the protrusion (134), thereby allowing the check valve structure (200) to be firmly fixed between the first check valve housing (130) and the nut (300).

[0063] At this time, a part (13) of the main body is formed to extend along the inner surface of the intake port (12), and a seating surface (15) may be formed on the extended inner surface in the direction of insertion of the nut (300). When assembled, the nut (300) is inserted up to the seating surface (15), thereby preventing the nut (300) from being overassembled.

[0064] Consequently, by connecting the nut (300) to the first check valve housing (130) of the fluid distributor (100) on the opposite side of the main body (10), the fluid distributor (100) can be connected to the main body (10), and at the same time, the check valve structure (200) can be connected to the first check valve housing (130). Accordingly, the assembly between the main body (10), the fluid distributor (100), and the check valve structure (200) can be simplified.

[0065] Referring to FIG. 5, a pressing member (140), a filter (150), and a check valve structure (200) can be received in sequence inside the protruding part (134).

[0066] The check valve structure (200) includes a first valve body (210) and a second valve body (220), and a check valve (230) may be provided between the first valve body (210) and the second valve body (220). Referring to FIG. 6, the first valve body (210) and the second valve body (220) are provided within a first check valve housing (130), and the first valve body (210) and the second valve body (220) may be combined to form a check valve receiving portion in which a check valve (230) can be received. At this time, the check valve (230) can open and close the flow path (L1) between the first valve body (210) and the second valve body (220) by moving up and down within the check valve receiving portion.

[0067] Referring to FIG. 6, the check valve (230) is equipped with an elastic body (240) on the outside and moves a piston by means of a predetermined pressure, thereby opening and closing the flow path so that the purge gas flows in one direction.

[0068] For example, a check valve (230) provided in the intake port (12) is positioned to be movable in the direction of D1 by the pressure of the purge gas flowing from the outside to the inside of the main body (10), and as the check valve (230) moves in the direction of D1, a flow path of L1 can be formed.

[0069] At this time, if the arrangement of the check valve (230) is reversed vertically, the flow of fluid can be controlled in the opposite direction. This will be described later together with the check valve (240') provided in the exhaust port (17) in FIG. 7.

[0070] Referring to FIGS. 5 and 6, the first valve body (210) has a first O-ring receiving groove (212) formed on its upper side, and a first O-ring (214) can be coupled to the first O-ring receiving groove (212).

[0071] Meanwhile, the second valve body (220) has a second O-ring receiving groove (222) formed on its lower side, and a second O-ring (224) can be coupled to the second O-ring receiving groove (222).

[0072] The first O-ring (214) and the second O-ring (224) prevent leakage of purge gas and, at the same time, protrude vertically above the first valve body (210) and the second valve body (220), thereby absorbing the vertical load applied when the first check valve housing (130) and the second nut (300) are joined, which can increase the durability of the check valve structure (200).

[0073] FIG. 7 is a cross-sectional view of a portion of a wafer storage container having an exhaust port formed therein according to one embodiment of the present invention.

[0074] Referring to FIG. 7, the exhaust port (17) may be provided with a second check valve housing (180) and a second check valve housing cover (190). The second check valve housing (180) may be formed as an independent structure, unlike the first check valve housing (130).

[0075] The second check valve housing (180) may accommodate a check valve structure (200') that controls the flow of fluid in one direction so that air inside the main body (10) is discharged to the outside.

[0076] At this time, the configuration of the check valve structure (200') accommodated in the second check valve housing (180) is the same as the check valve structure (200) shown in FIG. 6, but the assembly order and arrangement may be reversed. Accordingly, as described above, the check valve structure (200') can control the flow of fluid in the opposite direction to the check valve structure (200). Therefore, a redundant description thereof will be omitted.

[0077] Accordingly, with reference to FIG. 7, the check valve (230') provided in the exhaust port (17) is positioned to be movable in the direction of D2 by the pressure of the purge gas discharged from the inside to the outside of the main body (10), and as the check valve (230') moves in the direction of D2, it can form a flow path of L2.

[0078] Meanwhile, unlike the check valve structure (200), the second check valve housing (180) does not accommodate the filter (150) and the pressing member (140), and instead, the length of the receiving direction in which the check valve structure (200') is accommodated in the receiving space inside the second check valve housing (180) can be formed to be shorter by the thickness of the filter (150) and the pressing member (140).

[0079] As a result, the first check valve housing (130) and the second check valve housing (180) can accommodate identical check valve structures (200, 200') with opposite arrangement directions.

[0080] Meanwhile, a first-2 thread (185) and a second seating projection (186) may be formed on the outer surface of the second check valve housing (180). At this time, the first-2 thread (185) and the second seating projection (186) may be formed in the same shape as the first-1 thread (135) and the first seating projection (136).

[0081] In other words, the outer surface of the second check valve housing (180) may have the same shape as the outer surface of the first check valve housing (130). Accordingly, a nut (300') having a sealing member (137') and a second thread (302) formed thereon, identical to that of the first check valve housing (130), may be attached to the outer surface of the second check valve housing (180). Therefore, any redundant description thereof is omitted.

[0082] As a result, the first check valve housing (130) is formed integrally with the fluid distributor (100), and the second check valve housing (180) is provided as an independent configuration, but otherwise, the check valve structure (200, 200') and the nut (300) have the same structure when combined.

[0083] Accordingly, in a wafer storage container (1) according to one embodiment of the present invention, the first check valve housing (130) integrally formed in the fluid distributor (100) and the second check valve housing (180) provided in the exhaust port (17) use the same check valve structure (200, 200'), sealing member (137, 137'), and nut (300, 300'), thereby enabling economic efficiency.

[0084] FIG. 8 is a method for assembling a wafer storage container (1) according to one embodiment of the present invention.

[0085] Referring to FIG. 8, a wafer storage container according to one embodiment of the present invention can be assembled by the steps of assembling a first check valve structure (S10), fitting the assembled first check valve structure into a first check valve housing (S20), coupling a fluid distributor to an intake port on the inside of the main body (S30), and bolt-nut coupling a nut with the first check valve housing on the outside of the main body (S40).

[0086] At this time, in the step (S40) where the nut (300) is bolt-nut coupled with the first check valve housing (130) on the outside of the main body, the position of the first check valve housing (130) is fixed, and the nut (300) can be coupled by rotating. At this time, the nut (300) can be coupled to a depth reaching the seating surface formed on a part (13) of the main body extending from the inner side of the intake port (12).

[0087] Although embodiments of the present invention have been described, the spirit of the present invention is not limited by the embodiments presented in this specification. Those skilled in the art who understand the spirit of the present invention may easily propose other embodiments within the scope of the same spirit by adding, changing, deleting, or adding components, and such are also to be considered to fall within the scope of the spirit of the present invention. Explanation of the symbols

[0088] 1 : Wafer storage container W : Wafer 10 : Main body 12 : Air intake 17 : Exhaust port 100 : Fluid distributor 110 : Body part 112 : Distribution hole 114 : Membrane 116 : Plate 120 : Separation part 130 : First check valve housing 180: Second check valve housing 200: Check valve structure 210: 1st valve body 220: 2nd valve body 230 : Check valve 240 : Elastic member 300 : Nut

Claims

Claim 1 A fluid distributor comprising: a main body having a receiving space for receiving a wafer and having at least one intake port and an exhaust port formed at the bottom; a body portion extending in the height direction and having a plurality of distribution holes formed on one surface, and a first check valve housing extending from the lower side of the body portion and penetrating the intake port; a first check valve structure received in the first check valve housing; and a nut coupled to the first check valve housing on the outside of the main body; wherein the first check valve structure comprises: a first valve body inserted inside the first check valve housing; a second valve body inserted inside the first check valve housing and coupled with the first valve body to form a check valve receiving portion between the first valve body and the second valve body; a check valve received in the check valve receiving portion and opening and closing a flow path between the first valve body and the second valve body by moving up and down within the check valve receiving portion; and a first O-ring provided between the first check valve housing and the first valve body along the circumference of the first valve body. A wafer storage container comprising: a second O-ring provided between the first check valve housing and the second valve body along the circumference of the second valve body; wherein a first screw thread is formed on the outer surface of the first check valve housing and a second screw thread capable of being coupled to the first screw thread is formed on the inner surface of the nut, so that the first check valve housing and the nut are bolt-nut coupled. Claim 2 In claim 1, the fluid distributor is a wafer storage container in which the distribution hole is positioned such that it faces 30° inward from the front of the main body. Claim 3 In claim 2, the fluid distributor is a wafer receiving container arranged such that the fluid discharged from the fluid distributor is directed toward the center of the wafer. Claim 4 In claim 1, the fluid distributor further comprises a spacing portion between the body portion and the check valve housing, and the spacing portion is a wafer storage container connecting the body portion and the first check valve housing such that the body portion is spaced apart from the first check valve housing in the opposite direction toward the distribution hole. Claim 5 In claim 4, the above-mentioned separation portion comprises an inclined surface formed on one side of the body portion toward the check valve housing, forming an inclined surface. Claim 6 In claim 1, the first check valve housing is a wafer storage container comprising a cover portion seated on the intake port and a protruding portion inserted into the intake port. Claim 7 A wafer storage container according to claim 1, wherein a part of the main body is formed to extend downward along the inner surface of the intake port, and a seating surface is formed on the extended inner surface in the direction of insertion of the nut. Claim 8 A wafer storage container according to claim 1, comprising: a second check valve housing penetrating the exhaust port; and a second check valve structure accommodated in the second check valve housing, wherein the first screw thread is formed on the outer surface of the second check valve housing so that the nut can be coupled to the second check valve housing. Claim 9 In claim 8, the first check valve structure and the second check valve structure are identical, and the first check valve structure and the second check valve structure are arranged in opposite directions and accommodated in the first check valve housing and the second check valve housing, respectively, in a wafer storage container. Claim 10 A method for assembling a wafer storage container according to any one of claims 1 to 9, comprising: a step of assembling a first check valve structure; a step of fitting the assembled first check valve structure into a first check valve housing of a fluid distributor; a step of connecting the fluid distributor to an intake port on the inside of the main body; and a step of bolt-nut connecting the nut to the first check valve housing on the outside of the main body.

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