Dry chemical filter equipped with the board-shape filter body sliding case

Abstract

The present invention relates to a dry chemical filter equipped with a sliding plate filter body that is designed to completely remove acidic and basic gases and other trace amounts of process harmful ion gas components present in cleanrooms for precision product manufacturing processes such as semiconductors and pharmaceuticals. In particular, the plate filter bodies are configured to be coupled within the filter case at a constant distance in the width direction, so that air containing harmful gases does not directly penetrate each plate filter body but passes through a flow path provided between the plate filter bodies, thereby having low pressure loss, easy replacement, and recyclability.

Description

Technology Field

[0001] The present invention relates to a dry chemical filter equipped with a sliding case for plate-type filter bodies, which is designed to completely remove acidic and basic gases and other trace amounts of harmful process ion gases present in cleanrooms for precision product manufacturing processes such as semiconductors and pharmaceuticals. In particular, the plate-type filter bodies are provided at regular intervals in the width direction inside the filter case, so that air containing harmful gases does not directly penetrate each plate-type filter body but passes through a flow path provided between the plate-type filter bodies, thereby having low pressure loss, easy replacement, and recyclability. Background Technology

[0003] In general, chemical filters for removing trace amounts of acidic and basic harmful gases present in semiconductor manufacturing processes include the impregnated activated carbon method using activated carbon as an adsorbent and the ion exchange method.

[0004] Although the impregnated activated carbon method is inexpensive, its application to cleanroom filters is limited because it is heavy, the process differential pressure increases due to its granular form, it has a short lifespan, and the removal efficiency of trace harmful gases is low.

[0005] To compensate for these drawbacks, ion exchange methods are used. Although filters made of ion exchange resin offer good removal efficiency, they suffer from high process pressure loss and slow processing speeds due to their granular nature, similar to activated carbon. To address this, ion exchange fibers have been developed and are being applied.

[0006] Ion exchange fibers have the advantages of lower pressure loss, lighter weight, higher ionic gas removal efficiency, and easier filter manufacturing in a fibrous form compared to bead-type ion exchange resins; however, their high cost and large unit volume limit their application.

[0007] To compensate for these drawbacks, a technology is being used to manufacture a composite filter material by mixing resin and fibers, in which bead-shaped ion exchange resin is bonded to the surface with a solvent-based adhesive while minimizing the ion exchange fiber nonwoven fabric, and then performing needle punching.

[0008] Although these materials have improved performance compared to single materials and are cheaper than ion exchange fibers, when solvent-based adhesives are used, the manufacturing process is complex because the ion exchange resin must be bonded to the mesh supporting the filter and combined with the ion exchange fiber nonwoven fabric, and then wrapped again with a mesh to prevent the beads from detaching. There are also limitations in the adhesion of the resin and the possibility of contamination of the cleanroom due to harmful exhaust gases generated from the solvent-based adhesives used.

[0009] In addition, while the method of manufacturing composite filter materials by needle punching can compensate for some of the disadvantages, there were limitations in implanting the resin into the nonwoven fabric and problems such as increased pressure loss due to needle punching.

[0010] A chemical filter has been proposed that utilizes a hot-melt method, which is free from the generation of harmful gases caused by adhesives, and employs a melt-blow method using heated compressed air instead of needle punching to attach beads to the surface and interior of an ion-exchange fiber nonwoven fabric at high density.

[0011] Meanwhile, chemical filters were utilized by equipping a non-woven fabric with impregnated activated carbon or ion-exchange adsorbents attached inside a filter frame having a square or circular shape. As for such prior art, Registered Patent Publication No. 10-0477435 (March 9, 2005), which describes a method for manufacturing a chemical filter using a mesh coated with impregnated activated carbon and an ion-exchange non-woven fabric, and Registered Patent Publication No. 10-0477436 (March 9, 2005), which describes a method for manufacturing a honeycomb-shaped chemical filter, were proposed. However, despite the fact that the proportion of air in the total exhaust volume is high while the concentration of harmful gases is relatively low, and the adsorbents act only on harmful gases mixed in the circulating air, there was a problem in that flow resistance occurred as the entire circulating air passed through the non-woven fabric. Furthermore, since the entire non-woven fabric and filter frame were discarded after use, a large amount of waste was generated, leading to problems such as increased filter replacement costs and increased carbon emissions due to remanufacturing. There was. Prior art literature

[0013] Registered Patent Publication No. 10-0477435 (March 9, 2005) Registered Patent Publication No. 10-0477436 (March 9, 2005) The problem to be solved

[0014] The present invention was devised to resolve conventional problems and aims to provide a dry chemical filter equipped with a plate-type filter body sliding case that can reduce flow resistance generated during the process of removing harmful gases.

[0015] In addition, the present invention aims to provide a dry chemical filter equipped with a plate-type filter body sliding case that reduces flow resistance to lower the power consumption required for operation, thereby reducing energy costs.

[0016] In addition, the present invention aims to provide a dry chemical filter equipped with a plate filter sliding case that allows for recycling by slidingly separating and removing only the plate filter body and then slidingly replacing it with a new plate filter body.

[0017] Furthermore, the present invention aims to provide a dry chemical filter equipped with a sliding case for a plate-type filter body, which minimizes waste generation and ultimately contributes to the reduction of carbon emissions by separating only the plate-type filter body and regenerating and recycling the ion resin layer, which is an adsorbent attached to the filter body. means of solving the problem

[0019] The present invention for achieving the above objective

[0020] A filter case (100) having a filter space (S) inside; and

[0021] A plate-shaped filter body (200) is provided in the interior of the filter space (S) at regular intervals in the width direction and slides in and out in the length direction, thereby allowing harmful gas to pass through between the plate-shaped filter bodies (200), so as to reduce flow resistance and increase the removal rate of harmful gas. Additionally, after use, only the plate-shaped filter body (200) or a part of the plate-shaped filter body (200) is disposed of, thereby reducing the amount of waste generated. Effects of the invention

[0023] Accordingly, the present invention provides the effect of reducing flow resistance that occurs during the process of penetrating a conventional nonwoven fabric, by removing harmful gases through contact with an adhesive layer on the surface of the plate-type filter body as they move through the space between the plate-type filter bodies, which are provided to slide in and out inside the filter case, while allowing ordinary air to pass through as is.

[0024] In addition, the present invention can achieve the effect of reducing power loss while minimizing noise generation.

[0025] In addition, the present invention can achieve the effect of reducing energy costs required for driving and operation.

[0026] In addition, the present invention allows for the separation and replacement of only a portion of the plate-type filter body after use, rather than discarding the entire body, thereby reducing costs and preventing environmental pollution by reducing the amount of waste generated. Brief explanation of the drawing

[0028] FIG. 1 is a perspective view illustrating a dry chemical filter equipped with a plate-type filter body sliding case according to the present invention. FIG. 2 is a perspective view showing a dry chemical filter equipped with a plate-type filter body sliding case according to the present invention in disassembled form. FIG. 3 is a longitudinal cross-sectional view in the width direction of a dry chemical filter equipped with a plate-type filter body sliding case according to the present invention. FIG. 4 is a longitudinal cross-sectional view of a dry chemical filter equipped with a plate-type filter body sliding case according to the present invention, shown in the longitudinal direction. Specific details for implementing the invention

[0029] Hereinafter, the present invention may be subject to various modifications and may have various embodiments, and specific embodiments are illustrated in the drawings and described in detail. However, this is not intended to limit the present invention to specific embodiments, and it should be understood that it includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the present invention.

[0030] These embodiments are provided to further explain the invention to those skilled in the art to which the invention pertains. Accordingly, the shape of each element shown in the drawings may be exaggerated to emphasize a clearer explanation, and in describing the invention, if it is determined that a detailed description of related known technology may obscure the essence of the invention, such detailed description is omitted.

[0031] The terms used in this invention are used merely to describe specific embodiments and are not intended to limit the invention. The singular expression includes the plural expression unless the context clearly indicates otherwise.

[0032] In the present invention, terms such as "comprising" or "having" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not excluding in advance the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0034] First, the present invention relates to a dry chemical filter having a sliding case for a plate-type filter body, and may be configured to include at least one of a filter case (100) and a plate-type filter body (200).

[0036] Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the attached drawings.

[0037] Referring to FIGS. 1 to 4,

[0038] FIG. 1 is a perspective view illustrating a dry chemical filter equipped with a plate-type filter body sliding case according to the present invention; FIG. 2 is a perspective view illustrating a dry chemical filter equipped with a plate-type filter body sliding case according to the present invention in a disassembled state; FIG. 3 is a longitudinal cross-sectional view illustrating a dry chemical filter equipped with a plate-type filter body sliding case according to the present invention in the width direction; and FIG. 4 is a longitudinal cross-sectional view illustrating a dry chemical filter equipped with a plate-type filter body sliding case according to the present invention in the length direction.

[0040] A dry chemical filter equipped with a plate-type filter body sliding case according to the present invention is provided with plate-type filter bodies (200) maintained at a constant distance in a filter space (S) provided inside a filter case (100).

[0041] The filter case (100) is configured such that contaminated air is introduced into the interior from the front while the interior and exterior are blocked, and the air introduced into the interior is filtered by a plate-shaped filter body (200) and then the filtered air is discharged to the outside. It is configured to have a rectangular box shape by means of a case lower plate body (110), a case upper plate body (120), a case side plate body (130), and case front and rear plates (140)(150).

[0042] The lower case plate (110) is provided with lower filter slide grooves (111) on its upper surface, repeating at regular intervals in the width direction, and the upper case plate (120) is provided with upper filter slide grooves (121) on its lower surface, repeating at regular intervals in the width direction, so that they face the lower case plate (110) and maintain a regular distance, allowing the plate-shaped filter body (200) to slide in the length direction to be inserted or separated. At this time, the spacing between the plate-shaped filter bodies (200) is determined according to the spacing of the lower filter slide grooves (111) or the upper filter slide grooves (121).

[0043] The case side plate (130) is provided on both the left and right sides of the case lower plate (110) and the case upper plate (120), and the case front and rear plates (140) (150) are provided on both the front and rear sides of the case lower plate (110), the case upper plate (120), and the case side plate (130). At this time, the case lower plate (110), the case upper plate (120), and the case side plate (130) are each provided with a convex part (CVP) and a concave part (CCP) at their respective contacting ends so that they interlock like interlocking fingers and are firmly joined, and they can also be joined by other methods that provide a similarly firm connection.

[0044] The lower plate body (110) of the case is provided with front and rear lower slide grooves (112) (113) in the width direction at the front and rear bottom edges that contact the front and rear ends, that is, at a portion spaced inward from the bottom edge at a certain distance, and the upper plate body (120) of the case is provided with front and rear upper slide grooves (122) (123) having the same width direction as the front and rear lower slide grooves (112) (113) at the front and rear top edges that contact the front and rear ends, that is, at a portion spaced inward from the top edge at a certain distance.

[0045] The above case front and rear plates (140) (150) are provided with upper and lower slide protrusions (141) (142) of the front plate (140) and upper and lower slide protrusions (151) (152) of the rear plate (150) at the upper and lower ends, so that the upper slide protrusions (141) (151) of the front and rear plates (140) (150) are slidably fitted and coupled to the front upper slide groove (122) and rear upper slide groove (123) of the case upper plate (120), and the lower slide protrusions (142) (152) of the front and rear plates (140) (150) are slidably fitted and coupled to the front lower slide groove (112) and rear lower slide groove (113) of the case lower plate (110), thereby allowing them to be coupled without using bolts or screws.

[0046] The front plate body (140) of the case is provided with an intake section (143) having a plurality of intake holes (143-1), and a mesh net (MN) is provided on the rear surface of the intake section (143) so that external harmful gases can pass through and be introduced into the interior, thereby preventing the ion resin, etc. in the adsorbent layer (240) of the plate-type filter body (200) described later from escaping to the outside. At this time, it is preferable that the mesh net (MN) be extended to the corner where the lower plate body (110), the upper plate body (120), and the side plate body (130) of the case are joined together, so as to prevent the ion resin, etc. from escaping through the joined part.

[0047] The rear plate body (150) of the above case is provided with an exhaust section (153) having a plurality of exhaust holes (153-1), and a mesh net (MN) is provided on the front surface of the exhaust section (153), thereby preventing the ion resin, etc. in the adsorbent layer (240) of the plate-type filter body (200) from escaping to the outside as described above.

[0048] The above plate-shaped filter body (200) is provided within the filter space (S) at regular intervals in the width direction and is provided to slide in and out in the length direction. It comprises a filter body (210) having a flat plate shape, one and other adhesive layers (220) (230) applied to one side and the other side of the filter body (210) with a predetermined thickness, and an adsorbent layer (240) adhered to the one and other adhesive layers (220) (230) with a predetermined thickness. That is, the adsorbent layer (240), which is a filter material, can be maintained attached to the filter body (210) by the one and other adhesive layers (220) (230) on one side and the other side of the filter body (210).

[0049] It is preferable that the filter body (210) of the above-mentioned plate-shaped filter body (200) be provided with a metal plate or a polymer resin plate, or it may be provided with a plate body formed by fixing a non-woven fabric to a rectangular frame.

[0051] Although the present invention has been described above based on the drawings, this is merely illustrative, and since various substitutions, modifications, and changes are possible within the scope of the technical concept of the invention, it is not limited to the aforementioned embodiments and drawings. Explanation of the symbols

[0053] 100: Filter case 110: Case lower plate 111: Lower slide groove of filter body 112: Front lower slide groove part 113: Rear lower slide groove 120: Case upper plate 121: Upper slide groove of filter body 122: Front upper slide groove part 123: Rear upper slide groove 130: Case side plate 140: Front case housing 141: Front upper slide protrusion 142: Rear upper slide protrusion 143: Intake part 143-1: Intake hole 150: Rear case enclosure 151: Front lower slide protrusion 152: Rear lower slide protrusion 153: Exhaust section 153-1: Exhaust hole 200: Plate-type filter sieve 210: Filter body 220: One side adhesive layer 230: The other side adhesive layer 240: Adsorbent layer MN: Mesh net S: Filter space

Claims

Claim 1 A filter case (100) comprising case front and rear plates (140) (150) provided on both the front and rear sides of a case lower plate (110), a case upper plate (120), and a case side plate (130), and having a filter space (S) inside; A dry chemical filter having a plate-type filter body sliding case, characterized in that the plate-type filter body (200) is provided repeatedly at regular intervals in the width direction inside the filter space (S) and is provided to slide in and out in the length direction, wherein the lower plate body (110) of the case is provided with front and rear lower slide grooves (112) (113) in the width direction at the front and rear bottom corners that contact the front and rear ends, respectively, and the upper plate body (120) of the case is provided with front and rear upper slide grooves (122) (123) in the width direction at the front and rear top corners that contact the front and rear ends, respectively, and the front and rear plate bodies (140) (150) of the case are provided with front upper and lower slide protrusions (141) (142) and rear upper and lower slide protrusions (151) (152) at both upper and lower ends, respectively, and the front and rear A dry chemical filter having a plate-type filter body sliding case, characterized in that the upper slide protrusions (141)(151) are provided to be slidably fitted and coupled to the front upper slide groove (122) and rear upper slide groove (123) of the case upper plate body (120), and the front and rear lower slide protrusions (142)(152) are slidably fitted and coupled to the front lower slide groove (112) and rear lower slide groove (113) of the case lower plate body (110). Claim 2 delete Claim 3 A dry chemical filter having a plate-type filter body sliding case, characterized in that, in claim 1, the case lower plate body (110), case upper plate body (120), and case side plate body (130) are each provided with a convex part (CVP) and a concave part (CCP) that interlock and fit together at their respective contact ends. Claim 4 delete Claim 5 A dry chemical filter having a plate-type filter body sliding case, wherein, in claim 1, the front and rear plates (140) (150) of the case are each provided with an intake section (143) having a plurality of intake holes (143-1) and an exhaust section (153) having a plurality of exhaust holes (153-1), and a mesh net (MN) is provided on the rear surface of the intake section (143) and the front surface of the exhaust section (153). Claim 6 A dry chemical filter having a plate-type filter body sliding case, wherein, in claim 1, the plate-type filter body (200) comprises: a filter body (210) having a flat plate shape; one and other adhesive layers (220) (230) applied to one side and the other side of the filter body (210) to have a predetermined thickness; and an adsorbent layer (240) adhered to the one and other adhesive layers (220) (230) to a predetermined thickness.

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