Cooling roller for laminating and thermocompression roll-to-roll laminator having the same

Abstract

The present invention discloses a cooling roller for laminating and a thermal compression roll-to-roll laminator comprising the same, wherein the roller body portion is formed in a cylindrical shape and flange portions are each coupled to both ends of the roller body, and wherein the roller body portion has a plurality of cooling channels formed adjacent to the outer surface of the roller, which are formed at predetermined intervals along the outer circumference and penetrate from one end to the other end, and on one surface of the flange portion coupled to the roller body portion, a connecting groove is arranged in a circumferential direction to cover the opening of one cooling channel and the opening of another cooling channel so that a cooling medium can move from one of the plurality of cooling channels to another cooling channel adjacent thereto.

Description

Technology Field

[0001] The present invention relates to a cooling roller for laminating that prevents deformation of the substrate due to heat and facilitates peeling of the carrier film by cooling the substrate after laminating the substrate, and a thermal compression roll-to-roll laminator including the same. Background Technology

[0002] A laminator refers to a device that laminates a flexible medium, such as a film, onto a substrate to manufacture circuit boards for electronic products. Furthermore, a characteristic of the substrate lamination process using a laminator is that heat is applied during the process of compressing the substrate on which the film has been laminated.

[0003] At this time, if the surface of the substrate laminated with the film is not cooled to an appropriate temperature, the residual heat may cause thermal deformation of the substrate, and the carrier film covering the substrate may melt due to the heat, leading to a situation where peeling off the carrier film becomes difficult. Accordingly, to prevent such a situation, technology is being developed to cool the substrate using blowers, cooling rollers, etc.

[0004] Meanwhile, since the cooling roller described above creates a cooling atmosphere through a cooling medium flowing inside the roller, the key is to achieve a uniform cooling temperature across the entire surface area of ​​the roller by densely arranging the channels through which the cooling medium flows. However, since the cooling roller can rapidly achieve cooling by physically pressing the substrate, if the aforementioned problem can be solved, a higher quality laminated circuit board can be obtained.

[0005] Accordingly, the development of a technology capable of uniformly forming the cooling temperature over the entire surface area of ​​the laminating cooling roller may be considered. The problem to be solved

[0006] One objective of the present invention is to provide a cooling roller for laminating that can uniformly cool the entire surface area of ​​the cooling roller.

[0007] Another objective of the present invention is to provide a thermal compression roll-to-roll laminator that includes the cooling roller described above, thereby preventing thermal deformation of the laminated substrate and facilitating the peeling of a carrier film placed on the substrate. means of solving the problem

[0008] To achieve the objective of the present invention, a cooling roller for laminating according to one embodiment of the present invention comprises: a roller body portion formed in a cylindrical shape; and a flange portion each coupled to both ends of the roller body. The roller body portion is formed adjacent to the outer surface of the roller, wherein a plurality of cooling channels are formed adjacent to the outer surface of the roller and are arranged at predetermined intervals along the outer circumference, penetrating from one end to the other end. On one surface of the flange portion coupled to the roller body portion, a connecting groove is arranged in a circumferential direction to cover the opening of one cooling channel and the opening of another cooling channel, so that a cooling medium can move from one of the plurality of cooling channels to another cooling channel adjacent thereto.

[0009] According to one example related to the present invention, the connecting groove may be formed in the shape of an elongated groove, with one end corresponding to the opening of one of the cooling channels and the other end corresponding to the opening of the other cooling channel.

[0010] According to one example related to the present invention, a rounded slope may be formed on the inner surface of the connecting groove toward the inner side of the flange portion.

[0011] According to one example related to the present invention, the flange portion may be provided with an inlet chamber and an outlet chamber, respectively, that communicate with the plurality of cooling channels for the inflow and outflow of a cooling medium.

[0012] According to one example related to the present invention, among the plurality of cooling channels, an inlet hole through which a cooling medium is introduced from the inlet chamber and an outlet hole through which a cooling medium is discharged to the outlet chamber may be arranged adjacent to each other.

[0013] According to one example related to the present invention, the flange portion comprises: a first flange disposed to cover the end of the roller body portion and having the connecting groove; a second flange disposed to cover the first flange; and a third flange disposed to cover the second flange and connected to a flow path module for the inflow and outflow of a cooling flow path, wherein either the inflow chamber and the discharge chamber may be formed between the first flange and the second flange, and the other of the inflow chamber and the discharge chamber may be formed between the second flange and the third flange.

[0014] According to one example related to the present invention, the first flange may include: a first connecting passage formed through in a bent shape to mutually communicate with either one of the inlet chamber and the discharge chamber and either one of the inlet hole and the discharge hole; and a second connecting passage formed through in a bent shape to mutually communicate with the other one of the inlet chamber and the discharge chamber and the other one of the inlet hole and the discharge hole.

[0015] According to one example related to the present invention, the extension tube of the above-described flow channel module sequentially penetrates the third flange, the other of the inlet chamber and the discharge chamber, and the second flange, and is disposed in either the inlet chamber or the discharge chamber; the second flange has a communication hole formed to mutually communicate the second connecting flow channel with the other of the inlet chamber and the discharge chamber, and the third flange may have a communication flow channel formed to communicate with the other of the inlet chamber and the discharge chamber and to surround the extension tube.

[0016] According to one example related to the present invention, a sealing plate may be further included, which is interposed between the roller body portion and the flange portion, elastically adheres to the roller body portion and the flange portion respectively, and has a connecting hole corresponding to the connecting groove.

[0017] In addition, the present invention discloses a thermal compression roll-to-roll laminator comprising: a vacuum chamber that is depressurized by a vacuum pump; a laminating roller installed in the vacuum chamber and laminating a film on a substrate; at least one hot press roller installed in the vacuum chamber and flattening the substrate on which the film is laminated by applying heat; and the cooling roller installed in the vacuum chamber and cooling the substrate on which the film is laminated after passing through the hot press roller. Effects of the invention

[0018] The effects of the present invention obtained through the above-described solution are as follows.

[0019] According to one embodiment of the present invention, the cooling roller has cooling channels formed adjacent to the outer surface of the roller, which can improve the cooling efficiency of the object, and each cooling channel is interconnected by a connecting groove, thereby allowing the cooling temperature to be formed uniformly over the entire surface of the roller.

[0020] In addition, a thermal compression roll-to-roll laminator including a cooling roller according to another embodiment can prevent thermal deformation of the laminated substrate and facilitate peeling of the carrier film placed on the substrate by including the cooling roller described above. Brief explanation of the drawing

[0021] FIG. 1 is a conceptual diagram showing the configuration of a cooling roller according to one embodiment of the present invention. Figure 2 is a partial cross-sectional view of the AA' portion of the cooling roller shown in Figure 1. Figure 3 is a projection view showing the structure of the roller illustrated in Figure 1. FIG. 4 is a detailed view showing one side of the first flange portion illustrated in FIG. 1. Fig. 5 is a perspective view of the cooling roller shown in Fig. 1. Figure 6 is a partial cross-sectional view of BB' of the cooling roller shown in Figure 5. Figure 7 is a partial cross-sectional view of the CC' portion of the cooling roller shown in Figure 5. Figure 8 is a detailed view of the sealing plate shown in Figures 6 and 7. FIG. 9 is a conceptual diagram showing the configuration of a thermal compression roll-to-roll laminator including a cooling roller. Specific details for implementing the invention

[0022] Hereinafter, a cooling roller (100) for laminating related to the present invention will be described in more detail with reference to the drawings.

[0023] In describing the embodiments disclosed in this specification, if it is determined that a detailed description of related prior art could obscure the essence of the embodiments disclosed in this specification, such detailed description is omitted.

[0024] The attached drawings are intended only to facilitate understanding of the embodiments disclosed in this specification, and the technical concept disclosed in this specification is not limited by the attached drawings; it should be understood that all modifications, equivalents, and substitutions included within the concept and technical scope of the present invention are included.

[0025] A singular expression includes a plural expression unless the context clearly indicates otherwise.

[0026] In this application, terms such as "comprising" or "having" are intended to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not excluding in advance the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0027] FIG. 1 is a conceptual diagram showing the configuration of a cooling roller (100) according to an embodiment of the present invention. FIG. 2 is a partial cross-sectional view of the cooling roller (100) shown in FIG. 1. FIG. 3 is a projection view showing the structure of the roller (110) shown in FIG. 1. FIG. 4 is a detailed view showing one side of the first flange (121) portion shown in FIG. 1. FIG. 5 is a perspective view of the cooling roller (100) shown in FIG. 1.

[0028] Referring to FIGS. 1 to 5, the cooling roller (100) is configured to cool the object by rolling contact with at least one surface of the object to be cooled (e.g., a substrate on which a film is laminated).

[0029] In addition, the cooling roller (100) includes a roller (110) made of a roller body part (110a) formed in a cylindrical shape, and flange parts (120, 120') each coupled to both ends of the roller body (110a).

[0030] In the roller body portion (110a), a plurality of cooling channels (111) are formed adjacent to the outer surface of the roller (110), which penetrate from one end to the other end of the cylindrical roller body (110a) and are arranged at predetermined intervals along the outer circumference.

[0031] This is because, when cooling an object through a cooling roller (100), two pairs of mutually facing rollers (110) rotate and each roller body part (110a) makes rolling contact with the surface of the object entering between them, and the closer the cooling channel (111) is formed to the outer surface of the roller body part (110a), the easier the cooling temperature is transferred to the outer surface of the roller body part (110a), thereby effectively cooling the object.

[0032] A connecting groove (121b) is formed on one side of a flange portion (120, 120') that is respectively coupled to both ends of a roller body portion (110a), so that a cooling medium can sequentially flow along a plurality of cooling channels (111) formed on the outer surface of the roller.

[0033] Although only the connecting groove (121b) formed on one side of one flange portion (120) is shown in the drawing, it should be understood that the same connecting groove (121b) is also formed on one side of the other flange portion (120').

[0034] The above connecting groove (121b) is arranged on one surface of the flange portion (120, 120') to cover the opening (111a) of one of the plurality of cooling channels (111) and the opening (111a) of another cooling channel, so that a cooling medium can move from one of the plurality of cooling channels (111) to the adjacent other cooling channel (111) through the connecting groove (121b).

[0035] According to one example related thereto, one end of the connecting groove (121b) corresponds to the opening (111a) of one cooling channel and the other end corresponds to the opening (111a) of another cooling channel, and can be formed in the shape of a long groove with an inner surface shielded.

[0036] Accordingly, the cooling medium discharged from one of the multiple cooling channels (111) can be made to flow to another cooling channel (111) along the shielded inner surface of the connecting groove (121b).

[0037] In addition, a rounded slope is formed on the inner side of the connecting groove (121b) toward the inner side of the flange portion (120) to facilitate the movement of the cooling medium.

[0038] More specifically, a gradient is formed in the shape of gradually becoming rounded toward the center of the inner surface of the connecting groove (121b) and toward the inner side of the flange portion (120, 120'), so that a cooling medium discharged from one of the cooling channels (111) can flow along the gradient of the connecting groove (121b) and move easily to another cooling channel (111).

[0039] The flange portion (120) may be provided with an inlet chamber (either one of 121c and 122c) and an outlet chamber (the other one of 121c and 122c) that are in communication with a plurality of cooling channels (111) for the inflow and outflow of a cooling medium.

[0040] At this time, it is preferable that the inlet chamber (either one of 121c and 122c) and the discharge chamber (the other one of 121c and 122c) be formed only on one of the flange portions (120, 120') (right side in the drawing) (120) which are respectively connected to both ends of the roller body (110a).

[0041] More specifically, one of the flange portions (120, 120') respectively coupled to both ends of the roller body (110a) may have the chamber (121c, 122c) described above formed therein to handle the inflow and outflow of the cooling medium.

[0042] On the other hand, the other flange part (120') (left side in the drawing) is not equipped with the chamber (121c, 122c), and instead, a support shaft (122s') is formed at the other end so as to perform only the role of supporting the roller body part (110a) when the roller body part (110a) rotates.

[0043] This is because the inflow and outflow of the cooling medium flowing through the cooling channel (111) are carried out in the same direction, which facilitates the formation of each channel forming the cooling roller (100), and also because the storage facility (not shown) for supplying the cooling medium to the cooling roller (100) and receiving the waste cooling medium discharged from the cooling roller (100) is placed in the same direction, which is advantageous in terms of space utilization of the entire process.

[0044] Additionally, among the plurality of cooling channels (111) formed in the roller body (110a), there may be an inlet hole through which a cooling medium is introduced from any one of the inlet chambers (121c, 122c) and an outlet hole through which a cooling medium is discharged to the other of the outlet chambers (121c, 122c).

[0045] Hereinafter, in this specification, the hole formed on the right side of the drawing on one surface of the roller body part (110a) is referred to as the first flow path hole (111a1), and the hole formed on the left side of the drawing is referred to as the second flow path hole (111a2).

[0046] In addition, it should be understood that the first Euro hole (111a1) is either one of the inlet hole and the outlet hole described above, and the second Euro hole (111a2) may be the other of the inlet hole and the outlet hole described above.

[0047] One side of the roller body portion (110a) illustrated in FIG. 3 may be one side of the end of the roller body (110a) to which a flange portion (120) equipped with a chamber (121c, 122c) is coupled. The first flow path hole (111a1) and the second flow path hole (111a2) may be one of the openings (111a) of a plurality of cooling flow paths formed on the one side and the other.

[0048] Furthermore, since the plurality of cooling channels (111) are formed to penetrate from one end to the other end of the roller body (110a), it is preferable that the opening (111a) of the plurality of cooling channels is also formed on the opposite side.

[0049] The first Euro hole (111a1) and the second Euro hole (111a2) may be arranged at predetermined intervals along the outer circumference of the same radius as the plurality of cooling channels (111) in the roller body part (110a), and may be positioned adjacent to each other.

[0050] This is to minimize the area where a flow path is not formed between the inlet hole and the outlet hole by forming the first flow path hole (111a1) and the second flow path hole (111a2) as close as possible to each other, thereby supplying the cooling temperature by the cooling medium as uniformly as possible to the entire outer surface of the roller (110).

[0051] Meanwhile, the flange portion (120) having chambers (121c, 122c) formed therein may include a first flange (121) which is arranged to cover the end of the roller body portion (110a) and has the aforementioned connecting groove (121b), a second flange (122) which is arranged to cover the other end of the first flange (121), and a third flange (123) which is arranged to cover the other end of the second flange (122) and is connected to a flow path module (130) for the inflow and outflow of the cooling flow path (111).

[0052] In addition, the flange portion (120') having the support shaft (122s') described above formed thereon may include a first flange (121') having the connecting groove (121b) described above and arranged to cover the end of the roller body portion (110a), and a second flange (122') arranged to cover the other end of the first flange (121').

[0053] According to one example related thereto, a first assembly groove (110a1) may be formed in the center of one end surface of the roller body portion (110a), which is recessed into the inner side of the roller body portion (110a) and has a predetermined step difference with the adjacent surface.

[0054] In order to prevent leakage of the cooling medium flowing through the plurality of cooling channels (111) in the first assembly groove (110a1), an O-ring groove (110a2) can be formed by recessing into the inner side of the roller body (110a) and having an outer circumference and an inner circumference that correspond to each other, so as to allow an O-ring (R) to be inserted.

[0055] At this time, the O-ring (R) refers to an accessory that acts as a packing to seal the gap between parts, and since this is a previously disclosed technology, further detailed explanation is omitted.

[0056] Meanwhile, although only one end of the two ends of the roller body part (110a) is shown in the drawing, it is preferable that the same first assembly groove (110a1) and O-ring groove (110a2) are formed on one side of the other end as well.

[0057] Hereinafter, in the present specification, among the components forming the cooling roller (100), if the configuration is applied commonly to the flange portions (120, 120') each coupled to both ends of the roller body portion (110a) and the first flange (121, 121') and second flange (122, 122') included therein, both reference numerals are indicated, and if the configuration is applied only to one of them, only one reference numeral is indicated.

[0058] On one side of the roller body part (110a) adjacent to the edge of the first assembly groove (110a1) described above, a plurality of first fastening holes (U1) arranged at predetermined intervals along the outer circumference may be formed.

[0059] Additionally, a first protrusion (121a) is formed on one side of the first flange (121, 121') to protrude from the center, and a plurality of second fastening holes (U2) may be formed on the first flange (121, 121') at positions corresponding to each of the first fastening holes (U1).

[0060] According to one example related thereto, a first protrusion (121a) of a first flange (121, 121') is seated in a first assembly groove (110a1) of a roller body part (110a), and a fixing member (not shown) is fastened to the first fastening hole (U1) and the second fastening hole (U2), so that one side of the first flange (121, 121') can be combined and arranged to cover one end of the roller body part (110a). The fixing member (not shown) may include a screw, bolt, pin, etc.

[0061] Meanwhile, although not shown in the drawing, on the surface opposite to the surface where the first protrusion (121a) is formed in the first flange (121, 121'), a plurality of third fastening holes (not shown) may be formed at predetermined intervals along an outer circumference with a radius different from the outer circumference where the second fastening holes (U2) are arranged.

[0062] Additionally, a plurality of fourth fastening holes (U4) may be formed in the second flange (122, 122') at positions corresponding to each of the third fastening holes (not shown).

[0063] At this time, although the fourth fastening hole (U4) is shown only in the flange portion (120') (left side of the drawing) where the chambers (121c, 122c) are not formed, it is preferable that the fourth fastening hole (U4) is also formed in the same location in the flange portion (120) (right side of the drawing) where the chambers (121c, 122c) are formed.

[0064] In addition, a second assembly groove (121d) that is recessed inward is formed at the center of the other side of the first flange (121), and a second protrusion (122a) that is formed to protrude from the center can be formed on one side of the second flange (122).

[0065] Accordingly, the second protrusion (122a) of the second flange (122) is inserted into the second assembly groove (121d) of the first flange (121) to cover the opening of the second assembly groove (121d), and a fixing member (not shown) is fastened to the third fastening hole (not shown) and the fourth fastening hole (U4) so ​​that one side of the second flange (122, 122') can be combined and arranged to cover the other end of the first flange (121, 121').

[0066] Meanwhile, on the surface opposite to the surface where the second protrusion (122a) of the second flange (122) is formed, a plurality of fifth fastening holes (U5) may be formed at predetermined intervals along an outer circumference with a radius different from the outer circumference where the fourth fastening holes (U4) are arranged.

[0067] Additionally, a plurality of sixth fastening holes (U6) may be formed in the third flange (123) at positions corresponding to each of the fifth fastening holes (U5).

[0068] Furthermore, a third assembly groove (122f) that is recessed inward is formed at the center of the other side of the second flange (122), and a third protrusion (123a) that is formed to protrude from the center and has a step difference with the adjacent surface can be formed on one side of the third flange (123).

[0069] Accordingly, the third protrusion (123a) of the third flange (123) is inserted into the third assembly groove (122f) of the second flange (122) to cover the opening of the third assembly groove (122f), and a fixing member (not shown) is fastened to the fourth fastening hole (U4) and the fifth fastening hole (U5) so that one side of the third flange (123) can be combined and arranged to cover the other end of the second flange (122).

[0070] Meanwhile, either of the inlet chamber and the outlet chamber described above may be formed in the central portion between the first flange (121) and the second flange (122), and the other may be formed in the central portion between the second flange (122) and the third flange (123).

[0071] Hereinafter, in this specification, the chamber formed in the central portion between the first flange (121) and the second flange (122) is designated as the first chamber (121c), and the chamber formed in the central portion between the second flange (122) and the third flange (123) is designated as the second chamber (122c).

[0072] At this time, it should be understood that the first chamber (121c) may be either an inlet chamber or an outlet chamber, and the second chamber (122c) may be the other of an inlet chamber or an outlet chamber.

[0073] Meanwhile, as described above, the second flange (122) can be coupled and arranged to cover the other end of the first flange (121), and at this time, the second protrusion (122a) of the second flange (122) is inserted into the opening of the second assembly groove (121d) formed at the center of the other side of the first flange (121), thereby forming an inner region shielded by the second assembly groove (121d) and forming the first chamber (121c).

[0074] Furthermore, the third flange (123) can be coupled and arranged to cover the other end of the second flange (122), and at this time, the third protrusion (123a) of the third flange (123) can be inserted into the third assembly groove (122f) formed by recessing the center of the other side of the second flange (122) to form the second chamber (122c).

[0075] As an example related to this, a recess groove (122f1) may be further formed in the third assembly groove (122f), which is recessed inwardly to form a step with the inner surface of the third assembly groove (122f). Accordingly, when the third protrusion (123a) of the third flange (123) is inserted into the opening of the third assembly groove (122f) of the second flange (122), the opening of the recess groove (121f) is shielded by the third protrusion (123a), thereby forming a shielded inner region and forming a second chamber (122c).

[0076] Meanwhile, as described above, a flow channel module (130) for the inflow and outflow of a cooling medium may be connected to the other end of the third flange (123). The flow channel module (130) may be equipped with first and second flow channels (131, 132) that supply a cooling medium from the outside to the cooling roller (100) and discharge waste cooling medium from the cooling roller (100) to the outside.

[0077] More specifically, the flow channel module (130) may be connected to a storage facility (not shown) that receives a cooling medium from the outside to the cooling roller (100) and receives a waste cooling medium discharged from the cooling roller (100) to the outside. A first flow channel (131) connected to either an inlet or an outlet (not shown) of the storage facility (not shown) may be formed at the other end of the flow channel module (130), and a second flow channel (132) connected to the other of an inlet or an outlet (not shown) of the storage facility (not shown) may be formed at the bottom of the flow channel module (130).

[0078] At this time, based on the reasons mentioned above, it is preferable that the third flange (123) and the fluid channel module (130) connected to the third flange (123) be provided only on one of the flange portions (120, 120') respectively connected to both ends of the roller body (110a).

[0079] In addition, a gear (G) may be formed on the outer surface of the other side of the third flange (123). The gear (G) of the third flange (123) meshes with an external gear (not shown) connected to a driving means, thereby rotating the flange portion (120, 120') and the roller (110) coupled to the flange portion (120, 120').

[0080] At this time, since the Euro tube module (130) is connected to a storage facility (not shown) that receives a cooling medium from the outside and performs the function of introducing a cooling medium from the outside and discharging a waste cooling medium to the outside, it is preferable that it be fixed and not rotate like the flange portion (120, 120').

[0081] FIG. 6 is a partial cross-sectional view of the BB' portion of the cooling roller (100) shown in FIG. 5. FIG. 7 is a partial cross-sectional view of the CC' portion of the cooling roller (100) shown in FIG. 5. FIG. 8 is a detailed view of the sealing plate (P) shown in FIG. 6 and FIG. 7.

[0082] Referring to FIGS. 6 to 8, the first flange (121) may include a first connecting passage (121b1) formed to connect the first chamber (121c) and the first passage hole (111a1), and a second connecting passage (121b2) formed to connect the second chamber (122c) and the second passage hole (111a2).

[0083] In addition, the openings of the first connecting channel (121b1) and the second connecting channel (121b2) can form the first connecting channel hole (121b11) and the second connecting channel hole (121b21) on one side of the first flange (121).

[0084] At this time, in the drawing, the second connecting channel hole (121b21) is shown as being formed on the inner side of one of the plurality of connecting grooves (121b), but it may also be formed on a surface adjacent to one of the connecting grooves (121b), such as the first connecting channel hole (121b11).

[0085] Meanwhile, the first connecting passage hole (121b11) formed on one surface of the first flange (121) can be positioned at a location corresponding to the first passage hole (111a1) described above when the roller body part (110a) and the first flange (121) are joined. That is, it can be arranged in the same circumferential direction as the connecting groove (121b) described above.

[0086] At this time, the first connecting passage (121b1) can be formed through the interior of the first flange (121) in a bent shape so as to mutually connect the first chamber (121c) and the first passage hole (111a1).

[0087] More specifically, the first connecting channel (121b1) can be formed by connecting a hole formed to a predetermined depth in the thickness direction of the first flange (121) from a first connecting channel hole (121b11) formed on one side of the first flange (121) and a hole formed in the radial direction (a direction perpendicular to the thickness direction) of the first flange (121), thereby forming a through-hole in a bent shape.

[0088] At this time, when processing the first connecting channel (121b1), in order to connect the hole formed to a predetermined depth in the thickness direction of the first flange (121) with the hole formed in the radial direction, a hole is processed to a predetermined depth in the radially inner direction of the first flange (121) on a part of the outer surface of the cylindrical shape of the first flange (121) (upper side in the drawing), and then a hole formed perpendicular to the hole processed in the radially inner direction of the first flange (121) is processed to a predetermined depth on one side of the first flange (121).

[0089] Through such a processing process, a first processing hole (H1) is formed on the outer surface of the first flange (121). Since this can cause leakage of the cooling medium, it is preferable to form the first processing hole (H1) so as to seal it by inserting a finishing member (B) of a size corresponding to the size of the first processing hole (H1).

[0090] Furthermore, the end of the hole formed radially in the first connecting channel (121b1) can be in communication with the first chamber (121c).

[0091] Furthermore, the second connecting passage hole (121b21) formed at a position adjacent to the first connecting passage hole (121b11) can be positioned at a position corresponding to the second passage hole (111a2) when the roller body part (110a) and the second flange (122) are joined.

[0092] At this time, the second connecting passage (121b2) can be formed through the interior of the first flange (121) in a bent shape to mutually connect the second chamber (122c) and the second passage hole (111a2).

[0093] More specifically, to form a second connecting channel (121b2), a hole formed to a predetermined depth in the thickness direction of the first flange (121) and a hole formed to a predetermined depth in the radial direction of the first flange (121) can be connected from a second connecting channel hole (121b21) formed on one surface of the first flange (121).

[0094] Additionally, on the other side of the first flange (121), a hole formed to a predetermined depth in a direction opposite to the second connecting passage hole (121b21) and positioned closer to the center of the roller (110) than the second connecting passage hole (121b21) is connected to a hole formed to a predetermined depth in the radial direction of the first flange (121), so that the second connecting passage (121b2) can be formed through in a bent shape. The end portion of the second connecting passage (121b2) can be extended to the second chamber (122c).

[0095] At this time, during the processing of the second connecting channel (121b2), a second processing hole (H2) is formed on the outer surface of the first flange (121) at a position adjacent to the first processing hole (H1), and a finishing member (B) of a size corresponding to the size of the second processing hole (H2) is inserted. The explanation for this is the same as previously described, so the explanation is omitted.

[0096] Meanwhile, in the first flow path (131) of the above-described flow path module (130), an extension tube (L) in the form of a long hollow tube may be disposed.

[0097] More specifically, with one end of the extension tube (L) connected to the first flow path (131), the other end may sequentially pass through the flow path module (130), the third flange (123), the second chamber (122c), and the second flange (122) and be placed inside the first chamber (121c).

[0098] Furthermore, a guide hole (122d) communicating with the first chamber (121c) is formed in the central part of the second flange (122), so as to extend the second connecting passage (121b2) to the second chamber (122c). Accordingly, the extension tube (L) can be positioned inside the first chamber (121c) by penetrating the second flange (122) while being received in the guide hole (122d).

[0099] Accordingly, when the first chamber (121c) is an inlet chamber, the cooling medium introduced into the first chamber (121c) along the extension tube (L) contained in the guide hole (122d) can be introduced into the cooling channel (111) of the roller body part (110a) along the first connecting channel (121b1), and when the first chamber (121c) is an outlet chamber, the waste cooling medium introduced into the first chamber (121c) along the first connecting channel (121b1) can be discharged to the outside along the extension tube (L) contained in the guide hole (122d).

[0100] At this time, although FIG. 6 shows the case where the flow direction of the cooling medium (indicator arrow) is the case where the first chamber (121c) is an inlet chamber, it should be understood that, based on the reasons above, the first chamber (121c) can function as an outlet chamber, allowing the cooling medium to flow in the opposite direction to the flow direction (indicator arrow) shown in the drawing.

[0101] That is, the first connecting passage (121b1) connected to the first chamber (121c) is connected to the first passage hole (111a1) which performs the role of either an inlet hole or an outlet hole, and the extension pipe (L) can be connected to the first passage pipe (131) which performs the role of either an inlet or an outlet. Accordingly, the first chamber (121c) and the extension pipe (L) can perform either the inlet or outlet of the cooling medium, whichever role is predetermined.

[0102] A communication hole (122g) may be formed in the second flange (122) to mutually communicate the second connecting channel (121b2) and the second chamber (122c).

[0103] According to one example related thereto, a circular groove (122h) is formed on one side of the second flange (122) in a recess in the thickness direction of the second flange (122) and the outer circumference and inner circumference form corresponding rounds, and on the inner side of the circular groove (122h), openings of a plurality of communication holes (122g) arranged at predetermined intervals along the outer circumference may be formed.

[0104] Accordingly, when the second flange (122) is positioned so that one side of it covers the other side of the first flange (121), one side of the circulation groove (122h) formed on one side of the second flange (122) is shielded, thereby forming a space through which the cooling medium can circulate. That is, the second chamber (122c) can be formed to be in communication with the second connecting channel (121b2) through the communication hole (122g) and the circulation groove (122h).

[0105] In the third flange (123), a connecting channel (123b) may be formed that is connected to the second chamber (122c) and is arranged to partially surround the extension tube (L) described above.

[0106] Since the above-described connecting channel (123b) is formed to penetrate from one end of the third flange (123) to the other end, when the third flange (123) and the above-described channel module (130) are connected, the module coupling part (130a) formed protruding from one end of the channel module (130) can be inserted into the other opening of the connecting channel (123b) and coupled.

[0107] In addition, the Euro tube module (130) has an extension channel (133) formed in a bent shape at the other end that communicates with the second Euro tube (132) described above, and can be arranged to surround a part of the extension tube (L) connected to the first Euro tube (131).

[0108] Accordingly, when the module coupling portion (130a) of the flow channel module (130) is inserted into the other opening of the connecting flow channel (123b) formed in the third flange (123), the connecting flow channel (123b) that penetrates from one end of the third flange (123) to the other end, and the extension flow channel (133) that communicates with the second flow channel (132) inside the flow channel module (130) are connected, thereby forming a single flow channel.

[0109] Accordingly, when the second chamber (122c) is an inlet chamber, the cooling medium introduced into the second chamber (122c) along the extension channel (133) and the communication channel (123b) can be introduced into the cooling channel (111) of the roller body part (110a) along the second connecting channel (121b2) through the communication hole (122g) connected to the second chamber (122c), and when the second chamber (122c) is an outlet chamber, the waste cooling medium introduced into the second chamber (122c) through the second connecting channel (121b2) and the communication hole (122g) can be discharged to the outside along the communication channel (123b) and the extension channel (133).

[0110] At this time, although FIG. 7 shows the case where the second chamber (122c) is the discharge chamber in the direction of flow of the cooling medium (indicator arrow), it should be understood that, based on the reasons above, the second chamber (122c) can function as an inlet chamber, allowing the cooling medium to flow in the opposite direction to the direction of flow (indicator arrow) shown in the drawing.

[0111] That is, the second connecting passage (121b2) connected to the second chamber (122c) is connected to the second passage hole (111a2) which performs the role of either an inlet hole or an outlet hole, and the extension passage (133) connected to the connecting passage (123b) can be connected to the second passage pipe (132) which performs the role of either an inlet or an outlet. Accordingly, the second chamber (122c) and the connecting passage (123b) can perform the other predetermined role of an inlet or outlet of a cooling medium.

[0112] Meanwhile, as the cooling medium flows from one of the cooling channels (111) that serves as the inlet point among the plurality of cooling channels (111) toward one of the cooling channels (111) that serves as the outlet point, it is heated by the object to be cooled and may differ from the initial temperature.

[0113] At this time, since the extension tube (L) is accommodated and arranged inside the communication channel (123b), a certain amount of heat exchange occurs between the cooling medium flowing inside the extension tube (L) and the cooling medium flowing through the communication channel (123b). This heat exchange phenomenon can form a uniform temperature between the cooling medium discharged from the cooling channel (111) and the cooling medium flowing into the cooling channel (111).

[0114] Therefore, through the arrangement structure of the extension pipe (L) and the connecting passage (123b) described above, the cooling temperature of the entire area of ​​the roller body part (110a) can be formed uniformly.

[0115] Meanwhile, as described above, the first and second chambers (121c, 122c) are formed by combining the first flange (121) and the second flange (122) and combining the second flange (122) and the third flange (123). At this time, in order to improve the watertightness of each chamber (121c, 122c), an O-ring groove (122b) may be formed inside the second flange (122) to accommodate an O-ring (R).

[0116] According to one example related thereto, a first O-ring groove (122b1) may be formed on a surface adjacent to the area where the outer circumference of the circulation groove (122h) is formed on one side of the second flange (122).

[0117] Additionally, a second O-ring groove (122b2) may be formed between the surface on one side of the second flange (122) where the inner circumference of the circulation groove (122h) is formed and the surface adjacent to the perimeter of the second protrusion (122a).

[0118] Accordingly, by means of an O-ring (R) fitted into the first O-ring groove (121b1) and the second O-ring groove (122b2), it is possible to prevent the leakage of the cooling medium flowing through the communication hole (122g) formed in the first chamber (121c) and the circulation groove (122h).

[0119] Furthermore, on the other side of the second flange (122), a third O-ring groove (122b3) may be formed on the side adjacent to the area where the second chamber (122c) is formed, so as to prevent leakage of the cooling medium contained in the second chamber (122c).

[0120] Meanwhile, referring again to FIG. 2, an oil seal groove (122e) capable of attaching an oil seal (O) can be formed inside the second flange (122).

[0121] More specifically, within the second flange (122), a first oil seal groove (121e1) may be formed in an area adjacent to the second protrusion (122a) forming the first chamber (121c), and a second oil seal groove (122e2) may be formed in an area adjacent to the opening of the third assembly groove (122f) forming the second chamber (122c).

[0122] This is intended to prevent leakage of the cooling medium when the flange portion (120) rotates, and since the oil seal (O) is a previously known technology, further detailed explanation is omitted.

[0123] The cooling roller (100) may further include a sealing plate (P) that improves watertightness by being installed at the joint portion of the roller body (110a) and the flange portion (120, 120').

[0124] According to one example related thereto, the sealing plate (P) may be made of an elastic material such as rubber or urethane to improve watertightness at the joint portion, and may be formed to be elastically adhered to each of the roller body portion (110a) and the flange portion (120, 120').

[0125] In addition, for the sealing plate (P) to be easily inserted between the roller body part (110a) and the flange part (120, 120'), through holes with shapes corresponding to the first protrusion (121a), the second fastening hole (U2), and the connecting groove (121b) of the first flange (121, 121') may be formed.

[0126] More specifically, the sealing plate (P) may have a sealing assembly hole (P1) formed to be interposed between a first assembly groove (110a1) formed at each end of the roller body part (110a) and a first protrusion (121a) formed on one surface of the first flange (121, 121').

[0127] In addition, in an area different from the area where the sealing assembly hole (P1) is formed in the sealing plate (P), a sealing fastening hole (P2) may be formed, which is positioned between the first fastening hole (U1) formed at each end of the roller body part (110a) and the second fastening hole (U2) formed on one surface of the first flange (121, 121'), and is fixed by a fixing member (not shown).

[0128] In addition, in the area where the sealing fastening hole (P2) is formed in the sealing plate (P) and in another area, a sealing hole (P3) may be formed to be interposed between the cooling channel opening (111a) formed at each end of the roller body part (110a) and the connecting groove (121b) formed on one surface of the first flange (121, 121').

[0129] Furthermore, a connecting passage sealing hole (P3a) with a shape corresponding to the first and second connecting passage holes (121b11, 121b21) may be formed in the sealing plate (P) interposed between one side of the flange portion (120) in which the chamber (121c, 122c) is formed among the two sealing plates (P) and the end of the roller body (110a) to which the flange portion (120) is joined.

[0130] In the drawing, the connecting channel sealing hole (P3a) is shown as a single hole, but as previously explained, when the second connecting channel hole (121b21) is formed on a surface adjacent to one of the connecting grooves (121b), it can be formed in multiple numbers.

[0131] According to the configuration of the cooling roller (100) described above, the cooling channel (111) is formed adjacent to the outer surface of the roller (110), so that the cooling temperature can be effectively transferred to the object, and each cooling channel (111) is interconnected by the connecting groove (121b), so that the cooling temperature can be formed uniformly over the entire surface area of ​​the roller (110). Therefore, a cooling roller (100) capable of improving the cooling efficiency of the object can be provided.

[0132] FIG. 9 is a conceptual diagram showing the configuration of a heat-pressing roll-to-roll laminator including a cooling roller (100).

[0133] Hereinafter, as another example for achieving the above-mentioned purpose, a heat-pressing roll-to-roll laminator including a cooling roller (100) will be described with reference to FIG. 9.

[0134] Referring to FIG. 9, the thermal compression roll-to-roll laminator (10) is configured to laminate a film (F) onto a substrate (S) by passing it through multiple rolls and to compress the substrate (S) on which the film (F) is laminated. The thermal compression roll-to-roll laminator (10) is configured to make line contact rather than surface contact with the substrate (S), so that the process can be performed with relatively low pressure, that is, low load, compared to the surface contact method.

[0135] The thermal compression roll-to-roll laminator (10) can be configured to continuously repeat the laminating and thermal compression processes. That is, for a substrate (S) on which the laminating process of a film (F) and the thermal compression process of the substrate (S) on which the film (F) is laminated are completed as a first process, the process of laminating a new film (F) onto the substrate (S) and performing the thermal compression process can be continuously repeated as a second process. Accordingly, a laminated substrate (S) having a structure in which a plurality of films (F) are stacked on the substrate (S) can be manufactured.

[0136] The hot-press roll-to-roll laminator (10) includes a vacuum chamber (210), a laminating roller (220), a hot-press roller (230), and a cooling roller section (100). At this time, the cooling roller section (100) may have the same configuration as the cooling roller (100) described above.

[0137] The vacuum chamber (210) is configured to be depressurized by a vacuum pump (not shown). Multiple vacuum pumps (not shown) may be provided. For reference, in the case of a conventional general laminator, the laminating process is performed in an atmospheric environment, and during this process, voids such as bubbles occur on the substrate (S), which causes a problem of degraded lamination quality, and this leads to defects in the laminated substrate (S).

[0138] And, a load lock chamber (271, 272) may be installed in the vacuum chamber (210).

[0139] The load lock chambers (271, 272) are configured to create an environment identical to the vacuum level of the vacuum chamber (210) so that the vacuum level acting on the substrate (S) before and after the substrate (S) enters the vacuum chamber (210) is not broken. The load lock chambers (271, 272) may include an inlet-side load lock chamber (271) positioned at the inlet side of the vacuum chamber (210) and an outlet-side load lock chamber (272) positioned at the outlet side of the vacuum chamber (210). Additionally, the inlet-side load lock chamber (271) and the outlet-side load lock chamber (272) may each be equipped with a door valve (271a, 272a) for entry and exit between the outside and the load lock chambers (271, 272), and a gate valve (271b, 272b) for entry and exit between the load lock chambers (271, 272) and the vacuum chamber (210).

[0140] More specifically, the substrate (S) is introduced into the inlet-side load lock chamber (271) with the door valve (271a) of the inlet-side load lock chamber (271) open. Subsequently, a vacuum is created with the door valve (271a) and gate valve (272b) of the inlet-side load lock chamber (271) closed. Next, the door valve (271a) of the inlet-side load lock chamber (271) is closed and the gate valve (271b) is opened, and the substrate (S) is transferred into the vacuum chamber (210). Afterward, after the laminating and heat pressing processes for the substrate (S) are completed inside the vacuum chamber (210), the gate valve (272b) is opened while the outlet-side load lock chamber (272) is maintained in a vacuum state, and the substrate (S) is introduced into the outlet-side load lock chamber (272). Finally, the gate valve (272b) of the exit-side load lock chamber (272) can be closed and the door valve (272a) opened so that the substrate (S) can be discharged to the outside from the exit-side load lock chamber (272).

[0141] A laminating roller (220) is installed inside a vacuum chamber (210). The laminating roller (220) is configured to laminate a film (F) onto a substrate (S). The laminating roller (220) may be made of a rubber material. The laminating roller (220) is configured to laminate the film (F) without voids by applying uniform pressure and temperature to the substrate (S) in a vacuum state. The laminating roller (220) may be equipped with a lower roller (221) and an upper roller (222) arranged in an upward and downward direction.

[0142] The above film (F) can be, for example, DFSR (Dry Film Solder Resist) or ABF (Ajinomoto Build-up Film). ABF (Ajinomoto Build-Up Film) is one of the insulating materials for semiconductor packaging substrates (S) developed by Ajinomoto. In addition, the substrate (S) to which the film (F) is laminated can ultimately be an FC-BGA (Flip Chip Ball Grid Array). FC-BGA is a type of PCB (Printed Circuit Board) used when the size of the substrate (S) is larger than the chip. To manufacture high-performance semiconductors, it is necessary to equip CPUs, GPUs, etc., with a large number of cores; however, as the number of cores increases, the size of the semiconductor substrate (S) also increases, so the above FC-BGA must be used as a necessity to manufacture high-performance semiconductors.

[0143] A hot press roller (230) is installed in the vacuum chamber (210) together with a laminating roller (220). The hot press roller (230) is configured to flatten a substrate (S) on which a film (F) is laminated by applying heat.

[0144] Additionally, the hot press roller (230) includes a lower roller (231) and an upper roller (232).

[0145] The lower roller (231) may be positioned below the upper roller (232) and formed to have a fixed position. The substrate (S) is configured to pass through a gap formed between the lower roller (231) and the upper roller (232).

[0146] The upper roller (232) may be formed to be movable vertically relative to the lower roller (231). That is, the upper roller (232) may be formed to be movable so as to move closer to or further away from the lower roller (231). The hot press roller (230) may be provided with an upper roller support frame (not shown) that supports the upper roller (232). The upper roller support frame (not shown) may be formed to move vertically together with the upper roller (232). The upper roller (232) may be made to be movable vertically by, for example, a motor or a hydraulic device.

[0147] Additionally, the hot press roller (230) may be further provided with an upper auxiliary roller (232a) positioned above the upper roller (232) and a lower roller (231) to apply additional pressure to the substrate (S) and to be rotatable in contact with the upper roller (232) and the lower roller (231), respectively, and an upper auxiliary roller (232a) positioned below the lower roller (231) to apply downward pressure to the upper roller (232), and a lower auxiliary roller (231a) positioned below the lower roller (231) to apply upward pressure to the lower roller (231). Accordingly, the thickness and flatness of the target substrate (S) can be realized more precisely. For reference, flatness is also called planarity and refers to a geometric tolerance that regulates how flat the surface of a workpiece is. By referring to the flatness, one can check how flat or flat the processed surface is.

[0148] Additionally, the hot press rollers (230) may be provided in multiple numbers and configured to sequentially press the substrate (S) on which the film (F) is laminated by distributing the amount of compression. For example, the distance between the lower roller (231) and the upper roller (232) of the hot press roller (230) placed at the front end may be controlled to a first value, and the distance between the lower roller (231) and the upper roller (232) of the hot press roller (230) placed at the rear end may be controlled to a second value that is smaller than the first value. Accordingly, the phenomenon in which the substrate (S) is damaged due to an excessive amount of compression being applied to the substrate (S) all at once while passing through the hot press rollers (230) is prevented, and the quality of the laminated and heat-pressed substrate (S) can be improved.

[0149] Meanwhile, the cooling roller unit (100) is installed within the vacuum chamber (210) and can be formed to cool the substrate (S) on which the film (F), which has been sequentially compressed by the hot press roller (230), is laminated. As the laminated and heat-compressed substrate (S) passes through the cooling roller unit (100), the phenomenon of deformation caused by heat being restored can be prevented. In addition, the cooling roller unit (100) can perform the role of cooling the carrier film (CF) on the substrate (S) on which the film (F) is laminated to facilitate the peeling of the carrier film (CF). The cooling roller unit (100) may be equipped with a lower cooling roller (100') and an upper cooling roller (100'') arranged in the vertical direction.

[0150] Meanwhile, the heat-pressing roll-to-roll laminator (10) may further include a preheating section (240).

[0151] The preheating unit (240) may be installed within the vacuum chamber (210) and formed to apply heat to the substrate (S) on which the film (F) is temporarily attached before entering the laminating roller (220). The preheating unit (240) may be configured to generate heat using an infrared (IR) method. The preheating unit (240) may consist of a lower preheating device (241) and an upper preheating device (242) that are positioned to face each side of the substrate (S) and generate heat. The lower preheating device (241) and the upper preheating device (242) may each be formed to have a plate shape. In the drawings of the present invention, the preheating unit (240) is shown as being positioned in front of the laminating roller (220), but it may be positioned at other locations within the vacuum chamber (210). For example, the preheating unit (240) may be positioned between a plurality of hot press rollers (230).

[0152] The heat-press roll-to-roll laminator (10) may further include a release liner peeling unit positioned at the rear end of the cooling roller (100) to peel off a carrier film (CF) on a substrate (S) and discharge the substrate (S) from the vacuum chamber (210).

[0153] Meanwhile, the thermal compression roll-to-roll laminator (10) may further include a film tacking section (260). The film tacking section (260) is configured to attach the film (F) only to the front end of the substrate (S) and transfer it to the next process. The film tacking section (260) may be placed outside the vacuum chamber (210). The film tacking section (260) may be equipped with a tacking unit (263). The tacking unit (263) may, for example, tacking the film (F) to the substrate (S) at a predetermined location, and then cutting the tacking film (F) to fit the size of the substrate (S) and supplying it into the vacuum chamber (210) together with the substrate (S). As shown in FIG. 9, the film attachment portion (260) may be equipped with a lower winder (261) for winding a film (F) that is attached to the bottom surface of the substrate (S) and an upper winder (262) for winding a film (F) that is attached to the top surface of the substrate (S).

[0154] Meanwhile, the thermal compression roll-to-roll laminator (10) may further include a carrier film unwinder (281) and a carrier film rewinder (282) that supply and retrieve a carrier film (CF) formed to wrap around the substrate (S) so that the substrate (S) can move within the vacuum chamber (210) without falling. The substrate (S) can move stably within the vacuum chamber (210) while wrapped in the carrier film (CF). The carrier film (CF) can also perform the role of preventing contamination of the substrate (S) during the process.

[0155] The carrier film unwinder (281) and the carrier film rewinder (282) may each be equipped with a lower winder (281a, 282a) that winds a carrier film (CF) corresponding to the bottom surface of the substrate (S) and an upper winder (281b, 282b) that winds a film (F) that is temporarily attached to the top surface of the substrate (S). The carrier film unwinder (281) and the carrier film rewinder (282) may each be configured to allow the winding tension of the carrier film (CF) to be adjustable.

[0156] According to the configuration of the thermal compression roll-to-roll laminator (10) described above, the laminating process and the thermal compression process are performed in a vacuum state, thereby preventing the formation of empty spaces such as bubbles in the substrate (S). In addition, the film (F) sequentially compressed by the hot press roller (230) and the laminated substrate (S) can be cooled by the cooling roller unit (100).

[0157] In addition, the cooling roller section (100) can be in rolling contact with the laminated and heat-pressed substrate (S) to achieve rapid cooling. Furthermore, a plurality of cooling channels (111) through which a cooling medium flows are formed adjacent to the outer surface of the roller (110), so that the cooling temperature of the entire surface of the roller (110) can be formed uniformly.

[0158] Accordingly, the laminated and heat-pressed substrate (S) passes through the cooling roller section (100), thereby preventing the phenomenon of deformation caused by heat being restored. In addition, the cooling roller section (100) can perform the role of cooling the carrier film (CF) on the substrate (S) on which the film (F) is laminated, thereby facilitating the peeling of the carrier film (CF). That is, since the cooling roller section (100) can rapidly realize cooling by physically contacting the laminated and heat-pressed substrate (S), a heat-pressed roll-to-roll laminator (10) can be provided that performs a laminating process on a substrate (S) that can ensure quality while satisfying specifications applicable to electronic products having a miniaturized and lightweight structure.

[0159] The foregoing description is merely illustrative, and various modifications may be made by those skilled in the art without departing from the scope and technical spirit of the described embodiments. The foregoing embodiments may be implemented individually or in any combination. Explanation of the symbols

[0160] 100 : Cooling roller 110 : Roller 110a: Roller body 111 : Cooling Euro 120 : Flange section 120' : Flange section 130 : Euro pipe module L : Extension tube P : Sealing plate 10 : Hot-press roll-to-roll laminator F: Film S: Substrate

Claims

Claim 1 A roller body portion formed in a cylindrical shape; and a flange portion each coupled to both ends of the roller body, wherein the roller body portion has a plurality of cooling channels formed adjacent to the outer surface of the roller, which are formed at predetermined intervals along the outer circumference and penetrate from one end to the other end, and on one surface of the flange portion coupled to the roller body portion, a connecting groove is arranged in a circumferential direction to cover the opening of one cooling channel and the opening of another cooling channel so that a cooling medium can move from one of the plurality of cooling channels to another cooling channel adjacent thereto, and the flange portion comprises a first flange having the connecting groove and arranged to cover the end of the roller body portion; and a second flange arranged to cover the first flange. A cooling roller for laminating, comprising a third flange arranged to cover the second flange and connected to a channel module for the inflow and outflow of a cooling medium, wherein either an inflow chamber or an outflow chamber is formed between the first flange and the second flange, and the other of the inflow chamber or the outflow chamber is formed between the second flange and the third flange, and wherein each of the inflow chamber and the outflow chamber communicates with the plurality of cooling channels for the inflow and outflow of a cooling medium. Claim 2 A cooling roller for laminating according to claim 1, characterized in that the connecting groove is formed in the shape of an elongated groove, with one end corresponding to the opening of any one of the cooling channels and the other end corresponding to the opening of the other cooling channel. Claim 3 A cooling roller for laminating according to claim 2, characterized in that a rounded slope is formed on the inner surface of the connecting groove toward the inner side of the flange portion. Claim 4 delete Claim 5 A cooling roller for laminating according to claim 2, characterized in that among the plurality of cooling channels, an inlet hole through which a cooling medium is introduced from the inlet chamber and an outlet hole through which a cooling medium is discharged to the outlet chamber are arranged adjacent to each other. Claim 6 delete Claim 7 A cooling roller for laminating according to claim 5, wherein the first flange comprises: a first connecting passage formed through in a bent shape to mutually communicate either one of the inlet chamber and the discharge chamber with either one of the inlet hole and the discharge hole; and a second connecting passage formed through in a bent shape to mutually communicate the other one of the inlet chamber and the discharge chamber with the other one of the inlet hole and the discharge hole. Claim 8 A cooling roller for laminating according to claim 7, wherein the extension tube of the above-described flow channel module sequentially penetrates the third flange, the other of the inlet chamber and the discharge chamber, and the second flange and is disposed in either the inlet chamber or the discharge chamber, wherein the second flange has a communication hole formed to mutually communicate the second connecting flow channel with the other of the inlet chamber and the discharge chamber, and the third flange has a communication flow channel formed to communicate with the other of the inlet chamber and the discharge chamber and to surround the extension tube. Claim 9 A cooling roller for laminating according to claim 1, further comprising a sealing plate interposed between the roller body portion and the flange portion, elastically adhering to the roller body portion and the flange portion respectively, and having a connecting hole corresponding to the connecting groove. Claim 10 A thermal compression roll-to-roll laminator comprising: a vacuum chamber depressurized by a vacuum pump; a laminating roller installed in the vacuum chamber and laminating a film on a substrate; at least one hot press roller installed in the vacuum chamber and flattening the substrate on which the film is laminated by applying heat; and a cooling roller installed in the vacuum chamber and cooling the substrate on which the film is laminated after passing through the hot press roller, and according to any one of claims 1 to 3, 5 and 7.

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