Stocker apparatus

Abstract

A stoker device is disclosed. A stoker device according to one embodiment of the present invention includes a fork unit that is coupled to a predetermined stoker body so as to be movable up / down and transfers a cassette to a cassette shelf, and the fork unit includes a plurality of fork arms; a top fork on which a cassette is loaded and which is coupled to the end of the fork arms and operates by the action of the fork arms; and a dust generation prevention fork synchronization drive unit provided in an area where the fork arms and the top fork are connected and which synchronizes the movement between the fork arms and the top fork while preventing dust generation.

Description

Technology Field

[0001] The present invention relates to a stoker device, and more specifically, to a stoker device capable of eliminating or minimizing dust generation so as to be suitable for a clean environment. Background Technology

[0002] When manufacturing substrates that can be used as Flat Panel Displays (FPDs), they are typically mounted in cassettes. Then, the cassette containing the substrate is temporarily stored on a cassette shelf of a cassette storage system before being transported to another piece of equipment for the next process.

[0003] This is intended to resolve the buffering problem caused by differences in substrate processing capabilities and processing times of each piece of equipment performing each process. At this time, a stoker device may be used as a means to move the cassettes.

[0004] A typical stoker device performs a transfer and loading process (handling) of removing a cassette from a cassette shelf or loading a cassette onto a cassette shelf through the forking action of a fork unit.

[0005] Among the various types of fork units, the SCARA type fork (STK Rack Master Scara Type Fork) is equipped with an arm rotation angle synchronization system due to the control limitations of the motor; it generally utilizes a control method that directly connects steel or resin gears to the shaft.

[0006] However, considering that in the case of steel type gears, dust is inevitably generated due to the separation of grease used for smooth operation of the gears, that is, due to repetitive mechanical compression, and in the case of resin type gears, dust is inevitably generated due to large machining errors caused by the characteristics of the material, there is a problem that they are not suitable for clean environments. Prior art literature

[0007] Republic of Korea Patent Publication No. 10-2009-0046890 The problem to be solved

[0008] Therefore, the technical problem that the present invention aims to solve is to provide a stoker device that can eliminate or minimize dust generation so as to be suitable for a clean environment. means of solving the problem

[0009] According to one aspect of the present invention, a stoker device may be provided, comprising a fork unit that is movably coupled to a predetermined stoker body in an up / down direction and transfers a cassette to a cassette shelf, wherein the fork unit comprises: a plurality of fork arms; a top fork on which a top key cassette is loaded and which is coupled to the end of the fork arms and which operates by the action of the fork arms; and a dust generation prevention fork synchronization drive unit provided in an area where the fork arms and the top fork are connected and which synchronizes the movement between the fork arms and the top fork while preventing dust generation.

[0010] The fork unit may further include a carriage; and an up / down frame, one side of which is connected to the carriage and the other side of which is coupled to the stoker body so as to be movable up / down.

[0011] The fork unit may further include a turntable connected to the fork arms and rotatably coupled to the carriage in forward and reverse directions.

[0012] The fork arms may include a pair of first and second first fork arms, each having one end rotatably coupled to the turntable; and a pair of first and second second fork arms, each having one end rotatably connected to the other end of the first and second first fork arms, each having the other end connected to the fork synchronous drive unit for preventing dust generation.

[0013] The above dust generation prevention fork synchronous drive unit may include: a first arm shaft axially coupled to the first second fork arm; a second arm shaft spaced apart from the first arm shaft and axially coupled to the second second fork arm; and a differential gear unit connecting the first arm shaft and the second arm shaft.

[0014] The above-mentioned dust generation prevention fork synchronous drive unit may further include a first belt connection unit that connects the differential gear unit and the first arm shaft in a belt manner.

[0015] The above-mentioned dust generation prevention fork synchronous drive unit may further include a second belt connection unit that connects the differential gear unit and the second arm shaft in a belt manner.

[0016] The differential gear unit may include a main gear; a first bevel gear portion that meshes with one side of the main gear and is connected to the first belt connection portion; and a second bevel gear portion that meshes with the other side of the main gear and is connected to the second belt connection portion.

[0017] The first belt connection may include a first driving pulley connected to the first arm shaft; a first driven pulley connected to the first bevel gear portion; and a first timing belt connecting the first driving pulley and the first driven pulley.

[0018] The second belt connection may include a second drive pulley connected to the second arm shaft; a second driven pulley connected to the second bevel gear section; and a second timing belt connecting the second drive pulley and the second driven pulley.

[0019] The above stoker body may include a lower frame movably along a rail; a pair of mast units coupled to the lower frame at a distance from each other; and an upper frame connecting the upper ends of the pair of mast units.

[0020] The mast unit may include a mast cover frame having a front exposed portion formed along the height direction, with a central area of ​​the front cover forming the front portion being open; and a lifting module having a lifting block disposed inside the mast cover frame and connected to the fork unit through the front exposed portion, and moving the lifting block along the front exposed portion to move the fork unit up and down.

[0021] The mast unit may further include a shielding module that is positioned to penetrate at least a portion of the lifting block to allow movement of the lifting block, is detachably coupled to the inner wall of the front cover, and shields the front exposed portion.

[0022] The shielding module above may be a dustproof belt that seals the front exposed portion.

[0023] The above-mentioned vibration-damping belt may include: a vibration-damping portion provided with a width corresponding to the width of the front exposed portion, which absorbs vibrations caused by the operation of the lifting module and blocks the scattering of particles; and a magnetic band portion made of a permanent magnet material that is provided to extend along the longitudinal direction of the vibration-damping portion on both sides of the vibration-damping portion, is formed integrally with the vibration-damping portion, and is magnetically coupled to the inner wall of the front cover.

[0024] A steel play portion that magnetically combines with the magnetic band portion may be provided on the inner wall of the front cover. Effects of the invention

[0025] According to the present invention, dust generation can be eliminated or minimized to make it suitable for a clean environment. Brief explanation of the drawing

[0026] FIG. 1 is a configuration diagram of a stoker system to which a stoker device according to one embodiment of the present invention is applied. FIG. 2 is a perspective view of a stoker device according to one embodiment of the present invention. Figure 3 is a perspective view of the mast unit. Figure 4 is a drawing showing the state in which a part of the front cover of the mast cover frame has been removed. Figure 5 is a cross-sectional view of Figure 4. Figure 6 is a cross-sectional view of a mast unit. Fig. 7 is a perspective view of a fork unit. Figure 8 is a schematic drawing showing a portion of the top fork and dust generation prevention fork synchronous drive unit area from Figure 7. Figure 9 is a plan view of Figure 8. Figure 10 is a cross-sectional view along line AA of Figure 9. Specific details for implementing the invention

[0027] The present invention is capable of various modifications and may have various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the invention to specific embodiments, and it should be understood that the invention includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention.

[0028] The present invention will be described in detail below by explaining preferred embodiments of the invention with reference to the accompanying drawings. Identical reference numerals in each drawing indicate identical components.

[0029] FIG. 1 is a configuration diagram of a stoker system to which a stoker device according to an embodiment of the present invention is applied, FIG. 2 is a perspective view of a stoker device according to an embodiment of the present invention, FIG. 3 is a perspective view of a mast unit, FIG. 4 is a diagram showing a state in which a part of the front cover of a mast cover frame has been removed, FIG. 5 is a cutaway cross-sectional view of FIG. 4, FIG. 6 is a cross-sectional view of a mast unit, FIG. 7 is a perspective view of a fork unit, FIG. 8 is a diagram schematically showing a portion of the top fork and the fork synchronous drive unit area for preventing dust generation in FIG. 7, FIG. 9 is a plan view of FIG. 8, and FIG. 10 is a cross-sectional view along line AA of FIG. 9.

[0030] Referring to these drawings, the stoker device (1) according to the present embodiment is designed to eliminate or minimize dust generation so as to be suitable for a clean environment.

[0031] A stoker device (1) according to the present embodiment capable of providing such effects includes a stoker body (200) and a fork unit (300, fork unit) coupled to the stoker body (200) so as to be movable up / down and transferring a cassette (C, cassette, see FIG. 1) to a cassette shelf (8, see FIG. 1).

[0032] Before providing a detailed description of the fork unit (300), the stoker system and the stoker body (200) shown in FIG. 1 will be described first.

[0033] Referring to FIG. 1, a stoker system to which a stoker device (1) according to one embodiment of the present invention is applied may include a cabinet (not shown) having cassette shelves (8) on which a cassette (C) containing a substrate is loaded and an input / output port (3), and a stoker device (1) that transports the cassette (C) while moving between the input / output port (3) and the cassette shelves (8).

[0034] The cabinet (not shown) is roughly in the shape of a rectangular container and forms a place where cassettes (C) are temporarily stored. However, the cabinet can be appropriately modified in design depending on the number and size of cassettes (C) to be loaded inside.

[0035] The incoming / outgoing port (3) refers to a place where cassettes (C) enter and exit the cabinet. Two or more incoming / outgoing ports (3) may be provided in the cabinet as needed. A roller conveyor may be installed at the incoming / outgoing port (3). The roller conveyor of the incoming / outgoing port (3) may be connected to a logistics line outside the cabinet, and cassettes (C) transported from each cassette shelf (8) to the incoming / outgoing port (3) may be transported along the conveyor logistics line to any process location. Of course, conversely, cassettes (C) may be transported from the outside and loaded onto the cassette shelf (8) through the incoming / outgoing port (3).

[0036] The cassette shelves (8) can be supported by a column (4) that is vertically extended inside the cabinet. Additionally, the cassette shelves (8) can be placed on each side of the cabinet with a rail (5) in between, through which the stoker device (1) can move inside the cabinet.

[0037] Meanwhile, the stocker device (1) moves between the incoming / outgoing port (3) and the cassette shelves (8) and loads the cassette (C) onto the cassette shelves (8) or takes it out to the outside through the incoming / outgoing port (3).

[0038] As previously mentioned, such a stoker device (1) may include a stoker body (200) and a fork unit (300, fork unit) coupled to the stoker body (200) so as to be movable up / down.

[0039] As shown in FIG. 2, the stoker body (200) may include a lower frame (210) that is movably arranged along a rail (5) installed on the bottom of the cabinet, a pair of mast units (100) coupled to the lower frame (210) at a distance from each other, and an upper frame (220) connecting the upper ends of the pair of mast units (100).

[0040] The lower frame (210) supports the mast unit (100) and transports the cassette (C) horizontally within the cabinet. The lower frame (210) is provided with a plurality of wheels (210a) to allow it to move along the rail (5).

[0041] A pair of mast units (100) serve to transport a cassette (C) to the height of the corresponding cassette shelf (8) in the cabinet via a fork unit (300). An up / down frame (350) is connected to the pair of mast units (100) so as to be vertically movable, and the up / down frame (350) supports the fork unit (300) horizontally.

[0042] With reference to FIGS. 3 to 6, the structure of the mast unit (100) is examined in more detail. The mast unit (100) applicable to the present embodiment may include a mast cover frame (110) having a front exposed portion (D) formed by opening the central area of ​​the front portion along the height direction, a lifting module (120) that moves the fork unit (300) up and down along the mast cover frame (110), and a shielding module (130) that shields the front exposed portion (D). When a mast unit (100) including a shielding module (130) as in the present embodiment is applied, it is advantageous to prevent particles from leaking out from inside the mast cover frame (110) when transporting the cassette (C).

[0043] Of course, the scope of the present invention is not limited thereto, and a mast unit (not shown) in a form where the shielding module (130) is not applied may also be applied, so the scope of the present invention is not limited to the shape of the drawing.

[0044] The mast cover frame (110) includes a mast frame (111) installed to stand upright on a lower frame (210), a front cover (112) attached to the front of the mast frame (111), and a rear cover (113) attached to the rear of the mast frame (111). In this embodiment, the front cover (112) and the rear cover (113) may be attached by being fitted into grooves formed in the mast frame (111), but alternatively, the front cover (112), the rear cover (113), and the mast cover may be formed as a single unit.

[0045] The front cover (112) is the front portion of the mast cover frame (110), and the central area of ​​the front cover (112) is cut out along the height direction to form a front exposed portion (D). Additionally, a steel plate portion (112a) made of steel is provided on the inner wall of the front cover (112). The steel plate portion (112a) can be magnetically coupled with the anti-vibration belt (130) to be described later. This front cover (112), together with the mast frame (111), forms a first space within the mast cover frame (110) through which the lifting block (121) can move up and down.

[0046] The rear cover (113) is a closed structure at the rear of the mast cover frame (110) and together with the mast frame (111) forms a second space (H2) separated from the first space (H1). A weight balance weight (150) can be positioned in the second space (H2) so as to be movable up and down. The weight balance weight (150) is connected to a belt (123) to be described later and can serve to reduce the load acting on the drive motor (122) so that a heavy cassette (C) can be lifted by offsetting the load acting on the lifting block (121).

[0047] The lifting module (120) is positioned inside the mast cover frame (110) and serves to move the fork unit (300) up and down. This lifting module (120) can be implemented by a combination of a pair of pulleys (not shown) that are spaced apart vertically and form a driving shaft and a driven shaft, a belt (123) that engages with the pair of pulleys and performs a winding or unwinding operation, a lifting block (121) with both ends connected to the belt (123), and a driving motor (122) that provides power to rotate the pulleys. However, alternatively, the lifting module (120) may also be implemented by a combination of a motor and a ball screw, so the scope of the present invention is not limited to the shape of the drawing.

[0048] The lifting block (121) is coupled to an up / down frame (350) that supports the fork unit (300) through the front exposed portion (D) of the front cover (112), and the other side is slidably coupled along a guide rail (140) that is coupled along the longitudinal direction to the mast frame (111) in the aforementioned first space (H1). With this configuration, the lifting module (120) moves the lifting block (121) up and down, thereby moving the fork unit (300) up and down along the height direction of the mast cover frame (110).

[0049] The shielding module (130) serves to shield the front exposed portion (D) of the front cover (112), which moves up and down when the lifting block (121) is coupled to the up / down frame (350). In this embodiment, the shielding module (130) covers the front exposed portion (D) but is positioned so that the movement of the lifting block (121) is allowed.

[0050] Although not necessarily so, in this embodiment, the shielding module (130) may be applied as a dustproof belt (130) capable of shielding the front exposed portion (D) of the front cover (112). The dustproof belt (130) is positioned between the front cover (112) of the mast cover frame (110) and the belt (123) of the lifting module (120).

[0051] This anti-vibration belt (130) penetrates at least one area of ​​the lifting block (121) to cover the front exposed portion (D). At this time, the anti-vibration belt (130) is configured to penetrate the lifting block (121), so that with the anti-vibration belt (130) in between, one side of the lifting block (121) is exposed to the outside of the front cover (112), and the other side is slidably coupled to the guide rail (140) inside the front cover (112).

[0052] The anti-vibration belt (130) may include an anti-vibration section (131) and a magnetic band section (132). The anti-vibration section (131) is formed to have a width and length corresponding to the front exposed section (D) and covers the front exposed section (D). This anti-vibration section (131) absorbs vibrations generated within the mast cover frame (110) due to the operation of the lifting module (120) and prevents particles from leaking out.

[0053] The magnetic band portion (132) is a part that is coupled to the inner wall of the front cover (112) and is formed integrally with the anti-vibration portion (131), and extends along the longitudinal direction of the anti-vibration portion (131) in a band shape along both edges of the anti-vibration portion (131). The magnetic band portion (132) is made of a permanent magnet material and can be magnetically coupled with the steel plate portion (112a) provided on the inner wall of the front cover (112). By closely coupling the magnetic band portion (132) to the inner wall of the front cover (112) in this way, the gap that may occur between the front cover (112) and the anti-vibration belt (130) can be eliminated.

[0054] The lifting block (121) includes a lifting block body (121a) having a tunnel section (121b) through which a vibration-damping belt (130) passes when moving up and down, and a clamping member (121c) that clamps a belt (123) to the lifting block body (121a).

[0055] The lifting block (121) is connected to the belt (123). Specifically, the belt (123) can be clamped to the lifting block body (121a) by a clamping member (121c) while positioned to overlap the end regions of the lifting block body (121a).

[0056] Additionally, the lifting block body (121a) is formed such that the width of the central area is thicker than the edge, allowing it to protrude outside the front cover (112) through the front exposed portion (D). The area protruding outside the front cover (112) in this manner can be bolted to the up / down frame (350).

[0057] The tunnel section (121b) is formed by penetrating the interior of the lifting block body (121a), through which the anti-vibration belt (130) is drawn in and out when the lifting block (121) moves up and down. At both entrances of the tunnel section (121b), a pair of guide rollers (R1) are provided to guide the anti-vibration belt (130) to be drawn into or drawn out of the tunnel section (121b), and inside the tunnel section (121b), a pair of pressure rollers (R2) are provided to press the anti-vibration belt (130) so that it is separated from the inner wall of the front cover (112).

[0058] The guide roller (R1) is rotatably coupled to the lifting block body (121a) and makes rolling contact with the inner surface of the anti-vibration belt (130), and the pressure roller (R2) is rotatably coupled inside the tunnel section (121b) at a position adjacent to the guide roller (R1) with a step difference from each other and presses the outer surface of the anti-vibration belt (130) inward. Accordingly, as the lifting block (121) moves up and down, the anti-vibration belt (130) is pulled into the tunnel section (121b) of the lifting block (121) and detaches from the inner wall of the front cover (112), and when pulled out from the inside of the lifting block (121), it can be re-coupled to the inner wall of the front cover (112) by magnetic force.

[0059] Meanwhile, the fork unit (300) is coupled to the stocker body (200) so as to be movable up / down as in FIG. 2, and performs the practical role of transferring the cassette (C, cassette, see FIG. 1) to the cassette shelf (8, see FIG. 1).

[0060] This fork unit (300) may include a carriage (310), an up / down frame (350) which is connected to the carriage (310) on one side and coupled to the stoker body (200) on the other side so as to be movable up / down, a turntable (320) which is coupled to the carriage (310) so as to be rotatable in forward and reverse directions, a fork arm (330) which is movably coupled to the turntable (320), and a top fork (340) on which a cassette (C) is loaded and which is coupled to the end of the fork arm (330).

[0061] In addition, the fork unit (300) is provided in an area where the fork arms (330) and the top fork (340) are connected, and further includes a dust generation prevention fork synchronization drive unit (400) that synchronizes the movement between the fork arms (330) and the top fork (340) while preventing dust generation. Since the dust generation prevention fork synchronization drive unit (400) is applied, the fork unit (300) according to the present embodiment can be used in a clean environment.

[0062] The carriage (310) is connected to the up / down frame (350) and is a structure that moves up / down on the stoker body (200). That is, the carriage (310) has a square plate shape, and both corner areas are connected to the up / down frame (350).

[0063] A pivot member (360) equipped with a pivot plate (361) is attached to each corner of the carriage (310). The pivot member (360) can rotate within a certain angle with the hinge (362) as an axis.

[0064] The up / down frame (350) is a part that supports the carriage (310) horizontally and is bolted together with the aforementioned lifting block (121) so that it can move up and down along the height direction of the mast unit (100) together with the lifting block (121).

[0065] A turntable (320) is provided on the upper surface of the carriage (310) so as to be rotatable in forward and reverse directions, and a fork arm (330) is attached to the turntable (320). Then, a top fork (340) that supports and holds a cassette (C) is attached to the end of the fork arm (330).

[0066] According to the present embodiment, the fork arms (330) are applied in multiple numbers. That is, the fork arms (330) include a pair of first and second first fork arms (331, 332) each having one end rotatably coupled to a turntable (320), and a pair of first and second second fork arms (333, 334) each having one end rotatably connected to the other end of the first and second first fork arms (331, 332) respectively, and the other end connected to a fork synchronous drive unit (400) for preventing dust generation. In this way, the top fork (340) can be advanced or retracted by the synchronized operation of the pairs of first and second first fork arms (331, 332) and the first and second second fork arms (333, 334).

[0067] Meanwhile, the dust generation prevention fork synchronous drive unit (400), as previously mentioned, performs the role of synchronizing the movement between the fork arms (330) and the top fork (340) while preventing dust generation so that the fork unit (300) according to the present embodiment can be used in a clean environment.

[0068] The fork synchronous drive unit (400) for preventing dust generation may include a first arm shaft (410) axially coupled to a first second fork arm (333), a second arm shaft (420) spaced apart from the first arm shaft (410) and axially coupled to a second second fork arm (334), and a differential gear unit (430) connecting the first arm shaft (410) and the second arm shaft (420).

[0069] Additionally, the dust generation prevention fork synchronous drive unit (400) may further include a first belt connection unit (440) that connects the differential gear unit (430) and the first arm shaft (410) by a belt, and a second belt connection unit (450) that connects the differential gear unit (430) and the second arm shaft (420) by a belt.

[0070] The differential gear unit (430) is composed of a combination of gears. That is, in this embodiment, the differential gear unit (430) may include a main gear (431), a first bevel gear unit (432) that meshes with one side of the main gear (431) and is connected to a first belt connection unit (440), and a second bevel gear unit (433) that meshes with the other side of the main gear (431) and is connected to a second belt connection unit (450).

[0071] A first belt connection part (440) that connects the differential gear unit (430) and the first arm shaft (410) by a belt may include a first drive pulley (441) connected to the first arm shaft (410), a first driven pulley (442) connected to the first bevel gear part (432), and a first timing belt (443) connecting the first drive pulley (441) and the first driven pulley (442). Since the power transmission structure is one in which the first timing belt (443) is applied, dust generation can be minimized.

[0072] The second belt connection part (450), which connects the differential gear unit (430) and the second arm shaft (420) by a belt, may include a second drive pulley (451) connected to the second arm shaft (420), a second driven pulley (452) connected to the second bevel gear part (433), and a second timing belt (453) connecting the second drive pulley (451) and the second driven pulley (452). This is also a power transmission structure in which the second timing belt (453) is applied, so dust generation can be minimized.

[0073] As described above, in the case of the present embodiment, a dust generation prevention fork synchronization drive unit (400) is applied to the fork unit (300) to synchronize the movement between the fork arms (330) and the top fork (340) while preventing dust generation, so dust generation can be eliminated or minimized, and as a result, the fork unit (300) can be used in a cleanroom environment.

[0074] According to the present embodiment, which operates with a structure as described above, dust generation can be eliminated or minimized to make it suitable for a clean environment.

[0075] As such, the present invention is not limited to the described embodiments, and it is obvious to those skilled in the art that various modifications and variations can be made without departing from the spirit and scope of the invention. Accordingly, such modifications or variations should be deemed to fall within the scope of the claims of the present invention. Explanation of the symbols

[0076] 100: Mast Unit 110: Mast Cover Frame 120 : Lifting Module 130 : Anti-vibration Belt 140 : Guide rail 150 : Weight balance weight 200: Stoker main body 210: Lower frame 220 : Upper frame 300 : Fork unit 310 : Carriage 320 : Turntable 330: Fork arm 331: 1st first fork arm 332: 2nd First Fork Arm 333: 1st Second Fork Arm 334: Second fork arm 340: Top fork 350: Up / Down Frame 360: Rotation Section 400: Fork synchronous drive unit for dust generation prevention 410: 1st arm shaft 420: 2nd arm shaft 430: Differential gear unit 431: Main gear 432: 1st bevel gear section 433: 2nd bevel gear section 440: First belt connection 441: First drive pulley 442: 1st driven pulley 443: 1st timing belt 450: Second belt connection 451: Second drive pulley 452: Second driven pulley 453: Second timing belt

Claims

Claim 1 It includes a fork unit coupled to a predetermined stoker body so as to be movable up / down and transferring a cassette to a cassette shelf, wherein the fork unit comprises: a plurality of fork arms; a top fork on which a top key cassette is loaded, coupled to the end of the fork arm, and operated by the action of the fork arms; a dust generation prevention fork synchronization drive unit provided in an area where the fork arms and the top fork are connected, which prevents dust generation and synchronizes the movement between the fork arms and the top fork; a carriage; an up / down frame, one end of which is connected to the carriage and the other end of which is coupled to the stoker body so as to be movable up / down; and a turntable coupled to the carriage so as to be rotatable in forward and reverse directions and connected to the fork arms, wherein the fork arms comprise a pair of first and second first fork arms, each having one end rotatably coupled to the turntable. A stoker device comprising a pair of first and second second fork arms, each having one end connected to the other end of the first and second first fork arms so as to be rotatable relative to each other, and the other end connected to the dust generation prevention fork synchronous drive unit, wherein the dust generation prevention fork synchronous drive unit comprises: a first arm shaft axially coupled to the first second fork arm; a second arm shaft spaced apart from the first arm shaft and axially coupled to the second second fork arm; a differential gear unit connecting the first arm shaft and the second arm shaft; and a first belt connection unit connecting the differential gear unit and the first arm shaft in a belt manner. Claim 2 delete Claim 3 delete Claim 4 delete Claim 5 delete Claim 6 delete Claim 7 A stoker device according to claim 1, wherein the fork synchronous drive unit for preventing dust generation further includes a second belt connection unit that connects the differential gear unit and the second arm shaft in a belt manner. Claim 8 A stoker device according to claim 7, wherein the differential gear unit comprises: a main gear; a first bevel gear portion that meshes with one side of the main gear and is connected to the first belt connection portion; and a second bevel gear portion that meshes with the other side of the main gear and is connected to the second belt connection portion. Claim 9 A stoker device according to claim 8, wherein the first belt connection comprises: a first driving pulley connected to the first arm shaft; a first driven pulley connected to the first bevel gear portion; and a first timing belt connecting the first driving pulley and the first driven pulley. Claim 10 A stoker device according to claim 8, wherein the second belt connection comprises: a second driving pulley connected to the second arm shaft; a second driven pulley connected to the second bevel gear portion; and a second timing belt connecting the second driving pulley and the second driven pulley. Claim 11 A stoker device according to claim 1, wherein the stoker body comprises: a lower frame movably arranged along a rail; a pair of mast units coupled to the lower frame at a distance from each other; and an upper frame connecting the upper ends of the pair of mast units. Claim 12 A stoker device according to claim 11, wherein the mast unit comprises: a mast cover frame having a front exposed portion formed along the height direction in which the central region of the front cover forming the front portion is opened; and a lifting module comprising a lifting block disposed inside the mast cover frame and connected to the fork unit through the front exposed portion, and moving the lifting block along the front exposed portion to move the fork unit up and down. Claim 13 A stoker device according to claim 12, wherein the mast unit further comprises a shielding module that is disposed to penetrate at least a portion of the lifting block to allow movement of the lifting block, is detachably coupled to the inner wall of the front cover, and shields the front exposed portion. Claim 14 A stoker device according to claim 13, characterized in that the shielding module is a dustproof belt that seals the front exposed portion. Claim 15 A stoker device according to claim 14, wherein the above-mentioned vibration-damping belt is provided with a width corresponding to the width of the front exposed portion and includes a vibration-damping portion that absorbs vibrations caused by the operation of the lifting module and blocks the scattering of particles; and a magnetic band portion made of a permanent magnet material that is provided to extend long along the longitudinal direction of the vibration-damping portion on both sides of the vibration-damping portion, is formed integrally with the vibration-damping portion, and is magnetically coupled to the inner wall of the front cover. Claim 16 A stoker device according to claim 15, characterized in that the inner wall of the front cover is provided with a steel play portion that magnetically couples with the magnetic band portion.

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