Carrier transport system, vacuum deposition system, and carrier transport method

Abstract

A carrier transport system (100) for transporting a carrier in a transport direction (T) is described. The carrier transport system comprises at least one first carrier holder (110) configured to hold a first carrier (10) in a vertical orientation (V); and at least one drive unit (112) for transporting the first carrier onto or from the at least one first carrier holder (110) in a transport direction (T), wherein the at least one first carrier holder is movable in a path switch direction (S) across the transport direction (T) and is rotatable between a holding position (I) and a return position (II) around a first rotation axis (A1) extending in the path switch direction (S).

Description

Technology Field

[0001] The embodiments of the present disclosure relate to systems and methods for transporting carriers, particularly for transporting large-area substrates. More specifically, the embodiments of the present disclosure relate to systems and methods for transporting carriers available in vacuum processing systems for, for example, vertical substrate processing, such as material deposition on large-area substrates for display manufacturing. In particular, the embodiments of the present disclosure relate to carrier transport systems, vacuum deposition systems, and carrier transport methods. Background Technology

[0002] Techniques for depositing layers on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and thermal evaporation. Coated substrates can be used in various applications and technical fields. For example, coated substrates can be used in the field of displays. Displays can be used for manufacturing television screens, computer monitors, mobile phones, other hand-held devices, etc., for displaying information. Typically, displays are manufactured by coating a substrate with a stack of layers of different materials.

[0003] To deposit one or more material layers on a substrate, a vacuum deposition system having an arrangement of vacuum processing modules, such as deposition modules, and optionally additional processing modules, such as cleaning modules and / or etching modules, may be used. Multiple substrates may be processed continuously or semi-continuously in a vacuum deposition system, which may be, for example, an inline processing system or a cluster system.

[0004] Typically, a substrate can be transported by a substrate carrier, that is, a transport device for transporting the substrate. A carrier for transporting the substrate is typically transported through a vacuum deposition system, for example, into a vacuum chamber housing a deposition source, in a transport direction (T), along one or more transport paths. At least two transport paths, for example, a first transport path (T1) for transporting the carrier into the vacuum chamber in a forward direction and a second transport path (T2) for transporting the carrier after substrate processing in a return direction opposite to the forward direction, may be provided side by side in the vacuum deposition system. A carrier transport system may be provided to move the carrier between the first transport path (T1) and the second transport path (T2) in a path switch direction (S) across the transport direction (T).

[0005] However, such route switching of carriers between two transport paths can be time-consuming and thus reduce system throughput. Additionally, processing tact may increase due to the fact that the route switching of the first carrier within the vacuum chamber must be completed before a subsequent carrier can be loaded into the vacuum chamber. Furthermore, particle generation resulting from wear on moving parts during route switching can cause degradation of the manufacturing process. Therefore, there is a demand for transporting carriers in a rapid and time-saving manner within a vacuum chamber with reduced particle generation, in a route switching direction across the actual transport direction.

[0006] Therefore, it would be beneficial to provide improved vacuum deposition systems as well as improved systems and methods, particularly for carrier transport in vacuum chambers, which overcome at least some of the above problems.

[0007] In light of the foregoing, carrier transport systems, vacuum deposition systems, and carrier transport methods according to the independent claims are provided. Additional aspects, advantages, and features are apparent from the dependent claims, description, and accompanying drawings.

[0008] According to one aspect of the present disclosure, a carrier transport system is provided. The carrier transport system comprises at least one first carrier holder configured to hold a first carrier in a vertical orientation, and at least one drive unit for transporting the first carrier onto or from the at least one first carrier holder in a transport direction. The at least one first carrier holder is movable in a path switch direction across the transport direction and is turnable between a holding position and a return position about a first rotation axis extending in the path switch direction.

[0009] The path switch direction and the first rotation axis may be essentially perpendicular to the transport direction. At least one first carrier holder may be rotated about the first rotation axis by an angle of essentially 180° between the holding position and the return position.

[0010] In particular, at least one first carrier holder may be set in a holding position for holding the first carrier to move the first carrier in the direction of a path switch, for example, between a first transport path, a processing position, and / or a second transport path. At least one first carrier holder may be set in a return position for moving at least one second carrier holder to hold the second carrier in the direction of a path switch passing through the first carrier holder.

[0011] In some embodiments, the carrier transport system further comprises at least one second carrier holder configured to support a second carrier in an essentially vertical orientation (V) at a position offset from at least one first carrier holder in the direction of the path switch. The at least one first carrier holder may be set in a return position to enable relative movement of the at least one first carrier holder and the at least one second carrier holder holding the second carrier in the direction of the path switch, particularly to move the at least one second carrier holder holding the second carrier past the at least one first carrier holder in the direction of the path switch.

[0012] In some embodiments, at least one first carrier holder is positioned at least partially below the first carrier during transport. For example, the first carrier is supported from below, for example, at least partially on the mechanical support of the first carrier holder. In other embodiments, at least one first carrier holder is positioned at least partially above the first carrier during transport. For example, at least one first carrier holder can magnetically hold the first carrier from above. In yet other embodiments, at least one first carrier holder is positioned at least partially below the first carrier during transport to hold a first portion of the weight force, and an upper first carrier holder is additionally positioned at least partially above the first carrier to hold a second portion of the weight force.

[0013] According to a further aspect of the present disclosure, a carrier transport system is provided. The carrier transport system comprises: at least one first carrier holder configured to hold a first carrier in a vertical orientation—the at least one first carrier holder comprises a magnetic levitation unit for magnetically offsetting at least a portion of the gravitational force of the first carrier—at least one drive unit for transporting the first carrier onto or from the at least one first carrier holder in a transport direction—the at least one first carrier holder is movable in a path switch direction across the transport direction—and at least one second carrier holder configured to hold a second carrier in a vertical orientation at a position offset from the at least one first carrier holder in the path switch direction, wherein the at least one first carrier holder may be set in a return position to enable relative movement of the at least one first carrier holder and the at least one second carrier holder holding the second carrier in the path switch direction passing through each other.

[0014] In some embodiments, the carrier transport systems described herein are configured to transport a carrier in a vacuum chamber, and at least one first carrier holder and (if present) at least one second carrier holder are located inside the vacuum chamber. Alternatively, the carrier transport system described herein may be configured to transport a carrier in an ambient environment, for example, before or after loading the carrier into a vacuum system.

[0015] According to a further aspect of the present disclosure, a vacuum deposition system is provided. The vacuum deposition system comprises a vacuum chamber housing a deposition source and a carrier transport system according to any of the embodiments described herein, wherein at least one first carrier holder of the carrier transport system is movable in the vacuum chamber in a path switch direction between a first transport path, a second transport path, and a processing position toward the deposition source.

[0016] According to a further aspect of the present disclosure, a carrier transport method is provided, in particular in a vacuum chamber. The method comprises: (i) transporting a first carrier onto at least one first carrier holder in an essentially vertical orientation along a first transport path in a transport direction; (ii) moving at least one first carrier holder holding the first carrier in a path switch direction across the transport direction; (iii) in particular, transporting the first carrier from at least one first carrier holder after processing of a substrate carried by the first carrier; and (iv) rotating at least one first carrier holder from a holding position to a return position around a first rotation axis extending in the path switch direction.

[0017] In some embodiments, (i), (ii), (iii), and (iv) are performed in this temporal order, followed by (v) moving at least one first carrier holder and at least one second carrier holder holding a subsequent second carrier in a return position relative to and past each other in the direction of a path switch, and / or (vi) rotating at least one first carrier holder back to a holding position to load a subsequent first carrier onto at least one first carrier holder.

[0018] The embodiments also relate to apparatuses for carrying out the disclosed methods and include parts of the apparatus for carrying out each described aspect of the method. These aspects of the method may be carried out by hardware components, by a computer programmed by appropriate software, by any combination of the two, or in any other way. Furthermore, the embodiments according to the present disclosure also relate to methods for operating the described apparatus. Methods for operating the described apparatus include aspects of the method for carrying out each and every function of the apparatus. The embodiments also relate to methods for manufacturing processed substrates, particularly coated substrates, using the vacuum deposition system described herein and / or the carrier transport system described herein. Brief explanation of the drawing

[0019] In a manner that allows the features of the present disclosure mentioned above to be understood in detail, a more specific description of the present disclosure, briefly summarized above, may be made with reference to embodiments. The attached drawings relate to embodiments of the present disclosure and are described below. FIG. 1 illustrates a schematic cross-sectional view of a carrier transport system according to embodiments described in this specification. FIG. 2 illustrates a schematic cross-sectional view of a carrier transport system according to embodiments described herein, wherein at least one first carrier holder holding a first carrier is arranged next to at least one second carrier holder holding a second carrier. FIG. 3 illustrates a schematic plan view of a carrier transport system according to embodiments described in this specification. FIG. 4 illustrates a perspective view of a carrier transport system according to embodiments described in this specification. FIGS. 5a through 5g are schematic plan views illustrating subsequent stages of a carrier transport method according to embodiments described herein. Specific details for implementing the invention

[0020] Now, reference to various embodiments of the present disclosure will be made in detail, and one or more examples of various embodiments are illustrated in the drawings. In the following description of the drawings, like reference numerals refer to like components. Only differences between individual embodiments are described. Each example is provided by the description of the present disclosure and does not imply limitations to the present disclosure. Additionally, features illustrated or described as part of one embodiment may be used with respect to or in conjunction with other embodiments to yield further embodiments. It is intended that the description includes such modifications and changes.

[0021] A carrier transport system may be configured to transport a carrier in a vacuum environment, particularly in a vacuum chamber, or in a vacuum system comprising a plurality of vacuum chambers arranged side by side, for example, in a linear arrangement. One, two, or more transport paths may be arranged side by side, for example, in a vacuum chamber, where the carrier may be moved or delivered along one or more transport paths in a transport direction (T). A first transport path (T1) may extend adjacent to a second transport path (T2), for example, essentially parallel to the first transport path (T1). The first transport path (T1) and / or the second transport path (T2) may extend side by side in a transport direction (T) which may essentially be a horizontal direction.

[0022] The first transport path (T1) and the second transport path (T2) may be offset from each other in the path switch direction (S). The distance between the first transport path (T1) and the second transport path (T2) in the path switch direction (S) may be 10 cm or more, particularly 20 cm or more, and / or 200 cm or less, particularly 100 cm or less.

[0023] The carrier transport system described herein may be part of a vacuum processing system, in particular a vacuum deposition system configured to deposit material on a substrate carried by a carrier. The vacuum deposition system may be an inline processing system so that substrates can be processed continuously or semi-continuously. The carrier transport system may be configured to transport a carrier from a first position on a first transport path (T1) away from the first transport path (T1) to at least one of a second transport path (T2) and a processing position (P) where the substrate can be processed toward a deposition source. Specifically, the carrier transport system may laterally displace the carrier from a first position on the first transport path (T1) to a second position away from the first transport path in a path switch direction (S). The path switch direction (S) may cross the transport direction (T) and, in particular, be essentially perpendicular to the transport direction (T). When the carrier is moved from one transport path to another transport path in the path switch direction (S), said movement is also referred to herein as a "path switch" or "track switch".

[0024] In some embodiments, the carrier is transported along a first transport path (T1) in the transport direction (T), moved away from the first transport path (T1) in the path switch direction (S) to a processing position (P) where the substrate is processed, moved to a second transport path (T2) in the path switch direction (S), and transported from at least one first carrier holder along the second transport path (T2) in, for example, in a direction opposite to the initial direction.

[0025] The carrier transport system may include levitation magnets for partially or completely levitating the carrier during transport along first and second transport paths. In some embodiments, a first portion of the carrier's weight force may be offset by the magnetic levitation force of the magnetic levitation system, and a second portion of the carrier's weight force may be mechanically supported during transport on a support, for example, on a plurality of support rollers. In other embodiments, the carrier is transported completely non-contact in a floating state by the magnetic levitation system.

[0026] FIG. 1 is a schematic cross-sectional view of a carrier transport system (100) according to embodiments of the present specification. The carrier transport system (100) is configured to transport a first carrier (10) capable of transporting a first substrate (11) in a transport direction (T), for example, in a vacuum chamber (101). The transport direction (T) is perpendicular to the paper plane of FIG. 1. The first carrier (10) (and the first substrate (11) transported by the first carrier (10)) has an essentially vertical orientation (V) during transport by the carrier transport system (100). As used herein, "essentially vertical" may be understood as an orientation that is exactly vertical or an orientation that deviates from exactly vertical orientation by + / - 10° or less. Carrier transport in an essentially vertical orientation and / or substrate processing in an essentially vertical orientation particularly saves space and reduces the footprint and costs of the vacuum deposition system.

[0027] According to the embodiments described herein, a carrier transport system (100) comprises at least one first carrier holder (110) configured to hold a first carrier (10) in an essentially vertical orientation, and at least one drive unit (112) for transporting the first carrier (10) onto or from the at least one first carrier holder in a transport direction (T). The at least one drive unit (112) may include a linear motor configured to drive the first carrier (10) non-contactually in the transport direction (T), in particular, a plurality of linear motors arranged along the transport direction (T) at regular intervals. Alternatively or additionally, the at least one drive unit may include a mechanical drive unit, such as one or more drive rollers driven by rotation by a motor, to move the first carrier in the transport direction (T) on one or more drive rollers. After transporting the first carrier onto the at least one first carrier holder, the first carrier is held by the at least one first carrier holder, for example, supported thereon and / or held below it.

[0028] At least one first carrier holder (110) can be moved in the path switch direction (S) with the first carrier (10) held on top to transport the first carrier (10) away from the first transport path (T1) in the direction of the path switch, for example, to the second transport path (T2) or to the processing position (P). Additionally, at least one first carrier holder (110) can be rotated between the holding position (I) and the return position (II) around a first rotation axis (A1) extending in the path switch direction (S). In particular, at least one first carrier holder (110) can be rotated about 180° around the first rotation axis (A1) to switch between the holding position (I) (illustrated by continuous lines in FIG. 1) and the return position (II) (illustrated by dashed lines in FIG. 1), and / or vice versa.

[0029] At least one first carrier holder (110) in the holding position (I) is configured to hold the first carrier (10) to move the first carrier (10) in the path switch direction (S). At least one first carrier holder (110) can be set to a return position (II) through rotation around a first rotation axis (A1), the return position (II) is intended to enable a space-saving idle position of at least one first carrier holder (110), wherein at least one first carrier holder (110) interferes to a lesser extent with other components arranged inside the vacuum chamber (101) above the level of the first rotation axis (A1).

[0030] FIG. 1 illustrates at least one first carrier holder (110) that is at least partially arranged below the first carrier during transport to support the first carrier from below. However, embodiments are not limited to such arrangement. Alternatively or additionally, even if not illustrated in the drawings, at least one first carrier holder (and similarly, at least one second carrier holder described below) may be at least partially arranged above the first carrier during transport. For example, at least one first carrier support may include at least one levitation magnet, such as at least one active levitation magnet and / or at least one passive levitation magnet, which is at least partially arranged above the first carrier. Here, rotation of at least one first carrier holder around a first rotation axis (A1) may bring at least one first carrier holder to a return position in which at least one first carrier holder further protrudes upward.

[0031] As schematically depicted in FIG. 1, at least one first carrier holder (110) may be arranged at least partially below the first carrier. Here, at least one first carrier holder (110) may extend higher above the first rotation axis (A1) in the carrier support position (I) than in the return position (II). For example, at least one first carrier holder (110) may have a carrier support member, such as at least one support roller (116) and / or a magnetic levitation unit (114), that protrudes above the first rotation axis (A1) in the holding position (I) to support the first carrier. By rotating at least one first carrier holder (110) to the return position (II), the carrier support member may protrude downward at least partially or entirely below the first rotation axis (A1), thereby providing space within the vacuum chamber (101) above the first rotation axis (A1) for other components. In particular, by rotating at least one first carrier holder (110) to a return position (II), at least one second carrier holder (120) (shown in FIG. 2) holding the second carrier can be moved in the path switch direction (S) relative to and past the at least one first carrier holder (110).

[0032] In some embodiments that may be combined with other embodiments described herein, at least one first carrier holder (110) may include a magnetic levitation unit (114), in particular a levitation magnet, for magnetically offsetting at least a portion of the weight force of the first carrier (10) when supported on top. Specifically, at least 10%, particularly at least 30%, or even at least 50% of the weight of the first carrier may be magnetically held by one or more magnetic levitation units when the carrier is supported on at least one first carrier holder (110). In some embodiments, the first carrier (10) may be fully levitized, that is, held in a floating state without contact with the at least one first carrier holder (110) by one or more magnetic levitation units.

[0033] In some embodiments, as schematically depicted in FIG. 1, a first portion of the weight of the first carrier (10) arranged on at least one first carrier holder (110) (e.g., 20% to 60%, particularly 30% to 50%) is magnetically held by a magnetic levitation unit (114), and a second portion of the weight of the first carrier (10) (e.g., 20% to 60%, particularly 30% to 50%) is supported on a mechanical support, such as on at least one support roller (116). In some embodiments, a third portion of the weight of the first carrier (e.g., 10% to 40%, particularly 20% to 30%) is magnetically held by an upper first carrier holder (not shown in the drawings) arranged at least partially on the first carrier. In some embodiments, the upper first carrier holder may also be moved synchronously with, for example, the first carrier holder (110) in the path switch direction (S), and optionally rotated around a rotation axis extending in the path switch direction (S).

[0034] The (partial or complete) magnetic support of the first carrier (10) on at least one first carrier holder (110) reduces friction of the first carrier (10) during transport and during path switching, thereby reducing or avoiding the generation of small particles that could negatively affect substrate processing in a vacuum chamber. The quality of substrate processing, particularly the quality of layer deposition, can be improved.

[0035] In some embodiments that may be combined with other embodiments described herein, the magnetic levitation unit (114) is a passive magnet, in particular a permanent magnet. The passive magnet can pull the first carrier upward by applying an upward magnetic attraction, for example, on a ferromagnetic material (e.g., steel) of the first carrier (10) or on a countermagnet (15).

[0036] In some embodiments, particularly when at least one first carrier holder is arranged at least partially over the first carrier, an active levitation magnet may be provided alternatively or additionally to the passive magnet in at least one first carrier holder (110). The active levitation magnet is a levitation magnet such as a coil, and its strength is actively controlled to maintain a predetermined gap distance between at least one first carrier holder and the first carrier. The passive levitation magnet is a levitation magnet whose strength is not actively controlled, as schematically depicted in FIG. 1.

[0037] In some embodiments that may be combined with other embodiments described herein, at least one first carrier holder includes a mechanical support for supporting at least a portion of the carrier weight on top, such as at least one support roller (116) for mechanically supporting the first carrier (10) on top. As mentioned above, a portion of the weight of the first carrier (10) may be magnetically held by a magnetic levitation unit (114) of at least one first carrier holder (110), and a second portion of the weight of the first carrier (10) may be mechanically supported on at least one support roller (116) of at least one first carrier holder. The mechanical support may further stabilize the first carrier in the path switch direction (S). At least one support roller (116) may be rotatable about a rotation axis extending in the path switch direction (S). Complete non-contact levitation of the carrier by magnetic forces is difficult, and typically, active control of the magnetic levitation unit(s) is used to maintain a stable position of the levitized carrier, which is more complex. On the other hand, by magnetically holding only a portion of the carrier weight and mechanically supporting the remainder of the carrier weight, the carrier is held in a stable position through mechanical support, while simultaneously reducing problems associated with frictional forces through partial magnetic levitation. Thus, the carrier transport system illustrated in FIG. 1 allows for reliable path switching of the carrier in the path switching direction (S) between two or more transport paths, while reducing the generation of small particles that would negatively affect substrate processing without unnecessary complexity.

[0038] In some embodiments that may be combined with other embodiments described herein, at least one drive unit (112) comprises a linear motor configured to drive the first carrier (10) non-contactually in the transport direction (T), particularly on or from at least one first carrier holder (110). In particular, a plurality of linear motors may be arranged along the transport direction (T) to transport the carrier into the vacuum chamber (101) and on at least one first carrier holder (110). In some embodiments, at least one drive unit is part of at least one first carrier holder (110) and is moved together with at least one first carrier holder (110) in the path switch direction (S) during the path switch (e.g., at least one drive unit (112) shown in FIG. 1). Such a drive unit may be used to move the first carrier on at least one first carrier holder along the first transport path (T1) as well as to move the first carrier from at least one first carrier holder along the second transport path (T2). In some embodiments, at least one driving unit is fixedly arranged in a vacuum chamber (101) to drive the first carrier (10) along a first transport path (T1) on at least one first carrier holder (110). At least one additional driving unit may be fixedly arranged in a vacuum chamber (101) to drive the first carrier (10) along a second transport path (T2) from at least one first carrier holder (110), for example, after substrate processing.

[0039] As schematically depicted in FIG. 1, at least one first carrier holder (110) holding a first carrier (10) may be movable in a path switch direction (S) between a first transport path (T1) for loading the first carrier (10) onto at least one first carrier holder (110), a second transport path (T2) for unloading the first carrier from at least one first carrier holder (110), and / or a processing position (P) for processing a first substrate (11) carried by the first carrier (10). In particular, when at least one first carrier holder (110) is positioned at the processing position (P), the first carrier (10) may be directed toward a deposition source (105) configured to deposit material on the first substrate (11) carried by the first carrier (10).

[0040] In some embodiments that may be combined with other embodiments described herein, the carrier transport system (100) includes a first movable arm (119) extending through the side wall of the vacuum chamber (101). At least one first carrier holder (110) may be connected to the first movable arm (119) inside the vacuum chamber, for example, fixedly connected. The first movable arm (119) may be movable in the path switch direction (S) via a motor arranged outside the vacuum chamber to transport at least one first carrier holder (110) in the path switch direction (S). Alternatively or additionally, the first movable arm (119) may be rotatable about a first rotation axis (A1) via a rotary motor arranged outside the vacuum chamber, so that at least one first carrier holder (110) may be rotatable inside the vacuum chamber (101) between a holding position (I) and a return position (II). Optionally, the first movable arm (119) may be connected to the side wall of the vacuum chamber (101) via a flexible bellow (not depicted) that allows movement of the first movable arm (119) toward the vacuum chamber (101) (extending toward / retracting from the vacuum chamber (101)) while maintaining a vacuum-tight connection between the first movable arm (119) and the vacuum chamber (101).

[0041] According to some embodiments described herein, at least one first carrier holder (110), which is movable in the path switch direction (S) as well as rotatable about a first rotation axis (A1), allows for rapid and reliable path switching of the first carrier between two or more transport paths and / or processing positions (P). After transporting the first carrier (10) in the path switch direction (S), processing the first substrate (11), and unloading the first carrier (10) from at least one first carrier holder, the at least one first carrier holder may be switched from a holding position (I) to a return position (II). The return position (II) may create space to return at least one first carrier holder to an initial position for path switching of the second carrier held by at least one second carrier holder (without interfering with the second carrier holder) and / or for loading a subsequent first carrier. The tact time of the system may be reduced, and the processing quality may be improved.

[0042] FIG. 2 is a schematic cross-sectional view of a carrier transport system (200) according to embodiments described in this specification. The carrier transport system (200) may include some or all features of the carrier transport system (100) described above, so that reference to the above descriptions may be made, which are not repeated herein. In particular, the carrier transport system (200) includes at least one first carrier holder (110) that is movable in the path switch direction (S) while holding the first carrier (10) as described above, and is rotatable about a first rotation axis (A1) to set at least one first carrier holder (110) into a return position (II).

[0043] In addition to at least one first carrier holder (110), the carrier transport system (200) includes at least one second carrier holder (120) configured to hold a second carrier (20) in an essentially vertical orientation (V) at a position offset from at least one first carrier holder (110) in the path switch direction (S). In particular, at least one second carrier holder (120) can hold the second carrier (20) on a second transport path (T2), whereas at least one first carrier holder (110) holds the first carrier (10) on a first transport path (T1).

[0044] At least one second carrier holder (120) can be positioned adjacent to at least one first carrier holder (110) at essentially the same vertical level so that the first carrier (10) can be supported parallel to and at the same height as the second carrier (20), for example, the first carrier (10) and the second carrier (20) are arranged side by side in the path switch direction (S), particularly at a distance of 100 cm or less from each other, for example, 50 cm or less.

[0045] In some embodiments, at least one second carrier holder (120) may be arranged in a transport direction (T) offset from at least one first carrier holder (110) by a distance, for example, greater than 10 cm and less than 100 cm (as depicted in FIG. 3 and 4). Despite the (slight) offset (which allows at least one first carrier holder (110) and at least one second carrier holder (120) to move past each other in the path switch direction), at least one first carrier holder (110) and at least one second carrier holder (120) may be configured to hold individual carriers in the same position in the transport direction (T). Additionally, at least one first carrier holder (110) and at least one second carrier holder (120) may be configured to transport individual carriers in the path switch direction to the same processing position (P) toward the processing device, for example, in front of a deposition source (105) in a vacuum chamber (101).

[0046] During the transport of the first carrier (10) on at least one first carrier holder (110) along the first transport path (T1), the second carrier (20) (carrying the second substrate (21) that has undergone processing) may be transported from at least one second carrier holder (120) along the second transport path (T2). The takt time of the system may be reduced when the carrier transport system (200) can hold two carriers side by side in the path switch direction (S) in the vacuum chamber simultaneously. Specifically, while the preceding carrier to be transported far along the second transport path (T2) may still be arranged between the first carrier (10) and the deposition source (105), the subsequent carrier may already be prepared on the first transport path (T1) to be moved toward the deposition source (105) for processing. Additionally, the sluice opening (109) between the vacuum chamber (101) and the second vacuum chamber (102) may be opened only once for both loading the first carrier (10) into the vacuum chamber (101) and unloading the second carrier (20) from the vacuum chamber (101) (see FIG. 5a), which can improve vacuum quality and reduce the takt time of the system.

[0047] In some embodiments that may be combined with other embodiments described herein, at least one second carrier holder (120) may be configured identically to at least one first carrier holder (110). In particular, at least one second carrier holder (120) may be movable in the path switch direction (S) while holding the second carrier (20) particularly between the first transport path (T1), the second transport path (T2), and / or the processing position (P). At least one second carrier holder (120) may also be rotatable about 180° between the holding position and the return position around a second rotation axis (A2) extending in the path switch direction (S). In some embodiments, at least one first carrier holder (110) is connected to a first movable arm (119) extending out of the vacuum chamber (101), and at least one second carrier holder (120) is connected to a second movable arm (160) extending out of the vacuum chamber (101). Motors may be provided outside the vacuum chamber (101) to move individual carrier holders through individual movable arms.

[0048] Accordingly, at least one second carrier holder (120) may be set in a holding position to hold the second carrier in order to move the second carrier in the path switch direction (S) in a manner similar to at least one first carrier holder (110). Additionally, at least one second carrier holder (120) may be set in a return position to move at least one first carrier holder (110) holding the first carrier (10) in the path switch direction (S) with respect to at least one second carrier holder (120) provided in the return position. Specifically, at least one second carrier holder (120) may be set in a return position to enable relative movement of at least one second carrier holder (120) and at least one first carrier holder (110), even if the carrier is held by one of at least one first carrier holder (110) and at least one second carrier holder (120).

[0049] In some embodiments that may be combined with other embodiments described herein, at least one first carrier holder (110) holding the first carrier (10) is movable in the path switch direction (S) with respect to and past at least one second carrier holder (120) provided in the return position, and / or at least one second carrier holder (120) holding the second carrier (20) is movable in the path switch direction (S) with respect to at least one first carrier holder (110) provided in the return position. Thus, one of the first and second carrier holders may already be prepared and positioned for loading a subsequent carrier, while the other of the first and second carrier holders may still hold the preceding carrier. The takt time of the system may be improved.

[0050] According to one aspect described in the present specification, a carrier transport system comprises at least one first carrier holder (110) configured to hold a first carrier (10) in a vertical orientation (V), wherein the at least one first carrier holder (110) comprises a magnetic levitation unit (114) for magnetically offsetting at least one portion of the weight force of the first carrier (10), and at least one driving unit (112) for transporting the first carrier on or from the at least one first carrier holder (110) in a transport direction (T), and the at least one first carrier holder holding the first carrier (10) is movable in a path switch direction (S) across the transport direction (T). Additionally, the carrier transport system comprises at least one second carrier holder (120) configured to hold a second carrier (20) in an essentially vertical orientation (V) at a position offset from at least one first carrier holder in the path switch direction (S), wherein at least one first carrier holder (110) may be set in a return position to enable relative movement of at least one first carrier holder (110) and at least one second carrier holder (120) holding the second carrier in the path switch direction (S) over each other. Optionally, at least one second carrier holder (120) may also be set in a return position to enable relative movement of at least one second carrier holder (120) and at least one first carrier holder (110) holding the first carrier in the path switch direction (S) over each other. Specifically, one of at least one first carrier holder (110) and at least one second carrier holder (120) holding individual carriers, and the other of at least one first carrier holder (110) and at least one second carrier holder (120) provided in individual return positions, can be moved relative to and past each other in the path switch direction (S).

[0051] The carrier transport system allows for rapid and reliable path switching of carriers between two or more transport paths in the path switching direction (S), while reducing the generation of small particles due to a magnetic levitation unit that reduces or eliminates friction. Both the takt time and processing quality of the system can be improved.

[0052] FIG. 3 is a schematic plan view of a carrier transport system (300) that is part of a vacuum deposition system (1000) according to embodiments described herein. FIG. 4 shows a perspective view of the carrier transport system (300). The carrier transport system (300) may include some or all of the features of the carrier transport systems described above, so that reference to the above embodiments is made that is not repeated herein.

[0053] Specifically, the carrier transport system (300) may include at least one first carrier holder (110) and at least one second carrier holder (120), each of the first and second carrier holders configured to hold an individual carrier. Each of the at least one first carrier holder (110) and at least one second carrier holder (120) is movable in the path switch direction (S) while holding an individual carrier, particularly between a first transport path (T1), a second transport path, and / or a processing position (P). Additionally, at least one first carrier holder (110) is rotatable about a first rotation axis (A1) extending in the path switch direction (S), and at least one second carrier holder (120) is rotatable about a second rotation axis (A2) extending in the path switch direction (S). Each carrier holder is rotatable between an individual holding position for holding a carrier and an individual return position for moving in the path switch direction relative to an adjacent carrier holder.

[0054] In some embodiments that may be combined with other embodiments described herein, at least one first carrier holder (110) comprises a magnetic levitation unit (114) and / or at least one second carrier holder (120) comprises a magnetic levitation unit (114) (see FIG. 4), so that at least a portion of the weight of each individual carrier may be magnetically held. In some embodiments that may be combined with other embodiments described herein, for each individual carrier holder, particularly to drive each carrier on and from the individual carrier holder in a transport direction (T), at least one first carrier holder (110) comprises at least one drive unit (112), particularly a linear motor, and / or at least one second carrier holder (120) comprises at least one drive unit (112), particularly a linear motor.

[0055] As schematically depicted in FIG. 3 and FIG. 4, the carrier transport system (300) may include two, three, or more first carrier holders (110, 118) arranged side by side in the transport direction (T) to hold the first carrier in a vertical orientation (V), particularly to hold different sections of the first carrier (10), such as the front section, middle section, and rear section of the first carrier. Each of the two, three, or more first carrier holders (110, 118) may be movable in the path switch direction (S) to transport the first carrier in the path switch direction (S), particularly between the first transport path (T1), the second transport path (T2), and / or the processing position (P). A single motor may be provided to move the two, three, or more first carrier holders (110, 118) simultaneously in the path switch direction. Alternatively, each of the two, three, or more first carrier holders (110, 118) may be movable in the path switch direction (S) via an individual separate motor, and the motors are optionally arranged outside the vacuum chamber (101).

[0056] In some embodiments, each of the two, three, or more first carrier holders (110, 118) may be rotatable, in particular, by about 180° around a specific rotation axis extending in the direction of the path switch between a specific holding position and a specific return position. For example, each of the two, three, or more first carrier holders (110, 118) may be connected to a specific movable arm extending outside the vacuum chamber (101), and one or more rotary motors for rotating the two, three, or more first carrier holders (110, 118) through the specific rotatable arm may be provided outside the vacuum chamber.

[0057] In some embodiments, the carrier transport system (300) may also include two, three, or more second carrier holders (120, 128) arranged side by side in the transport direction (T) to hold the second carrier (20) (depicted by dashed lines in FIG. 3) in an essentially vertical orientation (V), particularly to hold different sections of the second carrier, such as the front section, middle section, and rear section of the second carrier (20). Each of the two, three, or more second carrier holders (120, 128) may be movable in the path switch direction (S) in particular between the first transport path (T1), the second transport path (T2), and / or the processing position (P) to transport the second carrier in the path switch direction (S). Additionally, each of the two, three, or more second carrier holders (120, 128) may be rotatable about 180°, in particular, around an individual rotation axis extending in the path switch direction (S) between an individual holding position and an individual return position.

[0058] Optionally, each of two, three, or more first carrier holders (110, 118) may include a magnetic levitation unit (114) configured to magnetically hold individual portions of the first carrier weight, and / or each of two, three, or more second carrier holders (120, 128) may include a magnetic levitation unit (114) configured to magnetically hold individual portions of the second carrier weight. Alternatively or additionally, each of two, three, or more than one first carrier holders (110, 118) may include at least one drive unit (112), in particular a linear motor, for driving the first carrier in a non-contact direction (T) for the two, three, or more than one first carrier holders (110, 118), and / or each of two, three, or more than one second carrier holders (120, 128) may include at least one drive unit (112), in particular a linear motor, for transporting the second carrier in a direction (T) for the two, three, or more than one second carrier holders (120, 128).

[0059] Two, three, or more first carrier holders (110, 118) and two, three, or more second carrier holders (120, 128) may be arranged offset from one another in the transport direction (T), particularly in an alternative arrangement, as schematically depicted in FIG. 3 and FIG. 4. Two, three, or more first carrier holders (110, 118) may partially overlap in the transport direction with individual adjacent second carrier holders among two, three, or more second carrier holders (120, 128). Notwithstanding the above overlap, two, three, or more first carrier holders (110, 118) and two, three, or more second carrier holders (120, 128) may be moved relative to and past each other in the path switch direction (S) when two, three, or more first carrier holders (110, 118) are provided in a holding position and two, three, or more second carrier holders (120, 128) are provided in a return position (or vice versa).

[0060] It may be advantageous to provide two, three, or more first carrier holders (110, 118) arranged side by side in the transport direction (T) in the vacuum chamber (101) to hold the first carrier (10) together, because subsequently, one carrier holder may have a shorter dimension in the transport direction (T), which facilitates rotation of each first carrier holder around an individual rotation axis. Additionally, the first carrier (10) is held more stably during path switching and / or processing when supported on different sections. If two, three, or more second carrier holders (120, 128) are present to hold the second carrier (20) simultaneously, corresponding advantages are provided.

[0061] A carrier transport system (300) according to any of the embodiments described herein may be used in a vacuum processing system, particularly in a vacuum deposition system (1000) comprising a vacuum chamber (101) housing a deposition source (105) for depositing material on a substrate transported by a carrier. At least one first carrier holder (110) is movable in the vacuum chamber (101) between a first transport path (T1), a second transport path (T2), and a processing position (P) facing the deposition source (105). The first transport path (T1) may extend from the vacuum chamber (101) in a transport direction (T) and through at least one second vacuum chamber arranged next to the vacuum chamber (101). The second transport path (T2) may extend from the vacuum chamber (101) parallel to the first transport path (T1) and in a transport direction (T) next to it and through at least one second vacuum chamber. Carriers carrying substrates to be processed can be transported along a first transport path (T1) into a vacuum chamber (101) on at least one first carrier holder (110). At least one first carrier holder (110) can transport the carrier to a processing position for processing and to a path switch direction (S) on a second transport path (T2) for unloading. A carrier carrying a processed substrate can be transported from at least one first carrier holder (110) out of the vacuum chamber (101) along a second transport path (T2).

[0062] In some embodiments, at least one second carrier holder (120) as described herein may additionally be provided in a vacuum chamber (101) next to at least one first carrier holder (110), and at least one second carrier holder (120) may be configured according to at least one first carrier holder (110). Processing takt may be improved, and substrate processing within a vacuum deposition system may be accelerated.

[0063] FIGS. 5a through 5g are schematic plan views illustrating subsequent stages (i) through (vi) of a carrier transport method, for example, in a vacuum chamber, according to embodiments described herein. The method may be performed by any of the carrier transport systems described herein, particularly in a vacuum deposition system described herein. A vacuum deposition system may include a vacuum chamber (101) where substrate processing occurs and a second vacuum chamber (102) arranged adjacent to the vacuum chamber (101). The vacuum chamber (101) may also be referred to as a "vacuum processing chamber" or a "process station." A first transport path (T1) and a second transport path (T2) may extend side by side from the second vacuum chamber (102) at the process station. One or more additional vacuum chambers may be provided next to the second vacuum chamber (102) in a linear arrangement, for example, as depicted in FIGS. 5a through 5g. A vacuum deposition system can be, for example, an inline system for display manufacturing, particularly an inline deposition system.

[0064] As depicted in FIGS. 5a and 5b, the method comprises the step of (i) transporting a first carrier (10) in an essentially vertical orientation along a first transport path (T1) in a transport direction (T) onto at least one first carrier holder (110) arranged in a vacuum chamber (101), particularly onto two, three or more first carrier holders configured to hold the first carrier (10) together. The first carrier (10) may be transported from a second vacuum chamber (102) into the vacuum chamber (101) through a water gate opening (109), and the vacuum chamber (101) may house a processing device, particularly a deposition source (105).

[0065] As depicted in FIGS. 5b and 5c, the method comprises the step of (ii) moving at least one first carrier holder (110) holding the first carrier (10) in a path switch direction (S) that is perpendicular to the transport direction (T), across the transport direction (T). For example, as depicted in FIG. 5c, the at least one first carrier holder (110) may be moved to a processing position (P) facing a deposition source (105) to process the first substrate carried by the first carrier (10). In particular, the method may include coating the first substrate carried by the first carrier (10) using a material within a vacuum chamber (101). After processing, at least one first carrier holder (110) may optionally be moved from the processing position (P) onto the second transport path (T2) to position the first carrier (10) for movement along the second transport path (T2), as depicted in FIG. 5d.

[0066] As depicted in FIGS. 5d and 5e, the method comprises (iii) the step of transporting a first carrier (10) from at least one first carrier holder (110), particularly along a second transport path (T2). The first carrier (10) can be transported out of the vacuum chamber (101) and back into the second vacuum chamber (102) through a water gate opening (109).

[0067] As depicted in FIG. 5e, the method comprises (iv) the step of rotating at least one first carrier holder (110) from a holding position to a return position, particularly by about 180°, around a first rotation axis (A1). In particular, two, three, or more first carrier holders that previously held the first carrier (10) may be rotated to individual return positions around individual rotation axes extending in the path switch direction (S). This allows at least one second carrier holder (120) holding a subsequent second carrier (30), as depicted in FIG. 5e and FIG. 5f, to move relative to and past the at least one first carrier holder (110), because the first carrier holders extend less far above the vertical level of the rotation axes when provided in individual return positions compared to individual holding positions.

[0068] Specifically, as depicted in FIG. 5e and FIG. 5f, the method may include the step of (v) moving at least one first carrier holder (110) and at least one second carrier holder (120) holding a subsequent second carrier (30) provided in a return position relative to and past each other in the path switch direction (S). At least one second carrier holder (120) may be moved to a processing position for processing as depicted in FIG. 5f. As used herein, "relative" movement may be any of the movement of the second carrier holder past a fixed first carrier holder, the movement of the first carrier holder past a fixed second carrier holder, or the movement of both the first carrier holder and the second carrier holder passing each other simultaneously.

[0069] As depicted in FIG. 5g, the method may further include the step (vi) of rotating at least one first carrier holder (110) back to a holding position for loading a subsequent first carrier (40) onto at least one first carrier holder (110). In particular, each of two, three, or more first carrier holders may essentially be rotated to individual holding positions simultaneously.

[0070] Subsequently, the method may be restarted from the beginning having stage (i) depicted in FIG. 5a, where the subsequent first carrier (40) and subsequent second carrier (30) each replace the first carrier (10) and the second carrier (20), respectively, followed by individual stages (ii) through (vi). Thus, an “infinite rotation path switch” is provided according to the methods and systems described herein, enabling rapid carrier exchange between the vacuum chamber (101) and the second vacuum chamber (102) and overall faster substrate processing. Specifically, the two carriers may be held simultaneously by individual carrier holders in the vacuum chamber, where the first carrier holder may already be positioned for loading the subsequent carrier, while the second carrier holder still holds the preceding carrier in an offset position in the direction of the path switch. In particular, at least one first carrier holder (110) and at least one second carrier holder (120) can be moved relative to and past each other in the path switch direction (S), even if a carrier is held on one of the at least one first carrier holder and at least one second carrier holder. While a carrier can be loaded onto one of the at least one first carrier holder and at least one second carrier holder, a subsequent carrier can be simultaneously unloaded from the other of the at least one first carrier holder and at least one second carrier holder, allowing for faster carrier transport and a shorter tact rate of the system.

[0071] As depicted in FIGS. 5a and 5b, a second carrier (20) carrying a processed substrate may be moved from at least one second carrier holder (120) provided on a second transport path (T2) during the movement of the first carrier (10) into at least one first carrier holder (110) at stage (i). The second carrier (20) may be moved from at least one second carrier holder (120) into the second vacuum chamber (102) out of the vacuum chamber (101) through a water gate opening (109), whereas the first carrier (10) may be moved from the second vacuum chamber (102) into at least one first carrier holder (110) inside the vacuum chamber (101) at stage (i). Accordingly, the sluice gate opening (109) can be opened once to transport a first carrier into the vacuum chamber (101) along the first transport path (T1) and to transport a second carrier out of the vacuum chamber (101) along the second transport path (T2).

[0072] In some embodiments that may be combined with other embodiments described in this specification, at least one first carrier holder (110) holding the first carrier (10) is moved in the path switch direction (S) past at least one second carrier holder (120) provided in the return position, as schematically depicted in FIG. 5b and FIG. 5c, during stage (ii).

[0073] The method may further include the step of magnetically offsetting at least a portion of the gravitational force of the first carrier (10) when the first carrier (10) is held by at least one first carrier holder, particularly by using a magnetic levitation unit of at least one first carrier holder (110), and optionally by using another magnetic levitation unit of an upper first carrier holder arranged at least partially over the first carrier. In particular, at least 30% or at least 50% of the gravitational force of the first carrier (10) may be magnetically held during the transfer of the first carrier in the path switch direction (S) and / or during coating by a deposition source (105) of the first substrate carried by the first carrier. In some embodiments, the gravitational force may be "overcompensated" by the levitation magnets, and the mechanical support may push the first carrier downward (slightly). Thus, the deposition quality may be improved.

[0074] Alternatively or additionally, when the second carrier is held by at least one second carrier holder (120), at least a portion of the gravitational force of the second carrier (20) can be magnetically offset by using a magnetic levitation unit of at least one second carrier holder (120), and optionally by using another magnetic levitation unit of an upper second carrier holder that is at least partially arranged over the second carrier. In particular, at least 30% or 50% of the gravitational force of the second carrier (20) can be magnetically held during transport of the second carrier in the path switch direction (S) and / or during coating by the deposition source (105) of the second substrate carried by the second carrier. Thus, the deposition quality can be improved.

[0075] The remaining portion of the carrier's weight may be supported on mechanical supports, for example, on individual support rollers. For example, each of two, three, or more first carrier holders and / or each of two, three, or more second carrier holders may include at least one support roller for supporting at least a portion of the individual carrier's weight on top.

[0076] The embodiments described herein may be used to transport carriers carrying at least one of large-area substrates, glass substrates, wafers, semiconductor substrates, masks, shields, and other objects. The embodiments may also be used for semiconductor manufacturing and processing, such as wafer transport, wafer processing, and / or wafer coating. The carriers may carry a single object, e.g., 1 m 2 Above, especially 5 m 2 or 10 m 2 A carrier can transport a large-area substrate having a size greater than or equal to the size, or a plurality of objects having a smaller size, such as a plurality of semiconductor wafers. The carrier may include a holding device configured to hold one or more substrates on a carrier, such as a magnetic chuck, an electrostatic chuck, and / or a mechanical holder, such as a clamp or a mechanical support.

[0077] The transported carriers are 1 m 2 Above, especially 5 m 2 They may be carriers for transporting large-area substrates having a surface area greater than or equal to the surface area. Accordingly, each of the carriers is 1 m from the top. 2 Above, especially 5 m 2The above substrate may have a surface area for transporting. During transport along the transport direction (T), the carrier may have dimensions of 1 m or more, for example 2 m or more, in the transport direction. Accordingly, to support individual large-area carriers on top, it is advantageous to provide at least three first carrier holders and at least three second carrier holders, particularly in an alternative arrangement. Each of the carrier holders may not only be movable in the direction of the path switch, but may also be rotatable about an individual rotation axis extending in the direction of the path switch.

[0078] The vacuum deposition systems described in this specification may be configured for vertical substrate processing, and the carrier transport systems described in this specification may be configured for carrier transport in a vertical direction.

[0079] Although the foregoing relates to embodiments, other and additional embodiments may be devised without departing from the basic scope, the scope of which is determined by the subsequent claims.

Claims

Claim 1 A carrier transport system (100) comprising: at least one first carrier holder (110) configured to hold a first carrier (10) in a vertical orientation (V); and at least one drive unit (112) for transporting the first carrier (10) onto or from the at least one first carrier holder (110) in a transport direction (T), wherein the at least one first carrier holder (110) is movable in a path switch direction (S) across the transport direction (T) and is turnable between a holding position (I) and a return position (II) around a horizontally positioned first rotation axis (A1), wherein the first rotation axis (A1) extends in the path switch direction (S) and is perpendicular to the transport direction (T). Claim 2 A carrier transport system according to claim 1, wherein at least one first carrier holder (110) includes a magnetic levitation unit (114) for magnetically offsetting at least a portion of the weight force of the first carrier (10). Claim 3 In paragraph 2, the above magnetic levitation unit is a passive magnet, a carrier transport system. Claim 4 A carrier transport system according to any one of claims 1 to 3, wherein the at least one first carrier holder includes at least one support roller (116) for mechanically supporting the first carrier (10). Claim 5 A carrier transport system according to any one of claims 1 to 3, further comprising at least one second carrier holder (120) configured to hold a second carrier (20) in an essentially vertical orientation (V) at a position offset from the at least one first carrier holder (110) in the path switch direction (S), wherein the at least one second carrier holder (120) is movable in the path switch direction (S) and rotatable to a return position (II) around a second rotation axis (A2) extending in the path switch direction (S). Claim 6 A carrier transport system according to claim 5, wherein the at least one first carrier holder (110) holding the first carrier (10) is movable in the path switch direction (S) with respect to and past the at least one second carrier holder (120) provided in the return position, and the at least one second carrier holder (120) holding the second carrier (20) is movable in the path switch direction (S) with respect to and past the at least one first carrier holder (110) provided in the return position. Claim 7 A carrier transport system according to any one of claims 1 to 3, wherein the at least one first carrier holder (110) in the holding position (I) extends higher above the first rotation axis (A1) than in the return position (II). Claim 8 A carrier transport system according to any one of claims 1 to 3, wherein the at least one drive unit (112) comprises a linear motor configured to drive the first carrier (10) in a transport direction (T) non-contactually. Claim 9 A carrier transport system according to any one of claims 1 to 3, wherein the at least one first carrier holder (110) is movable in the direction of the path switch (S) between a first transport path (T1) for loading the first carrier (10) onto the at least one first carrier holder, a second transport path (T2) for unloading the first carrier from the at least one first carrier holder (110), or a processing position (P) for processing a first substrate (11) transported by the first carrier (10). Claim 10 A carrier transport system according to any one of claims 1 to 3, further comprising a first movable arm (119) extending through the side wall of a vacuum chamber (101) and connected to at least one first carrier holder (110), wherein the first movable arm (119) is movable in the direction of the path switch (S) and rotatable about a first rotation axis (A1) through individual motors arranged outside the vacuum chamber (101). Claim 11 A carrier transport system according to any one of claims 1 to 3, comprising two, three, or more first carrier holders (110, 118) arranged side by side in a transport direction (T) to hold different sections of the first carrier (10), wherein each of the two, three, or more first carrier holders (110, 118) is movable in the path switch direction (S) and rotatable about an individual rotation axis extending in the path switch direction (S). Claim 12 A carrier transport system (100), comprising: at least one first carrier holder (110) configured to hold a first carrier (10) in a vertical orientation—the at least one first carrier holder (110) comprises a magnetic levitation unit (114) for magnetically counteracting at least a portion of the gravitational force of the first carrier (10); at least one drive unit (112) for transporting the first carrier onto or from the at least one first carrier holder (110) in a transport direction (T)—the at least one first carrier holder is movable in a path switch direction (S) across the transport direction (T); A carrier transport system comprising at least one second carrier holder (120) configured to hold a second carrier (20) in an essentially vertical orientation at a position offset from the at least one first carrier holder in the path switch direction (S), wherein by rotating the at least one first carrier holder (110) around a horizontally positioned first rotation axis (A1), the at least one first carrier holder (110) may be set in a return position (II) so that the at least one first carrier holder (110) and the at least one second carrier holder (120) holding the second carrier (20) can move relative to each other in the path switch direction (S), wherein the first rotation axis (A1) extends in the path switch direction (S) and is perpendicular to the transport direction (T). Claim 13 A vacuum deposition system (1000) comprising: a vacuum chamber (101) housing a deposition source (105); and a carrier transport system (100) according to any one of claims 1 to 3, wherein at least one first carrier holder (110) is movable in the vacuum chamber (101) in the direction of the path switch (S) between a first transport path (T1), a second transport path (T2), and a processing position (P) facing the deposition source (105). Claim 14 A carrier transport method comprising: (i) transporting a first carrier (10) onto at least one first carrier holder (110) in an essentially vertical orientation along a first transport path (T1) in a transport direction (T); (ii) moving the at least one first carrier holder (110) holding the first carrier (10) in a path switch direction (S) across the transport direction (T); (iii) transporting the first carrier (10) from the at least one first carrier holder (110); and (iv) rotating the at least one first carrier holder (110) from a holding position (I) to a return position (II) around a horizontally positioned first rotation axis (A1), wherein the first rotation axis (A1) extends in the path switch direction (S) and is perpendicular to the transport direction (T). Claim 15 In claim 14, (i) a carrier transport method in which a second carrier (20) carrying a processed substrate is moved from a second carrier holder (120) provided on a second transport path (T2) that extends parallel to the first transport path (T) and offset from the first transport path (T). Claim 16 A carrier transport method according to claim 14, further comprising the step of (v) moving at least one first carrier holder (110) and at least one second carrier holder (120) holding a subsequent second carrier (30) provided in the return position in the path switch direction (S) relative to and past each other. Claim 17 A carrier transport method according to claim 16, further comprising the step of (vi) rotating the at least one first carrier holder (110) back to the holding position to load a subsequent first carrier (40) onto the at least one first carrier holder (110). Claim 18 A carrier transport method according to any one of claims 14 to 17, wherein (ii) the at least one first carrier holder (110) is moved in the direction of the path switch, passing through at least one second carrier holder (120) provided in the return position. Claim 19 A carrier transport method comprising, in any one of claims 14 to 17, a step of magnetically offsetting at least a portion of the weight force of the first carrier (10) held by the at least one first carrier holder (110). Claim 20 A carrier transport method according to any one of claims 14 to 17, wherein (ii) subsequently and (iii) prior thereto, the first substrate (11) transported by the first carrier (10) is coated with a material.

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