Apparatus for liquid suction that effectively sucks liquid from drum

Abstract

The present disclosure relates to a liquid suction device for sucking liquid from a drum, comprising: a main body side having a cylindrical shape in which the radius of the outer surface decreases toward the top and including a suction pipe coupling hole that is coupled to a suction pipe for sucking liquid from a drum at the top; a ring-shaped suction groove coupled to the bottom of the main body side and having an outer surface with a radius smaller than the radius of the outer surface of the bottom of the main body side, and including a first suction penetration hole that penetrates the inner surface and the outer surface along the circumference; a bottom surface coupled to the bottom of the ring-shaped suction groove and perpendicular to the longitudinal direction of the main body side and blocking the bottom of the ring-shaped suction groove; and a penetration hole member coupled to the outer surface of the ring-shaped suction groove, including a second suction penetration hole corresponding to the first suction penetration hole, wherein the radius of the outer surface of the ring-shaped suction groove is equal to the radius of the inner surface of the penetration hole member.

Description

Technology Field

[0001] The present disclosure discloses a liquid suction device that effectively sucks liquid from a drum. More specifically, the liquid suction device of the present disclosure not only rapidly sucks liquid from inside the drum but also minimizes the amount of liquid remaining in the drum. Background Technology

[0003] Various chemicals are used in semiconductor manufacturing. Since the introduction of impurities into chemicals must be minimized during the semiconductor manufacturing process, chemicals are transported and used in drums after production. Conventionally, it was often the case that not all of the liquid inside the drum could be used. This is because if special treatment is performed to use all of the liquid, impurities may be introduced, which can lead to a significant increase in the defect rate of the semiconductor.

[0004] In this regard, various attempts have been made to utilize not only the drum used in the semiconductor manufacturing process but also the liquid inside the container. For example, Korean Patent Application No. 10-2011-0135273 relates to an economical pump-type container. However, conventional inventions have the problem of being inefficient because their structure is very complex and even the shape of the drum must be changed. In addition, there is a disadvantage that the unit cost increases due to the production process, and there is a problem that its efficiency must be proven in order to be used in conservative semiconductor manufacturing. The problem to be solved

[0006] The present disclosure relates to a liquid suction device capable of using all of the liquid inside a drum. However, the technical problems are not limited to those described above, and other technical problems may exist. means of solving the problem

[0008] A liquid suction device for sucking liquid from a drum according to the present disclosure has a cylindrical shape in which the radius of the outer surface decreases as it goes upward, and includes a main body side having a suction pipe coupling hole that is coupled to a suction pipe for sucking liquid from a drum at the top; a ring-shaped suction groove coupled to the bottom of the main body side and having an outer surface with a radius smaller than the radius of the outer surface of the bottom of the main body side, and including a first suction penetration hole that penetrates the inner surface and the outer surface along the circumference; a bottom surface coupled to the bottom of the ring-shaped suction groove and perpendicular to the longitudinal direction of the main body side and blocking the bottom of the ring-shaped suction groove; and a penetration hole member coupled to the outer surface of the ring-shaped suction groove, which includes a second suction penetration hole corresponding to the first suction penetration hole, wherein the radius of the outer surface of the ring-shaped suction groove is equal to the radius of the inner surface of the penetration hole member.

[0009] A liquid suction device according to the present disclosure includes a cover coupling part having a screw thread formed on its outer surface and a main body side that is coupled to the top and has a radius that decreases as it extends upward, and a coupling cover having a screw thread formed on its inner surface to be coupled to the cover coupling part, into which a suction pipe is inserted into a formed hole.

[0010] A through-hole member of a liquid suction device according to the present disclosure comprises a first through-hole member coupled to a part of the outer surface of a ring-shaped suction groove and a second through-hole member coupled to another part of the outer surface of the ring-shaped suction groove, and the first through-hole member and the second through-hole member are coupled to form a ring-shaped through-hole member.

[0011] The first suction through hole of the liquid suction device according to the present disclosure includes a first internal observation hole filled with a transparent solid material to prevent fluid from flowing between the inner surface and the outer surface of the ring-shaped suction groove, and a first fluid inlet to allow fluid to flow between the inner surface and the outer surface of the ring-shaped suction groove, and the second suction through hole includes a second internal observation hole filled with a transparent solid material to prevent fluid from flowing between the inner surface and the outer surface of the through hole member, and a second fluid inlet to allow fluid to flow between the inner surface and the outer surface of the through hole member, and the first internal observation hole corresponds to the second internal observation hole, and the first fluid inlet corresponds to the second fluid inlet.

[0012] In the liquid suction device according to the present disclosure, a fluid filter for filtering foreign substances in the fluid is located between the first fluid inlet of the ring-shaped suction groove and the second fluid inlet of the through-hole member, the material of the fluid filter comprises at least one of Teflon and polypropylene, and the thickness of the fluid filter is 0.3 µm or more and 0.5 µm or less.

[0013] In the liquid suction device according to the present disclosure, a ring-shaped separator is positioned between a through hole member and a ring-shaped suction groove, and a fluid filter and a transparent film are alternately formed on the separator, the fluid filter filters out foreign substances from the fluid and corresponds to a first fluid inlet and a second fluid inlet, and the transparent film corresponds to a first internal observation hole and a second internal observation hole.

[0014] The radius of the first suction through-hole formed on the outer surface of the ring-shaped suction groove of the liquid suction device according to the present disclosure is greater than or equal to the radius of the first suction through-hole formed on the inner surface of the ring-shaped suction groove, the radius of the second suction through-hole formed on the outer surface of the through-hole member is greater than or equal to the radius of the second suction through-hole formed on the inner surface of the through-hole member, and the radius of the first suction through-hole formed on the outer surface of the ring-shaped suction groove is the same as the radius of the second suction through-hole formed on the inner surface of the through-hole member.

[0015] According to the present disclosure, the first suction through hole of the liquid suction device is formed at an angle with respect to the radial direction of the ring-shaped suction groove, and the second suction through hole is formed at an angle with respect to the radial direction of the through hole member so that the liquid is mixed inside the liquid suction device.

[0016] In addition, a program for implementing the method of operation of the liquid suction device of the present disclosure may be recorded on a computer-readable recording medium. Effects of the invention

[0018] The liquid suction device of the present disclosure can minimize production process costs by minimizing the amount of liquid remaining inside the drum. Additionally, by ensuring effective liquid suction, it can reduce the phenomenon where the hourly suction rate varies depending on the amount of liquid remaining. Therefore, a uniform supply of chemicals can always be provided for semiconductor production. Furthermore, the liquid suction device can supply higher purity liquid to semiconductor production by filtering out impurities inside the drum. Moreover, even if the liquid separates according to density during the storage of the drum, the liquid suction device mixes the liquid while suctioning it to ensure that the mixing ratio of the liquid always remains constant. Additionally, the liquid suction device can minimize the production of air bubbles during suction, thereby ensuring a smooth supply of liquid to the semiconductor production process. Finally, the liquid suction device serves to support the suction pipe, thereby eliminating the phenomenon where the joints of the suction pipe become loose over time.

[0019] However, the effects of the liquid suction device of the present disclosure are not limited to the above effects. Brief explanation of the drawing

[0021] FIG. 1 is a drawing for explaining a liquid suction device according to one embodiment of the present disclosure. FIG. 2 is a cross-sectional view of a liquid suction device according to one embodiment of the present disclosure. FIG. 3 is an enlarged view of a ring-shaped suction groove according to one embodiment of the present disclosure. FIG. 4 is a cross-sectional view taken parallel to the ground of a ring-shaped suction groove and a through-hole member according to one embodiment of the present disclosure. FIG. 5 is a drawing for explaining the combination of a first through-hole member and a second through-hole member according to one embodiment of the present disclosure. FIG. 6 is a drawing for explaining a liquid suction device according to one embodiment of the present disclosure. FIG. 7 is a drawing showing a cross-section of a liquid suction device according to one embodiment of the present disclosure. FIG. 8 is a cross-sectional view for explaining a through-hole member (250) according to one embodiment of the present disclosure. FIG. 9 illustrates a separator according to one embodiment of the present disclosure. FIG. 10 shows a cross-section of a liquid suction device according to one embodiment of the present disclosure. FIG. 11 is a drawing showing at least one of a first suction through-hole and a second suction through-hole according to one embodiment of the present disclosure. Specific details for implementing the invention

[0022] The advantages and features of the disclosed embodiments and the methods for achieving them will become clear by referring to the embodiments described below in conjunction with the accompanying drawings. However, the present disclosure is not limited to the embodiments disclosed below but may be implemented in various different forms, and the embodiments are provided merely to make the present disclosure complete and to fully inform those skilled in the art of the scope of the invention.

[0023] The terms used in this specification will be briefly explained, and the disclosed embodiments will be described in detail.

[0024] The terms used in this specification have been selected to be as widely used as possible, taking into account their functions in the present disclosure; however, these terms may vary depending on the intent of those skilled in the art, case law, the emergence of new technologies, etc. Additionally, in specific cases, terms have been arbitrarily selected by the applicant, and in such cases, their meanings will be described in detail in the relevant description of the invention. Therefore, terms used in this disclosure should be defined not merely by their names, but based on their meanings and the overall content of the present disclosure.

[0025] In this specification, singular expressions include plural expressions unless the context clearly indicates that they are singular. Additionally, plural expressions include singular expressions unless the context clearly indicates that they are plural.

[0026] When a part of a specification is described as "including" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but may include additional components.

[0027] Additionally, the term "part" as used in the specification refers to a software or hardware component, and the "part" performs certain roles. However, the meaning of "part" is not limited to software or hardware. The "part" may be configured to reside in an addressable storage medium or configured to run on one or more processors. Thus, by example, the "part" includes components such as software components, object-oriented software components, class components, and task components, as well as processes, functions, attributes, procedures, subroutines, segments of program code, drivers, firmware, microcode, circuits, data, databases, data structures, tables, arrays, and variables. The functions provided within the components and "parts" may be combined into a smaller number of components and "parts" or further separated into additional components and "parts."

[0028] According to one embodiment of the present disclosure, the “part” may be implemented as a processor and memory. The term “processor” should be broadly interpreted to include a general-purpose processor, a central processing unit (CPU), a microprocessor, a digital signal processor (DSP), a controller, a microcontroller, a state machine, etc. In some environments, “processor” may refer to an application-specific integrated circuit (ASIC), a programmable logic device (PLD), a field programmable gate array (FPGA), etc. The term “processor” may also refer to a combination of processing devices, such as, for example, a combination of a DSP and a microprocessor, a combination of multiple microprocessors, a combination of one or more microprocessors combined with a DSP core, or any other combination of such configurations.

[0029] The term "memory" should be interpreted broadly to include any electronic component capable of storing electronic information. The term memory may also refer to various types of processor-readable media, such as Random Access Memory (RAM), Read-Only Memory (ROM), Non-Volatile Random Access Memory (NVRAM), Programmable Read-Only Memory (PROM), Erasable-Programmable Read-Only Memory (EPROM), Electrically Erasable PROM (EEPROM), Flash Memory, Magnetic or Optical Data Storage Devices, Registers, etc. If a processor can read information from memory and / or write information to memory, memory is said to be in an electronic communication state with the processor. Memory integrated into a processor is in an electronic communication state with the processor.

[0030] Below, embodiments are described in detail with reference to the attached drawings so that those skilled in the art can easily implement the present disclosure. In addition, parts of the drawings that are irrelevant to the description are omitted to clearly explain the present disclosure.

[0031] FIG. 1 is a drawing for explaining a liquid suction device according to one embodiment of the present disclosure.

[0032] The liquid suction device (110) of the present disclosure may be configured to suck liquid from a drum (100). The liquid suction device (110) may be coupled with a suction pipe (120) and inserted into the interior of the drum (100). Negative pressure is generated in the suction pipe (120) by a pressure generating part (not shown), so that the liquid inside the drum (100) can be sucked into the suction pipe (120) through the liquid suction device (110). The liquid suction device (110) will be described in detail later.

[0033] The suction pipe (120) may be configured to form a path for moving liquid. A liquid suction device (110) may be connected to one side of the suction pipe (120), and a pipe connection part (130) may be connected to the other side. The pipe connection part (130) may include at least one of a direction determining pipe that changes the direction of movement of the liquid inside the suction pipe (120), a pressure generating part for generating liquid flow, and a valve for determining whether liquid flows. Liquid can be moved to a place where liquid is needed by the pipe connection part (130). For example, the place where liquid is needed may be a point on a semiconductor manufacturing process.

[0034] FIG. 2 is a cross-sectional view of a liquid suction device according to one embodiment of the present disclosure.

[0035] The liquid suction device (110) may include a main body side (210). The main body side (210) may have a cylindrical shape in which the radius of the outer surface decreases as it goes upward. The radius (241) at the top of the outer surface of the main body side (210) may be smaller than the radius (242) at the bottom of the outer surface of the main body side (210).

[0036] In this way, by configuring the radius (242) at the bottom of the main body side (210) to be large, the liquid suction device (110) can be made slimmer, and sufficient space can be secured at the bottom of the liquid suction device (110) to include a first suction through hole, a second suction through hole, and a fluid filter. In addition, by forming the bottom of the liquid suction device (110) large, sufficient space can be secured for liquid to flow in, thereby increasing the liquid suction capacity of the liquid suction device (110). Therefore, the liquid suction device (110) can stably supply chemicals to the semiconductor process.

[0037] The side of the main body (210) may include a suction pipe connection hole (211). The suction pipe connection hole (211) may be formed at the top of the side of the main body (210). The suction pipe connection hole (211) may be connected to a suction pipe (120) for sucking liquid from the drum (100). More specifically, the suction pipe (120) may be inserted into and connected to the suction pipe connection hole (211).

[0038] The radius (243) of the inner surface of the main body side (210) may be constant. The radius (243) of the inner surface of the main body side (210) may be approximately the same as the radius of the outer surface of the suction pipe (120). A protrusion may be formed on the inner surface of the main body side (210) to be firmly connected to the suction pipe (120). The protrusion may protrude in the direction of the center of the circle on the inner surface of the main body side (210). However, it is not limited to this, and the radius (243) of the inner surface of the main body side (210) may become smaller as it goes downward. The inner surface of the main body side (210) may be made of a material with friction. Therefore, the main body side (210) can be firmly connected to the suction pipe (120). In addition, the inner surface of the main body side (210) may include an elastic material. Therefore, there may be almost no space formed between the inner surface of the main body side (210) and the outer surface of the suction pipe (120). Thus, the liquid suction device (110) can suck up liquid without the liquid leaking.

[0039] The liquid suction device (110) may include a ring-shaped suction groove (220). The ring-shaped suction groove (220) may be coupled to the bottom of the main body side (210). The main body side (210) and the ring-shaped suction groove (220) may be formed integrally.

[0040] The ring-shaped suction groove (220) may be ring-shaped. The radius of the inner circumference of the ring-shaped suction groove (220) may be approximately the same as the radius of the inner circumference of the main body side (210).

[0041] The radius of the outer surface of the ring-shaped suction groove (220) may be smaller than the radius (242) of the outer surface of the lower side of the main body (210). The ring-shaped suction groove (220) may include a first suction through hole (221) that penetrates the inner surface and the outer surface along the circumference of the ring-shaped suction groove (220). The ring-shaped suction groove (220) may include a plurality of first suction through holes (221). The extension direction of the plurality of first suction through holes (221) may be the radial direction of the ring-shaped suction groove (220). The radial direction may be the direction from the center of the circle formed by the ring-shaped suction groove (220) toward the circumference. However, it is not limited thereto, and the extension direction of the plurality of first suction through holes (221) may be a direction inclined toward the radial direction of the ring-shaped suction groove (220). The inclination may be 10 degrees or more and 60 degrees or less. In addition, the extension direction of the plurality of first suction through holes (221) can be formed to become higher as it goes from the outer surface to the inner surface of the ring-shaped suction groove (220).

[0042] In this way, by forming the extension direction of the plurality of first suction through holes (221), the liquid sucked by the liquid suction device (110) can rise while drawing a spiral. Therefore, the flow of the liquid becomes smooth, and the liquid can be supplied quickly to the suction pipe (120).

[0043] The ring-shaped suction groove (220) is located at the bottom of the liquid suction device (110) and can effectively suck up the fluid at the bottom of the drum (100). The first suction through hole (221) formed on the outer surface of the ring-shaped suction groove (220) is located at the bottom of the liquid suction device (110) and can suck up the fluid at the bottom of the drum (100) without leaving any behind.

[0044] The liquid suction device (110) may include a bottom surface (230). The bottom surface (230) may be coupled to the bottom of the ring-shaped suction groove (220). At least one of the bottom surface (230), the main body side surface (210), and the ring-shaped suction groove (220) may be formed integrally.

[0045] The bottom surface (230) may be perpendicular to the longitudinal direction of the main body side (210). Here, the longitudinal direction may refer to the vertical direction. The bottom surface (230) may have a shape among a disc shape, a square plate shape, a downwardly convex hemispherical shape, and a downwardly concave hemispherical shape. The bottom surface (230) may be selected according to the internal shape of the drum (100). Since the bottom surface (230) can be selected as one of various shapes, the liquid inside the drum can be used without waste regardless of the internal shape of the drum (100).

[0046] In addition, the thickness (231) of the bottom surface (230) may be 5 mm or less and 0.01 mm or more. Thus, the first suction through hole (221) formed in the ring-shaped suction groove (220) may be close to the bottom. Therefore, the liquid suction device (110) can suck up almost all of the liquid inside the drum (100).

[0047] The bottom surface (230) can block the bottom of the ring-shaped suction groove (220). Therefore, the liquid inside the drum (100) may not be sucked into the bottom of the main body side (210) or the bottom of the ring-shaped suction groove (220). If the bottom of the ring-shaped suction groove (220) is not blocked, the liquid may need to be sucked in by the radius of the inner circumference of the ring-shaped suction groove (220), which has a relatively large radius. In this case, a large negative pressure must be formed in the suction pipe (120) for the liquid to be sucked in. However, since the bottom of the ring-shaped suction groove (220) is blocked, the liquid flows into the interior of the suction pipe (120) through the first suction through hole (221) of a small radius formed in the ring-shaped suction groove (220), so the liquid can flow into the suction pipe (120) even if a small negative pressure is formed inside the suction pipe (120). Since a larger negative pressure requires more energy, the liquid suction device (110) of the present disclosure can save energy. In the present disclosure, negative pressure may refer to a pressure lower than atmospheric pressure.

[0048] The liquid suction device (110) may include a through hole member (250). The through hole member (250) may include a second suction through hole (251) corresponding to a first suction through hole (221). More specifically, the first suction through hole (221) may be connected to the second suction through hole (251). Liquid introduced through the second suction through hole (251) may flow into the interior of the suction pipe (120) through the first suction through hole (221). The extension direction of the second suction through hole (251) may be the same as that of the first suction through hole (221). Therefore, the second suction through hole (251) and the first suction through hole (221) may hardly obstruct the flow of liquid.

[0049] The through hole member (250) may be coupled to the outer surface (320) of the ring-shaped suction groove (220). The inner surface (451) of the through hole member (250) may be in contact with the outer surface (320) of the ring-shaped suction groove (220). The through hole member (250) may be coupled to a predetermined position of the ring-shaped suction groove (220). This is because the first suction through hole (221) and the second suction through hole (251) must be connected. The radius of the outer surface (320) of the ring-shaped suction groove (220) may be equal to the radius of the inner surface (451) of the through hole member (250).

[0050] The upper end of the through hole member (250) may be in contact with the lower end of the main body side (210), and the lower end of the through hole member (250) may be in contact with the upper end of the lower surface (230). Thus, the through hole member (250) can be fixed to the liquid suction device (110). That is, the through hole member (250) can be maintained while engaged with the ring-shaped suction groove (220).

[0051] Below, the ring-shaped suction groove (220) and the through-hole member (250) will be described together with FIGS. 3 and 4.

[0052] FIG. 3 is an enlarged view of a ring-shaped suction groove according to one embodiment of the present disclosure. FIG. 4 is a cross-sectional view of a ring-shaped suction groove and a through-hole member according to one embodiment of the present disclosure, cut parallel to the ground.

[0053] Referring to FIG. 3, the outer surface (320) of the ring-shaped suction groove (220) may include a groove or a protrusion (310). For example, a groove or a protrusion (310) may be formed between a plurality of first suction through holes (221) on the outer surface (320) of the ring-shaped suction groove (220). The groove and the protrusion (310) formed on the outer surface (320) of the ring-shaped suction groove (220) may be configured to align the positions of the ring-shaped suction groove and the through hole member (250). In FIG. 3, two grooves and protrusions (310) are shown, but this is not limited thereto, and at least one groove and protrusion (310) may be included. The positions of the groove and the protrusion (310) may differ. The groove and the protrusion (310) may not be formed. In this way, the ring-shaped suction groove (220) including the groove and the projection (310) can allow the through-hole member (250) to be coupled with the ring-shaped suction groove (220) in a specific direction. Thus, the first suction through-hole (221) and the second suction through-hole (251) can be connected.

[0054] Referring to FIG. 4, the groove and protrusion (310) may be formed only on one semicircle of the outer surface (320) and not on the other semicircle. Accordingly, only one of the first through-hole member (420) and the second through-hole member (430) included in the through-hole member (250) may be coupled to one semicircle of the outer surface (320) of the ring-shaped suction groove (220). Additionally, only the other of the first through-hole member (420) and the second through-hole member (430) included in the through-hole member (250) may be coupled to the other semicircle of the outer surface (320) of the ring-shaped suction groove (220).

[0055] According to various embodiments of the present disclosure, the groove and the projection (310) may be formed on both one semicircle and the other semicircle of the outer surface (320). Accordingly, one semicircle of the ring-shaped suction groove (220) may be coupled to one of a plurality of identically shaped through-hole members (250), and the other semicircle of the ring-shaped suction groove (220) may be coupled to another of a plurality of identically shaped through-hole members (250).

[0056] According to various embodiments of the present disclosure, the groove and the projection (310) may not be formed. In this case, the first suction through hole (221) and the second suction through hole (251) may not fit together, but instead, the connection may be convenient. Additionally, the first suction through hole (221) and the second suction through hole (251) may be automatically aligned as liquid is sucked in by forming negative pressure.

[0057] Referring to FIG. 4, the inner surface (451) of the through hole member (250) may include a protrusion or a groove (440). Additionally, the protrusion or groove (440) formed on the inner surface (451) of the through hole member (250) may engage with the groove or protrusion (310) formed on the outer surface (320) of the ring-shaped suction groove (220). Thus, the through hole member (250) may be positioned in a specific direction relative to the ring-shaped suction groove (220), and the first suction through hole (221) and the second suction through hole (251) may be connected. Additionally, the liquid inside the drum (100) can move from the outer surface (452) of the through hole member (250) to the inner surface (410) of the ring-shaped suction groove (220) through the first suction through hole (221) and the second suction through hole (251).

[0058] For convenience of explanation, FIG. 4 shows the width (461) of the through hole member (250) as being larger than the width (462) of the ring-shaped suction groove (220). However, it is not limited thereto. The width (461) of the through hole member (250) may be the same as the width (462) of the ring-shaped suction groove (220), or the width (461) of the through hole member (250) may be smaller than the width (462) of the ring-shaped suction groove (220). Additionally, the height of the through hole member (250) may be the same as the height of the ring-shaped suction groove (220).

[0059] The through hole member (250) may include a first through hole member (420) coupled to a part of the outer surface (320) of the ring-shaped suction groove (220). Additionally, the through hole member (250) may include a second through hole member (430) coupled to another part of the outer surface (320) of the ring-shaped suction groove (220). The first through hole member (420) and the second through hole member (430) may be coupled to each other to form a ring-shaped through hole member (250). In FIG. 4, the first through hole member (420) and the second through hole member (430) are shown to have the shape of an arc of 180 degrees, but are not limited thereto. The length of the arc formed by the first through hole member (420) may be longer than the length of the arc formed by the second through hole member (430). In addition, the length of the arc formed by the first through-hole member (420) may be shorter than the length of the arc formed by the second through-hole member (430).

[0060] The ring-shaped suction groove (220) and the through-hole member (250) can be coupled in a specific direction by means of a groove or protrusion (310) formed on the outer surface (320) of the ring-shaped suction groove (220) and a protrusion or groove (440) formed on the inner surface (451) of the through-hole member (250). Additionally, by means of a groove or protrusion (310) formed on the outer surface (320) of the ring-shaped suction groove (220) and a protrusion or groove (440) formed on the inner surface (451) of the through-hole member (250), only the first through-hole member (420) can be coupled to a part of the outer surface (320) of the ring-shaped suction groove (220), and only the second through-hole member (430) can be coupled to another part of the outer surface (320) of the ring-shaped suction groove (220).

[0061] As previously explained, according to various embodiments of the present disclosure, grooves or protrusions may not be formed on the outer surface (320) of the ring-shaped suction groove (220) and the inner surface (451) of the through hole member (250). Additionally, the first suction through hole (221) and the second suction through hole (251) may be automatically aligned as liquid is sucked in by forming negative pressure.

[0062] FIG. 5 is a drawing for explaining the combination of a first through-hole member and a second through-hole member according to one embodiment of the present disclosure.

[0063] The first through-hole member (420) may include a first coupling part (510) on one side and the other side. Additionally, the second through-hole member (430) may include a second coupling part (520) on one side and the other side. The first coupling part (510) of the first through-hole member (420) may be coupled to the second coupling part (520) of the second through-hole member (430).

[0064] As shown in FIG. 5, the first connecting part (510) may have a hook shape and the second connecting part (520) may also have a hook shape. In this way, the first connecting part (510) and the second connecting part (520) can be connected by the physical shape of the first connecting part (510) and the second connecting part (520).

[0065] However, it is not limited thereto. The first connecting part (510) and the second connecting part (520) may include at least one of a magnet and Velcro. The first connecting part (510) and the second connecting part (520) may be connected by magnetic force or frictional force. Additionally, a connecting part of a different form from that of FIG. 5 may be used.

[0066] Additionally, according to various embodiments of the present disclosure, the first through-hole member (420) and the second through-hole member (430) may not include the first coupling portion (510) and the second coupling portion (520). The first through-hole member (420) and the second through-hole member (430) may simply be in contact. The through-hole member (250) may be fixed by friction with at least one of the main body side surface (210) and the bottom surface (230).

[0067] When one side and the other side of the first through-hole member (420) are joined to one side and the other side of the second through-hole member (430) by the first connecting part (510) and the second connecting part (520), a through-hole member (250) can be formed. Additionally, the upper end of the through-hole member (250) may be in contact with the lower end of the main body side (210), and the lower end of the through-hole member (250) may be in contact with the upper end of the lower surface (230). Thus, the through-hole member (250) can be fixed to the liquid suction device (110). That is, the through-hole member (250) can be maintained while engaged with the ring-shaped suction groove (220).

[0068] FIG. 6 is a drawing for explaining a liquid suction device according to one embodiment of the present disclosure.

[0069] The liquid suction device (110) may include a cover coupling part (610). The cover coupling part (610) may be coupled to the upper side of the main body (210). The radius of the cover coupling part (610) may decrease as it extends upward. Additionally, screw threads may be formed on the outer surface of the cover coupling part (610). The radius of the crest of the screw thread formed on the outer surface of the cover coupling part (610) may decrease or remain the same as it extends upward. Similarly, the radius of the groove of the screw thread formed on the outer surface of the cover coupling part (610) may decrease or remain the same as it extends upward.

[0070] The liquid suction device (110) may include a coupling cover (620). Screw threads may be formed on the inner surface of the coupling cover (620) so as to be coupled with the cover coupling part (610). Additionally, a suction pipe (120) may be inserted into a hole formed in the coupling cover (620). The radius of the crest of the screw threads on the inner surface of the coupling cover (620) may be constant. Additionally, the radius of the groove of the screw threads on the inner surface of the coupling cover (620) may be constant.

[0071] The coupling cover (620) can be screw-coupled to the cover coupling part (610). Since the outer surface of the cover coupling part (610) may have a radius that decreases as it goes upward and the inner surface of the coupling cover (620) has a constant radius, as the coupling cover (620) is coupled to the cover coupling part (610), the coupling cover (620) can apply force to the cover coupling part (610) in the direction of the center of the cover coupling part (610). That is, as the coupling cover (620) is coupled to the cover coupling part (610) and moves downward, the coupling cover (620) can apply force to the cover coupling part (610) in the direction of the center of the cover coupling part (610). Accordingly, the inner surface of the cover coupling part (610) can apply force to the outer surface of the suction pipe (120). Accordingly, the frictional force between the inner surface of the cover coupling part (610) and the outer surface of the suction pipe (120) can be increased. Therefore, the cover coupling part (610) can be coupled to the suction pipe (120).

[0072] FIG. 7 is a drawing showing a cross-section of a liquid suction device according to one embodiment of the present disclosure.

[0073] A fluid filter (710) may be positioned between the through hole member (250) and the ring-shaped suction groove (220). The fluid filter (710) may be configured to filter out foreign substances inside the drum (100). Although the liquid inside the drum (100) may have high purity, impurities may settle during the circulation process. The fluid filter (710) can filter out such settled substances. Additionally, the fluid filter may help to crush clumped substances in the liquid and turn them back into fine particles. Through the fluid filter (710), the liquid suction device (110) can always supply uniform liquid to the semiconductor process.

[0074] The material of the fluid filter (710) may include at least one of Teflon and polypropylene. Additionally, the thickness of the fluid filter (710) may be 0.3 µm or more and 0.5 µm or less.

[0075] The fluid filter (710) may be positioned between the first suction through hole (221) and the second suction through hole (251). Thus, the liquid in the drum (100) may pass through the second suction through hole (251), pass through the fluid filter (710), and then flow into the interior of the suction pipe (120) through the first suction through hole (221). Additionally, the fluid filter (710) may be fixed by the through hole member (250) and the ring-shaped suction groove (220). Therefore, there may be no need to provide a separate configuration for fixing the fluid filter (710).

[0076] FIG. 8 is a cross-sectional view for explaining a through-hole member (250) according to one embodiment of the present disclosure.

[0077] As previously explained, the ring-shaped suction groove (220) may include a first suction through hole (221). The first suction through hole (221) may include a first internal observation hole (at least one of 811 or 813). The first internal observation hole (at least one of 811 or 813) may be filled with a transparent solid material to prevent fluid from flowing between the inner surface and the outer surface of the ring-shaped suction groove. However, it is not limited thereto, and the first internal observation hole (at least one of 811 or 813) may not be filled with a transparent solid and may be empty.

[0078] The first internal observation hole (at least one of 811 or 813) may have a radius greater than or equal to that of the first fluid inlet (812). Thus, the user can check the internal condition of the liquid suction device (110) through the first internal observation hole (at least one of 811 or 813). In addition, if a large amount of foreign matter is deposited inside the liquid suction device (110), the user can replace or clean the liquid suction device (110) to ensure that a uniform liquid is always supplied to the semiconductor process.

[0079] The first suction through hole (221) may include a first fluid inlet (812). The first fluid inlet (812) may be configured to allow fluid to flow between the inner surface (410) and the outer surface (320) of the ring-shaped suction groove (220).

[0080] FIG. 8 shows reference numerals only for parts of the first internal observation hole (at least one of 811 or 813) and the first fluid inlet (812), but is not limited thereto. In FIG. 8, what is depicted similarly to the first internal observation hole (at least one of 811 or 813) and the first fluid inlet (812) may be one of the first internal observation hole and the first fluid inlet.

[0081] The through hole member (250) may include a second suction through hole (251). The second suction through hole (251) may include at least one of a second internal observation hole (821, 823, and 825). The second internal observation hole (at least one of 821, 823, and 825) may be filled with a transparent solid material to prevent fluid from flowing between the inner surface and the outer surface of the through hole member. However, it is not limited thereto, and the second internal observation hole (at least one of 821, 823, and 825) may not be filled with a transparent solid and may be empty.

[0082] The second internal observation hole (at least one of 821, 823, and 825) may have a radius that is larger than or equal to the second fluid inlet (at least one of 822, 824, and 826). Thus, the user can check the internal condition of the liquid suction device (110) through the second internal observation hole (at least one of 821, 823, and 825). In addition, if a large amount of foreign matter is deposited inside the liquid suction device (110), the user can replace or clean the liquid suction device (110) to ensure that a uniform liquid is always supplied to the semiconductor process.

[0083] The through hole member (250) may include a second fluid inlet (at least one of 822, 824, and 826). The second fluid inlet (at least one of 822, 824, and 826) may be configured to allow fluid to flow between the inner surface (451) and the outer surface (452) of the through hole member (250).

[0084] The first internal observation hole (at least one of 811 or 813) corresponds to the second internal observation hole (at least one of 821, 823, and 825), and the first fluid inlet (812) may correspond to the second fluid inlet (at least one of 822, 824, and 826).

[0085] For example, the first internal observation hole (811) can be connected to the second internal observation hole (821), and the first internal observation hole (813) can be connected to the second internal observation hole (823). Thus, the user can check the inside of the liquid suction device (110) through the first internal observation hole (811) and the second internal observation hole (821).

[0086] For example, the first fluid inlet (812) can be connected to the second fluid inlet (822). Thus, the liquid inside the drum (100) can be sucked into the interior of the liquid suction device (110) through the first fluid inlet (812) and the second fluid inlet (822).

[0087] Referring again to FIG. 7, a fluid filter (710) for filtering foreign substances from the fluid may be located between the first fluid inlet (812) of the ring-shaped suction groove (220) and the second fluid inlet (at least one of 822, 824, and 826) of the through-hole member (250). The liquid inside the drum (100) may have high purity, but impurities may settle during the circulation process. The fluid filter (710) can filter out such settled substances to always supply a uniform liquid to the semiconductor process.

[0088] The material of the fluid filter (710) may include at least one of Teflon and polypropylene. Additionally, the thickness of the fluid filter (710) may be 0.3 µm or more and 0.5 µm or less. The fluid filter (710) may be fixed between the through-hole member (250) and the ring-shaped suction groove (220) by friction with the through-hole member (250) and the ring-shaped suction groove (220).

[0089] FIG. 9 illustrates a separator according to one embodiment of the present disclosure.

[0090] A ring-shaped separator (900) may be positioned between the through-hole member (250) and the ring-shaped suction groove (220). The separator (900) may be detachable from the liquid suction device (110) so as to be replaceable. The outer surface of the separator (900) may be in contact with the inner surface of the through-hole member (250), and the inner surface of the separator (900) may be in contact with the outer surface of the ring-shaped suction groove (220). The separator (900) may be fixed between the through-hole member (250) and the ring-shaped suction groove (220) by friction with the through-hole member (250) and the ring-shaped suction groove (220).

[0091] A fluid filter (710) and a transparent film (910) may be alternately formed on the separator (900). Additionally, as described in FIG. 7, the fluid filter (710) may function to filter out foreign substances from the fluid. The fluid filter (710) may correspond to a first fluid inlet (812) and a second fluid inlet (822). That is, the liquid in the drum (100) may flow through the fluid filter (710) via the second fluid inlet (at least one of 822, 824, and 826) and then flow into the suction pipe (120) via the first fluid inlet (812).

[0092] The transparent film (910) may correspond to at least one of the first internal observation hole (811 or 813) and at least one of the second internal observation hole (821, 823, and 825). That is, the user can observe the inside of the liquid suction device (110) through the second internal observation hole (at least one of 821, 823, and 825), the transparent film (910), and the first internal observation hole (at least one of 811 or 813). In addition, if the inside of the liquid suction device (110) is contaminated, the liquid suction device (110) can be replaced or cleaned.

[0093] However, it is not limited to this, and a camera may be positioned inside the drum (100). The camera may photograph the inside of the liquid suction device (110) through the second internal observation hole (at least one of 821, 823, and 825), the transparent film (910), and the first internal observation hole (at least one of 811 or 813). The camera is small and may be positioned inside the liquid suction device (110) through the second internal observation hole (at least one of 821, 823, and 825), the transparent film (910), and the first internal observation hole (at least one of 811 or 813).

[0094] The control unit can determine whether the interior is contaminated based on an image of the interior of the liquid suction device (110) captured by a camera. The control unit can determine whether the interior is contaminated based on image processing. For example, the control unit may determine that the interior of the liquid suction device (110) is contaminated if the image does not have a uniform color or has a brightness below a threshold. The control unit can generate an alarm, and the user can replace or clean the liquid suction device (110) based on the alarm. The control unit and the camera may be included in the bottom surface. In this case, the control unit may operate at a uniform temperature due to the liquid in the drum (100). The control unit may use a low-power microprocessor to avoid deforming the liquid in the drum (100) at all.

[0095] FIG. 10 shows a cross-section of a liquid suction device according to one embodiment of the present disclosure.

[0096] The radius of the first suction through hole (221) formed on the outer surface (320) of the ring-shaped suction groove (220) may be greater than or equal to the radius of the first suction through hole (221) formed on the inner surface (410) of the ring-shaped suction groove (220). For example, the radius of the first suction through hole (221) may decrease as it goes from the outer surface (320) of the ring-shaped suction groove (220) to the inner surface (410), or it may remain the same even when going from the outer surface (320) of the ring-shaped suction groove (220) to the inner surface (410).

[0097] Additionally, the radius of the second suction through hole (251) formed on the outer surface (452) of the through hole member (250) may be greater than or equal to the radius of the second suction through hole (251) formed on the inner surface (451) of the through hole member (250). For example, the radius of the second suction through hole (251) may decrease as it goes from the outer surface (452) of the through hole member (250) to the inner surface (451), or it may remain the same even when going from the outer surface (452) of the through hole member (250) to the inner surface (451).

[0098] Additionally, the radius of the first suction through hole (221) formed on the outer surface (320) of the ring-shaped suction groove (220) may be approximately the same as the radius of the second suction through hole (251) formed on the inner surface (451) of the through hole member (250). The radius of the first suction through hole (221) formed on the inner surface of the ring-shaped suction groove (220) may be smaller than the radius of the second suction through hole (251) formed on the outer surface of the through hole member (250).

[0099] As such, the radius of the first suction through hole (221) and the radius of the second suction through hole (251) become smaller as they go from the outer surface to the inner surface of the liquid suction device (110), so the liquid suction device (110) can suck up the liquid inside the drum (100) and supply it to the suction pipe (120) even if a small negative pressure is formed in the suction pipe (120). Since a large amount of energy is used as the negative pressure is formed larger, the liquid suction device (110) of the present disclosure can save energy.

[0100] FIG. 11 is a drawing showing at least one of a first suction through-hole and a second suction through-hole according to one embodiment of the present disclosure.

[0101] FIG. 11(a) shows a cross-section of the ring-shaped suction groove (220) and the through-hole member (250) cut parallel to the ground. Referring to FIG. 11(a), the first suction through-hole (221) may be formed at an angle with respect to the radial direction (1110) of the ring-shaped suction groove (220). Additionally, the second suction through-hole (251) may be formed at an angle with respect to the radial direction (1110) of the through-hole member (250). The extension direction of the first suction through-hole (221) may be the same as the extension direction of the second suction through-hole (251). The first suction through-hole (221) and the second suction through-hole (251) may be connected. Liquid can be rapidly mixed inside the liquid suction device (110) by means of the first suction through hole (221) and the second suction through hole (251) formed at an angle.

[0102] Accordingly, the liquid that enters the interior of the suction pipe (120) through the first suction through hole (221) and the second suction through hole (251) can form a vortex. During the distribution and storage process of the drum (100), the components of the internal liquid may be separated. According to the liquid suction device (110) of the present disclosure, the suctioned liquid can be mixed quickly by using the inclined first suction through hole (221) and the second suction through hole (251). Therefore, a liquid with a uniform mixing ratio can be supplied to the semiconductor process.

[0103] In addition, the liquid flowing in a spiral (vortex shape) moves rapidly along the inner surface of the liquid suction device (110), thereby preventing foreign substances from being deposited on the inner surface of the liquid suction device (110). Furthermore, the liquid flowing in a spiral can move rapidly along the pipe without its speed decreasing significantly even if it encounters a bent pipe while moving. Therefore, there may be no deposition of foreign substances due to changes in fluid speed, or an excessive decrease in the speed of the liquid moving inside the pipe. Thus, liquid can always be supplied stably to the semiconductor process.

[0104] Also, 11(b) is a front view of the liquid suction device (110). The ring-shaped suction groove (220) may be hidden from view by the through-hole member (250). The first suction through-hole (221) and the second suction through-hole (251) may be formed to rise from the outer surface of the through-hole member (250) toward the inner surface of the ring-shaped suction groove (220). That is, the first suction through-hole (221) and the second suction through-hole (251) may be formed at an angle to the ground.

[0105] When the liquid in the drum (100) is sucked into the interior of the suction pipe (120), it may have an inertia that rises due to the first suction through hole (221) and the second suction through hole (251). Therefore, the liquid can be supplied to the semiconductor process with a sufficiently fast flow rate. Thus, even if the first suction through hole (221) and the second suction through hole (251) have a smaller radius than conventional ones, the liquid can be stably supplied to the semiconductor process.

[0106] We have examined various embodiments so far. Those skilled in the art will understand that the present invention may be embodied in modified forms without departing from the essential characteristics of the invention. Therefore, the disclosed embodiments should be considered in an illustrative rather than a restrictive sense. The scope of the invention is defined by the claims, not by the foregoing description, and all variations within the scope of equivalents should be interpreted as being included in the invention.

[0107] Meanwhile, the embodiments of the present invention described above can be written as a program that can be executed on a computer and can be implemented in a general-purpose digital computer that operates the program using a computer-readable recording medium. A computer-readable recording medium includes storage media such as magnetic storage media (e.g., ROM, floppy disk, hard disk, etc.) and optical reading media (e.g., CD-ROM, DVD, etc.).

Claims

Claim 1 A liquid suction device for sucking liquid from a drum, comprising: a main body side having a cylindrical shape in which the radius of the outer surface decreases toward the top, and including a suction pipe coupling hole at the top for sucking liquid from the drum; a ring-shaped suction groove coupled to the bottom of the main body side, having an outer surface with a radius smaller than the radius of the outer surface of the bottom of the main body side, and including a first suction penetration hole penetrating the inner surface and the outer surface along the circumference; a bottom surface coupled to the bottom of the ring-shaped suction groove, perpendicular to the longitudinal direction of the main body side, and blocking the bottom of the ring-shaped suction groove; and a penetration hole member coupled to the outer surface of the ring-shaped suction groove, including a second suction penetration hole corresponding to the first suction penetration hole, wherein the radius of the outer surface of the ring-shaped suction groove is the same as the radius of the inner surface of the penetration hole member. Claim 2 In claim 1, the liquid suction device comprises: a cover coupling part having a screw thread formed on its outer surface and a main body side that is coupled to the top and has a radius that decreases as it goes upward; and a coupling cover having a screw thread formed on its inner surface so as to be coupled to the cover coupling part, into which the suction pipe is inserted. Claim 3 A liquid suction device according to claim 1, wherein the through-hole member comprises: a first through-hole member coupled to a part of the outer surface of the ring-shaped suction groove; and a second through-hole member coupled to another part of the outer surface of the ring-shaped suction groove, wherein the first through-hole member and the second through-hole member are coupled to form a ring-shaped through-hole member. Claim 4 A liquid suction device according to claim 1, wherein the first suction through hole comprises: a first internal observation hole filled with a transparent solid material to prevent fluid from flowing between the inner surface and the outer surface of the ring-shaped suction groove; and a first fluid inlet to allow fluid to flow between the inner surface and the outer surface of the ring-shaped suction groove; and the second suction through hole comprises: a second internal observation hole filled with a transparent solid material to prevent fluid from flowing between the inner surface and the outer surface of the through hole member; and a second fluid inlet to allow fluid to flow between the inner surface and the outer surface of the through hole member; wherein the first internal observation hole is connected to the second internal observation hole, and the first fluid inlet is connected to the second fluid inlet. Claim 5 A liquid suction device according to claim 4, wherein a fluid filter for filtering foreign substances from the fluid is positioned between the first fluid inlet of the ring-shaped suction groove and the second fluid inlet of the through-hole member, the material of the fluid filter comprises at least one of Teflon and polypropylene, and the thickness of the fluid filter is 0.3 µm or more and 0.5 µm or less. Claim 6 A liquid suction device according to claim 4, wherein a ring-shaped separator is positioned between the through-hole member and the ring-shaped suction groove, and a fluid filter and a transparent film are alternately formed on the separator, the fluid filter filters foreign substances from the fluid and is positioned between the first fluid inlet and the second fluid inlet, and the transparent film is positioned between the first internal observation hole and the second internal observation hole. Claim 7 A liquid suction device according to claim 1, wherein the radius of the first suction through-hole formed on the outer surface of the ring-shaped suction groove is greater than or equal to the radius of the first suction through-hole formed on the inner surface of the ring-shaped suction groove, the radius of the second suction through-hole formed on the outer surface of the through-hole member is greater than or equal to the radius of the second suction through-hole formed on the inner surface of the through-hole member, and the radius of the first suction through-hole formed on the outer surface of the ring-shaped suction groove is the same as the radius of the second suction through-hole formed on the inner surface of the through-hole member. Claim 8 A liquid suction device according to claim 1, wherein the first suction through hole is formed at an angle with respect to the radial direction of the ring-shaped suction groove, and the second suction through hole is formed at an angle with respect to the radial direction of the through hole member, so that liquid is mixed inside the liquid suction device.

Images