Method and device for leak point detection

Abstract

A method for detecting a leak point (24) on a fluid line (18), the method comprises: emitting ultrasonic waves (25) into the fluid line (18) using an ultrasonic emitter (20) while maintaining the fluid line (18) in a state where the fluid line (18) is substantially filled with air at ambient pressure; and using an ultrasonic detector (22) to detect that the emitted ultrasonic waves (25) are exiting the fluid line (18) at a leak point (24) on the fluid line (18).

Description

Technology Field

[0001] The present invention relates to the detection of leak points in vacuum pumping and / or reduction systems or other types of industrial equipment. Background Technology

[0002] Vacuum pumping and / or reduction systems are used in various and different technical fields, such as semiconductor manufacturing. Generally, in the above systems, vacuum pumping equipment is used to pump process gases (e.g., gases from industrial processing) out of a specific location, and reduction equipment is used to reduce (e.g., destroy or dispose of) undesirable substances (e.g., exhaust gases) generated.

[0003] A vacuum pumping and / or reduction system includes fluid lines for transporting various fluids through the system. Generally, it is desirable to detect whether there are leak points in the fluid lines so that the leak points can be repaired.

[0004] In a first aspect of the present invention, a method for detecting a leak point on a fluid line is provided, the method comprising: emitting ultrasonic waves into a fluid line using an ultrasonic emitter while maintaining the fluid line in a state where the fluid line is substantially filled with air at ambient pressure; and using an ultrasonic detector to detect that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line.

[0005] The method may further include moving the ultrasonic detector along the fluid line until the ultrasonic detector detects the emitted ultrasonic waves.

[0006] The method may further include providing an indication by an ultrasonic detector that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line.

[0007] The method may further include determining the location of the leak point based on detection.

[0008] This method may further include repairing the fluid line to eliminate the leak point.

[0009] The ultrasonic emitter can also be embedded in the fluid line.

[0010] The ultrasonic emitter may be fixedly attached to the fluid line or detachably attached to the fluid line.

[0011] The ultrasonic detector may be a separate unit from the ultrasonic emitter and fluid line.

[0012] The above state may be a state in which there is no bulk movement of fluid through the fluid line in a specific direction.

[0013] The fluid line may include two pipe sections connected to each other at a junction. The point where the emitted ultrasound exits the fluid line may be at the junction between the two pipe sections.

[0014] The fluid line may be a fluid line for transporting cooling water; a fluid line for transporting nitrogen gas; or a fluid line for transporting clean dry air.

[0015] The fluid line may be a fluid line of a vacuum pumping and / or reduction system.

[0016] In a second aspect of the present invention, a method for detecting a leak point on a fluid line configured to transport a specific fluid is provided, the method comprising: emitting ultrasonic waves into a fluid line using an ultrasonic emitter while maintaining a fluid line in a state where the specific fluid is not being transported through the fluid line; and using an ultrasonic detector to detect that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line.

[0017] In a third aspect of the present invention, a method for detecting a leak point on a fluid line is provided, the method comprising: emitting ultrasonic waves into a fluid line using an ultrasonic emitter while maintaining a fluid line in a state where there is no bulk movement of fluid through the fluid line in a specific direction; and using an ultrasonic detector to detect that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line.

[0018] In a fourth aspect of the present invention, a method for detecting a leak point on a fluid line is provided, the method comprising: emitting ultrasonic waves into a fluid line using an ultrasonic emitter while maintaining a fluid line in a state where no fluid is being transported through the fluid line; and using an ultrasonic detector to detect that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line. Brief explanation of the drawing

[0019] FIG. 1 is a schematic drawing (not in scale) showing a perspective view of a vacuum pumping and / or reduction system. FIG. 2 is a schematic diagram (not in scale) showing a side view of a leak point detection system for detecting leak points within a vacuum pumping and / or reduction system. Figure 3 is a flowchart illustrating the various steps of a method for detecting a leak point using a leak point detection system. Specific details for implementing the invention

[0020] FIG. 1 is a schematic drawing (not in scale) showing a perspective view of one embodiment of a vacuum pumping and / or reduction system (10).

[0021] The vacuum pumping and / or reduction system (10) comprises a frame (12), a vacuum pumping and / or reduction device (14), an input line (16), an output line (18), and an ultrasonic emitter (20). The vacuum pumping and / or reduction system (10) also comprises other elements (e.g., electrical wiring, sensors, electronic controllers, other lines, other vacuum pumping and / or reduction devices), but it will be understood that these are not illustrated for brevity. The vacuum pumping and / or reduction system (10) can be used to perform vacuum pumping and / or reduction in facilities such as semiconductor manufacturing facilities.

[0022] The vacuum pumping and / or reduction system (10) may be an integrated system. The term “integrated system” may be used to refer to two or more modules being integrated together into a common system, and the modules are selected from a group of modules comprising a module including a vacuum pumping device, a module including a reduction device, and a module including an electronic controller for controlling the vacuum pumping and / or reduction device.

[0023] The frame (12) defines the space in which the vacuum pumping and / or reduction device (14) is placed. An input line (16) extends into the space defined by the frame (12) and is fluidly connected to the inlet of the vacuum pumping and / or reduction device (14). The input line (16) is configured to supply fluid to the vacuum pumping and / or reduction device (14) through the inlet. An output line (18) extends into the space defined by the frame (12) and is fluidly connected to the outlet of the vacuum pumping and / or reduction device (14). The output line (18) is configured to receive fluid from the vacuum pumping and / or reduction device (14) through the outlet. The input and output lines (16, 18) are each formed by one or more pipe sections. In this embodiment, the input and output lines (16, 18) are cooling water lines, that is, lines for transporting water through the vacuum pumping and / or reduction device (14) to cool the vacuum pumping and / or reduction device (14).

[0024] An ultrasonic emitter (20) is attached to an output line (18) and can be used as part of a leak point detection system. This will now be explained with reference to FIGS. 2 and FIGS. 3.

[0025] FIG. 2 is a schematic drawing (not in scale) showing a side view of one embodiment of a leak point detection system (100).

[0026] A leak point detection system (100) includes an output line (18), an ultrasonic emitter (20), and an ultrasonic detector (22). The output line (18) has a leak point (24) where fluid transported through the output line (18) is to leak. In this embodiment, the output line (18) includes two pipe sections connected to each other at a joint, and the leak point (24) is located at the joint between the two pipe sections.

[0027] The ultrasonic emitter (20) is configured to emit ultrasonic waves (25) at an ultrasonic frequency of, for example, 40 kHz. The ultrasonic emitter (20) is attached to the output line (18) so that it can emit ultrasonic waves (25) into the output line (18). In this embodiment, the ultrasonic emitter (20) is embedded in the output line (18). More specifically, the output line (18) has an opening (or port) in the wall, and the ultrasonic emitter (20) is attached to the output line (18) to be received in the opening / port (e.g., attached via a flange around the opening / port). The ultrasonic emitter (20) may be fixedly attached to the output line (18) or detachably attached to the output line (18).

[0028] The ultrasonic detector (22) is configured to detect the presence of ultrasonic waves (25) within a detection range, for example, within 5 cm. In particular, the ultrasonic detector (22) is configured to detect ultrasonic waves (25) emitted by the ultrasonic emitter (20). The ultrasonic detector (22) is also configured to provide an indication that the ultrasonic waves (25) have been detected within the detection range in response to detecting the presence of ultrasonic waves (25) within the detection range. For example, the ultrasonic detector (22) may include a display, and the indication may be a visual indication on the display. Alternatively, the indication may be an audible indication, such as an alarm. In this embodiment, the ultrasonic detector (22) is not attached to the output line (18) or the ultrasonic emitter (20) and represents a separate unit from the output line (18) and the ultrasonic emitter (20).

[0029] The ultrasonic emitter (20) and ultrasonic detector (22) can be used to detect a leak point (24) within the output line (18). This will now be explained with reference to FIG. 3.

[0030] FIG. 3 is a flowchart showing various steps of a method for detecting a leak using the leak point detection system (100) shown in FIG. 2.

[0031] It will be understood that some of the processing steps illustrated in the flowchart of FIG. 3 and described below may be omitted or may be executed in a different order than that presented below and illustrated in FIG. 3. Furthermore, for convenience and ease of understanding, the processing steps have been depicted as separate, time-sequential steps; nevertheless, some of the processing steps may actually be executed simultaneously or at least overlapped in time to some extent.

[0032] In step S2, the user maintains the output line (18) in a state where it is filled with air at substantially ambient pressure, that is, air at the same pressure as the environment in which the output line (18) is placed. For example, if the output line (18) is placed in an atmospheric pressure environment, the air may be at atmospheric pressure. In this state, the output line (18) is not being used to transport fluid. That is, there is no bulk movement of fluid through the output line (18) in any direction. Therefore, in this state, the output line (18) is not transporting the fluid configured to be transported.

[0033] In step S4, while maintaining the output line (18) in the state described above for step S2, the user operates the ultrasonic emitter (20) to emit ultrasonic waves (25) into the output line (18). The emitted ultrasonic waves (25) travel through the air within the output line (18) and throughout the entire interior of the output line (18). In this way, the emitted ultrasonic waves (25) travel from the ultrasonic emitter (20) to the leak point (24) and exit the output line (18) from the leak point (24). Thus, the ultrasonic waves (25) exit the output line (18) from the leak point (24) by the operation of the ultrasonic emitter (20) to emit ultrasonic waves (25) into the output line (18).

[0034] In step S6, the user moves the ultrasonic detector (22) along the output line (18) until the ultrasonic detector (22) detects the presence of emitted ultrasonic waves within its detection range. More specifically, the ultrasonic detector (22) is continuously moved by the user along the outside of the output line (18) adjacent to the output line (18). When the ultrasonic detector (22) reaches a location where the leak point (24) is within the detection range of the ultrasonic detector (22), the ultrasonic detector (22) detects emitted ultrasonic waves exiting the output line (18) from the leak point (24).

[0035] In step S8, in response to the detection of the presence of emitted ultrasound (25) within the detection range of the ultrasonic detector (22), the ultrasonic detector (22) provides an indication that the emitted ultrasound (25) has been detected within the detection range. For example, the indication may be a visual indication displayed on the display of the ultrasonic detector (22). Alternatively, the indication may be an audible indication, such as an alarm.

[0036] In step S10, the user determines that a leak point (24) exists on the output line (18) based on the indication. Additionally, the user determines that the location on the output line (18) adjacent to the ultrasonic detector (22) at the time when the indication is provided by the ultrasonic detector (22) is the location of the leak point (24). Afterward, the user may repair the output line (18) to remove the leak point (24).

[0037] Accordingly, a system and method for detecting leakage in a vacuum pumping and / or reduction system are provided.

[0038] Advantageously, the aforementioned systems and methods tend to enable the detection of leaks in fluid lines without transferring fluid through the fluid lines. This tends to mean that the leak point can be detected without actual leakage of the fluid being transferred, which is particularly useful when the fluid being transferred through the lines is a hazardous substance (e.g., corrosive or toxic) or is under high pressure or high temperature. For instance, leaks of nitrogen gas tend to cause oxygen depletion in the adjacent environment around the fluid lines, which can be dangerous to users. Preventing nitrogen gas leaks tends to avoid this risk.

[0039] In addition, the ability to detect leaks without transporting fluid through fluid lines allows leak inspection to be performed relatively easily and quickly, which tends to reduce the time required to set up vacuum pumping and / or reduction systems for use.

[0040] Advantageously, because leaks tend to occur more frequently at joints between pipe sections, the system and method described above tend to be particularly useful when used to detect leaks in large systems (e.g., integrated vacuum pumping and / or reduction systems) that have many joints between pipe sections.

[0041] In the embodiments described above, the leak point detection system is used to detect leaks in the coolant output line. However, in other embodiments, the leak point detection system is used with other types of fluid lines, such as a process gas input line, a process gas output line, a fluid line for transporting clean dry air, and a fluid line for transporting nitrogen purge gas.

[0042] In the embodiments described above, the leak point detection system is used to detect leaks in lines fluidically connected to the vacuum pumping and / or reduction device. However, in other embodiments, the leak point detection system is used to detect leaks in fluid lines not fluidly connected to the vacuum pumping and / or reduction device.

[0043] In the embodiments described above, the leak point is located at the junction between two pipe sections. However, in other embodiments, the leak point is located at a different location in the fluid line, that is, a location other than the junction between two pipe sections. Generally, it will be understood that the leak point may be at any location on the fluid line.

[0044] In the embodiments described above, the ultrasonic detector moves continuously along the fluid line to detect leak points. However, in other embodiments, the ultrasonic detector does not move continuously along the fluid line, but instead is sequentially placed at various different locations on the fluid line to detect whether there is a leak point at each location.

[0045] In the embodiments described above, the leak detection system is used to detect leaks in the fluid lines of a vacuum pumping and / or reduction system. However, it will be understood that the leak detection system may also be used with fluid lines of other types of industrial systems. Explanation of the symbols

[0046] 10: Vacuum pumping and / or reduction system 12: Frame 14: Vacuum pumping and / or reduction device 16: Input line 18: Output line 20: Ultrasonic emitter 22: Ultrasonic detector 24: Leakage Point 25: Ultrasound 100: Leak Point Detection System

Claims

Claim 1 A method for detecting a leak point on a fluid line of a vacuum pumping or reduction system, comprising: emitting ultrasonic waves into a fluid line using an ultrasonic emitter while maintaining the fluid line in a state where the fluid line is substantially filled with air at ambient pressure; and using an ultrasonic detector to detect that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line, wherein the ultrasonic emitter is embedded in the fluid line and the ultrasonic emitter is fixedly attached to the fluid line or detachably attached to the fluid line. Claim 2 A leak point detection method according to claim 1, further comprising moving the ultrasonic detector along a fluid line until the ultrasonic detector detects the emitted ultrasonic. Claim 3 A leak point detection method according to claim 1 or 2, further comprising providing an indication by the ultrasonic detector that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line. Claim 4 A leak point detection method according to claim 1 or 2, further comprising determining the location of the leak point based on the detection. Claim 5 A leak point detection method according to claim 1 or 2, further comprising repairing a fluid line to eliminate the leak point. Claim 6 delete Claim 7 delete Claim 8 A leak point detection method according to claim 1 or 2, wherein the ultrasonic detector is a unit separate from the ultrasonic emitter and the fluid line. Claim 9 A leak point detection method according to claim 1 or 2, wherein the state is a state in which there is no bulk movement of fluid through a fluid line in a specific direction. Claim 10 A leak point detection method according to claim 1 or 2, wherein the fluid line comprises two pipe sections connected to each other at a joint, and the point where the emitted ultrasound exits the fluid line is at the joint between the two pipe sections. Claim 11 A leak point detection method according to claim 1 or 2, wherein the fluid line is any one of a fluid line for transporting cooling water; a fluid line for transporting nitrogen gas; or a fluid line for transporting clean dry air. Claim 12 delete Claim 13 A method for detecting a leak point on a fluid line of a vacuum pumping or reduction system, wherein the fluid line is configured to transport a specific fluid, the leak point detection method comprises: emitting ultrasonic waves into the fluid line using an ultrasonic emitter while maintaining the fluid line in a state where the specific fluid is not being transported through the fluid line; and using an ultrasonic detector to detect that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line, wherein the ultrasonic emitter is embedded in the fluid line and the ultrasonic emitter is fixedly attached to the fluid line or detachably attached to the fluid line. Claim 14 A method for detecting a leak point on a fluid line of a vacuum pumping or reduction system, comprising: emitting ultrasonic waves into a fluid line using an ultrasonic emitter while maintaining the fluid line in a state where there is no bulk movement of the fluid through the fluid line in a specific direction; and using an ultrasonic detector to detect that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line, wherein the ultrasonic emitter is embedded in the fluid line and the ultrasonic emitter is fixedly attached to the fluid line or detachably attached to the fluid line. Claim 15 A method for detecting a leak point on a fluid line of a vacuum pumping or reduction system, comprising: emitting ultrasonic waves into a fluid line using an ultrasonic emitter while maintaining the fluid line in a state where no fluid is being transported through the fluid line; and using an ultrasonic detector to detect that the emitted ultrasonic waves are exiting the fluid line at a leak point on the fluid line, wherein the ultrasonic emitter is embedded in the fluid line and the ultrasonic emitter is fixedly attached to the fluid line or detachably attached to the fluid line.

Images