Apparatus and method for capturing carbon dioxide
Patent Information
- Application Number
- KR1020230131755
- Authority / Receiving Office
- KR · KR
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2023-10-04
- Publication Date
- 2026-10-13
- Estimated Expiration
- 2043-10-04
Smart Images

Figure 112023108680923-PAT00001_ABST
Abstract
Description
Technology Field
[0001] The present invention relates to a carbon dioxide capture device and method, and more particularly to a device and method capable of separating carbon dioxide from a mixed gas containing carbon dioxide by an electrochemical method and compressing and liquefying it. Background Technology
[0002] With the frequency of extreme weather events increasing due to global warming, the world is deeply considering efforts to reduce carbon dioxide emissions and implementing related policies following the Paris Agreement.
[0003] Conventional carbon capture technology involves capturing CO2 from flue gases emitted from sources using fossil fuels or industrial facilities. Depending on the capture method, it is primarily centered around post-combustion capture, pre-combustion capture, and oxy-fuel combustion technologies.
[0004] In particular, post-combustion capture technology is a technology that separates and captures carbon dioxide from flue gas containing a mixture of various gas compositions, and such post-combustion capture technology can be broadly divided into wet capture methods and dry capture methods.
[0005] The wet capture method has the disadvantage of having a problem with leakage of amine, which is a liquid aqueous solution, and significant losses in terms of cost and efficiency regarding CO2 recovery.
[0006] The dry capture method has a low risk of leakage because it fixes the amine to a solid support, but it has the disadvantage of a low removal rate because the reaction with CO2 is slow compared to the wet capture method. The problem to be solved
[0007] Based on the technical background described above, the present invention provides an apparatus and method capable of separating carbon dioxide from a mixed gas containing carbon dioxide by an electrochemical method and compressing and liquefying it. means of solving the problem
[0008] A carbon dioxide capture device according to one embodiment of the present invention may include a mixed gas supply unit that supplies a mixed gas containing carbon dioxide, an electrochemical cell that separates carbon dioxide from the mixed gas, and a pressure vessel in which the separated carbon dioxide is stored and compressed.
[0009] A carbon dioxide capture device according to one embodiment of the present invention may include a heating unit for heating a mixed gas and a humidifying unit for humidifying the mixed gas.
[0010] A carbon dioxide capture device according to one embodiment of the present invention may further include a blower that flows a mixed gas toward an electrochemical cell.
[0011] An electrochemical cell according to one embodiment of the present invention may include a cathode electrode in which carbon dioxide contained in a mixed gas is ionized, an anode electrode spaced apart from the cathode electrode and in which carbon dioxide is generated by the transfer of ions from the cathode electrode, and an electrolyte membrane disposed between the cathode electrode and the anode electrode through which ions pass.
[0012] An electrolyte membrane according to one embodiment of the present invention may be an anion exchange membrane.
[0013] A carbon dioxide capture device according to one embodiment of the present invention may include a mixed gas flow line installed between a mixed gas supply unit and an electrochemical cell, a generated gas flow line installed in the electrochemical cell through which a generated gas, separated from the mixed gas by carbon dioxide, flows, and a carbon dioxide flow line installed between the electrochemical cell and a pressure vessel.
[0014] A carbon dioxide capture device according to one embodiment of the present invention may further include a first shut-off valve installed in a mixed gas flow line and disposed between a mixed gas supply unit and a heating unit, a second shut-off valve installed in a generated gas flow line, and a generated gas recovery line installed between the first shut-off valve and the second shut-off valve.
[0015] A carbon dioxide capture device according to one embodiment of the present invention may further include a concentration sensor installed in a generated gas flow line to measure the carbon dioxide concentration of a generated gas flowing along the generated gas flow line; and a control unit that selectively drives a first shut-off valve or a second shut-off valve based on the measurement value of the concentration sensor.
[0016] A carbon dioxide capture method according to one embodiment of the present invention may include a supply step of supplying a mixed gas containing carbon dioxide, a separation step of separating carbon dioxide from the mixed gas, and a compression step of storing and compressing the separated carbon dioxide.
[0017] A carbon dioxide capture method according to one embodiment of the present invention may further include a heating and humidification step of heating and humidifying a mixed gas.
[0018] A carbon dioxide capture method according to one embodiment of the present invention may further include a product gas recovery step for recovering a product gas in which carbon dioxide is separated from a mixed gas.
[0019] In a generation gas recovery step according to one embodiment of the present invention, when the carbon dioxide concentration of the generation gas is less than a preset value, the carbon dioxide remaining in the generation gas can be separated again. Effects of the invention
[0020] As described above, the carbon dioxide capture device and method according to one embodiment of the present invention can separate trace amounts of carbon dioxide, such as 400 ppm, contained in a mixed gas through an electrochemical cell driven by an electrochemical method, thereby resolving the problems of existing wet and dry capture methods and being advantageous in terms of cost and capture efficiency.
[0021] In addition, carbon dioxide separated in the electrochemical cell is stored in a pressure vessel and liquefied by compressing it to a constant pressure, making it easy to separate trace amounts of gas mixed with carbon dioxide. Brief explanation of the drawing
[0022] FIG. 1 is a diagram showing the configuration of a carbon dioxide capture device according to a first embodiment of the present invention. Figure 2 is a diagram of the electrochemical cell shown in Figure 1. FIG. 3 is a configuration diagram of a carbon dioxide capture device according to a second embodiment of the present invention. FIG. 4 is a configuration diagram of a carbon dioxide capture device according to a third embodiment of the present invention. FIG. 5 is a flowchart of a carbon dioxide capture method according to a first embodiment of the present invention. Figure 6a is a configuration diagram showing the supply step and heating / humidifying step illustrated in Figure 5. Figure 6b is a schematic diagram showing the separation step illustrated in Figure 5. Fig. 6c is a configuration diagram showing the compression step illustrated in Fig. 5. FIG. 7 is a flowchart of a carbon dioxide capture method according to a second embodiment of the present invention. FIG. 8a is a configuration diagram showing the supply step and heating / humidifying step illustrated in FIG. 7. FIG. 8b is a schematic diagram showing the separation step illustrated in FIG. 7. FIG. 9a is a schematic diagram showing the generated gas recovery step illustrated in FIG. 7. FIG. 9b is a configuration diagram showing the compression step illustrated in FIG. 7. FIG. 10 is a flowchart of a carbon dioxide capture method according to a third embodiment of the present invention. FIG. 11a is a configuration diagram showing the supply step and heating / humidifying step illustrated in FIG. 10. FIG. 11b is a schematic diagram showing the mixed gas recovery step illustrated in FIG. 10. FIG. 12a is a schematic diagram showing the separation step illustrated in FIG. 10. FIG. 12b is a schematic diagram showing the generated gas recovery step illustrated in FIG. 10. FIG. 12c is a configuration diagram showing the compression step illustrated in FIG. 10. Specific details for implementing the invention
[0023] The present invention is capable of various modifications and may have various embodiments, and specific embodiments are illustrated and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, and it should be understood that it includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention.
[0024] The terms used in this invention are used merely to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this invention, terms such as "comprising" or "having" are intended to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.
[0025] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Note that in the accompanying drawings, identical components are indicated by the same reference numerals whenever possible. Furthermore, detailed descriptions of known functions and configurations that may obscure the essence of the present invention will be omitted. For the same reason, some components in the accompanying drawings may be exaggerated, omitted, or schematically depicted.
[0026] Hereinafter, a carbon dioxide capture device according to the first embodiment of the present invention will be described.
[0027] FIG. 1 is a diagram showing the configuration of a carbon dioxide capture device according to a first embodiment of the present invention.
[0028] Referring to FIG. 1, a carbon dioxide capture device (100, hereinafter referred to as the ‘capture device’) may include a mixed gas supply unit (110), a heating unit (120), a humidification unit (130), an electrochemical cell (140), and a pressure vessel (150).
[0029] The mixed gas supply unit (110) is configured to supply a mixed gas containing carbon dioxide and oxygen, such as exhaust gas or air, and may include, for example, a tank in which the mixed gas is stored or an internal combustion engine from which exhaust gas is discharged.
[0030] The heating unit (120) may heat the mixed gas using a known heating device, such as a heater or a heat exchanger, for example, and the humidifying unit (130) may humidify the mixed gas using a steam generator that generates steam by introducing humidifying water, for example.
[0031] Here, the humidifying water may be water or any known fluid that can be converted into steam when heat is applied.
[0032] The electrochemical cell (140) can be used, for example, as a unit cell or a stack of multiple unit cells arranged in parallel or series to separate carbon dioxide from a mixed gas.
[0033] The pressure vessel (150) may be a pressure tank, such as a pressure vessel, for example, in which carbon dioxide separated from the electrochemical cell (140) can be stored and compressed.
[0034] Figure 2 is a diagram of the electrochemical cell shown in Figure 1.
[0035] Referring to FIG. 2, the electrochemical cell (140) may include a cathode electrode (141), an anode electrode (142), an electrolyte membrane (143), a gas diffusion layer (144), a cathode separator (145), an anode separator (146), a cathode end plate (147), and an anode end plate (148).
[0036] The cathode electrode (141) and the anode electrode (142) are spaced apart to face each other and are electrically connected to a power source (10) so that an oxidation-reduction reaction can occur.
[0037] The electrolyte membrane (143) may be, for example, a liquid electrolyte or an anion exchange membrane and may be placed between the cathode electrode (141) and the anode electrode (142).
[0038] That is, when power is applied to the cathode electrode (141) and the anode electrode (142), carbon dioxide in the mixed gas flowing into the cathode electrode (141) undergoes an electrochemical reaction to produce electrons (e - ) obtain bicarbonate ions (HCO3 - ), carbonate ions (CO3 2- It is ionized and separated into ) and a product gas (e.g., N2+O2+H2O) is generated from the separation of carbon dioxide from the mixed gas.
[0039] Bicarbonate ions (HCO3) - ), carbonate ions (CO3 2- ) passes through the electrolyte membrane and is transferred to the anode electrode (142), and electrons (e) by electrochemical reaction - Carbon dioxide is produced by losing ), and electrons (e - ) moves from the anode electrode (142) to the cathode electrode (141).
[0040] A gas diffusion layer (144) can be placed between the anode separator (146) and the anode electrode (142), and between the cathode separator (145) and the cathode electrode (141).
[0041] The anode separator (146) and cathode separator (145) have multiple flow paths formed therein to smoothly diffuse the mixed gas toward the electrolyte membrane (143).
[0042] The cathode end plate (147) is positioned opposite the cathode separator plate (145), and a cathode-side inlet port (147a) is formed so that a mixed gas can be introduced, and a cathode-side outlet port (147b) is formed so that a product gas in which carbon dioxide has been separated from the mixed gas can be discharged.
[0043] The anode end plate (148) is positioned opposite the anode separator plate (146), and an anode-side outflow port (148b) is formed so that carbon dioxide separated from the mixed gas can be discharged.
[0044] Here, the anode-side inlet port (148a) formed in the anode end plate (148) can be kept closed since there is no inflow of gas.
[0045] Referring to FIGS. 1 and 2, the collection device (100) may further include a mixed gas flow line (171), a generated gas flow line (172), and a carbon dioxide flow line (173).
[0046] A mixed gas flow line (171) is installed between the mixed gas supply unit (110) and the cathode-side inlet port (147a) of the electrochemical cell (140) to connect the mixed gas supply unit (110) and the electrochemical cell (140), and a heating unit (120) and a humidification unit (130) can be installed sequentially along the flow direction of the mixed gas.
[0047] Here, since the heating and humidification of the mixed gas are not related in order, the arrangement of the heating section (120) and the humidification section (130) can be determined according to the design conditions of the collection device (100), and furthermore, the humidification section (130) and the heating section (120) may not be applied according to the design conditions of the collection device (100).
[0048] A generated gas flow line (172) is installed at the cathode-side outlet port (147b) of the electrochemical cell (140), and a carbon dioxide flow line (173) is installed between the anode-side outlet port (148b) of the electrochemical cell (140) and the pressure vessel (150) to connect the electrochemical cell (140) and the pressure vessel (150).
[0049] The collection device (100) may further include a concentration sensor and a control unit.
[0050] A concentration sensor is installed in the mixed gas flow line (171) to measure the carbon dioxide concentration of the mixed gas flowing into the electrochemical cell (140).
[0051] The control unit can control the operation of the components forming the collection device (100), and in particular, can feed back and control the power supplied to the electrochemical cell (140), the flow rate of the mixed gas, temperature, humidity, etc., based on the measurement value of the concentration sensor.
[0052] Hereinafter, a collection device according to the second embodiment of the present invention will be described.
[0053] FIG. 3 is a configuration diagram of a collection device according to a second embodiment of the present invention.
[0054] Referring to FIG. 3, the collection device (100') may further include a blower (160), a first shut-off valve (181), a second shut-off valve (182), and a generated gas recovery line (174) in the first embodiment described above.
[0055] The blower unit (160) may be, for example, a fan or a blower, and may be installed in the mixed gas flow line (161) by being positioned between the mixed gas supply unit (110) and the heating unit (120).
[0056] That is, the mixed gas can be flowed more smoothly from the mixed gas supply unit (110) to the electrochemical cell (140) through the blower unit (160).
[0057] The first shut-off valve (181) and the second shut-off valve (182) may be used as solenoid valves, for example, and can be opened and closed automatically by the control unit.
[0058] The first shut-off valve (181) is positioned between the mixed gas supply unit (110) and the heating unit (120) and installed in the mixed gas flow line (171), and the second shut-off valve (182) can be installed in the generated gas flow line (172).
[0059] The generated gas recovery line (174) is installed between the first shut-off valve (181) and the second shut-off valve (182), and by connecting the first shut-off valve (181) and the second shut-off valve (182), the generated gas flowing out of the electrochemical cell (140) can flow into the mixed gas flow line (171).
[0060] The concentration sensor is also installed in the generated gas flow line (172) to measure the carbon dioxide concentration of the generated gas flowing along the generated gas flow line (172).
[0061] That is, the control unit can drive the first and second opening / closing valves (181, 182) based on the measurement value of the concentration sensor to discharge the generated gas to the outside, or send the generated gas to the mixed gas flow line (171) to re-separate the carbon dioxide remaining in the generated gas.
[0062] Hereinafter, a collection device according to the third embodiment of the present invention will be described.
[0063] FIG. 4 is a configuration diagram of a collection device according to a third embodiment of the present invention.
[0064] Referring to FIG. 4, the collection device (100) may further include a heat exchanger (190), a third shut-off valve (183), a mixed gas recovery line (175), a temperature sensor, and a humidity sensor in the second embodiment described above.
[0065] A heat exchanger (190) is positioned in front of the heating section (120) along the flow direction of the mixed gas and is installed in the mixed gas flow line (171) and the generated gas flow line (172), and the mixed gas and the generated gas can pass through the heat exchanger (190) to perform mutual heat exchange.
[0066] Since the generated gas is in a high temperature state when discharged from the electrochemical cell (140), the mixed gas can flow to the heating section (120) in a preheated state by absorbing the heat of the generated gas in the heat exchanger (190), so that it can be heated more easily and the energy consumed for heating can be reduced.
[0067] The third shut-off valve (183) is identical to the first shut-off valve (181) and is installed in the mixed gas flow line (171) by being positioned between the humidification unit (130) and the electrochemical cell (140), and the mixed gas recovery line (175) is installed between the first shut-off valve (181) and the third shut-off valve (183) to connect the first shut-off valve (181) and the third shut-off valve (183).
[0068] A temperature sensor is installed in the mixed gas flow line (171) to measure the temperature of the mixed gas flowing through the mixed gas flow line (171), and a humidity sensor is installed in the mixed gas flow line (171) to measure the humidity of the mixed gas flowing through the mixed gas flow line (171).
[0069] That is, the control unit can drive the first and third shut-off valves (181, 183) based on the measurements of the temperature sensor and humidity sensor to send the mixed gas to the electrochemical cell (140) or send it back to the front of the heat exchanger (190) to reheat and rehumidify the mixed gas.
[0070] Hereinafter, a carbon dioxide capture method according to the first embodiment of the present invention will be described.
[0071] FIG. 5 is a flowchart of a carbon dioxide capture method according to a first embodiment of the present invention, FIG. 6a is a configuration diagram showing the supply step and the heating and humidification step illustrated in FIG. 5, FIG. 6b is a configuration diagram showing the separation step illustrated in FIG. 5, and FIG. 6c is a configuration diagram showing the compression step illustrated in FIG. 5.
[0072] Referring to FIGS. 5 to 6c, the carbon dioxide capture method (S100, hereinafter referred to as the 'capture method') may include a supply step (S110), a heating and humidification step (S120), a separation step (S130), and a compression step (S140).
[0073] In the supply step (S110), the mixed gas is supplied by flowing along the mixed gas flow line (171) from the mixed gas supply unit (110), and in the heating and humidification step (S120), the mixed gas can be heated and humidified as it passes through the heating unit (120) and the humidification unit (130).
[0074] In the separation step (S130), the mixed gas is introduced into the electrochemical cell (140) and carbon dioxide is separated by an electrochemical reaction, the separated carbon dioxide flows along the carbon dioxide flow line (173) to the pressure vessel (150), and the generated gas can flow out along the generated gas flow line (172).
[0075] In the compression step (S140), carbon dioxide is stored in a pressure vessel (150), and the electrochemical cell (140) is continuously operated to compress the carbon dioxide to a pressure above a certain level and liquefy it, thereby allowing trace amounts of gas contained in the carbon dioxide, including oxygen, to be easily separated.
[0076] Hereinafter, a collection method according to a second embodiment of the present invention will be described.
[0077] FIG. 7 is a flowchart of a collection method according to a second embodiment of the present invention, FIG. 8a is a configuration diagram showing the supply step and the heating and humidification step shown in FIG. 7, FIG. 8b is a configuration diagram showing the separation step shown in FIG. 7, FIG. 9a is a configuration diagram showing the generated gas recovery step shown in FIG. 7, and FIG. 9a is a configuration diagram showing the compression step shown in FIG. 7.
[0078] Referring to FIGS. 7 to 9b, the collection method (S100') may further include a generated gas recovery step (S150) in the first embodiment described above.
[0079] The supply step, heating and humidification step, separation step, and compression step illustrated in FIGS. 8a, 8b, and 9b overlap with the first embodiment described above, so a detailed description is omitted.
[0080] The generated gas recovery step (S150) can recover the generated gas flowing out of the electrochemical cell (140) after the separation step (S130) and re-separate the carbon dioxide remaining in the generated gas.
[0081] That is, as illustrated in FIG. 8b, the control unit can drive the second shut-off valve (182) to discharge the generated gas to the outside along the generated gas flow line (172) when the carbon dioxide concentration of the generated gas is less than a preset value based on the measurement value of the concentration sensor.
[0082] Additionally, as illustrated in FIG. 9a, when the carbon dioxide concentration of the generated gas is greater than or equal to a preset value, the control unit drives the first shut-off valve (181) and the second shut-off valve (182) to send the generated gas along the generated gas recovery line (174) to the mixed gas flow line (171) to re-separate the carbon dioxide and proceed with the compression step.
[0083] Hereinafter, a collection method according to the third embodiment of the present invention will be described.
[0084] FIG. 10 is a flowchart of a collection method according to a third embodiment of the present invention, FIG. 11a is a configuration diagram showing the supply step and the heating and humidification step illustrated in FIG. 10, FIG. 11b is a configuration diagram showing the mixed gas recovery step illustrated in FIG. 10, FIG. 12a is a configuration diagram showing the separation step illustrated in FIG. 10, FIG. 12b is a configuration diagram showing the generated gas recovery step illustrated in FIG. 10, and FIG. 12c is a configuration diagram showing the compression step illustrated in FIG. 10.
[0085] Referring to FIGS. 10 to 12c, the collection method (S100) may further include a mixed gas recovery step (S160) in the second embodiment described above.
[0086] The supply step, heating and humidification step, separation step, generated gas recovery step, and compression step illustrated in FIGS. 11a, 12a, 12b, and 12c overlap with the first embodiment described above, so a detailed description is omitted.
[0087] The mixed gas recovery step (S160) can recover the mixed gas that has been heated and humidified after the heating and humidification step (S120) and reheat and rehumidify it.
[0088] That is, as illustrated in FIG. 11a, the control unit can drive the first and third shut-off valves (181, 183) when the temperature and humidity of the mixed gas are above a preset value based on the measurements of the temperature sensor and humidity sensor, thereby sending the mixed gas along the mixed gas flow line (171) to the electrochemical cell (140) to proceed with the separation step (S130).
[0089] Additionally, as shown in FIG. 11b, when the temperature or humidity of the mixed gas is below a preset value, the control unit drives the first and third shut-off valves (181, 183) to send the mixed gas along the mixed gas recovery line (175) to the front of the heat exchanger (190) to reheat and rehumidify the mixed gas, thereby preventing a reduction in carbon dioxide separation efficiency.
[0090] Although an embodiment of the present invention has been described above, those skilled in the art may modify and change the present invention in various ways by adding, changing, deleting, or adding components, etc., without departing from the spirit of the present invention as described in the claims, and such modifications and changes are also to be included within the scope of the rights of the present invention. Explanation of the symbols
[0091] 100,100',100": Carbon dioxide capture device 110: Mixed gas supply unit 120: Heating unit 130: Humidifying unit 140: Electrochemical cell 150: Pressure vessel 160: Blower unit
Claims
Claim 1 A mixed gas supply unit for supplying a mixed gas containing carbon dioxide; an electrochemical cell for separating carbon dioxide from the mixed gas to generate a product gas; and a pressure vessel for storing and compressing the separated carbon dioxide; a mixed gas flow line installed between the mixed gas supply unit and the electrochemical cell through which the mixed gas flows; a product gas flow line installed in the electrochemical cell through which the product gas flows; a first shut-off valve installed in the mixed gas flow line; a second shut-off valve installed in the product gas flow line; a product gas recovery line installed between the first shut-off valve and the second shut-off valve; and a concentration sensor installed in the product gas flow line to measure the carbon dioxide concentration of the product gas flowing along the product gas flow line. A carbon dioxide capture device comprising: a control unit that selectively drives the first shut-off valve or the second shut-off valve based on the measurement value of the concentration sensor; wherein the control unit drives the second shut-off valve when the carbon dioxide concentration is less than a preset value so that the generated gas is discharged to the outside along the generated gas flow line, and wherein the control unit drives the first shut-off valve and the second shut-off valve when the carbon dioxide concentration is greater than or equal to the preset value so that the generated gas flows from the generated gas flow line along the generated gas recovery line to the mixed gas flow line. Claim 2 A carbon dioxide capture device according to claim 1, further comprising: a heating unit for heating the mixed gas; and a humidifying unit for humidifying the mixed gas. Claim 3 A carbon dioxide capture device according to claim 1, further comprising a blower that flows the mixed gas toward the electrochemical cell. Claim 4 A carbon dioxide capture device according to claim 1, wherein the electrochemical cell comprises: a cathode electrode in which the carbon dioxide contained in the mixed gas is ionized; an anode electrode spaced apart from the cathode electrode and in which ions are transferred from the cathode electrode to generate the carbon dioxide; and an electrolyte membrane disposed between the cathode electrode and the anode electrode through which the ions pass. Claim 5 A carbon dioxide capture device according to claim 4, characterized in that the electrolyte membrane is an anion exchange membrane. Claim 6 A carbon dioxide capture device according to claim 1, further comprising a carbon dioxide flow line installed between the electrochemical cell and the pressure vessel. Claim 7 delete Claim 8 delete Claim 9 A carbon dioxide capture method using a carbon dioxide capture device of claim 1, comprising: a supply step of supplying the mixed gas containing the carbon dioxide; a separation step of separating the carbon dioxide from the mixed gas to generate the generated gas; a generated gas recovery step of recovering the generated gas; and a compression step of storing and compressing the separated carbon dioxide; wherein the generated gas recovery step is characterized in that when the carbon dioxide concentration is less than a preset value, the second shut-off valve is actuated so that the generated gas is discharged to the outside along the generated gas flow line, and when the carbon dioxide concentration is greater than or equal to the preset value, the first shut-off valve and the second shut-off valve are actuated so that the generated gas flows from the generated gas flow line along the generated gas recovery line to the mixed gas flow line. Claim 10 A carbon dioxide capture method according to claim 9, further comprising a heating and humidification step of heating and humidifying the mixed gas. Claim 11 delete Claim 12 delete
Citation Information
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