Vacuum chamber actuating system

Abstract

The present invention relates to a vacuum chamber drive system that allows a vacuum pumping system to be separated from a spinning device, and more specifically, is characterized by comprising: a vertical drive unit (100); a spinning device (110) installed on one side of the upper circumference of the drive unit (100) and rotated along a vertical / horizontal plane to steer in an azimuth and elevation direction; a vacuum pumping system (120) installed on one side of the lower portion of the drive unit (100); a magnetic fluid seal (140) installed in the rear center of the spinning device (110) and connected to the vacuum pumping system (120) by a vacuum connection line (130); a vacuum chamber (150) installed in front of the magnetic fluid seal (140); and a weight pile (160) installed on the upper portion of the drive unit (100) to adjust the horizontal position of the spinning device (110) from the drive unit (100).

Description

Technology Field

[0001] The present invention relates to a vacuum chamber driving system, and more specifically, to a vacuum chamber driving system that allows the vacuum pumping system to be separated from the spinning device. Background Technology

[0002] Conventionally, a transmitter (or steering device) containing a vacuum chamber is mounted on a drive unit capable of rotating along vertical and horizontal planes to steer in the azimuth and elevation directions.

[0003] However, in order to maintain the vacuum chamber at an ultra-high vacuum, a vacuum pumping system consisting of rotary pumps, turbo pumps, etc., must be connected to the vacuum chamber, which presents the following problems.

[0004] First, if a vacuum pumping system is included in the spinning device and driven, the weight and volume of the vacuum pumping system are added, increasing the torque required by the drive device and increasing the size of the drive motor, thereby increasing the overall system weight.

[0005] Second, if the vacuum pumping system is mounted on a drive unit and rotated, the operational stability of the vacuum pumping system is reduced.

[0006] Third, vibrations generated in the vacuum pump system can adversely affect the steering performance of the drive unit. Prior art literature

[0007] Republic of Korea Registered Patent Publication No. 10-1576262 The problem to be solved

[0008] The objective of the present invention is to provide a vacuum chamber drive system that can reduce the required torque of the drive unit, improve the stability of the vacuum pumping system, and prevent deterioration of the steering performance of the drive unit by separating the vacuum pumping system from the spinning device. means of solving the problem

[0009] A vacuum chamber driving system according to an embodiment of the present invention for solving the above technical problem comprises: a vertical driving device; a spinning device installed on one side of the upper circumference of the driving device and rotated along a vertical / horizontal plane to steer in the azimuth and elevation directions; a vacuum pumping system installed on one side of the lower part of the driving device; a magnetic fluid seal installed in the rear center of the spinning device and connected to the vacuum pumping system via a vacuum connection line; a vacuum chamber installed in front of the magnetic fluid seal; and a weight pile installed on the upper part of the driving device to adjust the horizontal level of the spinning device from the driving device.

[0010] It is characterized by further including an elevation motor assembly installed in the above-mentioned radiation device to vertically rotate the radiation device in an elevation direction from the above-mentioned driving device.

[0011] The above-described elevation motor assembly is characterized by comprising: a motor installed around the perimeter of the vacuum chamber to vertically rotate the radiation device in an elevation direction; a brake installed around the rear perimeter of the motor to stop the vertical rotation of the radiation device; and a first encoder installed around the front perimeter of the motor to control the operation of the elevation motor assembly.

[0012] The above-mentioned weight pile is characterized by having a second encoder installed that is electrically connected to the magnetic fluid seal through a vacuum connection line.

[0013] The above weight pile is characterized by being installed on the other side of the upper perimeter of the driving device so as to face the radiation device with the driving device in between.

[0014] It is characterized by further including an azimuth motor assembly installed at the lower part of the above-mentioned driving device to horizontally rotate the above-mentioned radiation device in the azimuth direction by the above-mentioned driving device.

[0015] The above azimuth motor assembly is characterized in that its upper portion is installed at the center of the lower portion of the drive device, and its lower portion is installed on the upper portion of the support.

[0016] The above vacuum pumping system is characterized by being installed on one side of the azimuth motor assembly with respect to one side of the lower portion of the drive device.

[0017] In addition, a vacuum chamber driving system according to another embodiment of the present invention comprises: a vertical driving device; a spinning device installed on one side of the upper circumference of the driving device and rotated along a vertical / horizontal plane to steer in an azimuth and elevation direction; a vacuum pumping system installed on one side of the lower part of the driving device; a magnetic fluid seal installed in the rear center of the spinning device and connected to the vacuum pumping system via a vacuum connection line; a vacuum chamber installed in front of the magnetic fluid seal; and a weight pile installed on the upper part of the driving device to adjust the horizontal of the spinning device from the driving device; and further comprises an elevation motor assembly installed on the spinning device to vertically rotate the spinning device in an elevation direction from the driving device.

[0018] In addition, a vacuum chamber driving system according to another embodiment of the present invention comprises: a vertical driving device; a spinning device installed on one side of the upper circumference of the driving device and rotated along a vertical / horizontal plane to steer in the azimuth and elevation directions; a vacuum pumping system installed on one side of the lower part of the driving device; a magnetic fluid seal installed in the rear center of the spinning device and connected to the vacuum pumping system via a vacuum connection line; a vacuum chamber installed in front of the magnetic fluid seal; and a weight pile installed on the upper part of the driving device to adjust the horizontal of the spinning device from the driving device; and further comprises an azimuth motor assembly installed on the lower part of the driving device to horizontally rotate the spinning device in the azimuth direction by the driving device.

[0019] In addition, a vacuum chamber driving system according to another embodiment of the present invention comprises: a vertical driving device; a spinning device installed on one side of the upper circumference of the driving device and rotated along a vertical / horizontal plane to steer in an azimuth and elevation direction; a vacuum pumping system installed on one side of the lower part of the driving device; a magnetic fluid seal installed in the rear center of the spinning device and connected to the vacuum pumping system via a vacuum connection line; a vacuum chamber installed in front of the magnetic fluid seal; and a weight pile installed on the upper part of the driving device to adjust the horizontal of the spinning device from the driving device; wherein the weight pile is installed on the other side of the upper circumference of the driving device so as to face the spinning device with the driving device in between. Effects of the invention

[0020] The vacuum chamber driving system of the present invention has the following effects.

[0021] First, the required torque can be reduced because the vacuum pumping system is separated from the spinning device and installed on one side of the drive device.

[0022] Second, operational stability can be improved by preventing the vacuum pumping system from rotating at a high angle.

[0023] Third, it can prevent the deterioration of the steering performance of the drive unit caused by pump vibration in the vacuum pumping system. Brief explanation of the drawing

[0024] FIG. 1 is a block diagram of a vacuum chamber driving system according to the present invention. FIG. 2 is a conceptual diagram of a vacuum line shape including a magnetic fluid seal in the driving device connection part according to the present invention. FIG. 3 is an exemplary cross-sectional view of the configuration of a vacuum chamber driving system according to the present invention. FIG. 4 is an example diagram of the configuration of a vacuum chamber driving system according to the present invention. Specific details for implementing the invention

[0025] Hereinafter, preferred embodiments of the present invention are described with reference to the accompanying drawings to fully understand the present invention. Embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be interpreted as being limited to the embodiments described in detail below. It should be noted that in each drawing, identical components may be illustrated with the same reference numerals. Detailed descriptions of known functions and components that are deemed to unnecessarily obscure the essence of the present invention are omitted.

[0026] Referring to FIGS. 1 to 4, a vacuum chamber driving system according to an embodiment of the present invention includes a driving device (100), a radiation device (110), a vacuum pumping system (120), a vacuum connection line (130), a magnetic fluid seal (140), a vacuum chamber (150), a weight pile (160), an elevation motor assembly (170), an azimuth motor assembly (180), and a support (190).

[0027] That is, the above-mentioned driving device (100) is vertically erected and preferably formed in the shape of a hollow square column so that a radiating device (110) and a weight pile (160) are installed facing each other around the upper side perimeter.

[0028] The above-mentioned radiating device (110) is installed on one side of the upper circumference of the vertical driving device (100) and serves to rotate along the vertical / horizontal plane to steer in the azimuth and elevation directions.

[0029] The above vacuum pumping system (120) is composed of a rotary pump, a turbo pump, etc., to maintain the vacuum chamber (150) at an ultra-high vacuum, and it is preferable that this be installed on one side of the lower part of the drive unit (100) or on one side of the azimuth motor assembly (180).

[0030] The magnetic fluid seal (140) is installed in the rear center of the radiation device (110) and is connected to the vacuum pumping system (120) by a vacuum connection line (130).

[0031] The above vacuum chamber (150) is installed in front of the magnetic fluid seal (140) to maintain an ultra-high vacuum.

[0032] The weight pile (160) is installed on the upper part of the driving device (100) and serves as a weight to adjust the horizontal level of the radiating device (110) from the driving device (100). It is preferable that this be installed on the other side of the upper perimeter of the driving device (100) so as to face the radiating device (110) with the driving device (100) in between.

[0033] The above-mentioned elevation motor assembly (170) is installed in the radiation device (110) and serves to vertically rotate the radiation device (110) in an elevation direction from the driving device (100), and is composed of a motor (172), a brake (174), a first encoder (176), and a second encoder (178).

[0034] That is, the motor (172) is installed around the vacuum chamber (150) and serves to vertically rotate the radiation device (110) in an upward direction.

[0035] The above brake (174) is installed around the rear perimeter of the motor (172) and serves to stop the vertical rotation of the radiation device (110).

[0036] The first encoder (176) is installed around the front circumference of the motor (172) and serves to control the operation of the elevation motor assembly (170).

[0037] The second encoder (178) is installed in the weight pile (160) and is electrically connected to the magnetic fluid seal (140) through the vacuum connection line (130).

[0038] The above azimuth motor assembly (180) is installed at the bottom of the driving device (100) and serves to rotate the radiating device (110) horizontally in the azimuth direction by the driving device (100). It is preferable that the upper part of the assembly be installed at the center of the bottom of the driving device (100) and the lower part be installed on the upper part of the support (190).

[0039] Meanwhile, the present invention is not limited to the embodiments described above, but can be implemented with modifications and variations within the scope of the essence of the invention, and such technical concepts to which modifications and variations are applied should also be considered to fall within the scope of the following patent claims. Explanation of the symbols

[0040] 100 : Driving device 110 : Radiation device 120 : Vacuum pumping system 130 : Vacuum connection line 140 : Magnetic fluid seal 150 : Vacuum chamber 152 : Vacuum pump 160 : Weight dummy 170 : Elevation motor assembly 172 : Motor 174 : Break 176 : 1st encoder 178 : Second encoder 180 : Azimuth motor assembly 190 : Support

Claims

Claim 1 A vacuum chamber driving system characterized by comprising: a vertical driving device (100); a radiating device (110) installed on one side of the upper circumference of the driving device (100) and rotated along a vertical / horizontal plane to steer in an azimuth and elevation direction; a vacuum pumping system (120) installed on one side of the lower portion of the driving device (100); a magnetic fluid seal (140) installed in the rear center of the radiating device (110) and connected to the vacuum pumping system (120) via a vacuum connection line (130); a vacuum chamber (150) installed in front of the magnetic fluid seal (140); and a weight pile (160) installed on the upper portion of the driving device (100) to adjust the horizontal position of the radiating device (110) from the driving device (100). Claim 2 A vacuum chamber driving system according to claim 1, further comprising: an elevation motor assembly (170) installed in the radiation device (110) and vertically rotating the radiation device (110) in an elevation direction from the driving device (100). Claim 3 A vacuum chamber driving system according to claim 2, wherein the elevation motor assembly (170) comprises: a motor (172) installed around the perimeter of the vacuum chamber (150) to vertically rotate the radiation device (110) in an elevation direction; a brake (174) installed around the rear perimeter of the motor (172) to stop the vertical rotation of the radiation device (110); and a first encoder (176) installed around the front perimeter of the motor (172) to control the operation of the elevation motor assembly (170). Claim 4 A vacuum chamber driving system according to claim 1, characterized in that a second encoder (178) connected via the vacuum connection line (130) is installed in the weight pile (160). Claim 5 A vacuum chamber driving system according to claim 1, characterized in that the weight pile (160) is installed on the other side of the upper circumference of the driving device (100) so as to face the radiation device (110) with the driving device (100) in between. Claim 6 A vacuum chamber driving system according to claim 1, further comprising an azimuth motor assembly (180) installed at the lower part of the driving device (100) and horizontally rotating the radiation device (110) in an azimuth direction by the driving device (100). Claim 7 A vacuum chamber driving system according to claim 6, wherein the azimuth motor assembly (180) is characterized in that its upper portion is installed at the center of the lower portion of the driving device (100) and its lower portion is installed on the upper portion of the support (190). Claim 8 A vacuum chamber driving system according to claim 6, wherein the vacuum pumping system (120) is installed on one side of the azimuth motor assembly (180) with respect to one side of the lower portion of the driving device (100). Claim 9 delete Claim 10 A vertical drive unit (100); a radiating unit (110) installed on one side of the upper circumference of the drive unit (100) and rotated along a vertical / horizontal plane to steer in the azimuth and elevation directions; a vacuum pumping system (120) installed on one side of the lower portion of the drive unit (100); a magnetic fluid seal (140) installed in the rear center of the radiating unit (110) and connected to the vacuum pumping system (120) via a vacuum connection line (130); and a vacuum chamber (150) installed in front of the magnetic fluid seal (140). A vacuum chamber driving system characterized by further including: a weight pile (160) installed on the upper part of the driving device (100) to adjust the horizontal level of the radiation device (110) from the driving device (100); and an azimuth motor assembly (180) installed on the lower part of the driving device (100) to rotate the radiation device (110) horizontally in an azimuth direction by the driving device (100). Claim 11 A vertical drive unit (100); a radiating unit (110) installed on one side of the upper circumference of the drive unit (100) and rotated along a vertical / horizontal plane to steer in the azimuth and elevation directions; a vacuum pumping system (120) installed on one side of the lower portion of the drive unit (100); a magnetic fluid seal (140) installed in the rear center of the radiating unit (110) and connected to the vacuum pumping system (120) via a vacuum connection line (130); and a vacuum chamber (150) installed in front of the magnetic fluid seal (140). A vacuum chamber driving system comprising: a weight pile (160) installed on the upper part of the driving device (100) to adjust the horizontal level of the radiation device (110) from the driving device (100); wherein the weight pile (160) is installed on the other side of the upper perimeter of the driving device (100) so as to face the radiation device (110) with the driving device (100) in between.

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