Method for discharging droplet and device for discharging droplet

Abstract

According to one embodiment of the present disclosure, a droplet dispensing method may be provided, comprising: a step of providing a droplet on a source substrate disposed on a main frame by a dispenser; a step of providing a test substrate and a sample substrate on a test frame disposed on one side of the main frame and placing a sample on the sample substrate; a step of providing a test droplet on the test substrate by the dispenser; a step of acquiring measurement information of the sample by a sensor; a step of acquiring measurement information of the test droplet by the sensor; and a step of determining the operating state of the sensor and the dispenser.

Description

Technology Field

[0001] The present disclosure relates to a droplet dispensing method and a droplet dispensing device. Background Technology

[0002] Recently, the manufacturing process of various devices includes a process of dispensing droplets using a dispenser. For example, droplets can be applied to various devices such as flat panel display devices.

[0003] In this case, to reduce the defect rate of the device to which the droplets are applied, the amount of droplets discharged needs to be precisely controlled. To this end, a method in which the process user periodically inspects the equipment can be considered, but this has the drawback of not sufficiently ensuring process convenience.

[0004] Accordingly, a droplet dispensing system is required that allows for precise control of the droplet volume while improving process convenience. The problem to be solved

[0005] One objective of the present disclosure is to provide a droplet dispensing method and a droplet dispensing device that can ensure the reliability of a sensor measuring the value of a droplet and immediately identify equipment failures to prevent unnecessary consumption. means of solving the problem

[0006] According to one embodiment of the present disclosure, a droplet dispensing method may be provided, comprising: a step of providing a droplet on a source substrate disposed on a main frame by a dispenser; a step of providing a test substrate and a sample substrate on a test frame disposed on one side of the main frame and placing a sample on the sample substrate; a step of providing a test droplet on the test substrate by the dispenser; a step of acquiring measurement information of the sample by a sensor; a step of acquiring measurement information of the test droplet by the sensor; and a step of determining the operating state of the sensor and the dispenser.

[0007] According to an embodiment, a droplet dispensing method may be provided, wherein the step of obtaining measurement information of the inspection droplet comprises: a step of measuring the height of first points spaced apart along a first direction on the inspection droplet; and a step of measuring the height of second points spaced apart from the first points along a second direction different from the first direction.

[0008] According to an embodiment, a droplet dispensing method may be provided in which the sensor includes a chromatic confocal sensor (CCS).

[0009] According to an embodiment, a droplet dispensing method may be provided, comprising: a step of moving the dispenser along a first direction so as to be adjacent to the inspection substrate; and a step of moving the inspection substrate and the sample substrate along a second direction different from the first direction so as to be adjacent to the sensor.

[0010] According to an embodiment, a droplet dispensing method may be provided in which the sample comprises a plurality of samples having different lengths in one direction.

[0011] According to an embodiment, a droplet dispensing method may be provided in which the sample comprises a plurality of samples having different lengths in one direction, and the plurality of samples are arranged side by side along the second direction.

[0012] According to an embodiment, a droplet dispensing method may be provided in which the sample comprises a plurality of samples having different lengths in one direction, and the plurality of samples are arranged side by side along the first direction.

[0013] According to an embodiment, a droplet discharge method may be provided, wherein the sample comprises a plurality of samples sequentially stacked in the thickness direction of the substrate for the sample.

[0014] According to an embodiment, a droplet dispensing method may be provided in which the light transmittance of the sample and the light transmittance of the inspection droplet are less than or equal to a predetermined difference.

[0015] According to an embodiment, a droplet dispensing method may be provided, wherein the step of determining the operating state of the sensor and the dispenser includes the step of comparing the measurement information of the sample with the unique data of the sample.

[0016] According to an embodiment, a droplet dispensing method may be provided, wherein the step of the sensor acquiring the measurement information of the sample includes the step of the sensor determining the length of the sample in the first direction as the first measurement length, and the step of determining the operating state of the sensor and the dispenser includes the step of determining that the resolution of the sensor in the first direction is suitable when the first intrinsic length, which is a pre-measured length of the sample in the first direction, and the first measurement length are less than or equal to a predetermined difference.

[0017] According to an embodiment, a droplet dispensing method may be provided in which the sensor includes a confocal sensor, and the predetermined difference is a length corresponding to the resolution of the confocal sensor.

[0018] According to an embodiment, a droplet dispensing method may be provided, wherein the step of the sensor acquiring the measurement information of the sample includes the step of the sensor determining the length of the sample in the second direction as a second measurement length, and the step of determining the operating state of the sensor and the dispenser includes the step of determining that the movement control state of the inspection stage is suitable when the second unique length, which is a pre-measured length in the second direction of the sample, and the second measurement length are less than or equal to a predetermined difference.

[0019] According to an embodiment, a droplet dispensing method may be provided, wherein the step of the sensor acquiring measurement information of the sample includes the step of the sensor determining the length of the sample in a third direction as a third measurement length, the third direction being the thickness direction of the substrate for the sample, and the step of determining the operating state of the sensor and the dispenser includes the step of determining that the resolution of the sensor in the third direction is suitable when the third intrinsic length, which is a pre-measured length of the sample in the third direction, and the third measurement length are less than or equal to a predetermined difference.

[0020] According to an embodiment, a droplet dispensing method may be provided, further comprising the step of providing status information of the sensor when it is determined that the sensor is operating abnormally.

[0021] According to an embodiment, a droplet dispensing method may be provided, further comprising: a step of obtaining measurement information of the inspection droplet provided on the inspection substrate when it is determined that the sensor is operating normally; and a step of correcting the discharge amount of the dispenser based on the measurement information of the inspection droplet.

[0022] According to an embodiment, a droplet dispensing method may be provided, further comprising the step of the dispenser providing a droplet on a newly supplied original substrate based on a corrected dispensing amount.

[0023] According to one embodiment of the present disclosure, a droplet dispensing device may be provided, comprising: a main dispensing unit; and an inspection dispensing unit disposed on one side of the main dispensing unit; wherein the main dispensing unit comprises: a main frame, a main stage disposed on the main frame, a source substrate disposed on the main stage, a dispenser mover disposed on the main stage and configured to move in a first direction, and a dispenser connected to the dispenser mover and configured to move along the first direction by the dispenser mover and dispensing a droplet; and the inspection dispensing unit comprises: an inspection frame, an inspection stage disposed on the inspection frame, a sample substrate disposed on the inspection stage, an inspection substrate disposed on the inspection stage, and a sensor, wherein the sensor can acquire measurement information of the droplet and a sample disposed on the sample substrate, and the dispenser is configured to dispense the droplet onto the inspection substrate when adjacent to the inspection dispensing unit.

[0024] According to an embodiment, a droplet dispensing device may be provided in which the sample comprises a plurality of samples with different lengths in one direction, and the sample and the droplet have substantially the same light transmittance.

[0025] According to an embodiment, a droplet dispensing device may be provided in which the discharge amount of the droplet of the dispenser is corrected based on measurement information regarding the inspection droplet acquired by the sensor. Effects of the invention

[0026] According to one embodiment of the present disclosure, a droplet dispensing method and a droplet dispensing device can be provided, which can ensure the reliability of a sensor measuring the value of a droplet and immediately identify equipment failures to prevent unnecessary consumption. Brief explanation of the drawing

[0027] FIG. 1 is a schematic perspective view showing a droplet discharge device according to an embodiment. FIGS. 2 to 4 are drawings for explaining a method in which a sensor according to an embodiment measures the height of a droplet. FIG. 5 is a block diagram showing a droplet discharge device according to an embodiment. FIGS. 6 and FIGS. 7 are flowcharts illustrating a droplet discharge method according to an embodiment. FIGS. 8 to 12 and FIG. 15 are plan views of process steps schematically illustrating a droplet discharge method according to an embodiment. FIGS. 13 and FIGS. 14 are schematic perspective views illustrating a droplet discharge method according to an embodiment. Specific details for implementing the invention

[0028] The present disclosure is capable of various modifications and may take various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present disclosure to specific forms, and it should be understood that it includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the present disclosure.

[0029] Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. Such terms are used solely for the purpose of distinguishing one component from another. For example, without departing from the scope of the present disclosure, the first component may be named the second component, and similarly, the second component may be named the first component. A singular expression includes a plural expression unless the context clearly indicates otherwise.

[0030] In this disclosure, terms such as "comprising" or "having" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. Furthermore, when a part such as a layer, film, region, or plate is described as being "on" another part, this includes not only cases where it is "immediately above" another part, but also cases where there is another part in between. Additionally, in this specification, when a part such as a layer, film, region, or plate is described as being formed "on" another part, the direction in which it is formed is not limited to the upward direction only, but includes cases where it is formed in the lateral or downward direction. Conversely, when a part such as a layer, film, region, or plate is described as being "below" another part, this includes not only cases where it is "immediately below" another part, but also cases where there is another part in between.

[0031] The present disclosure relates to a droplet dispensing method and a droplet dispensing device. Hereinafter, a droplet dispensing method and a droplet dispensing device according to an embodiment will be described with reference to the attached drawings.

[0032] FIG. 1 is a schematic perspective view showing a droplet discharge device according to an embodiment.

[0033] Referring to FIG. 1, a droplet dispensing device (1) according to an embodiment may include a main dispensing unit (MDP) and an inspection dispensing unit (IDP). For example, the main dispensing unit (MDP) may include a main frame (10), a main stage (100), a main rail (140), a dispenser (180), and a mover (190) for the dispenser. The inspection dispensing unit (IDP) may include an inspection frame (20), an inspection stage (200), an inspection rail (240), and a sensor (280).

[0034] The main dispensing unit (MDP) can provide a droplet onto the source substrate (160). For example, the source substrate (160) may be a base member of the device to be manufactured and may receive a droplet from the main dispensing unit (MDP). The source substrate (160) may be a substrate or film having rigid or flexible properties. The material of the source substrate (160) is not limited to specific examples.

[0035] A droplet may refer to a liquid fluid. For example, a droplet may be resin or a liquid crystal. However, the present disclosure is not necessarily limited to the examples described above, and the droplet may include various liquid fluids.

[0036] The main dispensing unit (MDP) may be positioned on one side of the inspection dispensing unit (IDP). The main dispensing unit (MDP) and the inspection dispensing unit (IDP) may be sufficiently close to each other. For example, if the dispenser (180) is close to one end of the main dispensing unit (MDP), the dispenser (180) may dispense a droplet onto the inspection substrate (460) of the inspection dispensing unit (IDP).

[0037] According to an embodiment, the process direction in the main discharge unit (MDP) may be parallel to the first direction (DR1). For example, the source substrate (160) provided with the droplet may be transported along a direction opposite to the first direction (DR1).

[0038] The main frame (10) may be a component provided with the components of the main dispensing unit (MDP). The components of the main dispensing unit (MDP) may be mounted on the main frame (10). For example, a main stage (100), a main rail (140), a dispenser (180), and a mover (190) for the dispenser may be placed on the main frame (10).

[0039] The main stage (100) can be placed on the main rail (140) on the main frame (10). The main stage (100) can be configured to move along the main rail (140). For example, the main stage (100) can be configured to move along a first direction (DR1).

[0040] The main stage (100) may provide an area where the source substrate (160) is placed. For example, the source substrate (160) may be loaded and unloaded on the main stage (100).

[0041] The main rail (140) may be placed on the main frame (10). The main rail (140) may extend along the process direction of the main dispensing unit (MDP). For example, the main rail (140) may extend along the first direction (DR1). According to an embodiment, the main stage (100) and the dispenser mover (190) may be moved along the main rail (140).

[0042] The dispenser (180) is configured to provide droplets. The dispenser (180) can dispense droplets. For example, the dispenser (180) can repeatedly dispense a specified amount of droplets. The dispenser (180) can dispense a single droplet at a time.

[0043] To improve process precision, the amount of liquid crystal droplets provided by the dispenser (180) needs to be closely controlled. According to the embodiment, the amount of droplets dispensed by the dispenser (180) is closely controlled so that the amount of droplets intended by the user can be provided. Details regarding this will be described later.

[0044] The dispenser (180) can be moved in a first direction (DR1) as the dispenser mover (190) moves. The position of the dispenser (180) in the first direction (DR1) can be changed by the dispenser mover (190).

[0045] The dispenser (180) can be fixed to the dispenser mover (190) so as to be moved in a second direction (DR2). For example, the dispenser (180) can be moved along the second direction (DR2) through a rail mounted on the dispenser mover (190).

[0046] According to the embodiment, the second direction (DR2) means a direction different from the first direction (DR1). For example, the first direction (DR1) and the second direction (DR2) may be orthogonal to each other.

[0047] The dispenser mover (190) can be configured to move along the main rail (140). For example, the dispenser mover (190) can move along the process direction of the main dispensing unit (MDP).

[0048] A dispenser mover (190) can move the dispenser (180). For example, the dispenser (180) can be coupled to the dispenser mover (190), and the dispenser mover (190) can move the dispenser (180) along a first direction (DR1).

[0049] According to the embodiment, the mover (190) for the dispenser may be a gantry.

[0050] The inspection discharge unit (IDP) may be positioned on one side of the main discharge unit (MDP). As described above, the main discharge unit (MDP) and the inspection discharge unit (IDP) may be sufficiently adjacent. According to an embodiment, the main discharge unit (MDP) and the inspection discharge unit (IDP) are sufficiently adjacent, so that the inspection stage (200) may be moved to be adjacent to the main discharge unit (MDP).

[0051] The inspection dispensing unit (IDP) can obtain measurement information to determine the operating status of the dispenser (180). For example, the dispenser (180) can provide an inspection droplet (1200) on an inspection substrate (460). The inspection dispensing unit (IDP) can determine whether the dispenser (180) is operating normally based on the measurement information of the inspection droplet (1200). The measurement information may include numerical data (height, etc.) obtained by the sensor (280).

[0052] The inspection frame (20) may be a component on which the components of the inspection discharge unit (IDP) are provided. The components of the inspection discharge unit (IDP) may be mounted on the inspection frame (20). For example, an inspection stage (200) and an inspection rail (240) may be placed on the inspection discharge unit (IDP).

[0053] The inspection stage (200) may be placed on an inspection rail (240) on an inspection frame (20). The inspection stage (200) may be configured to move along the inspection rail (240). For example, the inspection stage (200) may be moved in a second direction (DR2).

[0054] The inspection stage (200) may provide an area where a sample substrate (360) and an inspection substrate (460) are placed. For example, the sample substrate (360) and the inspection substrate (460) may be loaded and unloaded on the inspection stage (200).

[0055] A sample substrate (360) may be placed on an inspection stage (200). A sample (2200) may be placed on the sample substrate (360). The sample (2200) may be provided to determine whether the sensor (280) is operating normally.

[0056] The inspection substrate (460) may be placed on the inspection stage (200). An inspection droplet (1200) may be placed on the inspection substrate (460). The inspection droplet (1200) may be provided to determine whether the dispenser (180) is operating normally.

[0057] The sample substrate (360) and the inspection substrate (460) may contain a material similar to that of the source substrate (160). For example, the sample substrate (360), the inspection substrate (460), and the source substrate (160) may contain the same material. Accordingly, the environment in which the sample (2200), the droplet (1100), and the inspection droplet (1200) are placed in the main discharge unit (MDP) and the inspection discharge unit (IDP) may be similarly provided.

[0058] An inspection rail (240) may be placed on an inspection frame (20). The inspection rail (240) may extend along the direction in which the sample substrate (360) and the inspection substrate (460) are moved. For example, the inspection rail (240) may extend in a second direction (DR2). According to an embodiment, an inspection stage (200) may be moved along the inspection rail (240), so that the sample substrate (360) and the inspection substrate (460) may be adjacent to the sensor (280).

[0059] The sensor (280) can acquire measurement information of the inspection droplet (1200) and the sample (2200). The measurement information may refer to numerical data of the inspection droplet (1200) and the sample (2200).

[0060] For example, the sensor (280) can acquire height data of the inspection droplet (1200). The sensor (280) can acquire height data of the sample (2200). According to an embodiment, the droplet dispensing device (1) (e.g., processor ('420' in FIG. 5)) can calculate the volume of the sample (2200) and the volume of the inspection droplet (1200) based on the height data acquired by the sensor (280).

[0061] The position of the sensor (280) can be fixed. For example, the sensor (280) can be coupled to the inspection frame (20). Although not explicitly shown in FIG. 1, the sensor (280) can be coupled to other members and provided so as not to be moved. The position of the sensor (280) can be fixed relative to the main discharge unit (MDP).

[0062] The sensor (280) may be closer to the sample substrate (360) than to the inspection substrate (460). Accordingly, the sensor (280) can obtain measurement information for the inspection droplet (1200) after obtaining measurement information for the sample (2200).

[0063] With the position of the sensor (280) fixed, the sample substrate (360) and the inspection substrate (460) can be moved to be adjacent to the sensor (280).

[0064] In this case, based on measurement information for a sample (2200) placed on a sample substrate (360), after confirming the operating state of the sensor (280), the sensor (280) can obtain measurement information for an inspection sample (1200) placed on an inspection substrate (460). Accordingly, the reliability of the measurement information for the inspection sample (1200) can be improved. That is, the risk of the inspection precision of the sensor (280) being compromised can be reduced.

[0065] According to an embodiment, the sensor (280) may include a chromatic confocal sensor (CCS).

[0066] Hereinafter, with reference to FIGS. 2 to 4, the operation method of the sensor (280) when the sensor (280) is a confocal sensor (CCS) will be described.

[0067] FIGS. 2 to 4 are drawings for explaining a method in which a sensor according to an embodiment measures the height of a droplet.

[0068] Referring to FIG. 2, the confocal sensor (CCS) may include a light source (282), an optical lens (284), a beam splitter (286), a pinhole (287), and a spectrometer (288).

[0069] A confocal sensor (CCS) may include a light source (282) that emits white light. The white light may include light of various wavelength bands, including the visible light wavelength band. The light emitted from the light source (282) may pass through an optical lens (284) and be provided to the upper surface of an inspection droplet (1200). For example, in FIG. 2, a point (P) on the upper surface of an inspection droplet (1200) whose height is to be measured is indicated.

[0070] The optical lens (284) can separate the provided light by wavelength, and the focal lengths of the separated lights may differ from each other. For example, long wavelength light (R) may be focused at a relatively far position, and short wavelength light (B) may be focused at a relatively close position.

[0071] Among the separated lights, only the lights whose focus corresponds to the position on the upper surface of the inspection droplet (1200) may pass through the pinhole (287) after being reflected by the beam splitter (286) and be provided to the spectrometer (288). Among the separated lights, the lights whose focus does not correspond to the position on the upper surface of the inspection droplet (1200) may not pass through the pinhole (287) after being reflected by the beam splitter (286).

[0072] Subsequently, the height of the upper surface of the inspection droplet (1200) can be calculated based on the light provided to the spectrometer (288). For example, if the position of the focal point corresponds to the upper surface of the inspection droplet (1200), the light of the corresponding wavelength can be provided with a high light intensity, and the height of the inspection droplet (1200) can be calculated based on the provided light information.

[0073] Referring to FIG. 3, the sensor (280) can obtain measurement information of the inspection droplet (1200) using the method described above. For example, the sensor (280) can measure height data of the inspection droplet (1200) placed on the inspection substrate (460).

[0074] Referring to FIG. 4, the sensor (280) can measure the height of each of the groups (1220, 1240) spaced apart along the second direction (DR2). For example, after measuring the height of each of the first points (1222) of the first group (1220), the sensor (280) can measure the height of each of the second points (1242) of the second group (1240).

[0075] The first group (1220) and the second group (1240) can be extended in the first direction (DR1). The first group (1220) and the second group (1240) can be spaced apart in the second direction (DR2).

[0076] The first group (1220) may include first points (1222), and the second group (1240) may include second points (1242). The first points (1222) and the second points (1242) may represent locations that are the targets of measurement for the sensor (280). For example, each of the first points (1222) and the second points (1242) may correspond to the aforementioned point (P) with reference to FIG. 2.

[0077] The number of first points (1222) and second points (1242) can be appropriately selected according to the process environment and the resolution of the sensor (280).

[0078] For example, the sensor (280) may have a resolution of unit length (UL). The unit length (UL) may be a length corresponding to the resolution of the sensor (280). In this case, the sensor (280) may obtain height information for each of the points (1222, 1242) separated by unit length (UL).

[0079] Next, with reference to FIG. 5, the operation configuration of the droplet discharge device (1) according to the embodiment will be described. FIG. 5 is a block diagram showing a droplet discharge device according to the embodiment.

[0080] Referring to FIG. 5, the droplet discharge device (1) according to the embodiment may further include a processor (420) and an alarm unit (440).

[0081] The processor (420) can perform the operation of the droplet dispensing device (1). The processor (420) may be implemented as a CPU or a similar device according to hardware, software, or a combination thereof. However, the embodiment of the processor (420) is not necessarily limited to a specific example.

[0082] The processor (420) can calculate the height of the inspection droplet (1200) from the measurement information of the inspection droplet (1200) acquired by the sensor (320). The processor (420) can control the movement of individual components of the droplet dispensing device (1). The processor (420) can determine the operating status of the sensor (280) and the dispenser (180). For example, the processor (420) can determine whether the sensor (280) and the dispenser (180) are operating normally.

[0083] If the processor (420) determines that the sensor (280) and / or dispenser (180) is in an abnormal state, it can control the alarm unit (440) to output a signal to the user indicating that the state is abnormal.

[0084] However, the operation examples of the processor (420) are not limited to those described above, and unless otherwise specified, the operation of the droplet discharge device (1) may be interpreted as being controlled by the processor (420).

[0085] The alarm unit (440) can output a predetermined signal when the sensor (280) and / or dispenser (180) is determined by the processor (420) to be in an abnormal state.

[0086] For example, the alarm unit (440) may include a display device. In this case, visual information indicating that the sensor (280) and / or dispenser (180) is in an abnormal state may be output. Alternatively, the alarm unit (440) may include an audio device. In this case, auditory information indicating that the sensor (280) and / or dispenser (180) is in an abnormal state may be output.

[0087] According to an embodiment, an alarm unit (440) is provided so that if the sensor (280) and / or dispenser (180) is in an abnormal state, the user can immediately perform an inspection of the process equipment. Accordingly, the defect rate of the device for which droplets are supplied can be reduced.

[0089] Hereinafter, a droplet dispensing method according to an embodiment will be described with reference to FIGS. 6 to 15. Content that may overlap with the previously described content will be briefly explained or omitted.

[0090] FIGS. 6 and FIGS. 7 are flowcharts illustrating a droplet dispensing method according to an embodiment. FIGS. 6 may provide an overview of the droplet dispensing method according to an embodiment, and FIGS. 7 is a flowchart for specifically explaining the step (S1600) of determining the operating state of the inspection device among the steps shown in FIGS. 6.

[0091] FIGS. 8 to 12 and FIG. 15 are plan views of process steps schematically illustrating a droplet discharge method according to an embodiment.

[0092] FIGS. 13 and FIGS. 14 are schematic perspective views illustrating a droplet discharge method according to an embodiment.

[0093] Referring to FIG. 6, a droplet dispensing method according to an embodiment may include the steps of: providing a droplet on a source substrate by a dispenser (S1200); providing a droplet on an inspection substrate by a dispenser (S1400); determining the operating state of a sensor and a dispenser (S1600); correcting the amount of droplet provided (S1700); and providing a droplet on a source substrate by a dispenser based on the corrected amount (S1800).

[0094] Referring to FIGS. 6, FIGS. 8, and FIGS. 9, in the step (S1200) where the dispenser provides a droplet onto the original substrate, the dispenser (180) can discharge a droplet (1100) onto the original substrate (160).

[0095] A source substrate (160) may be provided (or prepared) on the main stage (100). The position of the dispenser (180) may be changed so that the dispenser (180) is positioned at a location where a droplet (1100) is to be provided on the source substrate (160). The dispenser (180) may provide a droplet (1100) on the source substrate (160). The droplet (1100) may be placed on the source substrate (160). For convenience of explanation, the droplet (1100) is depicted as having a circular shape, but the present disclosure is not limited thereto.

[0096] A sample (2200) may be provided (or prepared) on a sample substrate (360) on an inspection stage (200). At this time, a separate droplet may not be placed on the inspection substrate (460) on the inspection stage (200).

[0097] After dispensing a droplet (1100) onto the original substrate (160), the dispenser (180) can be moved to be adjacent to the inspection dispensing unit (IDP) (or inspection stage (200)). For example, the dispenser (180) can be moved along the first direction (DR1) to be adjacent to the inspection substrate (460).

[0098] Referring to FIGS. 6, FIGS. 10, and FIGS. 11, in the step (S1400) where the dispenser provides a droplet onto an inspection substrate, the dispenser (180) can discharge an inspection droplet (1200) onto the inspection substrate (460).

[0099] In this step, the dispenser (180) may be configured to dispense an inspection droplet (1200) onto an inspection substrate (460). For example, the nozzle from which the droplet is dispensed from the dispenser (180) may overlap with the inspection substrate (460) when viewed in a planar view. According to an embodiment, the dispenser (180) may be positioned to protrude from the dispenser mover (190) toward the inspection output (IDP), in which case the dispenser (180) can easily provide an inspection droplet (1200) onto the inspection substrate (460).

[0100] However, the present disclosure is not necessarily limited to the examples described above. For example, the inspection stage (200) may be moved to a main dispensing unit (MDP) and configured so that a dispenser (180) discharges an inspection droplet (1200) onto an inspection substrate (460). (Not shown) In this case, a part of the main dispensing unit (MDP) and the inspection dispensing unit (IDP) may be connected by a member such as a rail, so that the movement of the inspection stage (200) can be implemented.

[0101] The dispenser (180) provides a test droplet (1200) on a test substrate (460), so that the test droplet (1200) can be placed on the test substrate (460). After the test droplet (1200) is discharged, the dispenser (180) can be separated from the test discharge unit (IDP).

[0102] Referring to FIGS. 6 and FIGS. 12 to 14, in the step (S1600) of determining the operating state of the sensor and the dispenser, information (or data) for checking the operating state of the sensor (280) and the dispenser (180) may be obtained.

[0103] For example, in the step (S1600) of determining the operating status of the sensor and the dispenser, it may be determined whether the sensor (280) is operating normally. Also, in this step, it may be determined whether the dispenser (180) is operating normally, and information (or data) for correcting the discharge amount so that the amount of liquid droplet (1100) provided becomes uniform may be obtained.

[0104] Detailed information regarding the step (S1600) for determining the operating status of the sensor and dispenser is described in detail in conjunction with Fig. 7.

[0105] Referring to FIG. 7, the step of determining the operating state of the sensor and dispenser (S1600) may include the step of acquiring measurement information of a sample (S1620), the step of comparing the measurement information with the unique data of the sample (S1640), and the step of determining whether the measurement information of the sample is within a normal range (S1660). At this time, if the measurement information of the sample (2200) is within a normal range, the step of determining the operating state of the sensor and dispenser (S1600) may further include the step of acquiring droplet measurement information provided on an inspection substrate (S1670). If the measurement information of the sample (2200) is not within a normal range, the step of determining the operating state of the sensor and dispenser (S1600) may further include the step of providing status information of the sensor (S1680).

[0106] In the step of acquiring measurement information of a sample (S1620), the sensor (280) can acquire measurement information of the sample (2200).

[0107] In this step, the inspection stage (200) may be moved so that the sample substrate (360) is adjacent to the sensor (280). Accordingly, the position of the sample (2200) may be changed so that the sensor (280) can be configured to acquire measurement information of the sample (2200). For example, the inspection stage (200) may be moved in a second direction (DR2) so that the distance between the sample substrate (360) and the sensor (280) is reduced.

[0108] The sensor (280) can obtain measurement information in the first direction (DR1) of the sample (2200). The sensor (280) can obtain measurement information in the second direction (DR2) of the sample (2200). The sensor (280) can obtain measurement information in the third direction (DR3) of the sample (2200).

[0109] For example, as the sample (2200) passes through the measurement range of the sensor (280) when viewed on a plane, the sensor (280) can measure length data in the first direction (DR1) and the second direction (DR2) of the sample (2200). In addition, it goes without saying that the sensor (280) can measure height data in the third direction (DR3) of the sample (2200) using the method described above.

[0110] The sample (2200) may have optical properties similar to those of the inspection droplet (1200). For example, the sample (2200) may have light transmittance similar to that of the inspection droplet (1200). The sample (2200) may have substantially the same light transmittance as the inspection droplet (1200). The light transmittance of the sample (2200) and the light transmittance of the inspection droplet (1200) may be less than or equal to a predetermined difference. According to an embodiment, the sample (2200) may contain the same material as the inspection droplet (1200). In this case, the sample (2200) may be a material in which the inspection droplet (1200) has been cured. According to an embodiment, even when the reliability of the sensor (280) is determined using the sample (2200), it may be interpreted as determining the reliability of the inspection droplet (1200).

[0111] The sample (2200) may include a plurality of samples. For example, the sample (2200) may include a first sample (2220), a second sample (2240), and a third sample (2260). For convenience of explanation, the description is based on an example in which the sample (2200) includes three samples. However, the present disclosure is not limited to the examples described above.

[0112] According to an embodiment, the first sample (2220), the second sample (2240), and the third sample (2260) may be arranged sequentially (or side by side) along the second direction (DR2). Measurement information of each of the first sample (2220), the second sample (2240), and the third sample (2260) may be acquired sequentially by a sensor (280). (Fig. 13)

[0113] The sizes of the first sample (2220), the second sample (2240), and the third sample (2260) may differ from each other. The first sample (2220), the second sample (2240), and the third sample (2260) may each have different lengths in one direction.

[0114] For example, the first sample (2220) may have a larger size than the second sample (2240). The first sample (2220) may have a longer length in the first direction (DR1) than the second sample (2240). The first sample (2220) may have a longer length in the second direction (DR2) than the second sample (2240). The first sample (2220) may have a longer height in the third direction (DR3) than the second sample (2240).

[0115] The second sample (2240) may have a larger size than the third sample (2260). For example, the second sample (2240) may have a longer length in the first direction (DR1) than the third sample (2260). The second sample (2240) may have a longer length in the second direction (DR2) than the third sample (2260). The second sample (2240) may have a longer height in the third direction (DR3) than the third sample (2260).

[0116] Measurement information of a first sample (2220), a second sample (2240), and a third sample (2260) having different sizes is obtained sequentially, so that measurement information of the sensor (280) for various targets can be obtained. In this case, the reliability of the information for determining the precision of the sensor (280) can be improved.

[0117] According to an embodiment, the first sample (2220), the second sample (2240), and the third sample (2260) are sequentially stacked in the thickness direction of the sample substrate (360) (e.g., the third direction (DR3)), so that the sensor (280) may acquire measurement information of the first sample (2220), the second sample (2240), and the third sample (2260) in a batch. (Fig. 14) In this case, while acquiring measurement information of the first sample (2220), the second sample (2240), and the third sample (2260) having various sizes, the total length of the sample (2200) in the direction of movement of the inspection stage (200) (e.g., the second direction (DR2)) is reduced, and the process time may be shortened.

[0118] According to an embodiment, the first sample (2220), the second sample (2240), and the third sample (2260) may be arranged sequentially along the first direction (DR1). (Not shown) In this case, the sensor (280) acquires measurement information of the first sample (2220), the second sample (2240), and the third sample (2260) in batches, thereby reducing the process time.

[0119] According to the embodiment, the measurement information of the sample (2200) measured by the sensor (280) may be stored in a memory (not shown) provided in the droplet discharge device (1). Alternatively, the measurement information of the sample (2200) measured by the sensor (280) may be transmitted to a memory provided externally.

[0120] Meanwhile, while the step (S1600) of determining the operating state of the sensor and dispenser is being performed, the original substrate (160) on which the droplet (1100) is placed is moved for a subsequent process, and a new original substrate (160) may be placed. (See FIG. 12) The subsequently placed original substrate (160) may be intended to provide the droplet (1100) after the amount of the droplet (1100) provided by the dispenser (180) has been corrected. However, the present disclosure is not necessarily limited to the examples described above. The new original substrate (160) may be provided at an appropriate time before the droplet (1100) with the corrected amount is discharged.

[0121] Referring to FIG. 7, in the step (S1660) of determining whether the measurement information of a sample is within a normal range, it can be determined whether the measurement information of a sample (2200) obtained by the sensor (280) is within a normal range.

[0122] According to an embodiment, unique measurement data of the sample (2200) may be prepared in advance. For example, the length of the sample (2200) in the first direction (DR1), the length in the second direction (DR2), and the length in the third direction (DR3) may be measured in advance.

[0123] At this stage, the processor (420) can compare the unique measurement data of the sample (2200) with the measurement information of the sample (2200) acquired by the sensor (280).

[0124] For example, the processor (420) can compare the first intrinsic length in the first direction (DR1) of the sample (2200) with the first measured length in the first direction (DR1) of the sample (2200) acquired by the sensor (280). If the first intrinsic length and the first measured length are less than or equal to a predetermined difference, the processor (420) can determine that the focus state for the first direction (DR1) of the sensor (280) and the resolution for the measurement points (1222, 1242) are suitable. Here, the first intrinsic length may be the length in the first direction (DR1) of the sample (2200) that has been measured in advance.

[0125] Here, when referring to FIG. 4, the predetermined difference may be a unit length (UL) of the sensor (280). The predetermined difference may be the distance between adjacent measurement points (1222, 1242) within the same group (1220, 1240). For example, the distance between adjacent first points (1222) of the first group (1220) may be defined as the predetermined difference. If the predetermined difference is defined as the adjacent distance between measurement points (1222, 1242), the error range that obviously occurs in the sensor (280) may not be determined as an abnormal state of the sensor (280).

[0126] According to an embodiment, the predetermined difference may be a multiple of the unit length (UL) of the sensor (280). In this case, an error range within the unit length (UL) that may obviously occur in the sensor (280) may not be determined as an abnormal state of the sensor (280).

[0127] The processor (420) can compare the second intrinsic length in the second direction (DR2) of the sample (2200) with the second measured length in the second direction (DR1) of the sample (2200) acquired by the sensor (280). If the difference between the second intrinsic length and the second measured length is less than or equal to a predetermined difference, the processor (420) can determine that the focus state of the sensor (280) in the second direction (DR2) and the movement control state of the inspection stage (200) are appropriate.

[0128] The processor (420) can compare the third intrinsic length in the third direction (DR3) of the sample (2200) with the third measured length in the third direction (DR3) of the sample (2200) acquired by the sensor (280). If the difference between the third intrinsic length and the third measured length is less than or equal to a predetermined difference, the processor (280) can determine that the resolution of the sensor (280) in the third direction (DR3) is suitable.

[0129] For example, as described above with reference to FIG. 2, the sensor (280) can obtain height information in the third direction (DR3) of each of the measurement points (1222, 1242). At this time, the resolution of the sensor (280) in the third direction (DR3) can be determined to verify the reliability of the height information measured for each measurement point (1222, 1242).

[0130] According to an embodiment, the processor (280) can determine that the sensor (280) is operating normally or that the sensor (280) is operating abnormally by using the method described above.

[0131] Referring to FIG. 7, if the measurement information of the sample (2200) is not within the normal range, a step (S1680) of providing status information of the sensor may be performed.

[0132] According to an embodiment, if the processor (280) determines that the sensor (280) is operating abnormally, it can control the alarm unit (440) to provide status information of the sensor (280). For example, if the alarm unit (440) includes a display device, the alarm unit (440) may display text and / or an image to the user indicating that the sensor (280) is operating abnormally. Alternatively, if the alarm unit (440) includes an audio device, the alarm unit (440) may output audio to the user indicating that the sensor (280) is operating abnormally. However, the present disclosure is not limited to the examples described above, and the alarm unit (440) may include both a display device and an audio device.

[0133] Accordingly, according to the embodiment, the user can easily check whether the sensor (280) is operating normally, and the sensing reliability of the sensor (280) for the inspection droplet (1200) subsequently performed can be ensured. In addition, the amount of droplet (1100) ultimately provided on the original substrate (160) can be precisely controlled, thereby preventing process defects.

[0134] Referring to FIG. 7, if the measurement information of the sample (2200) is within the normal range, the step (S1670) of obtaining droplet measurement information provided on the inspection substrate may be performed.

[0135] In this step, the inspection stage (200) is moved in a second direction (DR2) so that the inspection substrate (460) can be adjacent to the sensor (280). For example, the inspection droplet (1200) is moved in the second direction (DR2) so that the sensor (280) can obtain measurement information of the inspection droplet (1200). Accordingly, the volume of the inspection droplet (1200) can be calculated.

[0136] Here, the measurement information of the inspection droplet (1200) is obtained by a sensor (280) that is determined to be in normal operation, thereby further improving the reliability of the measurement result.

[0137] And the processor (280) can determine whether the dispenser (180) properly dispenses the droplet (1100). The processor (280) can determine whether the amount of the inspection droplet (1200) dispensed corresponds to the amount intended by the user. For example, if the volume of the inspection droplet (1200) is larger than the single discharge amount of the dispenser (180), the processor (280) can determine that the discharge amount of the dispenser (180) should be increased. If the volume of the inspection droplet (1200) is smaller than the single discharge amount of the dispenser (180), the processor (280) can determine that the discharge amount of the dispenser (180) should be decreased.

[0138] Referring to FIGS. 6 and FIGS. 15, in the step (S1800) where a dispenser provides a droplet on a source substrate based on a corrected supply amount, the processor (280) can correct the amount of droplet (1100) discharged on the source substrate (160) based on the amount of the inspection droplet (1200).

[0139] According to the embodiment, if it is determined that the discharge amount of the dispenser (180) needs to be increased, the discharge amount of the dispenser (180) may be increased. If it is determined that the discharge amount of the dispenser (180) needs to be decreased, the discharge amount of the dispenser (180) may be decreased. The discharge amount of the dispenser (180) can be adjusted by reflecting the difference between the single discharge amount of the dispenser (180) intended by the user and the volume of the measured inspection droplet (1200).

[0140] According to the embodiment, if it is determined that the discharge amount of the dispenser (180) needs to be changed, the processor (280) may output visual information and / or audio information indicating that the alarm unit (440) needs to change the discharge amount of the dispenser (180) to the user.

[0141] Referring to FIG. 6, in the step (S1800) where the dispenser provides a droplet on a source substrate based on a corrected supply amount, the dispenser (180) can discharge a droplet (1100) according to the corrected supply amount onto a newly provided (or supplied) source substrate (160).

[0142] According to an embodiment, the dispenser (180) can provide a corrected discharge amount based on the measurement results of the inspection droplet (1200), and accordingly, a uniform amount of droplet (1100) can be provided on the original substrate (160).

[0143] According to the embodiment, the aforementioned steps may be performed repeatedly. For example, the step of correcting the amount of droplets provided (S1700) may be continuously performed before the droplets (1100) are provided on the source substrate (160), so that the amount of droplets (1100) placed on the source substrates (160) can be controlled to be uniform. Accordingly, defective production of the target product to which the droplets (1100) are applied can be prevented. In addition, periodic inspection of the amount of droplets (1100) discharged is not necessarily required, thereby improving process convenience.

[0145] Although the present disclosure has been described with reference to preferred embodiments, those skilled in the art or those with ordinary knowledge in the art will understand that various modifications and changes can be made to the present disclosure without departing from the spirit and scope of the present disclosure as set forth in the claims below.

[0146] Accordingly, the technical scope of the present disclosure should not be limited to the contents described in the detailed description of the specification, but should be determined by the claims. Explanation of the symbols

[0147] 1: Droplet dispensing device 10: Main Frame 100: Main Stage 160: Original board 180: Dispenser 190: Mover for dispensers 20: Inspection Frame 200: Inspection Stage 240: Inspection Rail 280: Sensor 360: Sample substrate 460: Inspection board 1100: Droplet 1200: Inspection droplet 2200: Sample

Claims

Claim 1 A droplet dispensing method comprising: a step of providing a droplet onto a source substrate disposed on a main frame by a dispenser; a step of providing an inspection substrate and a sample substrate on an inspection frame disposed on one side of the main frame, and placing a sample on the sample substrate; a step of providing an inspection droplet onto the inspection substrate by the dispenser; a step of acquiring measurement information of the sample by a sensor; a step of acquiring measurement information of the inspection droplet by the sensor; and a step of determining the operating state of the sensor and the dispenser. Claim 2 A droplet dispensing method according to claim 1, wherein the step of obtaining measurement information of the inspection droplet comprises: a step of measuring the height of first points spaced apart along a first direction on the inspection droplet; and a step of measuring the height of second points spaced apart from the first points along a second direction different from the first direction. Claim 3 A droplet dispensing method according to claim 1, wherein the sensor comprises a chromatic confocal sensor (CCS). Claim 4 A droplet dispensing method according to claim 1, comprising: a step of moving the dispenser along a first direction so as to be adjacent to the inspection substrate; and a step of moving the inspection stage along the second direction so as to be adjacent to the sensor the inspection substrate and the sample substrate disposed on the inspection stage configured to be moved along a second direction different from the first direction. Claim 5 A droplet discharge method according to claim 1, wherein the sample comprises a plurality of samples having different lengths in one direction. Claim 6 A droplet discharge method according to claim 4, wherein the sample comprises a plurality of samples with different lengths in one direction, and the plurality of samples are arranged side by side along the second direction. Claim 7 A droplet discharge method according to claim 4, wherein the sample comprises a plurality of samples with different lengths in one direction, and the plurality of samples are arranged side by side along the first direction. Claim 8 A droplet discharge method according to claim 1, wherein the sample comprises a plurality of samples sequentially stacked in the thickness direction of the substrate for the sample. Claim 9 A droplet dispensing method according to claim 1, wherein the light transmittance of the sample and the light transmittance of the inspection droplet are less than or equal to a predetermined difference. Claim 10 A droplet dispensing method according to claim 1, wherein the step of determining the operating state of the sensor and the dispenser includes the step of comparing the measurement information of the sample with the unique data of the sample. Claim 11 A droplet dispensing method according to claim 4, wherein the step of the sensor acquiring the measurement information of the sample includes the step of the sensor determining the length of the sample in the first direction as the first measurement length, and the step of determining the operating state of the sensor and the dispenser includes the step of determining that the resolution of the sensor in the first direction is suitable when the first intrinsic length, which is a pre-measured length of the sample in the first direction, and the first measurement length are less than or equal to a predetermined difference. Claim 12 A droplet discharge method according to claim 11, wherein the sensor comprises a confocal sensor, and the predetermined difference is a length corresponding to the resolution of the confocal sensor. Claim 13 A droplet dispensing method according to claim 4, wherein the step of the sensor acquiring the measurement information of the sample includes the step of the sensor determining the length of the sample in the second direction as the second measurement length, and the step of determining the operating state of the sensor and the dispenser includes the step of determining that the movement control state of the inspection stage is suitable when the second intrinsic length, which is a pre-measured length in the second direction of the sample, and the second measurement length are less than or equal to a predetermined difference. Claim 14 A droplet dispensing method according to claim 4, wherein the step of the sensor acquiring measurement information of the sample includes the step of the sensor determining the length of the sample in a third direction as a third measurement length, wherein the third direction is the thickness direction of the substrate for the sample, and the step of determining the operating state of the sensor and the dispenser includes the step of determining that the resolution of the sensor in the third direction is suitable when the difference between the third intrinsic length, which is a pre-measured length of the sample in the third direction, and the third measurement length is less than or equal to a predetermined difference. Claim 15 A droplet dispensing method according to claim 1, further comprising the step of providing status information of the sensor when it is determined that the sensor is operating abnormally. Claim 16 A droplet dispensing method according to claim 1, further comprising: a step of obtaining measurement information of the inspection droplet provided on the inspection substrate when it is determined that the sensor is operating normally; and a step of correcting the discharge amount of the dispenser based on the measurement information of the inspection droplet. Claim 17 A droplet dispensing method according to claim 16, further comprising the step of the dispenser providing a droplet onto a newly supplied original substrate based on a corrected dispensing amount. Claim 18 A main discharge unit; and an inspection discharge unit disposed on one side of the main discharge unit; A droplet dispensing device comprising: a main dispensing unit comprising: a main frame, a main stage disposed on the main frame, a source substrate disposed on the main stage, a dispenser mover disposed on the main stage and configured to move in a first direction, and a dispenser connected to the dispenser mover and configured to move along the first direction by the mover and dispensing a droplet; and an inspection dispensing unit comprising: an inspection frame, an inspection stage disposed on the inspection frame, a sample substrate disposed on the inspection stage, an inspection substrate disposed on the inspection stage, and a sensor; wherein the dispenser is configured to dispense the droplet onto the inspection substrate when adjacent to the inspection dispensing unit, and the sample substrate and the inspection substrate are provided separately and are adjacent to each other along the direction of movement of the inspection stage, so that the sensor can sequentially acquire measurement information of the droplet on the inspection substrate and measurement information of a sample disposed on the sample substrate, respectively. Claim 19 A droplet dispensing device according to claim 18, wherein the sample comprises a plurality of samples with different lengths in one direction, and the sample and the droplet have the same light transmittance. Claim 20 A droplet dispensing device according to claim 18, wherein the discharge amount of the droplet of the dispenser is corrected based on measurement information regarding the droplet on the inspection substrate acquired by the sensor.

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