Substrate transport device and substrate transport method

Abstract

A substrate transport device comprises a hand configured to hold a substrate, a plurality of reflective light detectors installed on the hand, a partial position calculation unit, and a substrate position determination unit. The plurality of reflective light detectors each emit light toward the outer periphery of a substrate placed on the hand, and each receive light reflected from the substrate by a line-shaped light-passing surface, and output a signal indicating the amount of received light. The partial position calculation unit calculates the positions of a plurality of parts of the outer periphery of the substrate on the hand based on the output signals of the plurality of reflective light detectors. The substrate position determination unit determines the position of the substrate relative to the hand based on the calculated positions of the plurality of parts of the substrate.

Description

Technology Field

[0001] The present invention relates to a substrate conveying device and a substrate conveying method for conveying a substrate. Background Technology

[0002] Conventionally, a substrate processing device is used to perform various treatments on various substrates, such as substrates for Flat Panel Displays (FPDs), semiconductor substrates, substrates for optical discs, substrates for magnetic discs, substrates for photomagnetic discs, substrates for photomasks, ceramic substrates, or substrates for solar cells, which are used for liquid crystal display devices or organic Electro Luminescence (EL) display devices.

[0003] In a substrate processing device, processing is performed continuously in multiple processing units, for example, on a single substrate. Therefore, a substrate transport device is installed in the substrate processing device to transport the substrate between the multiple processing units. In such a substrate transport device, the substrate is transported while being held by a holding member. If the substrate is held in a position misaligned with respect to the holding member, the substrate cannot be transported with high precision. Therefore, a configuration for determining the position of the substrate relative to the holding member is proposed.

[0004] For example, in the substrate conveying device described in Japanese Patent Publication No. 2018-133415, a substrate to be processed is held by a holding member (hand), and the substrate is conveyed as the holding member moves. Specifically, when conveying a substrate from a first position to a second position, after the substrate is received by the holding member at the first position, the holding member holding the substrate moves to a predetermined third position (initial forward / backward position). During this movement, first to fifth parts of the outer periphery of the substrate held by the holding member are detected. Based on these detections, the positions of the first to fifth parts in the holding member are each calculated. Based on the calculated positions of the first to fifth parts, the position of the substrate in the holding member is determined. In addition, in the substrate transport device described in Japanese Patent Publication No. 2012-182393, while the holding part (fork) that holds the substrate is in a predetermined position, the positions of four parts of the outer circumference of the substrate held by the holding part are measured. Based on the measurement results, the position of the substrate in the holding part is determined. The problem to be solved

[0005] If the substrate transport time by the substrate transport device can be shortened, the throughput of substrate processing in the substrate processing device is improved. Therefore, it is desirable to reduce the time required for determining the position of the substrate by the substrate transport device.

[0006] The objective of the present invention is to provide a substrate transport device and a substrate transport method capable of reducing the time required for determining the position of a substrate. means of solving the problem

[0007] (1) A substrate conveying device according to one aspect of the present invention is a substrate conveying device for conveying a substrate, and comprises a holding part configured to hold a substrate, a plurality of reflective light detectors each having a line-shaped light receiving surface and installed in the holding part, each emitting light toward the outer periphery of a substrate placed on the holding part, and each receiving light reflected from the substrate by the light receiving surface and outputting a signal indicating the amount of light received, a part position calculation part that calculates the position of a plurality of parts of the outer periphery of the substrate in the holding part based on the output signal of the plurality of reflective light detectors, and a position determination part that determines the position of the substrate relative to the holding part based on the position of a plurality of parts of the substrate calculated by the part position calculation part.

[0008] In the substrate transport device, light is emitted from a plurality of reflective light detectors installed in the holding section to the outer periphery of the substrate. In this case, the amount of light reflected from the outer periphery of the substrate varies depending on the position of the outer end of the substrate in the direction in which the line-shaped light-receiving surface extends. Therefore, based on the amount of light received indicated by the output signals of the plurality of first reflective light detectors, it becomes possible to calculate the positions of multiple parts of the outer end of the substrate in the direction in which the line-shaped light-receiving surface of the plurality of reflective light detectors extends. Consequently, the position of the substrate relative to the holding section can be determined at the time the substrate is placed on the holding section. As a result, it becomes possible to reduce the time required to determine the position of the substrate during substrate transport.

[0009] (2) Each of the plurality of reflective light detectors has a strip-shaped detection area extending upward from the light receiving surface, and the plurality of parts may be the intersection points of the detection areas of the plurality of reflective light detectors and the outer edge of the substrate placed on the holding part when viewed in a plane. In this case, the position of the substrate can be determined based on the position of the plurality of parts of the substrate calculated.

[0010] (3) A plurality of reflective light detectors may include a first and second reflective light detector installed in a holding part so that the light receiving surfaces do not overlap each other in one direction. In this case, the positions of a plurality of parts of the substrate can be calculated with high precision based on the output signals of the first and second reflective light detectors and the positional relationship between the first and second reflective light detectors.

[0011] (4) The substrate transport device further comprises a memory unit that stores light quantity position information representing a predetermined relationship between the amount of light received by a plurality of reflective light detectors and the position of a plurality of parts of the substrate in the holding unit, and the part position calculation unit may calculate the position of each of the plurality of parts of the substrate in the holding unit based on the light quantity position information stored in the memory unit in addition to the output signals of the plurality of reflective light detectors. In this case, the position of a plurality of parts of the outer edge of the substrate can be calculated with high precision based on the light quantity position information.

[0012] (5) The substrate transport device is installed in the holding part and emits light toward an inner part located inward from the outer periphery of the substrate, and also has a light receiving amount measuring device that receives light reflected by the substrate and outputs a signal indicating the amount of light received, and a light amount position information generating device that generates light amount position information indicating the relationship between the amount of light received by a plurality of reflective light detectors and the position of a plurality of parts of the substrate in the holding part based on the output signal of the light receiving amount measuring device, and the part position calculation device may calculate the position of a plurality of parts of the substrate in the holding part based on the light amount position information generated by the light amount position information generating device in addition to the output signal of a plurality of reflective light detectors.

[0013] In this case, even if the reflectance of light on the substrate is not yet known, light quantity position information is generated based on the output signal of the light quantity meter. As a result, based on the generated light quantity position information, the positions of multiple parts of the outer edge of the substrate can be calculated with high precision.

[0014] (6) The holding part may further have a plurality of adsorption parts that adsorb and hold the lower surface of the substrate, and the distance between the light receiving amount measuring device and one of the adsorption parts may be smaller than the distance between each of the plurality of reflective photodetectors and one of the adsorption parts.

[0015] In this case, the light receiving meter is located near a single adsorption part relative to multiple reflective light detectors. Therefore, even if deformation such as bending occurs in the substrate, the height of the inner part of the substrate receiving light from the light receiving meter is maintained at approximately a constant height by the single adsorption part. Consequently, deviations in the conditions for generating light quantity position information are reduced. As a result, based on the appropriately generated light quantity position information, the positions of multiple parts of the outer edge of the substrate can be calculated with higher precision.

[0016] (7) The substrate transport device further comprises a height detection unit that detects the height of a plurality of parts of the substrate in the holding unit, and a correction unit that corrects the position of a plurality of parts of the substrate calculated by a part position calculation unit based on the height of a plurality of parts of the substrate detected by the height detection unit, and the position determination unit may determine the position of the substrate relative to the holding unit based on the position of a plurality of parts of the substrate after correction by the correction unit.

[0017] The amount of light emitted from a reflective photodetector and reflected from a substrate, returning to the reflective photodetector, also changes depending on the distance between the reflective photodetector and the substrate. According to the above configuration, the height of a plurality of parts of the outer edge of the substrate is detected, and the calculation result of the position of a plurality of parts of the outer edge of the substrate is corrected based on the detected height. Accordingly, the position of a plurality of parts of the outer edge of the substrate can be acquired with higher precision.

[0018] (8) The substrate transport device may further comprise a photodetector control unit for controlling a plurality of reflective photodetectors, and the photodetector control unit may be configured to operate in a first control mode for controlling a plurality of reflective photodetectors while the substrate is held by a holding unit, and a second control mode for controlling a plurality of reflective photodetectors while the substrate is not held by a holding unit and the holding unit is positioned below the substrate supported by the support unit.

[0019] In this case, regardless of whether the substrate is in a state where it is held by the holding member or in a state where the holding member is positioned below the substrate supported by the support member, the position of the substrate in the holding member can be determined.

[0020] (9) The substrate return device may further include a moving part that moves the holding part and a moving control part that controls the moving part so that the substrate held by the holding part is returned from a predetermined first position to a second position based on the result of a position determination part.

[0021] In this case, based on the determination result by the position determination unit, the substrate held by the holding unit can be returned from a predetermined first position to a second position with high precision.

[0022] (10) A substrate transport method according to another aspect of the present invention is a substrate transport method for transporting a substrate, comprising the steps of: placing a substrate on a holding member configured to hold the substrate; using a plurality of reflective light detectors installed on the holding member and having a line-shaped light receiving surface to emit light toward the outer periphery of the substrate placed on the holding member, and receiving light reflected from the substrate by the light receiving surface, and outputting a signal indicating the amount of light received from each of the plurality of reflective light detectors; calculating the position of each of the portions of the outer periphery of the substrate in the holding member based on the output signals of the plurality of reflective light detectors; and determining the position of the substrate relative to the holding member based on the position of the portions of the substrate calculated by the calculation step.

[0023] In the substrate transport method, light is emitted from a plurality of reflective light detectors installed in the holding unit to the outer periphery of the substrate. In this case, the amount of light reflected from the outer periphery of the substrate varies depending on the position of the outer end of the substrate in the direction in which the line-shaped light-receiving surface extends. Therefore, based on the amount of light received indicated by the output signals of the plurality of first reflective light detectors, it becomes possible to calculate the positions of multiple parts of the outer end of the substrate in the direction in which the line-shaped light-receiving surface of the plurality of reflective light detectors extends. Consequently, the position of the substrate relative to the holding unit can be determined at the time the substrate is placed on the holding unit. As a result, it becomes possible to reduce the time required to determine the position of the substrate during substrate transport.

[0024] (11) Each of the plurality of reflective light detectors has a strip-shaped detection area extending upward from the holding part, and the plurality of parts may be the intersection points of the detection areas of the plurality of reflective light detectors and the outer edge of the substrate placed on the holding part when viewed in a plane. In this case, the position of the substrate can be determined based on the position of the plurality of parts of the substrate calculated.

[0025] (12) A plurality of reflective light detectors may include a first and second reflective light detector installed in a holding part so that the light receiving surfaces do not overlap each other in one direction. In this case, the positions of a plurality of parts of the substrate can be calculated with high precision based on the output signals of the first and second reflective light detectors and the positional relationship between the first and second reflective light detectors.

[0026] (13) The substrate transport method further includes a step of storing light quantity position information that represents a predetermined relationship between the amount of light received by a plurality of reflective light detectors and the position of a plurality of parts of the substrate in the holding part, and the calculation step may calculate the position of each of the plurality of parts of the substrate in the holding part based on the light quantity position information stored by the storage step in addition to the output signal of the plurality of reflective light detectors. In this case, the position of a plurality of parts of the outer edge of the substrate can be calculated with high precision based on the light quantity position information.

[0027] (14) A substrate transport method may further include the step of outputting a signal indicating the amount of light received from the light receiving meter by emitting light towards an inner part located inside the outer part of the substrate placed on the holding part using a light receiving meter installed on the holding part, and receiving light reflected from the substrate, and the step of generating light amount position information indicating a predetermined relationship between the amount of light received by a plurality of reflective light detectors and the position of a plurality of parts of the substrate in the holding part based on the output signal of the light receiving meter, and the calculation step may include calculating the position of each of the plurality of parts of the substrate in the holding part based on the light amount position information generated by the generating step in addition to the output signal of the plurality of reflective light detectors.

[0028] In this case, even if the reflectance of light on the substrate is not yet known, light quantity position information is generated based on the output signal of the light quantity meter. As a result, based on the generated light quantity position information, the positions of multiple parts of the outer edge of the substrate can be calculated with high precision.

[0029] (15) The step of placing a substrate on a holding part includes holding the lower surface of the substrate by adsorbing it with a plurality of adsorbing parts having a holding part, and the distance between the light receiving amount measuring device and one of the adsorbing parts may be smaller than the distance between each of the plurality of reflective light detectors and one of the adsorbing parts.

[0030] In this case, the light receiving meter is located near a single adsorption part relative to multiple reflective light detectors. Therefore, even if deformation such as bending occurs in the substrate, the height of the inner part of the substrate receiving light from the light receiving meter is maintained at approximately a constant height by the single adsorption part. Consequently, deviations in the conditions for generating light quantity position information are reduced. As a result, based on the appropriately generated light quantity position information, the positions of multiple parts of the outer edge of the substrate can be calculated with higher precision.

[0031] (16) The substrate transport method further includes a step of detecting the height of a plurality of parts of the substrate in the holding part, and a step of correcting the position of each of the plurality of parts of the substrate calculated by a step of calculating based on the height of the plurality of parts of the substrate detected by the step of detecting the height, and the step of determining the position of the substrate may include determining the position of the substrate relative to the holding part based on the position of the plurality of parts of the substrate after correction by the step of correcting.

[0032] The amount of light emitted from a reflective photodetector and reflected from a substrate, returning to the reflective photodetector, also changes depending on the distance between the reflective photodetector and the substrate. According to the above configuration, the height of a plurality of parts of the outer edge of the substrate is detected, and the calculation result of the position of a plurality of parts of the outer edge of the substrate is corrected based on the detected height. Accordingly, the position of a plurality of parts of the outer edge of the substrate can be acquired with higher precision.

[0033] (17) The step of outputting the amount of light received from a plurality of reflective light detectors may include emitting light toward the outer periphery of a substrate held by a holding member, and emitting light toward the outer periphery of a substrate in a position below the substrate where the substrate is not held by a holding member and the holding member is supported by a support member.

[0034] In this case, regardless of whether the substrate is in a state where it is held by the holding member or in a state where the holding member is positioned below the substrate supported by the support member, the position of the substrate in the holding member can be determined.

[0035] (18) The substrate return method may further include a step of moving the holding member so that the substrate held by the holding member is returned from a predetermined first position to a second position based on the result of the step of determining the position of the substrate.

[0036] In this case, based on the result of the determination step of determining the position of the substrate, the substrate held by the holding member can be returned from a predetermined first position to a second position with high precision. Brief explanation of the drawing

[0037] FIG. 1 is a plan view of a substrate transport device according to a first embodiment. Figure 2 is a side view of the substrate transport device of Figure 1. Figure 3 is a front view of the substrate transport device of Figure 1. FIG. 4 is a partially enlarged perspective view of a hand to explain the details of the reflective photodetector of FIG. 1. Figure 5 is a diagram showing an example of light quantity position information. FIG. 6 is a block diagram showing the configuration of the control system of a substrate transport device according to a first embodiment. FIG. 7 is a plan view showing an example of an XY coordinate system defined in a hand. FIG. 8 is a plan view showing the positional relationship between the substrate on the hand and four virtual circles when at least one of the multiple misalignments exceeds a threshold. FIG. 9 is a plan view showing the positional relationship between the substrate on the hand and four virtual circles when at least one of the multiple misalignments exceeds a threshold. FIG. 10 is a plan view showing the positional relationship between the substrate on the hand and four virtual circles when at least one of the multiple misalignments exceeds a threshold. FIG. 11 is a plan view showing the positional relationship between the substrate on the hand and four virtual circles when at least one of the multiple misalignments exceeds a threshold. FIG. 12 is a block diagram showing the functional configuration of a return control unit according to a first embodiment. FIG. 13 is a flowchart showing the basic transport operation of a substrate by a substrate transport device according to a first embodiment. FIG. 14 is a flowchart showing the basic transport operation of a substrate by a substrate transport device according to a first embodiment. FIG. 15 is a plan view of a substrate transport device according to a second embodiment. FIG. 16 is a block diagram showing the configuration of a control system of a substrate transport device according to a second embodiment. FIG. 17 is a block diagram showing the functional configuration of a return control unit according to a second embodiment. FIG. 18 is a flowchart showing part of the basic transport operation of a substrate by a substrate transport device according to a second embodiment. FIG. 19 is a plan view of a substrate transport device according to a third embodiment. FIG. 20 is a block diagram showing the configuration of a control system of a substrate transport device according to a third embodiment. FIG. 21 is a block diagram showing the functional configuration of a return control unit according to a third embodiment. FIG. 22 is a flowchart showing part of the basic transport operation of a substrate by a substrate transport device according to a third embodiment. FIG. 23 is a drawing for explaining an example of the operation of a substrate transport device when the transport control unit according to the fourth embodiment is in the second control mode. FIG. 24 is a drawing for explaining an example of the operation of a substrate transport device when the transport control unit according to the fourth embodiment is in the second control mode. FIG. 25 is a drawing for explaining an example of the operation of a substrate transport device when the transport control unit according to the fourth embodiment is in the second control mode. FIG. 26 is a drawing for explaining an example of the operation of a substrate transport device when the transport control unit according to the fourth embodiment is in the second control mode. FIG. 27 is a drawing for explaining an example of the operation of a substrate transport device when the transport control unit according to the fourth embodiment is in the second control mode. FIG. 28 is a flowchart showing the position adjustment operation of a hand by the second operation mode of a substrate transport device according to a fourth embodiment. FIG. 29 is a flowchart showing the position adjustment operation of a hand by the second operation mode of a substrate transport device according to a fourth embodiment. FIG. 30 is a schematic block diagram showing the overall configuration of a substrate processing device equipped with a substrate transport device according to any one of the first to fourth embodiments. Specific details for implementing the invention

[0038] Hereinafter, a substrate transport device and a substrate transport method according to one embodiment of the present invention will be described using drawings. In the following description, the term "substrate" refers to a substrate for a Flat Panel Display (FPD) used in a liquid crystal display device or an organic Electro Luminescence (EL) display device, a semiconductor substrate, a substrate for an optical disc, a substrate for a magnetic disc, a substrate for an optical magnetic disc, a substrate for a photomask, a ceramic substrate, or a substrate for a solar cell, etc.

[0039] In addition, the substrate used in the embodiments described below has at least a portion of a circular outer edge. Specifically, a positioning notch is formed in the substrate, and the outer edge of the substrate excluding the notch has a circular shape. Furthermore, an orientation flat may be formed in the substrate instead of the notch.

[0040] 1. First embodiment

[0041] [1] Configuration of a substrate transport device according to the first embodiment

[0042] FIG. 1 is a plan view of a substrate transport device according to a first embodiment, FIG. 2 is a side view of the substrate transport device (500) of FIG. 1, and FIG. 3 is a front view of the substrate transport device (500) of FIG. 1. The substrate transport device (500) shown in FIG. 1 to 3 includes a moving member (510) ( FIG. 2 and FIG. 3), a rotating member (520), two hands (H1, H2), and a plurality of reflective light detectors (SA1, SA2, SA3, SA4, SA5) ( FIG. 1). In this embodiment, five reflective light detectors (SA1 to SA5) are installed on each of the two hands (H1, H2). The moving member (510) is configured to be movable in a horizontal direction along a guide rail (not shown).

[0043] On the moving member (510), a rotating member (520) having a roughly rectangular shape is installed so as to be rotatable around an axis in the vertical direction. Support members (521, 522) are installed on the rotating member (520). The support members (521, 522) each support the hands (H1, H2). The hands (H1, H2) are supported by the support members (521, 522) and are made to move back and forth in the longitudinal direction of the rotating member (520). In this embodiment, the hand (H2) is positioned above the upper surface of the rotating member (520), and the hand (H1) is positioned above the hand (H2). In the following description, as indicated by the arrows in FIGS. 1 to 3, the direction in which the hands (H1, H2) can move back and forth relative to the rotating member (520) is referred to as the forward / backward direction (AB). In this embodiment, the direction in which the arrows of FIGS. 1 to 3 point is directed is considered the front, and the opposite direction is considered the rear.

[0044] Each of the hands (H1, H2) consists of a guide portion (Ha) and an arm portion (Hb). As shown in FIG. 1, the guide portion (Ha) has a roughly U-shaped flat plate, and the arm portion (Hb) has a rectangular flat plate shape extending in one direction. The guide portion (Ha) is installed to split into two parts from one end of the arm portion (Hb).

[0045] On the upper surface of the guide section (Ha), a plurality of adsorption sections (sm) (three in this example) are each installed in a plurality of spaced-apart sections (three in this example). Each adsorption section (sm) is connected to an intake system (not shown). A substrate (W) is placed on the plurality of adsorption sections (sm). In this state, the lower surface of the substrate (W) on the plurality of adsorption sections (sm) is adsorbed to the plurality of adsorption sections (sm) by the intake system. In FIGS. 1 to 3, the substrate (W) in a state of being adsorbed and maintained in an ideal positional relationship by each hand (H1, H2) is shown by a dotted line.

[0046] The reflective photodetectors (SA1 to SA5) basically have a common configuration. Each reflective photodetector (SA1 to SA5) is distributed on a guide portion (Ha) such that, when viewed from a plane, a portion of the reflective photodetector overlaps with the outer edge of the substrate (W) held by each hand (H1, H2).

[0047] More specifically, reflective light detectors (SA1 to SA4) are arranged to overlap the outer edges of the substrate (W) at intervals of approximately 90° relative to the center of the substrate (W) held by the hands (H1, H2), as shown in FIG. 1. Meanwhile, a reflective light detector (SA5) is arranged near the reflective light detector (SA4). The distance between the reflective light detectors (SA4, SA5) is smaller than the diameter of the substrate (W) and larger than the length of the notch in the circumferential direction of the substrate (W). In addition, the diameter of the substrate (W) according to the present embodiment is, for example, 300 mm, and the circumferential length of the notch of the substrate (W) is, for example, 2.73 mm. The height of the upper portions of the plurality of reflective light detectors (SA1~SA5) mounted on the hands (H1, H2) is lower than the height of the upper portions of the plurality of adsorption parts (sm) mounted on the hands (H1, H2). Therefore, while the substrate (W) is held by each hand (H1, H2), the upper portions of the reflective light detectors (SA1~SA5) installed on the hands are spaced apart from the lower surface of the substrate (W).

[0048] Each reflective light detector (SA1 to SA5) emits line-shaped light toward a detection area and receives return light from the detection area, and outputs a signal according to the amount of light received. In this embodiment, each reflective light detector (SA1 to SA5) is a so-called fiber sensor and is mainly composed of a main body, an optical fiber, and a fiber unit. The main body includes a light source and a light receiving element. The fiber unit includes one or more optical systems (such as lenses) and has an emission surface for emitting light and a light receiving surface for receiving light. The optical fiber connects the main body and the fiber unit.

[0049] In a fiber sensor, light generated from a light source in the main body is guided to a fiber unit through an optical fiber. In the fiber unit, the light guided through the optical fiber is shaped into a line-shaped light through an optical system and emitted from the output surface to the detection area. The light reflected from the detection area is incident on the light-receiving surface as return light and is guided to a light-receiving element in the main body through an optical system and an optical fiber. The light-receiving element receives the light guided from the optical fiber and outputs a signal corresponding to the amount of light received.

[0050] In this way, when each reflective light detector (SA1 to SA5) is configured as a fiber sensor, only a fiber unit is mounted on the guide portion (Ha) of each hand (H1, H2). Additionally, a main body is mounted on a member different from the arm portion (Hb) or the hand (H1, H2). Then, the fiber unit and the main body are connected by an optical fiber. Therefore, in FIGS. 1 to 3, the reflective light detectors (SA1 to SA5) appearing on each hand (H1, H2) represent fiber units among fiber sensors. Furthermore, each reflective light detector (SA1 to SA5) may have a configuration in which a light source, a light receiving element, and an optical system are housed within a single casing. In this case, the emission surface and the light receiving surface are integrally installed in a single casing.

[0051] Reflective light detectors (SA1 to SA5) are used to calculate the positions of multiple parts of the outer edge of the substrate (W) on the hand (H1, H2) while the substrate (W) is held on the hand (H1, H2). A method for calculating the positions of multiple parts of the outer edge of the substrate (W) by the reflective light detectors (SA4, SA5) will be described, representing the reflective light detectors (SA1 to SA5).

[0052] FIG. 4 is a partially enlarged perspective view of a hand (H1) to explain the details of the reflective light detectors (SA4, SA5) of FIG. 1. As shown in FIG. 4, each reflective light detector (SA4, SA5) has an upwardly oriented light passage surface (ss) that extends in one direction, and is mounted on the upper surface of a guide part (Ha) such that the direction in which the light passage surface (ss) extends is parallel to the forward / backward direction (AB). The light passage surface (ss) functions as the above-mentioned light emission surface and light reception surface. In this state, the reflective light detectors (SA4, SA5) each have a band-shaped detection area (df4, df5) that extends upward from the light passage surface (ss).

[0053] In the hand (H1) according to the present embodiment, the substrate (W) is adsorbed and held on the hand (H1) by a plurality of adsorption parts (sm), so that a portion of the light passage surface (ss) of each reflective light detector (SA4, SA5) faces the outer periphery of the substrate (W) at a predetermined distance. In FIG. 4, the substrate (W) held by the hand (H1) appears as a dot pattern. In this state, as indicated by the dotted arrow in FIG. 4, a line-shaped light is emitted upward from the light passage surface (ss) of the reflective light detector (SA4, SA5).

[0054] In this case, light emitted from the portion of each light-passing surface (ss) facing the substrate (W) is reflected from the lower surface of the substrate (W) and incident on the said light-passing surface (ss) as indicated by the thick solid arrow in FIG. 4. Meanwhile, light emitted from the portion of each light-passing surface (ss) not facing the substrate (W) passes through the side of the substrate (W). Therefore, light is not incident on the portion of each light-passing surface (ss) not facing the substrate (W).

[0055] Here, it is assumed that the position of the reflective light detectors (SA4, SA5) in the hand (H1) is already known, and the approximate positional relationship between the reflective light detectors (SA4, SA5) and the substrate (W) in the forward / backward direction (AB) is already known. In this case, it becomes possible to calculate the position of the hand (H1) in the forward / backward direction (AB) of the part located in each detection area (df4, df5) among the outer edges of the substrate (W) based on the output signal of each reflective light detector (SA4, SA5). Furthermore, the approximate positional relationship between the reflective light detectors (SA4, SA5) and the substrate (W) means, for example, whether the reflective light detectors (SA4, SA5) are located in the forward or backward direction in the forward / backward direction (AB) with respect to the center of the substrate (W) while the substrate (W) is held by the hand (H1). In addition, the part located at each detection area (df4, df5) among the outer ends of the above substrate (W) means the intersection point of the detection area (df4, df5) of each reflective light detector (SA4, SA5) and the outer end of the substrate (W) held on the hand (H1) when viewed from a plane.

[0056] However, the reflectance of light emitted from the light-passing surface (ss) and reflected from the lower surface of the substrate (W) varies depending on the type of substrate (W). Therefore, in this embodiment, for each reflective light detector (SA1 to SA5), light quantity position information is used to indicate a predetermined relationship between the amount of light received by the reflective light detector and the position of the outer edge of the substrate (W) to which the light is irradiated. The light quantity position information is stored in the transport control unit (550) (Fig. 6) described later.

[0057] FIG. 5 is a diagram showing an example of light quantity position information. The light quantity position information of FIG. 5 represents the relationship between the amount of light received by the reflective light detector (SA4) of FIG. 4 and the position of the outer edge of the substrate (W) detected by the reflective light detector (SA4). In FIG. 5, the light quantity position information corresponding to the reflective light detector (SA4) is shown by a graph. In the graph of FIG. 5, the vertical axis represents the amount of light received by the reflective light detector (SA4), and the horizontal axis represents the position in the forward / backward direction (AB) of the hand (H1). The amount of light received, indicated by α on the vertical axis, is, for example, the amount of light received when all the light emitted from the reflective light detector (SA4) and reflected by the substrate (W) returns (hereinafter referred to as the maximum amount of light received), and is determined based on the reflectance of the substrate (W).

[0058] As shown in the graph of FIG. 5 and in the speech bubble corresponding to position P1, when the portion of the substrate (W) located on the reflective light detector (SA4) crosses the entire detection area (df4), the amount of light received is maintained at the maximum amount of light received (α). On the other hand, as shown in the graph of FIG. 5 and in the speech bubble corresponding to position P2, when the portion of the substrate (W) located on the reflective light detector (SA4) crosses a part (the latter part) of the detection area (df4), the amount of light received shows a value lower than the maximum amount of light received (α). On the other hand, as shown in the graph of FIG. 5 and in the speech bubble corresponding to position P3, when the portion of the substrate (W) located on the reflective light detector (SA4) does not cross the detection area (df4), the amount of light received is 0.

[0059] As a result, according to the light quantity position information of FIG. 5, a part of the outer edge of the substrate (W) is located within the detection area (df4) of the reflective light detector (SA4), thereby making it possible to calculate the position of the hand (H1) with respect to a part of the outer edge of the substrate (W). The light position detection information of FIG. 5 can be generated, for example, by an experiment or simulation.

[0060] According to the above configuration, at the point where the substrate (W) is held by each hand (H1, H2), the positions of multiple parts of the outer edge of the substrate (W) at the hand can be calculated by multiple reflective light detectors (SA1~SA5) without moving the hand.

[0061] For each hand (H1, H2), a reference position (hereinafter referred to as the reference position) where the center of the retained substrate (W) is to be located is predetermined. The reference position for each hand (H1, H2) is, for example, the center position of three adsorption parts (sm).

[0062] If the positions of five parts of the outer edge of the substrate (W) held by each hand (H1, H2) can be calculated, the position of the substrate (W) in the said hand can be determined. As a result, it is possible to calculate how much the center of the substrate (W) actually held by each hand (H1, H2) is deviated from the reference position.

[0063] [2] Configuration of the control system of the substrate transport device (500)

[0064] FIG. 6 is a block diagram showing the configuration of a control system of a substrate transport device (500) according to a first embodiment. As shown in FIG. 6, the substrate transport device (500) includes an up-and-down direction drive motor (511), an up-and-down direction encoder (512), a horizontal direction drive motor (513), a horizontal direction encoder (514), a rotational direction drive motor (515), a rotational direction encoder (516), an upper hand retraction drive motor (525), an upper hand encoder (526), ​​a lower hand retraction drive motor (527), a lower hand encoder (528), a plurality of reflective light detectors (SA1 to SA5), a transport control unit (550), and an operation unit (529). Additionally, the plurality of reflective light detectors (SA1 to SA5) are installed to correspond to each of the hands (H1, H2).

[0065] The up-and-down driving motor (511) moves the moving member (510) (Fig. 2) in the up-and-down direction under the control of the return control unit (550). The up-and-down encoder (512) outputs a signal indicating the rotation angle of the up-and-down driving motor (511) to the return control unit (550). As a result, the return control unit (550) can detect the up-and-down position of the moving member (510).

[0067] The horizontal direction drive motor (513) moves the moving member (510) (Fig. 2) in a horizontal direction under the control of the conveying control unit (550). The horizontal direction encoder (514) outputs a signal indicating the rotation angle of the horizontal direction drive motor (513) to the conveying control unit (550). As a result, the conveying control unit (550) can detect the horizontal position of the moving member (510).

[0068] The rotational direction drive motor (515) rotates the rotating member (520) (Fig. 1) around an up-and-down axis under the control of the conveying control unit (550). The rotational direction encoder (516) outputs a signal indicating the rotation angle of the rotational direction drive motor (515) to the conveying control unit (550). As a result, the conveying control unit (550) can detect the direction of the rotating member (520) within the horizontal plane.

[0069] The upper hand reciprocating drive motor (525) moves the hand (H1) (Fig. 1) in a horizontal direction on the rotating member (520) under the control of the conveying control unit (550). The upper hand encoder (526) outputs a signal indicating the rotation angle of the upper hand reciprocating drive motor (525) to the conveying control unit (550). As a result, the conveying control unit (550) can detect the position of the hand (H1) on the rotating member (520).

[0070] The lower hand reciprocating drive motor (527) moves the hand (H2) (Fig. 2) in a horizontal direction on the rotating member (520) under the control of the conveying control unit (550). The lower hand encoder (528) outputs a signal indicating the rotation angle of the lower hand reciprocating drive motor (527) to the conveying control unit (550). As a result, the conveying control unit (550) can detect the position of the hand (H2) on the rotating member (520).

[0071] Reflective light detectors (SA1 to SA5) emit line-shaped light upward from the light passage surface (ss) (Fig. 4) under the control of the transport control unit (550). The signal output from the reflective light detectors (SA1 to SA5) is given to the transport control unit (550). Accordingly, the transport control unit (550) calculates the positions of multiple parts of the outer edge of the substrate (W) in the hand (H1) based on the output signal of the reflective light detectors (SA1 to SA5) installed in the hand (H1) and the previously stored light quantity position information. Likewise, the transport control unit (550) calculates the positions of multiple parts of the outer edge of the substrate (W) in the hand (H2) based on the output signal of the reflective light detectors (SA1 to SA5) installed in the hand (H2) and the previously stored light quantity position information.

[0072] An operating unit (529) is connected to the return control unit (550). By operating the operating unit (529), the user can provide various commands and information to the return control unit (550).

[0073] [3] Determination of the position of the substrate (W) in the hands (H1, H2)

[0074] For each of the above hands (H1, H2), an XY coordinate system having an X-axis and a Y-axis is defined. The X-axis and the Y-axis are located within a horizontal plane parallel to the substrate (W) held by each hand (H1, H2) and are orthogonal to the reference position of each hand (H1, H2). Therefore, the reference position becomes the origin (O). In this example, the Y-axis is defined parallel to the forward and backward direction of each hand (H1, H2).

[0075] FIG. 7 is a plan view showing an example of an XY coordinate system defined in a hand (H1). In FIG. 7, the X-axis and Y-axis of the XY coordinate system defined in the hand (H1) are shown as dashed lines. Also, the reference position is shown as the origin (O). Additionally, the substrate (W) held by the hand (H1) is shown as a solid line. In the example of FIG. 7, the center position of the substrate (W) held by the hand (H1) is assumed to be at the origin (O).

[0076] In the substrate transport device (500), the positions of five parts p1 to p5 of the outer circumference end of the substrate (W) in the hand (H1) are each calculated by the reflective light detectors (SA1 to SA5). Based on the calculated positions of parts p1 to p5, the position of the substrate (W) in the hand (H1) is determined. Similarly, five parts p1 to p5 of the substrate (W) in the hand (H2) are calculated by the reflective light detectors (SA1 to SA5), and the position of the substrate (W) in the hand (H2) is determined based on the calculated positions of parts p1 to p5. Based on the determined position of the substrate (W), the above-determined up-down driving motor (511), horizontal driving motor (513), rotational driving motor (515), upper hand retraction driving motor (525), and lower hand retraction driving motor (527) are controlled. A method for determining the position of the substrate (W) in the hand (H1) is explained.

[0077] First, for example, while the substrate (W) is adsorbed and held on the hand (H1), a line-shaped light is emitted from the light-passing surface (ss) (Fig. 4) of the reflective light detectors (SA1 to SA5) toward the outer periphery of the substrate (W). A portion of each emitted light is reflected by the lower surface of the substrate (W) and incident on the light-passing surface (ss). At this time, based on the signal output from the reflective light detectors (SA1 to SA5) and the light quantity position information corresponding to each of the reflective light detectors (SA1 to SA5), the positions of the five parts p1 to p5 of the substrate (W) on the hand (H1) are each calculated.

[0078] Next, four virtual circles passing through the positions of three distinct parts among parts p1, p2, p3, and p4 in the XY coordinate system are calculated, and the center positions of each of the four virtual circles are calculated. In addition, multiple misalignments between the four center positions are calculated.

[0079] In the following description, a virtual circle passing through parts p1, p2, and p3 is called virtual circle cr1, a virtual circle passing through parts p2, p3, and p4 is called virtual circle cr2, a virtual circle passing through parts p1, p3, and p4 is called virtual circle cr3, and a virtual circle passing through parts p1, p2, and p4 is called virtual circle cr4. Also, the center positions of each of the virtual circles (cr1, cr2, cr3, cr4) in the hand (H1) are set to vp1, vp2, vp3, and vp4. As shown by the dotted line in FIG. 7, when the multiple misalignments between the center positions (vp1~vp4) are all zero, the four center positions (vp1~vp4) coincide with the center position (C) of the substrate (W) in the hand (H1). In addition, even if at least one of the multiple misalignments does not become zero, if the multiple misalignments between the four center positions (vp1 to vp4) are all below a predetermined threshold, the four center positions (vp1 to vp4) almost coincide with the center position (C) of the substrate (W) in the hand (H1). Here, the threshold is determined, for example, as the allowable error between the actual position of the reflective photodetectors (SA1 to SA4) in the hand (H1) and the design installation position (design position).

[0080] In this way, when the multiple misalignments are all below the threshold, there is no notch (N) in any of the parts p1 to p4 of the substrate (W) detected by the reflective photodetectors (SA1 to SA4). Therefore, since all four virtual circles (cr1 to cr4) represent the position of the substrate (W) in the hand (H1), the position of the substrate (W) in the hand (H1) can be determined based on any one or all of the four virtual circles (cr1 to cr4).

[0081] FIGS. 8 to 11 are plan views showing the positional relationships between a substrate (W) on a hand (H1) and four virtual circles (cr1 to cr4), respectively, when at least one of the multiple misalignment amounts exceeds a threshold. Additionally, the hand (H1) is omitted in FIGS. 8 to 11. FIG. 8 shows the positional relationship between the substrate (W) and the virtual circle (cr1), FIG. 9 shows the positional relationship between the substrate (W) and the virtual circle (cr2). FIG. 10 shows the positional relationship between the substrate (W) and the virtual circle (cr3), and FIG. 11 shows the positional relationship between the substrate (W) and the virtual circle (cr4).

[0082] If at least one of the multiple misalignments exceeds a threshold, only one of the four center positions (vp1 to vp4) (in this example, the center position (vp1) of the virtual circle (cr1)) coincides with or nearly coincides with the center position (C) of the substrate (W) in the hand (H1) (Fig. 8). Meanwhile, the remaining three center positions (in this example, the center positions (vp2, vp3, vp4) of the virtual circles (cr2, cr3, cr4)) deviate from the center position (C) of the substrate (W) in the hand (H1) by a value greater than a certain value (Figs. 9, 10 and 11).

[0083] In this way, when at least one of the multiple deviation amounts exceeds the threshold, a notch (N) exists in any one of parts p1 to p4 of the substrate (W) detected by the reflective photodetectors (SA1 to SA4) (part p4 in this example).

[0084] Here, as described above, the distance between the reflective photodetectors (SA4, SA5) is smaller than the diameter of the substrate (W) and larger than the length of the notch (N) in the circumferential direction of the substrate (W). In this case, part p5 is separated from other parts p1 to p4 by at least the circumferential length of the notch (N). Therefore, the notch (N) does not exist in part p5 of the substrate (W) detected by the reflective photodetector (SA5). Accordingly, the virtual circle representing the position of the substrate (W) in the hand (H1, H2) passes through the position of part p5. Thus, by selecting the virtual circle that passes through the position of part p5 among the four virtual circles (cr1 to cr4), the position of the substrate (W) in the hand (H1) can be determined based on the selected virtual circle.

[0085] [4] Functional configuration of the return control unit (550)

[0086] FIG. 12 is a block diagram showing the functional configuration of a transport control unit (550) according to a first embodiment. The transport control unit (550) includes a partial position calculation unit (51), a virtual circle calculation unit (52), a substrate position determination unit (53), a detector position memory unit (54), a threshold memory unit (55), a movement control unit (58), a coordinate information memory unit (59), a coordinate information correction unit (60), and a light quantity position information memory unit (81). The transport control unit (550) is composed of a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read-Only Memory), and a memory device. By executing a computer program stored in a memory medium such as a ROM or a memory device, the function of each component of the transport control unit (550) is realized. Additionally, some or all components of the transport control unit (550) may be realized by hardware such as electronic circuits.

[0087] Here, the substrate transport device (500) receives and transports a substrate (W) located at a predetermined position of one processing unit (hereinafter referred to as the receiving position), and places the substrate (W) at a predetermined position of another processing unit (hereinafter referred to as the placement position). The receiving position and the placement position are indicated by coordinates in a fixed coordinate system for the entire substrate transport device (500). The coordinates of the receiving position are called the receiving coordinates, and the coordinates of the placement position are called the placement coordinates.

[0088] The coordinate information storage unit (59) stores the receiving coordinates of the receiving position and the placement coordinates of the placement position in advance as coordinate information. The movement control unit (58) controls the vertical driving motor (511), horizontal driving motor (513), and rotational driving motor (515) of FIG. 6 to receive the substrate (W) from the receiving position based on the coordinate information (receiving coordinates) stored in the coordinate information storage unit (59), and also controls the upper hand reciprocating driving motor (525) or the lower hand reciprocating driving motor (527). At this time, the hand (H1 or H2) moves back and forth on the rotating member (520).

[0089] The detector position memory unit (54) stores the design positions of a plurality of reflective light detectors (SA1 to SA5) on each hand (H1, H2) as detector information. The light quantity position information memory unit (81) stores light quantity position information corresponding to each of the plurality of reflective light detectors (SA1 to SA5). The partial position calculation unit (51) calculates the positions of a plurality of parts p1 to p5 of the substrate (W) in the hand (H1 or H2) based on the output signals of the plurality of reflective light detectors (SA1 to SA5), the detector information stored in the detector position memory unit (54), and the light quantity position information stored in the light quantity position information memory unit (81).

[0090] The virtual circle calculation unit (52) calculates four virtual circles (cr1~cr4) (Figs. 7~11) respectively from the positions of parts p1~p4 calculated by the part position calculation unit (51). In addition, the virtual circle calculation unit (52) calculates the center positions (vp1~vp4) (Figs. 7~11) of each of the calculated virtual circles (cr1~cr4).

[0091] The threshold memory unit (55) stores the above threshold. The substrate position determination unit (53) calculates a plurality of misalignment amounts between a plurality of center positions (vp1 to vp4) calculated by the virtual circle calculation unit (52). Additionally, the substrate position determination unit (53) determines whether all of the plurality of misalignment amounts are less than or equal to the threshold stored in the threshold memory unit (55).

[0092] The substrate position determination unit (53) determines the position of the substrate (W) in the hand (H1 or H2) based on one or all of the four virtual circles (cr1 to cr4) when all of the multiple misalignments are below the threshold. Meanwhile, the substrate position determination unit (53) selects a virtual circle among the four virtual circles (cr1 to cr4) that passes through the position of part p5 calculated by the part position calculation unit (51) when at least one of the above multiple misalignments exceeds the threshold. In addition, the substrate position determination unit (53) determines the position of the substrate (W) in the hand (H1 or H2) based on the selected virtual circle.

[0093] The coordinate information correction unit (60) calculates the misalignment of the center position (C) of the substrate (W) relative to the reference position of the hand (H1 or H2) based on the position of the substrate (W) in the hand (H1 or H2) determined by the substrate position determination unit (53). Additionally, the coordinate information correction unit (60) corrects the coordinate information (placement coordinates) stored in the coordinate information storage unit (59) based on the calculated misalignment. The movement control unit (58) controls the vertical direction drive motor (511), horizontal direction drive motor (513), and rotational direction drive motor (515) of FIG. 6 to place the substrate (W) received from the receiving position at the placement position based on the coordinate information (placement coordinates) stored in the coordinate information storage unit (59) and also corrected, and also controls the upper hand reciprocating drive motor (525) or the lower hand reciprocating drive motor (527). At this time, the hand (H1 or H2) moves back and forth on the rotating member (520).

[0094] [5] Operation of the substrate return device (500)

[0095] FIGS. 13 and 14 are flowcharts illustrating the basic transport operation of a substrate (W) by a substrate transport device (500) according to the first embodiment. Hereinafter, the transport operation of the substrate (W) using a hand (H1) will be described. In the initial state, the hand (H1) is located at the rearmost position on the rotating member (520). Also, the substrate (W) is not held by the hand (H1) in the initial state.

[0096] The movement control unit (58) of FIG. 12 moves the hand (H1) to the vicinity of the receiving position based on the coordinate information (receiving coordinates) stored in the coordinate information storage unit (59) (step S1), and advances the hand (H1) to receive the substrate (W) at the receiving position (step S2). Thus, the partial position calculation unit (51) reads the detector information and the light quantity position information from the detector position storage unit (54) and the light quantity position information storage unit (81) (step S3).

[0097] Next, the partial position calculation unit (51) emits light from the reflective light detectors (SA1~SA5) toward the outer periphery of the substrate (W), and calculates the position of the hands (H1) of a plurality of parts p1~p5 of the outer periphery end of the substrate (W) based on the output signal of the reflective light detectors (SA1~SA5), detector information, and light amount position information (step S4).

[0098] The virtual circle calculation unit (52) calculates four virtual circles (cr1~cr4) that pass through three different parts among the positions of parts p1~p4 of the calculated substrate (W), and also calculates the center positions (vp1~vp4) of the virtual circles (cr1~cr4) respectively (step S5).

[0099] Next, the substrate position determination unit (53) calculates a plurality of misalignment amounts between the calculated plurality of center positions (vp1 to vp4) (step S6), and determines whether all of the calculated plurality of misalignment amounts are below the threshold stored in the threshold memory unit (55) (step S7).

[0100] When all of the multiple misalignments are below the threshold, the substrate position determination unit (53) determines the position of the substrate (W) in the hand (H1) based on any one or all of the four virtual circles (cr1~cr4) (step S8).

[0101] Next, the coordinate information correction unit (60) calculates the misalignment of the center position (C) of the substrate (W) relative to the reference position based on the determined position of the substrate (W), and corrects the coordinate information (placement coordinates) stored in the coordinate information storage unit (59) so that the misalignment between the position of the substrate (W) to be placed by the hand (H1) and the placement position is offset based on the calculation result (step S9).

[0102] After that, the movement control unit (58) initiates the return control of the hand (H1) to return the substrate (W) to the return position based on the corrected coordinate information (return coordinates) (step S10), and returns the substrate (W) held by the hand (H1) to the return position (step S11). As a result, it becomes possible to accurately return the substrate (W) to the return position regardless of the position of the substrate (W) in the hand (H1).

[0103] In step S7 above, if at least one of the multiple misalignments exceeds a threshold, the substrate position determination unit (53) selects one virtual circle passing through the position of part p5 among the four virtual circles (cr1~cr4) (step S12). Then, the substrate position determination unit (53) determines the position of the substrate (W) in the hand (H1) based on the selected virtual circle (step S13) and proceeds to step S9.

[0104] Additionally, in the above return operation, the processing of step S3 may be performed before step S2 or step S1. Also, in the above return operation, the operations of steps S12 and S13 may be performed instead of the operations of steps S7 and S8. In this case, it is not necessary to set a threshold regarding the amount of deviation.

[0106] In addition, if the center of the substrate (W) held on each hand (H1, H2) is located at a position significantly deviated from the reference position, there is a possibility that the outer edge of the substrate (W) is not located on the detection area (df1~df5) of the plurality of reflective light detectors (SA1~SA5). In this case, even if light quantity position information is used, the accurate position for the plurality of parts p1~p5 of the outer edge of the substrate (W) cannot be calculated. Therefore, in step S4, the part position calculation unit (51) may stop the transport operation when the output signal of at least one of the plurality of reflective light detectors (SA1~SA5) indicates "light quantity received = 0" or "light quantity received = maximum light quantity received (α)". In addition, in this case, the partial position calculation unit (51) may output an alarm signal to an external device of the substrate transport device (500) indicating that there is an abnormality in the holding state of the substrate (W) by each hand (H1, H2).

[0107] [6] Effect of the first embodiment

[0108] (1) In the above-described substrate transport device (500), a plurality of reflective light detectors (SA1 to SA5) installed in each of the hands (H1, H2) emit a line-shaped light to the outer periphery of the substrate (W). In this case, the amount of light reflected from the outer periphery of the substrate (W) changes according to the position of the outer end of the substrate (W) in the direction in which the line-shaped light passing surface (ss) extends (advance / retreat direction (AB)).

[0109] The output signals of the plurality of reflective light detectors (SA1 to SA5) represent the amount of light received incident on the light-passing surface (ss). Therefore, based on these amounts of light received, it becomes possible to calculate the positions of multiple parts p1 to p5 of the outer edge of the substrate (W) in the direction in which the light-passing surfaces (ss) of the plurality of reflective light detectors (SA1 to SA5) extend. Consequently, operations such as moving the hands (H1, H2) to a specific position are unnecessary to calculate the position of the substrate (W) held by the hands (H1, H2). Thus, the position of the substrate (W) relative to the hands (H1, H2) can be determined at the moment the substrate (W) is placed on the hands (H1, H2). As a result, it becomes possible to reduce the time required to determine the position of the substrate (W). In addition, based on the position determination result of the substrate (W), the substrate (W) held by the hands (H1, H2) can be returned to the placement position with high precision.

[0110] (2) Multiple reflective light detectors (SA1 to SA5) are extended parallel to each other in the forward / backward direction (AB). Also, among the multiple reflective light detectors (SA1 to SA5), reflective light detectors SA1 and SA2 and reflective light detectors SA3 and SA4 are arranged so as not to overlap each other in the forward / backward direction (AB). In particular, the above reflective light detectors (SA1 to SA4) are arranged to be located in each of the four regions divided by the X-axis and Y-axis defined on the hands (H1, H2). According to this arrangement, compared to the case where the reflective light detectors (SA1 to SA4) are concentrated in one or three of the four regions divided by the X-axis and Y-axis, multiple parts p1 to p4 of the substrate (W) to be detected are more uniformly distributed on the outer edge of the substrate (W). Accordingly, based on the light quantity position information, multiple parts p1 to p4 of the outer edge of the substrate (W) can be calculated with high precision.

[0111] 2. Second embodiment

[0112] Regarding the substrate transport device (500) according to the second embodiment, differences from the substrate transport device (500) according to the first embodiment are explained. FIG. 15 is a plan view of the substrate transport device (500) according to the second embodiment.

[0113] As shown in FIG. 15, the substrate transport device (500) according to the second embodiment has, in addition to the configuration of the substrate transport device (500) according to the first embodiment, a reflective light detector (SB1) is further installed on the hands (H1, H2). The reflective light detector (SB1) is a fiber sensor having basically the same configuration as the reflective light detectors (SA1~SA5) and is positioned near one of the adsorption parts (sm) of the plurality of adsorption parts (sm).

[0114] In the substrate transport device (500), the type of substrate (W) held by the hands (H1, H2) is not limited to one. The reflectance of the substrate (W) for light emitted from the reflective light detectors (SA1~SA5) varies depending on the type of substrate. As described in the first embodiment, the value of the maximum light receiving amount (α) of the light amount position information corresponding to each of the reflective light detectors (SA1~SA5) is determined based on the reflectance of the substrate (W). Therefore, if the design position of each reflective light detector (SA1~SA5) and the reflectance of the substrate (W) are known, it becomes possible to generate light amount position information corresponding to each of the reflective light detectors (SA1~SA5) for each substrate (W) held by the hands (H1, H2). That is, there is no need to store multiple light amount position information in advance in the light amount position information storage unit (81) of FIG. 12.

[0115] Therefore, in the substrate transport device (500) according to the present embodiment, a reflective light detector (SB1) is used to determine the reflectance of the substrate (W). For example, the reflective light detector (SB1) installed on the hand (H1) emits a line-shaped light toward the inner part of the substrate (W) held on the hand (H1) rather than the outer part, so as to follow the detection area (df11). In the following description, the part of the substrate (W) that receives the light emitted from the reflective light detector (SB1) is referred to as the inner part p10.

[0116] In this case, all light emitted from the light-passing surface (ss) of the reflective light detector (SB1) and reflected by the substrate (W) is reflected from the inner part p10 and incident on the light-passing surface (ss). At this time, the reflectance of the substrate (W) is calculated based on the amount of light emitted from the light-passing surface (ss) and the output signal of the reflective light detector (SB1). In addition, light amount position information corresponding to each of the reflective light detectors (SA1~SA5) of the hand (H1) is generated based on the calculated reflectance of the substrate (W) and detector information (design position of the reflective light detectors (SA1~SA5)).

[0117] A reflective light detector (SB1) (not shown) installed on the hand (H2), like the reflective light detector (SB1) installed on the hand (H1), emits line-shaped light toward the inner part rather than the outer part of the substrate (W) held on the hand (H2). As a result, light quantity position information corresponding to each of the reflective light detectors (SA1~SA5) of the hand (H2) is generated by the same method as in the example above.

[0118] FIG. 16 is a block diagram showing the configuration of a control system of a substrate transport device (500) according to a second embodiment. As shown in FIG. 16, the substrate transport device (500) according to the second embodiment includes, in addition to the configuration of the substrate transport device (500) of FIG. 6 according to the first embodiment, a reflective light detector (SB1) installed on each of the hands (H1, H2). The reflective light detector (SB1) emits a line-shaped light upward from the light passage surface (ss) under the control of the transport control unit (550). The signal output from the reflective light detector (SB1) is given to the transport control unit (550).

[0119] FIG. 17 is a block diagram showing the functional configuration of a return control unit (550) according to a second embodiment. The return control unit (550) according to this embodiment is equipped with a light quantity position information generating unit (82) in place of the light quantity position information memory unit (81) in the configuration of the return control unit (550) of FIG. 12 according to a first embodiment.

[0120] The light quantity position information generation unit (82) generates light quantity position information corresponding to each of the reflective light detectors (SA1~SA5) of the hand (H1) based on the output signal of the reflective light detector (SB1) of the hand (H1), the output signal of the reflective light detector (SB1), and the detector information stored in the detector position memory unit (54). Additionally, the light quantity position information generation unit (82) generates light quantity position information corresponding to each of the reflective light detectors (SA1~SA5) of the hand (H2) based on the light quantity of light output from the reflective light detector (SB1) of the hand (H2), the output signal of the reflective light detector (SB1), and the detector information stored in the detector position memory unit (54).

[0121] Accordingly, the partial position calculation unit (51) calculates the positions of multiple parts p1 to p5 of the substrate (W) in the hand (H1 or H2) based on the output signals of multiple reflective light detectors (SA1 to SA5), detector information stored in the detector position memory unit (54), and light quantity position information generated by the light quantity position information generation unit (82).

[0122] FIG. 18 is a flowchart showing part of the basic transport operation of a substrate (W) by a substrate transport device (500) according to a second embodiment. In the transport operation of the substrate (W) according to this embodiment, after the same operation as steps S1 and S2 of FIG. 12 according to the first embodiment is performed, the light quantity position information generating unit (82) generates light quantity position information using a reflective light detector (SB1) (step S31). Then, the operation of steps S4 to S13 of FIG. 12 and FIG. 13 is performed, just like in the first embodiment.

[0123] In the substrate transport device (500) according to the present embodiment, even when the reflectance of light for the substrate (W) is not yet known and light quantity position information does not exist, light quantity position information corresponding to each of the reflective light detectors (SA1~SA5) is generated based on the output signal of the reflective light detector (SB1). Accordingly, based on the generated light quantity position information, the positions of multiple parts p1~p5 of the outer edge of the substrate (W) can be calculated with high precision.

[0124] The reflective light detector (SB1) is located near one adsorption part (sm) compared to the reflective light detectors (SA1~SA5). While each adsorption part (sm) maintains adsorption on the lower surface of the substrate (W), the height of the inner part p10 of the substrate (W) located near the adsorption part (sm) is maintained at approximately a constant height by the adsorption part (sm). Accordingly, the deviation of the conditions for calculating the reflectance of the substrate (W), that is, the conditions for generating light quantity position information, is reduced, making it possible to generate light quantity position information appropriately. As a result, based on the appropriately generated light quantity position information, the positions of multiple parts of the outer edge of the substrate can be calculated with higher precision.

[0125] 3. Third embodiment

[0126] Regarding the substrate transport device (500) according to the third embodiment, differences from the substrate transport device (500) according to the second embodiment are explained. FIG. 19 is a plan view of the substrate transport device (500) according to the third embodiment.

[0127] As shown in FIG. 19, the substrate transport device (500) according to the third embodiment has, in addition to the configuration of the substrate transport device (500) according to the second embodiment, additionally installed reflective light detectors (SC1~SC4) on the hands (H1, H2). The reflective light detectors (SC1~SC4) are fiber sensors having basically the same configuration as the reflective light detectors (SA1~SA5).

[0128] A reflective light detector (SC1) is positioned so that, when viewed from a plane, it is near the reflective light detector (SA1) and the entire detection area (df21) of the reflective light detector (SC1) overlaps with the substrate (W) held by the hands (H1, H2). A reflective light detector (SC2) is positioned so that, when viewed from a plane, it is near the reflective light detector (SA2) and the entire detection area (df22) of the reflective light detector (SC2) overlaps with the substrate (W) held by the hands (H1, H2). A reflective light detector (SC3) is positioned so that, when viewed from a plane, it is near the reflective light detector (SA3) and the entire detection area (df23) of the reflective light detector (SC3) overlaps with the substrate (W) held by the hands (H1, H2). Additionally, the reflective light detector (SC4) is positioned so that when viewed from a plane, it is in the vicinity of the reflective light detectors (SA4, SA5) and the entire detection area (df24) of the reflective light detector (SC4) overlaps with the substrate (W) held by the hands (H1, H2).

[0129] As described above, each of the reflective light detectors (SA1 to SA5) is a fiber sensor. Light leading from the main body of the fiber sensor to the fiber unit is emitted from the light passing surface (ss) at a predetermined diffusion angle. Therefore, if the distance (height in this example) between the reflective light detectors (SA1 to SA5) and the substrate (W) changes, the amount of light received by the reflective light detectors (SA1 to SA5) also changes according to the change in their distance.

[0130] For example, when the position of the substrate (W) in the XY coordinate system is fixed, if the distance between the reflective light detector (SA1) and the substrate (W) is increased, the amount of light returning to the light passage surface (ss) decreases. On the other hand, when the position of the substrate (W) in the XY coordinate system is fixed, if the distance between the reflective light detector (SA1) and the substrate (W) is reduced, the amount of light returning to the light passage surface (ss) decreases. Therefore, if the distance between the reflective light detector (SA1) and part p1 of the substrate (W) differs from the distance between the reflective light detector (SB1) and the inner part p10 of the substrate (W) when generating light amount position information, the accuracy of calculating the position of part p1 decreases. The degree of change in the amount of light received by the reflective light detectors (SA1~SA5) due to changes in the distance between the reflective light detectors (SA1~SA5) and the substrate (W) increases as the diffusion angle of the emitted light increases.

[0131] Therefore, in order to suppress the decrease in the accuracy of the calculation of the positions of parts p1 to p5 caused by the deviation in the distance between the reflective photodetectors (SA1 to SA5, SB1) and the substrate (W), the difference between the height of the inner part p10 of the substrate (W) and the height of parts p1 to p5 of the substrate (W) is obtained.

[0132] Specifically, the output signal of the reflective light detector (SB1) is acquired as the height of the inner part p10 of the substrate (W) when generating light quantity position information. The amount of light received indicated by this output signal is called the reference amount of light received. Additionally, the output signals of the reflective light detectors (SC1, SC2, SC3) are each acquired as the heights of parts p1, p2, and p3 of the substrate (W) when generating light quantity position information. The amount of light received indicated by the output signals of the reflective light detectors (SC1, SC2, SC3) is called the first, second, and third amount of light received. Furthermore, the output signal of the reflective light detector (SC4) is acquired as the heights of parts p4 and p5 of the substrate (W) when generating light quantity position information. The amount of light received indicated by the output signal of the reflective light detector (SC4) is called the fourth amount of light received.

[0133] In this case, the difference between the height of the inner part p10 of the substrate (W) and the height of part p1 of the substrate (W) can be expressed, for example, as the ratio of the first light-receiving amount to the reference light-receiving amount. Also, the difference between the height of the inner part p10 of the substrate (W) and the height of part p2 of the substrate (W) can be expressed, for example, as the ratio of the second light-receiving amount to the reference light-receiving amount. Furthermore, the difference between the height of the inner part p10 of the substrate (W) and the height of part p3 of the substrate (W) can be expressed, for example, as the ratio of the third light-receiving amount to the reference light-receiving amount. Additionally, the difference between the height of the inner part p10 of the substrate (W) and the heights of parts p4 and p5 of the substrate (W) can be expressed, for example, as the ratio of the fourth light-receiving amount to the reference light-receiving amount.

[0134] According to each of the above ratios, it is possible to correct the positions of parts p1 to p5 of the substrate (W) calculated based on the output signals of the reflective photodetectors (SA1 to SA5) so that the error in position calculation caused by the difference in height between the inner part p10 and parts p1 to p5 of the substrate (W) is offset.

[0135] For example, based on the output signal of the reflective light detector (SA1) and the light quantity position information, it is assumed that part p1 of the substrate (W) is calculated to be at a position of 1 mm from the front end of the reflective light detector (SA1) toward the rear in the forward / backward direction (AB). In this case, if the ratio of the first light quantity to the reference light quantity is 70%, the above determination result can be corrected so that part p1 of the substrate (W) is at a position of 1.429 mm from the front end of the reflective light detector (SA1) toward the rear.

[0136] Additionally, based on the output signal of the reflective light detector (SA2) and the light quantity position information, it is assumed that part p2 of the substrate (W) is calculated to be at a position 1.1 mm from the front end of the reflective light detector (SA2) toward the rear in the forward / backward direction (AB). In this case, if the ratio of the second light quantity to the reference light quantity is 80%, the above determination result can be corrected so that part p2 of the substrate (W) is at a position 1.375 mm from the front end of the reflective light detector (SA2) toward the rear.

[0137] Additionally, based on the output signal of the reflective light detector (SA3) and the light quantity position information, it is assumed that part p3 of the substrate (W) is calculated to be at a position 1.2 mm forward from the rear end of the reflective light detector (SA3) in the forward / backward direction (AB). In this case, if the ratio of the third light quantity to the reference light quantity is 90%, the above determination result can be corrected so that part p3 of the substrate (W) is at a position 1.333 mm forward from the rear end of the reflective light detector (SA3).

[0138] Additionally, based on the output signal of the reflective light detector (SA4) and the light quantity position information, it is assumed that part p4 of the substrate (W) is calculated to be at a position 1.3 mm forward from the rear end of the reflective light detector (SA4) in the forward / backward direction (AB). In this case, if the ratio of the fourth light quantity to the reference light quantity is 100%, the above determination result can be corrected so that part p4 of the substrate (W) is at a position 1.3 mm forward from the rear end of the reflective light detector (SA4).

[0139] FIG. 20 is a block diagram showing the configuration of a control system of a substrate transport device (500) according to a third embodiment. As shown in FIG. 20, the substrate transport device (500) according to the third embodiment includes, in addition to the configuration of the substrate transport device (500) of FIG. 16 according to the second embodiment, reflective light detectors (SC1~SC5) installed on each hand (H1, H2). The reflective light detectors (SC1~SC5) emit line-shaped light upward from the light passage surface (ss) under the control of the transport control unit (550). The signal output from the reflective light detectors (SC1~SC5) is given to the transport control unit (550).

[0140] FIG. 21 is a block diagram showing the functional configuration of a return control unit (550) according to a third embodiment. The return control unit (550) according to this embodiment is provided with a partial position correction unit (83) in addition to the configuration of the return control unit (550) of FIG. 17 according to a second embodiment.

[0141] The partial position correction unit (83) corrects the positions of multiple parts p1 to p5 of the substrate (W) calculated by the partial position calculation unit (51) based on the output signal of the reflective light detector (SB1, SC1 to SC5) of the hand (H1). In this case, the virtual circle calculation unit (52) calculates four virtual circles (cr1 to cr4) (Figs. 7 to 11) respectively from the positions of parts p1 to p4 corrected by the partial position correction unit (83).

[0142] FIG. 22 is a flowchart showing a part of the basic transport operation of a substrate (W) by a substrate transport device (500) according to a third embodiment. In the transport operation of the substrate (W) according to this embodiment, after the same operation as steps S1, S2, S31, and S4 of FIG. 18 according to the second embodiment is performed, a partial position correction unit (83) corrects the positions of a plurality of parts p1 to p5 of the outer circumference end of the substrate (W) calculated in step S4 using reflective light detectors (SC1 to SC4) (step S41). After that, the operation of steps S5 to S13 of FIG. 12 and FIG. 13 is performed, just like in the first embodiment.

[0143] In the substrate transport device (500) according to the present embodiment, light is irradiated onto an inner portion p10 of the substrate (W) to generate light quantity position information. The heights of a plurality of portions p1 to p5 of the outer end of the substrate (W) relative to the inner portion p10 are acquired by reflective light detectors (SC1 to SC4). The positions of the plurality of portions p1 to p5 of the substrate (W), calculated based on the output signals of the reflective light detectors (SA1 to SA5), are corrected based on the heights of the plurality of portions p1 to p5. As a result, the positions of the plurality of portions p1 to p5 of the outer end of the substrate (W) can be acquired with higher precision.

[0144] In addition, in this embodiment, a common reflective light detector (SC4) is used for two parts p4 and p5 to obtain the heights of parts p4 and p5 of the substrate (W). Not limited to this example, two reflective light detectors may be installed near the reflective light detectors (SA4, SA5) to obtain the heights of parts p4 and p5 of the substrate (W), respectively.

[0145] 4. Fourth embodiment

[0146] Regarding the substrate transport device (500) according to the fourth embodiment, differences from the substrate transport device (500) according to the first embodiment are explained. The substrate transport device (500) according to the present embodiment makes it possible to determine the position of the substrate (W) relative to the hand (H1) when the substrate (W) is held on the hand (H1) and the hand (H1) is positioned below the substrate (W) supported on the support member. Additionally, it is possible to determine the position of the substrate (W) relative to the hand (H2) when the substrate (W) is held on the hand (H2) and the hand (H2) is positioned below the substrate (W) supported on the support member.

[0147] In the following description, the control mode of the return control unit (550) when determining the position of the substrate (W) relative to the hand (H1, H2) while the substrate (W) is maintained on the hand (H1, H2) is referred to as the first control mode. Meanwhile, the control mode of the return control unit (550) when determining the position of the substrate (W) relative to the hand (H1, H2) while the hand (H1, H2) is positioned below the substrate (W) supported by the support member is referred to as the second control mode. The user, for example, operates the control unit (529) of FIG. 6 to specify the control mode of the return control unit (550). Accordingly, the return control unit (550) responds to the user's designation and controls each part of the substrate return device (500) in the specified control mode.

[0148] The operation of the substrate transport device (500) when the transport control unit (550) is in the first control mode is as described in the first embodiment. Accordingly, coordinate information is corrected according to the position of the substrate (W) held by the hands (H1, H2) in the hands. Meanwhile, the second control mode can be effectively utilized, for example, when adjusting the positional relationship between the hands (H1, H2) and the substrate (W) immediately before the holding of the substrate (W) by the hands (H1, H2) is performed, or when teaching the substrate transport device (500). Below, an example of the specific operation of the substrate transport device (500) when the transport control unit (550) is in the second control mode will be described.

[0149] FIGS. 23 to 27 are drawings for explaining an example of the operation of a substrate transport device (500) when the transport control unit (550) according to the fourth embodiment is in the second control mode. For example, a spin chuck (ch) is installed as a support unit in one processing unit. Also, as shown in the plan view of FIG. 23 and the side view of FIG. 24, a substrate (W) is held on the spin chuck (ch). Additionally, the center position (C) of the substrate (W) held on the spin chuck (ch) is set as the receiving position, and a hand (H1) receives the substrate (W) on the spin chuck (ch).

[0150] In this case, as indicated by the white arrows in FIGS. 23 and 24, the hand (H1) moves from the receiving position toward a position slightly downward from the upper surface of the spin chuck (ch). As a result, as shown in the side view of FIG. 25, the hand (H1) is maintained at a position below the substrate (W) held by the spin chuck (ch). Here, the distance between the adsorption portion (sm) of the hand (H1) and the substrate (W) in the vertical direction is maintained, for example, to several mm to several tens of mm.

[0151] In this state, as indicated by the solid arrow in FIG. 25, a line-shaped light is emitted from the light-passing surface (ss) of the reflective light detectors (SA1 to SA5) toward the outer periphery of the substrate (W). At this time, if the distance between the reflective light detectors (SA1 to SA5) and the substrate (W) is within a predetermined range, the light reflected from the outer periphery of the lower surface of the substrate (W) returns to the reflective light detectors (SA1 to SA5) respectively. As a result, even when the substrate (W) is not held by the hand (H1), the positions (positions in XY coordinates) of multiple parts p1 to p5 of the outer end of the substrate (W) in the hand (H1) can be calculated based on the output signals of the reflective light detectors (SA1 to SA5). Based on the calculation results, the position of the substrate (W) relative to the hand (H1) can be determined.

[0152] As a result of determining the position of the substrate (W) relative to the hand (H1), it is assumed that the center position (C) of the substrate (W) is misaligned from the reference position (rp) of the hand (H1), as shown in the plan view of FIG. 26. In this case, as indicated by the white arrow in FIG. 26, the hand (H1) moves to offset the misalignment based on the determination result. As a result, as shown in the plan view of FIG. 27, the center position (C) of the substrate (W) coincides with the reference position (rp) of the hand (H1). Additionally, in FIG. 26 and FIG. 27, the substrate (W) held by adsorption by the spin chuck (ch) is indicated by a dotted line.

[0153] As described above, before the hand (H1) receives the substrate (W) held by the spin chuck (ch), the position of the hand (H1) relative to the substrate (W) is adjusted so that the center position (C) of the substrate (W) coincides with the reference position (rp). In this state, when the hand (H1) receives the substrate (W), there is no need to correct the coordinate information (placement coordinates) of the return location.

[0154] In addition, when teaching the receipt of a substrate (W) held on a spin chuck (ch), first, the substrate (W) is adsorbed and held on the spin chuck (ch) so that the center of the substrate (W) coincides with the center of rotation of the spin chuck (ch). Then, the series of operations shown in FIGS. 23 to 27 is performed. In this case, the horizontal position of the final hand (H1) can be determined as the receipt coordinate or the placement coordinate.

[0155] FIGS. 28 and 29 are flowcharts illustrating the position adjustment operation of a hand (H1) by the second operation mode of a substrate transport device (500) according to the fourth embodiment. In the initial state, the substrate (W) is supported at a predetermined position on a support member (e.g., the spin chuck (ch) of FIG. 23) installed within a processing unit. Additionally, the coordinate information storage unit (59) of FIG. 12 stores coordinate information provisionally indicating the position on the support member of a processing unit. Furthermore, the substrate (W) is not held in the hand (H1) in the initial state.

[0156] The movement control unit (58) of FIG. 12 moves the hand (H1) to a position below the substrate (W) supported by the support unit based on the coordinate information stored in the coordinate information storage unit (59) (step S101). Then, the partial position calculation unit (51) of FIG. 12 reads detector information and light quantity position information from the detector position storage unit (54) and the light quantity position information storage unit (81) of FIG. 12 (step S102).

[0157] After that, similar to steps S4, S5, and S6 of FIG. 13, the positions of a plurality of parts p1 to p5 of the outer edge of the substrate (W), a plurality of virtual circles (cr1 to cr4) and their center positions (vp1 to vp4), and a plurality of misalignment amounts between the plurality of center positions (vp1 to vp4) are calculated (steps S103, S104, S105).

[0158] Also, similar to step S7 of FIG. 14, it is determined whether all of the multiple misalignments calculated in step S105 are below the threshold stored in the threshold memory unit (55) of FIG. 12 (step S106). Thus, if all of the multiple misalignments are below the threshold, processing as in step S8 of FIG. 14 is performed (step S107). On the other hand, if at least one of the multiple misalignments exceeds the threshold, processing as in steps S12 and S13 of FIG. 14 is performed (steps S110, S111).

[0159] After processing step S107 or step S111, the movement control unit (58) adjusts the position of the hand (H1) so that the center position (C) of the substrate (W) matches the reference position (rp) (step S108). Thus, the coordinate information memory unit (59) of FIG. 12 stores the coordinates where the hand (H1) is located at the current time (step S109). As a result, the position adjustment operation of the hand (H1) is terminated. The same position adjustment operation as that of the hand (H1) is also performed for the hand (H2). In addition, after the position adjustment operation of each hand (H1, H2), the hand (H1, H2) may receive the substrate (W) and return the received substrate (W) to another processing unit.

[0160] In the substrate transport device (500) according to the present embodiment, the position of the substrate (W) in the hands (H1, H2) can be determined regardless of whether the state is in which the substrate (W) is held in the hands (H1, H2) or the state in which the hands (H1, H2) are positioned below the substrate (W) supported by the support member. As a result, it is possible to transport the substrate (W) with high precision and to perform teaching of the substrate transport device (500) based on the determination result.

[0161] In addition, the substrate transport device (500) according to the present embodiment has the same configuration as the substrate transport device (500) according to the first embodiment, except that the transport control unit (550) is capable of operating in the first and second control modes, but the present invention is not limited thereto. The substrate transport device (500) according to the present embodiment may have the same configuration as the substrate transport device (500) according to the second and third embodiments, except that the transport control unit (550) is capable of operating in the first and second control modes. That is, in the substrate transport device (500) according to the second and third embodiments, the transport control unit (550) may be configured to be capable of operating in the first and second control modes.

[0162] 5. Fifth embodiment

[0163] FIG. 30 is a schematic block diagram showing the overall configuration of a substrate processing device equipped with a substrate transport device (500) according to any one of the first to fourth embodiments. As shown in FIG. 30, the substrate processing device (100) is installed adjacent to an exposure device (800) and is equipped with a control device (210), a substrate transport device (500) according to any one of the first to fourth embodiments, a heat treatment unit (230), a coating treatment unit (240), and a development treatment unit (250).

[0164] The control device (210) includes, for example, a CPU and memory or a microcomputer, and controls the operation of the substrate transport device (500), the heat treatment unit (230), the coating treatment unit (240), and the development treatment unit (250). In addition, the control device (210) gives a command to the transport control unit (550) to position the hands (H1, H2) of the substrate transport device (500) on the support of a predetermined processing unit.

[0165] The substrate transport device (500) transports the substrate (W) between the heat treatment unit (230), the coating treatment unit (240), the development treatment unit (250), and the exposure device (800). Each of the coating treatment unit (240) and the development treatment unit (250) includes a plurality of processing units (PU). A spin chuck is installed as a support member (600) in the processing unit (PU) installed in the coating treatment unit (240). Additionally, a processing liquid nozzle (5) is installed in the processing unit (PU) to supply a processing liquid for forming a resist film on the substrate (W) rotated by the spin chuck. As a result, a resist film is formed on the untreated substrate (W). On the substrate (W) on which the resist film is formed, exposure treatment is performed in the exposure device (800).

[0166] A processing unit (PU) installed in the development processing unit (250) is equipped with a developer nozzle (6) that supplies a developer to a substrate (W) rotated by a spin chuck. As a result, the substrate (W) after exposure processing by the exposure device (800) is developed.

[0167] The heat treatment unit (230) includes a plurality of processing units (TU) that perform heating or cooling treatment on the substrate (W). In the processing unit (TU), a temperature control plate is installed as a support unit (600). The temperature control plate is a heating plate or a cooling plate. In the heat treatment unit (230), heat treatment of the substrate (W) is performed before and after coating treatment by the coating treatment unit (240), development treatment by the development treatment unit (250), and exposure treatment by the exposure device (800).

[0168] In the above-described substrate processing device (100), a substrate transport device (500) according to any one of the first to fourth embodiments is installed. As a result, the time required to determine the position of the substrate (W) can be reduced, thereby shortening the substrate transport time and improving the throughput of the substrate processing. In addition, the substrate (W) is transported with high precision between a plurality of processing units (PU, TU). As a result, the occurrence of processing defects caused by misalignment of the substrate (W) in each processing unit (PU, TU) is prevented, and the processing precision of the substrate (W) is improved.

[0169] 6. Other embodiments

[0170] (1) In the substrate transport device (500) according to the first to fourth embodiments, the reflective light detectors (SA1 to SA5) are fiber sensors and emit line-shaped light into the detection area (df1 to df5), but the present invention is not limited thereto. The reflective light detectors (SA1 to SA5) only need to have a light receiving surface formed in a line shape that receives light reflected by the substrate (W). Accordingly, the reflective light detectors (SA1 to SA5) may have a configuration that emits light in a circular shape, an elliptical shape, or a rectangular shape upward.

[0171] (2) In the substrate transport device (500) according to the first to fourth embodiments, five reflective light detectors (SA1 to SA5) are used to determine the position of the substrate (W) in the hands (H1, H2), but the present invention is not limited thereto.

[0172] For example, if the design radius of the substrate (W) to be positioned is already known, only four reflective light detectors (SA1 to SA4) for positioning the substrate (W) may be installed in each of the hands (H1, H2). In this case, among the four virtual circles (cr1 to cr4) generated using the reflective light detectors (SA1 to SA4), the virtual circle (virtual circle (cr4) in this example) that matches or has the closest radius to the design radius can be selected, and the position of the substrate (W) in the hands (H1, H2) can be determined based on the selected virtual circle.

[0173] In addition, for example, if a notch is not formed on the substrate (W) to be positioned, only three reflective light detectors (SA1 to SA3) for positioning the substrate (W) may be installed in each of the hands (H1, H2). In this case, the position of the substrate (W) in the hands (H1, H2) can be determined based on a virtual circle passing through the positions of three parts p1 to p3 of the substrate (W) calculated from the three reflective light detectors (SA1 to SA3).

[0174] In addition, for example, if a notch is not formed on the substrate (W) to be positioned and the design radius of the substrate (W) is already known, only two reflective light detectors (SA1, SA2) for positioning the substrate (W) may be installed in each of the hands (H1, H2). In this case, the position of the substrate (W) in the hands (H1, H2) can be determined based on two virtual circles that pass through the positions of two parts p1 and p2 of the substrate (W) calculated from the two reflective light detectors (SA1, SA2) and have a design radius, and the positional relationship between the substrate (W) and the reflective light detectors (SA1, SA2) that is estimated in advance.

[0175] (3) In the substrate transport device (500) according to the first to fourth embodiments, the reflective light detectors (SA1 to SA5) are arranged on the hands (H1, H2) such that the light passage surface (ss) is parallel to the forward / backward direction (AB), but the present invention is not limited thereto. The reflective light detectors (SA1 to SA5) may be formed such that at least a portion of the light passage surface (ss) of the reflective light detectors (SA1 to SA5) extends in a direction different from that of the other light passage surface (ss).

[0176] (4) In the substrate transport device (500) according to the second and third embodiments, the reflective light detector (SB1) has basically the same configuration as the reflective light detectors (SA1 to SA5), but the present invention is not limited thereto. The reflective light detector (SB1) may have a configuration that enables the reflection rate of the substrate (W) for light emitted from the reflective light detectors (SA1 to SA5), and may have a configuration different from that of the reflective light detectors (SA1 to SA5).

[0177] (5) In the substrate transport device (500) according to the third embodiment, the reflective light detectors (SC1~SC4) have basically the same configuration as the reflective light detectors (SA1~SA5), but the present invention is not limited thereto. The reflective light detectors (SC1~SC4) may have a configuration that enables the height of the inner part p10 of the plurality of parts p1~p5 of the substrate (W) calculated using the reflective light detectors (SA1~SA5). Therefore, in the third embodiment, instead of the reflective light detectors (SC1~SC4), a plurality of height sensors may be installed to calculate the height relationship between the plurality of parts p1~p5 of the substrate (W) and the inner part p10.

[0178] 7. Correspondence between each component of the claim and each element of the embodiment

[0179] Hereinafter, examples of corresponding elements of each component of the claim and each element of the embodiment are described, but the present invention is not limited to the following examples. In the above embodiments, the substrate transport device (500) is an example of a substrate transport device, the hands (H1, H2) are examples of holding parts, the light passing surface (ss) is an example of a light receiving surface, the plurality of reflective light detectors (SA1~SA5) are examples of a plurality of reflective light detectors, the partial position calculation unit (51) is an example of a partial position calculation unit, and the substrate position determination unit (53) is an example of a substrate position determination unit.

[0180] Also, the detection area (df1~df5) of the reflective light detectors (SA1~SA5) is an example of a band-shaped detection area, the forward / backward direction (AB) is an example of a single direction, the reflective light detectors (SA1, SA2) are an example of a first reflective light detector, the reflective light detectors (SA3, SA4, SA5) are an example of a second reflective light detector, and the light quantity position information memory unit (81) is an example of a memory unit.

[0181] Also, a reflective light detector (SB1) is an example of a light quantity measuring device, a light quantity position information generating unit (82) is an example of a light quantity position information generating unit, a plurality of adsorption units (sm) are examples of a plurality of adsorption units, a plurality of reflective light detectors (SC1~SC4) are examples of height detection units, and a partial position correction unit (83) is an example of a correction unit.

[0182] Additionally, a configuration including an up-and-down driving motor (511), a horizontal driving motor (513), a rotational driving motor (515), an upper hand retraction driving motor (525), a lower hand retraction driving motor (527), a moving member (510), and a rotating member (520) is an example of a moving part, a receiving position is an example of a first position, a placement position is an example of a second position, and a moving control part (58) is an example of a moving control part.

[0183] As each component of the claim, various other elements having the configuration or function described in the claim may also be used.

Claims

Claim 1 A substrate transport device for transporting a substrate comprises: a holding member configured to hold the substrate; a plurality of reflective light detectors each having a line-shaped light-receiving surface and installed in the holding member, each emitting light toward the outer periphery of a substrate disposed on the holding member, and each receiving light reflected from the substrate by the light-receiving surface and outputting a signal indicating the amount of received light; a part position calculation unit each calculating the position of a plurality of parts of the outer periphery end of the substrate disposed on the holding member based on the output signals of the plurality of reflective light detectors; a position determination unit determining the position of the substrate relative to the holding member based on the position of the plurality of parts of the substrate calculated by the part position calculation unit; a light receiving amount measuring device installed in the holding member, emitting light of a first amount toward an inner part located inward from the outer periphery of the substrate, and receiving light reflected by the substrate and outputting a signal indicating the amount of received light; and a light amount position information generation unit, wherein, when viewed in a planar view, a part of each reflective light detector is on the holding member A substrate transport device, wherein the entire light receiving amount measuring device overlaps the substrate while overlapping the outer periphery of the substrate, and the light amount position information generating unit calculates the reflectance of the substrate based on the first light amount and the output signal of the light receiving amount measuring device, and generates light amount position information indicating the relationship between the light receiving amount received by the plurality of reflective light detectors and the position of the plurality of parts of the substrate in the holding unit based on the calculated reflectance and detector information indicating the design position of the plurality of reflective light detectors in the holding unit, and the part position calculation unit calculates the position of each of the plurality of parts of the substrate in the holding unit based on the light amount position information generated by the light amount position information generating unit in addition to the output signal of the plurality of reflective light detectors. Claim 2 A substrate transport device according to claim 1, wherein each of the plurality of reflective light detectors has a strip-shaped detection area extending upward from the light receiving surface, and the plurality of portions are the intersection points of the detection areas of the plurality of reflective light detectors and the outer periphery end of a substrate disposed on the holding portion when viewed in a plane. Claim 3 A substrate transport device according to claim 1 or claim 2, wherein the plurality of reflective light detectors comprises first and second reflective light detectors installed in the holding portion such that the light receiving surfaces do not overlap each other in one direction. Claim 4 A substrate transport device according to claim 1 or claim 2, further comprising a memory unit for storing light quantity position information, wherein the part position calculation unit calculates the position of each of the plurality of parts of the substrate in the holding unit based on the light quantity position information stored in the memory unit in addition to the output signal of the plurality of reflective light detectors. Claim 5 A substrate transport device according to claim 1, wherein the holding member further comprises a plurality of adsorption members that adsorb and hold the lower surface of the substrate, and the distance between the light receiving amount measuring member and one of the plurality of adsorption members is smaller than the distance between each of the plurality of reflective light detectors and the one adsorption member. Claim 6 A substrate transport device according to claim 1, further comprising a height detection unit for detecting the height of the plurality of parts of a substrate in the holding unit, and a correction unit for correcting the position of each of the plurality of parts of a substrate calculated by the part position calculation unit based on the height of the plurality of parts of the substrate detected by the height detection unit, wherein the position determination unit determines the position of the substrate relative to the holding unit based on the position of the plurality of parts of the substrate after correction by the correction unit. Claim 7 A substrate transport device according to claim 1 or claim 2, further comprising a photodetector control unit for controlling the plurality of reflective photodetectors, wherein the photodetector control unit is configured to operate in a first control mode for controlling the plurality of reflective photodetectors while the substrate is held by the holding unit, and a second control mode for controlling the plurality of reflective photodetectors while the substrate is not held by the holding unit and the holding unit is positioned below the substrate supported by the support unit. Claim 8 A substrate transport device according to claim 1 or claim 2, further comprising a moving part for moving the holding part and a moving control part for controlling the moving part so that the substrate held by the holding part is transported from a predetermined first position to a second position based on a determination result by the position determination part. Claim 9 A substrate transport method for transporting a substrate comprises the steps of: placing a substrate on a holding member configured to hold the substrate; using a plurality of reflective light detectors having a line-shaped light-receiving surface and installed on the holding member to emit light toward the outer periphery of the substrate placed on the holding member, and receiving light reflected from the substrate by the light-receiving surface, and outputting signals indicating the amount of light received from each of the plurality of reflective light detectors; calculating the positions of a plurality of parts of the outer periphery end of the substrate on the holding member based on the output signals of the plurality of reflective light detectors; determining the position of the substrate relative to the holding member based on the positions of the plurality of parts of the substrate calculated by the calculation step; and using a light-receiving amount measuring device installed on the holding member to emit light of a first amount toward an inner part located inward from the outer periphery of the substrate placed on the holding member, and receiving light reflected from the substrate, thereby outputting a signal indicating the amount of light received from said light-receiving amount measuring device. The method comprises a step of generating light quantity position information indicating the relationship between the amount of light received by the plurality of reflective light detectors and the position of the plurality of parts of the substrate in the holding part, wherein, when viewed in a planar view, a part of each reflective light detector overlaps the outer periphery of the substrate disposed on the holding part, and the entire light quantity measuring device overlaps the substrate, and the step of generating light quantity position information includes calculating the reflectance of the substrate based on the first amount of light and the output signal of the light quantity measuring device, and generating the light quantity position information based on the calculated reflectance and detector information indicating the design position of the plurality of reflective light detectors in the holding part, wherein the calculating step comprises, in addition to the output signal of the plurality of reflective light detectors,A substrate transport method comprising calculating the positions of each of the plurality of parts of the substrate in the holding portion based on the light quantity position information generated by the above-described generating step. Claim 10 A substrate transport method according to claim 9, wherein each of the plurality of reflective light detectors has a strip-shaped detection area extending upward from the holding portion, and the plurality of portions are the intersection points of the detection areas of the plurality of reflective light detectors and the outer periphery end of a substrate disposed on the holding portion when viewed in a plane. Claim 11 A substrate transport method according to claim 9 or claim 10, wherein the plurality of reflective light detectors comprises first and second reflective light detectors installed in the holding portion such that the light receiving surfaces do not overlap each other in one direction. Claim 12 A substrate transport method according to claim 9 or claim 10, further comprising the step of storing the light quantity position information, wherein the calculating step comprises, in addition to the output signal of the plurality of reflective light detectors, calculating the position of each of the plurality of parts of the substrate in the holding portion based on the light quantity position information stored by the storing step. Claim 13 A substrate transport method according to claim 9, wherein the step of placing a substrate on the holding member comprises adsorbing and holding the lower surface of the substrate by a plurality of adsorption members having the holding member, and the distance between the light receiving amount measuring device and one of the plurality of adsorption members is smaller than the distance between each of the plurality of reflective light detectors and the one adsorption member. Claim 14 A substrate transport method according to claim 9 or claim 10, further comprising: a step of detecting the height of the plurality of parts of a substrate in the holding portion; and a step of correcting the position of each of the plurality of parts of a substrate calculated by the calculation step based on the height of the plurality of parts of a substrate detected by the step of detecting the height, wherein the step of determining the position of the substrate comprises determining the position of the substrate relative to the holding portion based on the position of the plurality of parts of the substrate after correction by the correction step. Claim 15 A substrate transport method according to claim 9 or claim 10, wherein the step of outputting a light-receiving amount from a plurality of reflective light detectors comprises emitting light toward the outer periphery of a substrate held by the holding member, and emitting light toward the outer periphery of a substrate while the substrate is not held by the holding member and the holding member is positioned below the substrate supported by the support member. Claim 16 A substrate return method according to claim 9 or claim 10, further comprising the step of moving the holding member so that the substrate held by the holding member is returned from a predetermined first position to a second position based on the result of the step of determining the position of the substrate.

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