Location specifying device, control method of the location specifying device, information processing program and recording medium

Abstract

Even if at least one of the detection target and the detection device is moving, the position of the detection target is determined with high precision. The position determining device (10) determines the position (Pw) of the work (40) from the detection deviation amount (Qd) calculated from the image (Im) captured during the movement of the imaging device (33) and the position of the imaging device (33) at the detection time (Td).

Description

Technology Field

[0001] The present invention relates to a position-specific device, etc., for specifying the location of a detection target. Background Technology

[0002] Conventionally, there is a known attempt to achieve high precision in control by a servo control system by considering the response delay time of the servo control system for a control device that controls the servo control system by outputting a command value generated from a target trajectory to the servo control system at each control cycle.

[0003] For example, Patent Document 1 disclosed below discloses a control device that performs the following processing to suppress trajectory misalignment caused by variations in response delay time between multiple axes (multiple servo motors). That is, a control device that adjusts the command timing to each servo driver according to the response delay time of each servo motor is disclosed. Prior art literature

[0004] Japanese Published Patent No. 2017-102616 The problem to be solved

[0005] If, by using the control device described above, the detection position can be completely aligned with the position of the detection target (e.g., the center position of the detection target) during the movement of at least one of the detection target and the detection device, the position of the detection target can be determined solely by the detection position.

[0006] However, even if the response delay time of the above-mentioned servo control system is taken into account, it is difficult to completely align the detection position with the position of the detection target during the movement of at least one of the detection target and the detection device. Therefore, during the movement of at least one of the detection target and the detection device, the position of the detection target cannot be determined solely by the detection position.

[0007] One embodiment of the present invention aims to determine the position of a detection target with high precision even when at least one of the detection target and the detection device is moving. means of solving the problem

[0008] To solve the above problem, a position-specific device according to an embodiment of the present invention comprises: a position-specific device for specifying the position of a detection target, a command unit that outputs a command value calculated from a target trajectory including a preset expected detection position as a target position, which is a position where the detection target is to exist, to a servo control system that controls the position of at least one of the detection device and the detection target; an acquisition unit that acquires a detection result of the detection device at a detection time, which is a time when at least one of the detection device and the detection target is moving, and the target position of the servo control system calculated by considering the response delay time of the servo control system matches the expected detection position; a detection deviation amount calculation unit that calculates a detection deviation amount, which is the deviation amount between the detection position corresponding to the reference position and the position of the detection target, from the deviation amount between the reference position and the position of the detection target in the detection result; a detection position calculation unit that calculates the detection position from the position of the detection device at the detection time; and a position-specific unit that specifies the position of the detection target by correcting the detection position by the detection deviation amount.

[0009] According to the above configuration, the position determining device calculates the detection deviation amount, which is the deviation between the detection position and the position of the detection target, from the detection result. Additionally, the position determining device calculates the detection position from the position of the detection device at the time of detection. Furthermore, the position determining device determines the position of the detection target based on the detection deviation amount and the detection position.

[0010] (High precision of position detection)

[0011] Accordingly, the above-described position-specific device has the effect of being able to determine the position of the detection target with high precision by utilizing the amount of misalignment between the two, even when the position of the detection target and the detection position do not coincide at the detection time.

[0012] (High precision and high speed of detection results)

[0013] In addition, according to the above configuration, the position-specific device calculates the detection deviation amount from the detection result at the detection time, which is the time when the target position of the servo control system, calculated by considering the response delay time of the servo control system, matches the expected detection position.

[0014] Here, at the timing when the detection device performs detection, if the detection target does not exist within the detection range where the detection device can detect the detection target, the detection deviation amount cannot be calculated from the detection result.

[0015] Therefore, in order to avoid the situation where "at the timing when the detection device performs detection, the detection target does not exist within the detection range where the detection device can detect the detection target," the location-specific device acquires the detection result at the detection time.

[0016] For example, if the servo control system moves only the detection device, so that the detection target is not moved, and the detection target is placed at the expected detection position in advance or at a position sufficiently close to the expected detection position, the position determining device performs the following processing. That is, the position determining device sets the time at which the target position of the servo control system, calculated by considering the response delay time of the servo control system controlling the position of the detection device, coincides with the expected detection position as the detection time.

[0017] Here, by considering the response delay time of the servo control system, it is believed that the "target position of the servo control system at each time point" coincides with the "feedback position of the servo control system at each time point," or that the discrepancy between the two is sufficiently small. Furthermore, the feedback position of the servo control system controlling the position of the detection device can be regarded as the position of the detection device. Therefore, the "position of the detection device at each time point moved by the servo control system" coincides with the "target position of the servo control system at each time point calculated by considering the response delay time of the servo control system," or that the discrepancy between the two is sufficiently small.

[0018] As explained above, at the time of detection, the "position of the detection device moved by the servo control system" and the "expected detection position" will coincide, or the amount of discrepancy between the two will be sufficiently small. Furthermore, as previously mentioned, the detection target is placed in advance at the expected detection position or at a position sufficiently close to the expected detection position. Therefore, at the time of detection, the "position of the detection device moved by the servo control system" and the position of the detection target will coincide, or the amount of discrepancy between the two will be sufficiently small.

[0019] As a result, the above-mentioned location-specific device can avoid the situation where "at the timing when the detection device performs detection, the detection target does not exist within the range where the detection device can detect the detection target."

[0020] Additionally, for example, if the servo control system moves only the detection target and the detection device does not move, and the detection device is placed in advance at the expected detection position or at a position sufficiently close to the expected detection position, the position determining device performs the following processing. That is, the position determining device sets the time at which the target position of the servo control system, calculated by considering the response delay time of the servo control system controlling the position of the detection target, coincides with the expected detection position as the detection time.

[0021] As described above, by considering the response delay time of the servo control system, it is believed that the "target position of the servo control system at each time interval" will coincide with the "feedback position of the servo control system at each time interval," or that the discrepancy between the two will be sufficiently small. Furthermore, the feedback position of the servo control system that controls the position of the detection target can be regarded as the position of the detection target. Therefore, the "position of the detection target at each time interval moved by the servo control system" will coincide with the "target position of the servo control system at each time interval calculated by considering the response delay time of the servo control system," or that the discrepancy between the two will be sufficiently small.

[0022] As explained above, at the time of detection, the "position of the detection target moved by the servo control system" and the "expected detection position" will coincide, or the amount of discrepancy between the two will be sufficiently small. Furthermore, as previously mentioned, the detection device is positioned in advance at the expected detection position or is positioned sufficiently close to the expected detection position. Therefore, at the time of detection, the "position of the detection target moved by the servo control system" and the position of the detection device will coincide, or the amount of discrepancy between the two will be sufficiently small.

[0023] As a result, the above-mentioned location-specific device can avoid the situation where "at the timing when the detection device performs detection, the detection target does not exist within the range where the detection device can detect the detection target."

[0024] Furthermore, for example, when the first servo control system moves the detection device and the second servo control system moves the detection target, the position determining device sets the following time as the detection time. That is, the time at which the target positions of the first servo control system and the second servo control system, respectively, calculated by considering the response delay times of the first servo control system and the second servo control system, coincide together with the expected detection position is set as the detection time.

[0025] As described above, by considering the response delay time of the servo control system, it is believed that the “target position of the servo control system at each time interval” coincides with the “feedback position of the servo control system at each time interval,” or that the amount of discrepancy between the two is sufficiently small.

[0026] Furthermore, the feedback position of the first servo control system controlling the position of the detection device can be considered as the position of the detection device. Additionally, the feedback position of the second servo control system controlling the position of the detection target can be considered as the position of the detection target.

[0027] Therefore, the “position of the moving detection device at each time interval” will match the “target position of the first servo control system at each time interval calculated by taking into account the response delay time of the first servo control system,” or the amount of discrepancy between the two will be sufficiently small. Furthermore, the “position of the moving detection target at each time interval” will match the “target position of the second servo control system at each time interval calculated by taking into account the response delay time of the second servo control system,” or the amount of discrepancy between the two will be sufficiently small.

[0028] As explained above, at the time of detection, the "position of the moving detection device," the "position of the moving detection target," and the expected detection position will coincide, or the amount of deviation from the third party will be sufficiently small.

[0029] As a result, the above-mentioned location-specific device can avoid the situation where "at the timing when the detection device performs detection, the detection target does not exist within the range where the detection device can detect the detection target."

[0030] The above-mentioned position-specific device acquires the detection result at the detection time, which is a time when at least one of the detection device and the detection target is moving, and is a time when "the position of the detection target and the position of the detection device coincide, or the amount of misalignment between the two becomes sufficiently small."

[0031] Here, since the position of the detection device at the detection time corresponds to the detection position, it is assumed that the amount of deviation between the reference position and the position of the detection target in the detection result at the detection time is sufficiently small. Furthermore, if it is known in advance that "the amount of deviation between the reference position and the position of the detection target in the detection result is sufficiently small," the interpretation of the detection result can be made highly precise compared to cases where "the amount of deviation between the two in the detection result is unpredictable or predicted to be large."

[0032] Accordingly, the above-mentioned position-specific device can obtain the “detection result at the above-mentioned detection time” capable of performing high-precision analysis, that is, calculate the detection deviation amount with high precision from the “detection result at the above-mentioned detection time”.

[0033] In addition, the position-specific device calculates the detection deviation amount from "the detection result detected by the detection device while at least one of the detection target and the detection device is moving." Accordingly, the position-specific device can acquire the detection result at a high speed compared to the case where "the movement of the detection target and the detection device is stopped and then detection is performed by the detection device to generate the detection result," and as a result, the calculation of the detection deviation amount can be accelerated.

[0034] (High precision and high speed of location identification of detection targets)

[0035] As explained above, the position determining device acquires the detection result capable of performing high-precision analysis at high speed, and can calculate the detection deviation amount from the detection result at high speed and with high precision. Furthermore, the position determining device determines the position of the detection target based on the calculated detection deviation amount and the detection position.

[0036] Accordingly, the above-described position-specific device has the effect of being able to specify the position of the detection target at high speed and with high precision.

[0037] A position determining device according to one embodiment of the present invention communicates with the servo control system at each control cycle, and when the position of the detection device is controlled by the servo control system, the detection position calculation unit may calculate the position of the detection device at the detection time by interpolation from the feedback position at each control cycle of the servo control system controlling the position of the detection device.

[0038] According to the above configuration, the position determining device calculates "the feedback position of the servo control system controlling the position of the detection device at the detection time" by interpolation calculation from "the feedback position of the servo control system for each control cycle."

[0039] For example, if n is an integer greater than or equal to 0 and the detection time is a time between the "n"th control cycle and the "n+1"th control cycle, the position determining device calculates the "feedback position of the servo control system at the detection time" as follows. That is, the position determining device calculates the "feedback position of the servo control system at the detection time" from the "feedback position at the 'n'th'th control cycle" and the "feedback position at the 'n+1'th'th control cycle" of the servo control system.

[0040] Accordingly, the above position-specific device has the effect of being able to calculate the "feedback position of the servo control system at the above detection time" with high precision, even if the above detection time is not an integer multiple of the control period, which is the communication period with the servo control system.

[0041] A position-specific device according to one embodiment of the present invention may output a command value to each of a plurality of servo control systems synchronized with one another, taking into account the response delay time of each of the plurality of servo control systems.

[0042] According to the above configuration, the position-specific device outputs a command value to each of a plurality of servo control systems synchronized with one another, taking into account the response delay time of each of the plurality of servo control systems.

[0043] Accordingly, the above position-specific device demonstrates the effect of being able to realize high-precision position control of a workpiece by controlling the plurality of servo control systems in a synchronized state.

[0044] A location-specific device according to one embodiment of the present invention may specify a detection instruction time, which is a detection time corrected by taking into account the response delay time of the detection device, in a control signal transmitted every control cycle to a communication control device communicating with a detection control device that controls a detection operation by the detection device, and by executing the output of a detection instruction to the detection control device to the communication control device at the detection instruction time, the detection device may detect the detection target at the detection time.

[0045] According to the above configuration, the location-specific device calculates the detection-indicating time, which is the time obtained by correcting the detection time by the "response delay time of the detection device." Furthermore, the location-specific device specifies the detection-indicating time in the control signal output to the communication control device at each control cycle.

[0046] The communication control device that receives the above control signal transmits the detection instruction to the detection control device at the detection instruction time, and the detection control device that receives the detection instruction causes the detection device to detect the detection target. Accordingly, the time at which the detection device detects the detection target is a time delayed from the detection instruction time by the response delay time of the detection device, that is, becomes the detection time.

[0047] Here, if the detection is to be executed by the detection device without considering the response delay time of the detection device, the time at which the detection device actually executes the detection is delayed by the response delay time of the detection device from the time at which the detection device is instructed to execute the detection.

[0048] Therefore, the above-mentioned location-specific device calculates the above-mentioned detection-indicating time, which is the time obtained by correcting the above-mentioned detection time by the "response delay time of the above-mentioned detection device." Then, the above-mentioned location-specific device designates the above-mentioned detection-indicating time as the time to instruct the above-mentioned detection device to execute detection.

[0049] Accordingly, the above-mentioned location-specific device provides the effect of enabling the detection device to execute detection at the said detection time by specifying the said detection instruction time, which takes into account the "response delay time of the said detection device," as the time for instructing the detection device to execute detection.

[0050] Additionally, the position-specific device specifies the detection instruction time in the control signal transmitted at each control cycle, and, for example, the position-specific device specifies the detection instruction time in the control signal at a control cycle prior to the detection instruction time.

[0051] Accordingly, the above-described location-specific device, by specifying the detection instruction time in the control signal, exhibits the effect of being able to detect the detection target at the detection time even when the detection instruction time is not an integer multiple of the control period, which is the communication period with the communication control device.

[0052] For a position-specific device according to one embodiment of the present invention, the detection device is an imaging device, and the detection deviation amount calculation unit may calculate the detection deviation amount from the deviation amount between the reference position in the imaging image captured by the imaging device and the detection target in the imaging image.

[0053] According to the above configuration, the position determining device calculates the detection deviation amount based on the deviation amount between the reference position in the image and the position of the detection target in the image. Then, the position determining device determines the position of the detection target by correcting the detection position based on the detection deviation amount.

[0054] Here, image analysis technology is known to determine the position of an image target (detection target) in an image at high speed and with high precision.

[0055] Accordingly, the above position-specific device demonstrates the effect of being able to realize high-speed and high-precision position-specification of the detection target by means of the detection deviation amount calculated at high speed and high precision from the above-described image and the detection position.

[0056] In addition, as described above, at the detection time, the position of the detection target and the position of the detection device coincide, or the amount of misalignment between the two becomes sufficiently small. Therefore, for example, when the center position of the image is set as the reference position, the detection target is positioned almost in the center of the image.

[0057] By using an image in which the detection target is positioned near the center, the position determining device can reduce the inspection area for determining the position of the detection target in the image compared to the case where an image in which the detection target is not positioned near the center is used. Therefore, the position determining device can realize high-speed image analysis processing required to detect the detection target from the image.

[0058] In addition, since the detection target is positioned almost in the center of the above-mentioned image, the position determining device can increase the proportion of the captured area of ​​the detection target occupying the entire above-mentioned image compared to an above-mentioned image in which the detection target is not positioned almost in the center. That is, the position determining device can generate the above-mentioned image in which the detection target is magnified and captured. Therefore, the position determining device can perform high-precision image analysis on the above-mentioned image in which the detection target is magnified and captured.

[0059] Accordingly, the above position-specific device demonstrates the effect of realizing high-speed and high-precision image analysis of the above-mentioned image and, by utilizing the result of this image analysis, realizing high-speed and high-precision position control of the above-mentioned detection target.

[0060] A position-specific device according to one embodiment of the present invention sequentially specifies the position of each of a plurality of detection targets, and calculates a reference displacement amount from the difference between (A) a first expected detection position, which is a position where a first detection target, one of the plurality of detection targets, is to exist, and (B) a second expected detection position, which is a position where a second detection target, which is to be specified after the first detection target, is to exist, and sets the position obtained by adding the reference displacement amount to the position of the first detection target specified by the position-specific unit as the second expected detection position after correction, and sets the time at which it is expected that the position of at least one of the second detection target and the detection device coincides with the second expected detection position after correction as the detection time at which the second detection target is detected, and at the detection time, the detection result regarding the second detection target may be generated in the detection device.

[0061] According to the above configuration, the position determining device calculates the reference displacement amount from the difference between the first expected detection position and the second expected detection position, and sets the position obtained by adding the calculated reference displacement amount to the position of the first detection target as the second expected detection position after correction. Then, at a time when it is expected that the position of at least one of the second detection target and the detection device coincides with the second expected detection position after correction, the position determining device generates the detection result for the second detection target in the detection device.

[0062] Accordingly, the above-described location-specific device exhibits the effect of being able to predict with high precision the location of the detection target to be located next by utilizing the location of the detection target specified immediately prior to specifying the location of each of the plurality of detection targets.

[0063] For example, regarding the reference displacement amount, which is the difference between the first expected detection position and the second expected detection position, it is said that the actual displacement amount, which is the difference between the actual position of the first detection target and the actual position of the second detection target, is smaller by the difference (dP). Similarly, regarding the reference displacement amount, which is the difference between the second expected detection position and the expected detection position of the third detection target whose position must be specified after the second detection target, it is said that the actual displacement amount, which is the difference between the actual position of the second detection target and the actual position of the third detection target, is smaller by the difference (dP).

[0064] Then, the actual position of the third detection target is 2 dP smaller than the expected detection position of the third detection target.

[0065] In this regard, if the position obtained by adding the reference displacement amount to the actual position of the second detection target is set as the third expected detection position after correction, the deviation amount between the actual position of the third detection target and the third expected detection position after correction becomes the difference (dP).

[0066] That is, compared to using the predicted detection position of the third detection target without considering the position of the second detection target, the prediction accuracy of the position of the third detection target can be improved by using the third predicted detection position after correction, which is corrected by the position of the second detection target.

[0067] To solve the above problem, a control method according to an embodiment of the present invention is a control method for a position-specific device for specifying the position of a detection target, comprising: a command step of outputting a command value calculated from a target trajectory including a pre-set expected detection position as a target position, which is a position where the detection target is to exist, to a servo control system that controls the position of at least one of the detection device and the detection target; an acquisition step of acquiring a detection result of the detection device at a detection time, which is a time when at least one of the detection device and the detection target is moving, and the target position of the servo control system calculated by considering the response delay time of the servo control system matches the expected detection position; a detection deviation amount calculation step of calculating a detection deviation amount, which is the deviation amount between the detection position corresponding to the reference position and the position of the detection target, from the deviation amount between the reference position and the position of the detection target in the detection result; a detection position calculation step of calculating the detection position from the position of the detection device at the detection time; and a position-specific step of specifying the position of the detection target by correcting the detection position by the detection deviation amount.

[0068] According to the above configuration, the control method calculates the detection deviation amount, which is the amount of deviation between the detection position and the position of the detection target, from the detection result. Additionally, the control method calculates the detection position from the position of the detection device at the time of detection. Furthermore, the control method specifies the position of the detection target based on the detection deviation amount and the detection position.

[0069] (High precision of position detection)

[0070] Therefore, the above control method has the effect of being able to determine the position of the detection target with high precision by utilizing the amount of misalignment between the two, even when the position of the detection target and the detection position do not coincide at the detection time.

[0071] (High precision and high speed of detection results)

[0072] In addition, according to the above configuration, the control method calculates the detection deviation amount from the detection result at the detection time, which is the time when the target position of the servo control system, calculated by considering the response delay time of the servo control system, matches the expected detection position.

[0073] Here, at the timing when the detection device performs detection, if the detection target does not exist within the detection range where the detection device can detect the detection target, the detection deviation amount cannot be calculated from the detection result.

[0074] Therefore, in order to avoid the situation where "at the timing when the detection device performs detection, the detection target does not exist within the range where the detection device can detect the detection target," the control method acquires the detection result at the detection time.

[0075] For example, if the servo control system moves only the detection device and the detection target is not moved, and the detection target is placed in advance at the expected detection position or at a position sufficiently close to the expected detection position, the control method performs the following processing. That is, the control method sets the time at which the target position of the servo control system, calculated by considering the response delay time of the servo control system controlling the position of the detection device, coincides with the expected detection position as the detection time.

[0076] Here, by considering the response delay time of the servo control system, it is believed that the "target position of the servo control system at each time point" coincides with the "feedback position of the servo control system at each time point," or that the discrepancy between the two is sufficiently small. Furthermore, the feedback position of the servo control system controlling the position of the detection device can be regarded as the position of the detection device. Therefore, the "position of the detection device at each time point moved by the servo control system" coincides with the "target position of the servo control system at each time point calculated by considering the response delay time of the servo control system," or that the discrepancy between the two is sufficiently small.

[0077] As explained above, at the time of detection, the "position of the detection device moved by the servo control system" and the "expected detection position" will coincide, or the amount of discrepancy between the two will be sufficiently small. Furthermore, as previously mentioned, the detection target is placed in advance at the expected detection position or at a position sufficiently close to the expected detection position. Therefore, at the time of detection, the "position of the detection device moved by the servo control system" and the position of the detection target will coincide, or the amount of discrepancy between the two will be sufficiently small.

[0078] As a result, the above control method can avoid the situation where "at the timing when the detection device performs detection, the detection target does not exist within the range where the detection device can detect the detection target."

[0079] Additionally, for example, if the servo control system moves only the detection target and the detection device does not move, and the detection device is placed in advance at the expected detection position or at a position sufficiently close to the expected detection position, the control method performs the following processing. That is, the control method sets the time at which the target position of the servo control system, calculated by considering the response delay time of the servo control system controlling the position of the detection target, coincides with the expected detection position as the detection time.

[0080] As described above, by considering the response delay time of the servo control system, it is believed that the "target position of the servo control system at each time interval" will coincide with the "feedback position of the servo control system at each time interval," or that the discrepancy between the two will be sufficiently small. Furthermore, the feedback position of the servo control system that controls the position of the detection target can be regarded as the position of the detection target. Therefore, the "position of the detection target at each time interval moved by the servo control system" will coincide with the "target position of the servo control system at each time interval calculated by considering the response delay time of the servo control system," or that the discrepancy between the two will be sufficiently small.

[0081] As explained above, at the time of detection, the "position of the detection target moved by the servo control system" and the "expected detection position" will coincide, or the amount of discrepancy between the two will be sufficiently small. Furthermore, as previously mentioned, the detection device is positioned in advance at the expected detection position or is positioned sufficiently close to the expected detection position. Therefore, at the time of detection, the "position of the detection target moved by the servo control system" and the position of the detection device will coincide, or the amount of discrepancy between the two will be sufficiently small.

[0082] As a result, the above control method can avoid the situation where "at the timing when the detection device performs detection, the detection target does not exist within the range where the detection device can detect the detection target."

[0083] Furthermore, for example, when the first servo control system moves the detection device and the second servo control system moves the detection target, the control method sets the following time as the detection time. That is, the time at which the target positions of the first servo control system and the second servo control system, respectively, calculated by considering the response delay times of the first servo control system and the second servo control system, coincide together with the expected detection position is set as the detection time.

[0084] As described above, by considering the response delay time of the servo control system, it is believed that the “target position of the servo control system at each time interval” coincides with the “feedback position of the servo control system at each time interval,” or that the amount of discrepancy between the two is sufficiently small.

[0085] Furthermore, the feedback position of the first servo control system controlling the position of the detection device can be considered as the position of the detection device. Additionally, the feedback position of the second servo control system controlling the position of the detection target can be considered as the position of the detection target.

[0086] Therefore, the “position of the moving detection device at each time interval” will match the “target position of the first servo control system at each time interval calculated by taking into account the response delay time of the first servo control system,” or the amount of discrepancy between the two will be sufficiently small. Furthermore, the “position of the moving detection target at each time interval” will match the “target position of the second servo control system at each time interval calculated by taking into account the response delay time of the second servo control system,” or the amount of discrepancy between the two will be sufficiently small.

[0087] As explained above, at the time of detection, the "position of the moving detection device," the "position of the moving detection target," and the expected detection position will coincide, or the amount of deviation from the third party will be sufficiently small.

[0088] As a result, the above control method can avoid the situation where "at the timing when the detection device performs detection, the detection target does not exist within the range where the detection device can detect the detection target."

[0089] The above control method acquires the detection result at the detection time, which is a time when at least one of the detection device and the detection target is moving, and is a time when "the position of the detection target and the position of the detection device coincide, or the amount of misalignment between the two becomes sufficiently small."

[0090] Here, since the position of the detection device at the detection time corresponds to the detection position, it is assumed that the amount of deviation between the reference position and the position of the detection target in the detection result at the detection time is sufficiently small. Furthermore, if it is known in advance that "the amount of deviation between the reference position and the position of the detection target in the detection result is sufficiently small," the interpretation of the detection result can be made highly precise compared to cases where "the amount of deviation between the two in the detection result is unpredictable or predicted to be large."

[0091] Therefore, the above control method can obtain the “detection result at the detection time” capable of performing high-precision analysis, that is, calculate the detection deviation amount with high precision from the “detection result at the detection time”.

[0092] In addition, the above control method calculates the detection deviation amount from "the detection result detected by the detection device while at least one of the detection target and the detection device is moving." Accordingly, the above control method can acquire the detection result at a high speed compared to the case where "the movement of the detection target and the detection device is stopped and then detection is performed by the detection device to generate the detection result," and as a result, the calculation of the detection deviation amount can be accelerated.

[0093] (High precision and high speed of location identification of detection targets)

[0094] As explained above, the control method can acquire the detection result capable of performing high-precision analysis at high speed, and calculate the detection deviation amount from the detection result at high speed and with high precision. Furthermore, the control method specifies the position of the detection target based on the calculated detection deviation amount and the detection position.

[0095] Accordingly, the above control method has the effect of being able to determine the location of the detection target at high speed and high precision. Effects of the invention

[0096] According to one embodiment of the present invention, the position of a detection target can be determined with high precision even if at least one of the detection target and the detection device is in motion. Brief explanation of the drawing

[0097] FIG. 1 is a drawing showing the configuration of the main parts of a position-specific device according to Embodiment 1 of the present invention. Figure 2 is a diagram showing an overall overview of a control system including the position-specific device of Figure 1. Figure 3 is a diagram illustrating an application example of the control system of Figure 2. FIG. 4 is a diagram showing an operational example in which the position-specific device of FIG. 1 controls the position of a workpiece through a servo control system for an application example as illustrated in FIG. 3. Figure 5 is a diagram illustrating a variation of the imaging method of the work. FIG. 6 is a diagram illustrating the “amount of positional deviation within the image” calculated from a captured image. Figure 7 is a diagram illustrating servo position deviations, etc., when the response delay time of the servo control system is not taken into account. Figure 8 is a diagram explaining the servo position deviation, etc., when considering the response delay time of the servo control system. Figure 9 is a diagram showing an example of an operation profile when the expected detection position is set to “100”. FIG. 10 is a diagram illustrating the discrepancy between the feedback position at the time of detection and the target position considering the response delay time of the servo control system. Figure 11 is a diagram showing an example of an operation profile when the expected detection position is set to “40”. FIG. 12 is a diagram illustrating the pixel resolution required for image analysis of a captured image according to the difference in required precision regarding the position of the workpiece to be specified. FIG. 13 is a diagram illustrating the process performed by the position-specific device of FIG. 1 when sequentially specifying the position of each of a plurality of workpieces. FIG. 14 is a flowchart illustrating the overall overview of the processing performed by the position-specific device of FIG. 1. Figure 15 is a flowchart illustrating an example of the detection instruction time determination process of Figure 14. Figure 16 is a flowchart illustrating examples of the detection deviation amount calculation processing and the detection position calculation processing of Figure 14, respectively. Specific details for implementing the invention

[0098] [Embodiment 1]

[0099] Hereinafter, an embodiment relating to one aspect of the present invention (hereinafter also referred to as "this embodiment") will be described based on the drawings. Also, identical or substantial parts in the drawings are given the same reference numerals, and their descriptions are not repeated. In this embodiment, a position determining device (10) that determines the position (Pw) of a work (40) from a detection result detected during the movement of at least one of a work (40) to be detected and an imaging device (33) to be detected is described as a typical example of a "position determining device that determines the position of a detection target."

[0100] §1. Application Examples

[0101] (Overview of the control system)

[0102] To facilitate understanding of the position-specific device (10) according to one embodiment of the present invention, first, an example of a case in which the present invention is applied, specifically, an overview of a control system (1) including the position-specific device (10), is described using FIG. 2.

[0103] FIG. 2 is a diagram showing an overall overview of a control system (1). The control system (1) is a master-slave control system comprising a position-specific device (10) as a master, and one or more slaves, such as a servo control system (20) and a detection system (30), connected to the master via a network. The position-specific device (10) is called the "master" in the sense that it manages data transmission via a network in the control system (1), while the "slaves" are managed by the master and perform data collection and control of equipment installed in a factory, for example. In the control system (1), EtherCAT (registered trademark) can be used as the network connecting the position-specific device (10) as a master and the slaves, such as the servo control system (20) and the detection system (30).

[0104] In addition, "master" and "slave" are defined based on the control function of data transmission over a network, and there are no specific limitations on what information is transmitted or received between each device.

[0105] (Location-specific device)

[0106] The position determining device (10), as a master, acquires (receives) data representing a control result (e.g., a control amount and a detection result) output by a slave such as a servo control system (20) and a detection system (30) every control cycle (Cc). Additionally, the position determining device (10), as a master, outputs (transmits) a control signal (Cs) (control instruction) including a command value (Cm) and a detection instruction time (aTd) to a slave such as a servo control system (20) and a detection system (30) every control cycle (Cc).

[0107] The position-specific device (10) is an industrial position-specific device, such as a PLC (Programmable Logic Controller), that executes a user program to control a control device, such as a servo motor (22), for example. In the control system (1), the position-specific device (10) is a higher-level controller for a servo driver (21) that acts as a lower-level controller.

[0108] Specifically, the position determining device (10) outputs a command value (Cm) generated from the target trajectory (Tt) every control cycle (Cc) to the servo control system (20) including the servo driver (21) every control cycle (Cc). In the servo control system (20), the servo driver (21) that receives the command value (Cm) performs feedback control to make the control quantity, which is the output of the servo motor (22) or the control target, follow the command value (Cm). Then, the position determining device (10) acquires data regarding the output (control quantity, e.g., torque, speed, and position) of the servo motor (22) from the servo control system (20) (particularly the servo driver (21)) every control cycle (Cc). The position-specific device (10) generates a command value (Cm) to the servo control system (20) based on a control amount received from the servo control system (20) (e.g., feedback position (Pf) for each control period (Cc)), and controls the servo control system (20) by transmitting the generated command value (Cm) to the servo control system (20).

[0109] Here, the position-specific device (10) controls, for example, a plurality of servo control systems (20), and specifically, controls the plurality of servo control systems (20) as follows. That is, for each of the plurality of servo control systems (20), the position-specific device (10) generates a command trajectory (Co) for each servo control system (20) from a target trajectory (Tt). Then, the position-specific device (10) outputs a "command value (Cm) for each servo control system (20)" generated from the command trajectory (Co) for each servo control system (20) for each of the plurality of servo control systems (20) for each control cycle (Cc), thereby coordinating the plurality of servo control systems (20). The position-specific device (10) synchronizes the multiple servo control systems (20) to the level of the operation result (control amount) by generating a "command value (Cm) for each servo control system (20)" by taking into account the response delay time (Ds) of each of the multiple servo control systems (20).

[0110] In the example illustrated in FIG. 2, the position-specific device (10) generates command trajectories (Co(A) and Co(B)) for each of the servo control systems (20(A) and 20(B)) from the target trajectory (Tt). The position-specific device (10) generates command values ​​(Cm(A) and Cm(B)) for each of the servo control systems (20(A) and 20(B)) from each of the command trajectories (Co(A) and Co(B)). In particular, the position-specific device (10) generates command values ​​(Cm(A) and Cm(B)) by taking into account the response delay times (Ds(A) and Ds(B)) for each of the servo control systems (20(A) and 20(B)). The position-specific device (10) coordinately controls each of the servo control systems (20(A) and 20(B)) by outputting command values ​​(Cm(A) and Cm(B)) at each control cycle (Cc) of the servo control system (20).

[0111] In addition, in the control system (1), the position-specific device (10) outputs a control signal (Cs) specifying a detection indication time (aTd), for example, every control period (Cc). In addition, the position-specific device (10) acquires (receives) a detection result (e.g., an image (Im)) which is the result of a detection operation (e.g., an imaging operation) performed by the detection system (30) from the detection system (30), for example, every control period (Cc).

[0112] Although specific details will be described later, the position-specific device (10) specifies a detection indication time (aTd), which is a time corrected from the detection time (Td) by the response delay time (Dd) of the detection system (30), in the control signal (Cs). Then, the position-specific device (10) outputs the control signal (Cs) specifying the detection indication time (aTd) to the detection system (30), thereby executing a detection operation (imaging operation) on the imaging device (33) (detection device) at the detection time (Td).

[0113] In the example illustrated in FIG. 2, for a position-specific device (10) acting as a master, two servo control systems (20) and one detection system (30) are connected as slaves. However, it is not necessary for there to be two servo control systems (20) connected to the position-specific device (10), and in the control system (1), there may be one or more servo control systems (20) connected to the position-specific device (10) acting as a master, for example, five.

[0114] In the following description, regarding the servo control system (20), if it is necessary to distinguish each of the multiple servo control systems (20), they are distinguished by assigning subscripts such as “(A)”, “(B)”, “(C)”, …, “(Z)” to the symbols. For example, they are distinguished by writing “servo control system (20(A))”, “servo control system (20(B))”, “servo control system (20(C))”, …, “servo control system (20(Z))”. If there is no particular need to distinguish each of the multiple servo control systems (20), they are simply referred to as “servo control system (20)”.

[0115] In addition, regarding the work (40), if it is necessary to distinguish each of the multiple work (40), they are distinguished by assigning subscripts such as “(A)”, “(B)”, “(C)”, …, “(Z)” to the code. For example, they are distinguished by writing “work (40(A))”, “work (40(B))”, “work (40(C))”, …, “work (40(Z))”. If there is no need to specifically distinguish each of the multiple work (40), they are simply called “work (40)”. The same applies to “position of work (40) (Pw)”, “imaging image (Im)”, “detection time (Td)”, “expected detection position (pPd)”, etc.

[0116] (Servo control system)

[0117] The servo control system (20) is a feedback control system that controls the output (e.g., position) of the servo control system (20) according to a command value (Cm) from a position-specific device (10), and specifically controls the position of at least one of the imaging device (33) and the work (40). For example, in the example shown in FIG. 3, the servo control system (20) controls the position of the imaging device (33), and in the example shown in FIG. 4, the servo control system (20) controls the position (Pw) of the work (40) (more specifically, the position of the substrate on which the work (40) is placed).

[0118] The servo control system (20) includes a servo motor (22) as an actuator that changes the position of at least one of the imaging device (33) and the work (40), and a servo driver (21) that controls the servo motor (22).

[0119] The servo driver (21) acts as a control device for the servo motor (22) and receives a control signal (Cs) (specifically, a command value (Cm)) from the position-specific device (10) every control cycle (Cc), and controls the driving of the servo motor (22) according to the received control signal (Cs). In addition, the servo driver (21) obtains actual values ​​regarding the output of the servo motor (22), such as position, speed, and torque, from a position sensor and a torque sensor connected to the shaft of the servo motor (22). The servo driver (21) outputs data regarding these obtained actual values ​​to the position-specific device (10) every control cycle (Cc).

[0120] The servo motor (22) is an actuator whose output (specifically, the position of at least one of the imaging device (33) and the work (40)) is controlled according to the control of the servo driver (21), and is, for example, a linear actuator. The servo motor (22) changes the position of the imaging device (33), that is, changes the detection position (Pd), by driving the axis of a manipulator equipped with an imaging device (33) on a fingertip, for example. In the following description, the "output position of the servo control system (20)" as an actual value regarding the output of the servo motor (22) is also referred to as the "feedback position (Pf)."

[0121] For example, when the servo control system (20) controls the position of the imaging device (33), the position of the imaging device (33) in each of the mutually orthogonal X-axis and Y-axis is determined by the outputs of the servo motor (22(A)) and the servo motor (22(B)). That is, the values ​​of the position of the imaging device (33) (in other words, the detection position (Pd)) in each of the X-axis and Y-axis are determined by the outputs of the servo motor (22(A)) and the servo motor (22(B)). Each of the servo drivers (21(A), 21(B)) controls the output of each of the servo motors (22(A), 22(B)), that is, controls the driving of each.

[0122] For example, when the servo control system (20) controls the position of the imaging device (33), the servo driver (21(A)) transmits the feedback position (Pf(A)) on the X-axis of the imaging device (33) to the position specification device (10) as one of the actual values ​​(control quantities) regarding the output of the servo motor (22(A)). Likewise, the servo driver (21(B)) transmits the feedback position (Pf(B)) on the Y-axis of the imaging device (33) to the position specification device (10) as one of the control quantities of the servo motor (22(B)).

[0123] (Detector)

[0124] The detection system (30) generates a detection result that is the result of detecting the work (40), and in particular, generates information as a detection result for calculating the “amount of deviation between the position (Pw) of the work (40) and the detection position (Pd),” and notifies (transmits) the generated detection result to the position-specific device (10). The detection system (30) illustrated in FIG. 2 includes an imaging device (33) which is a detection device, an imaging control device (32) which controls the detection operation (e.g., imaging operation) by the imaging device (33), and a communication device (31) which performs communication with the imaging control device (32).

[0125] When the imaging device (33) receives a detection trigger (imaging trigger) from the imaging control device (32), it executes a detection operation (imaging operation) and also outputs (transmits) the result of the executed detection operation, for example, an image (Im) generated by the execution of the imaging operation, to the imaging control device (32).

[0126] The imaging control device (32) executes a detection operation (imaging operation) on the imaging device (33) by outputting (transmitting) a detection trigger (imaging trigger) to the imaging device (33), and also receives a detection result (e.g., an image (Im)) which is the result of executing the detection operation from the imaging device (33). In particular, when the imaging control device (32) receives an output instruction (detection instruction) from the communication device (31) instructing the output of a detection trigger (imaging trigger) to the imaging device (33), it transmits the detection trigger to the imaging device (33).

[0127] When the imaging control device (32) receives a detection result (e.g., an image (Im)) which is the result of executing a detection operation from the imaging device (33), it outputs (transmits) the received detection result to the location-specific device (10) via a network. For example, the imaging control device (32) outputs (transmits) the detection result (e.g., an image (Im)) which is the result of executing a detection operation by the imaging device (33) to the location-specific device (10) via a network at some control period (Cc) after the detection time (Td).

[0128] Although specific details will be described later, when the imaging control device (32) receives a detection result (e.g., an image (Im)) which is the result of executing a detection operation from the imaging device (33), it may interpret the received detection result and output the interpretation result to the location-specific device (10) via a network. For example, the imaging control device (32) may perform image interpretation on the image (Im) generated by the imaging device (33) and output the result of the image interpretation to the location-specific device (10) via a network at some control period (Cc) after the detection time (Td).

[0129] Specifically, the imaging control device (32) may calculate the amount of “position misalignment within the image,” which is the amount of misalignment between the position (Pw) of the work (40) in the imaging image (Im) (e.g., the center position of the work (40)) and the reference position (Rb), by image analysis of the imaging image (Im). Then, the imaging control device (32) may output the calculated amount of “position misalignment within the image” to the position determining device (10) via a network. For example, the imaging control device (32) may transmit the calculated amount of “position misalignment within the image” to the position determining device (10) at some control period (Cc) after the detection time (Td).

[0130] The communication device (31) receives a control signal (Cs) from the position-specific device (10) every control period (Cc), and at the detection instruction time (aTd) specified in the received control signal (Cs), outputs (transmits) an output instruction (detection instruction) to the imaging control device (32).

[0131] In the detection system (30), after the communication device (31) transmits an output instruction to the imaging control device (32), a predetermined time is required until the imaging device (33) performs a detection operation, and this predetermined time is also called the "response delay time (Dd) of the detection system (30)." The "response delay time (Dd) of the detection system (30)" is also called the "response delay time of the imaging device (33) (detection device)."

[0132] (Examples of control system applications)

[0133] FIG. 3 is a drawing illustrating an example of application of a control system (1). Specifically, it is a drawing illustrating an example of applying the control system (1) to an application in which an imaging device (33) is moved to specify the position (Pw) of each of a plurality of work (40) placed on a substrate, and an image (Im) is generated for each of the plurality of work (40).

[0134] The control system (1) (particularly, the position determining device (10)) moves the imaging device (33) along a trajectory passing over each of the heads of the plurality of workpieces (40) placed on the substrate, as illustrated in FIG. 3. Additionally, the position determining device (10) performs imaging on the imaging device (33) over each of the heads of the plurality of workpieces (40) to generate an image (Im) for each of the plurality of workpieces (40). Then, the position determining device (10) determines the position (Pw) of each of the plurality of workpieces (40) from the position of the imaging device (33) at the time when the image (Im) for each of the plurality of workpieces (40) is generated on the imaging device (33) and from the image (Im) for each of the plurality of workpieces (40).

[0135] For example, as indicated by the dotted arrow in FIG. 3, the position-specific device (10) moves the imaging device (33) first over the head of the work (40(A)), then over the head of the work (40(B)), and further sequentially over the heads of each of the work (40(C), 40(D), 40(E)).

[0136] In addition, the position-specific device (10) performs imaging on the imaging device (33) above each of the work (40(A) to 40(E)) to generate an image (Im) for each of the work (40(A) to 40(E)), that is, generates an image (Im(A)) to an image (Im(E)).

[0137] And, the position determining device (10) determines the “position of the imaging device (33) at the detection time (Td(A)) at the time when the imaging device (33) generated an image (Im(A))” and the position (Pw(A)) of the work (40(A)) from the image (Im(A)). The position determining device (10) determines the “position of the imaging device (33) at the detection time (Td(B)) at the time when the imaging device (33) generated an image (Im(B))” and the position (Pw(B)) of the work (40(B)) from the image (Im(B)). The position determining device (10) determines the position of the imaging device (33) at the detection time (Td(C)) at which the imaging device (33) generates an image (Im(C)) and the position (Pw(C)) of the work (40(C)) from the image (Im(C)). The position determining device (10) determines the position of the imaging device (33) at the detection time (Td(D)) at which the imaging device (33) generates an image (Im(D)) and the position (Pw(D)) of the work (40(D)) from the image (Im(D)). The position determining device (10) determines the position of the imaging device (33) at the detection time (Td(E)) which is the time at which the imaging device (33) generated an image (Im(E)) and the position (Pw(E)) of the work (40(E)) from the image (Im(E)).

[0138] Here, in the example illustrated in FIG. 3, the work (40) is a fine electronic component of 1 mm or less, such as a multilayer ceramic capacitor, a crystal oscillator, an IC chip, and various other components. As the miniaturization of components and circuits progresses, high precision is required for the task of specifying the position of such electronic components on a substrate (position specification task, inspection task). Furthermore, as the number of inspection sites increases in accordance with the increase in the number of components used, it is also required to accelerate the aforementioned position specification task and inspection task to reduce the time required for the position specification task and inspection task. In other words, there is a desire to realize position inspection at high speed and with high precision for fine component placements and fine printed patterns.

[0139] Therefore, the control system (1) (particularly, the position determining device (10)) determines the position (Pw) of the work (40) with high precision using the following two values. That is, the position determining device (10) determines the position (Pw) of the work (40) with high precision by means of “detection position (Pd) (i.e., the position of the imaging device (33) at the detection time (Td))” and “detection deviation amount (Qd), which is the amount of deviation between the detection position (Pd) and the position (Pw) of the work (40).” Since the detection position (Pd) corresponds to the reference position (Rb) in the imaging image (Im), the detection deviation amount (Qd) corresponds to the “position deviation amount within the image,” which is the “amount of deviation of the position (Pw) of the work (40) from the reference position (Rb)” in the imaging image (Im).

[0140] Additionally, the control system (1) (particularly, the position determining device (10)) captures the work (40) on the imaging device (33) while the imaging device (33) is moving, without stopping the movement of the imaging device (33), and calculates the amount of detection deviation (Qd) from the resulting captured image (Im). Accordingly, the control system (1) (particularly, the position determining device (10)) can realize high-precision position determination of the work (40) considering the amount of detection deviation (Qd) at high speed, compared to a method of generating the captured image (Im) after stopping the movement of the imaging device (33).

[0141] (Regarding the example of moving the detection device)

[0142] In the control system (1) illustrated in FIG. 3, the position of the imaging device (33), which is a detection device, is controlled by a servo control system (20), that is, the position of the imaging device (33) is determined by the output of the servo control system (20). That is, the position determining device (10) controls the output (output position) of the servo motor (22) to the servo driver (21) by transmitting a command value (Cm) to the servo driver (21). For example, the position of the imaging device (33) on the mutually orthogonal X-axis and Y-axis, respectively, is the output (output position) of each of the two servo control systems (20), 20(A) and 20(B).

[0143] Specifically, a servo driver (21(A)) that receives a command value (Cm(A)) from a position-specific device (10) controls a servo motor (22(A)), and the imaging device (33) moves in the X-axis direction by the servo motor (22(A)). In addition, the control result (output) of the servo motor (22(A)) is fed back to the servo driver (21(A)). Likewise, a servo driver (21(B)) that receives a command value (Cm(B)) from a position-specific device (10) controls a servo motor (22(B)), and the imaging device (33) moves in the Y-axis direction by the servo motor (22(B)). In addition, the control result of the servo motor (22(B)) is fed back to the servo driver (21(B)).

[0144] In addition, in the control system (1) exemplified in FIG. 3, the position-specific device (10) transmits a control signal (Cs) specifying a detection indication time (aTd) to the detection system (30) (specifically, the communication device (31)) to perform imaging on the imaging device (33) at the detection time (Td). The detection time (Td) is the time when the position of the imaging device (33) and the position (Pw) of the work (40) coincide, or when the amount of misalignment between the two becomes sufficiently small. The image (Im) generated by the imaging device (33) performing imaging at the detection time (Td) is transmitted to the position-specific device (10) by the imaging control device (32). The image control device (32) may output to the position determining device (10) the amount of “position deviation within the image”, which is the amount of deviation between the position (Pw) of the work (40) in the image (Im) and the reference position (Rb), calculated by image analysis of the image (Im) instead of the image (Im).

[0145] Here, the detection position (Pd), which is the position where the imaging device (33) detects the work (40), can be considered as the position of the imaging device (33) at the detection time (Td). Therefore, the position determining device (10) can calculate the detection position (Pd) from the position of the imaging device (33) at the detection time (Td).

[0146] Additionally, the detection position (Pd), that is, the position of the imaging device (33) at the detection time (Td), corresponds to the reference position (Rb) (e.g., the center position of the imaging image (Im)) in the imaging image (Im), which is the detection result generated by the imaging device (33). Therefore, the position determining device (10) can calculate the amount of misalignment (detection misalignment amount (Qd)) between the detection position (Pd) corresponding to the reference position (Rb) and the position (Pw) of the work (40) from the amount of misalignment between the reference position (Rb) in the imaging image (Im) and the position (Pw) of the work (40). In the example illustrated in FIG. 3, the reference position (Rb) in the imaging image (Im) is shown as the point where the two-dot dashed lines in the imaging image (Im) intersect.

[0147] And, the position-specific device (10) specifies the position (Pw) of the work (40) by the detection position (Pd) calculated from the position of the imaging device (33) at the detection time (Td) and the detection deviation amount (Qd) calculated from the imaging image (Im).

[0148] In the example illustrated in FIG. 3, an example was described in which the position-specific device (10) controls the position of the imaging device (33) through the servo control system (20), but the position-specific device (10) may also control the position (Pw) of the work (40) through the servo control system (20). Hereinafter, using FIG. 4, an example in which the position-specific device (10) controls the position (Pw) of the work (40) (more specifically, the position of the substrate on which the work (40) is placed) will be described.

[0149] (Regarding the example of moving the detection target)

[0150] FIG. 4 is a diagram illustrating an operational example in which a position-specific device (10) controls the position (Pw) of a work (40) to be detected (more specifically, the position of the substrate on which the work (40) is placed) through a servo control system (20) for an application example of a control system (1) as shown in FIG. 3. That is, in FIG. 3, the position (Pw) of the work (40) is fixed and the imaging device (33) moves, whereas in FIG. 4, the position of the imaging device (33) is fixed and the position (Pw) of the work (40) moves. However, in other respects, the content of the processing performed by the position-specific device (10) is almost identical to the example shown in FIG. 4 and the example shown in FIG. 3.

[0151] In the control system (1) illustrated in FIG. 4, the position (Pw) of the work (40) is controlled by a servo control system (20), that is, the position (Pw) of the work (40) is determined by the output of the servo control system (20). That is, the position determining device (10) controls the output (output position) of the servo motor (22) to the servo driver (21) by transmitting a command value (Cm) to the servo driver (21). For example, the values ​​of the position (Pw) of the work (40) on the mutually orthogonal X-axis and Y-axis, respectively, are the outputs (output positions) of each of the two servo control systems (20), servo control systems (20(A)) and 20(B)).

[0152] Specifically, a servo driver (21(A)) that receives a command value (Cm(A)) from a position-specific device (10) controls a servo motor (22(A)), and the work (40) moves in the X-axis direction by the servo motor (22(A)). Additionally, the control result (output) of the servo motor (22(A)) is fed back to the servo driver (21(A)). Likewise, a servo driver (21(B)) that receives a command value (Cm(B)) from a position-specific device (10) controls a servo motor (22(B)), and the work (40) moves in the Y-axis direction by the servo motor (22(B)). Additionally, the control result of the servo motor (22(B)) is fed back to the servo driver (21(B)).

[0153] In the example illustrated in FIG. 4, as shown in FIG. 3, the position determining device (10) transmits a control signal (Cs) specifying a detection indication time (aTd) to the detection system (30), thereby performing imaging on the imaging device (33) at the detection time (Td). Then, the position determining device (10) determines the position (Pw) of the work (40) by the detection position (Pd) calculated from the position of the imaging device (33) and the detection deviation amount (Qd) calculated from the image (Im). In the example illustrated in FIG. 4, as shown in FIG. 3, the reference position (Rb) in the image (Im) is indicated as the point where the two-dot dashed lines in the image (Im) intersect.

[0154] FIG. 3 illustrates an example of operation in which a position-specific device (10) controls an imaging device (33) through a servo control system (20), and FIG. 4 illustrates an example of operation in which a position-specific device (10) controls the position (Pw) of a work (40) through a servo control system (20). However, the position-specific device (10) does not need to control the position of either the imaging device (33) or the work (40), and the position-specific device (10) may control the positions of both the imaging device (33) and the work (40).

[0155] For example, in the control system (1), the position of the imaging device (33) on the X-axis is determined by the output of the servo control system (20(A)), and the value of the position (Pw) of the work (40) on the Y-axis may be determined by the output of the servo control system (20(B)). That is, the position determining device (10) controls the output (output position) of the servo motor (22(A)) to the servo driver (21(A)) by transmitting a command value (Cm(A)) to the servo driver (21(A)), that is, controls the position of the imaging device (33) on the X-axis. Additionally, the position-specific device (10) controls the output (output position) of the servo motor (22(B)) to the servo driver (21(B)) by transmitting a command value (Cm(B)) to the servo driver (21(B)), that is, controls the value on the Y-axis of the position (Pw) of the work (40).

[0156] Specifically, a servo driver (21(A)) that receives a command value (Cm(A)) from a position-specific device (10) controls a servo motor (22(A)), and the imaging device (33) moves in the X-axis direction by the servo motor (22(A)). In addition, the control result (output) of the servo motor (22(A)) is fed back to the servo driver (21(A)). Likewise, a servo driver (21(B)) that receives a command value (Cm(B)) from a position-specific device (10) controls a servo motor (22(B)), and the work (40) moves in the Y-axis direction by the servo motor (22(B)). In addition, the control result of the servo motor (22(B)) is fed back to the servo driver (21(B)).

[0157] Even if the position-specific device (10) controls the positions of both the imaging device (33) and the work (40), the "method for specifying the position (Pw) of the work (40)" by the position-specific device (10) is as described using FIGS. 3 and FIGS. 4. That is, the position-specific device (10) transmits a control signal (Cs) specifying the detection indication time (aTd) to the detection system (30), thereby performing imaging on the imaging device (33) at the detection time (Td). Then, the position-specific device (10) specifies the position (Pw) of the work (40) by the detection position (Pd) calculated from the position of the imaging device (33) at the detection time (Td) and the detection deviation amount (Qd) calculated from the image (Im).

[0158] In addition, below, to facilitate understanding of the processing performed by the position-specific device (10), the “method of specifying the position (Pw) of the work (40)” by the position-specific device (10) is explained using an example in which “the position-specific device (10) controls the position of the imaging device (33) through the servo control system (20).” However, as described above, the position-specific device (10) only needs to control the position of at least one of the imaging device (33) and the work (40), and it is not essential for the position-specific device (10) to control the position of the imaging device (33).

[0159] Additionally, it is not essential for the position determining device (10) to perform image analysis on the captured image (Im). The position determining device (10) only needs to be able to determine the detection deviation amount (Qd), which is the deviation amount between the position (Pw) of the work (40) in the captured image (Im) (e.g., the center position of the work (40)) and the reference position (Rb), from the "position deviation amount within the image," which is the deviation amount between the position (Pw) of the work (40) in the captured image (Im) and the detection position (Pd). The image control device (32) may perform the image analysis on the captured image (Im), or in other words, the image control device (32) may calculate the amount of "position deviation within the image" by performing image analysis on the captured image (Im). In that case, the position determining device (10) obtains the “amount of position deviation within the image” from the imaging control device (32), and determines (calculates) the detected deviation amount (Qd) from the obtained “amount of position deviation within the image”.

[0160] (First Study on the Imaging Method of a Work: Generation of Imaging Images Without Stopping)

[0161] FIG. 5 is a diagram illustrating a variation of the imaging method of a work (40). FIG. 5 (A) is a diagram illustrating a conventional method for generating an imaging image (Im) to calculate the amount of misalignment (detection misalignment (Qd)) between the detection position (Pd) corresponding to the reference position (Rb) and the position (Pw) of the work (40).

[0162] In other words, conventionally, the method of stopping the movement of the imaging device (33) and imaging the work (40) to generate an image (Im) was common. Specifically, the conventional control system would set the movement speed (servo speed (Vs)) of the imaging device (33) to "0", and after the vibration of the imaging device (33) was suppressed—that is, after a waiting time (vibration damping waiting time) had elapsed—output a detection trigger to perform imaging on the imaging device. Then, the conventional control system would use the image generated by the imaging device to determine the position (Pw) of the work (40) and check whether the work (40) was in the desired position.

[0163] The conventional method of “stopping the movement of the imaging device (33) and generating an image (Im)” has the advantage of being able to generate an image (Im) capable of detecting with high precision the amount of misalignment (detection misalignment (Qd)) between the detection position (Pd) corresponding to the reference position (Rb) and the position (Pw) of the work (40).

[0164] However, since the conventional control system performs the imaging after processing "stopping the movement of the imaging device (33)" and "waiting until the waiting time elapses," there is a problem that the time required to perform the imaging becomes long, as shown in (A) of FIG. 5.

[0165] FIG. 5 (B) is a diagram illustrating a method for generating an image (Im) for "calculating the amount of misalignment (detection misalignment (Qd)) between the detection position (Pd) corresponding to the reference position (Rb) and the position (Pw) of the work (40)," which is executed by a control system (1) (particularly, a position determining device (10)). The position determining device (10) generates the image (Im) without stopping the movement of the imaging device (33), that is, without stopping. Specifically, as shown in FIG. 5 (B), the position determining device (10) does not set the movement speed (servo speed (Vs)) of the imaging device (33) to "0," and outputs a detection trigger while the imaging device (33) is moving to perform imaging on the imaging device (33).

[0166] The method of “generating an image (Im) without stopping” of the position-specific device (10) illustrated in Fig. 5 (B) can increase the tact compared to the method of “generating an image (Im) after stopping the movement of the imaging device (33)” of the conventional control system illustrated in Fig. 5 (A).

[0167] In particular, when generating multiple images (Im) for each of the multiple works (40) in order to specify the position (Pw) of each of the multiple works (40) as illustrated in FIG. 5, the difference between the conventional method and the method performed by the position specifying device (10) becomes greater.

[0168] In other words, in the conventional method, whenever an image (Im) is to be generated, the movement speed of the imaging device (33) is initially set to "0" and the image (Im) is generated after a waiting time has elapsed, so a vast amount of time is required to generate multiple images (Im). In contrast, the position determining device (10) does not stop the movement of the imaging device (33), that is, it generates multiple images (Im) sequentially while the imaging device (33) is moving, so the time required to generate multiple images (Im) can be significantly reduced compared to the conventional method.

[0169] As illustrated in FIG. 5 (A), whenever an image (Im) is generated, the movement of the imaging device (33) is stopped, and the position of the imaging device (33) is placed at a predetermined position before generating the image (Im), the time required to generate the image (Im) is extended. However, since the position of the imaging device (33) at the time of generating the image (Im) is fixed, that is, the detection position (Pd) is fixed, the position (Pw) of the work (40) can be determined by the preset detection position (Pd) and the amount of deviation of the position (Pw) of the work (40) from the detection position (Pd). And, the “amount of deviation from the detection position (Pd) of the position (Pw) of the work (40)” can be precisely calculated by the “amount of deviation from the reference position (Rb) of the position (Pw) of the work (40) in the image (Im)”.

[0170] In contrast, as illustrated in (B) of FIG. 5, when an image (Im) is generated without stopping the movement of the imaging device (33), the time required to generate the image (Im) can be shortened compared to "stopping the movement of the imaging device (33) every time an image (Im) is generated." However, the position of the imaging device (33) at the time of generating the image (Im) is not fixed, that is, the detection position (Pd) is not fixed.

[0171] Therefore, the position (Pw) of the work (40) cannot be calculated without precisely determining the “position of the detection position (Pd) that changes every time at the time of generation of the image (Im) (i.e., the detection time (Td))” and the “amount of deviation of the position (Pw) of the work (40) from the detection position (Pd).” In other words, in order to determine the position (Pw) of the work (40), the position determining device (10) must first precisely calculate the detection position (Pd) at the detection time (Td), or in other words, the “position of the imaging device (33) at the detection time (Td).” Second, the position-specific device (10) must accurately calculate the “amount of deviation from the detection position (Pd) of the position (Pw) of the work (40)” from the “amount of deviation from the reference position (Rb) of the position (Pw) of the work (40)” in the image (Im).

[0172] The position determining device (10) precisely calculates the following two values ​​to determine the position (Pw) of the work (40) from the image (Im) captured during the movement of the image device (33) without stopping the movement of the image device (33). That is, the position determining device (10) precisely calculates the “amount of deviation from the reference position (Rb) of the position (Pw) of the work (40) in the image (Im)” and the “position of the image device (33) at the detection time (Td).”

[0173] Here, since the position of the imaging device (33) is controlled by the servo control system (20), the position of the imaging device (33) can be considered as the feedback position (Pf) of the servo control system (20). Therefore, the “position of the imaging device (33) at the detection time (Td)” can be considered as the “feedback position (Pf) of the servo control system (20) at the detection time (Td).”

[0174] Additionally, the “amount of deviation from the detection position (Pd) of the position (Pw) of the work (40)” corresponds to the “amount of deviation from the reference position (Rb) of the position (Pw) of the work (40) in the captured image (Im)”. In the following description, the “amount of deviation from the reference position (Rb) of the position (Pw) of the work (40) in the captured image (Im)” is also abbreviated as “position deviation within the image”.

[0175] Therefore, the relationship that “the position (Pw) of the work (40) can be determined by the amount of deviation from the detection position (Pd) of the position (Pw) of the work (40)” and the “detection position (Pd) at the detection time (Td)” can be expressed as follows. That is, it can be expressed as {position (Pw) of the work (40) = position deviation within the image + “feedback position (Pf) of the servo control system (20) at the detection time (Td) (actual position)”}.

[0176] (Regarding the amount of misalignment between the reference position in the captured image and the position of the workpiece)

[0177] FIG. 6 is a diagram illustrating the “amount of positional deviation within the image” calculated from an image (Im). As described above, the position determining device (10) calculates the “amount of positional deviation within the image” from the image (Im), that is, calculates the “amount of deviation from the reference position (Rb) of the position (Pw) of the work (40) in the image (Im).” Then, the position determining device (10) calculates the amount of deviation (detection deviation amount (Qd)) between the detection position (Pd) corresponding to the reference position (Rb) and the position (Pw) of the work (40) from the “amount of positional deviation within the image.”

[0178] In FIG. 6, the point where the two-dot dashed lines intersect represents a reference position (Rb) corresponding to the detection position (Pd) in the image (Im) (e.g., the center point of the image (Im)). Also, the asterisk represents a position (Pw) of the work (40) (e.g., the center position of the work (40)).

[0179] As shown in (A) of FIG. 6, when the imaging device (33) performs imaging with the position (Pw) of the work (40) (e.g., the center position of the work (40)) offset to the right relative to the position of the imaging device (33), the position (Pw) of the work (40) is offset to the right relative to the reference position (Rb) in the image (Im).

[0180] Likewise, as shown in (B) of FIG. 6, when the imaging device (33) performs imaging with the position (Pw) of the work (40) offset to the left relative to the position of the imaging device (33), the position (Pw) of the work (40) is offset to the left relative to the reference position (Rb) in the image (Im).

[0181] (Adjustment of the timing for executing detection)

[0182] (Consideration of response delay time of servo control system)

[0183] Here, when the work (40) is not present in the range where the imaging device (33) can capture the work (40) at the timing when the imaging device (33) performs imaging (i.e., detection time (Td)), the position determining device (10) cannot calculate the “amount of position deviation within the image” from the captured image (Im).

[0184] Therefore, in order to avoid the situation where “at the detection time (Td), the work (40) does not exist within the range where the imaging device (33) can capture the work (40),” the position determining device (10) performs the following processing. That is, the position determining device (10) performs imaging on the imaging device (33) at the expected time when the position of the imaging device (33) (i.e., the detection position (Pd)) and the position (Pw) of the work (40) coincide.

[0185] For example, the position determining device (10) obtains in advance an expected detection position (pPd) which is “the position where the work (40) should exist (in other words, the position where the work (40) is placed, which is a position that is pre-set in the design drawing, etc.) from a design drawing of a “substrate on which the work (40) is placed.” Then, the position determining device (10) performs the following processing to “determine the position (Pw) of the work (40) actually placed on the substrate and to verify whether the work (40) is placed according to the design drawing described above.”

[0186] That is, the position determining device (10) controls the servo control system (20) to move the imaging device (33) so that it passes over the head of a “work (40) that is placed at an expected detection position (pPd) on a substrate in advance, or is placed at a position sufficiently close to the expected detection position (pPd).” Specifically, the position determining device (10) controls the servo control system (20) along a target trajectory (Tt) in which the expected detection position (pPd) of the work (40) to be detected is set as the target position (Pt). When the position determining device (10) controls the position of the imaging device (33) through the servo control system (20), the target trajectory (Tt) corresponds to the movement path of the imaging device (33).

[0187] Here, regarding the position control of the imaging device (33) by the servo control system (20), if the response delay time (Ds) of the servo control system (20) is not taken into account, a large servo position deviation (the difference between the target position (Pt) and the feedback position (Pf) of the servo control system (20)) as exemplified in FIG. 7 occurs.

[0188] FIG. 7 is a diagram illustrating the servo position deviation (difference between target position (Pt) and feedback position (Pf)) when the response delay time (Ds) of the servo control system (20) is not taken into account. As shown in FIG. 7 (A), the feedback position (Pf) of the servo control system (20) is delayed by the response delay time (Ds) of the servo control system (20) with respect to the "target position (Pt) of the servo control system (20) without taking into account the response delay time (Ds) of the servo control system (20)." As a result, when the response delay time (Ds) of the servo control system (20) is not taken into account, a relatively large servo position deviation occurs periodically, as shown in FIG. 7 (B).

[0189] FIG. 8 is a diagram illustrating the servo position deviation (difference between target position (Pt) and feedback position (Pf)) when considering the response delay time (Ds) of the servo control system (20). In FIG. 8 (A), the "target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)" is indicated by a dotted line. As shown in FIG. 8 (A), the feedback position (Pf) of the servo control system (20) almost coincides with the "target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)." As a result, when considering the response delay time (Ds) of the servo control system (20), the servo position deviation becomes sufficiently small, as shown in FIG. 8 (B).

[0190] Therefore, the position determining device (10) determines the detection time (Td) as follows in order to “execute imaging on the imaging device (33) at an expected time when the position of the imaging device (33) (i.e., the detection position (Pd)) and the position (Pw) of the work (40) coincide.” That is, the position determining device (10) sets the detection time (Td) as the time when the “target position (Pt) of the servo control system (20) calculated by considering the response delay time (Ds) of the servo control system (20)” coincides with the expected detection position (pPd).

[0191] As illustrated in FIG. 8, by taking into account the response delay time (Ds) of the servo control system (20), the “target position (Pt) of the servo control system (20) at each time interval” and the “feedback position (Pf) of the servo control system (20) at each time interval” will match, or the amount of discrepancy between the two will be sufficiently small. Also, as previously described, the feedback position (Pf) of the servo control system (20) can be considered as the position of the imaging device (33). Therefore, the “position of the imaging device (33) at each time interval” will match the “target position (Pt) of the servo control system (20) at each time interval calculated by taking into account the response delay time (Ds) of the servo control system (20) at each time interval”, or the amount of discrepancy between the two will be sufficiently small.

[0192] As explained above, at the detection time (Td), the position of the imaging device (33) and the expected detection position (pPd) will coincide, or the amount of misalignment between the two will be sufficiently small. Also, as previously mentioned, the work (40) is placed in advance at the expected detection position (pPd) or at a position sufficiently close to the expected detection position (pPd). Therefore, at the detection time (Td), the position of the imaging device (33) and the position (Pw) of the work (40) will coincide, or the amount of misalignment between the two will be sufficiently small.

[0193] As a result, the position-specific device (10) can avoid the situation where “at the detection time (Td), the work (40) is not within the range where the imaging device (33) can image the work (40).”

[0194] In particular, the position determining device (10) can generate the following image (Im) by executing an image on the imaging device (33) at the detection time (Td), which is the time when the detection position (Pd) and the position (Pw) of the work (40) coincide, or when the amount of misalignment between the two is sufficiently small. That is, the position determining device (10) can generate an image (Im) in which “the reference position (Rb) corresponding to the detection position (Pd) and the position (Pw) of the captured work (40) coincide, or when the amount of misalignment between the two is sufficiently small.” For an image (Im) in which “the reference position (Rb) corresponding to the detection position (Pd) and the position (Pw) of the captured work (40) coincide, or the amount of misalignment between the two is sufficiently small,” high-resolution image analysis can be performed, so the position determining device (10) can calculate the amount of detection misalignment (Qd) with high precision.

[0195] FIG. 9 is a diagram showing an example of an operation profile when the expected detection position (pPd) (in other words, the target position (Pt)) is set to “100”. Specifically, FIG. 9 (A) shows the “target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)” and the “target speed of the servo control system (20) corresponding thereto” at each time point when the expected detection position (pPd) is set to “100”. FIG. 9 (B) shows the amount of deviation of the “feedback position (Pf) of the servo control system (20)” with respect to the “target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)” at each time point when the expected detection position (pPd) is set to “100”.

[0196] When the expected detection position (pPd) is set to "100", the amount of deviation of the "feedback position (Pf) of the servo control system (20)" with respect to the "target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)" at each time point falls within the following range. It falls within the range of "-0.005 mm (i.e., -5 μm)" to "+0.005 mm (i.e., +5 μm)".

[0197] As shown in (B) of FIG. 9, the feedback position (Pf) of the servo control system (20) at each time point does not completely correspond to the target position (Pt) of the servo control system (20), even when the response delay time (Ds) of the servo control system (20) is taken into account. That is, the position of the imaging device (33) at each time point does not completely correspond to the target position (Pt) of the servo control system (20), even when the response delay time (Ds) of the servo control system (20) is taken into account.

[0198] Here, as described above, at the detection time (Td), the "target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)" corresponds to the expected detection position (pPd). And, at the detection time (Td), the "target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)" and the "feedback position (Pf) of the servo control system (20) (i.e., the position of the imaging device (33)" do not correspond. Therefore, at the detection time (Td), the position of the imaging device (33) does not completely correspond to the expected detection position (pPd). However, as described above, by taking into account the "response delay time (Ds) of the servo control system (20)," the difference between the "target position (Pt) of the servo control system (20)" and the "feedback position (Pf) of the servo control system (20)" is sufficiently small. That is, at the detection time (Td), the amount of misalignment between the expected detection position (pPd) and the position of the imaging device (33) is sufficiently small.

[0199] FIG. 10 is a diagram illustrating the discrepancy between the "feedback position (Pf) of the servo control system (20)" and the "target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)" at the detection time (Td). Specifically, FIG. 10 shows (B) of FIG. 9 and an enlarged view of (B) of FIG. 9 near the detection time (Td). In the enlarged view, the discrepancy (amount) between the "feedback position (Pf) of the servo control system (20)" and the "target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)" at the detection time (Td) is indicated by a dotted arrow.

[0200] FIG. 11 is a diagram showing an example of an operation profile when the expected detection position (pPd) (in other words, the target position (Pt)) is set to “40”. Specifically, FIG. 11 (A) shows the “target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)” and the “target speed of the servo control system (20) corresponding thereto” at each time point when the expected detection position (pPd) is set to “40”. FIG. 11 (B) shows the amount of deviation of the “feedback position (Pf) of the servo control system (20)” with respect to the “target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)” at each time point when the expected detection position (pPd) is set to “40”.

[0201] When the expected detection position (pPd) is set to “40,” the amount of deviation of the “feedback position (Pf) of the servo control system (20)” with respect to the “target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)” at each time point falls within the following range. It falls within the range of “-0.2mm (i.e., -200μm)” to “+0.2mm (i.e., +200μm)”.

[0202] Compared to the “amount of deviation when the expected detection position (pPd) is set to ‘100’” shown in Fig. 9 (B), the “amount of deviation when the expected detection position (pPd) is set to ‘40’” shown in Fig. 11 (B) is larger. That is, the “amount of deviation when the expected detection position (pPd) is set to ‘100’” shown in Fig. 9 (B) falls within the range of “0.005 mm” to “+0.005 mm”. In contrast, the “amount of deviation when the expected detection position (pPd) is set to ‘40’” shown in Fig. 11 (B) falls within the range of “-0.2 mm” to “+0.2 mm”.

[0203] As illustrated in (A) of FIG. 11, if the movement distance of the imaging device (33) is shortened, the motion profile becomes a triangular wave, making it more difficult to track the feedback position (Pf) to the “target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20).” However, as described above, by considering the “response delay time (Ds) of the servo control system (20),” the amount of deviation between the expected detection position (pPd) and the position of the imaging device (33) at the detection time (Td) can be reduced.

[0204] (Consideration of the detection system's response delay time)

[0205] As explained so far, the position-specific device (10) generates an image (Im) at a detection time (Td), which is a time when the position of the imaging device (33) and the position (Pw) of the work (40) coincide, or when the amount of misalignment between the two becomes sufficiently small.

[0206] However, even if the position determining device (10) outputs an instruction to the imaging device (33) to take an image at the detection time (Td), the imaging device (33) cannot take an image at the detection time (Td). As described above, communication between the detection system (30) including the imaging device (33) and the position determining device (10) is executed every control cycle (Cc), and there is also a response delay time (Dd) of the detection system (30) (e.g., the response delay time (Dd) of the imaging device (33). Therefore, the position determining device (10) outputs a detection instruction time (aTd) to the detection system (30) in advance so that the imaging device (33) can take an image at the detection time (Td).

[0207] That is, the position determining device (10) (in particular, the detection time determining unit (1150) of FIG. 1) first sets the "time when the target position (Pt) of the servo control system (20), considering the response delay time (Ds) of the servo control system (20), matches the expected detection position (pPd)" as the detection time (Td). For example, the detection time determining unit (1150) sets the time when the response delay time (Ds) of the servo control system (20) has elapsed from the "time when the target position (Pt) of the servo control system (20) and the expected detection position (pPd) match" as the detection time (Td). Then, the detection time determining unit (1150) sets the "time corrected by the response delay time (Dd) of the detection system (30) to the detection time (Td)" as the detection indication time (aTd). For example, the detection time determination unit (1150) sets the "time back from the detection time (Td) by the response delay time (Dd) of the detection system (30)" as the detection indication time (aTd). Then, the position specification device (10) (particularly the command unit (1210) of FIG. 1) outputs the detection indication time (aTd) to the detection system (30) in advance.

[0208] The position-specific device (10) can perform imaging at the detection time (Td) by pre-outputting to the detection system (30) a detection indication time (aTd), which is "a time corrected by the response delay time (Dd) of the detection system (30) for the detection time (Td)." Then, at the detection time (Td), the "target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)" and the expected detection position (pPd) coincide. Therefore, if the "target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20)" and the "feedback position (Pf) of the servo control system (20)" coincide, the following relationship is established. That is, at the detection time (Td), the "feedback position (Pf) of the servo control system (20)" and the expected detection position (pPd) coincide. That is, at the detection time (Td), the position of the imaging device (33) and the expected detection position (pPd) coincide, and in other words, at the detection time (Td), the detection position (Pd) and the expected detection position (pPd) coincide.

[0209] (Summary of research on obtaining detection results that enable high-precision analysis)

[0210] To summarize the contents explained so far, they are as follows. That is, the position determining device (10) (in particular, the detection time determining unit (1150) of FIG. 1) first determines the detection time (Td) from the time when “the target position (Pt) of the servo control system (20) calculated from the target trajectory (Tt) matches the expected detection position (pPd)” and the response delay time (Ds) of the servo control system (20).

[0211] Then, the position determining device (10) (detection time determining unit (1150)) calculates a detection indication time (aTd), which is a time corrected by the "response delay time (Dd) of the detection system (30)" from the detection time (Td). The position determining device (10) transmits the detection indication time (aTd) to the detection system (30) (specifically, the communication device (31)) in advance, thereby causing the imaging device (33) to perform imaging at the detection time (Td).

[0212] The imaging device (33) generates an image (Im) in which the target position (Pt) of the servo control system (20), taking into account the response delay time (Ds) of the servo control system (20), matches the expected detection position (pPd) by performing imaging at the detection time (Td).

[0213] As described above, the target position (Pt) of the servo control system (20) considering the response delay time (Ds) of the servo control system (20) and the position of the imaging device (33) will coincide, or the amount of discrepancy between the two will be sufficiently small. Also, the position of the imaging device (33) and the detection position (Pd) can be considered to be the same.

[0214] Therefore, at the time of detection (Td), the expected detection location (pPd) and the detection location (Pd) will coincide, or the amount of discrepancy between the two will be sufficiently small. And, the work (40) is placed at the expected detection location (pPd) in advance, or at a position sufficiently close to the expected detection location (pPd).

[0215] Accordingly, in the image (Im) captured at the detection time (Td), the position (Pw) of the work (40) (e.g., the center position of the work (40)) and the reference position (Rb) (e.g., the center point of the image (Im)) will coincide, or the amount of misalignment between the two will be sufficiently small. That is, in the image (Im), the work (40) is positioned around the reference position (Rb), and, for example, is positioned near the center of the image (Im).

[0216] Accordingly, the position determining device (10) can increase the proportion of the area where the work (40) is captured in the entire image (Im) compared to the image (Im) where the work (40) is not positioned almost in the center, that is, it can generate an image (Im) in which the work (40) is enlarged and captured. Therefore, the position determining device (10) can perform high-precision image analysis with improved pixel resolution for the image (Im) in which the work (40) is enlarged and captured.

[0217] For the image (Im), the required imaging range is determined by the size of the work (40) (the area of ​​the surface where the work (40) is photographed) and the expected “size of position misalignment (grip misalignment).”

[0218] (Difference in the influence of the analysis result of the detection position (detection deviation amount) due to the difference in required precision)

[0219] FIG. 12 is a diagram illustrating the pixel resolution required for image analysis of an image (Im) due to the difference in how precisely (highly precise) the position (Pw) of the work (40) is specified, that is, the difference in the required precision for the position (Pw) of the work (40) to be specified. In FIG. 12 (A) and FIG. 12 (B), the point where the two-dot dashed lines intersect represents the “reference position (Rb) corresponding to the detection position (Pd) in the image (Im) (e.g., the center point of the image (Im)).” The asterisk represents the “position (Pw) of the work (40) (e.g., the center position of the work (40)).” In addition, in the examples illustrated in (A) and (B) of FIG. 12, the detection deviation amount (Qd), which is the “amount of deviation between the detection position (Pd) and the position (Pw) of the work (40),” is set to be “±5μm”.

[0220] In the following description, "increasing the pixel resolution (or required precision)" refers to "reducing the value of the pixel resolution (or required precision)." If one wishes to determine the position (Pw) of the work (40) with high precision, it is necessary to calculate the detection misalignment amount (Qd), which is the "amount of misalignment between the detection position (Pd) and the position (Pw) of the work (40)," with high precision. Furthermore, if one wishes to calculate the detection misalignment amount (Qd), which is the "amount of misalignment between the detection position (Pd) and the position (Pw) of the work (40)," with high precision, it is necessary to increase the pixel resolution for the captured image (Im). In other words, increasing the required precision means increasing the pixel resolution. Specific details are explained below.

[0221] For example, when the required precision is a low value such as “100μm,” when determining the position (Pw) of the work (40), the “amount of misalignment between the detection position (Pd) and the position (Pw) of the work (40)” of “±5μm” is not a problem. That is, even if the detection misalignment amount (Qd), which is the “amount of misalignment between the detection position (Pd) and the position (Pw) of the work (40),” cannot be calculated as “±5μm” from the image analysis of the captured image (Im), it is not a problem. Therefore, the pixel resolution can be, for example, about “10μm.”

[0222] On the other hand, when the required precision is a high value such as “10μm,” it becomes essential to calculate the “amount of deviation between the detection position (Pd) and the position (Pw) of the work (40)” which is “±5μm” when determining the position (Pw) of the work (40). And, in order to calculate the “amount of deviation between the detection position (Pd) and the position (Pw) of the work (40)”, which is “±5μm,” from image analysis of the captured image (Im), it is necessary to set the pixel resolution to approximately “1μm”.

[0223] Therefore, in order to determine the position (Pw) of the work (40) with high precision, that is, to determine the position (Pw) of the work (40) while satisfying high required precision, it is necessary to increase the pixel resolution required for image analysis of the captured image (Im).

[0224] The pixel resolution of the work (40) in the image (Im) can be increased when the area of ​​the work (40) captured in the image (Im) is larger than when the image (Im) captured in FIG. 12 (A) is smaller than when the image (Im) captured in FIG. 12 (B). Therefore, by enlarging the image of the work (40) captured in the image (Im), or in other words, by generating an image (Im) that enlarges the work (40) and increasing the pixel resolution, the amount of detection deviation (Qd) can be calculated precisely (high precision) from the image analysis of the image (Im).

[0225] That is, in order to accurately calculate the detection deviation amount (Qd), which is the “amount of deviation between the detection position (Pd) and the position (Pw) of the work (40)” from image analysis of the captured image (Im), it is necessary to increase the possible pixel resolution of the captured image (Im). Furthermore, in order to increase the possible pixel resolution of the captured image (Im), it is desirable to increase the proportion of the area where the work (40) is captured that occupies the entire captured image (Im), and for example, a captured image (Im) in which the work (40) is magnified is preferred.

[0226] (Correction of servo target position)

[0227] FIG. 13 is a diagram illustrating the process performed by the position-specifying device (10) when sequentially specifying the position (Pw) of each of a plurality of workpieces (40). In the example illustrated in FIG. 13, for instance, the position-specifying device (10) sequentially specifies the position (Pw(A), Pw(B), Pw(C), …, Pw(Z)) of each workpiece (40(A), 40(B), 40(C), …, 40(Z)) placed on a single substrate.

[0228] Here, in the design drawing of the substrate on which the work (40(A), 40(B), 40(C), …, 40(Z)) is placed, for each of the work (40(A), 40(B), 40(C), …, 40(Z)), the following two pieces of information exemplified in FIG. 13 are pre-set.

[0229] First, the diameter (φ) of each work (40(A), 40(B), 40(C), …, 40(Z)) is set to be approximately 200 μm.

[0230] Second, the expected detection positions (pPd) of each work (40(A), 40(B), 40(C), …, 40(Z)) are pre-set to be 500 μm apart from each other. That is, the expected detection position (pPd(A)) of work (40(A)) and the expected detection position (pPd(B)) of work (40(B)) are pre-set to be 500 μm apart from each other. The expected detection position (pPd(B)) of work (40(B)) and the expected detection position (pPd(C)) of work (40(C)) are pre-set to be 500 μm apart from each other. The expected detection position (pPd(C)) of work (40(C)) and the expected detection position (pPd(D)) of work (40(D)) are pre-set to be 500 μm apart from each other. The expected detection position (pPd(Y)) of the work (40(Y)) and the expected detection position (pPd(Z)) of the work (40(Z)) are pre-set to be 500 μm apart from each other.

[0231] (Method for setting detection time according to the design)

[0232] Thus, the position determining device (10) controls the position of the imaging device (33) according to the “design drawing of the substrate on which the work (40(A), 40(B), 40(C), …, 40(Z)) is placed” and performs imaging on the imaging device (33). For example, the position determining device (10) performs imaging on the imaging device (33) whenever it moves 500 μm during the movement of the imaging device (33).

[0233] For example, if the expected detection position (pPd(A)) of the work (40(A)) is 500 μm, the expected detection position (pPd(B)) of the work (40(B)) is 1000 μm, and the expected detection position (pPd(C)) of the work (40(C)) is 1500 μm, the position determining device (10) performs the following processing. That is, the position determining device (10) causes the imaging device (33) to perform imaging at the detection time (Td(A), Td(B), Td(C)), which is the time when the imaging device (33) is scheduled to reach 500 μm, 1000 μm, and 1500 μm, respectively.

[0234] (A method for predicting the location of the next detection target based on the location of the previous detection target)

[0235] However, if the position-specific device (10) specifies the position (Pw(P)) of a certain work (40(P)), it may use the specified position (Pw(P)) to predict the position where the work (40(Q)) that is the target for specifying the position (Pw) next to the certain work (40(P)) should exist.

[0236] That is, it is known in advance that the expected detection position (pPd(P)) of the work (40(P)) and the expected detection position (pPd(Q)) of the work (40(Q)) are 500 μm apart from each other. Therefore, the position-specific device (10) predicts the position where the work (40(Q)) should be located from the position (Pw(P)) of the work (40(P)) and the amount of displacement (reference displacement (Rd(PQ)), i.e., "500 μm") between the expected detection position (pPd(P)) and the expected detection position (pPd(Q)).

[0237] Specifically, the position-specific device (10) sets the position that has advanced by a reference displacement amount (Rd(PQ)) (i.e., 500 μm) from the position (Pw(P)) of the work (40(P)) as the position where the work (40(Q)) should be located (i.e., the "expected detection position after correction of the work (40(Q)) (pPd'(Q))").

[0238] And, the position-specific device (10) may set the time when the position of the imaging device (33) matches the "expected detection position after correction (pPd'(Q))" as the "detection time after correction (Td'(Q))" and perform imaging on the imaging device (33) at the "detection time after correction (Td'(Q))".

[0239] For example, it is said that the expected detection position (pPd(P)) of the work (40(P)) is “5500 μm” and the actual position (Pw(P)) of the work (40(P)) is “5499 μm”. In that case, the position determining device (10) calculates the “expected detection position (pPd'(Q)) of the work (40(Q)) after correction” as follows. That is, the position determining device (10) sets the position advanced by a reference displacement amount (Rd(PQ)) (i.e., “500 μm”) from the position (Pw(P)) (i.e., “5499 μm”) as the “expected detection position (pPd'(Q)) of the work (40(Q)) after correction”. Specifically, the position-specific device (10) sets "5999 μm" as the "expected detection position (pPd'(Q)) after correction of the work (40(Q))".

[0240] If the expected detection positions (pPd) of each of the multiple workpieces (40) are said to be 500 μm apart from each other, and the positions (Pw) of each of the multiple workpieces (40) are actually 499 μm apart from each other, then for the 11th workpiece (40), the expected detection position (pPd) and the position (Pw) are 10 μm apart. As a result, for example, even if the imaging device (33) performs imaging at the detection time (Td) when the expected detection position (pPd) of the 11th workpiece (40) and the position of the imaging device (33) coincide, the 11th workpiece (40) may not be captured in the imaging image (Im).

[0241] If we call the difference between the expected detection position (pPd) of each of the multiple work (40) (e.g., 500 μm) the “reference displacement amount (Rd)” and the difference between the actual position (Pw) of each of the multiple work (40) (e.g., 499 μm) the “actual displacement amount (Ad),” then the following can be pointed out regarding both. That is, even if the difference (dP) between the reference displacement amount (Rd) and the actual displacement amount (Ad) is a sufficiently small value (e.g., “1 μm” in the above example), when the difference (dP) is accumulated “n” times, the amount of deviation between the expected detection position (pPd) and the position (Pw) at the “n+1”th work (40) can be “n × difference (dP).”

[0242] Therefore, to avoid the discrepancy between the expected detection position (pPd) and the position (Pw) for a certain work (40) (e.g., work (40(Q))) accumulating as a difference (dP) increases, the position-specific device (10) performs the following processing.

[0243] That is, the position determining device (10) predicts the position where the work (40(Q)) should exist based on the position (Pw(P)) of the work (40(P)) and the reference displacement amount (Rd(PQ)) which is the displacement amount between the expected detection position (pPd(P)) and the expected detection position (pPd(Q)). For example, the position determining device (10) sets the position that has advanced from the position (Pw(P)) by the reference displacement amount (Rd(PQ)) which is the displacement amount between the expected detection position (pPd(P)) and the expected detection position (pPd(Q)) as the "position where the work (40(Q)) should exist" after correction. That is, the position-specific device (10) sets the position advanced by a reference displacement amount (Rd(PQ)) from the position (Pw(P)) as the “expected detection position after correction (pPd'(Q))” for the work (40(Q)).

[0244] §2. Composition Example

[0245] Next, regarding the position-specific device (10) that has been outlined so far, the specific details thereof will be explained using Fig. 1.

[0246] FIG. 1 is a diagram showing an example configuration of a position-specific device (10). The position-specific device (10) has, as a functional block, a target orbit acquisition unit (1110) that acquires a target orbit (Tt) and a position command generation unit (1120) that generates a target position (Pt) at each time interval from the target orbit (Tt).

[0247] Additionally, the position determining device (10) is provided with, as a functional block, a detection deviation amount calculation unit (1160) that calculates a detection deviation amount (Qd) and a detection position calculation unit (1170) that calculates a detection position (Pd). Furthermore, the position determining device (10) is provided with, as a functional block, a position determining unit (1180) that determines the position (Pw) of the work (40) from the detection deviation amount (Qd) and the detection position (Pd).

[0248] The position-specific device (10) illustrated in FIG. 1 also has, as functional blocks, a response delay time calculation unit (1130) that calculates, for example, the response delay time (Ds) of a servo control system (20), and a detection time determination unit (1150) that determines a detection instruction time (aTd). Furthermore, the position-specific device (10) has, as functional blocks, a command value generation unit (1140) that generates a command value (Cm) from a “target position (Pt) at each time”, for example, and a communication unit (1200) that performs communication with the servo control system (20), etc.

[0249] In addition to the function blocks described above, the position determining device (10) may be equipped with, for example, the following configuration (function block). That is, the position determining device (10) may be equipped with a servo control unit, etc., that matches the feedback position (Pf) of the servo control system (20) at each time interval to the target position (Pt) of the servo control system (20) at each time interval (in particular, the target position (Pt) considering the response delay time (Ds) of the servo control system (20). To ensure brevity of description, configurations of the position determining device (10) that are not directly related to this embodiment are omitted from the description and block diagram. However, depending on the actual circumstances of the implementation, the position determining device (10) may be equipped with these omitted configurations.

[0250] The above-described functional block provided by the location-specific device (10) can be realized, for example, by a CPU (central processing unit), etc., reading and executing a program stored in a memory device (memory unit (1300)) realized as ROM (read only memory), NVRAM (non-Volatile random access memory), etc., into an unillustrated RAM (random access memory), etc. Below, first, the specific details regarding the functional block other than the memory unit will be explained.

[0251] (Regarding function blocks other than memory)

[0252] The target orbit acquisition unit (1110) receives target orbit data (target orbit (Tt)) from an external source (e.g., a user) and outputs the received target orbit (Tt) to the position command generation unit (1120). The target orbit (Tt) includes the expected detection position (pPd) (i.e., the position where the work (40) is to be located) of the work (40) for which the position-specific device (10) must specify the position (Pw) as the target position (Pt), and represents the movement path of the imaging device (33) that passes over the head of the expected detection position (pPd), for example.

[0253] In the substrate illustrated in FIG. 3, the arrow indicated by the dotted line is an example of a target trajectory (Tt). For example, when a position-specific device (10) intends to specify the position (Pw(A), Pw(B), Pw(C), …, Pw(Z)) of each work (40(A), 40(B), 40(C), …, 40(Z)) placed on the substrate, the target trajectory (Tt) includes the following target positions (Pt). That is, the target trajectory (Tt) includes the expected detection position (pPd(A), pPd(B), pPd(C), …, pPd(Z)) of each work (40(A), 40(B), 40(C), …, 40(Z)) as the target position (Pt).

[0254] The position command generation unit (1120) generates a “target position (Pt) at each time interval” from the target orbit (Tt) and outputs the generated “target position (Pt) at each time interval” to the command value generation unit (1140).

[0255] The command value generation unit (1140) obtains the “target position (Pt) at each time interval” from the position command generation unit (1120) and obtains the “response delay time (Ds) of the servo control system (20)” from the response delay time calculation unit (1130). The command value generation unit (1140) generates a “command value (Cm) for each control cycle (Cc) for the servo control system (20)” by considering the “response delay time (Ds) of the servo control system (20)” from the “target position (Pt) at each time interval”. The command value generation unit (1140) outputs the generated “command value (Cm) for each control cycle (Cc) for the servo control system (20)” to the communication unit (1200), specifically to the command unit (1210).

[0256] For example, in the “target position (Pt) at each time point” obtained from the position command generation unit (1120), if the expected detection position (pPd(n)) at time point (T(n)) is P(n), the command value generation unit (1140) generates the following command value (Cm). That is, the command value generation unit (1140) generates a command value (Cm) in which the expected detection position (pPd(n)) at the “time point back from time point (T(n)) by the response delay time (Ds) of the servo control system (20)” is P(n).

[0257] Here, when the position-specific device (10) controls a plurality of servo control systems (20), the command value generation unit (1140) performs the following processing to synchronize the control results (control amount) of the plurality of servo control systems (20). That is, for each of the plurality of servo control systems (20), the time (response delay time (Ds)) from when each of the plurality of servo drivers (21) receives a command value (Cm) until the corresponding servo motor (22) responds may differ for each of the plurality of servo control systems (20). Therefore, the command value generation unit (1140) generates a command value (Cm) for each of the plurality of servo control systems (20) by taking into account the response delay time (Ds) of each of the plurality of servo control systems (20).

[0258] Specifically, the command value generation unit (1140) generates a command value (Cm(A)) for each control cycle (Cc) for the servo control system (20(A)) by considering the response delay time (Ds(A)) of the servo control system (20(A)) from the "target position (Pt) at each time." The command value generation unit (1140) generates a command value (Cm(B)) for each control cycle (Cc) for the servo control system (20(B)) by considering the "response delay time (Ds(B)) of the servo control system (20(B))" from the "target position (Pt) at each time."

[0259] By generating a command value (Cm) for each of the plurality of servo control systems (20) by considering different response delay times (Ds) for each of the plurality of servo control systems (20), the command value generation unit (1140) can synchronize the control results of each of the plurality of servo control systems (20).

[0260] The response delay time calculation unit (1130) acquires servo parameters representing the control characteristics of the servo control system (20) (specifically, the servo driver (21)) and calculates the "response delay time (Ds) of the servo control system (20)" from the acquired servo parameters. The response delay time calculation unit (1130) outputs the calculated "response delay time (Ds) of the servo control system (20)" to the command value generation unit (1140) and the detection time determination unit (1150).

[0261] The response delay time calculation unit (1130) may calculate the response delay time (Ds) of the servo control system (20) using the position loop gain of the servo driver (21) as a servo parameter representing the control characteristics of the servo control system (20). For example, the response delay time calculation unit (1130) may calculate the response delay time (Ds(A)) of the servo control system (20(A)) as the reciprocal of the position loop gain, which is one of the servo parameters of the servo driver (21(A)). The response delay time calculation unit (1130) may calculate the response delay time (Ds(B)) of the servo control system (20(B)) as the reciprocal of the position loop gain, which is one of the servo parameters of the servo driver (21(B)).

[0262] The detection time determination unit (1150) obtains the “target position (Pt) at each time interval” from the position command generation unit (1120) and obtains the “response delay time (Ds) of the servo control system (20)” from the response delay time calculation unit (1130). Additionally, the detection time determination unit (1150) refers to the memory unit (1300) to obtain “information regarding the expected detection position (pPd)” from the expected detection position table (1310) and obtains the “response delay time (Dd) of the detection system (30)” from the detector response delay time table (1320). The detection time determination unit (1150) calculates the detection time (Td) and the detection instruction time (aTd) from the “target position (Pt) at each time,” the “response delay time (Ds) of the servo control system (20),” “information regarding the expected detection position (pPd),” and the “response delay time (Dd) of the detection system (30).” Then, the detection time determination unit (1150) outputs the calculated detection instruction time (aTd) to the communication unit (1200), specifically to the command unit (1210).

[0263] Specifically, the detection time determination unit (1150) first calculates the detection time (Td) from the “target position (Pt) at each time,” the “response delay time (Ds) of the servo control system (20),” and “information regarding the expected detection position (pPd).” That is, the detection time determination unit (1150) considers the “response delay time (Ds) of the servo control system (20)” and sets the time calculated as the time when the target position (Pt) and the expected detection position (pPd) coincide as the detection time (Td).

[0264] The detection time determination unit (1150) then calculates the detection indication time (aTd) from the detection time (Td) and the "response delay time (Dd) of the detection system (30)." That is, the detection time determination unit (1150) sets the time corrected by the "response delay time (Dd) of the detection system (30)" as the detection indication time (aTd).

[0265] For example, if there is no "response delay time (Ds) of the servo control system (20)," and the time when the target position (Pt) and the expected detection position (pPd) coincide was time (T0), the detection time determining unit (1150) calculates the detection time (Td) and the detection indication time (aTd) as follows. That is, the detection time determining unit (1150) sets the time after the "response delay time (Ds) of the servo control system (20)" has elapsed from the time (T0) when the "target position (Pt) and the expected detection position (pPd) coincide" as the detection time (Td). Additionally, the detection time determining unit (1150) sets the time after the "response delay time (Dd) of the detection system (30)" has been reversed from the detection time (Td) as the detection indication time (aTd).

[0266] The detection misalignment calculation unit (1160) acquires an image (Im) from the communication unit (1200), particularly from the control amount acquisition unit (1220). The detection misalignment calculation unit (1160) performs image analysis on the image (Im) and calculates the "position misalignment amount within the image" in the image (Im) (i.e., the "misalignment amount of the position (Pw) of the work (40) from the reference position (Rb)" in the image (Im)). The detection misalignment calculation unit (1160) determines the detection misalignment amount (Qd) (i.e., the misalignment amount between the detection position (Pd) and the position (Pw) of the work (40)) from the calculated "position misalignment amount within the image". The detection deviation amount calculation unit (1160) outputs a specific detection deviation amount (Qd) to the position specification unit (1180).

[0267] Specifically, the detection misalignment calculation unit (1160) performs image analysis on the captured image (Im) and calculates the “position misalignment amount within the image,” which is the amount of misalignment between the position (Pw) of the work (40) in the captured image (Im) (e.g., the center position of the work (40)) and the reference position (Rb). Then, the detection misalignment calculation unit (1160) determines the detection misalignment amount (Qd), which is the “amount of misalignment between the position (Pw) of the work (40) and the detection position (Pd) at the detection time (Td),” corresponding to the “position misalignment amount within the image,” from the calculated “position misalignment amount within the image.”

[0268] However, the detection misalignment amount calculation unit (1160) may acquire an image analysis result of the captured image (Im) instead of the captured image (Im) from the communication unit (1200) (particularly, the control amount acquisition unit (1220)), and in particular, may acquire the "position misalignment amount within the image" in the captured image (Im). The detection misalignment amount calculation unit (1160) only needs to be able to determine the detection misalignment amount (Qd) from the "position misalignment amount within the image" in the captured image (Im), and the calculation of the "position misalignment amount within the image" from the captured image (Im) may be performed by the detection misalignment amount calculation unit (1160) or by the detection system (30).

[0269] That is, the position-specific device (10) (in particular, the control amount acquisition unit (1220)) may receive the “position misalignment amount within the image” calculated by the detection system (30) (e.g., the imaging control device (32)) through image analysis of the imaging image (Im). And, the detection misalignment amount calculation unit (1160) may calculate the detection misalignment amount (Qd) from the “position misalignment amount within the image” received by the imaging control device (32).

[0270] The detection position calculation unit (1170) obtains the "feedback position (Pf) of the servo control system (20) for each control cycle (Cc)" from the communication unit (1200), particularly from the control amount acquisition unit (1220). The detection position calculation unit (1170) calculates the "feedback position (Pf) at detection time (Td)" by interpolation calculation from the "feedback position (Pf) of the servo control system (20) for each control cycle (Cc)." The detection position calculation unit (1170) outputs the calculated "feedback position (Pf) at detection time (Td)" to the position specification unit (1180).

[0271] For example, if n is set to an integer greater than or equal to 0 and the detection time (Td) is a time between the nth control cycle (Cc(n)) and the n+1th control cycle (Cc(n+1)), the detection position calculation unit (1170) performs the following processing. That is, the detection position calculation unit (1170) first obtains the "feedback position (Pf(n)) in the control cycle (Cc(n))" and the "feedback position (Pf(n+1)) in the control cycle (Cc(n+1))". Then, the detection position calculation unit (1170) calculates the "feedback position (Pf) at the detection time (Td)" by interpolation calculation from the feedback position (Pf(n)) and the feedback position (Pf(n+1)). For example, the detection position calculation unit (1170) calculates the “feedback position (Pf) at detection time (Td)” from the intersection point between a straight line (or curve) connecting the feedback position (Pf(n)) and the feedback position (Pf(n+1)) and a straight line representing the detection time (Td).

[0272] That is, the detection position calculation unit (1170) may calculate the "feedback position (Pf) at detection time (Td)" by interpolation calculation from a plurality of "feedback positions (Pf) of the servo control system (20) for each control period (Cc)" acquired for each control period (Cc).

[0273] The position specification unit (1180) obtains the detection deviation amount (Qd) (i.e., the deviation between the detection position (Pd) and the position (Pw) of the work (40)) from the detection deviation amount calculation unit (1160), and obtains the “feedback position (Pf) at the detection time (Td)” from the detection position calculation unit (1170). As described above, the “feedback position (Pf) at the detection time (Td)” is the “position of the imaging device (33) at the detection time (Td)”, i.e., corresponds to the detection position (Pd). Thus, the position specification part (1180) specifies the position (Pw) of the work (40) from the detection deviation amount (Qd) (i.e., the deviation amount between the detection position (Pd) and the position (Pw) of the work (40)) and the “feedback position (Pf) at the detection time (Td)” (i.e., the detection position (Pd)).

[0274] The communication unit (1200) periodically communicates with each of the servo control system (20) and detection system (30) as slaves during each control cycle (Cc), and includes a command unit (1210) and a control amount acquisition unit (1220).

[0275] The command unit (1210) obtains a "command value (Cm) for each control cycle (Cc) for the servo control system (20)" from the command value generation unit (1140) and obtains a detection instruction time (aTd) from the detection time determination unit (1150). The command unit (1210) outputs (transmits) a control signal (Cs) (control instruction) including the command value (Cm) and the detection instruction time (aTd) to the slave servo control system (20) and detection system (30) for each control cycle (Cc).

[0276] The control amount acquisition unit (1220) acquires (receives) data representing the control results (e.g., control amount and detection result) output by the slaves from the slave servo control system (20) and the detection system (30) for each control cycle (Cc). That is, the control amount acquisition unit (1220) acquires information representing the "feedback position (Pf) of the servo control system (20) for each control cycle (Cc)" from the servo control system (20) and acquires an image (Im) from the detection system (30). The control amount acquisition unit (1220) transmits the information representing the "feedback position (Pf) of the servo control system (20) for each control cycle (Cc)" to the detection position calculation unit (1170) and outputs the image (Im) to the detection deviation amount calculation unit (1160).

[0277] Information indicating the "feedback position (Pf) of the servo control system (20) for each control cycle (Cc)" may include information indicating the actual time (Tm) at which the feedback position (Pf) is detected, in addition to the "feedback position (Pf) of the servo control system (20) for each control cycle (Cc)." In that case, the detection position calculation unit (1170) acquires, for example, the "feedback position (Pf(n)) at the control cycle (Cc(n))" and the "actual time (Tm(n)) at which the feedback position (Pf(n)) is detected." Additionally, the detection position calculation unit (1170) acquires the "feedback position (Pf(n+1)) at the control cycle (Cc(n+1))" and the "actual time (Tm(n+1)) at which the feedback position (Pf(n+1)) is detected." And, the detection position calculation unit (1170) calculates the "feedback position (Pf) at detection time (Td)" from the feedback position (Pf(n)) at actual measurement time (Tm(n)) and the feedback position (Pf(n+1)) at actual measurement time (Tm(n+1)).

[0278] Additionally, as described above, the control amount acquisition unit (1220) may acquire, instead of the captured image (Im) from the detection system (30), the "position misalignment amount within the image" calculated by the detection system (30) (e.g., the image control device (32)) through image analysis of the captured image (Im). In that case, the control amount acquisition unit (1220) outputs the acquired "position misalignment amount within the image" to the detection misalignment amount calculation unit (1160).

[0279] (For cases where the location of each of multiple works is specified sequentially)

[0280] When the position determining device (10) sequentially determines the position (Pw) of each of a plurality of work (40) placed on a single substrate, for example, each function block provided by the position determining device (10) may perform the following processing.

[0281] For example, when the position specifying unit (1180) specifies the “position (Pw(P)) of a certain work (40(P)),” the position specifying unit (1180) notifies the position command generating unit (1120) of the specified “position (Pw(P)) of a certain work (40(P)).”

[0282] The position command generation unit (1120) obtains the "expected detection position (pPd(P)) of a certain work (40(P))" and the "expected detection position (pPd(Q)) of a work (40(Q)) for which a position (Pw) must be specified next to the certain work (40(P))" by referring to the expected detection position table (1310). Then, the position command generation unit (1120) calculates a reference displacement amount (Rd(PQ)), which is the amount of displacement from the expected detection position (pPd(P)) to the expected detection position (pPd(Q)). The position command generation unit (1120) calculates the position where “a work (40(Q)) for which a position (Pw) must be specified after a certain work (40(P))” must exist, based on the calculated reference displacement amount (Rd(PQ)) and the “position (Pw(P))” notified by the position specification unit (1180). That is, the position command generation unit (1120) sets the position advanced by the reference displacement amount (Rd(PQ)) from the position (Pw(P)) as the position where the work (40(Q)) must exist (i.e., the “expected detection position (pPd'(Q)) after correction of the work (40(Q))”).

[0283] The position command generation unit (1120) generates a “target position at each time interval (Pt')” from a target trajectory (Tt') that includes the “expected detection position after correction (pPd'(Q))” as the target position (Pt) instead of the “expected detection position before correction (pPd(Q))” of the work (40(Q)). Then, the position command generation unit (1120) notifies the command value generation unit (1140) and the detection time determination unit (1150) of the “target position at each time interval (Pt').”

[0284] The command value generation unit (1140) generates a “command value (Cm’) for each control cycle (Cc) for the servo control system (20)” by taking into account the “response delay time (Ds) of the servo control system (20)” from the “target position (Pt’) at each time” notified from the position command generation unit (1120).

[0285] The detection time determination unit (1150) calculates the detection time (Td'(Q)) which is the time at which the work (40(Q)) must be captured by the imaging device (33) using the “target position (Pt') at each time” notified from the position command generation unit (1120). The detection time determination unit (1150) calculates the detection time (Td'(Q)) from the “target position (Pt') at each time,” the “response delay time (Ds) of the servo control system (20),” and the “expected detection position (pPd'(Q)) after correction of the work (40(Q)).” That is, the detection time determination unit (1150) sets the time when the "target position (Pt') at each time point, considering the "response delay time (Ds) of the servo control system (20)," matches the "expected detection position (pPd'(Q)) after correction of the work (40(Q))" as the detection time (Td'(Q)).

[0286] For example, if there is no "response delay time (Ds) of the servo control system (20)," and the time when the target position (Pt') and the "expected detection position after correction (pPd'(Q))" coincides was time (T'0), the detection time determining unit (1150) calculates the detection time (Td'(Q)) as follows. That is, the detection time determining unit (1150) sets the time after the "response delay time (Ds) of the servo control system (20)" has elapsed from the time (T'0) when the "target position (Pt') and the 'expected detection position after correction (pPd'(Q))' coincides" as the detection time (Td'(Q)).

[0287] And, the detection time determination unit (1150) sets the time corresponding to the response delay time (Dd) of the detection system (30) back from the detection time (Td'(Q)) as the detection instruction time (aTd'(Q)). The command unit (1210) notifies the detection system (30) of the detection instruction time (aTd'(Q)) in advance, thereby causing the imaging device (33) to perform imaging at the detection time (Td'(Q)).

[0288] (Regarding the memory section)

[0289] The memory unit (1300) is a memory device that stores various data used by the location-specific device (10). Additionally, the memory unit (1300) may non-temporarily store (1) a control program, (2) an OS program, (3) an application program for executing various functions provided by the location-specific device (10), and (4) various data read out when executing the application program, which are executed by the location-specific device (10). The data of (1) to (4) above is stored in a non-volatile memory device such as, for example, ROM (read-only memory), flash memory, EPROM (Erasable Programmable ROM), EEPROM (Electrically EPROM), HDD (Hard Disc Drive). The location-specific device (10) may also have a temporary memory unit not shown. The temporary memory unit is a so-called working memory that temporarily stores data used for calculations and calculation results, etc., during the process of various processing executed by the location-specific device (10), and is composed of a volatile memory device such as RAM (Random Access Memory). Which data to store in which storage device is appropriately determined based on the purpose of use, convenience, cost, or physical constraints of the location-specific device (10). Furthermore, the storage unit (1300) stores an expected detection location table (1310) and a detector response delay time table (1320).

[0290] In the expected detection location table (1310), "information regarding the expected detection location (pPd)" is stored, specifically, "information specifying the expected detection location (pPd)." The expected detection location (pPd) is stored in the expected detection location table (1310) in advance as the "location where the work (40) should exist," based on the design drawing of the "substrate on which the work (40) is placed."

[0291] The detector response delay time table (1320) stores the “response delay time (Dd) of the detector system (30).”

[0292] The memory unit (1300) may store servo parameters representing the control characteristics of a servo control system (20) (particularly, a servo driver (21)) in addition to the expected detection position table (1310) and the detector response delay time table (1320). Particularly, the memory unit (1300) may store servo parameters representing the control characteristics of each of a plurality of servo control systems (20) (particularly, a servo driver (21)).

[0293] (Cleanup for location-specific devices)

[0294] The contents described so far using FIGS. 1 to 13 can be summarized as follows. The position determining device (10) is a position determining device that determines the position (Pw) of a work (40) to be detected. The position determining device (10) is equipped with a command unit (1210), a control amount acquisition unit (1220) (acquisition unit), a detection deviation amount calculation unit (1160), a detection position calculation unit (1170), and a position determining unit (1180).

[0295] The command unit (1210) outputs a command value (Cm) calculated from the target orbit (Tt) to a servo control system (20) that controls the position of at least one of the imaging device (33) (detection device) and the work (40). The target orbit (Tt) includes a pre-set expected detection position (pPd) as the "position where the work (40) should exist" as the target position (Pt).

[0296] The control amount acquisition unit (1220) acquires an image (Im), which is the detection result of the imaging device (33), at a detection time (Td), which is a time during the movement of at least one of the imaging device (33) and the work (40). The detection time (Td) is a time when the "target position (Pt) of the servo control system (20) calculated by considering the response delay time (Ds) of the servo control system (20)" matches the expected detection position (pPd).

[0297] The detection misalignment calculation unit (1160) calculates the detection misalignment amount (Qd), which is the "detection position (Pd) corresponding to the reference position (Rb) and the position (Pw) of the work (40)," from the "detection misalignment amount between the reference position (Rb) and the position (Pw) of the work (40) in the image (Im)."

[0298] The detection position calculation unit (1170) calculates the detection position (Pd) from the position of the imaging device (33) at the detection time (Td).

[0299] The position specification unit (1180) specifies the position (Pw) of the work (40) by correcting the detection position (Pd) calculated by the detection position calculation unit (1170) with the detection deviation amount (Qd) calculated by the detection deviation amount calculation unit (1160).

[0300] According to the above configuration, the position determining device (10) calculates a detection deviation amount (Qd), which is the amount of deviation between the detection position (Pd) and the position (Pw) of the work (40), from the captured image (Im). Additionally, the position determining device (10) calculates the detection position (Pd) from the position of the capturing device (33) at the detection time (Td). Then, the position determining device (10) determines the position (Pw) of the work (40) based on the detection deviation amount (Qd) and the detection position (Pd).

[0301] (High precision of position detection)

[0302] Therefore, the position-specific device (10) has the effect of being able to specify the position (Pw) of the work (40) with high precision by using the amount of misalignment between the two, even when the position (Pw) of the work (40) and the detected position (Pd) do not match at the detection time (Td).

[0303] (High precision and high speed of detection results)

[0304] In addition, according to the above configuration, the position-specific device (10) calculates the detection deviation amount (Qd) from the image (Im) at the detection time (Td), which is the time when the target position (Pt) of the servo control system (20), calculated by considering the response delay time (Ds) of the servo control system (20), matches the expected detection position (pPd).

[0305] Here, at the timing when the imaging device (33) performs detection, if the work (40) is not present in the range where the imaging device (33) can detect the work (40), the detection deviation amount (Qd) cannot be calculated from the imaging image (Im).

[0306] Therefore, in order to avoid the situation where “at the timing when the imaging device (33) performs detection, the work (40) does not exist within the range where the imaging device (33) can detect the work (40),” the position determining device (10) acquires an image (Im) at the detection time (Td).

[0307] For example, when the servo control system (20) moves only the imaging device (33) and the work (40) is not moved, and the work (40) is placed at a pre-expected detection position (pPd) or at a position sufficiently close to the expected detection position (pPd), the position determining device (10) performs the following processing. That is, the position determining device (10) sets the time when the target position (Pt) of the servo control system (20), calculated by considering the response delay time (Ds) of the servo control system (20) controlling the position of the imaging device (33), matches the expected detection position (pPd) as the detection time (Td).

[0308] Here, by considering the response delay time (Ds) of the servo control system (20), it is thought that the “target position (Pt) of the servo control system (20) at each time interval” will match the “feedback position (Pf) of the servo control system (20) at each time interval”, or that the amount of discrepancy between the two will be sufficiently small. Also, the feedback position (Pf) of the servo control system (20) that controls the position of the imaging device (33) can be considered as the position of the imaging device (33). Therefore, the “position of the imaging device (33) at each time interval” will match the “target position (Pt) of the servo control system (20) at each time interval calculated by considering the response delay time (Ds) of the servo control system (20) at each time interval”, or that the amount of discrepancy between the two will be sufficiently small.

[0309] As explained above, at the detection time (Td), the "position of the imaging device (33) moved by the servo control system (20)" and the expected detection position (pPd) will coincide, or the amount of misalignment between the two will be sufficiently small. Also, as previously described, the work (40) is placed in advance at the expected detection position (pPd) or at a position sufficiently close to the expected detection position (pPd). Therefore, at the detection time (Td), the "position of the imaging device (33) moved by the servo control system (20)" and the position (Pw) of the work (40) will coincide, or the amount of misalignment between the two will be sufficiently small.

[0310] As a result, the position-specific device (10) can avoid the situation where “at the timing when the imaging device (33) performs detection, the work (40) is not present in the range where the imaging device (33) can detect the work (40).”

[0311] Additionally, for example, when the servo control system (20) moves only the work (40) and the imaging device (33) is not moved, and the imaging device (33) is placed at a pre-expected detection position (pPd) or at a position sufficiently close to the expected detection position (pPd), the position determining device (10) performs the following processing. That is, the position determining device (10) sets the time when the target position (Pt) of the servo control system (20), calculated by considering the response delay time (Ds) of the servo control system (20) controlling the position (Pw) of the work (40), matches the expected detection position (pPd), as the detection time (Td).

[0312] As described above, by taking into account the response delay time (Ds) of the servo control system (20), it is thought that the “target position (Pt) of the servo control system (20) at each time interval” will match the “feedback position (Pf) of the servo control system (20) at each time interval”, or that the amount of discrepancy between the two will be sufficiently small. Furthermore, the feedback position (Pf) of the servo control system (20) that controls the position (Pw) of the work (40) can be considered as the position (Pw) of the work (40). Therefore, the “position of the work (40) at each time interval” will match the “target position (Pt) of the servo control system (20) at each time interval calculated by taking into account the response delay time (Ds) of the servo control system (20) at each time interval”, or that the amount of discrepancy between the two will be sufficiently small.

[0313] As explained above, at the detection time (Td), the "position (Pw) of the work (40) moved by the servo control system (20)" and the expected detection position (pPd) will coincide, or the amount of discrepancy between the two will be sufficiently small. Also, as previously described, the imaging device (33) is placed in advance at the expected detection position (pPd) or at a position sufficiently close to the expected detection position (pPd). Therefore, at the detection time (Td), the "position (Pw) of the work (40) moved by the servo control system (20)" and the position of the imaging device (33) will coincide, or the amount of discrepancy between the two will be sufficiently small.

[0314] As a result, the position-specific device (10) can avoid the situation where “at the timing when the imaging device (33) performs detection, the work (40) is not present in the range where the imaging device (33) can detect the work (40).”

[0315] Furthermore, for example, when the first servo control system (20(1)) moves the imaging device (33) and the second servo control system (20(2)) moves the work (40), the position determining device (10) sets the following time as the detection time (Td). That is, the position determining device (10) sets the time when the "each target position (Pt) calculated by considering the respective response delay time (Ds) of the first servo control system (20(1)) and the second servo control system (20(2))" coincides with the expected detection position (pPd) as the detection time (Td). At the detection time (Td), the "target position (Pt(1)) of the first servo control system (20(1)) calculated by considering the response delay time (Ds(1)) of the first servo control system (20(1))" coincides with the expected detection position (pPd). In addition, at the detection time (Td), the "target position (Pt(2)) of the second servo control system (20(2)) calculated by considering the response delay time (Ds(2)) of the second servo control system (20(2))" corresponds to the expected detection position (pPd).

[0316] As described above, by taking into account the response delay time (Ds) of the servo control system (20), the “target position (Pt) of the servo control system (20) at each time interval” is thought to match the “feedback position (Pf) of the servo control system (20) at each time interval”, or the amount of discrepancy between the two is thought to be sufficiently small.

[0317] Also, the feedback position (Pf(1)) of the first servo control system (20(1)) that controls the position of the imaging device (33) can be considered as the position of the imaging device (33). Additionally, the feedback position (Pf(2)) of the second servo control system (20(2)) that controls the position (Pw) of the work (40) can be considered as the position (Pw) of the work (40).

[0318] Therefore, the “position of the moving imaging device (33) at each time” will match the “target position (Pt(1)) at each time, calculated by taking into account the response delay time (Ds(1)) of the first servo control system (20(1))”, or the amount of deviation between the two will be sufficiently small. In addition, the “position of the moving work (40) at each time” will match the “target position (Pt(2)) at each time, calculated by taking into account the response delay time (Ds(2)) of the second servo control system (20(2))”, or the amount of deviation between the two will be sufficiently small.

[0319] As explained above, at the detection time (Td), the "position of the moving imaging device (33)," the "position (Pw) of the moving work (40)," and the expected detection position (pPd) will coincide, or the amount of deviation between the three will be sufficiently small.

[0320] As a result, the position-specific device (10) can avoid the situation where “at the timing when the imaging device (33) performs detection, the work (40) is not present in the range where the imaging device (33) can detect the work (40).”

[0321] The position-specific device (10) acquires an image (Im) at a detection time (Td) which is a time when at least one of the detection device and the work (40) is moving, and the position (Pw) of the work (40) and the position of the imaging device (33) coincide, or the amount of misalignment between the two becomes sufficiently small.

[0322] Here, since the position of the imaging device (33) at the detection time (Td) corresponds to the detection position (Pd), it is thought that the amount of deviation between the reference position (Rb) and the position (Pw) of the work (40) in the image (Im) at the detection time (Td) is sufficiently small. And, if it is known in advance that "the amount of deviation between the reference position (Rb) and the position (Pw) of the work (40) in the image (Im) is sufficiently small," the analysis of the image (Im) can be made more precise compared to the case where "the amount of deviation between the two in the image (Im) is unpredictable or predicted to be large."

[0323] Therefore, the position-specific device (10) can acquire an image (Im) captured at the detection time (Td) that can perform high-precision analysis, and, that is, can calculate the amount of detection deviation (Qd) with high precision from the image (Im) captured at the detection time (Td).

[0324] Additionally, the position determining device (10) calculates the detection deviation amount (Qd) from the “image (Im) detected by the imaging device (33) while at least one of the work (40) and the imaging device (33) is moving.” Accordingly, the position determining device (10) can acquire the image (Im) at a high speed compared to the case where “the movement of the work (40) and the imaging device (33) is stopped and then detection is performed on the imaging device (33) to generate the image (Im),” and as a result, the calculation of the detection deviation amount (Qd) can be accelerated.

[0325] (High precision and high speed of location identification of detection targets)

[0326] As explained above, the position determining device (10) can acquire an image (Im) capable of performing high-precision analysis at high speed and calculate a detection deviation amount (Qd) from the image (Im) at high speed and with high precision. Then, the position determining device (10) determines the position (Pw) of the work (40) based on the calculated detection deviation amount (Qd) and the detection position (Pd).

[0327] Accordingly, the position-specific device (10) has the effect of being able to specify the position (Pw) of the work (40) at high speed and with high precision.

[0328] The position determining device (10) communicates with the servo control system (20) every control cycle (Cc). When the position of the imaging device (33) is controlled by the servo control system (20), the position determining device (10) calculates the position of the imaging device (33) at the detection time (Td) by interpolation calculation from the feedback position (Pf) every control cycle (Cc) of the servo control system (20) that controls the position of the imaging device (33).

[0329] According to the above configuration, the position-specific device (10) calculates the "feedback position (Pf) of the servo control system (20) that controls the position of the imaging device (33) at the detection time (Td)" by interpolation calculation from the "feedback position (Pf) of the servo control system (20) for each control period (Cc)."

[0330] Let n be an integer greater than or equal to 0, and for example, if the detection time (Td) is between the "n"th control cycle (Cc) and the "n+1"th control cycle (Cc), the position determining device (10) calculates the "feedback position (Pf) of the servo control system (20) at the detection time (Td)" as follows. That is, the position determining device (10) calculates the "feedback position (Pf) at the detection time (Td)" from the "feedback position (Pf) at the 'n'th control cycle (Cc)" and the "feedback position (Pf) at the 'n+1'th control cycle (Cc)" of the servo control system (20).

[0331] Accordingly, the position-specific device (10) has the effect of being able to calculate the "feedback position (Pf) of the servo control system (20) at the detection time (Td)" with high precision, even when the detection time (Td) is not an integer multiple of the control period (Cc), which is the communication period with the servo control system (20).

[0332] The position-specific device (10) outputs a command value (Cm) to each of the plurality of servo control systems (20) that are synchronized with one another, taking into account the response delay time (Ds) of each of the plurality of servo control systems (20). For example, the position-specific device (10) outputs a command value (Cm(A)) to the servo control system (20(A)), taking into account the response delay time (Ds(A)) of the servo control system (20(A)). Additionally, the position-specific device (10) outputs a command value (Cm(B)) to the servo control system (20(B)), taking into account the response delay time (Ds(B)) of the servo control system (20(B)).

[0333] According to the above configuration, the position-specific device (10) outputs a command value (Cm) to each of the plurality of servo control systems (20) synchronized with one another, taking into account the response delay time (Ds) of each of the plurality of servo control systems (20).

[0334] Accordingly, the position-specific device (10) controls a plurality of servo control systems (20) in a synchronized state, thereby enabling high-precision position control of the work (40).

[0335] In the control system (1), the imaging control device (32) (detection control device) controls the detection operation (specifically, the imaging operation) by the imaging device (33), and the imaging control device (32) performs communication with the communication device (31) (communication control device).

[0336] The position-specific device (10) specifies a detection instruction time (aTd) by correcting the detection time (Td) in the control signal (Cs) transmitted to the communication device (31) every control cycle (Cc), taking into account the response delay time (Dd) of the detection system (30) (the response delay time (Dd) of the imaging device (33)). By specifying the detection instruction time (aTd) in the control signal (Cs), the position-specific device (10) causes the communication device (31) to execute the output of a detection instruction to the imaging control device (32) at the detection instruction time (aTd). When the imaging control device (32) receives the detection instruction from the communication device (31), it transmits a detection trigger to the imaging device (33) and executes a detection operation (specifically, an imaging operation) on the imaging device (33).

[0337] According to the above configuration, the position determining device (10) calculates a detection indication time (aTd), which is a time corrected by the "response delay time (Dd) of the imaging device (33)" for the detection time (Td). Then, the position determining device (10) specifies the detection indication time (aTd) in the control signal (Cs) output to the communication device (31) every control cycle (Cc).

[0338] A communication device (31) that receives a control signal (Cs) transmits the detection instruction to an imaging control device (32) at the detection instruction time (aTd), and the imaging control device (32) that receives the detection instruction causes the imaging device (33) to detect the work (40). Therefore, the time at which the imaging device (33) detects the work (40) is delayed from the detection instruction time (aTd) by the response delay time (Dd) of the imaging device (33), that is, it becomes the detection time (Td).

[0339] Here, if detection is to be performed on the imaging device (33) without considering the response delay time (Dd) of the imaging device (33), the time at which the imaging device (33) actually performs detection is delayed by the response delay time (Dd) of the imaging device (33) from the time at which the imaging device (33) is instructed to perform detection.

[0340] Thus, the position determining device (10) calculates a detection indication time (aTd), which is a time corrected by the detection time (Td) by the response delay time (Dd) of the imaging device (33). Then, the position determining device (10) designates the detection indication time (aTd) as a time to instruct the imaging device (33) to execute detection.

[0341] Accordingly, the position-specific device (10) has the effect of enabling the imaging device (33) to perform detection at the detection time (Td) by specifying the detection indication time (aTd) that takes into account the response delay time (Dd) of the imaging device (33) in the control signal (Cs).

[0342] Additionally, the position-specific device (10) specifies a detection instruction time (aTd) in a control signal (Cs) transmitted at each control cycle (Cc), and for example, the position-specific device (10) specifies the detection instruction time (aTd) in a control signal (Cs) in a control cycle (Cc) prior to the detection instruction time (aTd).

[0343] Accordingly, the position-specific device (10) has the effect of being able to detect the work (40) at the detection time (Td) even when the detection time (aTd) is not an integer multiple of the control period (Cc) by specifying the detection time (aTd) in the control signal (Cs).

[0344] For the position-specific device (10), an imaging device (33) is used as a detection device capable of detecting the “amount of misalignment between the position (Pw) of the work (40) and the detection position (Pd).” The detection amount of misalignment calculation unit (1160) calculates the amount of detection of misalignment (Qd) from the amount of misalignment between the reference position (Rb) in the image (Im) captured by the imaging device (33) and the position (Pw) of the work (40) in the image (Im).

[0345] According to the above configuration, the position determining device (10) calculates a detected deviation amount (Qd) based on the deviation amount between the reference position (Rb) in the image (Im) and the position (Pw) of the work (40) in the image (Im). Then, the position determining device (10) determines the position (Pw) of the work (40) by correcting the detected position (Pd) based on the detected deviation amount (Qd).

[0346] Here, image analysis technology is known to determine the position of an image target (detection target) in an image at high speed and with high precision.

[0347] Accordingly, the position specification device (10) demonstrates the effect of being able to realize high-speed and high-precision position specification of the work (40) by means of the detection deviation amount (Qd) calculated at high speed and high precision from the captured image (Im) and the detection position (Pd).

[0348] In addition, as described above, at the detection time (Td), the position (Pw) of the work (40) and the position of the imaging device (33) coincide, or the amount of misalignment between the two becomes sufficiently small. Therefore, for example, when the center position of the image (Im) is set as the reference position (Rb), the work (40) is positioned almost in the center of the image (Im).

[0349] By using an image (Im) in which the work (40) is positioned near the center, the position determining device (10) can reduce the inspection area for determining the position (Pw) of the work (40) in the image (Im) compared to the case where an image is used in which the work (40) is not positioned near the center. Therefore, the position determining device (10) can realize high-speed image analysis processing required to detect the work (40) from the image (Im).

[0350] In addition, since the work (40) is positioned almost in the center of the captured image (Im), the position determining device (10) can increase the proportion of the area where the work (40) is captured in the entire captured image (Im) compared to a captured image where the work (40) is not positioned almost in the center. That is, the position determining device (10) can generate a captured image (Im) in which the work (40) is enlarged. Therefore, the position determining device (10) can perform high-precision image analysis on the captured image (Im) in which the work (40) is enlarged.

[0351] Accordingly, the position-specific device (10) demonstrates the effect of realizing high-speed and high-precision image analysis of the captured image (Im) and, by using the result of this image analysis, realizing high-speed and high-precision position control of the work (40).

[0352] The position determining device (10) sequentially determines the position (Pw) of each of the plurality of work (40), and, for example, after determining the position (Pw(1)) of the first work (40(1)) which is one of the plurality of work (40), performs the following processing when determining the position (Pw(2)) of the second work (40(2)). That is, the position determining device (10) calculates a reference displacement amount (Rd(12)) from the difference between (A) a first expected detection position (pPd(1)) where the first work (40(1)) should exist and (B) a second expected detection position (pPd(2)) where the second work (40(2)) should exist. And, the position-specific device (10) sets the position obtained by adding a reference displacement amount (Rd (12)) to the position (Pw (1)) of the first work (40 (1)) specified by the position-specific part (1180) as the second expected detection position (pPd' (2)) after correction.

[0353] The position determining device (10) sets the time at which it expects that the position of at least one of the second work (40(2)) and the imaging device (33) matches the second expected detection position (pPd'(2)) after correction as the detection time (Td'(2)) at which the second work (40(2)) is detected. Then, at the detection time (Td'(2)), the position determining device (10) generates an image (Im) of the second work (40(2)) in the imaging device (33).

[0354] According to the above configuration, the position determining device (10) calculates a reference displacement amount (Rd(12)) from the difference between the first expected detection position (pPd(1)) and the second expected detection position (pPd(2)). The position determining device (10) sets the position obtained by adding the calculated reference displacement amount (Rd(12)) to the position (Pw(1)) of the first work (40(1)) as the second expected detection position (pPd'(2)) after correction. Then, the position determining device (10) generates an image (Im) of the second detection target on the imaging device (33) at a time when it is expected that the position of at least one of the second work (40(2)) and the imaging device (33) matches the second expected detection position (pPd'(2)) after correction.

[0355] Accordingly, the position-specific device (10) has the effect of being able to predict with high precision the location where the next work (40) to be specified will exist by using the position (Pw) of the immediately preceding work (40) when specifying the position of each of the plurality of work (40).

[0356] For example, the difference between the actual position (Pw(1)) of the first work (40(1)) and the actual position (Pw(2)) of the second work (40(2)) is defined as the "actual displacement amount (Ad(12))". Furthermore, it is stated that the actual displacement amount (Ad(12)) is smaller than the reference displacement amount (Rd(12)) by the difference (dP). Additionally, the difference between the expected detection position (pPd(2)) and the "expected detection position (pPd(3)) of the third work (40(3)) whose position must be specified after the second work (40(2))" is defined as the "reference displacement amount (Rd(23))". Furthermore, the difference between the actual position (Pw(2)) of the second work (40(2)) and the actual position (Pw(3)) of the third work (40(3)) is defined as the "actual displacement amount (Ad(23))". And, with respect to the reference displacement amount (Rd(23)), the actual displacement amount (Ad(23)) is said to be smaller by the difference (dP).

[0357] Then, the actual position (Pw(3)) of the third work (40(3)) becomes smaller than the expected detection position (pPd(3)) of the third work (40(3)) by a difference (dP) of 2, i.e., 2dP.

[0358] In this regard, if the position obtained by adding a reference displacement amount (Rd(23)) to the actual position (Pw(2)) of the second work (40(2)) is defined as the third expected detection position (pPd'(3)) after correction, the following can be said regarding the third expected detection position (pPd'(3)) after correction. That is, the amount of deviation between the actual position (Pw(3)) of the third work (40(3)) and the third expected detection position (pPd'(3)) after correction is the difference (dP).

[0359] That is, compared to using the predicted detection position (pPd(3)), by using the corrected third predicted detection position (pPd'(3)) which is corrected by the actual position (Pw(2)) of the second work (40(2)), the prediction accuracy of the position (Pw(3)) of the third work (40(3)) can be improved.

[0360] §3. Example of Operation

[0361] (About the overall overview of the process)

[0362] FIG. 14 is a flowchart illustrating the overall overview of the processing performed by the position-specific device (10). As shown in FIG. 14, in the position-specific device (10), the detection time determination unit (1150) performs a detection instruction time determination process (S110). Then, the communication unit (1200) (specifically, the command unit (1210)) transmits the detection instruction time (aTd) determined by the detection instruction time determination process and the command value (Cm) generated by the command value generation unit (1140) (S120).

[0363] The communication unit (1200) (specifically, the control amount acquisition unit (1220)) receives the detection result of the detection system (30) (e.g., the captured image (Im)) and the control result of the servo control system (20) (e.g., the feedback position (Pf) for each control period (Cc)) (S130). Then, the control amount acquisition unit (1220) notifies the detection deviation amount calculation unit (1160) of the received detection result of the detection system (30), and also notifies the detection position calculation unit (1170) of the received control result of the servo control system (20).

[0364] The detection misalignment calculation unit (1160) performs a detection misalignment calculation process using the detection result of the detection system (30) (S140). Additionally, the detection position calculation unit (1170) performs a detection position calculation process using the control result of the servo control system (20) (S150).

[0365] The position specification part (1180) specifies the position (Pw) of the work (40) by correcting the detection position (Pd) calculated in S150 with the detection deviation amount (Qd) calculated in S140 (S160).

[0366] (Regarding the processing of determining the detection instruction time)

[0367] FIG. 15 is a flowchart illustrating an example of the detection instruction time determination process (S110) of FIG. 14. As shown in FIG. 15, the detection time determination unit (1150) first calculates a target position (Pt(t)) for each time point by considering the response delay time (Ds) of the servo control system (20) from the target trajectory (Tt) (S210). The detection time determination unit (1150) specifies the time point at which the "target position (Pt(t)) considering the response delay time (Ds) of the servo control system (20)" matches the expected detection position (pPd) as the detection time point (Td) (S220). The detection time determination unit (1150) determines a detection instruction time point (aTd) for the detection time point (Td) by considering the response delay time (Dd) of the detection system (30) (S230).

[0368] (Regarding the processing of detection deviation amount calculation and detection position calculation)

[0369] FIG. 16 is a flowchart illustrating examples of the detection deviation amount calculation process (S140) and the detection position calculation process (S150) of FIG. 14, respectively. Specifically, FIG. 16 (A) is a flowchart illustrating an example of the detection deviation amount calculation process, and FIG. 16 (B) is a flowchart illustrating an example of the detection position calculation process.

[0370] As illustrated in (A) of FIG. 16, the detection deviation amount calculation unit (1160) first performs image analysis on the captured image (Im) at the detection time (Td) to determine the position (Pw) of the work (40) (e.g., the center position of the work (40)) in the captured image (Im) (S310).

[0371] The detection misalignment calculation unit (1160) calculates the amount of misalignment (i.e., the amount of position misalignment within the image) between a specific “position (Pw) of the work (40) in the image (Im)” and a “reference position (Rb) corresponding to the detection position (Pd) in the image (Im) (e.g., the center point of the image (Im))” (S320).

[0372] The detection misalignment calculation unit (1160) calculates the detection misalignment amount (Qd), which is the “misalignment amount between the detection position (Pd) and the position (Pw) of the work (40),” from the misalignment amount calculated in S320 (S330).

[0373] As illustrated in (B) of FIG. 16, the detection position calculation unit (1170) first calculates the "feedback position (Pf) of the servo control system (20) at detection time (Td)" from the "feedback position (Pf) of the servo control system (20) at each control cycle (Cc)" (S410). The detection position calculation unit (1170) sets the calculated "feedback position (Pf) of the servo control system (20) at detection time (Td)" as the detection position (Pd) (S420).

[0374] The processing performed by the position-specific device (10) described so far using FIGS. 14 to 16 can be summarized as follows. That is, the control method performed by the position-specific device (10) is a control method of the position-specific device for specifying the position (Pw) of the work (40) to be detected. The control method includes a command step (S120), an acquisition step (S130), a detection deviation amount calculation step (S140), a detection position calculation step (S150), and a position-specific step (S160).

[0375] The command step outputs a command value (Cm) calculated from the target trajectory (Tt) to a servo control system (20) that controls the position of at least one of the imaging device (33) (detection device) and the work (40). The target trajectory (Tt) includes a pre-set expected detection position (pPd) as the "position where the work (40) should exist" as the target position (Pt).

[0376] The control amount acquisition step acquires an image (Im) which is the detection result of the imaging device (33) at the detection time (Td), which is the time during movement of at least one of the imaging device (33) and the work (40). The detection time (Td) is the time when the "target position (Pt) of the servo control system (20) calculated by considering the response delay time (Ds) of the servo control system (20)" matches the expected detection position (pPd).

[0377] As illustrated in (A) of FIG. 16, the step of calculating the detection deviation amount calculates the detection deviation amount (Qd), which is the deviation amount between the detection position (Pd) and the position (Pw) of the work (40), from the deviation amount between the reference position (Rb) and the position (Pw) of the work (40) in the image (Im).

[0378] As illustrated in (B) of FIG. 16, the detection position calculation step calculates the detection position (Pd) from the position of the imaging device (33) at the detection time (Td).

[0379] The position specification step specifies the position (Pw) of the work (40) by correcting the detection position (Pd) calculated by the detection position calculation unit (1170) with the detection deviation amount (Qd) calculated by the detection deviation amount calculation unit (1160).

[0380] According to the above configuration, the control method calculates a detection deviation amount (Qd), which is the amount of deviation between the detection position (Pd) and the position (Pw) of the work (40), from the captured image (Im). Additionally, the control method calculates the detection position (Pd) from the position of the imaging device (33) at the detection time (Td). Then, the control method determines the position (Pw) of the work (40) based on the detection deviation amount (Qd) and the detection position (Pd).

[0381] (High precision of position detection)

[0382] Therefore, the above control method has the effect of being able to determine the position (Pw) of the work (40) with high precision by using the amount of misalignment between the two, even when the position (Pw) of the work (40) and the detection position (Pd) do not match at the detection time (Td).

[0383] (High precision and high speed of detection results)

[0384] In addition, according to the above configuration, the control method calculates the detection deviation amount (Qd) from the image (Im) at the detection time (Td), which is the time when the target position (Pt) of the servo control system (20), calculated by considering the response delay time (Ds) of the servo control system (20), matches the expected detection position (pPd).

[0385] Here, at the timing when the imaging device (33) performs detection, if the work (40) is not present in the range where the imaging device (33) can detect the work (40), the detection deviation amount (Qd) cannot be calculated from the imaging image (Im).

[0386] Therefore, in order to avoid the situation where “at the timing when the imaging device (33) performs detection, the work (40) does not exist within the range where the imaging device (33) can detect the work (40),” the control method acquires an image (Im) at the detection time (Td).

[0387] For example, when the servo control system (20) moves only the imaging device (33) and the work (40) is not moved, and the work (40) is placed at a pre-expected detection position (pPd) or at a position sufficiently close to the expected detection position (pPd), the control method performs the following processing. That is, the control method sets the time when the target position (Pt) of the servo control system (20), calculated by considering the response delay time (Ds) of the servo control system (20) controlling the position of the imaging device (33), matches the expected detection position (pPd), as the detection time (Td).

[0388] Here, by considering the response delay time (Ds) of the servo control system (20), it is thought that the “target position (Pt) of the servo control system (20) at each time interval” will match the “feedback position (Pf) of the servo control system (20) at each time interval”, or that the amount of discrepancy between the two will be sufficiently small. Also, the feedback position (Pf) of the servo control system (20) that controls the position of the imaging device (33) can be considered as the position of the imaging device (33). Therefore, the “position of the imaging device (33) at each time interval” will match the “target position (Pt) of the servo control system (20) at each time interval calculated by considering the response delay time (Ds) of the servo control system (20) at each time interval”, or that the amount of discrepancy between the two will be sufficiently small.

[0389] As explained above, at the detection time (Td), the "position of the imaging device (33) moved by the servo control system (20)" and the expected detection position (pPd) will coincide, or the amount of misalignment between the two will be sufficiently small. Also, as previously described, the work (40) is placed in advance at the expected detection position (pPd) or at a position sufficiently close to the expected detection position (pPd). Therefore, at the detection time (Td), the "position of the imaging device (33) moved by the servo control system (20)" and the position (Pw) of the work (40) will coincide, or the amount of misalignment between the two will be sufficiently small.

[0390] As a result, the above control method can avoid the situation where “at the timing when the imaging device (33) performs detection, the work (40) is not present in the range where the imaging device (33) can detect the work (40).”

[0391] Additionally, for example, when the servo control system (20) moves only the work (40) and the imaging device (33) is not moved, and the imaging device (33) is placed at a pre-expected detection position (pPd) or is placed at a position sufficiently close to the expected detection position (pPd), the control method performs the following processing. That is, the control method sets the time at which the target position (Pt) of the servo control system (20), calculated by considering the response delay time (Ds) of the servo control system (20) controlling the position (Pw) of the work (40), matches the expected detection position (pPd) as the detection time (Td).

[0392] As described above, by taking into account the response delay time (Ds) of the servo control system (20), it is thought that the “target position (Pt) of the servo control system (20) at each time interval” will match the “feedback position (Pf) of the servo control system (20) at each time interval”, or that the amount of discrepancy between the two will be sufficiently small. Furthermore, the feedback position (Pf) of the servo control system (20) that controls the position (Pw) of the work (40) can be considered as the position (Pw) of the work (40). Therefore, the “position of the work (40) at each time interval” will match the “target position (Pt) of the servo control system (20) at each time interval calculated by taking into account the response delay time (Ds) of the servo control system (20) at each time interval”, or that the amount of discrepancy between the two will be sufficiently small.

[0393] As explained above, at the detection time (Td), the "position (Pw) of the work (40) moved by the servo control system (20)" and the expected detection position (pPd) will coincide, or the amount of discrepancy between the two will be sufficiently small. Also, as previously described, the imaging device (33) is placed in advance at the expected detection position (pPd) or at a position sufficiently close to the expected detection position (pPd). Therefore, at the detection time (Td), the "position (Pw) of the work (40) moved by the servo control system (20)" and the position of the imaging device (33) will coincide, or the amount of discrepancy between the two will be sufficiently small.

[0394] As a result, the above control method can avoid the situation where “at the timing when the imaging device (33) performs detection, the work (40) is not present in the range where the imaging device (33) can detect the work (40).”

[0395] Furthermore, for example, when the first servo control system (20(1)) moves the imaging device (33) and the second servo control system (20(2)) moves the work (40), the control method sets the following time as the detection time (Td). That is, the control method sets the time when the "each target position (Pt) calculated by considering the respective response delay time (Ds) of the first servo control system (20(1)) and the second servo control system (20(2))" coincides with the expected detection position (pPd) as the detection time (Td). At the detection time (Td), the "target position (Pt(1)) of the first servo control system (20(1)) calculated by considering the response delay time (Ds(1)) of the first servo control system (20(1))" coincides with the expected detection position (pPd). In addition, at the detection time (Td), the "target position (Pt(2)) of the second servo control system (20(2)) calculated by considering the response delay time (Ds(2)) of the second servo control system (20(2))" corresponds to the expected detection position (pPd).

[0396] As described above, by taking into account the response delay time (Ds) of the servo control system (20), the “target position (Pt) of the servo control system (20) at each time interval” is thought to match the “feedback position (Pf) of the servo control system (20) at each time interval”, or the amount of discrepancy between the two is thought to be sufficiently small.

[0397] Also, the feedback position (Pf(1)) of the first servo control system (20(1)) that controls the position of the imaging device (33) can be considered as the position of the imaging device (33). Additionally, the feedback position (Pf(2)) of the second servo control system (20(2)) that controls the position (Pw) of the work (40) can be considered as the position (Pw) of the work (40).

[0398] Therefore, the “position of the moving imaging device (33) at each time” will match the “target position (Pt(1)) at each time, calculated by taking into account the response delay time (Ds(1)) of the first servo control system (20(1))”, or the amount of deviation between the two will be sufficiently small. In addition, the “position of the moving work (40) at each time” will match the “target position (Pt(2)) at each time, calculated by taking into account the response delay time (Ds(2)) of the second servo control system (20(2))”, or the amount of deviation between the two will be sufficiently small.

[0399] As explained above, at the detection time (Td), the "position of the moving imaging device (33)," the "position (Pw) of the moving work (40)," and the expected detection position (pPd) will coincide, or the amount of deviation between the three will be sufficiently small.

[0400] As a result, the above control method can avoid the situation where “at the timing when the imaging device (33) performs detection, the work (40) is not present in the range where the imaging device (33) can detect the work (40).”

[0401] The above control method acquires an image (Im) at a detection time (Td) which is a time when at least one of the detection device and the work (40) is moving, and the position (Pw) of the work (40) and the position of the imaging device (33) coincide, or the amount of misalignment between the two becomes sufficiently small.

[0402] Here, since the position of the imaging device (33) at the detection time (Td) corresponds to the detection position (Pd), it is thought that the amount of deviation between the reference position (Rb) and the position (Pw) of the work (40) in the image (Im) at the detection time (Td) is sufficiently small. And, if it is known in advance that "the amount of deviation between the reference position (Rb) and the position (Pw) of the work (40) in the image (Im) is sufficiently small," the analysis of the image (Im) can be made more precise compared to the case where "the amount of deviation between the two in the image (Im) is unpredictable or predicted to be large."

[0403] Therefore, the above control method can acquire an "imaging image (Im) at detection time (Td)" capable of performing high-precision analysis, and, that is, can calculate the detection deviation amount (Qd) with high precision from the "imaging image (Im) at detection time (Td)".

[0404] Additionally, the above control method calculates the detection deviation amount (Qd) from the “image (Im) detected by the imaging device (33) while at least one of the work (40) and the imaging device (33) is moving.” Accordingly, the above control method can acquire the image (Im) at a high speed compared to the case where “the movement of the work (40) and the imaging device (33) is stopped and then detection is performed on the imaging device (33) to generate the image (Im),” and as a result, the calculation of the detection deviation amount (Qd) can be accelerated.

[0405] (High precision and high speed of location identification of detection targets)

[0406] As explained above, the control method can acquire an image (Im) capable of performing high-precision analysis at high speed and calculate a detection deviation amount (Qd) from the image (Im) at high speed and with high precision. Then, the control method determines the position (Pw) of the work (40) based on the calculated detection deviation amount (Qd) and the detection position (Pd).

[0407] Accordingly, the above control method has the effect of being able to determine the position (Pw) of the work (40) at high speed and with high precision.

[0408] §4. Variation Examples

[0409] Although an example has been described so far in which a position determining device (10) controls multiple servo control systems (20), the servo control system (20) controlled by the position determining device (10) may be only one. Also, although an example has been described so far in which a detection device that detects the “amount of misalignment between the position (Pw) of the work (40) and the detection position (Pd)” is an imaging device (33), it is not essential that the detection device be an imaging device (33). The position determining device (10) only needs to be able to obtain a detection result capable of calculating the “amount of misalignment between the position (Pw) of the work (40) and the detection position (Pd)” from a detection device capable of detecting the “amount of misalignment between the position (Pw) of the work (40) and the detection position (Pd).” Furthermore, although an example has been described so far in which the position determining device (10) moves the imaging device (33) to determine the position (Pw) of a fixed work (40), the object that the position determining device (10) moves does not have to be the imaging device (33). For example, the position determining device (10) may fix the position of the imaging device (33) and move the work (40) to determine the position (Pw) of the work (40), or it may move both the imaging device (33) and the work (40) to determine the position (Pw) of the work (40).

[0410] [Example of implementation by software]

[0411] The control block of the position-specific device (10) (in particular, the target trajectory acquisition unit (1110), the position command generation unit (1120), the response delay time calculation unit (1130), the command value generation unit (1140), the detection time determination unit (1150), the detection deviation amount calculation unit (1160), the detection position calculation unit (1170), the position-specific unit (1180), and the communication unit (1200)) may be realized by a logic circuit (hardware) formed in an integrated circuit (IC chip), etc., or may be realized by software.

[0412] In the latter case, the location-specific device (10) is equipped with a computer that executes instructions for a program, which is software that realizes each function. This computer is equipped with, for example, one or more processors and also has a computer-readable recording medium that stores the program. In the computer, the purpose of the present invention is achieved by the processor reading and executing the program from the recording medium. For example, a CPU (Central Processing Unit) may be used as the processor. As the recording medium, a "non-temporary type of medium," such as ROM (Read Only Memory), may be used, in addition to tape, disk, card, semiconductor memory, programmable logic circuit, etc. Additionally, a RAM (Random Access Memory) for deploying the program may be further equipped. Furthermore, the program may be supplied to the computer through any transmission medium capable of transmitting the program (such as a communication network or broadcast wave). Also, one embodiment of the present invention may be realized in the form of a data signal embedded in a carrier wave, which is implemented by electronic transmission.

[0413] The present invention is not limited to each of the embodiments described above, and various modifications are possible within the scope set forth in the claims. Furthermore, embodiments obtained by appropriately combining the technical means disclosed in each of the other embodiments are also included within the technical scope of the present invention. Explanation of the symbols

[0414] 10 Location-specific device 20 Servo Control System 30 detectors 31 Communication device (communication location specifying device) 32 Imaging control device (detection control device) 33 Imaging device (detection device) 40 works 1210 Command Center 1220 Control quantity acquisition unit (acquisition unit) 1160 Detection deviation amount calculation unit 1170 Detection position calculation unit 1180 Location Specific Part aTd detection indication time Cc control cycle Cm command value Cs control signal Response delay time of the Dd detector Ds response delay time of the servo control system Im imaging Pd detection location Pf feedback location pPd expected detection location Pt target location Qd detection deviation amount Rb reference position S130 acquisition stage S140 Detection deviation calculation step S150 Detection position calculation step S160 position specific step Td detection time Tt target orbit

Claims

Claim 1 A position-specific device for specifying the position of a detection target, comprising: a command unit that outputs a command value calculated from a target trajectory including a preset expected detection position as the position where the detection target is to exist as the target position, to a servo control system that controls the position of at least one of the detection device and the detection target; an acquisition unit that acquires a detection result of the detection device at a detection time, which is a time when at least one of the detection device and the detection target is moving, and the target position of the servo control system calculated by considering the response delay time of the servo control system matches the expected detection position; a detection deviation amount calculation unit that calculates a detection deviation amount, which is the amount of deviation between the position of the detection target and the detection position corresponding to the reference position, from the amount of deviation between the reference position and the position of the detection target in the detection result; and a detection position calculation unit that calculates the detection position from the position of the detection device at the detection time. A position specifying unit that specifies the position of a detection target by correcting the detection position by the detection deviation amount; and sequentially specifies the position of each of a plurality of detection targets, (A) calculates a reference displacement amount from the difference between a first expected detection position, which is a position where a first detection target, one of the plurality of detection targets, should exist, and (B) a second expected detection position, which is a position where a second detection target, which should be specified next to the first detection target, should exist, and sets the position obtained by adding the reference displacement amount to the position of the first detection target specified by the position specifying unit as the second expected detection position after correction, and determines the detection time for detecting the second detection target based on the second expected detection position after correction. Claim 2 A position-specific device according to claim 1, wherein communication is performed with the servo control system at each control cycle, and when the position of the detection device is controlled by the servo control system, the detection position calculation unit calculates the position of the detection device at the detection time by interpolation calculation from the feedback position at each control cycle of the servo control system controlling the position of the detection device. Claim 3 A position determining device according to claim 1 or claim 2, which outputs a command value to each of a plurality of servo control systems synchronized with one another, taking into account the response delay time of each of the plurality of servo control systems. Claim 4 A location-specific device according to claim 1 or claim 2, wherein a detection instruction time corrected by taking into account the response delay time of the detection device is specified in a control signal transmitted every control cycle to a communication control device communicating with a detection control device that controls a detection operation by the detection device, and thereby the communication control device executes the output of a detection instruction to the detection control device at the detection instruction time, thereby detecting the detection target in the detection device at the detection time. Claim 5 A position-specific device according to claim 1 or claim 2, wherein the detection device is an imaging device, and the detection deviation amount calculation unit calculates the detection deviation amount from the deviation amount between the reference position in the imaging image captured by the imaging device and the detection target in the imaging image. Claim 6 A position-specific device according to claim 1 or claim 2, wherein the time at which the position of at least one of the second detection target and the detection device is expected to match the second expected detection position after correction is determined as the detection time at which the second detection target is detected, and at the detection time at which the detection device generates the detection result regarding the second detection target. Claim 7 A control method for a position-specific device for specifying the position of a detection target, comprising: a command step of outputting a command value calculated from a target trajectory that includes a preset expected detection position as the position where the detection target is to exist as the target position, to a servo control system that controls the position of at least one of the detection device and the detection target; an acquisition step of acquiring a detection result of the detection device at a detection time, which is a time when at least one of the detection device and the detection target is moving, and the target position of the servo control system calculated by considering the response delay time of the servo control system matches the expected detection position; a detection misalignment amount calculation step of calculating a detection misalignment amount, which is the amount of misalignment between the detection position corresponding to the reference position and the position of the detection target, from the amount of misalignment between the reference position and the position of the detection target in the detection result; and a detection position calculation step of calculating the detection position from the position of the detection device at the detection time. A control method comprising: a position specification step of specifying the position of a detection target by a position specification part by correcting the detection position by the detection deviation amount; sequentially specifying the position of each of a plurality of detection targets; (A) calculating a reference displacement amount from the difference between a first expected detection position, which is a position where a first detection target, one of the plurality of detection targets, is to exist, and (B) a second expected detection position, which is a position where a second detection target, which is to be specified next to the first detection target, is to exist; setting the position obtained by adding the reference displacement amount to the position of the first detection target specified by the position specification part as the second expected detection position after correction; and determining the detection time for detecting the second detection target based on the second expected detection position after correction. Claim 8 An information processing program recorded on a non-transient computer-readable recording medium for enabling a computer to function as a location-specific device as described in claim 1 or claim 2. Claim 9 A computer-readable recording medium recording an information processing program as described in claim 8.

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