UV Excimer lamp for chamber degassing

Abstract

An excimer lamp for chamber degassing is disclosed. An excimer lamp for chamber degassing according to one aspect of the present invention may include: an excimer light-emitting part having a light-emitting element that generates ultraviolet rays; a holder having the excimer light-emitting part on one side and a terminal for connecting to the outside; a coupling part having to surround the outer circumference of the holder and extending outward from the vacuum chamber and having to contact a port that communicates with the inside and outside of the vacuum chamber along the extended longitudinal direction; and a fixing member for fixing the coupling part and the port.

Description

Technology Field

[0001] The present invention relates to an excimer lamp for chamber degassing, and more specifically, to an excimer lamp for chamber degassing that promotes degassing within a chamber. Background Technology

[0002] The manufacturing of semiconductor devices is generally carried out under strict control because it is necessary to maintain impurity concentrations at low levels. One potential source of impurities is the semiconductor wafer that must be processed. Therefore, it is widely known to perform a degassing procedure on the semiconductor wafer prior to one or more manufacturing process steps. For example, semiconductor device manufacturing processes frequently utilize techniques to deposit thin film layers of high-purity materials onto substrates. To ensure that the deposited film possesses the required properties, it is crucial to keep the process chamber free of contaminants during this process. Many standard industrial techniques, such as PVD and CVD, are performed under vacuum. Maintaining low pressure is important to minimize contamination of the deposited film.

[0003] Therefore, it is necessary to rapidly vacuum the chamber. To this end, gas inside the chamber is discharged using a vacuum pump or the like. In addition, it is necessary to remove not only gaseous gases but also moisture particles attached to the walls inside the chamber. A thermal desorption method is used to heat the chamber to degas moisture attached to the walls inside the chamber.

[0004] However, this thermal desorption method also requires a significant amount of time and consumes additional energy; above all, there is a problem in that its use is limited when the object being processed inside the chamber is sensitive to heat.

[0005] Therefore, there was a need to develop a degassing method that excludes this thermal desorption method and does not raise the temperature inside the chamber. The problem to be solved

[0006] The present invention aims to solve the above-mentioned problems, and the objective of the present invention is to provide an excimer lamp for chamber degassing that can achieve degassing more quickly while minimizing the temperature rise inside the chamber.

[0007] The problems of the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0008] According to one aspect of the present invention, an excimer lamp for chamber degassing is provided, comprising: an excimer light-emitting part having a light-emitting element that generates ultraviolet rays; a holder having the excimer light-emitting part on one side and a terminal for connecting to the outside; a coupling part having to surround the outer circumference of the holder and extending outward from the vacuum chamber and having to contact a port that communicates with the inside and outside of the vacuum chamber along the extended longitudinal direction; and a fixing member for fixing the coupling part and the port.

[0009] A first flange is formed at the end of the above-mentioned port, and the coupling portion comprises a cylindrical body that surrounds the outer circumference of the holder; and a second flange with a diameter wider than that of the cylindrical body may be formed at the end of the cylindrical body that contacts the coupling portion, so as to contact the flange of the above-mentioned port.

[0010] It may further include a cover coupled to the holder and surrounding the outer side of the excimer light-emitting part to protect the excimer light-emitting part.

[0011] The above fixing member may be a clamp that press-joins the first flange and the second flange.

[0012] With the above coupling part coupled to the port, the excimer light-emitting part or the cover may be located inside the vacuum chamber.

[0013] A first communication hole is formed on the side of the holder and communicates with the interior of the cylinder, and a ventilation groove is formed on the inner side of the cylinder, extending in the longitudinal direction of the cylinder so as to be spaced apart from the surface of the excimer light-emitting part, from a point facing the first communication hole to the end of the cylinder, so that the interior of the holder and the interior of the vacuum chamber are communicated through the first communication hole and the ventilation groove, thereby forming mutually equal pressure.

[0014] The ultraviolet light irradiated from the excimer light-emitting part above may have a wavelength of 172 nm or 222 nm. Effects of the invention

[0015] According to the above configuration, the excimer lamp for chamber degassing according to the present invention can achieve degassing within the chamber by simply mounting it in a port of the chamber and irradiating ultraviolet rays into the chamber, thereby having the effect of degassing the chamber while minimizing the temperature rise within the chamber.

[0016] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention. Brief explanation of the drawing

[0017] FIG. 1 is a drawing showing an excimer lamp for chamber degassing according to one embodiment of the present invention mounted in a chamber. FIG. 2 is a perspective view illustrating an excimer lamp for chamber degassing according to one embodiment of the present invention. FIG. 3 is a cross-sectional view of an excimer lamp for chamber degassing according to one embodiment of the present invention. FIG. 4 is a perspective view showing the cover of an excimer lamp for chamber degassing separated according to one embodiment of the present invention. FIG. 5 is a cross-sectional view illustrating the state in which an excimer lamp for chamber degassing according to one embodiment of the present invention is coupled to a port of the chamber. FIG. 6 is an exploded perspective view showing the coupling part and the fixing member of an excimer lamp for chamber degassing according to one embodiment of the present invention. FIG. 7 is a cross-sectional view of a coupling part and a fixing member of an excimer lamp for chamber degassing according to one embodiment of the present invention. FIG. 8 is a cross-sectional view of a holder and a coupling part of an excimer lamp for chamber degassing according to one embodiment of the present invention. FIG. 9 is a drawing illustrating pressure being transmitted through the first communication hole and the ventilation groove of an excimer lamp for chamber degassing according to one embodiment of the present invention. Specific details for implementing the invention

[0018] Hereinafter, embodiments of the present invention are described in detail with reference to the attached drawings so that those skilled in the art can easily implement the invention. The present invention may be embodied in various different forms and is not limited to the embodiments described herein. To clearly explain the present invention, parts unrelated to the description in the drawings have been omitted, and the same reference numerals have been used throughout the specification for identical or similar components.

[0019] The words and terms used in this specification and claims are not limited to their ordinary or dictionary meanings, but should be interpreted in a meaning and concept consistent with the technical spirit of the invention in accordance with the principles by which the inventor defines terms and concepts to best describe his invention.

[0020] Therefore, the embodiments described in this specification and the configurations illustrated in the drawings correspond to preferred embodiments of the present invention and do not represent all technical concepts of the present invention; thus, various equivalents and modifications that may replace such configurations may exist at the time of filing the present invention.

[0021] In this specification, terms such as “comprising” or “having” are intended to describe the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should not be understood as precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0022] The statement that a component is "in front," "rear," "upper," or "lower" of another component includes, unless there are special circumstances, not only being positioned "in front," "rear," "upper," or "lower" in direct contact with the other component, but also cases where another component is positioned in between. Furthermore, the statement that a component is "connected" to another component includes, unless there are special circumstances, not only being directly connected to each other, but also being indirectly connected to each other.

[0023] Hereinafter, an excimer lamp for chamber degassing according to one embodiment of the present invention will be described with reference to the drawings.

[0024] FIG. 1 is a drawing showing an excimer lamp (100) for chamber degassing according to one embodiment of the present invention mounted in a chamber (10).

[0025] As illustrated in FIG. 1, the excimer lamp (100) for chamber degassing according to the present embodiment can be coupled to a port (12) of a vacuum chamber (10).

[0026] A vacuum chamber (10) has a port (12) formed therein for communication with the outside and for mounting additional accessories. The port (12) is formed such that a tube extends outward from the chamber (10), and a first flange (14) extending radially is formed at the end of the extended tube.

[0027] Although not shown in the drawing, the first flange (14) may be optionally closed by mounting a cap or the like, or a necessary accessory may be mounted.

[0028] The excimer lamp (100) for chamber degassing according to the present embodiment may be mounted on the port (12) and configured to irradiate ultraviolet rays into the interior of the chamber (10).

[0029] FIG. 2 is a perspective view illustrating an excimer lamp (100) for chamber degassing according to one embodiment of the present invention, and FIG. 3 is a cross-sectional view of an excimer lamp (100) for chamber degassing according to one embodiment of the present invention.

[0030] The excimer lamp for chamber degassing according to the present embodiment may include an excimer light-emitting part (110), a holder (120), a coupling part (130), and a fixing member (170), as shown in FIGS. 2 and 3.

[0031] The excimer light-emitting unit (110) may be equipped with a light-emitting body that generates ultraviolet rays. Additionally, the holder (120) may have the excimer light-emitting unit (110) on one side and may be equipped with a terminal (122) for connecting to the outside.

[0032] In this embodiment, the excimer lamp (100) for chamber degassing is described as an example of an excimer ultraviolet lamp. However, the present invention is not necessarily limited to excimer ultraviolet lamps.

[0033] The above-mentioned light source is made of a transparent tube having an internal space, and gaseous elements such as krypton or xenon can be enclosed in the internal space. These elements receive energy applied from the holder (120) and transition to an excited state to form unstable excimer molecules, and ultraviolet light can be emitted while releasing energy.

[0034] In this embodiment, the excimer light-emitting part (110) is described as emitting excimer ultraviolet light with a wavelength of 172 nm to 222 nm. However, the present invention is not necessarily limited thereto, and ultraviolet light of other wavelengths may be irradiated.

[0035] Meanwhile, the coupling portion (130) is provided to surround the outer circumference of the holder (120) and may be provided to be in contact with a port (12) that is extended outward from the vacuum chamber (10) and has a port hole formed along the extended length direction through which the inside and outside of the vacuum chamber (10) communicate.

[0036] As described above, a first flange (14) is formed at the end of the port (12), and the coupling part (130) may include a cylindrical body (132) and a second flange (134).

[0037] The above cylindrical body (132) is formed to surround the outer circumference of the holder (120), and the second flange (134) may be formed to extend with a diameter wider than that of the cylindrical body (132) so as to contact the first flange (14) of the port (12) at the end that contacts the coupling part (130) of the cylindrical body (132).

[0038] At this time, the first flange (14) of the port (12) and the second flange (134) of the connecting part (130) can be formed with the same diameter.

[0039] Meanwhile, the excimer lamp for chamber degassing according to the present embodiment may further include a cover (180). As shown in FIGS. 3 and 4, the cover (180) is coupled to the holder (120) to surround the outer side of the excimer light-emitting part (110), thereby protecting the excimer light-emitting part (110) from adhering to foreign substances and protecting it from external impact. Additionally, the cover (180) may be made of a material that allows ultraviolet light to pass through.

[0040] In this embodiment, the cover (180) is described as being formed as a double-walled pipe structure. However, it is not necessary to form a double-walled pipe structure; it may be formed as a single-walled pipe structure, or it may be formed as a triple-walled pipe or higher structure.

[0041] At this time, with the excimer lamp (100) for chamber degassing coupled to the port (12), the length of the excimer light-emitting part (110) or the cover (180) can be adjusted so that the excimer light-emitting part (110) or the cover (180) is positioned inside the vacuum chamber (10).

[0042] Meanwhile, a fixing member (170) for fixing the coupling part (130) and the port (12) may be provided. The fixing member (170) may be a clamp that presses and connects the first flange (14) and the second flange (134). As shown in FIG. 6, the fixing member (170) may include a first arm (172) that forms part of an arc, a second arm (174) that forms the remainder of the arc and has one end hinged to the first arm (172), and a fastening member provided on the opposite side of the part where the first arm (172) and the second arm (174) are hinged to fasten the first arm (172) and the second arm (174) and press the first arm (172) and the second arm (174). The above fastening member may include a bolt (176) that penetrates the other end of the first arm (172) and the second arm (174), and a nut (178) that is fastened to the bolt (176) and compresses the other end of the first arm (172) and the second arm (174).

[0043] Meanwhile, as illustrated in FIGS. 6 and 7, a centering (140) may be positioned between the first flange (14) and the second flange (134). Additionally, an O-ring (150) may be positioned on the outer circumference of the centering (140) to seal the first flange (14) and the second flange (134). At this time, a first stepped portion (136) may be formed, in which a portion of the side of the centering (140) is received and seated, on the inner surface of the end where the first flange (14) of the port (12) is formed and on the inner surface of the end where the second inner surface of the cylindrical body (132) is formed.

[0044] Accordingly, the centering (140) can be fixed by being received in the first step portion (136) of the first flange (14) and the second flange (134). Additionally, the centering (140) may include a ring body and a rib (142). The ring body is in the form of a circular band located on the inner circumference of the first flange (14) and the second flange (134), and the rib (142) may be formed to protrude further outward from the diameter of the first flange (14) and the second flange (134) than the ring body, around one side and the other side of the ring body.

[0045] Accordingly, the outer surface of the ring body between the two ribs (142) is formed with a stepped seating surface (144) in the inner diameter direction of the first flange (14) and the second flange (134), and the O-ring (150) can be seated on the seating surface (144). At this time, both sides of the O-ring (150) are supported by contacting the ribs (142), thereby preventing detachment and movement.

[0046] Meanwhile, an outer ring (160) may be further provided. The outer ring (160) may be positioned on the holder (120) side (second flange (134) side) of the centering (140). Additionally, a second stepped portion (138) in which the outer ring (160) is positioned may be positioned on the holder (120) side of the first stepped portion (136) of the coupling portion (130). The width of the outer ring (160) may be adjusted so that it can compress the centering (140) according to the compression of the clamp.

[0047] That is, the wider the width of the outer ring (160), the stronger the compression force between the first flange (14) and the second flange (134) can be due to the compression of the clamp. Therefore, an outer ring (160) of an appropriate width can be selected depending on the conditions at the site.

[0048] Accordingly, mounting can be completed by fastening a clamp-shaped fixing member (170) while the second flange (134) of the coupling part (130) of the chamber degassing excimer lamp according to the present embodiment is inserted so as to be connected to the first flange (14) of the port (12) of the vacuum chamber (10).

[0049] Meanwhile, the interior of the vacuum chamber (10) is in a vacuum state, and the excimer light-emitting part (110) and cover are located inside the vacuum chamber (10). The excimer light-emitting part (110) and cover may be made of a brittle material such as glass for the transmission of ultraviolet light, and the holder (120) may also be made of a brittle ceramic material for electrical insulation. If the pressure inside the excimer light-emitting part (110), holder (120), and cover is different from the pressure inside the vacuum chamber (10), there is a risk that the excimer light-emitting part (110), holder (120), or cover may break due to the pressure difference during operation.

[0050] Accordingly, as shown in FIGS. 8 and 9, the excimer lamp (100) for chamber degassing according to the present embodiment may have a first communication hole (124) formed on the side of the holder (120) and a ventilation groove (139) formed on the inner circumference of the cylinder (132).

[0051] The first communication hole (124) is formed so that the interior of the holder (120) and the interior of the cylinder (132) are in communication, and the ventilation groove (139) is formed in a stepped manner from the inner side of the cylinder (132) toward the outside so as to be spaced apart from the surface of the excimer light-emitting part (110) on the inner side of the cylinder (132), and can be formed extending in the longitudinal direction of the cylinder (132).

[0052] At this time, the ventilation groove (139) can be formed from a point facing the first communication hole (124) to the end of the cylinder (132).

[0053] As shown in FIG. 9, a space may be formed on the inner circumference of the cylinder (132) through which pressure can be communicated through the space between the ventilation groove (139) and the excimer light-emitting part (110).

[0054] Additionally, the excimer light-emitting part (110) may be formed with an outer diameter smaller than the inner diameter of the centering (140) so that a space may be formed between it and the centering (140).

[0055] Accordingly, as shown in FIG. 9, the interior of the holder (120) can be connected to the interior of the vacuum chamber (10) through the first communication hole (124) and the ventilation groove (139), so that a pressure equal to the pressure inside the vacuum chamber (10) is formed, thereby preventing damage caused by a pressure difference.

[0057] When the excimer lamp (100) for chamber degassing of the present embodiment is mounted in the vacuum chamber (10) and excimer ultraviolet rays with a wavelength of 172 nm to 222 nm are irradiated into the vacuum chamber (10), the vaporization of water particles attached to the walls of the vacuum chamber (10) is promoted, thereby further promoting the degassing process.

[0058] According to papers such as "Degassing a vacuum system with in-situ UV radiation" published in *Journal of Vacuum Science & Technology: A Vacuum Surfaces and Films*, it is known that rapid degassing can be achieved by irradiating a vacuum system with ultraviolet light.

[0059] Although embodiments of the present invention have been described, the spirit of the present invention is not limited by the embodiments presented in this specification. Those skilled in the art who understand the spirit of the present invention may easily propose other embodiments within the scope of the same spirit by adding, changing, deleting, or adding components, and such are also to be considered to fall within the scope of the spirit of the present invention. Explanation of the symbols

[0060] 10: Chamber 12: Port 14: 1st flange 100: Lamp 110: Excimer light-emitting part 120: Holder 122: Terminal 130: Joint 132: Cylindrical body 134: Second flange 136: First stepped section 138: Second step section 140: Centering 142: Rib 144: Seating surface 150: O-ring 160: Outer ring 170: Fixed member 172: First arm 174: Second Arm 176: Bolt 178: Nut 180: Cover

Claims

Claim 1 An excimer light-emitting unit equipped with a light-emitting element that generates ultraviolet rays; a holder having the excimer light-emitting unit on one side and a terminal for connecting to the outside; a coupling unit provided to surround the outer circumference of the holder and extending outward from the vacuum chamber and provided to abut a port along the extended longitudinal direction through which the inside and outside of the vacuum chamber communicate; and a fixing member for fixing the coupling unit and the port; wherein a first flange is formed at the end of the port, and the coupling unit comprises a cylindrical body that surrounds the outer circumference of the holder; An excimer lamp for chamber degassing, comprising: a second flange formed with a diameter wider than that of the cylinder so as to be in contact with the first flange at the port-side end of the cylinder; wherein a first communication hole is formed on the side of the holder to be in communication with the interior of the cylinder, and a ventilation groove is formed on the inner surface of the cylinder from a point facing the first communication hole to the end of the cylinder, extending in the longitudinal direction of the cylinder so as to be spaced apart from the surface of the excimer light-emitting part, so as to be spaced apart from the surface of the excimer light-emitting part, and the interior of the holder and the interior of the vacuum chamber are in communication through the first communication hole and the ventilation groove to form mutually equal pressure. Claim 2 delete Claim 3 An excimer lamp for chamber degassing according to claim 1, further comprising: a cover coupled to the holder and surrounding the outer side of the excimer light-emitting part to protect the excimer light-emitting part. Claim 4 An excimer lamp for chamber degassing according to claim 1, wherein the fixing member is a clamp that press-connects the first flange and the second flange. Claim 5 An excimer lamp for chamber degassing according to paragraph 3, wherein, with the coupling portion coupled to the port, the excimer light-emitting portion or the cover is located inside the vacuum chamber. Claim 6 delete Claim 7 An excimer lamp for chamber degassing according to claim 1, wherein the ultraviolet light irradiated from the excimer light-emitting part has a wavelength of 172 nm or 222 nm.

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