Heaterjacket with built-in heaterjacket monitoring system based on Thermoelectric Generator module

Abstract

The present invention relates to a heater jacket monitoring system based on a thermoelectric generator module. It is a system that performs self-heating using the heat source of a heater jacket and illuminates an LED indicator using the generated power without an additional external power source. This allows for intuitive monitoring of the heater jacket's operating status and enables real-time status verification without a separate power supply.

Description

Technology Field

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[0002] The present invention relates to a heater jacket installed in pipes and valves, etc., of semiconductor equipment to maintain a constant temperature, and more specifically, to a heater jacket having a built-in monitoring system based on a Thermoelectric Generator module that generates power using heat generated by the heating of the heater jacket and displays the operating status of the heater jacket using the generated power. Background Technology

[65535] The present invention relates to a heater jacket used in vacuum piping, vacuum valves, and air valves equipped in semiconductor equipment. The heater jacket is applied for the purpose of preventing powder generated by the use of process gas from being deposited inside the piping or from clogging the piping. Multiple heater jackets are manufactured and installed depending on the length of the piping or the complex shape of the equipment. In this case, if any of the heater jackets is disconnected or loses function, blockage or pressure instability may occur within the section where the heater jacket is applied, which may affect the normal operation of the equipment. Accordingly, a monitoring system is applied to verify the operation of the heater jacket, and the user can check the operation status of the heater jacket in real time through the monitoring system. Conventional heater jacket monitoring systems generally utilize electronic devices or sensors that use external power to verify whether the heater jacket is operating normally. However, this method requires complex wiring work, increases maintenance costs, and has the drawback that the notification function does not operate properly in the event of a power supply problem. To solve the above problems, this invention proposes a monitoring system that utilizes the self-generated thermal energy generated by the heating of the heater jacket using a Thermoelectric Generator module. Accordingly, the operating status of the heater jacket can be checked without a separate external power supply, making installation and maintenance easier and improving the energy efficiency and ease of use of the heater jacket. The problem to be solved The objectives of the present invention are as follows: to provide a system that allows the operating status of a heater jacket to be visually recognized without an external power source; to enable an LED indicator to be driven without an additional power supply by converting the thermal energy of the heater jacket into electrical energy using a thermoelectric generator module; and to provide a structure that can be easily integrated into an existing heater jacket structure, making installation and maintenance simple. means of solving the problem The present invention aims to visually inform the user of the normal operation status of the heater jacket by utilizing a Thermoelectric Generator module to generate electricity independently without additional power supply or energy consumption, thereby illuminating an LED indicator connected to the module. The high-temperature side of the Thermoelectric Generator, which generates electricity using the temperature difference between the heating surface of the heater jacket and the external low-temperature environment, is attached to the surface of the heater jacket, while the low-temperature side is configured to protrude from the outside of the heater jacket by combining a thermal pad and aluminum cooling fins, allowing it to be cooled by natural convection. Since the voltage generated by the temperature difference between the high-temperature and low-temperature sides is minute, a low-voltage boost circuit is included to convert it into a voltage suitable for driving the LED indicator, and the LED indicator is illuminated by the voltage converted through the boost circuit. Through this, the user can monitor the heater jacket and maintain it in a normal state by replacing the heater jacket according to its condition. Effects of the invention The present invention provides the following effects. Installation and maintenance are simple as the operating status of the heater jacket can be visually checked without a separate external power source. Furthermore, by utilizing a Thermoelectric Generator module to convert the heater jacket's own thermal energy into electrical energy while maintaining the heater jacket's energy efficiency, the operating status can be checked in real time via an LED indicator without additional energy consumption. Brief explanation of the drawing FIG. 1 is a perspective view showing the configuration of a thermoelectric generator module. FIG. 2 is a perspective view showing the completed thermoelectric generator module. FIG. 3 is a cross-sectional view of a heater jacket with a built-in thermoelectric generator module. FIG. 4 is a perspective view showing the cut section of the heater jacket and the shape into which the thermoelectric generator module is inserted. FIG. 5 is a perspective view of a heater jacket with a built-in thermoelectric generator module-based heater jacket monitoring system. Specific details for implementing the invention

[0023] The configuration of the Thermoelectric Generator module of the present invention and the manufacturing process of a heater jacket equipped with a heater jacket monitoring system utilizing the same will be described in detail. Prior to describing the specific details, the following description of the content and drawings is intended to help understand the technical concept of the present invention along with the explanation of its structure and function, and should not be interpreted as being limited to the described details. The manufacturing process of the heater jacket is described. First, the designer designs a pattern suitable for the object to be heated and designates the location of auxiliary materials. The worker familiarizes themselves with this and performs the work according to the designer's instructions during the operation. An inner lining (11) that comes into direct contact with the object to be heated, such as the piping of semiconductor equipment, is provided. The inner lining (11) may typically be a heat-resistant PTFE fabric, or a fabric in which PTFE is coated on glass fiber, but is not limited to this as long as it is a heat-resistant fabric. A heating wire cloth (21) with a heating wire (20) sewn onto it is placed on the inner lining (11), and the heating wire (20) is covered with a glass braided cloth Nickel-chromium (Ni-Cr) wires are used. The arrangement of the heating wires (20) is selected according to the operating voltage and power of the heater jacket, and the spacing between the heating wires (20) is arranged to be regular, and the heating wires (20) are configured as a single circuit. This is to ensure that if a break occurs due to damage or a short circuit in any part of the heating wire (20), the heater jacket becomes inoperable. A THERMOSTAT for preventing overheating and fire is attached at a designated location to the heating wire CLOTH (21) to which the heating wires (20) are sewn, and the THERMOSTAT and the heating wire (20) are connected in series through terminals and are also connected to a power line (60) for external power supply. Additionally, a THERMOCOUPLE wire (61) for temperature control of the heater jacket is attached at a designated location. The power line (60) and the THERMOCOUPLE wire (61) penetrate the insulation material (40) and extend to the outside through an eyelet formed in the outer shell (50). It protrudes.An insulating sheet (30) for insulation is placed on the upper part of the heating wire CLOTH (21) and is fixed to the heating wire CLOTH (21) by basting stitches. Below, the method of use, structure, and configuration of the Thermoelectric Generator module (100) will be explained. The Thermoelectric Generator (70) is a device that converts thermal energy into electrical energy using the Seebeck Effect. The interior of the Thermoelectric Generator (70) is composed of thermoelectric elements, and the thermoelectric elements consist of pairs of p-type semiconductors and n-type semiconductors connected in series electrically and in parallel thermally. The Thermoelectric Generator (70) includes a high-temperature surface that absorbs thermal energy by contacting the heating part of the heater jacket, and a low-temperature surface where convective cooling occurs through cooling fins (72). Electricity is generated by charge transfer occurring within the p-type semiconductor and n-type semiconductor due to the temperature difference between the high-temperature surface and the low-temperature surface, and the amount of power generated increases as the temperature difference between the two surfaces increases. Through Thermoelectric Generation The generated voltage depends on the Seebeck coefficient and the temperature difference (ΔT). The voltage generated per unit temperature difference (1K) is determined by the characteristics of the material used in the thermoelectric element, and the Seebeck coefficient of bismuth telluride (Bi₂Te₃), the thermoelectric material used in this invention, is in the range of approximately 200 to 300 μV / K. n-type Bi₂Te₃ has a Seebeck coefficient of -100 to -250 μV / K, while p-type Bi₂Te₃ has a Seebeck coefficient of +150 to +300 μV / K. These values ​​may vary depending on temperature, doping level, crystal structure, etc., and generally fall within the range of approximately 300K at room temperature. For example, if the temperature of the high-temperature side of the heater jacket is 150°C (423K) and the temperature of the low-temperature side is 25°C (298K), the temperature difference (ΔT) between the two sides is 125K. It works.At this time, the generated voltage (V) is calculated as V = α × ΔT, and when α is 250 μV / K, the generated voltage becomes approximately 31.25 mV. Since the Thermoelectric Generator (70) has a structure in which multiple thermoelectric elements are connected in series, for example, when 100 thermoelectric elements are connected, the total output voltage becomes approximately 3.12 V. The generated voltage is a direct current (DC) voltage and includes a positive electrode (+) and a negative electrode (-). The high-temperature surface absorbs heat through the heating element of the heater jacket, and the low-temperature surface is formed to protrude outside the heater jacket through the thermal pad (71) and cooling fins (72) to be cooled by natural convection. The cooling fins (72) are formed of aluminum material and may have a porous structure or a structure with adjusted fin spacing to improve heat dissipation performance. Since the voltage generated by the Thermoelectric Generator (70) may be fine, a low-voltage booster is used to convert it into a voltage suitable for driving the LED indicator (90). A circuit (80) is included. The low-voltage boost circuit (80) includes a coil-based transformer having a winding ratio of 1:10 or 1:50, and a Pulse Width Modulation (PWM) method may be applied to minimize fluctuations in output voltage. The output terminal of the thermoelectric generator (70) is connected to the input terminal (VIN(+), GND(-)) of the low-voltage boost circuit (80), and the output terminal of the low-voltage boost circuit (80) is connected to an LED indicator (90). Depending on the output voltage, a 3.3V or 5V LED may be used for the LED indicator (90), and it may be configured in the form of a diode or a bar. Depending on the installation location of the LED indicator (90), additional wires may be added. All wires used in the thermoelectric generator module (100) are heat-resistant Teflon wires, and the low-voltage boost circuit (80) is built into a separately manufactured low-voltage boost circuit case (81).According to this configuration, a Thermoelectric Generator module (100) is completed, and the module (100) is placed on the upper surface of an insulating sheet (30). The module is secured by sewing a glass thread through the slot between the insulating sheet (30) and the cooling fin (72). An insulating material (40) is placed on the upper surface of the insulating sheet (30) to which the Thermoelectric Generator module (100) is attached. Typically, a glass mat or silica mat is used as the insulating material (40), and the thickness of the insulating material (40) may vary depending on the operating temperature of the heater jacket and the installation environment. In the area of ​​the insulating material (40) where the Thermoelectric Generator module (100) is placed, a cut corresponding to the shape of the module is formed for external protrusion to cool the low-temperature surface, and the cooling fin (72) protrudes outward through the cut. An outer shell (50) is placed on the upper surface of the insulating material (40), and the outer shell (50) also A cut corresponding to the shape of the module is formed in the section where the Thermoelectric Generator module (100) is located. The cooling fins (72) are cooled by natural convection in contact with the outside air. The exposed square corners of the side of the insulation material (40), which is cut to match the shape of the module, are finished by overcasting with the outer shell (50) fabric. As a result, the Thermoelectric Generator module (100) has a shape that protrudes outside the heater jacket. A cover (51) for fixing after mounting the heater jacket is sewn onto the outer shell (50), and a fixing Velcro (52) is sewn and fastened to the inner side of the cover (51) and the corresponding position on the outer shell (50). The outer shell (50) may be a heat-resistant PTFE fabric, may be a fabric coated with PTFE on glass fiber, or is not limited to this as long as it is a heat-resistant fabric. For external extraction of the power line (60) and the THERMOCOUPLE line (61), the outer shell (50) Eyelets are punched. The edges of the outer skin (50) and the inner skin (11) are finished by joining them together using hand sewing or a sewing machine.Through the above process, a heater jacket with a built-in heater jacket monitoring system utilizing a Thermoelectric Generator module (100) is completed.

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[0081] delete Explanation of the symbols

[0083] 11: Inner lining 20: Heating wire 21: Heating wire cloth 30: Insulation sheet 40: Thermal insulation 50: Outer lining 51: Cover 52: Fixing Velcro 60: Power cord 61: Thermocouple cord 70: Thermoelectric Generator 70a: Thermoelectric Generator positive (+) wire 70b: Thermoelectric Generator negative (-) wire 71: Thermal pad 72: Cooling fin 80: Low-voltage boost circuit 81: Low-voltage boost circuit case 90: LED indicator 100: Thermoelectric Generator module

Claims

Claim 1 A heater jacket mounted on the piping of semiconductor equipment to maintain a constant temperature through heating, comprising a structure in which an inner sheath, a heating wire, a heating wire cloth, an insulating sheet, an insulating material, and an outer sheath are sequentially laminated, and a thermoelectric generator disposed on the upper part of the insulating sheet inside the heater jacket to generate power by forming a temperature difference between a high-temperature surface and a low-temperature surface by the heat of the heater jacket; a thermal pad that contacts the low-temperature surface of the thermoelectric generator to promote heat dissipation; a cooling fin disposed on the upper part of the thermal pad to promote natural convection cooling of the low-temperature surface; a low-voltage boost circuit for boosting the voltage generated from the thermoelectric generator; and an LED indicator that is illuminated by the power boosted through the low-voltage boost circuit to visually display the operating status of the heater jacket, thereby enabling verification of the operating status of the heater jacket without an external power supply. Claim 2 A heater jacket according to claim 1, wherein the thermoelectric generator is made of a ceramic material and includes a high-temperature surface and a low-temperature surface, wherein the high-temperature surface absorbs heat from a heat-generating part of the heater jacket, and the low-temperature surface is configured to protrude outside the heater jacket through a thermal pad and cooling fins to be cooled by natural convection, and wherein electricity is generated through charge transfer between an internal p-type semiconductor and an n-type semiconductor due to the temperature difference between the high-temperature surface and the low-temperature surface, thereby driving an LED indicator without an additional power supply. Claim 3 A heater jacket according to claim 1 or claim 2, wherein an incision corresponding to the shape of the module is formed in the insulating material and outer shell at the location where the thermoelectric generator module is placed so that the cooling fins are exposed to the outside of the heater jacket, and the cooling fins are formed of aluminum material and arranged to allow natural convection cooling with the outside air. Claim 4 A heater jacket according to claim 1, characterized in that when heating is interrupted due to power cutoff, disconnection of the heating wire, or other abnormal conditions of the heater jacket, power generation of the Thermoelectric Generator is stopped and the LED indicator is automatically turned off, thereby allowing the user to visually recognize the operating status of the heater jacket.

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