Susceptor for a crossflow chemical vapor deposition reactor with external radiant heaters

KR301366954SActive Publication Date: 2026-10-13ASM IP HLDG BV
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Patent Information

Application Number
KR3020250043082
Authority / Receiving Office
KR · KR
Patent Type
Designs
Current Assignee / Owner
Priority Date
2025-04-29
Filing Date
2025-10-24
Publication Date
2026-10-13
Estimated Expiration
2045-10-24

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Description

Draw 15 The item that is the subject of the design Susceptor for a Cross-flow Chemical Vapor Deposition Reactor with External Radiant Heaters Description of the design The present design relates to a susceptor for a cross-flow chemical vapor deposition reactor equipped with an external radiant heater, and the attached drawings are as follows. 1. Drawing 1 is a front perspective view. 2. Drawing 2 is a rear perspective view. 3. Drawing 3 is a front view. 4. Drawing 4 is a rear view. 5. Drawing 5 is a left side view. 6. Drawing 6 is a right-side view. 7. Drawing 7 is a plan view. 8. Drawing 8 is a bottom view. Key points of the design creation The key point of this design creation is the combination of the shape and form of a "susceptor for a cross-flow chemical vapor deposition reactor equipped with an external radiant heater."