Inspection apparatus

Abstract

Apparatus for inspecting the tension of a tape (T) adhered to an annular frame (F) having, in the center thereof, an opening for accommodating a wafer (W) includes: a frame support section (24) that supports the annular frame (F), a light source (42) that applies light toward the tape (T), an imaging camera (52) that captures, through the tape (T), the light applied from the light source (42), a first polarizing plate (44) disposed between the tape (T) and the light source (42), and a second polarizing plate (54) disposed between the tape (T) and the imaging camera (52) and positioned so as to shield the light of linearly polarized light transmitted through the first polarizing plate (44). If distortion is generated in a polarization plane of the light due to application, onto the tape (T), of the light of the linearly polarized light transmitted through the first polarizing plate (44), the light is transmitted through the second polarizing plate (54), and the imaging camera (52) images the transmitted light.