Polishing composition, method for polishing substrate and method for producing substrate
MY214362AActive Publication Date: 2026-07-20FUJIMI INCORPORATED
0 Cites 0 Cited by
Patent Information
- Authority / Receiving Office
- MY · MY
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2021-09-28
- Publication Date
- 2026-07-20
Abstract
There is provided a polishing composition which is used for polishing a magnetic disk substrate and in which the amount of silica abrasive residues on an object to be polished is suppressed. The magnetic disk substrate polishing composition contains silica particles as abrasives, an acid, an oxidant and water. Here, in the polishing composition, a logarithm with base of an etching amount X [ng / h·mm2] of a soft steel plate measured in a soft steel etching test, in which the soft steel plate is immersed in the polishing composition, is 2.0 or more and 10 4.0 or less.
Need to check novelty before this filing date? Find Prior Art