Test device

Abstract

Disclosed is a test device (1) for testing electrical characteristics of an object-to-be-tested. The test device includes a test socket (10) comprising a probe configured to transmit a test signal to the object-to-be-tested, a pusher body (20) coupled to the test socket, a pusher unit (30) supported on the pusher body and pressing and releasing the object-to-be-tested and a heat shield cover (40) to perform shielding the pusher unit exposed to a top of the pusher body and releasing the shielding.

Description

TEST DEVICE

[0001] The disclosure relates to a test device for testing electrical characteristics of a semiconductor or the like object-to-be-tested.

[0002] In a process of manufacturing a semiconductor or the like electronic product, a test device for testing electrical characteristics of a finally fabricated electronic product is required. While testing the electronic product, heat is generated in the test device. In this case, the generated heat lowers the reliability of the test by raising resistance during the test, and causes product failure by short-circuiting an internal circuit. Therefore, fast heat dissipation is essential for testing a power semiconductor, a vehicle semiconductor and a system semiconductor.

[0003] Specific objects to be tested need to undergo a test for electrical characteristics under extreme environments. To this end, the test device includes a heating element or a cooling element to create extreme environments. The test device may be out of a set testing temperature as temperature is suddenly changed by the heating element or the cooling element. Meanwhile, hot or cold air may be introduced into a test chamber, in which a plurality of test devices is arranged, so that the test devices can rapidly reach a set temperature range. However, effects of the hot or cold air vary depending on locations in the test chamber, and therefore there is a problem that the plurality of test devices in the test chamber reach the set temperature at different times without simultaneously satisfying a set temperature condition.

[0004] An aspect of the disclosure is to provide a reliable test device.

[0005] According to an embodiment of the disclosure, a test device for testing electrical characteristics of an object-to-be-tested is provided. The test device includes a test socket comprising a probe configured to transmit a test signal to the object-to-be-tested, a pusher body coupled to the test socket, a pusher unit supported on the pusher body and pressing and releasing the object-to-be-tested, and a heat shield cover to perform shielding the pusher unit exposed to a top of the pusher body and releasing the shielding.

[0006] The pusher unit may comprise a pusher base comprising a pressing surface at a first side and a heat dissipating surface at a second side; and a heat sink provided on the heat dissipating surface of the pusher base and dissipating heat, and the heat shield cover performs shielding the heat sink exposed to the top of the pusher body and releasing the shielding.

[0007] The heat shield cover may comprise a plurality of cover blades coupled to one another to relatively rotate.

[0008] The one among the plurality of cover blades may comprise a stationary blade fixed to the top of the pusher body, and the others among the plurality of cover blade comprise a plurality of variable blades coupled by a shaft to be rotatably opened and closed with respect to the stationary blade.

[0009] The plurality of variable blades may comprise a first variable blade disposed above the stationary blade; and a second variable blade disposed above the first variable blade, the stationary blade may comprise a pair of first guide projections provided symmetrically with respect to the shaft at one side of a circumferential outer end portion on a top thereof, the first variable blade may comprise a pair of first guide grooves extended along a circumferential outer end portion on a bottom thereof and respectively accommodating the pair of first guide projections to be movable.

[0010] The first variable blade may comprise a pair of second guide projections provided symmetrically with respect to the shaft at one side of a circumferential outer end portion on a top thereof, and the second variable blade may comprise a pair of second guide grooves extended along a circumferential outer end portion on a bottom thereof and respectively accommodating the pair of second guide projections to be movable.

[0011] The plurality of cover blades may comprise a pair of fan-shaped shielding portion coupled symmetrically with respect to the shaft, and a pair of skirt portions bent and extended down from a circumferential outer end portion of the fan-shaped shielding portion and coming into contact with the top of the pusher body.

[0012] The stationary blade may comprise a pair of stopper protruding upward from a radial end portion of the top thereof and provided symmetrically with respect to the shaft.

[0013] In the test device of the present invention, a heat shield cover covering the heat sink of the pusher unit can be adjusted the opening and closing amount of the heat shield cover according to the position difference of a plurality of test devices disposed in a single test room. As a result, by correcting the temperature difference according to the position difference, the test can be performed under the same temperature conditions.

[0014] The above and / or other aspects will become apparent and more readily appreciated from the following description of embodiments, taken in conjunction with the accompanying drawings, in which:

[0015] FIG. 1 illustrates a closed state of a heat shield cover in a test device according to an embodiment of the disclosure.

[0016] FIG. 2 illustrates opened state of the heat shield cover in the test device of FIG. 1.

[0017] FIG. 3 is an exploded perspective view of the test device of FIG. 1 viewed from above.

[0018] FIG. 4 is an exploded perspective view of the test device of FIG. 1 viewed from below.

[0019] FIG. 5 is a perspective view illustrating that a heat shield cover of FIG. 1 is separated.

[0020] FIG. 6 is an exploded perspective view of the heat shield cover of FIG. 5 viewed from above.

[0021] FIG. 7 is an exploded perspective view of the heat shield cover of FIG. 5 viewed from below.

[0022] Below, embodiments of the disclosure will be described in detail with reference to the accompanying drawings. For convenience of description, only related parts are described for understanding of the disclosure by excluding parts not directly related to the disclosure from the drawings or the detailed description, and like numerals refer to like elements throughout.

[0023] Detailed descriptions obvious to a person having an ordinary skill in the art may not be disclosed. In the disclosure, terms, such as first, second, etc. are used to distinguish one element from another element, and actual relationship or order between them, but do not put meaning to actual relationship or order between them.

[0024] FIG. 1 illustrates a closed state of a heat shield cover 40 in a test device 1 according to an embodiment of the disclosure, FIG. 2 illustrates a closed {opened?} state of the heat shield cover 40 in the test device 1 of FIG. 1, FIG. 3 is an exploded perspective view of the test device 1 of FIG. 1 viewed from above, and FIG. 4 is an exploded perspective view of the test device 1 of FIG. 1 viewed from below.

[0025] Referring to FIGS. 1 to 4, the test device 1 includes a test socket 10, a pusher body 20, a pusher unit 30, the heat shield cover 40, a heater 50, and a temperature sensor 60.

[0026] The test socket 10 includes a socket frame 11, a probe supporter 12 mounted to the socket frame 11 and supporting a plurality of elastically retractable probes, and an insert 13 disposed on the probe supporter 12 and accommodating a semiconductor or the like electronic product (hereinafter, referred to as an "object-to-be-tested"). This test socket 10 is merely described as an example for description, and its structure is not limited to only the foregoing structure.

[0027] The test socket 10 includes a hinge pin 14 to which the pusher body 20 is hinged, and a lock 15 in which a latch 22 of the pusher body 20 (to be described later) is caught.

[0028] The object-to-be-tested includes a plurality of bumps or contact points to be tested, and may employ a laminated semiconductor like a package-on-package (POP) semiconductor. The object-to-be-tested is accommodated in the insert 13 so that its terminals can correspond to the probes supported by the probe supporter 12. The object-to-be-tested accommodated as above moves toward the corresponding probes as pushed by the pusher unit 30 (to be described later), and undergoes the test while its terminals are in contact with the probes.

[0029] The pusher body 20 is pivotally coupled to one side of the test socket 10 so as to open and close the top of the test socket 10, i.e., the insert 13. The pusher body 20 includes a hinge coupling portion 21 provided at one side, the latch 22 provided at the other side, and a control lever 23 for operating the pusher unit 30 at the test.

[0030] The pusher body 20 includes a pusher accommodating portion 25 to accommodate the pusher unit 30 in the middle thereof.

[0031] The pusher body 20 includes a holding pin 26 to hold and support the heat shield cover 40 on the top thereof.

[0032] The pusher unit 30 is accommodated and supported in the pusher accommodating portion 25 of the pusher body 20 to move toward and separate from the object-to-be-tested loaded into the insert 13 of the test socket 10.

[0033] The pusher unit 30 includes a pusher base 31 shaped like a plate, the pusher 32 provided on the bottom of the pusher base 31, and a heat sink 33 provided on the top of the pusher base 31.

[0034] The pusher 32 approaches and comes into contact with the object-to-be-tested to thereby press the object-to-be-tested during the test. In this case, the terminals of the object-to-be-tested can be in contact with the probes.

[0035] The heat sink 33 dissipates heat generated during the test and heat generated by the heater 50 to the outside, thereby controlling the temperature of the test socket 10.

[0036] The pusher unit 30 includes a heater accommodating portion 34 recessed horizontally inward from the lateral side of the pusher base 31 and accommodating the heater 50 therein.

[0037] The pusher unit 30 includes a sensor mounting portion 35 recessed vertically at the center thereof, to which the temperature sensor 60 is mounted.

[0038] The heat shield cover 40 is provided to shield the top of the heat sink 33, in other words, the top of the pusher accommodating portion 25. The heat shield cover 40 may operate at a closed position as shown in FIG. 1 or an opened position as shown in FIG. 2. In other words, the heat shield cover 40 may adjust the amount of heat dissipated from the test socket 10 according to opened / closed degrees.

[0039] The heater 50 heats the pusher unit 30 to satisfy a test temperature condition.

[0040] The temperature sensor 60 senses the temperature in the test socket 10.

[0041] FIG. 5 is a perspective view illustrating that the heat shield cover 40 of FIG. 1 is separated, FIG. 6 is an exploded perspective view of the heat shield cover 40 of FIG. 5 viewed from above, and FIG. 7 is an exploded perspective view of the heat shield cover 40 of FIG. 5 viewed from below.

[0042] Referring to FIGS. 5 to 7, the heat shield cover 40 includes a stationary blade 41, a first variable blade 42, and a second variable blade 43, which are coupled to one another by a shaft 44. The first variable blade 42 and the second variable blade 43 are coupled to the stationary blade 41 in order rotatably with respect to the shaft 44.

[0043] The stationary blade 41 is fixed to the top of the pusher body 20 by the holding pin 26. The stationary blade 41 includes first and second shielding portions 411 and 412 having first and second fan-shaped shields which are symmetry with respect to the shaft 44, and first and second skirt portions 413 and 414 bent and extended down from the radial outer ends of the first and second fan-shaped shields to form circumferential shielding walls which come into contact with the top of the pusher body 20.

[0044] The stationary blade 41 includes a first shaft hole 416, through which the shaft 44 passes, between the first and second fan-shaped shields.

[0045] The stationary blade 41 includes a first guide projection 417 protruding from the top of the first fan-shaped shield of a first shielding portion 411, and a second guide projection 418 protruding from the top of the second fan-shaped shield of a second shielding portion 412. The first and second guide projections 417 and 418 are symmetrically disposed with respect to the shaft 44.

[0046] The stationary blade 41 includes a first stopper 419-1 provided at one radial end portion of the first fan-shaped shield and restricting rotation of the first variable blade 42, and a second stopper 419-2 provided at the other radial end portion of the second fan-shaped shield and restricting rotation of the first variable blade 42. The first and second stoppers 419-1 and 419-2 are symmetrically disposed with respect to the shaft 44.

[0047] The first variable blade 42 is rotatably coupled to the first shaft hole 416 of the stationary blade 41 by the shaft 44. The first variable blade 42 includes third and fourth shielding portions 421 and 422 symmetrically provided with respect to the shaft 44 and respectively having third and fourth fan-shaped shields, and third and fourth skirt portion 423 and 424 bent and extended down from the radial outer ends of the third and fourth fan-shaped shields to respectively come into contact with the circumferential end surface of the stationary blade 41 and form circumferential shielding walls.

[0048] The first variable blade 42 includes a second shaft hole 426, through which the shaft 44 passes, between the third and fourth fan-shaped shields.

[0049] The first variable blade 42 includes a third guide projection 428 protruding from the top of the third fan-shaped shield of the third shielding portion 421, and a fourth guide projection 429 protruding from the top of the fourth fan-shaped shield of the fourth shielding portion 422. The third and fourth guide projections 428 and 429 are symmetrically disposed with respect to the shaft 44.

[0050] The first variable blade 42 includes a first guide groove 425 recessed from the bottom of the third fan-shaped shield of the third shielding portion 421 along the circumferential outer end portion thereof, and a second guide groove 427 recessed from the bottom of the fourth fan-shaped shield of the fourth shielding portion 422 along the circumferential outer end portion thereof. The first and second guide grooves 425 and 427 accommodate the first and second guide projections 417 and 418 of the stationary blade 41 to be movable, respectively.

[0051] The second variable blade 43 is rotatably coupled to the second shaft hole 426 of the first variable blade 42 by the shaft 44. The second variable blade 43 includes fifth and sixth shielding portions 431 and 432 having fifth and sixth fan-shaped shields provided symmetrically with respect to the shaft 44, and fifth and sixth skirt portions 433 and 434 bent and extended down from the radial outer ends of the fifth and sixth fan-shaped shields to respectively come into contact with the circumferential end portions of the first variable blade 42 and form the circumferential shielding walls.

[0052] The second variable blade 43 includes a shaft protrusion 436, into which the shaft 44 is accommodated and fastened, between the fifth and sixth fan-shaped shields. The shaft protrusion 436 is accommodated in the second shaft hole 426 of the first variable blade 42, and the first shaft hole 416 of the stationary blade 41. The stationary blade 41, the first variable blade 42 and the second variable blade 43 are coupled to one another by the shaft protrusion 436.

[0053] The second variable blade 43 includes a third guide groove 435 recessed from the bottom of the fifth fan-shaped shield of the fifth shielding portion 431 along the circumferential outer end portion thereof, and a fourth guide groove 437 recessed from the bottom of the sixth fan-shaped shield of the sixth shielding portion 432 along the circumferential outer end portion thereof. The third and fourth guide grooves 435 and 437 accommodate the third and fourth guide projections 428 and 429 of the first variable blade 42 to be movable, respectively.

[0054] As described above, in the test device according to an embodiment of the disclosure, the heat shield cover 40 adjusts a degree of exposing the heat sink 33 to the outside as the first variable blade 42 or the second variable blade 43 rotates with respect to the stationary blade 41 covering the heat sink 33. In result, the heat dissipation efficiency of the heat sink 33 is adjusted according to the exposed degrees.

[0055] In the test device according to the disclosure, the heat shield cover is provided to cover the heat sink of the pusher unit, and the opened / closed degree of the heat shield cover is controlled, thereby controlling an external temperature which affects the test device. In result, a plurality of test devices arranged in a single test chamber are adjusted in the opened / closed degrees of the heat shield covers according to their locations, so that the test can be carried out under the same temperature condition.

[0056] In the foregoing description, merits of the disclosure have been described with reference to specific embodiments. However, it will be obvious to a person having ordinary skill in the art that various modifications and changes can be made without departing from the scope of the disclosure defined in appended claims. Therefore, the descriptions and drawings need to be construed as an example of the disclosure rather than limitations of the disclosure. All such possible modifications should be made within the scope of the disclosure.

Claims

1.A test device for testing electrical characteristics of an object-to-be-tested, comprising:a test socket comprising a probe configured to transmit a test signal to the object-to-be-tested;a pusher body coupled to the test socket;a pusher unit supported on the pusher body and pressing and releasing the object-to-be-tested; anda heat shield cover to perform shielding the pusher unit exposed to a top of the pusher body and releasing the shielding.2.The test device according to claim 1, wherein the pusher unit comprises a pusher base comprising a pressing surface at a first side and a heat dissipating surface at a second side; and a heat sink provided on the heat dissipating surface of the pusher base and dissipating heat, andthe heat shield cover performs shielding the heat sink exposed to the top of the pusher body and releasing the shielding.3.The test device according to claim 1, wherein the heat shield cover comprises a plurality of cover blades coupled to one another to relatively rotate.4.The test device according to claim 3, wherein one among the plurality of cover blades comprises a stationary blade fixed to the top of the pusher body, andthe others among the plurality of cover blade comprise a plurality of variable blades coupled by a shaft to be rotatably opened and closed with respect to the stationary blade.5.The test device according to claim 4, wherein the plurality of variable blades comprises a first variable blade disposed above the stationary blade; and a second variable blade disposed above the first variable blade,the stationary blade comprises a pair of first guide projections provided symmetrically with respect to the shaft at one side of a circumferential outer end portion on a top thereof,the first variable blade comprises a pair of first guide grooves extended along a circumferential outer end portion on a bottom thereof and respectively accommodating the pair of first guide projections to be movable.6.The test device according to claim 5, wherein the first variable blade comprises a pair of second guide projections provided symmetrically with respect to the shaft at one side of a circumferential outer end portion on a top thereof, andthe second variable blade comprises a pair of second guide grooves extended along a circumferential outer end portion on a bottom thereof and respectively accommodating the pair of second guide projections to be movable.7.The test device according to claim 3, wherein the plurality of cover blades comprises a pair of fan-shaped shielding portion coupled symmetrically with respect to the shaft, and a pair of skirt portions bent and extended down from a circumferential outer end portion of the fan-shaped shielding portion and coming into contact with the top of the pusher body.8.The test device according to claim 4, wherein the stationary blade comprises a pair of stopper protruding upward from a radial end portion of the top thereof and provided symmetrically with respect to the shaft.