Surface acoustic wave sensor with interdigital electrode sensing platform

Abstract

There is provided a surface acoustic wave sensor for volatile organic compound sensing, comprising a piezoelectric substrate, a resonator in an electrode region on an upper surface of the piezoelectric substrate, a sensing platform in the center of the electrode region on the upper surface of the piezoelectric substrate and a plurality of reflectors in an edge region adjacent the electrode region on the upper surface of the piezoelectric substrate. The resonator comprises a plurality of interdigital transducer electrodes and interdigital transducer pads connected to the interdigital transducer electrodes, where the interdigital transducer electrodes are configured to generate a surface acoustic wave in the electrode region, the surface acoustic wave propagating in a horizontal direction. The sensing platform comprises an interdigital electrode and interdigital electrode pads connected to the interdigital transducer electrodes that interact with a target gas. The reflectors are configured to reflect the surface acoustic waves towards the interdigital transducers for resonance. Figure 1