Impedance-matched coaxial test socket

Abstract

A coaxial test socket (100) in a semiconductor device testing apparatus having at least one coaxial structure (430), each coaxial structure comprising an elongated signal pin (420) held near each of its ends by snug fitting dielectric support structures (240, 340). The dielectric support structures (240, 340) have been cured and machined, in-situ, from curable polymer injected into two cavities (220, 320), the cavities then joined during assembly to form an adjoined cavity (2200). An air gap (500) formed inside the adjoined cavity (2200), together with the dielectric support structures (240, 340), provide an impedance to the coaxial structure (430).