Wet process substrate clamping device

Abstract

ABSTRACT WET PROCESS SUBSTRATE CLAMPING DEVICE A wet process substrate clamping device having a first clamping plate (10), a second clamping plate (20), a supporting rod (30), and a compression spring (40) is provided. The first clamping plate (10) has a first clamping portion (11), a first groove (14), and two first pivoting portions (12) arranged between the first clamping portion (11) and the first groove (14) at interval. The second clamping plate (20) has a second clamping portion (21), a second groove (24), and a second pivoting portion (22) arranged between the first pivoting portions (12). The supporting rod (30) penetrates the first pivoting portions (12) and the second pivoting portion (22) to make the first and second clamping plate (10, 20) to rotate between a clamping position (P1) and a releasing position (P2). The first and second clamping plate (10, 20) rotate from the clamping position (P1) to the releasing position (P2) when pushed by an external force, the compression spring (40) pushes the first and second clamping plate (10, 20) to rotate to the clamping position (P1) when the external force is removed. Fig.6